Mask plate constant-temperature cooling device

Abstract

The invention relates to the technical field of mask plate processing, in particular to a mask plate constant-temperature cooling device which comprises a box body with a mounting cavity, a sealing plate, a temperature sensor and a constant-temperature driving mechanism used for driving the sealing plate to seal an opening of the mounting cavity. A first channel surrounding the mounting cavity is arranged in the box body, the box body is provided with a first inlet and a first outlet which are communicated with the first channel, and the temperature sensor is used for detecting the temperature of the mounting cavity; the contact area of fluid is effectively increased, the heat exchange efficiency is improved, and uneven refrigeration is prevented; the mask plate body is placed at a constant temperature when the temperature of the mounting cavity reaches a preset value, the environment temperature in the mounting cavity can be smoothly controlled, and the quality of the mask plate body is stabilized.

Description

Technical Field

[0001] The invention relates to the technical field of mask plate processing, and in particular to a mask plate constant temperature cooling device. Background Art

[0002] Optical mask is a structure that makes various functional patterns on thin film, plastic or glass substrate materials and accurately positions them for selective exposure of photoresist coating. It is a graphic master used in the photolithography process commonly used in micro-nano processing technology. The mask graphic structure is formed on the transparent substrate by an opaque light-shielding film, and then the graphic information is transferred to the product substrate through the exposure process. The mask to be processed is composed of a glass / quartz substrate, a chrome layer and a photoresist layer. Its graphic structure can be obtained through plate making process, and the commonly used processing equipment is direct writing lithography equipment, such as laser direct writing lithography machine, electron beam lithography machine, etc.

[0003] In order to ensure the processing quality of the mask plate, the mask plate needs to be subjected to constant temperature treatment. The existing constant temperature device is difficult to increase the contact area of ​​the fluid during the constant temperature treatment process, and the heat exchange is small, which easily leads to uneven cooling, and thus the temperature of the liquid cannot be accurately controlled at a constant temperature. Summary of the invention

[0004] In view of the deficiencies in the prior art, the present invention provides a mask plate constant temperature cooling device, which effectively increases the contact area of ​​the fluid, improves the heat exchange efficiency, and prevents uneven cooling. When the temperature of the installation cavity reaches a predetermined value, the mask plate body is placed at a constant temperature, which can smoothly control the ambient temperature in the installation cavity and is conducive to stabilizing the quality of the mask plate body.

[0005] In order to solve the above technical problems, the present invention adopts the following technical solutions:

[0006] The present invention provides a mask plate constant temperature cooling device, comprising a box body with an installation cavity, a sealing plate, a temperature sensor, and a constant temperature driving mechanism for driving the sealing plate to close the opening of the installation cavity, wherein the installation cavity is used to place the mask plate body, a first channel arranged around the installation cavity is arranged in the box body, a first inlet and a first outlet communicated with the first channel are arranged in the box body, and the temperature sensor is used to detect the temperature of the installation cavity;

[0007] When the mask plate body needs to be treated at a constant temperature, the mask plate body is placed in the installation cavity, the constant temperature driving mechanism drives the sealing plate to seal the opening of the installation cavity, a fluid is introduced through the first inlet, the fluid flows in the first channel and flows out along the first outlet, and the mask plate body is placed at a constant temperature when the temperature of the installation cavity reaches a predetermined value;

[0008] After the constant temperature treatment is completed, the constant temperature driving mechanism drives the sealing plate away from the opening of the installation cavity, and the mask plate body is taken out from the installation cavity.

[0009] Wherein, the sealing plate is provided with a second channel corresponding to the opening of the installation cavity, and a second inlet and a second outlet are respectively provided at both ends of the second channel, and the second outlet is connected to the first inlet pipeline;

[0010] When the mask plate body needs to be treated at a constant temperature, the mask plate body is placed in the installation cavity, and the constant temperature driving mechanism drives the sealing plate to close the opening of the installation cavity, so that the second channel covers the opening of the installation cavity; the fluid is introduced into the second channel along the second inlet, and flows out along the first outlet after passing through the second outlet, the first inlet, and the first channel in sequence. When the temperature of the installation cavity reaches a predetermined value, the mask plate body is placed at a constant temperature.

[0011] Wherein, the box body includes a first splicing plate, a second splicing plate, a third splicing plate and a multi-way reversing valve, both ends of the first splicing plate are connected to the second splicing plate, the upper and lower ends of the first splicing plate and the second splicing plate are connected to the third splicing plate, the inner sides of the first splicing plate, the second splicing plate and the third splicing plate form an installation cavity, the first splicing plate, the second splicing plate and the third splicing plate are respectively provided with a first splicing channel, a second splicing channel and a third splicing channel, both ends of the first splicing channel, the second splicing channel and the third splicing channel are connected to the multi-way reversing valve, the first inlet is provided in the multi-way reversing valve, the first outlet is provided in the second splicing channel, and the first outlet is installed with a one-way valve;

[0012] When the one-way valve is closed, the fluid flows into the multi-way reversing valve along the first inlet and circulates among the first splicing channel, the second splicing channel and the third splicing channel in sequence. When the one-way valve is opened, the fluid is discharged along the first outlet.

