Silicon wafer full basket detection pre-selection butt joint device and pre-selection butt joint method

Abstract

The invention provides a silicon wafer full basket detection, pre-selection and butt joint device and a pre-selection and butt joint method, and belongs to the field of silicon wafer production and processing.The silicon wafer full basket detection, pre-selection and butt joint device comprises a silicon wafer feeding and butt joint belt line, a full basket defect detection module, a full basket defect removal module and a butt joint section basket transfer module; the full basket defect removing module adopts a concentric-square-shaped material basket supply mode of upper-layer output of defect baskets and lower-layer inflow and lifting of repairing baskets; and the butt-joint section basket transfer module is used for space transfer of the silicon wafer basket. The pre-selection butt joint method comprises the steps of silicon wafer cooling, full basket upper layer detection, full basket lower layer detection, basket transferring, NG basket repairing and repairing basket transferring. Compared with the prior art, the butt-joint device has the beneficial effects that the butt-joint device integrates the functions of silicon wafer cooling, optical detection, screening, repairing and the like, the silicon wafer quality is ensured, the follow-up sorting time is saved, and the butt-joint device is convenient to popularize and apply in the field of silicon wafer processing and production.

Description

Technical Field

[0001] The present invention belongs to the field of silicon wafer production and processing, and in particular relates to a silicon wafer full basket detection pre-selection docking device and a pre-selection docking method. Background Art

[0002] After the existing silicon wafer debonding, wafer insertion, and cleaning processes, in order to improve efficiency, the subsequent process flow, such as the silicon wafer sorter, will be docked at the end of the cleaning machine. The existing docking method directly arranges the silicon wafer sorter after the cleaning machine, and uses manual or robotic arms to directly transport the cleaned and dried silicon wafers to the sorter for defect detection and sorting. This greatly causes time consumption in the subsequent sorting process, because a higher probability of defective wafers will enter the sorting machine, resulting in an increase in the workload of debris removal and other obvious defect work in the subsequent sorting.

[0003] In addition, there is a material basket that is obviously not a normal full basket entering the subsequent sorting section, which will also cause a waste of process time.

[0004] Therefore, in order to reduce subsequent time waste, it is necessary to design a pre-sorting docking section. Summary of the invention

[0005] In order to overcome the deficiencies of the prior art, an object of the present invention is to provide a silicon wafer full basket detection pre-selection docking device and a pre-selection docking method, which can solve the above-mentioned problems.

[0006] A silicon wafer full basket detection pre-selection docking device comprises a silicon wafer feeding docking belt line, a full basket defect detection module, a full basket defect rejection module and a docking section basket transfer module; the full basket defect detection module and the full basket defect rejection module are arranged at the streamline ends of the silicon wafer feeding docking belt line; the full basket defect rejection module adopts a "U"-shaped material basket supply method with an upper layer of a defect basket output and a lower layer of a repair basket inflow and lifting; the docking section basket transfer module is used for the spatial transfer of silicon wafer baskets.

[0007] Optionally, the silicon wafer feeding docking belt line includes a docking belt frame, a belt drive assembly and a docking belt; a plurality of belt basket sensors are arranged on the docking belt frame on both sides of the docking belt.

[0008] Optionally, the full basket defect detection module includes an upper layer detection component of the flower basket and a lower layer detection component, and the upper layer detection component of the flower basket and the lower layer detection component both include a defect detection camera unit, a detection light source and a detection outer sealing plate arranged on a detection frame, wherein the defect detection camera unit and the detection light source of the upper layer detection component of the flower basket are arranged downward, and the defect detection camera unit and the detection light source of the lower layer detection component of the flower basket are arranged upward.

[0009] Optionally, the full basket defect rejection module includes a full basket output streamline, a full basket rejection lifting streamline, a full basket inflow streamline and a full basket repair lifting streamline arranged on a full blue defect rejection rack; the full basket output streamline and the full basket inflow streamline are arranged on the full blue defect rejection rack with upper and lower intervals, the full basket rejection lifting streamline is vertically arranged at the outer end of the full basket output streamline, and the full basket repair lifting streamline is vertically arranged at the inner end of the full basket inflow streamline.

