Clamp for wafer-level optical element product

Abstract

The invention discloses a clamp for a wafer-level optical element product. The clamp comprises a supporting ring (1), a fixing claw (3) and a force unloading connecting mechanism (2), wherein the supporting ring (1) is used for carrying out outer ring suspension supporting on the product; the fixing claw (3) is used for clamping and fixing the edge of the product in a small area; the group of fixing claws (3) are distributed in the supporting ring (1) in a circle and are connected with the supporting ring (1) through the corresponding group of force unloading connecting mechanisms (2). According to the invention, an edge small-range clamping and suspension supporting mode is adopted, so that interference of a clamp on a product is avoided as much as possible, enough space is reserved for an optical element for testing, and the testing efficiency is improved. The optical element can be attached to the sample; moreover, the fixing claws are connected with the supporting ring through the corresponding force unloading connecting mechanisms, the force unloading connecting mechanisms help to clamp and fix the product, meanwhile, the force acting on the product in the thickness direction is reduced, wafer warping caused by machining errors is avoided, and the machining tolerance of the clamp is improved.

Description

Technical Field

[0001] The present invention relates to the field of wafer-level optics, and in particular to a fixture for wafer-level optical component products. Background Art

[0002] Wafer Level Optics (WLO) is an advanced technology that combines semiconductor manufacturing processes with optical design. It is mainly used to manufacture small, high-performance optical components. Different from traditional semiconductor products, the detection of this type of optical components is highly dependent on the measurement of transmitted light. In addition, this type of product is more sensitive to the stress applied to the wafer. It is particularly important to reduce the clamping area, reduce the shading area, and reduce the force applied to the wafer that causes the wafer to deform.

[0003] Existing wafer clamping devices are generally composed of two annular clamping rings with positioning grooves. The wafer is placed in the middle of the two clamping plates, and the two clamping plates and the wafer are fixed together by bolts / clamps; or a center support edge clamping solution is adopted, as shown in the application with publication number CN 102569154A, which includes a substrate, positioning columns, etc., and the wafer is clamped in the middle by the substrate with positioning columns on both sides.

[0004] Traditional solutions have a large area of ​​occlusion within the wafer range, and there is interference between optical components and fixtures, which cannot achieve good detection results; and a certain thickness will limit the light output angle of the device under test, affecting the detection of devices at the edge of the wafer or blocked devices. This limits the amount of devices that can be detected on a single wafer. In addition, traditional fixtures have high requirements for the processing flatness of the fixture. If the flatness of the fixture itself is low, there will be a force perpendicular to the wafer on the wafer, affecting the parallelism of the wafer, thereby affecting the optical performance of the device.

[0005] The above information disclosed in this Background section is included only for enhancement of understanding of the background of the present disclosure and therefore it may contain information that does not form the prior art that is currently known to a person of ordinary skill in the art. Summary of the invention

[0006] The technical problem to be solved by the present invention is to provide a fixture for wafer-level optical component products in response to the above-mentioned problems in the prior art such as large-area obstruction of optical products on the wafer, interference between detection optical elements and the fixture, limited light output angle, and influence on the parallelism of the wafer.

[0007] The technical solution adopted by the present invention to solve the technical problem is: construct a fixture for wafer-level optical component products, which is used to clamp the products for optical testing, and the fixture includes: a support ring for outer ring suspension support of the products, a fixing claw for clamping and fixing the edges of the products in a small area, and a force unloading connection mechanism for dispersing the force;

[0008] A group of the fixing claws are distributed in a circle inside the support ring, and are connected to the support ring through a corresponding group of the force-releasing connection mechanisms, and the force-releasing connection mechanisms can swing slightly in a first direction based on elastic deformation to achieve clamping and fixing of the product while reducing the force acting in the thickness direction of the product, so that the clamp can adaptively fit the product and prevent warping; wherein, the first direction refers to a direction perpendicular to the circumference of the support ring.

[0009] Furthermore, in the fixture of the wafer-level optical element product described in the present invention, the force unloading connection mechanism includes an arc-shaped force unloading beam connected to the inner side of the support ring at one end and connected to one of the fixed claws at the other end; the support ring and the force unloading beam connected thereto and the fixed claw are coplanar.