[0013] Wherein, the first splicing plate includes a first main board and at least two first mounting plates sealed and connected to both ends of the first main board, the first splicing channel includes a first flow portion and a first guide portion, the first flow portion is arranged in parallel with the first main board and penetrates at both ends, the first guide portion is arranged on the first mounting plate, and the first guide portion alternately connects the same end of two adjacent first flow portions;

[0014] The second splicing plate includes a second main board and at least two second mounting plates sealed and connected to both ends of the second main board, the second splicing channel includes a second flow portion and a second guide portion, the second flow portion is arranged in parallel with the second main board and penetrates at both ends, the second guide portion is arranged on the second mounting plate, and the second guide portion alternately connects to the same end of two adjacent second flow portions;

[0015] The third splicing plate includes a third main board and at least two third mounting plates sealed and connected to both ends of the third main board. The third splicing channel includes a third flow portion and a third guide portion. The third flow portion is arranged in parallel to the third main board and penetrates at both ends. The third guide portion is arranged on the third mounting plate. The third guide portion alternately connects the same end of two adjacent third flow portions.

[0016] Wherein, the sealing plate includes a sealing main board and at least two sealing mounting plates sealingly connected to both ends of the sealing main board, the second channel includes a sealing flow portion and a sealing guide portion, the sealing flow portion is arranged in parallel to the sealing main board and passes through both ends, the sealing guide portion is arranged on the sealing mounting plate, the sealing guide portion alternately connects the same end of two adjacent sealing flow portions, and the second inlet and the second outlet are respectively provided with sealing flow portions located at both ends.

[0017] The constant temperature driving mechanism includes a constant temperature lifting module and a constant temperature opening and closing module, the constant temperature lifting module is drivingly connected to the constant temperature opening and closing module, the constant temperature opening and closing module is drivingly connected to the sealing plate, and a sealing ring is provided on one side of the sealing plate close to the installation cavity;

[0018] When the opening of the installation cavity needs to be sealed, the constant temperature lifting module drives the constant temperature opening and closing module to move upward, and the constant temperature opening and closing module drives the sealing plate to move toward the installation cavity, so that the sealing plate covers the opening of the installation cavity and the sealing ring abuts the outer peripheral edge of the opening end of the installation cavity.

[0019] The thermostatic opening and closing module comprises a thermostatic opening and closing frame and a thermostatic driving unit connected to the thermostatic opening and closing frame, the thermostatic opening and closing frame is drivingly connected to the thermostatic lifting module, the sealing plate is slidably connected to the thermostatic opening and closing frame, the thermostatic driving unit is drivingly connected to the sealing plate, and the thermostatic driving unit drives the sealing plate to approach or move away from the installation cavity;

[0020] The constant temperature opening and closing module also includes a constant temperature cover connected to the constant temperature opening and closing frame, the constant temperature opening and closing frame, the constant temperature driving unit and the sealing plate are located in the constant temperature cover, at least two sealing fans are installed on the side of the constant temperature opening and closing frame away from the sealing plate, and the bottom pipeline of the constant temperature cover is connected to a sealed dust exhaust pipe;

[0021] The sealing fan is used for negative pressure adsorption of dust between the constant temperature cover, the constant temperature opening and closing frame and the sealing plate and discharges the dust along the sealing dust exhaust pipe.

[0022] The mask plate constant temperature cooling device further comprises a mounting frame, the mounting frame is rotatably connected to a rotating shaft, the box body is connected to the rotating shaft, the mounting frame is connected to a first arm, the first arm is hinged to a second arm, the other end of the second arm is slidably embedded in the box body, and the second arm is parallel to the rotation center of the rotating shaft;

[0023] A locking piece is also connected between the mounting frame and the box body, and the locking piece locks the mounting frame and the box body when the box body rotates around the rotating shaft to a required angle.

[0024] Beneficial effects of the present invention:

[0025] In actual application, the mask plate body is placed on the bracket, and the bracket and the mask plate are placed in the installation cavity together. When the mask plate body needs to be treated at a constant temperature, the mask plate body is placed in the installation cavity, and the constant temperature driving mechanism drives the sealing plate to close the opening of the installation cavity, and the fluid is introduced through the first inlet. The fluid flows in the first channel and flows out along the first outlet. Since the first channel is arranged around the installation cavity, the contact area of ​​the fluid is effectively increased, the heat exchange efficiency is improved, and uneven cooling is prevented; when the temperature of the installation cavity reaches a predetermined value, the mask plate body is placed at a constant temperature, which can smoothly control the ambient temperature in the installation cavity, and is conducive to stabilizing the quality of the mask plate body; when the constant temperature treatment is completed, the constant temperature driving mechanism drives the sealing plate away from the opening of the installation cavity, and the mask plate body is taken out of the installation cavity. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 It is a schematic diagram of the three-dimensional structure of the constant temperature cooling device of the mask plate.

