Film coating tool and method for film coating operation of large-size micro-channel plate

Abstract

The invention provides a film coating tool and method for film coating operation of a large-size micro-channel plate. The film coating tool comprises a film coating base and a three-jaw gland rotationally matched with the film coating base. The coating base is in a horn mouth shape and is provided with a circular groove, a first conical boss and three U-shaped grooves formed in the outer side of the first conical boss. The three-jaw gland is in a horn mouth shape and is provided with a circular convex groove, a second conical boss and a positioning pin matched with the U-shaped groove. And the positioning pins can be operated to be embedded into the corresponding U-shaped grooves and are rotated and locked, so that the coating base, the micro-channel plate and the three-jaw gland are locked and assembled into the integrated coating clamp for subsequent coating treatment of the micro-channel plate. The tool and the method are suitable for preparation of the large-size microchannel plate with the high surface quality requirement, the tedious operation that a clamp is manually inverted to turn over is not needed in the microchannel plate coating process, surface defects caused by people are effectively avoided, and the production efficiency is improved while the surface quality of the microchannel plate is improved.

Description

Technical Field

[0001] The invention relates to the technical field of microchannel plates, and in particular to a coating tool and method for coating operations of large-size microchannel plates. Background Art

[0002] Microchannel plate (MCP) is a parallel array microporous optical element with millions of microporous electron multiplier devices. It is a two-dimensional vacuum electron multiplier with a thin sheet structure. It is sensitive to electrons, ions and accelerated neutral particles, ultraviolet photons and X-rays, and is widely used in image intensifiers, displays, space science and analytical instruments. The existing preparation process of microchannel plate relies on glass multi-fiber drawing technology (GMD). The lead silicate skin glass tube and the core rod matched with it are drawn into single fiber filaments at high temperature. After a series of processes such as drawing, screen arrangement, melting and pressing, cold processing, corrosion, hydrogen reduction, coating, etc., a multi-channel array thin sheet is manufactured.

[0003] In the preparation process of large-size microchannel plates, the coating operation has the greatest impact on the surface quality, especially the proportion of surface scratches, broken edges and other defects is as high as more than 40%, which seriously affects the product yield. The traditional coating fixture mainly includes: input fixture, output fixture, high cover, and process cover. The specific operation steps are: 1. Place the hydrogen-reduced microchannel plate horizontally on the input fixture, and place the high cover on the output surface of the microchannel plate. Rely on the weight of the high cover to fix the microchannel plate for input surface coating; 2. Take out the high cover, and manually pour the microchannel plate placed in the input fixture 180° into the output fixture; 3. With the assistance of a laser light, install a correction bevel block at the lower end of the output fixture, and place a process cover on the upper end for output surface coating. Among them, scratches, broken edges and other defects mainly occur in step 2, when turning over the microchannel plate. Due to its large size, it is difficult to pour the microchannel plate in the input fixture into the output fixture at one time. On average, this action needs to be repeated 3-4 times to complete a flip. In the actual flipping process, fingers often scratch the plate, the plate falls off, and the edge of the plate is broken by the fixture, which seriously affects the surface quality and production efficiency.

[0004] For the microchannel plate used in high-performance microchannel plate ion detectors, effective area and surface quality are two important indicators, requiring a large effective area and good surface quality. Therefore, large size and good surface quality are the supporting requirements of microchannel plate ion detectors, and solving the surface defects caused by the coating flipping of large-size microchannel plates is particularly prominent. Summary of the invention

[0005] In view of the problems and defects of the prior art, according to the first aspect of the present invention, a coating tool for large-size microchannel plate coating operation is provided, comprising a coating base and a three-claw pressure cover rotatably matched with the coating base;

[0006] The coating base is in the shape of a disk, and is provided with a horizontal circular groove around its center and a first conical boss extending upward from the circular groove, so that the inner circle of the circular groove and the first conical boss is in the shape of a trumpet with a narrow inner side and a wide outer side; the microchannel plate passes through the first conical boss and is horizontally supported and placed on the circular groove; the coating base is also provided with three U-shaped grooves along the circumferential direction and on the outer side of the first conical boss;

[0007] The three-claw gland is in the shape of a disk, and a horizontal circular convex groove and a second conical boss extending upward from the circular convex groove are arranged around the center of the circle, so that the inner circle between the circular convex groove and the second conical boss is in the shape of a trumpet with narrow inside and wide outside as a whole;

[0008] In which, the microchannel plate is placed between the circular convex groove of the three-claw pressure cover and the circular groove of the coating base; and the three-claw pressure cover is provided with a positioning pin cooperating with the U-shaped groove on the edge in the circumferential direction, and the positioning pin can be operated to be embedded in a corresponding U-shaped groove and rotated and locked, so that the coating base, the microchannel plate and the three-claw pressure cover are locked and assembled into an integrated coating fixture for subsequent microchannel plate coating processing.