[0010] Furthermore, in the fixture for the wafer-level optical element product of the present invention, a plurality of notches are provided on the inner side of the support ring, and the plurality of notches correspond to the plurality of force-releasing connection mechanisms;

[0011] In which, the force unloading connection mechanism is composed of a single force unloading beam, the force unloading beam is located in the notch, the extension direction of the force unloading beam is consistent with the extension direction of the support ring, and the inner arc line of the force unloading beam is also continuous with the inner arc line of the support ring; or, the force unloading connection mechanism is composed of a pair of force unloading beams, a pair of the force unloading beams are arranged at the notch along the extension direction of the support ring, and the pair of the force unloading beams are also arranged opposite to each other and commonly connected to the same fixed claw.

[0012] Furthermore, in the fixture of the wafer-level optical element product described in the present invention, the force unloading connection mechanism is composed of a pair of force unloading beams, and the force unloading beams extend from the position connected to the support ring along the extension direction of the support ring or extend in a direction gradually deviating from the support ring, and the pair of force unloading beams extend to gradually get closer and the extended ends are commonly connected to the same fixed claw.

[0013] Furthermore, in the fixture of the wafer-level optical element product described in the present invention, the fixing claw is in a "human" shaped structure, the first end and the second end of the fixing claw are respectively connected and fixed to the extended ends of a pair of the force unloading beams, and the third end of the fixing claw is used to fix the edge of the product.

[0014] Furthermore, in the fixture for the wafer-level optical element product described in the present invention, a first reinforcing rib protrudes from the side of the fixing claw facing away from the product, the first end and the second end of the fixing claw are distributed on both sides of the first reinforcing rib and are symmetrical with respect to the first reinforcing rib, the first reinforcing rib also extends obliquely toward both sides of the first reinforcing rib near the third end to form a second reinforcing rib, and the second reinforcing rib is in a "V" shape with its opening facing the third end.

[0015] Furthermore, in the fixture for wafer-level optical component products described in the present invention, positioning columns and / or positioning edges for matching and contacting with product edges to position the product are also provided on the inner side of the support ring or the fixing claws.

[0016] Furthermore, in the fixture of the wafer-level optical element product described in the present invention, an auxiliary support device for supporting the support ring is also included, the auxiliary support device includes a main fixing rod and two auxiliary fixing rods, the main fixing rod is arranged parallel to the auxiliary fixing rods and the central axis is coplanar with the support ring;

[0017] The support ring is connected to a fixing seat at the outer side of the position corresponding to the positioning edge thereof, and the main fixing rod points to the center of the support ring and is detachably assembled and fixed to the fixing seat;

[0018] The outer side of the support ring also extends in opposite directions to form two symmetrical connecting arms, and the extending direction of the connecting arms is perpendicular to the extending direction of the main fixing rod. The two auxiliary fixing rods and the two connecting arms are detachably assembled and fixed, and the main fixing rod is located between the two auxiliary fixing rods and the three are flush with the farthest end of the support ring.

[0019] Furthermore, in the fixture for the wafer-level optical element product of the present invention, the number of the support rings is two, and each support ring is configured with a set of the force unloading connection mechanism and a set of the fixing claws;

[0020] The two support rings are assembled together in the first direction and then locked by a locking piece, and the first support ring is connected to the auxiliary support device; the two groups of force unloading connection mechanisms are assembled together in the first direction; the two groups of fixing claws are assembled together in the first direction, and a group of fixing claws corresponding to the first support ring are all protrudingly provided with positioning columns for abutting against the side of the product, and all the positioning columns jointly hold the circumferential side wall of the product to position the product, and a group of fixing claws corresponding to the second support ring are provided with positioning holes that cooperate with the positioning columns.

[0021] Furthermore, in the fixture for the wafer-level optical element product described in the present invention, the number of the support rings is one, and the support ring is equipped with a group of the force-releasing connection mechanism and a group of the fixing claws. The group of the fixing claws configured by the support ring is also combined with another group of the fixing claws to form a clamp-shaped structure to fix the product. One group of the fixing claws configured by the support ring is protrudingly provided with positioning columns for abutting against the side of the product, and the other group of the fixing claws is provided with positioning holes that cooperate with the positioning columns. The two groups of the fixing claws are assembled based on the alignment of the positioning columns and the positioning holes and are fastened by locking members.