[0027] Figure 2 It is a structural cross-sectional view of the sealing plate.

[0028] Figure 3 It is a schematic diagram of the three-dimensional structure of the box.

[0029] Figure 4 It is a structural cross-sectional view of the first splicing plate.

[0030] Figure 5 It is a structural cross-sectional view of the second splicing plate.

[0031] Figure 6 It is a structural cross-sectional view of the third splicing plate.

[0032] Figure 7 Schematic diagram of the exploded structure of the second splicing plate.

[0033] Figure 8 Schematic diagram of the exploded structure of the first splicing plate.

[0034] Fig. 9 Schematic diagram of the exploded structure of the third splicing plate.

[0035] Fig.10 It is an exploded view of the box and the constant temperature drive mechanism.

[0036] Fig.11 It is a schematic diagram of the explosion structure of the constant temperature opening and closing module.

[0037] Fig.12It is a structural schematic diagram of the constant temperature opening and closing frame, the constant temperature driving unit and the sealing plate when they are located in the constant temperature cover.

[0038] Fig.13 It is a schematic diagram of an explosion structure having a sealing plate, a constant temperature opening and closing frame, a constant temperature driving unit and a constant temperature cover.

[0039] Fig.14 This is an exploded view of the box and mounting bracket.

[0040] Fig.15 It is a three-dimensional diagram of the box and the mounting frame.

[0041] 01. Mask plate body;

[0042] 1. Box body; 101. Installation cavity; 110. First inlet; 120. First outlet;

[0043] 11. first splicing plate; 111. first splicing channel; 1111. first flow portion; 1112. first flow guide portion;

[0044] 1101, a first main board; 1102, a first mounting board;

[0045] 12. second splicing plate; 121. second splicing channel; 1211. second flow portion; 1212. second flow guide portion;

[0046] 1201, second main board; 1202, second mounting board;

[0047] 13. third splicing plate; 131. third splicing channel; 1311. third flow portion; 1312. third flow guide portion;

[0048] 1301, a third main board; 1302, a third mounting board;

[0049] 14. Multi-way reversing valve;

[0050] 2. Sealing plate; 200. Second channel; 2001. Sealing flow portion; 2002. Sealing flow guide portion; 210. Second inlet; 220. Second outlet;

[0051] 201, sealing main board; 202, sealing mounting plate;

[0052] 21. Sealing ring;

[0053] 3. Temperature sensor; 4. Constant temperature drive mechanism;

[0054] 41. Constant temperature lifting module; 42. Constant temperature opening and closing module;

[0055] 421, constant temperature opening and closing frame; 4211, sealed fan; 422, constant temperature driving unit;

[0056] 423, constant temperature cover; 4231, sealed dust exhaust pipe;

[0057] 5. Mounting frame; 51. Rotating shaft; 52. First arm; 53. Second arm; 54. Locking member. DETAILED DESCRIPTION

[0058] To facilitate understanding by those skilled in the art, the present invention is further described below in conjunction with examples and drawings. Specific implementation methods of the present invention will be described below. It should be pointed out that in the specific description of these implementation methods, in order to provide a concise description, this specification cannot provide a detailed description of all features of the actual implementation methods.

[0059] refer to Figures 1 to 15 As shown, the present invention provides a mask plate constant temperature cooling device, comprising a box body 1 with an installation cavity 101, a sealing plate 2, a temperature sensor 3, and a constant temperature driving mechanism 4 for driving the sealing plate 2 to close the opening of the installation cavity 101, wherein the installation cavity 101 is used to place the mask plate body 01, a first channel arranged around the installation cavity 101 is arranged in the box body 1, and a first inlet 110 and a first outlet 120 connected to the first channel are arranged in the box body 1, and the temperature sensor 3 is used to detect the temperature of the installation cavity 101; in actual application, the mask plate body 01 is placed on a bracket, and the bracket and the mask plate are placed together in the installation cavity 101, and when the mask plate body 01 needs to be treated at a constant temperature, the mask plate body 01 is placed on the ... The plate body 01 is placed in the installation cavity 101, and the constant temperature driving mechanism 4 drives the sealing plate 2 to close the opening of the installation cavity 101. The fluid is introduced through the first inlet 110, and the fluid flows in the first channel and flows out along the first outlet 120. Since the first channel is arranged around the installation cavity 101, the contact area of ​​the fluid is effectively increased, the heat exchange efficiency is improved, and uneven cooling is prevented; when the temperature of the installation cavity 101 reaches a predetermined value, the mask plate body 01 is placed at a constant temperature, which can smoothly control the ambient temperature in the installation cavity 101, and is conducive to stabilizing the quality of the mask plate body 01; when the constant temperature treatment is completed, the constant temperature driving mechanism 4 drives the sealing plate 2 away from the opening of the installation cavity 101, and takes the mask plate body 01 out of the installation cavity 101.

