Extraction suppression mechanism for ion implanters

Abstract

The invention discloses an extraction suppression mechanism for an ion implanter, comprising a main support, an X-axis transmission unit, the X-axis transmission unit is connected to a suppression electrode unit, a Y-axis transmission unit, the driving end of the Y-axis transmission unit is connected to the X-axis transmission unit, and the Y-axis transmission unit is used to drive the X-axis transmission unit to move along the Y-axis direction, a Z-axis transmission unit, the driving end of the Z-axis transmission unit is connected to the X-axis transmission unit, and the Z-axis transmission unit is used to drive the X-axis transmission unit to move along the Z-axis direction, and a deflection axis transmission unit, the deflection axis transmission unit is arranged on the main support, the driving end of the deflection axis transmission unit is connected to the X-axis transmission unit, and the deflection axis transmission unit is used to drive the X-axis transmission unit to deflect. The invention realizes precise control of the three-dimensional space of the ion beam by adding a deflection axis transmission unit to the existing three-axis transmission mechanism, and this high-precision control ensures that the ion beam can accurately reach the target position.

Description

Technical Field

[0001] The invention relates to the field of ion implanters, and in particular to an extraction suppression mechanism used in ion implanters. Background Art

[0002] Ion implantation is one of the common equipment in the field of semiconductor component manufacturing. Its main function is to manipulate doped ions through various electrical and magnetic devices and finally implant them into the substrate material to achieve material modification. With the development of science and technology, the importance of ion implantation in the semiconductor field has become more and more prominent. The energy of the implanted ions, the type of dopant, the doping depth, the implantation angle and other requirements have become more precise, and the design requirements of various ion implantation components have also become a greater challenge.

[0003] In the prior art, the patent document with application number: CN202310906582.9 discloses a beam shielding device and an ion implanter linked with an extraction electrode, the device comprising: an electrode connecting shaft connected to an extraction suppression electrode and a beam shielding assembly, the electrode connecting shaft being connected to a second pulley group through a ball screw, and the extraction suppression electrode being extended and retracted axially under the drive of a driving motor; a cam being connected to the electrode connecting shaft through a deflection assembly, the second servo motor driving the cam to drive the deflection assembly to rotate, and the electrode connecting shaft driving the extraction suppression electrode to rotate; a through hole is provided at the center of the mounting platform, and guide rail groups are symmetrically provided on both sides of the through hole, the guide rail group is connected to a sleeve seat, the first pulley group and the second pulley group are both arranged on the sleeve seat, the guide rail group is connected to the first servo motor through a ball screw and a third pulley group, the first servo motor drives the pulley group to drive the ball screw to operate, and the guide rail group drives the sleeve seat to realize horizontal movement of the extraction suppression electrode.

[0004] The ion implantation process requires precise control of ion parameters such as energy, dosage, and injection angle to ensure the desired doping concentration and distribution. However, existing ion implanters are only driven by a three-axis transmission mechanism and are unable to perform precise deflection control, which in turn leads to problems such as low beam guiding efficiency, ion source beam divergence, and easy short circuit of the ion source.

[0005] Therefore, it is necessary for us to improve such a structure to overcome the above-mentioned defects. Summary of the invention

[0006] The purpose of the present invention is to provide an extraction suppression mechanism for an ion implanter, which is used to solve the problems that the existing ion implanter lacks a suppressor adjustment structure and cannot perform precise deflection control, resulting in uneven doping, inaccurate depth or inaccurate distribution.

[0007] The above technical objectives of the present invention are achieved by the following technical solutions:

[0008] An extraction suppression mechanism for an ion implanter includes a main support, the main support is used to provide support and installation space, and also includes,

[0009] An X-axis transmission unit, the X-axis transmission unit is arranged on the main support, and the X-axis transmission unit is connected to the suppressor unit;

[0010] The Y-axis transmission unit is arranged on the main support, the driving end of the Y-axis transmission unit is connected to the X-axis transmission unit, and the Y-axis transmission unit is used to drive the X-axis transmission unit to move along the Y-axis direction;

[0011] A Z-axis transmission unit, which is arranged on the main support and is used to drive the X-axis transmission unit to move along the Z-axis direction;

[0012] The deflection axis transmission unit is arranged on the main bracket, the driving end of the deflection axis transmission unit is connected with the X-axis transmission unit, and the deflection axis transmission unit is used to drive the X-axis transmission unit to deflect.