[0022] The fixture for wafer-level optical element products of the present invention has the following beneficial effects: the present invention utilizes a support ring to perform outer ring suspension support on the product, and utilizes a plurality of fixed claws distributed in a circle inside the support ring to clamp and fix the edge of the product in a small area. In this way, a small-range clamping of the edge is adopted to avoid interference of the fixture with the product as much as possible, and sufficient space is reserved for optical elements used for testing, so that the optical elements can be close to the sample; and these fixed claws are each connected to the support ring through a corresponding force unloading connection mechanism, and the force unloading connection mechanism can swing slightly in a direction perpendicular to the plane of the support ring based on elastic deformation, so as to achieve clamping and fixing of the product while reducing the force acting on the thickness direction of the product, so that the fixture can be adaptively fitted, avoid wafer warping caused by processing errors, and improve the processing tolerance of the fixture. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art are briefly introduced below. Obviously, the drawings in the following description are only embodiments of the present invention. For those of ordinary skill in the art, other drawings can be obtained based on the provided drawings without creative work:

[0024] Figure 1 is an exploded view of a clamp according to Embodiment 1 of the present invention;

[0025] Figure 2 is a schematic diagram of a clamp fixing a product according to the first embodiment of the present invention;

[0026] Figure 3 is an exploded view of a clamp according to a second embodiment of the present invention;

[0027] Figure 4 is a schematic diagram of a clamp fixing a product according to a second embodiment of the present invention;

[0028] Figure 5 is an exploded view of a clamp according to Embodiment 3 of the present invention;

[0029] Figure 6is a schematic diagram of a clamp fixing a product according to a third embodiment of the present invention;

[0030] Figure 7 is a schematic structural diagram of a fixed claw of the clamp in the third embodiment;

[0031] Among them, the reference numerals in the figure are:

[0032] 1. Support ring; 2. Unloading connection mechanism; 3. Fixing claw; 11. Positioning edge; 31. Positioning column; 32. Positioning hole; 4. Main fixing rod; 5. Auxiliary fixing rod; 6 Connecting head; 100. Product; 3a. First end of the fixing claw; 3b. Second end of the fixing claw; 3c. Third end of the fixing claw; 33. First reinforcing rib; 34. Second reinforcing rib. DETAILED DESCRIPTION

[0033] In order to facilitate the understanding of the present invention, the present invention will be described more fully below with reference to the relevant drawings. Typical embodiments of the present invention are shown in the drawings. However, the present invention can be implemented in many different forms and is not limited to the embodiments described herein. On the contrary, the purpose of providing these embodiments is to make the disclosure of the present invention more thorough and comprehensive. It should be understood that the embodiments of the present invention and the specific features in the embodiments are detailed descriptions of the technical solutions of the present application, rather than limitations on the technical solutions of the present application. In the absence of conflict, the embodiments of the present invention and the technical features in the embodiments can be combined with each other.

[0034] Embodiment 1

[0035] refer to Figure 1-2 The fixture of the wafer-level optical element product 100 of the present invention is used to clamp the product 100 for optical testing. The fixture of this embodiment includes: a support ring 1, a fixed claw 3, and a force unloading connection mechanism 2. The support ring 1 is used to perform outer ring suspension support on the product. The fixed claw 3 is used to fix the edge of the product, and the force unloading connection mechanism 2 is used to connect the support ring 1 and the fixed claw 3. The general idea of ​​the present invention is to use the support ring 1 to perform outer ring suspension support on the product 100, and use a small number of fixed claws 3 to clamp and fix the edge of the product 100 in a small area, and connect the fixed claw 3 and the support ring 1 through the force unloading connection mechanism 2 to disperse the force, so as to achieve adaptive clamping of the product 100 and make the product 100 more stable.

[0036] refer to Figure 2 , the product 100 is suspended and fixed inside the support ring 1, the shape of the support ring 1 is consistent with that of the product 100, but the size is larger than that of the product 100, for example, in this embodiment, the product 10 is circular, the support ring 1 is annular, and the inner diameter of the support ring 1 is larger than the outer diameter of the product 100. It can be understood that the shape of the product 100 is not limited to the circular shape shown in this embodiment, and can also be other non-circular shapes, such as rectangular, square, etc.

[0037] A group of the fixed claws 3 are evenly / symmetrically distributed in a circle inside the support ring 1. In this embodiment, there are 4 fixed claws 3. Of course, the number of fixed claws 3 is not limited and can be adjusted according to actual product requirements. The arrangement trend of the fixed claws 3 inside the support ring 1 can be designed to be consistent with the trend of the support ring 1. For example, if the support ring 1 is circular, the fixed claws 3 are arranged in a circle in a circle. When the number of fixed claws 3 is large, especially when the product is non-circular, the fixed claws 3 can be arranged in this way to ensure stable clamping as much as possible.