[0060] refer to Figure 2 As shown, in this embodiment, the sealing plate 2 is provided with a second channel 200 corresponding to the opening of the installation cavity 101, and a second inlet 210 and a second outlet 220 are respectively provided at both ends of the second channel 200, and the second outlet 220 is connected to the first inlet 110 by pipeline; in actual application, when the mask plate body 01 needs to be treated with a constant temperature, the mask plate body 01 is placed in the installation cavity 101, and the constant temperature driving mechanism 4 drives the sealing plate 2 to close the opening of the installation cavity 101, so that the second channel 200 covers the opening of the installation cavity 101; the fluid is introduced into the second channel 200 along the second inlet 210, and the reference Figure 1 As shown, the fluid passes through the second outlet 220, the first inlet 110, and the first channel in sequence and then flows out along the first outlet 120. When the temperature of the installation cavity 101 reaches a predetermined value, the mask plate body 01 is placed at a constant temperature, and the fluid is introduced along the same position and flows smoothly between the first channel and the second channel 200, so as to make full use of the fluid, save resources, and avoid waste of the fluid. Through the first channel and the second channel 200, the mask plate body 01 is temperature-controlled in all directions, so as to evenly cool the installation cavity 101. Specifically, the second outlet 220 and the first inlet 110 are connected by a telescopic tube, and the telescopic tube is synchronously extended and retracted when the sealing plate 2 is raised or lowered, so as to meet the smooth flow of the fluid between the second outlet 220 and the first inlet 110.

[0061] refer to Figures 3 to 6 As shown, in this embodiment, the box body 1 includes a first splicing plate 11, a second splicing plate 12, a third splicing plate 13 and a multi-way reversing valve 14, both ends of the first splicing plate 11 are connected to the second splicing plate 12, the upper and lower ends of the first splicing plate 11 and the second splicing plate 12 are connected to the third splicing plate 13, the inner sides of the first splicing plate 11, the second splicing plate 12 and the third splicing plate 13 form an installation cavity 101, the first splicing plate 11, the second splicing plate 12 and the third splicing plate 13 are respectively provided with a first splicing channel 111, a second splicing channel 121 and a third splicing channel 131, the first splicing channel 111, the second splicing channel 121 and the third splicing channel 131 are all connected to the multi-way reversing valve 14 at both ends, refer to Figure 3 , 7 As shown, the first inlet 110 is arranged in the multi-way reversing valve 14, the first outlet 120 is arranged in the second splicing channel 121, and the first outlet 120 is installed with a one-way valve.

[0062] refer to Figure 3 , 7 As shown, in actual application, the fluid is introduced into the multi-way reversing valve 14 along the first inlet 110, and when the one-way valve is closed, the reference Figures 4 to 6 As shown, the fluid actually passes through the first splicing channel 111, the second splicing channel 121 and the third splicing channel 131 in sequence, flows out of the third splicing channel 131 and then flows into the first splicing channel 111 again, thereby realizing the recycling of the fluid; when the one-way valve is opened, the fluid is discharged along the first outlet 120.

[0063] refer to Figure 4 , 8As shown, in this embodiment, the first splicing plate 11 includes a first main board 1101 and at least two first mounting plates 1102 sealed and connected to both ends of the first main board 1101, the first splicing channel 111 includes a first flow portion 1111 and a first guide portion 1112, the first flow portion 1111 is arranged in parallel to the first main board 1101 and penetrates at both ends, the first guide portion 1112 is arranged on the first mounting plate 1102, and the first guide portion 1112 alternately connects to the same end of two adjacent first flow portions 1111; refer to Figure 8 As shown, in actual application, the fluid flows alternately along the first flow portion 1111 and the first guide portion 1112, and the first mounting plate 1102 is installed with a first sealing ring, which seals the connection between the first flow portion 1111 and the first guide portion 1112 to prevent the fluid from leaking along the gap between the first flow portion 1111 and the first guide portion 1112. Specifically, the first main board 1101 and the first mounting plate 1102 are detachably connected. When the internal fluid of the first splicing channel 111 leaks, the two ends of the first splicing channel 111 are closed by the multi-way reversing valve 14, and the passage of the fluid in the first splicing channel 111 is isolated, which is convenient for independent maintenance of the first splicing channel 111. The first main board 1101 and the first mounting plate 1102 can be separated to smoothly replace or repair the first sealing ring, the first flow portion 1111 or the first guide portion 1112 at the corresponding position, which is beneficial to ensure the internal sealing performance of the first splicing channel 111 and improve the service life of the first splicing plate 11.