[0013] The main bracket includes a support plate, and the support plate has an installation space;

[0014] A suppression electrode 1, the suppression electrode 1 is arranged on the support plate, and the suppression electrode 1 is used to suppress the current beam of the ion implanter to prevent the current beam from diverging;

[0015] A support column, wherein the first end of the support column is connected to the support plate, the second end of the support column is sleeved with a spindle slide plate, the spindle slide plate can move along the axial direction of the spindle, the spindle slide plate is used to provide an installation space for the X-axis transmission unit, and the first end of the X-axis transmission unit is penetrated on the spindle slide plate;

[0016] A protruding flange is arranged on the support plate, a through hole is provided on the protruding flange for the end of the X-axis transmission unit to pass through, and the other end of the X-axis transmission unit passes through the through hole to be connected with the suppressor unit;

[0017] The Y-axis limit plate is installed on the spindle slide plate. The Y-axis limit plate is used to limit the spindle slide plate. The Y-axis transmission unit is arranged on the main bracket through the Y-axis limit plate. The Y-axis transmission unit drives the spindle slide plate to move through the Y-axis limit plate, and drives the X-axis transmission unit arranged on the spindle slide plate to move synchronously;

[0018] The Z-axis transmission unit is arranged on the main bracket through the Y-axis limit plate, and the driving end of the Z-axis transmission unit drives the X-axis transmission unit to move along the Z-axis direction through the Y-axis limit plate;

[0019] Aviation plug: The aviation plug is integrated on the support plate, and the aviation socket is used to provide a power interface.

[0020] The present invention is further configured as follows: the X-axis transmission unit comprises:

[0021] A main bearing seat, a main shaft is arranged on the first end of the bearing seat, the first end of the main shaft is connected to the main bearing seat, a suppression joint is arranged on the second end of the main shaft, and the X-axis transmission unit is connected to the suppression pole unit through the suppression joint;

[0022] A sealing bellows, which is sleeved on the main shaft and located between the bearing seat and the suppression joint;

[0023] Coupling 1, coupling 1 is installed on the second end of the main bearing seat, the Z-axis linkage frame is connected to the main bearing seat through coupling 1, a Z-axis limit rod is installed on the Z-axis linkage frame, the X-axis transmission unit is connected to the Z-axis transmission unit through the Z-axis limit rod, the Z-axis limit rod is used for limiting, and the Z-axis transmission unit drives the X-axis transmission unit to move through the Z-axis limit rod;

[0024] A deflection sleeve is installed on the main bearing seat and has a positioning hole;

[0025] A deflection adjusting rod is arranged on the deflection sleeve through a positioning hole.

[0026] The present invention is further configured as follows: the suppressor unit comprises:

[0027] The suppression seat has an installation space, a second suppression electrode is installed on the suppression seat, and a first installation hole is opened on the suppression seat;

[0028] A stray flow baffle is provided with a second mounting hole matching the first mounting hole, and the stray flow baffle is matched with the first mounting hole through the second mounting hole and locked through a connecting piece.

[0029] The present invention is further configured as follows: the Y-axis transmission unit comprises:

[0030] A Y-direction linkage plate, on which a Y-direction coupling is arranged;

[0031] A Y-direction bearing seat, the Y-direction bearing seat is used to provide support and installation space, a transmission shaft 1 is arranged in the Y-direction bearing seat, and a transmission gear 1 is sleeved on the transmission shaft 1;

[0032] A Y-direction screw rod, wherein the first end of the Y-direction screw rod is connected to the Y-direction linkage plate through a Y-direction coupling, and the second end of the Y-direction screw rod is mounted on the Y-direction bearing seat;

[0033] Drive motor one, drive motor one is installed on the Y-axis bearing seat, and transmission gear two is installed on the output end of drive motor one, and transmission gear two is meshed with transmission gear one. Drive motor one transmits driving force to the transmission shaft through transmission gear one and transmission gear two, and drives the Y-axis lead screw to rotate.