[0010] Optionally, the full basket output streamline and the full basket inflow streamline both include a full basket streamline rack, a full basket streamline drive assembly, a full basket streamline blocking buffer block assembly and a full basket streamline in-position sensor; the full basket streamline drive assembly is arranged on the full basket streamline rack, and the full basket streamline blocking buffer block assembly and the full basket streamline in-position sensor are arranged on both sides of the full basket streamline rack in the transport direction; the full basket output streamline and / or the full basket inflow streamline also include side guide plates and side pushing modules for guiding the silicon wafer flower basket.

[0011] Optionally, the full basket rejection lifting streamline includes a flower basket lifting chain platform, a lifting upper side plate, a lifting lower side plate, a material rejection lifting cylinder and a material rejection lifting guide assembly; the side of the flower basket lifting chain platform is supported and arranged between the two lifting upper side plates, and the two material rejection lifting cylinders are vertically arranged between the corresponding side lifting upper side plates and the lifting lower side plates, the top of the piston rod of the upper part of the material rejection lifting cylinder is connected to the outer side of the top of the lifting upper side plate, and the outer side and bottom of the cylinder of the lower part of the material rejection lifting cylinder are connected to the inner side of the lifting lower side plate, and a material rejection lifting guide assembly is arranged on both sides of the material rejection lifting cylinder on each lifting lower side plate, and the top of the material rejection lifting guide assembly is connected to the bottom of the lifting upper side plate through a guide side support plate.

[0012] Optionally, the full basket repair lifting streamline includes a flower basket lifting platform, an upper lifting mounting plate, a lower lifting mounting plate, a repair lifting assembly and a repair lifting guide assembly; one side of the repair lifting assembly is fixed to the outer side surfaces of the upper lifting mounting plate and the lower lifting mounting plate, the drive transmission section of the repair lifting assembly is connected to the flower basket lifting platform, and the repair lifting guide assembly is arranged on both sides of the repair lifting assembly and connected to the outer side surfaces of the upper lifting mounting plate and the lower lifting mounting plate.

[0013] Optionally, the silicon wafer full basket detection pre-selection docking device also includes a silicon wafer basket cooling module, and the silicon wafer basket cooling module is arranged across the silicon wafer feeding docking belt line to cool the full wafer basket below.

[0014] Optionally, the docking section flower basket transfer module uses a robot or a clamping claw that moves in the overhead space set on a frame.

[0015] The present invention also provides a pre-selection docking method, which includes: S1, silicon wafer cooling, S2, full basket upper layer detection, S3, full basket lower layer detection, S4, flower basket transportation, S5, NG flower basket repair, S6, repair basket transportation.

[0016] Compared with the prior art, the beneficial effects of the present invention are: the docking device of the present application integrates functions such as silicon wafer cooling, optical detection, screening, and repair, which ensures the quality of silicon wafers, saves time for subsequent sorting, and is easy to promote and apply in the field of silicon wafer processing and production. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a structural schematic diagram of the silicon wafer full basket detection pre-selection docking device of the present invention;

[0018] Figure 2 A schematic diagram of a portion of the structure of a pre-selection docking device for full basket detection of silicon wafers;

[0019] Figure 3 This is a schematic diagram of the upper detection component of the flower basket;

[0020] Figure 4 It is a schematic diagram of the lower layer detection component of the flower basket;

[0021] Figure 5 This is a schematic diagram of the full basket defect removal module;

[0022] Figure 6 It is a schematic diagram of the output streamline of the full basket;

[0023] Figure 7 It is a schematic diagram of the inflow streamline of a full basket;

[0024] Figure 8 This is a schematic diagram of the lifting and lowering streamlines after removing the full basket;

[0025] Fig. 9 Schematic diagram of the lifting and lowering flow lines for the full basket repair;

[0026] Fig.10 A schematic diagram of an example of a docking section flower basket transfer module.