[0064] refer to Figure 5 , 7 As shown, the second splicing plate 12 includes a second main board 1201 and at least two second mounting plates 1202 sealed and connected to both ends of the second main board 1201, the second splicing channel 121 includes a second flow portion 1211 and a second guide portion 1212, the second flow portion 1211 is arranged in parallel to the second main board 1201 and penetrates at both ends, the second guide portion 1212 is arranged on the second mounting plate 1202, and the second guide portion 1212 alternately connects the same end of two adjacent second flow portions 1211; in actual application, refer to Figure 5 , 7As shown, the fluid flows alternately along the second flow portion 1211 and the second guide portion 1212, and the second mounting plate 1202 is installed with a second sealing ring, which seals the connection between the second flow portion 1211 and the second guide portion 1212 to prevent the fluid from leaking along the gap between the second flow portion 1211 and the second guide portion 1212. Specifically, the second main board 1201 and the second mounting plate 1202 are detachably connected. When the internal fluid of the second splicing channel 121 leaks, the two ends of the second splicing channel 121 are closed by the multi-way reversing valve 14, and the passage of the fluid in the second splicing channel 121 is isolated, which is convenient for independent maintenance of the second splicing channel 121. The second main board 1201 and the second mounting plate 1202 can be separated to smoothly replace or repair the second sealing ring, the second flow portion 1211 or the second guide portion 1212 at the corresponding position, which is beneficial to ensure the internal sealing performance of the second splicing channel 121 and improve the service life of the second splicing plate 12.

[0065] refer to Figure 6 , 9 As shown, the third splicing plate 13 includes a third main board 1301 and at least two third mounting plates 1302 sealed and connected to both ends of the third main board 1301, the third splicing channel 131 includes a third flow portion 1311 and a third guide portion 1312, the third flow portion 1311 is arranged in parallel to the third main board 1301 and penetrates at both ends, the third guide portion 1312 is arranged on the third mounting plate 1302, and the third guide portion 1312 alternately connects the same end of two adjacent third flow portions 1311; in actual application, refer to Fig. 9 As shown, the fluid flows alternately along the third flow portion 1311 and the third guide portion 1312, and the third mounting plate 1302 is installed with a third sealing ring, which seals the connection between the third flow portion 1311 and the third guide portion 1312 to prevent the fluid from leaking along the gap between the third flow portion 1311 and the third guide portion 1312. Specifically, the third main board 1301 and the third mounting plate 1302 are detachably connected. When the internal fluid of the third splicing channel 131 leaks, the two ends of the third splicing channel 131 are closed by the multi-way reversing valve 14, and the passage of the fluid in the third splicing channel 131 is isolated, which is convenient for independent maintenance of the third splicing channel 131. The third main board 1301 is separated from the third mounting plate 1302, and the third sealing ring, the third flow portion 1311 or the third guide portion 1312 at the corresponding position can be smoothly replaced or repaired, which is beneficial to ensure the internal sealing performance of the third splicing channel 131 and improve the service life of the third splicing plate 13.

[0066] refer to Figure 2As shown, in this embodiment, the sealing plate 2 includes a sealing main board 201 and at least two sealing mounting plates 202 sealingly connected to both ends of the sealing main board 201, the second channel 200 includes a sealing flow portion 2001 and a sealing guide portion 2002, the sealing flow portion 2001 is arranged in parallel to the sealing main board 201 and penetrates at both ends, the sealing guide portion 2002 is arranged on the sealing mounting plate 202, the sealing guide portion 2002 alternately connects the same end of two adjacent sealing flow portions 2001, the second inlet 210 and the second outlet 220 are respectively provided with the sealing flow portions 2001 located at both ends; in actual application, the fluid alternately flows along the sealing flow portion 2001 and the sealing guide portion 2002, and the sealing mounting plate 202 is installed with The fourth sealing ring seals the connection between the sealing flow part 2001 and the sealing guide part 2002 to prevent the fluid from leaking along the gap between the sealing flow part 2001 and the sealing guide part 2002. Specifically, the sealing main board 201 and the sealing mounting plate 202 are detachably connected. When the fluid leaks inside the second channel 200, the second inlet 210 and the second outlet 220 are closed, and the passage of the fluid in the second channel 200 is isolated, which is convenient for independent inspection of the second channel 200. The sealing main board 201 is separated from the sealing mounting plate 202, and the fourth sealing ring, the sealing flow part 2001 or the sealing guide part 2002 at the corresponding position can be smoothly replaced or repaired, which is beneficial to ensure the internal sealing performance of the second channel 200 and improve the service life of the sealing plate 2.