[0038] In this embodiment, in order to improve the processing tolerance of the clamp and avoid product warping, a group of the fixed claws 3 inside the support ring 1 is configured with a group of the force-releasing connection mechanisms 2. The fixed claws 3 inside the support ring 1 are each connected to the support ring 1 through a corresponding one of the force-releasing connection mechanisms 2. The support ring 1 and the force-releasing beam and the fixed claws 3 connected thereto are coplanar, and the three can be integrally formed. The force-releasing connection mechanism 2 can swing slightly in the first direction based on elastic deformation to achieve clamping and fixing of the product while reducing the force acting in the thickness direction of the product, so that the clamp can adaptively fit the product and prevent warping. Among them, the first direction refers to the direction perpendicular to the circumference of the support ring 1, that is, the thickness direction of the product 100 after the clamp clamps the product 100.

[0039] In this embodiment, the fixing claw 3 is roughly in the shape of a disc and is coplanar with the support ring 1. Of course, the shape of the fixing claw 3 is not limited thereto, as long as it can achieve a small area to clamp the product. The side of the fixing claw 3 in contact with the product 100 is protrudingly provided with a positioning column 31, and the position of each positioning column 31 must meet the following conditions: a group of positioning columns 31 on the fixing claw 3 inside the support ring 1 can just hold the circumferential side wall of the product 100 together to position the product 100.

[0040] Theoretically, the unloading connection mechanism 2 can be a beam of different shapes, or combined with a spring mechanism, and it only needs to connect the support ring 1 and the fixed claw 3, and based on the elastic deformation, it can slightly swing in the first direction to reduce the force of bending the wafer. In this embodiment, it is preferred that each of the unloading connection mechanisms 2 includes a single arc-shaped unloading beam connected to the inner side of the support ring 1 at one end and connected to one of the fixed claws 3 at the other end, and the unloading beam, the fixed claw 3, and the support ring 1 are coplanar. Specifically, a plurality of slender arc-shaped notches along the extension direction of the support ring 1 are provided on the inner side of the support ring 1, and the plurality of notches correspond to the plurality of unloading connection mechanisms 2. The unloading beam is located in the notch, one end of the unloading beam is integrally connected to the extension starting end of the notch, the other end of the unloading beam is integrally connected to the fixing claw 3, the extension direction of the unloading beam is consistent with the extension direction of the support ring 1, and the inner arc line of the unloading beam is also continuous with the inner arc line of the support ring 1, so that the elasticity of the unloading beam in the thickness direction of the product 100 can be improved, and the force in the planar direction of the product 100 can be minimized.

[0041] After the product 100 is positioned and held tightly by the positioning column 31, in order to fix the product more firmly, in this embodiment, each fixing claw 3 is also configured with a fixing claw 3 assembled therewith. Specifically, in this embodiment, the number of the support rings 1 is two, and each support ring 1 is configured with a set of the force-releasing connection mechanism 2 and a set of the fixing claws 3. The two support rings 1 have the same shape and size, except that one of the support rings 1 needs to be connected to an auxiliary support device. The force-releasing connection mechanism 2 and the fixing claws 3 connected to the two support rings 1 have the same shape and size, except that the fixing claws 3 on the support ring 1 connected to the auxiliary support device are protrudingly provided with positioning columns 31 for abutting against the side of the product, and all the positioning columns 31 hold the circumferential side wall of the product together to position the product, and the fixing claws 3 corresponding to the other support ring 1 are provided with positioning holes 32 that cooperate with the positioning columns 31. The two support rings 1 are assembled together in the first direction and locked by a locking piece, the two groups of the force unloading connection mechanisms 2 are assembled together in the first direction, the two groups of the fixing claws 3 are assembled together in the first direction and the positioning column 31 is inserted into the positioning hole 32.

[0042] It should be noted that in most cases, the wafer will have a positioning edge or a positioning groove as an identification feature to indicate the direction and certain characteristics of the wafer. Generally, a four-inch wafer uses a positioning edge, and an eight-inch wafer uses a positioning groove. The circumferential side wall of the product 100 in this embodiment has a positioning edge, that is, the product 100 is not a complete circle, but has a straight cut edge as a positioning edge. Therefore, accordingly, the inner side of the support ring 1 in this embodiment is also provided with a positioning edge 11 that matches and contacts the positioning edge of the product. In other embodiments, the positioning edge 11 may also be provided on the fixing claw 3.

