High-precision laser triggering system and high-precision laser triggering method using same

Abstract

A high-precision laser trigger system according to one embodiment of the present invention comprises: a stage on which an object is mounted; the trigger generating device is used for generating a trigger signal according to a time-based mode and a position-based mode; a laser which irradiates a laser beam when the trigger signal is input; the motion controller is used for controlling the objective table and the trigger generating device; and a control device that, in the position-based mode, recognizes the coordinates of the stage at which the object is disposed at the irradiation position of the laser light. And transmits coordinate information including the coordinates and a mode change signal for changing between the time-based mode and the position-based mode to the motion controller.

Description

Technical Field

[0001] The invention relates to a high-precision laser triggering system and a high-precision laser triggering method using the system. Background Art

[0002] Laser processing technology has expanded from traditional manufacturing fields such as steel and automobiles to semiconductors, displays, medical devices, etc. that require ultra-high-speed and ultra-precision processing technology.

[0003] In order to perform laser processing more accurately, the main issue of the laser trigger system is to have a trigger generation device for triggering the laser, accurately match the cycle required by the laser system, and generate a trigger signal at the exact irradiation position and input it into the laser.

[0004] In particular, in the case of a pumped laser, in order to irradiate a target object such as a wafer with a laser beam having a predetermined energy, it is necessary to continuously generate and input a trigger signal in addition to a period in which processing is performed.

[0005] At this time, an error may occur when entering a processing execution section from a processing non-execution section, or an error may occur in the trigger cycle or position due to a communication delay generated in the process of generating / inputting a trigger signal.

[0006] Therefore, the reality is that a solution is needed that can accurately perform laser processing according to the cycle and position required by the laser system. Summary of the invention

[0007] Technical issues

[0008] An object of the present invention is to provide a high-precision laser triggering system and a high-precision laser triggering method using the system for performing laser processing more precisely and accurately.

[0009] Solutions to the problem

[0010] A high-precision laser trigger system according to an embodiment of the present invention includes: a stage, on which an object is mounted; a trigger generating device, which generates a trigger signal according to a time-based mode and a position-based mode; a laser, which irradiates a laser beam when the trigger signal is input; a motion controller, which controls the stage and the trigger generating device; and a control device, which, in the position-based mode, identifies the coordinates of the stage that configures the object at the irradiation position of the laser, and transmits coordinate information including the coordinates and a mode change signal for changing between the time-based mode and the position-based mode to the motion controller. In the motion controller, in the time-based mode, the trigger generating device is controlled to generate the trigger signal in each cycle, and when the mode change signal is received, the moving speed of the stage is controlled to accelerate to reach the target speed so as to be located at the starting coordinates in the coordinates. When the stage is located at the starting coordinates, it is changed to the position-based mode. Each time the stage moves at the target speed and is located at the coordinates respectively, the trigger generating device is controlled to generate the trigger signal. When the stage reaches the ending coordinates in the coordinates, the stage is controlled to decelerate according to the reception of the mode change signal.

[0011] The motion controller may calculate a position error caused by a communication delay using the target speed and a communication delay time, and correct the coordinates.

[0012] The control device may recognize a target speed of the stage based on a cycle of the trigger signal and an irradiation interval of the laser light.

[0013] The motion controller may identify the position of the stage based on encoder signals received from the stage.

[0014] In the control device, an acceleration time for accelerating the carrier and a deceleration time for decelerating the carrier can be set to a multiple of a period of the trigger signal.

[0015] The motion controller may control the stage to move to a next starting coordinate after decelerating the stage.

[0016] The motion controller may control synchronization to be performed in the position-based mode during movement of the stage to the starting coordinates.