[0027] In the figure,

[0028] 100. Silicon wafer feeding docking belt line; 110. Docking belt rack; 120. Belt drive assembly; 130. Docking belt; 140. Belt basket sensor;

[0029] 200, full basket defect detection module; 210, flower basket upper layer detection component; 220, flower basket lower layer detection component; 201, detection frame; 202, defect detection camera unit; 203, detection light source; 204, detection outer sealing plate;

[0030] 300, full basket defect rejection module; 310, full basket output flow line; 301, full basket flow line rack; 302, full basket flow line drive assembly; 303, full basket flow line blocking buffer block assembly; 304, full basket flow line in place sensor; 305, side guide plate; 306, side push module; 320, full basket rejection lifting flow line; 321, flower basket lifting chain platform; 322, lifting upper side plate; 323, lifting lower side plate; 324, material removal lifting cylinder; 3 25. Material removal lifting guide assembly; 326. Guide side support plate; 330. Full basket inflow flow line; 340. Full basket repair lifting flow line; 341. Flower basket lifting platform; 342. Lifting upper mounting plate; 343. Lifting lower mounting plate; 344. Repair lifting assembly; 345. Repair lifting guide assembly; 346. Repair lifting limiter; 347. Repair lifting travel limiter; 348. Repair lifting in-place sensor; 350. Full blue defect material removal rack;

[0031] 400, docking section flower basket transfer module;

[0032] 500. Silicon wafer basket cooling module. DETAILED DESCRIPTION

[0033] In order to make the purpose, technical solution and advantages of the embodiments of the present invention clearer, the technical solution in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0034] Wafer full basket detection pre-selection docking device

[0035] A silicon wafer full basket detection pre-selection docking device, see Figure 1-Figure 10 The silicon wafer full basket detection pre-selection docking device includes a silicon wafer feeding docking belt line 100, a full basket defect detection module 200, a full basket defect rejection module 300 and a docking section basket transfer module 400.

[0036] Specifically, the full basket defect detection module 200 and the full basket defect rejection module 300 are arranged at the streamline end of the silicon wafer feeding and docking belt line 100; the full basket defect rejection module 300 adopts a "U"-shaped material basket supply method with upper-layer output of the defect basket and lower-layer inflow and lifting of the repair basket; the docking section flower basket transfer module 400 is used for the spatial transfer of the silicon wafer flower basket.

[0037] See also Figure 2The silicon wafer feeding docking belt line 100 includes a docking belt frame 110, a belt driving assembly 120 and a docking belt 130; a plurality of belt basket sensors 140 are arranged on the docking belt frame 110 on both sides of the docking belt 130.

[0038] The belt drive assembly 120 includes a docking belt drive motor, a drive sprocket, a chain, a drive roller and a transmission roller. The number of belt basket sensors 140 is related to the maximum number of silicon wafer baskets that the docking belt 130 can bear, and is also related to the corresponding feed sensing, discharge sensing, cooling station, and detection station positions.

[0039] The full basket defect detection module 200 includes a basket upper layer detection component 210 and a basket lower layer detection component 220, see Figure 3 and Figure 4 The flower basket upper layer detection component 210 and the flower basket lower layer detection component 220 both include a defect detection camera unit 202, a detection light source 203 and a detection outer sealing plate 204 arranged on a detection frame 201, wherein the defect detection camera unit 202 and the detection light source 203 of the flower basket upper layer detection component 210 are arranged downward, and the defect detection camera unit 202 and the detection light source 203 of the flower basket lower layer detection component 220 are arranged upward.

[0040] In a specific example, the detection frame 201 is a box frame structure formed by profiles, and a plurality of defect detection camera units 202 are arranged side by side and spaced in the middle of the upper part of the detection frame 201, and a plurality of detection outer sealing plates 204 are arranged around the upper part of the detection frame 201 at the camera and the light source. For the upper layer detection component 210 of the flower basket, the lower part is illuminated downward; for the lower layer detection component 220 of the flower basket, the detection light source 203 is arranged above the defect detection camera unit 202 and illuminates upward.

[0041] The detection light source 203 is a strip light, and the detection outer sealing plate 204 is a mirror-finished stainless steel plate.

[0042] See also Figure 5 The full basket defect rejection module 300 includes a full basket output streamline 310, a full basket rejection lifting streamline 320, a full basket inflow streamline 330 and a full basket repair lifting streamline 340 arranged on a full blue defect rejection rack 350. The full basket output streamline 310 and the full basket inflow streamline 330 are arranged on the full blue defect rejection rack 350 with an interval up and down, the full basket rejection lifting streamline 320 is vertically arranged at the outer end of the full basket output streamline 310, and the full basket repair lifting streamline 340 is vertically arranged at the inner end of the full basket inflow streamline 330.