[0043] It should be noted that, although the positioning column 31 is provided on the surface of the fixing claw 3 and protrudes from the plane of the fixing claw 3 in this embodiment, in other embodiments, the positioning column 31 may also be provided on the support ring 1 and placed on the inner side of the support ring 1. The positioning column 31 may also be replaced by the positioning edge 11 for different wafers or different wafer placement orientations.

[0044] In this embodiment, the auxiliary support device includes a main fixing rod 4 and two auxiliary fixing rods 5. The main fixing rod 4 and the auxiliary fixing rods 5 are arranged in parallel, and the central axes of the three are coplanar with the diameter of the support ring 1. The two auxiliary fixing rods 5 are relatively long, and the main fixing rod 4 is relatively short and is located between the two auxiliary fixing rods 5.

[0045] The support ring 1 is connected to a fixing seat 12 on the outer side of the position corresponding to the positioning edge 11 thereof, and the main fixing rod 4 points to the center of the support ring 1 and is detachably assembled and fixed with the fixing seat 12. For example, the two can be plugged in and then locked by screws, or the two can be directly connected by threads, and the specific connection method is not limited.

[0046] The outer side of the support ring 1 also extends in opposite directions to form two symmetrical connecting arms 13, the extending direction of the connecting arms 13 is perpendicular to the extending direction of the main fixing rod 4, and the two auxiliary fixing rods 5 are detachably assembled and fixed with the two connecting arms 13 through two connecting heads 6. For example, a pair of fixing ears can be provided on the connecting head 6, and the connecting arm 13 is inserted between the pair of fixing ears of the connecting head 6 and locked by bolts, and the connecting head 6 and the auxiliary fixing rod 5 are locked by screws after plugging or the two are directly connected by threads.

[0047] The main fixing rod 4 is located between the two auxiliary fixing rods 5 and the three are flush with the end away from the support ring 1. The flush here can be understood as the ends of the three away from the support ring 1 are in a straight line, and the straight line is perpendicular to the extension direction of the three. Because the auxiliary support device does not block the light path, the product 100 can be stood up vertically for testing (of course, it can also be placed horizontally for testing, or even tilted), and the positioning edge 11 supports the bottom of the product, which can reduce the burden on other fixing claws 3.

[0048] In this embodiment, the fixing claws 3 inside the support ring 1 are symmetrically distributed on both sides of the first diameter of the support ring 1, and are also symmetrically distributed on both sides of the second diameter of the support ring 1. The first diameter refers to the diameter that is colinear with the main fixing rod 4, and the second diameter is perpendicular to the first diameter. The two connecting arms 13 are also symmetrically distributed on both sides of the first diameter, and the two connecting arms 13 and the fixing seat 12 are distributed on both sides of the second diameter. If the position corresponding to the support ring 1 and the fixing seat 12 is recorded as the bottom, the two connecting arms 13 are as close to the top of the support ring 1 as possible.

[0049] Of course, the auxiliary support device of this embodiment is only an example, and other structural designs can also be used to achieve the purpose of stably supporting the wafer, as long as the auxiliary support device avoids the internal area of ​​the support ring 1, that is, the projection of the auxiliary support device on the plane of the support ring 1 avoids the interior of the support ring 1 and falls into the outside of the support ring 1.

[0050] This embodiment can realize the optical testing of wafers with micro-nano optical elements or other wafers that require similar optical testing. In combination with the auxiliary support device, the wafer can be stably erected to perform optical testing on each device or area. This embodiment adopts the structure of the outer ring suspension support of the external support ring 1 and the finger-shaped clamping scheme of the internal fixed claw 3, which reduces the shielding area of ​​the wafer surface, can effectively reduce the interference between the test optical elements and the shielding of the optical path of the optical component being tested, can increase the number of devices that can be processed and tested on a single wafer, and can make the test device as close to the device as possible, thereby improving the accuracy of the test. Moreover, this embodiment adopts a force unloading connection mechanism 2 to connect, while fixing the wafer, unloading the force applied to the wafer to make it bend, reducing the requirements for the processing flatness and parallelism of the device, ensuring that when the processing flatness and parallelism are low, there is less interference with the warping degree of the wafer itself, ensuring the accuracy of the optical test. In view of this, the fixture of the present invention has low requirements for the processing raw materials, and can be any material with a certain structural rigidity, but the surface can be processed to be smooth and not scratch the wafer, such as commonly used materials: steel, aluminum alloy, Teflon, synthetic resin, etc.