[0034] The present invention is further configured as follows: the Z-axis transmission unit comprises:

[0035] A Z-direction bearing seat, the Z-direction bearing seat is used to provide support and installation space, a transmission shaft 2 is arranged in the Z-direction bearing seat, and a transmission gear 3 is sleeved on the transmission shaft 2;

[0036] A Z-direction screw rod, wherein the first end of the Z-direction screw rod is mounted on the Z-direction bearing seat, and the second end of the Z-direction screw rod is extended outward;

[0037] Drive motor two, drive motor two is installed on the Z-axis bearing seat, and transmission gear four is installed on the output end of drive motor two, transmission gear four is meshed with transmission gear three, and drive motor two transmits driving force to transmission shaft two through transmission gear three and transmission gear four, and drives the Z-axis screw rod to rotate.

[0038] The present invention is further configured as follows: the deflection axis transmission unit,

[0039] A deflection bracket, wherein a deflection coupling is arranged on the deflection bracket;

[0040] A deflection bearing seat, the deflection bearing seat is used to provide support and installation space, a transmission shaft 3 is arranged in the deflection bearing seat, and a transmission gear 5 is sleeved on the transmission shaft 3;

[0041] A deflection screw rod, wherein a first end of the deflection screw rod is connected to the Y-direction linkage plate through a deflection coupling, and a second end of the deflection screw rod is mounted on a deflection bearing seat;

[0042] Drive motor three, drive motor three is installed on the deflection bearing seat, and transmission gear six is ​​installed on the output end of drive motor three, transmission gear six is ​​meshed with transmission gear five, and drive motor three transmits driving force to transmission shaft three through transmission gear three and transmission gear three, and drives the deflection screw to rotate.

[0043] In summary, the present invention has the following beneficial effects:

[0044] 1. Deflection adjustment: a deflection axis transmission unit is provided, which can set the deflection angle of the deflection axis transmission unit according to the angle requirements of ion implantation, and drive the X-axis transmission unit through the drive motor 3 to achieve the required deflection angle, thus meeting the angle control requirements of ion implantation;

[0045] 2. High-precision three-dimensional control. The extraction suppressor mechanism realizes precise three-dimensional control of the ion beam. This high-precision control ensures that the ion beam can accurately reach the target position, thereby improving the accuracy and efficiency of ion implantation. It can accurately control the position and angle of the ion beam during the ion implantation process. BRIEF DESCRIPTION OF THE DRAWINGS

[0046] Figure 1 It is a three-dimensional structural schematic diagram of the present invention.

[0047] Figure 2 It is the front view of the present invention.

[0048] Figure 3 It is a side view of the present invention.

[0049] Figure 4 It is a top view of the present invention.

[0050] Figure 5 It is a structural diagram of the main bracket.

[0051] Figure 6 It is a cross-sectional view of the X-axis transmission unit.

[0052] Figure 7 It is a partial structural diagram of the X-axis transmission unit.

[0053] Figure 8 It is a structural diagram of the Y-axis transmission unit.

[0054] Fig. 9 It is a schematic diagram of the structure of the suppressor unit.

[0055] Fig.10 It is a cross-sectional view of the deflection axis transmission unit.

[0056] Numbers: main bracket 1, support plate 10, suppression electrode 11, support 12, spindle slide plate 13, protruding flange 14, Y-axis limit plate 15, aviation plug 16;

[0057] X-axis transmission unit 2, main bearing seat 21, suppression joint 22, sealing bellows 23, coupling 1 24, deflection sleeve 25, deflection adjustment rod 26;

[0058] Suppression electrode unit 3, suppression seat 31, stray current baffle 32, suppression electrode 2 33;

[0059] Y-axis transmission unit 4, Y-axis linkage plate 41, Y-axis bearing seat 42, Y-axis screw rod 43, transmission shaft 1 44, transmission gear 1 45, transmission gear 2 46, drive motor 1 47, Y-axis coupling 48, Z-axis transmission unit 5;

[0060] Deflection shaft transmission unit 6, deflection bracket 61, deflection coupling 62, deflection bearing seat 63, transmission shaft three 64, deflection screw rod 65, drive motor three 66. DETAILED DESCRIPTION

[0061] In order to make the technical means, creative features, objectives and effects achieved by the present invention easy to understand, the present invention is further described below in conjunction with diagrams and specific embodiments.