[0017] According to one embodiment of the present invention, a high-precision laser triggering method performed by a high-precision laser triggering system includes: a step of controlling a trigger generating device to generate a trigger signal in each cycle in a time-based mode; a step of controlling a moving speed of a stage mounted with an object to accelerate to reach a target speed so as to be located at a starting coordinate in the stage's coordinates when a mode change signal is received to change from the time-based mode to a position-based mode; a step of changing to the position-based mode when the stage is located at the starting coordinates, and controlling the trigger generating device to generate the trigger signal each time the stage moves at the target speed and is located at the coordinates respectively; and a step of controlling the stage to decelerate in the position-based mode according to the reception of a mode change signal to change to the time-based mode when the stage reaches the ending coordinate in the coordinates.

[0018] Before the step of controlling the object to be located at the start coordinates, the step of recognizing the coordinates of the stage for placing the object at the irradiation position of the laser light in the position-based mode may be included.

[0019] The step of identifying the coordinates of the stage may include the steps of calculating a position error caused by a communication delay using the target speed and a communication delay time, and correcting the coordinates.

[0020] Before the step of controlling the stage to be located at the start coordinates, a step of recognizing a target speed of the stage based on a cycle of the trigger signal and an irradiation interval of the laser light may be included.

[0021] The method may further include the step of identifying a position of the stage based on encoder signals received from the stage.

[0022] The method may further include the step of setting an acceleration time of accelerating the stage and a deceleration time of decelerating the stage to a multiple of a period of the trigger signal.

[0023] After the step of controlling the stage to decelerate, the step of moving the stage to a next starting coordinate may be further included.

[0024] The step of controlling the position at the starting coordinates may include controlling the step of performing synchronization in the position-based mode during movement of the stage to the starting coordinates.

[0025] Effects of the Invention

[0026] According to an embodiment of the present invention, by switching the processing / non-processing interval mode, a laser beam with the same energy can be irradiated to an object at an accurate position, thereby improving the processing quality.

[0027] According to one embodiment of the present invention, a synchronization section is provided when changing between modes, so that preparation for controlling the changed mode can be performed, thereby eliminating errors between signals.

[0028] According to an embodiment of the present invention, the processing quality can be further improved by correcting the error caused by the communication delay. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] Figure 1 is a simplified diagram showing a high-precision laser triggering system according to one embodiment of the present invention.

[0030] Figure 2 is a flow chart showing the operation of a high-precision laser trigger system according to one embodiment of the present invention.

[0031] Figure 3 is a schematic diagram showing a signal diagram of a high-precision laser trigger system according to an embodiment of the present invention.

[0032] Figure 4 1 is a schematic diagram showing an operation of applying a high-precision laser trigger system according to an embodiment of the present invention to a wafer.

[0033] Figure 5 Schematic diagram showing the error correction of a high-precision laser trigger system according to an embodiment of the present invention.

[0034] Description of Reference Numerals

[0035] 1: Laser trigger system

[0036] 10: Object

[0037] 20: Stage

[0038] 30: Motion Controller

[0039] 40: Triggering device

[0040] 50: Laser

[0041] 60: Control device DETAILED DESCRIPTION

[0042] Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. The detailed description disclosed below in conjunction with the accompanying drawings is intended to describe exemplary embodiments of the present invention, and does not represent the only embodiment in which the present invention can be implemented. In the accompanying drawings, in order to clearly describe the present invention, parts not related to the description may be omitted, and the same reference numerals may be used for the same or similar components throughout the specification.

[0043] Figure 1is a simplified diagram showing a high-precision laser triggering system according to one embodiment of the present invention.

[0044] Reference Figure 1 A high-precision laser trigger system 1 (hereinafter referred to as system 1) according to an embodiment of the present invention includes an object body 10, a stage 20, a motion controller 30, a trigger generating device 40, a laser 50 and a control device 60.

[0045] The object 10 is a configuration of an object to be laser processed and can be applied in various ways to semiconductor wafers, displays, and the like.

[0046] The stage 20 is a configuration for mounting and transferring the object 10, and may be a multi-axis stage (XY stage or XYZ stage). The movement of the stage 20 is not limited to any one, and may be applied in various ways. The stage 20 has an encoder, which continuously provides the position information of the stage 20 to the motion controller 30.