[0067] refer to Fig.10 As shown, in this embodiment, the constant temperature driving mechanism 4 includes a constant temperature lifting module 41 and a constant temperature opening and closing module 42, the constant temperature lifting module 41 is drivingly connected to the constant temperature opening and closing module 42, the constant temperature opening and closing module 42 is drivingly connected to the sealing plate 2, and a sealing ring 21 is provided on the side of the sealing plate 2 close to the installation cavity 101; in actual application, the constant temperature lifting module 41 is installed on the box body 1, and the constant temperature lifting module 41 adopts a screw motor module, a cylinder or an electric cylinder. When it is necessary to seal the opening of the installation cavity 101, the constant temperature lifting module 41 drives the constant temperature opening and closing module 42 to move upward, and the constant temperature opening and closing module 42 drives the sealing plate 2 to move toward the installation cavity 101, so that the sealing plate 2 covers the opening of the installation cavity 101, and the sealing ring 21 abuts against the outer peripheral edge of the opening end of the installation cavity 101, and the gap between the installation cavity 101 and the sealing plate 2 is smoothly closed by the sealing ring 21, thereby enhancing the sealing performance and facilitating the stable adjustment of the temperature change in the installation cavity 101.

[0068] refer to Fig.11 , 12As shown, in this embodiment, the constant temperature opening and closing module 42 includes a constant temperature opening and closing frame 421 and a constant temperature driving unit 422 connected to the constant temperature opening and closing frame 421, the constant temperature opening and closing frame 421 is drivingly connected to the constant temperature lifting module 41, the sealing plate 2 is slidably connected to the constant temperature opening and closing frame 421, the constant temperature driving unit 422 is drivingly connected to the sealing plate 2, and the constant temperature driving unit 422 drives the sealing plate 2 to move closer to or away from the installation cavity 101; in actual application, the constant temperature driving unit 422 adopts a cylinder, an electric cylinder or an oil cylinder, and the constant temperature lifting module 41 drives the constant temperature opening and closing module 4 2 moves downward, and the sealing plate 2 is driven to be at the end away from the installation cavity 101 by the constant temperature opening and closing module 42, and then the mask plate body 01 is placed in the installation cavity 101. After the mask plate body 01 is placed, the constant temperature lifting module 41 drives the constant temperature opening and closing module 42 to move upward to the required position, and the constant temperature opening and closing module 42 drives the sealing plate 2 to move toward the installation cavity 101, so that the sealing ring 21 abuts against the outer peripheral edge of the opening end of the installation cavity 101, so that the sealing ring 21 can smoothly close the gap between the installation cavity 101 and the sealing plate 2, and ensure the sealing performance between the sealing plate 2 and the box body 1.

[0069] refer to Fig.11 , 13 As shown, the constant temperature opening and closing module 42 also includes a constant temperature cover 423 connected to the constant temperature opening and closing frame 421, Fig.12 As shown, the constant temperature opening and closing frame 421, the constant temperature driving unit 422 and the sealing plate 2 are located in the constant temperature cover 423, and at least two sealing fans 4211 are installed on the side of the constant temperature opening and closing frame 421 away from the sealing plate 2. The bottom pipeline of the constant temperature cover 423 is connected with a sealed dust exhaust pipe 4231; the sealed fan 4211 is used for negative pressure adsorption of dust between the constant temperature cover 423, the constant temperature opening and closing frame 421 and the sealing plate 2 and discharges it along the sealed dust exhaust pipe 4231; in actual application, refer to Figure 1 , 11 As shown in Figures 13, when the sealing plate 2 is separated from the installation cavity 101, the sealing fan 4211 is started. The sealing fan 4211 absorbs dust between the constant temperature cover 423, the constant temperature opening and closing frame 421 and the sealing plate 2 through negative pressure and discharges it along the sealing dust exhaust pipe 4231, so as to facilitate cleaning of dust between the constant temperature cover 423, the constant temperature opening and closing frame 421 and the sealing plate 2, so as to facilitate the sealing plate 2 and the installation cavity 101 to be in a clean and tidy use environment, thereby improving the processing quality of the mask plate body 01.

[0070] refer to Fig.14 , 15As shown, in this embodiment, the mask plate constant temperature cooling device also includes a mounting frame 5, the mounting frame 5 is rotatably connected to a rotating shaft 51, the box body 1 is connected to the rotating shaft 51, the mounting frame 5 is connected to a first arm 52, the first arm 52 is hinged to a second arm 53, the other end of the second arm 53 is slidably embedded in the box body 1, and the second arm 53 is parallel to the rotation center of the rotating shaft 51; a locking member 54 is also connected between the mounting frame 5 and the box body 1, and the locking member 54 locks the mounting frame 5 and the box body 1 when the box body 1 rotates around the rotating shaft 51 to a desired angle.