[0009] As an optional embodiment, the three U-shaped grooves are configured to be evenly arranged along the circumferential direction of the coating base and spaced 120 degrees apart from each other.

[0010] As an optional implementation, the positioning pin is an L-shaped positioning pin.

[0011] As an optional implementation, a rectangular inclined surface that is sunken by 1 mm to 3 mm is provided in the plane where each U-shaped groove is located, and is arranged along the length direction of the U-shaped groove.

[0012] As an optional implementation, the inclination angle of the rectangular slope is 3° to 6°.

[0013] As an optional implementation, in the integrated coating fixture, the distance between the coating fixture and the input and output surfaces of the microchannel plate is 0.03 mm to 0.05 mm.

[0014] As an optional embodiment, the circular groove is provided with at least one R angle for marking the input surface or the output surface of the horizontally placed microchannel plate.

[0015] According to a second aspect of the present invention, a microchannel plate coating method is provided, comprising the following steps:

[0016] Step 1: Coating the input surface of the microchannel plate: Blow the hydrogen-reduced microchannel plate clean with a nitrogen gun, then place it horizontally in the circular groove of the coating base, press the three-claw pressure cover onto the coating base, and press the microchannel plate through the circular groove and the circular convex groove. The three positioning pins of the three-claw pressure cover and the three U-shaped grooves of the coating base are rotated and locked, and then the process cover is covered on the inner circle of the second conical boss of the three-claw pressure cover; Place the assembled coating tooling on the upper layer of the planetary turntable built in the thermal evaporation coating machine, evacuate, run the automatic coating program, and complete the coating of the input surface of the microchannel plate;

[0017] Step 2: Turn over the coated microchannel plate: Take out the coating tooling with the completed input surface coating from the planetary turntable built into the thermal evaporation coating machine, and remove the process cover; turn over the assembled coating tooling, and use a nitrogen gun to purge the output surface of the microchannel plate to be coated; after the purge is clean, install the outer ring of the second conical boss of the three-claw pressure cover into the inner ring of the coating output inclined block, and use a laser lamp to calibrate the coating output inclined block; after the calibration is completed, cover the inner ring of the first conical boss of the coating base;

[0018] Step 3: Coating the output surface of the microchannel plate: Place the coating tooling with the assembled coating output ramp block on the lower layer of the planetary turntable built into the thermal evaporation coating machine, evacuate the vacuum, run the automatic coating program, and complete the coating of the output surface of the microchannel plate.

[0019] As an optional embodiment, the method is applicable to The above coating process of the microchannel plate, especially A method for manufacturing a microchannel plate with a large size of 0.002 mm to 0.008 mm and above and high surface quality requirements can be realized, wherein the surface defects meet the requirements of level II (scratch width: 0.002 mm to 0.008 mm).

[0020] As an optional embodiment, during the coating operation of the microchannel plate, after completing the coating on one of the input surface and the output surface, there is no need to pour out the microchannel plate for turning over. The coating on the other side can be performed by simply flipping over the assembled coating tooling and changing the covering direction of the process cover.

[0021] Compared with the prior art, the coating tooling and coating method for large-size microchannel plates according to the above embodiments of the present invention are aimed at the preparation requirements of large-size microchannel plates with high surface quality requirements, especially For the production of microchannel plates with surface defects that meet the requirements of level II (scratch width: 0.002mm to 0.008mm), it is proposed to use an integrated coating tooling that matches a coating base with a three-claw pressure cover. When coating the input surface of the microchannel plate, the microchannel plate is placed between the coating base and the three-claw pressure cover by means of a limit locking method, and a process cover is placed on the top of the three-claw pressure cover. Then, the assembled coating tooling is placed on the planetary turntable built into the thermal evaporation coating machine for coating process to complete the coating of the input surface. When coating the output surface of the microchannel plate, it is only necessary to flip the assembled tooling 180° and cover the process cover on the top of the coating base. There is no need to manually flip the microchannel plate in the fixture for tedious operations, which reduces damage to the microchannel plate.