[0047] The motion controller 30 is a device for controlling the stage 20 and the trigger generating device 40. Specifically, the motion controller 30 moves the stage 20 so that the object 10 is arranged at the irradiation position of the laser 50, and controls the trigger generating device 40 by monitoring the position of the stage 20 so that the laser 50 irradiates the laser beam at a predetermined position.

[0048] The motion controller 30 includes a processor (hereinafter referred to as the motion processor 31 ), which can control at least one other component (eg, hardware or software component) of the motion controller 30 by executing software such as a program, and can perform various data processing or calculations.

[0049] The motion processor 31 can receive or transmit the required information by performing wired / wireless communication with the stage 20, the trigger generating device 40, and the control device 60. For this purpose, although not shown in the figure, the motion controller 30 may be provided with a separate communication unit. In the following, the operation of the motion controller 30 is regarded as being performed by the motion processor 31.

[0050] The trigger generating device 40 is a device for generating a trigger signal. The system 1 according to one embodiment of the present invention is operated by switching to a time-based mode and a position-based mode. The time-based mode is a mode in which the system 1 generates a trigger signal based on time (cycle) in the preparation interval before processing, and the position-based mode is a mode in which the system 1 generates a trigger signal based on the position of the stage 20 in the interval of processing. Therefore, the trigger generating device 40 can generate a trigger signal according to the time-based mode and the position-based mode.

[0051] The laser 50 is fixed in the system 1, and when receiving a trigger signal from the trigger generating device 40, the laser beam is irradiated to the object 10. At this time, the laser 50 can be a pumping laser, but is not limited thereto, and any laser can be used as long as it is implemented to irradiate a laser beam by receiving a trigger signal.

[0052] The control device 60 is a device that controls the overall operation of the components within the system 1 , and may be realized as a computer, a server, or the like.

[0053] The control device 60 includes a processor (hereinafter referred to as the control processor 61), which can control at least one other component (for example, a hardware or software component) of the control device 60 by executing software such as a program, and perform various data processing or calculations.

[0054] The control processor 61 can receive or transmit the required information by performing wired / wireless communication with the stage 20, the motion controller 30, and the trigger generating device 40. For this purpose, although not shown in the figure, the control device 60 can be provided with a separate communication unit. In the following, the operation of the control device 60 is regarded as being performed by the control processor 61.

[0055] The control device 60 identifies the coordinates of the movement of the stage 20. The control device 60 transmits coordinate information including the identified coordinates and a mode change signal for changing between the time-based mode and the position-based mode to the motion controller 30. On the other hand, the motion controller 30 moves the stage 20 based on the coordinate information, and can control the trigger generating device 40 based on the position of the stage 20.

[0056] According to one embodiment of the present invention, in order to irradiate the object 10 with a laser beam having a specified energy, the system 1 needs to continuously generate / input a trigger signal in addition to the processing section (the section operating in the position-based mode in the present invention).

[0057] At this time, errors may occur in the trigger period or the irradiation position during the conversion process between the time-based mode and the position-based mode or in the generation / input of the trigger signal due to communication delay.

[0058] In the present invention, a high-precision laser trigger system 1 and a high-precision laser trigger method using the system are proposed. The high-precision laser trigger system 1 can introduce a synchronization interval between modes to reduce the error generated during mode conversion, and reduce the error by coordinate correction taking into account communication delay.

[0059] Hereinafter, the operation of the system 1 according to an embodiment of the present invention will be described in detail with reference to the drawings.

[0060] Figure 21 is a flowchart showing the operation of the high-precision laser trigger system according to one embodiment of the present invention.

[0061] According to one embodiment of the present invention, the motion controller 30 controls the trigger generating device 40 to generate a trigger signal in each cycle in a time-based mode ( S10 ).

[0062] As described above, the time-based mode is a mode in which the system 1 generates a trigger signal based on time (cycle) in a preparation period before processing. In this case, the cycle can be determined according to the performance of the laser 50. Hereinafter, the cycle is regarded as the cycle of the trigger signal.