[0051] Embodiment 2

[0052] refer to Figure 3-4In the first embodiment, the outer ring support ring 1 has two pieces and is aligned and spliced ​​together, the force unloading connection mechanism 2 is two groups, and the fixed claws 3 are two groups. However, in this embodiment, there is only one support ring 1, and the corresponding force unloading connection mechanism 2 only needs one group. There are two groups of fixed claws 3, and the two groups of fixed claws 3 are also spliced. The first group of fixed claws 3 is still connected to the support ring 1 through the force unloading connection mechanism 2. The first group of fixed claws 3 are protrudingly provided with positioning columns 31, and the second group of fixed claws 3 are provided with positioning holes matching the positioning columns 31. The difference is that in the design of the single-piece support ring 1 of this embodiment, because the second group of fixed claws 3 have no support ring 1 and the force unloading connection mechanism 2 to attach, it is considered to design the fastening point of the second group of fixed claws 3 on the first group of fixed claws 3 or at the connection between the first group of fixed claws 3 and the force unloading connection mechanism 2. For example, in this embodiment, two groups of fixed claws 3 are integrally spliced ​​and locked to form a clamp-shaped structure to fix the edge of the product. In this embodiment, after the second set of fixing claws 3 are positioned and assembled with the first set of fixing claws 3 through the positioning columns 31 and the positioning holes 32 , they are fastened to the first set of fixing claws 3 through locking members (such as screws).

[0053] Embodiment 3

[0054] refer to Figure 5-6 , this embodiment is the same as the second embodiment, and also has only one support ring 1, one set of unloading connection mechanism 2, and two sets of fixing claws 3. Different from the previous two embodiments, the unloading connection mechanism 2 in this embodiment is composed of a pair of unloading beams, and the pair of unloading beams are arranged along the extension direction of the support ring 1 at the notch, and the pair of unloading beams are also arranged opposite to each other and are connected to the same fixing claw 3. Of course, it can be understood that for the solution that the unloading connection mechanism 2 is composed of a pair of unloading beams, two support rings 1, two sets of unloading connection mechanisms 2, and two sets of fixing claws 3 can also be configured with reference to the first embodiment.

[0055] Specifically, in this embodiment, the notch of the support ring 1 also extends along the extension direction of the support ring 1. In this embodiment, the first end of the first unloading beam is integrally connected to the extension starting end of the notch of the support ring 1, and the first end of the second unloading beam is integrally connected to the extension ending end of the notch of the support ring 1. The two unloading beams extend from the position where they are connected to the notch in a direction gradually deviating from the support ring 1 (in other embodiments, they may also extend along the extension direction of the support ring 1). The two unloading beams extend until they gradually approach each other in an "eight" shape. The second ends of the two unloading beams (i.e., the extension ends of the unloading beams mentioned in this article) are commonly connected to the same fixing claw 3, which is coplanar with the two unloading beams and also has a positioning column 31 protruding from the surface. The other fixing claw 3 spliced ​​with the fixing claw 3 is provided with a positioning hole 32. The two fixing claws 3 are positioned and spliced ​​by the positioning column 31 and the positioning hole 32 and then locked by a locking member.

[0056] Preferably, reference Figure 7 In this embodiment, the fixing claw 3 is in a herringbone structure, and the first end 3a and the second end 3b of the fixing claw 3 are respectively connected and fixed to a pair of extended ends of the unloading beam, which can be integrally connected, or a slot can be provided at the edge of the first end 3a and the second end 3b of the fixing claw 3, so that the extended ends of the unloading beam are inserted into the slot and fixed by a locking member. The third end 3c of the fixing claw 3 is used to fix the edge of the product 100.

[0057] Further preferably, a first reinforcing rib that crosses the entire surface of the fixing claw 3 is protruded from the side of the fixing claw 3 that is away from the product, and the first end 3a and the second end 3b of the fixing claw 3 are distributed on both sides of the first reinforcing rib 33 and are symmetrical with respect to the first reinforcing rib 33. The first reinforcing rib 33 is also inclined and extends toward both sides of the first reinforcing rib 33 near the third end 3c to form a second reinforcing rib 34, and the second reinforcing rib 34 is in a "V" shape with an opening toward the third end 3c. The third end 3c is located outside the opening of the "V".