[0062] like Figures 1 to 10As shown, the extraction suppression mechanism for an ion implanter proposed by the present invention comprises a main support 1, the main support 1 is used to provide support and installation space,

[0063] X-axis transmission unit 2, the X-axis transmission unit 2 is arranged on the main support 1, the X-axis transmission unit 2 is connected to the suppressor unit 3, supports the suppressor, and allows it to move and deflect in three axial directions, ensuring that the suppressor can accurately reach the target position, and after being connected to the transmission unit, the movement and deflection are realized through the drive of the transmission unit;

[0064] The Y-axis transmission unit 4 is arranged on the main support 1. The driving end of the Y-axis transmission unit 4 is connected to the X-axis transmission unit 2. The Y-axis transmission unit 4 is used to drive the X-axis transmission unit 2 to move along the Y-axis direction. When in use, the moving speed and distance of the Y-axis transmission unit 4 are set, the transmission unit is started, and the X-axis transmission unit 2 is driven to move in the Y-axis direction;

[0065] Z-axis transmission unit 5, the Z-axis transmission unit 5 is arranged on the main support 1, the driving end of the Z-axis transmission unit 5 is connected to the X-axis transmission unit 2, and the Z-axis transmission unit 5 is used to drive the X-axis transmission unit 2 to move along the Z-axis direction; the Z-axis transmission unit 5 is arranged on the main support 1 through the Y-axis limit plate 15;

[0066] The deflection axis transmission unit 6 is arranged on the main support 1 , and the driving end of the deflection axis transmission unit 6 is connected to the X-axis transmission unit 2 . The deflection axis transmission unit 6 is used to drive the X-axis transmission unit 2 to deflect.

[0067] The main support 1 includes a support plate 10, and the support plate 10 has an installation space; a suppression electrode 11, which is arranged on the support plate 10, and the suppression electrode 11 is used to suppress the current beam of the ion implanter to prevent the current beam from diverging; a support 12, the first end of the support 12 is connected to the support plate 10, and the second end of the support 12 is sleeved with a spindle slide plate 13, the spindle slide plate 13 can move along the axial direction of the spindle, and the spindle slide plate 13 is used to provide an installation space for the X-axis transmission unit 2; a protruding flange 14, the protruding flange 14 is arranged on the support plate 10, and a protruding flange 14 is provided for the X-axis transmission The end of the moving unit 2 passes through the through hole, and one end of the X-axis transmission unit 2 passes through the through hole to be connected with the suppressor unit 3; the Y-axis limit plate 15, the Y-axis limit plate 15 is installed on the spindle slide plate 13, the Y-axis limit plate 15 is used to limit the spindle slide plate 13, the main bracket 1 is connected to the Y-axis transmission unit 4 through the Y-axis limit plate 15, the Y-axis transmission unit 4 drives the spindle slide plate 13 to move through the Y-axis limit plate 15, and drives the X-axis transmission unit 2 set on the spindle slide plate 13 to move synchronously; the aviation plug 16, the aviation plug 16 is integrated on the support plate 10, and the aviation socket is used to provide a power interface;

[0068] When in use, assemble the various components of the main support 1 according to the design requirements to ensure that the connections between the components are firm and reliable. Then, debug the equipment, including power supply access, debugging of the suppression electrode 11, testing of the Y-axis transmission unit 4, etc., to ensure that the equipment can operate normally. During the ion implantation process, the suppression electrode 11 will be used to prevent the current beam from diverging. At the same time, the Y-axis transmission unit 4 drives the spindle carriage plate 13 and the X-axis transmission unit 2 to move in the Y-axis direction through the Y-axis limit plate 15 to achieve precise control of the ion beam.