[0063] In the time-based mode, although the laser 50 does not actually process the object 10, in order to keep the energy of the laser beam constant to improve the processing quality, the laser 50 outputs the laser beam in each cycle. However, a movable shutter is set inside or outside the laser 50 to block the laser beam from irradiating unnecessary places in the time-based mode.

[0064] According to one embodiment of the present invention, when the motion controller 30 receives the mode change signal, the moving speed of the stage 20 is accelerated to reach the target speed so as to be located at the starting coordinates in the coordinates of the stage (S20).

[0065] Typically, when the object 10 is loaded onto the stage 20, its position may be slightly offset. The control device 60 performs vision alignment on the object 10 and identifies the coordinates of the stage 20 for configuring the object 10 at the irradiation position of the laser 50. The control device 60 can identify the coordinates of the stage 20 by considering the size of the laser 50 (or the irradiation interval of the laser 50). For example, in the case where the size of the laser 50 is a square of 20mm*20mm, the laser irradiation interval is 20mm. In addition, the control device 60 can set the overall irradiation path by considering the shape of the object 10. The coordinates of the stage 20 are determined by the irradiation path.

[0066] The motion controller 30 receives coordinate information including the coordinates of the stage 20 and a mode change signal from the control device 60. The mode change signal is a signal for changing from a time-based mode to a position-based mode or from a position-based mode to a time-based mode.

[0067] The starting coordinates are the positions where the laser 50 first irradiates the laser beam to the object 10 in each interval when the processing process is divided into multiple intervals. For example, when the object 10 is a wafer, when processing from left to right in the lateral direction of the wafer, the leftmost coordinates in the area where the laser irradiates the wafer are the starting coordinates. Figure 4 Specific instructions.

[0068] At this time, the processing direction is not limited to any one, and the control device 60 or the motion controller 30 can actively select a path. And, of course, the operator can manually select a path by operating the control device 60 or the motion controller 30.

[0069] Furthermore, when a mode change signal is received to change from a time-based mode to a position-based mode, the stage 20 needs to be located at a coordinate before the starting coordinate. The previous coordinate refers to the position at which the starting coordinate can be reached when the stage 20 is accelerated in the processing direction to reach the target speed (in this case, it is considered to be accelerated at a specified acceleration). Usually, the previous coordinate has a margin equivalent to the laser irradiation interval of the starting coordinate. The control device 60 can also identify the previous coordinate and transmit it together with the motion controller 30.

[0070] According to one embodiment of the present invention, the motion controller 30 may move to the previous coordinate by monitoring the position of the stage 20 .

[0071] The control device 60 can identify the target speed of the stage 20 based on the period of the trigger signal and the laser irradiation interval. For example, when the laser irradiation interval is 20 mm and the period of the trigger signal is 5 Hz (0.2 s), the target speed of the stage 20 is 100 mm / s.

[0072] The motion controller 30 accelerates the stage 20 in the processing direction so that the stage 20 reaches the target speed. At this time, the motion controller 30 can accelerate the stage 20 at a specified acceleration. The control device 60 can set the acceleration time for accelerating the stage 20 to a multiple of the period of the trigger signal. This is to maintain the period of the trigger signal in the synchronization interval.

[0073] On the other hand, the acceleration interval is the interval until the mode is completely changed from the time-based mode to the position-based mode, also called the synchronization interval. The motion controller 30 eliminates errors between signals or performs synchronization operations in the synchronization interval, such as executing a program for controlling the mode based on the position.

[0074] According to one embodiment of the present invention, the motion controller 30 controls the following operation, that is, when the stage 20 is located at the starting coordinates, it changes to a position-based mode, and each time the stage 20 moves at the target speed and is located at the coordinates, the trigger generating device 40 generates a trigger signal (S30).

[0075] The motion controller 30 controls an operation such that, when the stage 20 reaches a target speed, it moves at a constant speed in a position-based mode.

[0076] When the trigger generating device 40 generates a trigger signal at each coordinate of the stage 20 , the laser 50 receives the trigger signal to irradiate the laser beam to the object 10 at the corresponding coordinate.