[0058] In this embodiment, each unloading connection mechanism 2 is composed of a pair of unloading beams, which can further ensure that the support ring 1 cannot move in the horizontal plane or the wafer product plane, but is relatively free in the vertical direction of the wafer product. The structure of the fixed claw 3 allows it to be thinner while achieving the same clamping force. The first reinforcing rib 33 and the second reinforcing rib 34 form a support similar to a leaf skeleton to ensure structural strength.

[0059] It is emphasized again that the unloading connection mechanism 2 is not limited to the solutions of the above-mentioned embodiments. In fact, there are many specific implementations of the unloading connection mechanism 2, which only needs to connect the support ring 1 and the fixed claw 3, and can slightly swing in the first direction based on elastic deformation to reduce the force of bending the wafer. For example, a pressure sensor is added to the fixed claw 3, and the unloading connection mechanism 2 is a connection structure that can move in the first direction. By responding to the pressure data, the coordinates of the unloading connection mechanism 2 are adjusted in real time. To achieve unloading, or the unloading connection mechanism 2 is a clamping structure shaped like chopsticks, and the spring is connected to the fixed claw 3 in the middle to achieve unloading.

[0060] In summary, the fixture for wafer-level optical element products of the present invention has the following beneficial effects: the present invention utilizes a support ring to perform outer ring suspension support on the product, and utilizes a plurality of fixed claws distributed in a circle inside the support ring to clamp and fix the edge of the product in a small area. In this way, a small-range clamping of the edge is adopted to avoid interference of the fixture with the product as much as possible, leaving enough space for the optical elements used for testing, and the optical elements can be close to the sample; and these fixed claws are each connected to the support ring through a corresponding force unloading connection mechanism, and the force unloading connection mechanism can swing slightly in a direction perpendicular to the plane of the support ring based on elastic deformation, so as to achieve clamping and fixing of the product while reducing the force acting on the thickness direction of the product, so that the fixture can be adaptively fitted, avoid wafer warping caused by processing errors, and improve the processing tolerance of the fixture.

[0061] It should be noted that when an element is referred to as being "fixed to" another element, it may be directly on the other element or there may also be a centered element. When an element is considered to be "connected" to another element, it may be directly connected to the other element or there may be a centered element at the same time. The terms "vertical", "horizontal" and similar expressions used herein are for illustrative purposes only. Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by technicians in the technical field of the present invention. The terms used in the specification of the present invention herein are only for the purpose of describing specific embodiments and are not intended to limit the present invention.

[0062] Terms including ordinal numbers such as "first", "second" and the like used in this specification may be used to describe various constituent elements, but these constituent elements are not limited by these terms. The purpose of using these terms is only to distinguish one constituent element from other constituent elements. For example, without departing from the scope of the present invention, the first constituent element may be named as the second constituent element, and similarly, the second constituent element may also be named as the first constituent element. The term "or / and" used herein includes any and all combinations of one or more related listed items.

[0063] The embodiments of the present invention are described above in conjunction with the accompanying drawings, but the present invention is not limited to the above-mentioned specific implementation methods. The above-mentioned specific implementation methods are merely illustrative and not restrictive. Under the enlightenment of the present invention, ordinary technicians in this field can also make many forms without departing from the scope of protection of the purpose of the present invention and the claims, which all fall within the protection of the present invention.

Claims

1. A fixture for a wafer-level optical component product, used to clamp the product for optical testing, characterized in that: The clamp comprises: a support ring (1) for supporting the outer ring of the product in suspension, a fixing claw (3) for clamping and fixing the edge of the product in a small area, and a force unloading connection mechanism (2) for dispersing force; A group of the fixing claws (3) are distributed in a circle inside the support ring (1), and are connected to the support ring (1) through a corresponding group of the force-releasing connection mechanisms (2). The force-releasing connection mechanisms (2) can swing slightly in a first direction based on elastic deformation to achieve clamping and fixing of the product while reducing the force acting in the thickness direction of the product, so that the clamp can adaptively fit the product and prevent warping; wherein the first direction refers to a direction perpendicular to the circumference of the support ring (1).

2. The fixture for wafer-level optical component products according to claim 1, characterized in that: The unloading connection mechanism (2) comprises an arc-shaped unloading beam having one end connected to the inner side of the support ring (1) and the other end connected to a fixing claw (3); the support ring (1) and the unloading beam and the fixing claw (3) connected thereto are coplanar.