[0069] The X-axis transmission unit 2 includes a main bearing seat 21, a main shaft is arranged on the first end of the bearing seat, the first end of the main shaft is connected to the main bearing seat 21, a suppression joint 22 is arranged on the second end of the main shaft, and the X-axis transmission unit 2 is connected to the suppression pole unit 3 through the suppression joint 22; a sealing bellows 23, the sealing bellows 23 is sleeved on the main shaft, and the sealing bellows 23 is located between the bearing seat and the suppression joint 22; a coupling 24, the coupling 24 is installed on the second end of the main bearing seat 21, and the Z-axis is connected to the suppression pole unit 3. The moving frame is connected to the main bearing seat 21 through a coupling 24, a Z-axis limit rod is installed on the Z-axis linkage frame, the X-axis transmission unit 2 is connected to the Z-axis transmission unit 5 through the Z-axis limit rod, the Z-axis limit rod is used to limit, and the Z-axis transmission unit 5 drives the X-axis transmission unit 2 to move through the Z-axis limit rod; the deflection sleeve 25, the deflection sleeve 25 is installed on the main bearing seat 21, and a positioning hole is opened on the deflection sleeve 25; the deflection adjustment rod 26, the deflection adjustment rod 26 is passed through the positioning hole on the deflection sleeve 25.

[0070] The suppression electrode unit 3 includes a suppression seat 31, which has an installation space, a suppression electrode 2 33 is installed on the suppression seat 31, and a mounting hole 1 is opened on the suppression seat 31; a stray current baffle 32, which has a mounting hole 2 matching the mounting hole 1, and the stray current baffle 32 cooperates with the mounting hole 1 through the mounting hole 2 and is locked through a connecting piece.

[0071] The Y-axis transmission unit 4 includes a Y-axis linkage plate 41, on which a Y-axis coupling 48 is arranged; a Y-axis bearing seat 42, on which a support and installation space are provided, a transmission shaft 1 44 is arranged in the Y-axis bearing seat 42, and a transmission gear 1 45 is sleeved on the transmission shaft 1 44; a Y-axis screw rod 43, a first end of the Y-axis screw rod 43 is connected to the Y-axis linkage plate 41 through a Y-axis coupling 48, and a second end of the Y-axis screw rod 43 is mounted on the Y-axis bearing seat 42; a driving motor 1 47, which is mounted on the Y-axis bearing seat 42, and a transmission gear 2 46 is mounted on the output end of the driving motor 1 47, and the transmission gear 2 46 is meshed with the transmission gear 1 45, and the driving motor 1 47 transmits the driving force to the transmission shaft through the transmission gears 1 and 2, and drives the Y-axis screw rod 43 to rotate;

[0072] When in use, start the drive motor 47, which transmits the driving force to the Y-axis screw 43 through the transmission gear and drives it to rotate. The rotation of the Y-axis screw 43 drives the Y-axis linkage plate 41 to move, and then drives the X-axis transmission unit 2 to move in the Y-axis direction.

[0073] The Z-axis transmission unit 5 includes a Z-axis bearing seat, which is used to provide support and installation space, a transmission shaft 2 is arranged in the Z-axis bearing seat, and a transmission gear 3 is sleeved on the transmission shaft 2; a Z-axis screw, the first end of which is mounted on the Z-axis bearing seat, and the second end of which is extended outward; a drive motor 2, which is mounted on the Z-axis bearing seat, and a transmission gear 4 is mounted on the output end of the drive motor 2, which is meshed with the transmission gear 3, and the drive motor 2 transmits the driving force to the transmission shaft 2 through the transmission gear 3 and the transmission gear 4, and drives the Z-axis screw to rotate;

[0074] When in use, start the second drive motor, which transmits the driving force to the Z-axis screw rod through the transmission gear and drives it to rotate. The rotation of the Z-axis screw rod drives the X-axis transmission unit 2 to move in the Z-axis direction.

[0075] The deflection axis transmission unit 6 includes a deflection bracket 61, on which a deflection coupling 62 is arranged; a deflection bearing seat 63, which is used to provide support and installation space, and a transmission shaft three 64 is arranged in the deflection bearing seat 63, and a transmission gear five is sleeved on the transmission shaft three 63; a deflection screw rod 65, the first end of the deflection screw rod 65 is connected to the Y-direction linkage plate 41 through the deflection coupling, and the second end of the deflection screw rod 65 is installed on the deflection bearing seat; a drive motor three 66, which is installed on the deflection bearing seat, and a transmission gear six is ​​installed on the output end of the drive motor three 66, and the transmission gear six is ​​meshed with the transmission gear five. The drive motor three 66 transmits the driving force to the transmission shaft three through the transmission gear three and the transmission gear three, and drives the deflection screw rod 65 to rotate, and the deflection axis transmission unit 6 cooperates with the X-axis transmission unit 2 through the deflection adjustment rod 26.