[0077] According to one embodiment of the present invention, when the stage 20 reaches the end coordinates of the coordinates, the motion controller 30 decelerates the stage 20 according to the received mode change signal (S40).

[0078] The end coordinate is also the position where the laser 50 first irradiates the laser beam to the object 10 in each interval when the processing process is divided into multiple intervals. For example, when the object 10 is a wafer, when processing from left to right in the lateral direction of the wafer, the rightmost coordinate in the wafer area irradiated with the laser becomes the end coordinate. Figure 4 Specific instructions.

[0079] When the stage 20 reaches the final coordinate, the control device 60 may transmit a mode change signal to the motion controller 30. Alternatively, when the motion controller 30 reaches the final coordinate, the mode change signal may be generated at the falling edge of the trigger signal.

[0080] In this case, the mode change signal is a signal for changing from the location-based mode to the time-based mode.

[0081] On the other hand, the deceleration interval is also the same as the acceleration interval, and the interval until the mode is completely changed from the position-based mode to the time-based mode is also called the synchronization interval. During the synchronization interval, the motion controller 30 eliminates the error between the signals or performs a synchronization operation, such as a program for controlling the time-based mode.

[0082] When the processing is completed, the motion controller 30 decelerates so that the moving speed of the stage 20 becomes 0 (the stage stops).

[0083] If the processing is not completed, the motion controller 30 needs to move the stage 20 to the next processing position and decelerate the moving speed to a predetermined speed. The motion controller 30 decelerates the stage 20 to the predetermined speed.

[0084] Figure 2 The process described in S10 to S40 is one sequence of the processing technology of the object body 10. In order to complete the processing technology according to the size or shape of the object body 10, a plurality of sequences may be performed.

[0085] The control device 60 can transmit position information (coordinate information) for the next processing to the motion controller 30. On the other hand, the control device 60 can identify and transmit the coordinate information of the stage 20 for processing the entire object 10, but is not limited thereto, and can also be transmitted in sequence or in real time.

[0086] According to an embodiment of the present invention, by switching the processing / non-processing interval mode, a laser beam with the same energy can be irradiated to an object at an accurate position, thereby improving the processing quality.

[0087] According to one embodiment of the present invention, a synchronization section is provided when changing between modes, so that preparation for controlling the changed mode can be performed, thereby eliminating errors between signals.

[0088] Figure 3 is a schematic diagram showing a signal diagram of a high-precision laser trigger system according to an embodiment of the present invention.

[0089] Use a signal diagram to illustrate the aforementioned Figure 2 For repeated content, refer to Figure 2 .

[0090] Reference Figure 3 The trigger signal in the time-based mode (including the synchronization interval) and the trigger signal in the position-based mode both generate signals with the same period as the reference trigger signal.

[0091] First, when the stage 20 stops or simply moves (idle state), a trigger signal is generated at a period of 5 Hz (0.2 seconds) in a time-based mode.

[0092] The control device 60 transmits a mode change signal and the position-based stage coordinates to the motion controller 30. When the stage 20 is located at a coordinate previous to the start coordinate, the mode change signal may be generated.

[0093] After the control device 60 inputs the mode change signal, the motion controller 30 generates a mode change start trigger signal to perform acceleration control on the stage 20 .

[0094] The acceleration time of the stage 20 can be set to a multiple of the trigger signal period. Figure 3 The time interval is set to twice the period of the trigger signal, and the acceleration time is 0.4 seconds. During the acceleration of the stage 20, the trigger generating device 40 can continue to be triggered by the time-based mode trigger signal. As described above, the acceleration interval is a synchronization interval, and the motion controller 30 changes from the time-based mode to the position-based mode and performs synchronization. The motion controller 30 can input the coordinates received from the control device 60.

[0095] After the stage 20 is accelerated and synchronized, the motion controller 30 changes to a position-based mode, moves the stage 20 at a constant speed, and controls the trigger generating device 40 to generate a trigger signal when the stage 20 reaches the input coordinates.