[0022] The coating tooling and coating method for large-size microchannel plate coating operation of the present invention are particularly suitable for For microchannel plates of large size and above with high surface quality requirements, the coating process of the microchannel plate can be realized without the tedious operation of manually turning over the fixture, effectively avoiding surface defects caused by human factors, improving the surface quality of the microchannel plate and improving production efficiency.

[0023] It should be understood that all combinations of the aforementioned concepts and the additional concepts described in more detail below can be considered as part of the inventive subject matter of the present disclosure as long as such concepts do not contradict each other. In addition, all combinations of the claimed subject matter are considered as part of the inventive subject matter of the present disclosure. The aforementioned and other aspects, embodiments and features of the present invention teachings can be more fully understood from the following description in conjunction with the accompanying drawings. Other additional aspects of the present invention, such as the features and / or beneficial effects of the exemplary embodiments, will be apparent from the following description, or will be known from the practice of specific embodiments according to the teachings of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] The accompanying drawings are not intended to be drawn to scale. In the accompanying drawings, each identical or nearly identical component shown in each figure may be represented by the same reference numeral. For clarity, not every component is labeled in each figure. Embodiments of various aspects of the present invention will now be described by way of example and with reference to the accompanying drawings.

[0025] Figure 1 is a top view of a coating base according to an embodiment of the present invention.

[0026] Figure 2 is a top view of a three-claw press cover according to an embodiment of the present invention.

[0027] Figure 3 is a schematic diagram of a microchannel plate according to an embodiment of the present invention.

[0028] Figure 4is a schematic diagram of a process cover according to an embodiment of the present invention.

[0029] Figure 5 is a schematic diagram of a coating output ramp according to an embodiment of the present invention.

[0030] Figure 6 1 is a top view of a coating tooling in a locked state of a three-jaw pressing cover and a coating base according to an embodiment of the present invention, wherein a microchannel plate 2 is installed, which is marked by a red part.

[0031] Figure 7 is based on Figure 6 Schematic cross-section of an example assembled coating tooling.

[0032] Figure 8 is based on Figure 6 A stereoscopic view of an example assembled coating tool, viewed from the side of the coating base.

[0033] Fig. 9 is based on Figure 6 A stereoscopic view of an example of an assembled coating tool, viewed from the side of the three-jaw cap. DETAILED DESCRIPTION

[0034] In order to better understand the technical content of the present invention, specific embodiments are given and described as follows in conjunction with the accompanying drawings.

[0035] Various aspects of the present invention are described in this disclosure with reference to the accompanying drawings, in which many illustrative embodiments are shown. The embodiments of the present disclosure are not necessarily intended to include all aspects of the present invention. It should be understood that the various concepts and embodiments introduced above, as well as those described in more detail below, can be implemented in any of many ways, because the concepts and embodiments disclosed by the present invention are not limited to any implementation. In addition, some aspects disclosed by the present invention can be used alone or in any appropriate combination with other aspects disclosed by the present invention.

[0036] {Example 1}

[0037] Combined with Figure 1-9 As shown, the coating tooling for large-size microchannel plate coating operation according to this embodiment includes a coating base 1 and a three-claw pressure cover 3 that rotates with the coating base 1. Fig. 9 , a structural example of a microchannel plate is exemplarily shown, which is usually designed as a circular thin sheet, wherein one surface is an input surface 2A, and the other opposite surface is an output surface 2B.

[0038] Combination Figure 1In the example shown, the coating base 1 is disc-shaped, and is provided with a horizontal circular groove 1A around its center and a first conical boss 1C extending upward from the circular groove 1A, so that the inner circle of the circular groove 1A and the first conical boss 1C are overall in the shape of a trumpet that is narrow inside and wide outside; the microchannel plate 2 passes through the first conical boss 1C and is horizontally supported and placed on the circular groove 1A; the coating base 1 is also provided with three U-shaped grooves 1B along the circumferential direction and on the outer side of the first conical boss 1C.

[0039] Combined with Figure 2 In the example shown, the three-claw pressure cover 3 is disc-shaped, and is provided with a horizontal circular convex groove 3D around its center and a second conical boss 1C extending upward from the circular convex groove 3D, so that the inner circle of the circular convex groove 3D and the second conical boss 1C are overall in the shape of a trumpet that is narrow inside and wide outside.