[0071] In actual application, when the horizontal placement angle of the box body 1 needs to be adjusted, the box body 1 is rotated along the rotation axis 51 by external force or manual force, driving the second arm 53 to swing synchronously with the box body 1, and the free end of the second arm 53 slides on the box body 1. Fig.14 As shown, the mounting frame 5 supports the box body 1 through the rotating shaft 51, the first arm 52 and the second arm 53 to ensure the structural stability of the box body 1. The box body 1 is stably supported by the first arm 52 and the second arm 53. Specifically, a level can be placed on the box body 1. When the box body 1 is rotated to a desired position, for example, the center line of the box body 1 is collinear with the X-axis direction; the water droplets in the level are in an intermediate state. The installation position of the box body 1 is stabilized by installing a gasket or a silicon steel sheet at the bottom of the box body 1, and then the mounting frame 5 is locked with the box body 1 by a locking member 54; refer to Fig.14 As shown, specifically, the box body 1 is provided with a locking hole, the mounting frame 5 is provided with a mounting hole, the locking member 54 is a locking screw, and the inner end of the locking screw passes through the mounting hole and is locked in the locking hole to achieve locking of the mounting frame 5 and the box body 1.

[0072] The above description is only a preferred embodiment of the present invention and does not limit the present invention in any form. Although the present invention is disclosed as a preferred embodiment as above, it is not used to limit the present invention. Any technician familiar with the profession can make some changes or modifications to equivalent embodiments of equivalent changes by using the technical contents disclosed above without departing from the scope of the technical solution of the present invention. However, any simple modification, equivalent changes and modifications made to the above embodiments according to the technology of the present invention are within the scope of the technical solution of the present invention without departing from the content of the technical solution of the present invention.

Claims

1. A mask plate constant temperature cooling device, characterized in that: The invention comprises a box (1) having an installation cavity (101), a sealing plate (2), a temperature sensor (3), and a constant temperature driving mechanism (4) for driving the sealing plate (2) to seal the opening of the installation cavity (101); the installation cavity (101) is used to place a mask plate body (01); a first channel arranged around the installation cavity (101) is arranged in the box (1); the box (1) is provided with a first inlet (110) and a first outlet (120) which are in communication with the first channel; and the temperature sensor (3) is used to detect the temperature of the installation cavity (101); When the mask plate body (01) needs to be treated at a constant temperature, the mask plate body (01) is placed in the installation cavity (101), the constant temperature drive mechanism (4) drives the sealing plate (2) to seal the opening of the installation cavity (101), a fluid is introduced through the first inlet (110), the fluid flows in the first channel and flows out along the first outlet (120), and the mask plate body (01) is placed at a constant temperature when the temperature of the installation cavity (101) reaches a predetermined value; When the constant temperature treatment is completed, the constant temperature driving mechanism (4) drives the sealing plate (2) away from the opening of the installation cavity (101), and the mask plate body (01) is taken out of the installation cavity (101).

2. The mask plate constant temperature cooling device according to claim 1, characterized in that: The sealing plate (2) is provided with a second channel (200) corresponding to the opening of the installation cavity (101), and a second inlet (210) and a second outlet (220) are respectively provided at both ends of the second channel (200), and the second outlet (220) is connected to the first inlet (110) pipeline; When the mask plate body (01) needs to be treated at a constant temperature, the mask plate body (01) is placed in the installation cavity (101), and the constant temperature driving mechanism (4) drives the sealing plate (2) to seal the opening of the installation cavity (101), so that the second channel (200) covers the opening of the installation cavity (101); the fluid is introduced into the second channel (200) along the second inlet (210), and sequentially passes through the second outlet (220), the first inlet (110), and the first channel before flowing out along the first outlet (120); when the temperature of the installation cavity (101) reaches a predetermined value, the mask plate body (01) is placed at a constant temperature.

3. The mask plate constant temperature cooling device according to claim 1, characterized in that: The box body (1) comprises a first splicing plate (11), a second splicing plate (12), a third splicing plate (13) and a multi-way reversing valve (14); both ends of the first splicing plate (11) are connected to the second splicing plate (12); the upper and lower ends of the first splicing plate (11) and the second splicing plate (12) are connected to the third splicing plate (13); the inner sides of the first splicing plate (11), the second splicing plate (12) and the third splicing plate (13) form an installation cavity (101); the first splicing plate (11), the second splicing plate (12) and the third splicing plate (13) are connected to the second splicing plate (13); The plate (12) and the third splicing plate (13) are respectively provided with a first splicing channel (111), a second splicing channel (121) and a third splicing channel (131); both ends of the first splicing channel (111), the second splicing channel (121) and the third splicing channel (131) are connected to the multi-way reversing valve (14); the first inlet (110) is provided in the multi-way reversing valve (14); the first outlet (120) is provided in the second splicing channel (121); and the first outlet (120) is installed with a one-way valve; When the one-way valve is closed, the fluid flows into the multi-way reversing valve (14) along the first inlet (110) and circulates in sequence between the first splicing channel (111), the second splicing channel (121) and the third splicing channel (131); when the one-way valve is opened, the fluid is discharged along the first outlet (120).