[0096] When the stage 20 reaches the last coordinate of the input coordinates, the motion controller 30 may receive the mode change signal again at the falling edge of the trigger signal.

[0097] When the motion controller 30 receives the mode change signal, it decelerates the stage 20. Similarly, the deceleration time is set to twice the trigger signal period, which is 0.4 seconds. The motion controller 30 changes from the position-based mode to the time-based mode and performs synchronization.

[0098] When deceleration is completed, the mode is changed to time-based mode and a trigger signal is generated at a period of 5 Hz (0.2 seconds).

[0099] Figure 4 1 is a schematic diagram showing an operation of applying a high-precision laser trigger system according to an embodiment of the present invention to a wafer.

[0100] Figure 4 The operation process of the specific system 1 is described when the object 10 is a wafer 11. Figure 2 and Figure 3 Duplicate content borrows from previous content.

[0101] As described above, the processing direction / processing path of the wafer 11 can be set in various ways. Figure 4 In the case of , the processing path is set in a zigzag direction from left to right / from right to left along the lateral direction of the wafer 11. At this time, row-by-row processing is performed, and each row is regarded as a sequence.

[0102] The control device 60 recognizes the coordinates at which the stage needs to be positioned by taking into account the shape of the wafer 11 , the irradiation interval of the laser light, the position of the laser light, and the like.

[0103] The motion controller 30 uses the coordinate information to move the stage 20 to the previous coordinate 410. Figure 2 As described in the related description of S20 , the previous coordinate 410 is the previous coordinate of the starting coordinate 420 of the stage 20 .

[0104] When the stage 20 is located at the previous coordinate 410 , the motion controller 30 performs acceleration control on the stage 20 according to the mode change signal and makes the stage 20 located at the starting coordinate 420 (1: acceleration section=synchronization section).

[0105] The motion controller 30 moves the stage 20 from the starting coordinate 420 to the ending coordinate 430 at a constant speed, and controls the trigger generating device 40 to irradiate the laser beam at each predetermined coordinate (2: constant speed interval, position-based mode).

[0106] When the motion controller 30 receives the mode change signal again at the end coordinate 430 , it performs deceleration control on the stage 20 (3: deceleration section=synchronization section).

[0107] As a result, the stage 20 can be located at the coordinate 440 and can be moved to the previous coordinate 450 of the next sequence (4: stop or simple movement interval, time-based mode).

[0108] Figure 5 Schematic diagram showing the error correction of a high-precision laser trigger system according to an embodiment of the present invention.

[0109] According to one embodiment of the present invention, communication delay may occur during the process of inputting the encoder signal of the stage 20 to the motion controller 30, outputting the trigger signal by the trigger generating device 40 in the position-based mode, and inputting to the laser 50. That is, an error may occur because the period of the trigger signal and the encoder period are not completely consistent.

[0110] The communication delay is an inherent value of the system, and the communication delay does not change even if the speed changes. Therefore, the motion controller 30 can correct the coordinates by calculating the position error caused by the communication delay. Specifically, the motion controller 30 can calculate the position error caused by the communication delay using the target speed and the communication delay time.

[0111] For example, when the trigger signal cycle is 5Hz, the laser irradiation interval is 20mm, and the target speed is 100mm / s, when the communication delay time is 1ms, a 0.1mm position error occurs due to the communication delay.

[0112] In this case, even if the laser light 50 is irradiated at the same X-axis position, a position error of up / down by a maximum of 0.2 mm may occur depending on the moving direction of the object 10 .

[0113] The motion controller 30 may calculate the error time through the moving speed (target speed) of the object body 10 and the communication delay time, and apply a correction value according to the moving direction.

[0114] By another method, such as Figure 5 As shown, the trigger generating device 40 can accurately correct the trigger position by allocating cycles with a resolution of 10 nsec.

[0115] According to an embodiment of the present invention, processing quality can be improved by correcting errors caused by communication delays.