[0040] Combined with Figure 1 , 2 And attached Figure 6-9 As shown, the microchannel plate 2 is placed between the circular convex groove 3D of the three-claw pressure cover 3 and the circular groove 1A of the coating base 1. In addition, the three-claw pressure cover 3 is provided with a positioning pin 3A that cooperates with the U-shaped groove 1B at the edge in the circumferential direction. The positioning pin 3A can be operated to be embedded in a corresponding U-shaped groove 1B and rotated and locked, and the coating base 1, the microchannel plate 2, and the three-claw pressure cover 3 are locked and assembled into an integrated coating fixture for subsequent microchannel plate coating processing.

[0041] As shown in the accompanying drawings, the coating base 1 and the three-claw pressure cover 3 are both through-type structures, designed to be in the shape of a micro-trumpet.

[0042] As an optional embodiment, three U-shaped grooves 1B are arranged evenly along the circumferential direction of the coating base 1 and are spaced 120 degrees apart from each other.

[0043] As an optional embodiment, the positioning pin 3A is an L-shaped positioning pin.

[0044] As an optional implementation, a rectangular inclined surface 1D which is sunken by 1 mm to 3 mm is provided in the plane where each U-shaped groove 1B is located, and is arranged along the length direction of the U-shaped groove 1B.

[0045] As an optional implementation, the inclination angle of the rectangular slope 1D is 3° to 6°.

[0046] As an optional implementation, in the integrated coating fixture, the distance between the coating fixture and the input and output surfaces of the microchannel plate is 0.03 mm to 0.05 mm.

[0047] As an optional embodiment, the circular groove 1A is provided with at least one R corner 1E for marking the input surface or the output surface of the horizontally placed microchannel plate.

[0048] {Example 2}

[0049] Combined with Figure 1-9 The coating tooling shown in the figure and the above embodiments, according to the microchannel plate coating method proposed in the embodiment of the present invention, comprises the following steps:

[0050] Step 1: Coating the input surface of the microchannel plate: clean the hydrogen-reduced microchannel plate 2 with a nitrogen gun, and then place it horizontally in the circular groove 1A of the coating base 1, press the three-claw pressure cover 3 onto the coating base, and position and press the microchannel plate 2 through the circular groove 1A and the circular convex groove 3D. The three positioning pins 3A of the three-claw pressure cover 3 and the three U-shaped grooves 1B of the coating base are rotated and locked, and then the process cover 4 is covered on the inner circle of the second conical boss 3B of the three-claw pressure cover 3; place the assembled coating tool 100 on the upper layer of the planetary turntable built in the thermal evaporation coating machine, evacuate, run the automatic coating program, and complete the coating of the input surface 2A of the microchannel plate;

[0051] Step 2: Turn over the coated microchannel plate: Take out the coating tool 100 with the input surface 2A coated from the planetary turntable built in the thermal evaporation coating machine, and remove the process cover 4; turn over the assembled coating tool 100 by 180°, and use a nitrogen gun to blow the output surface 2B of the microchannel plate to be coated; after blowing clean, install the outer ring of the second conical boss 3B of the three-claw pressure cover 3 into the inner ring 5 of the coating output inclined block, and use a laser lamp to calibrate the coating output inclined block; after the calibration is completed, cover the inner ring of the first conical boss 1C of the coating base 1 with the process cover 4;

[0052] Step 3: Coating the output surface of the microchannel plate: Place the coating tooling with the assembled coating output ramp block on the lower layer of the planetary turntable built into the thermal evaporation coating machine, evacuate the vacuum, run the automatic coating program, and complete the coating of the output surface 2B of the microchannel plate.

[0053] It should be understood that the method of the present invention is particularly applicable to The above coating process of the microchannel plate has higher surface quality requirements.

[0054] In the coating method of the present invention, during the coating operation of the microchannel plate, after coating one of the input surface and the output surface, there is no need to pour out the microchannel plate for turning over, and the coating of the other surface can be performed only by flipping the assembled coating tooling.

[0055] {Example 3}

[0056] Combined with the coating tooling of the above embodiment, this embodiment is The coating process of the microchannel plate surface is further described as an example, and the coating tooling and coating method of the above-mentioned embodiment of the present invention are intended to improve The surface quality and production efficiency of the microchannel plate coating process can be applied to the production of microchannel plates used in conjunction with microchannel plate-type ion detectors, which are key components of high-performance time-of-flight mass spectrometers, to achieve engineering mass production.

[0057] In this example, according to the supporting requirements of the microchannel plate ion detector, a key component of a high-performance time-of-flight mass spectrometer, a large-sized microchannel plate with high surface quality requirements is provided, with an outer diameter of: Surface defects meet Level II requirements (scratch width: 0.002mm~0.008mm).