3. The fixture for wafer-level optical component products according to claim 2, characterized in that: A plurality of notches are provided on the inner side of the support ring (1), and the plurality of notches correspond to the plurality of force-releasing connection mechanisms (2); The unloading connection mechanism (2) is composed of a single unloading beam, the unloading beam is located in the notch, the extension direction of the unloading beam is consistent with the extension direction of the support ring (1), and the inner arc of the unloading beam is also continuous with the inner arc of the support ring (1); or, the unloading connection mechanism (2) is composed of a pair of unloading beams, the pair of unloading beams are arranged at the notch along the extension direction of the support ring (1), and the pair of unloading beams are also arranged opposite to each other and are commonly connected to the same fixed claw (3).

4. The fixture for wafer-level optical component products according to claim 2, characterized in that: The unloading connection mechanism (2) is composed of a pair of unloading beams, which extend from the position where they are connected to the support ring (1) along the extension direction of the support ring (1) or in a direction gradually deviating from the support ring (1), and the pair of unloading beams extend until they gradually come together and the extended ends are connected to the same fixed claw (3).

5. The fixture for wafer-level optical component products according to claim 4, characterized in that: The fixing claw (3) is in a herringbone structure; the first end and the second end of the fixing claw (3) are respectively connected and fixed to the extended ends of a pair of the force unloading beams; and the third end of the fixing claw (3) is used to fix the edge of the product.

6. The fixture for wafer-level optical component products according to claim 5, characterized in that: A first reinforcing rib protrudes from a side of the fixing claw (3) facing away from the product, the first end and the second end of the fixing claw (3) are distributed on both sides of the first reinforcing rib and are symmetrical relative to the first reinforcing rib, the first reinforcing rib is also inclined and extends toward both sides of the first reinforcing rib near the third end to form a second reinforcing rib, and the second reinforcing rib is in a "V" shape with an opening toward the third end.

7. The fixture for wafer-level optical component products according to claim 1, characterized in that: A positioning column (31) and / or a positioning edge (11) for matching and contacting with the edge of the product to position the product is also provided on the inner side of the support ring (1) or the fixing claw (3).

8. The fixture for wafer-level optical component products according to claim 7, characterized in that: It also comprises an auxiliary support device for supporting the support ring (1), the auxiliary support device comprising a main fixing rod (4) and two auxiliary fixing rods (5), the main fixing rod (4) and the auxiliary fixing rods (5) are arranged in parallel and the central axis is coplanar with the support ring (1); The support ring (1) is connected to a fixing seat (12) at the outer side of the position corresponding to the positioning edge (11) thereof, and the main fixing rod (4) points to the center of the support ring (1) and is detachably assembled and fixed with the fixing seat (12); The outer side of the support ring (1) further extends in opposite directions to form two symmetrical connecting arms (13), the extending direction of the connecting arms (13) being perpendicular to the extending direction of the main fixing rod (4), the two auxiliary fixing rods (5) and the two connecting arms (13) being detachably assembled and fixed, the main fixing rod (4) being located between the two auxiliary fixing rods (5), and the three being flush with the end away from the support ring (1).

9. The fixture for wafer-level optical component products according to claim 1, characterized in that: The number of the support rings (1) is two, and each support ring (1) is configured with a set of the force unloading connection mechanism (2) and a set of the fixing claws (3); The two support rings (1) are assembled with each other in the first direction and then locked by a locking member, and the first support ring (1) is connected to the auxiliary support device; the two groups of the force unloading connection mechanisms (2) are assembled with each other in the first direction; the two groups of the fixing claws (3) are assembled with each other in the first direction, and the group of the fixing claws (3) corresponding to the first support ring (1) are all protrudingly provided with positioning columns (31) for abutting against the side of the product, and all the positioning columns (31) jointly hold the circumferential side wall of the product to position the product, and the group of the fixing claws (3) corresponding to the second support ring (1) are provided with positioning holes (32) that cooperate with the positioning columns (31).

10. According to the fixture for wafer-level optical component products as described in claim 1, the number of the support ring (1) is one piece, the support ring (1) is configured with a group of the force-releasing connection mechanism (2) and a group of the fixing claws (3), the group of the fixing claws (3) configured by the support ring (1) is also combined with another group of the fixing claws (3) to form a clamp-shaped structure to fix the product, the group of the fixing claws (3) configured by the support ring (1) is protrudingly provided with a positioning column (31) for abutting against the side of the product, and the other group of the fixing claws (3) is provided with a positioning hole (32) that cooperates with the positioning column (31), and the two groups of the fixing claws (3) are aligned and combined based on the positioning column (31) and the positioning hole (32) and are fastened by a locking member.

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