Claims

1. A high-precision laser trigger system, wherein: include: a stage, on which an object is mounted; A trigger generating device generates a trigger signal according to a time-based mode and a position-based mode; A laser, which irradiates a laser beam when the trigger signal is input; A motion controller, controlling the stage and the trigger generating device; as well as a control device that, in the position-based mode, identifies the coordinates of the stage that configures the object at the irradiation position of the laser, and transmits coordinate information including the coordinates and a mode change signal for changing between the time-based mode and the position-based mode to the motion controller, In the motion controller, In the time-based mode, the trigger generating device is controlled to generate the trigger signal in each cycle. When the mode change signal is received, the moving speed of the stage is controlled to accelerate to reach the target speed so as to be located at the starting coordinate in the coordinates, When the stage is located at the starting coordinates, the mode is changed to the position-based mode, and each time the stage moves at the target speed and is located at the coordinates, the trigger generating device is controlled to generate the trigger signal. When the stage reaches the terminal coordinates among the coordinates, the stage is controlled to decelerate according to receiving the mode change signal.

2. The high-precision laser trigger system according to claim 1, wherein: In the motion controller, a position error caused by a communication delay is calculated using the target speed and a communication delay time, and the coordinates are corrected.

3. The high-precision laser trigger system according to claim 1, wherein: The control device recognizes a target speed of the stage based on a cycle of the trigger signal and an irradiation interval of the laser light.

4. The high-precision laser trigger system according to claim 1, wherein: The motion controller identifies a position of the stage based on encoder signals received from the stage.

5. The high-precision laser trigger system according to claim 1, wherein: In the control device, an acceleration time for accelerating the carrier and a deceleration time for decelerating the carrier are set to be multiples of a period of the trigger signal.

6. The high-precision laser trigger system according to claim 1, wherein: After decelerating the stage, the motion controller controls the stage to move to the next starting coordinate.

7. The high-precision laser trigger system according to claim 1, wherein: The motion controller controls synchronization to be performed in the position-based mode during movement of the stage to the starting coordinates.

8. A laser triggering method, performed by a high-precision laser triggering system, wherein: The method comprises: In the time-based mode, the step of controlling the trigger generating device to generate a trigger signal in each cycle; When a mode change signal for changing from the time-based mode to the position-based mode is received, controlling to accelerate the moving speed of the stage on which the object is mounted to reach a target speed so as to be located at a starting coordinate in the coordinates of the stage; When the stage is located at the starting coordinates, the mode is changed to the position-based mode, and each time the stage moves at the target speed and is located at the coordinates, the trigger generating device is controlled to generate the trigger signal; and When the stage reaches a terminal coordinate in the coordinates, the stage is controlled to decelerate according to receiving a mode change signal for changing from the position-based mode to the time-based mode.

9. The laser triggering method according to claim 8, wherein: Before the step of controlling the object to be located at the start coordinates, the step of recognizing the coordinates of the stage for placing the object at the irradiation position of the laser light in the position-based mode is included.

10. The laser triggering method according to claim 9, wherein: The step of recognizing the coordinates of the stage includes the steps of calculating a position error caused by a communication delay using the target speed and a communication delay time, and correcting the coordinates.

11. The laser triggering method according to claim 8, wherein: Before the step of controlling the stage to be located at the start coordinates, a step of recognizing a target speed of the stage based on a cycle of the trigger signal and an irradiation interval of the laser light is included.

12. The laser triggering method according to claim 8, wherein: The method further includes the step of identifying a position of the stage based on encoder signals received from the stage.

13. The laser triggering method according to claim 8, wherein: The method further includes the step of setting the acceleration time of accelerating the carrier and the deceleration time of decelerating the carrier to multiples of the period of the trigger signal.

14. The laser triggering method according to claim 8, wherein: After the step of controlling the stage to decelerate, the step further includes moving the stage to a next starting coordinate.

15. The laser triggering method according to claim 8, wherein: The step of controlling the position at the starting coordinates includes the step of controlling the synchronization to be performed in the position-based mode during the movement of the stage to the starting coordinates.

Images