[0076] The use principle of the present invention is as follows:

[0077] Through the coordinated movement of three axes, the extraction suppressor mechanism can be flexibly changed and adjusted according to production needs to adapt to different ion implantation processes and parameter requirements. The suppressor electrode 11 can effectively suppress the current beam divergence in the ion implanter and improve the accuracy and efficiency of ion implantation. At the same time, the design of the stray current baffle 32 further reduces the influence of stray current and improves the purity of ion implantation.

[0078] In summary, the extraction suppressor mechanism has high-precision control, high efficiency and flexibility, stability and reliability, and significant current beam suppression effect compared to the existing technology. These advantages make the extraction suppressor mechanism have broad application prospects and important technical value in the field of precision processing such as ion implantation.

[0079] In the description of the present invention, it should be noted that the terms "upper", "lower", "inner", "outer", "left", "right" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship in which the invention product is usually placed when in use, or the orientation or positional relationship commonly understood by those skilled in the art, which is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second" and the like are only used to distinguish the description, and cannot be understood as indicating or implying relative importance. In the description of the present invention, it should also be noted that, unless otherwise clearly specified and limited, the terms "set", "connection" and the like should be understood in a broad sense, for example, "connection" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or an indirect connection through an intermediate medium, or it can be a connection between the two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to the specific circumstances. In this document, the terms "comprises," "comprising," or any other variations thereof, are intended to cover a non-exclusive inclusion of elements other than those listed and may also include additional elements not expressly listed.

[0080] The above shows and describes the basic principles, main features and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The above embodiments and descriptions are only for explaining the principles of the present invention. The present invention may be subject to various changes and improvements without departing from the spirit and scope of the present invention. These changes and improvements fall within the scope of the present invention. The scope of protection of the present invention is defined by the attached claims and their equivalents.

Claims

1. An extraction suppression mechanism for an ion implanter, comprising a main support, the main support being used to provide support and installation space, characterized in that: Also includes, An X-axis transmission unit, the X-axis transmission unit is arranged on the main support, and the X-axis transmission unit is connected to the suppressor unit; The Y-axis transmission unit is arranged on the main support, the driving end of the Y-axis transmission unit is connected to the X-axis transmission unit, and the Y-axis transmission unit is used to drive the X-axis transmission unit to move along the Y-axis direction; A Z-axis transmission unit, which is arranged on the main support and is used to drive the X-axis transmission unit to move along the Z-axis direction; A deflection axis transmission unit, the deflection axis transmission unit is arranged on the main bracket, the driving end of the deflection axis transmission unit is connected to the X-axis transmission unit, the deflection axis transmission unit is used to drive the X-axis transmission unit to deflect, the deflection axis transmission unit includes a deflection bracket, and a deflection coupling is arranged on the deflection bracket; A deflection bearing seat, the deflection bearing seat is used to provide support and installation space, a transmission shaft 3 is arranged in the deflection bearing seat, and a transmission gear 5 is sleeved on the transmission shaft 3; A deflection screw rod, wherein a first end of the deflection screw rod is connected to the Y-direction linkage plate through a deflection coupling, and a second end of the deflection screw rod is mounted on a deflection bearing seat; Drive motor three, drive motor three is installed on the deflection bearing seat, and transmission gear six is ​​installed on the output end of drive motor three, transmission gear six is ​​meshed with transmission gear five, drive motor three transmits driving force to transmission shaft three through transmission gear three and transmission gear three, and drives the deflection screw rod to rotate; The main bracket includes a support plate, and the support plate has an installation space; A suppression electrode 1, the suppression electrode 1 is arranged on the support plate, and the suppression electrode 1 is used to suppress the current beam of the ion implanter to prevent the current beam from diverging; A support column, wherein the first end of the support column is connected to the support plate, the second end of the support column is sleeved with a spindle slide plate, the spindle slide plate can move along the axial direction of the spindle, the spindle slide plate is used to provide an installation space for the X-axis transmission unit, and the first end of the X-axis transmission unit is penetrated on the spindle slide plate; A protruding flange is arranged on the support plate, a through hole is provided on the protruding flange for the end of the X-axis transmission unit to pass through, and the other end of the X-axis transmission unit passes through the through hole to be connected with the suppressor unit; The Y-axis limit plate is installed on the spindle slide plate. The Y-axis limit plate is used to limit the spindle slide plate. The Y-axis transmission unit is arranged on the main bracket through the Y-axis limit plate. The Y-axis transmission unit drives the spindle slide plate to move through the Y-axis limit plate, and drives the X-axis transmission unit arranged on the spindle slide plate to move synchronously; The Z-axis transmission unit is arranged on the main bracket through the Y-axis limit plate, and the driving end of the Z-axis transmission unit drives the X-axis transmission unit to move along the Z-axis direction through the Y-axis limit plate; Aviation plug: The aviation plug is integrated on the support plate, and the aviation socket is used to provide a power interface.