4. The mask plate constant temperature cooling device according to claim 3, characterized in that: The first splicing plate (11) comprises a first main plate (1101) and at least two first mounting plates (1102) sealedly connected to two ends of the first main plate (1101); the first splicing channel (111) comprises a first flow portion (1111) and a first flow guide portion (1112); the first flow portion (1111) is arranged in parallel with the first main plate (1101) and penetrates through both ends; the first flow guide portion (1112) is arranged on the first mounting plate (1102); the first flow guide portion (1112) alternately connects the same end of two adjacent first flow portions (1111); The second splicing plate (12) comprises a second main plate (1201) and at least two second mounting plates (1202) sealed and connected to two ends of the second main plate (1201); the second splicing channel (121) comprises a second flow portion (1211) and a second flow guide portion (1212); the second flow portion (1211) is arranged in parallel with the second main plate (1201) and penetrates through both ends; the second flow guide portion (1212) is arranged on the second mounting plate (1202); the second flow guide portion (1212) alternately connects to the same end of two adjacent second flow portions (1211); The third splicing plate (13) comprises a third main plate (1301) and at least two third mounting plates (1302) sealed and connected to both ends of the third main plate (1301); the third splicing channel (131) comprises a third flow portion (1311) and a third flow guide portion (1312); the third flow portion (1311) is arranged in parallel with the third main plate (1301) and penetrates at both ends; the third flow guide portion (1312) is arranged on the third mounting plate (1302); the third flow guide portion (1312) alternately connects the same end of two adjacent third flow portions (1311).

5. The mask plate constant temperature cooling device according to claim 2, characterized in that: The sealing plate (2) comprises a sealing main plate (201) and at least two sealing mounting plates (202) sealingly connected to both ends of the sealing main plate (201); the second channel (200) comprises a sealing flow portion (2001) and a sealing flow guide portion (2002); the sealing flow portion (2001) is arranged in parallel with the sealing main plate (201) and penetrates through both ends; the sealing flow guide portion (2002) is arranged on the sealing mounting plate (202); the sealing flow guide portion (2002) alternately connects to the same end of two adjacent sealing flow portions (2001); the second inlet (210) and the second outlet (220) are respectively arranged at the sealing flow portion (2001) at both ends.

6. The mask plate constant temperature cooling device according to claim 1, characterized in that: The constant temperature driving mechanism (4) comprises a constant temperature lifting module (41) and a constant temperature opening and closing module (42), the constant temperature lifting module (41) is drivingly connected to the constant temperature opening and closing module (42), the constant temperature opening and closing module (42) is drivingly connected to the sealing plate (2), and a sealing ring (21) is provided on one side of the sealing plate (2) close to the installation cavity (101); When it is necessary to seal the opening of the installation cavity (101), the constant temperature lifting module (41) drives the constant temperature opening and closing module (42) to move upwards, and the constant temperature opening and closing module (42) drives the sealing plate (2) to move toward the installation cavity (101), so that the sealing plate (2) covers the opening of the installation cavity (101) and the sealing ring (21) abuts against the outer peripheral edge of the opening end of the installation cavity (101).

7. The mask plate constant temperature cooling device according to claim 6, characterized in that: The constant temperature opening and closing module (42) comprises a constant temperature opening and closing frame (421) and a constant temperature driving unit (422) connected to the constant temperature opening and closing frame (421); the constant temperature opening and closing frame (421) is drivingly connected to the constant temperature lifting module (41); the sealing plate (2) is slidably connected to the constant temperature opening and closing frame (421); the constant temperature driving unit (422) is drivingly connected to the sealing plate (2); the constant temperature driving unit (422) drives the sealing plate (2) to approach or move away from the installation cavity (101); The constant temperature opening and closing module (42) further comprises a constant temperature cover (423) connected to the constant temperature opening and closing frame (421); the constant temperature opening and closing frame (421), the constant temperature driving unit (422) and the sealing plate (2) are located in the constant temperature cover (423); at least two sealing fans (4211) are installed on a side of the constant temperature opening and closing frame (421) facing away from the sealing plate (2); and a sealed dust exhaust pipe (4231) is connected to the bottom pipeline of the constant temperature cover (423); The sealing fan (4211) is used to absorb dust between the constant temperature cover (423), the constant temperature opening and closing frame (421) and the sealing plate (2) under negative pressure and discharge the dust along the sealing dust exhaust pipe (4231).

8. The mask plate constant temperature cooling device according to claim 1, characterized in that: The mask plate constant temperature cooling device also includes a mounting frame (5), the mounting frame (5) is rotatably connected to a rotating shaft (51), the box (1) is connected to the rotating shaft (51), the mounting frame (5) is connected to a first arm (52), the first arm (52) is hinged to a second arm (53), the other end of the second arm (53) is slidably embedded in the box (1), and the second arm (53) is parallel to the rotation center of the rotating shaft (51); A locking member (54) is also connected between the mounting frame (5) and the box body (1); when the box body (1) rotates around the rotating shaft (51) to a required angle, the locking member (54) locks the mounting frame (5) and the box body (1).

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