[0058] Combined with the above coating tooling, in this example, The process of coating the surface of the microchannel plate includes the following steps:

[0059] Step 1: Coating the input surface of the microchannel plate: After the hydrogen-reduced microchannel plate 2 is cleaned with a nitrogen gun, it is horizontally placed in the circular groove 1A of the coating base 1. The three positioning pins 3A of the three-claw pressure cover 3 are locked by rotation with the three U-shaped grooves 1B of the coating base. The distance between the assembled coating fixture and the input and output surfaces of the microchannel plate is 0.05mm; then the process cover 4 is covered on the inner circle of the second conical boss 3B of the three-claw pressure cover. The assembled coating fixture is placed on the upper layer of the planetary turntable built into the thermal evaporation coating machine, vacuumed, and the automatic coating program is run to complete the coating of the input surface 2A of the microchannel plate;

[0060] Step 2: Flip the coated microchannel plate: Take out the coating tooling with the completed input surface coating on the planetary turntable built into the thermal evaporation coating machine, remove the process cover 4, flip the assembled tooling 0 180°, and then use a nitrogen gun to purge the output surface 2B to be coated. After purging, install the outer ring of the second conical boss of the three-claw pressure cover into the inner ring 5 of the coating output inclined block, and use a laser light to calibrate the coating output inclined block. After the calibration is completed, cover the process cover 4 on the inner ring of the first conical boss 1C of the coating base;

[0061] Step 3: Coating the output surface of the microchannel plate: Place the coating tooling with the assembled coating output ramp block on the lower layer of the planetary turntable built into the thermal evaporation coating machine, evacuate the vacuum, and run the automatic coating program to complete the coating of the output surface 2B of the microchannel plate.

[0062] A rectangular inclined surface 1D which is sunken by 3 mm is arranged in the plane of the aforementioned U-shaped groove 1B, and the rectangular inclined surface 1D has an inclination angle of 3°.

[0063] Plated using the above-mentioned tooling and method The microchannel plate has been inspected and tested through process inspection, and the surface has no defects such as scratches and broken edges, and the surface quality can meet the requirements of Level II.

[0064] The coating tooling and coating process design of the microchannel plate in the above embodiment have the following significant advantages:

[0065] 1) The microchannel plate is fixed between the coating base and the three-claw pressure cover by rotating and locking the three U-shaped grooves and the positioning pins. The flipping operation before the output surface coating is simple. It only needs to flip the assembled fixture 180°. Compared with the cumbersome flipping operation of the traditional manual flip fixture, it effectively avoids surface defects such as scratches and broken edges caused by human factors, which not only improves the surface quality of the microchannel plate but also improves production efficiency;

[0066] 2) The coating base and the three-claw pressure cover are designed as a micro-trumpet structure, which effectively solves the problem of uneven film layer caused by local shading during the planetary disk thermal evaporation coating process of the assembled coating fixture. The microchannel plate plated using this design has a film uniformity of <

[0067] 3% while the conventional film uniformity is 5%;

[0068] 3) A sunken rectangular slope is set in the plane above the U-shaped groove of the coating base. Compared with the plane, the design of the rectangular slope can effectively solve the problem of random assembly mismatch caused by inconsistent processing accuracy of different batches of coating fixtures, improve the tolerance rate of the coating fixture processing accuracy, and effectively reduce the processing cost.

[0069] Although the present invention has been disclosed as above with preferred embodiments, it is not intended to limit the present invention. A person with ordinary knowledge in the technical field to which the present invention belongs may make various changes and modifications without departing from the spirit and scope of the present invention. Therefore, the protection scope of the present invention shall be determined by the definition of the claims.