2. The extraction suppression mechanism for an ion implanter according to claim 1, characterized in that: X-axis transmission unit includes: A main bearing seat, a main shaft is arranged on the first end of the bearing seat, the first end of the main shaft is connected to the main bearing seat, a suppression joint is arranged on the second end of the main shaft, and the X-axis transmission unit is connected to the suppression pole unit through the suppression joint; A sealing bellows, which is sleeved on the main shaft and located between the bearing seat and the suppression joint; Coupling 1, coupling 1 is installed on the second end of the main bearing seat, the Z-axis linkage frame is connected to the main bearing seat through coupling 1, a Z-axis limit rod is installed on the Z-axis linkage frame, the X-axis transmission unit is connected to the Z-axis transmission unit through the Z-axis limit rod, the Z-axis limit rod is used for limiting, and the Z-axis transmission unit drives the X-axis transmission unit to move through the Z-axis limit rod; A deflection sleeve is installed on the main bearing seat and has a positioning hole; A deflection adjusting rod is arranged on the deflection sleeve through a positioning hole.

3. The extraction suppression mechanism for an ion implanter according to claim 1, characterized in that: The suppressor unit includes: The suppression seat has an installation space, a second suppression electrode is installed on the suppression seat, and a first installation hole is opened on the suppression seat; A stray flow baffle is provided with a second mounting hole matching the first mounting hole, and the stray flow baffle is matched with the first mounting hole through the second mounting hole and locked through a connecting piece.

4. The extraction suppression mechanism for an ion implanter according to claim 1, characterized in that: The Y-axis transmission unit includes: A Y-direction linkage plate, on which a Y-direction coupling is arranged; A Y-direction bearing seat, the Y-direction bearing seat is used to provide support and installation space, a transmission shaft 1 is arranged in the Y-direction bearing seat, and a transmission gear 1 is sleeved on the transmission shaft 1; A Y-direction screw rod, wherein the first end of the Y-direction screw rod is connected to the Y-direction linkage plate through a Y-direction coupling, and the second end of the Y-direction screw rod is mounted on the Y-direction bearing seat; Drive motor one, drive motor one is installed on the Y-axis bearing seat, and transmission gear two is installed on the output end of drive motor one, and transmission gear two is meshed with transmission gear one. Drive motor one transmits driving force to the transmission shaft through transmission gear one and transmission gear two, and drives the Y-axis lead screw to rotate.

5. The extraction suppression mechanism for an ion implanter according to claim 1, characterized in that: The Z-axis transmission unit includes: A Z-direction bearing seat, the Z-direction bearing seat is used to provide support and installation space, a transmission shaft 2 is arranged in the Z-direction bearing seat, and a transmission gear 3 is sleeved on the transmission shaft 2; A Z-direction screw rod, wherein the first end of the Z-direction screw rod is mounted on the Z-direction bearing seat, and the second end of the Z-direction screw rod is extended outward; Drive motor two, drive motor two is installed on the Z-axis bearing seat, and transmission gear four is installed on the output end of drive motor two, transmission gear four is meshed with transmission gear three, and drive motor two transmits driving force to transmission shaft two through transmission gear three and transmission gear four, and drives the Z-axis screw rod to rotate.

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