Claims

1. A coating tool for large-size microchannel plate coating operations, characterized in that: It comprises a coating base (1) and a three-claw pressure cover (3) rotatably matched with the coating base (1); The coating base (1) is in the shape of a disk, and is provided with a horizontal circular groove (1A) around its center and a first conical boss (1C) extending upward from the circular groove (1A), so that the inner circle of the circular groove (1A) and the first conical boss (1C) are in the shape of a trumpet with a narrow inside and a wide outside; the microchannel plate (2) passes through the first conical boss (1C) and is horizontally supported and placed on the circular groove (1A); the coating base (1) is also provided with three U-shaped grooves (1B) along the circumferential direction and on the outer side of the first conical boss (1C); The three-claw pressure cover (3) is in the shape of a disk, and is provided with a horizontal circular convex groove (3D) and a second conical boss (1C) extending upward from the circular convex groove (3D) around its center, so that the inner circle between the circular convex groove (3D) and the second conical boss (1C) is in the shape of a trumpet with a narrow inside and a wide outside as a whole; The microchannel plate (2) is placed between the circular convex groove (3D) of the three-claw pressure cover (3) and the circular groove (1A) of the coating base (1); and the three-claw pressure cover (3) is provided with a positioning pin (3A) cooperating with the U-shaped groove (1B) at the edge in the circumferential direction, and the positioning pin (3A) can be operated to be embedded in a corresponding U-shaped groove (1B) and rotated and locked, so that the coating base (1), the microchannel plate (2) and the three-claw pressure cover (3) are locked and assembled into an integrated coating fixture for subsequent microchannel plate coating processing.

2. The coating tooling for large-size microchannel plate coating operation according to claim 1, characterized in that: The three U-shaped grooves (1B) are arranged to be evenly spaced along the circumferential direction of the coating base (1) and are spaced 120 degrees apart from each other.

3. The coating tooling for large-size microchannel plate coating operation according to claim 1, characterized in that: The positioning pin (3A) is an L-shaped positioning pin.

4. The coating tooling for large-size microchannel plate coating operation according to claim 1, characterized in that: A rectangular inclined surface (1D) that is sunken by 1 mm to 3 mm is provided in the plane where each U-shaped groove (1B) is located, and is arranged along the length direction of the U-shaped groove (1B).

5. The coating tooling for large-size microchannel plate coating operation according to claim 1, characterized in that: The rectangular slope (1D) has an inclination angle of 3° to 6°.

6. The coating tooling for large-size microchannel plate coating operation according to claim 1, characterized in that: In the integrated coating fixture, the distance between the coating fixture and the input and output surfaces of the microchannel plate is 0.03 mm to 0.05 mm.

7. The coating tooling for large-size microchannel plate coating operation according to claim 1, characterized in that: The circular groove (1A) is provided with at least one R angle (1E) for marking the input surface or the output surface of a horizontally placed microchannel plate.

8. A method for coating a microchannel plate based on the coating tooling for coating a large-size microchannel plate according to any one of claims 1 to 7, characterized in that: The following steps are involved: Step 1: Coating the input surface of the microchannel plate: The hydrogen-reduced microchannel plate (2) is purged clean with a nitrogen gun, and then placed horizontally in the circular groove (1A) of the coating base (1), and the three-claw pressure cover (3) is pressed onto the coating base, and the microchannel plate (2) is positioned and pressed by the circular groove (1A) and the circular convex groove (3D), and the three positioning pins (3A) of the three-claw pressure cover (3) and the three U-shaped grooves (1B) of the coating base are rotated and locked, and then the process cover (4) is covered on the inner circle of the second conical boss (3B) of the three-claw pressure cover (3); the assembled coating tool (100) is placed on the upper layer of the planetary turntable built into the thermal evaporation coating machine, vacuum is drawn, and the automatic coating program is run to complete the coating of the input surface (2A) of the microchannel plate; Step 2: Turn over the coated microchannel plate: Take out the coating tool (100) on which the coating of the input surface (2A) has been completed from the planetary turntable built into the thermal evaporation coating machine, and remove the process cover (4); flip the assembled coating tool (100) 180°, and use a nitrogen gun to blow the output surface (2B) of the microchannel plate to be coated; after blowing clean, install the outer ring of the second conical boss (3B) of the three-claw pressure cover (3) into the inner ring (5) of the coating output inclined block, and use a laser lamp to calibrate the coating output inclined block; after the calibration is completed, install the process cover (4) on the inner ring of the first conical boss (1C) of the coating base (1); Step 3: Coating the output surface of the microchannel plate: Place the coating tooling with the assembled coating output ramp block on the lower layer of the planetary turntable built into the thermal evaporation coating machine, evacuate the vacuum, and run the automatic coating program to complete the coating of the output surface (2B) of the microchannel plate.

9. The microchannel plate coating method according to claim 8, characterized in that: The method is applicable to The above coating process of the microchannel plate.

10. The microchannel plate coating method according to claim 8, characterized in that: In the coating method, during the coating operation of the microchannel plate, after coating one of the input surface and the output surface, there is no need to dump the microchannel plate for turning over, and the coating of the other surface can be performed by simply turning over the assembled coating tooling.

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