[0043] The full basket output flow line 310 is arranged downstream of the docking belt line 100, and the docking section flower basket transfer module 400 transfers the full basket detected with fragment defects from the previous station to the full basket output flow line 310. The full basket output flow line 310 is used to transfer the full basket detected with fragment defects to the manual repair position at the outer end; the full basket rejection lifting flow line 320 is arranged on the full blue defect rejection rack 350 at the outer end of the full basket output flow line 310, and is used to receive the manual repair position. The repaired full flower basket is lowered to the receiving position of the full basket inflow streamline 330; the full basket inflow streamline 330 is arranged below the full basket output streamline 310, and is used to transport the repaired full flower basket from the outside to the inside to the repair rising position; the full basket repair lifting streamline 340 is arranged vertically opposite to the full basket rejection lifting streamline 320, and is used to lift the repaired full flower basket from the full basket inflow streamline 330 to the repair transfer station flush with the full basket output streamline 310. The repaired full flower basket is transferred from the full basket repair lifting streamline 340 to a downstream station, such as a sorting machine, by the docking section flower basket transfer module 400. It can be seen that the full flower basket detected to have defects is an overall "U"-shaped supply streamline.

[0044] Among them, the arrangement form of the full basket output streamline 310 and the full basket inflow streamline 330 can be horizontally parallel or inclined parallel. When arranged in an inclined parallel manner, the full basket output streamline 310 and the full basket inflow streamline 330 are arranged obliquely downward from the inner end, that is, the end where the full basket repair lifting streamline 340 is located, to the outer end, that is, the full basket removal lifting streamline 320.

[0045] See also Figure 6 and Figure 7 The full basket output streamline 310 and the full basket inflow streamline 330 both include a full basket streamline rack 301, a full basket streamline driving assembly 302, a full basket streamline blocking buffer block assembly 303 and a full basket streamline in-position sensor 304; the full basket streamline driving assembly 302 is arranged on the full basket streamline rack 301, and the full basket streamline blocking buffer block assembly 303 and the full basket streamline in-position sensor 304 are arranged on both sides of the full basket streamline rack 301 in the transportation direction; the full basket output streamline 310 and / or the full basket inflow streamline 330 also include a side guide plate 305 and a side pushing module 306 for guiding the silicon wafer flower basket.

[0046] Among them, the full basket streamline frame 301 can be supported by profiles. The full basket streamline drive assembly 302 adopts a material strip conveying method, including a full basket drive motor, a drive main gear, a drive chain, a drive sub-gear, a drive main shaft, a driving wheel mounting plate, a flower basket transmission chain, a drive sub-shaft and a chain tensioning unit. Of course, other forms of transmission methods can also be used, as long as the stable conveying of the flower basket is achieved. The multiple full basket streamline blocking buffer block assemblies 303 adopt a buffer block structure driven by pneumatic, hydraulic or electric cylinder lifting and lowering, and the style is not limited, as long as it plays the function of stopping and buffering from the side. The full blue streamline in-place sensor 304 adopts a photoelectric sensor and the like, and can be arranged on one side of the full basket streamline frame 301. The two side guide plates 305 are arranged on both sides above the full basket streamline frame 301 for side guiding of the flower basket. The side pushing module 306 adopts a propulsion block structure driven horizontally by pneumatic, hydraulic or electric cylinder. In the illustrated example, the side guide plate 305 and the side pushing module 306 are arranged at the full basket inflow streamline 330 .

[0047] Furthermore, a debris receiving box is provided below the conveying chain of the full basket flow line driving assembly 302 of the full basket output flow line 310 for receiving silicon wafer fragments or debris dropped from the flower basket.

[0048] See also Figure 8 The full basket rejection lifting streamline 320 includes a flower basket lifting chain platform 321, a lifting upper side plate 322, a lifting lower side plate 323, a material removal lifting cylinder 324 and a material removal lifting guide assembly 325; the side of the flower basket lifting chain platform 321 is supported and arranged between the two lifting upper side plates 322, and the two material removal lifting cylinders 324 are vertically arranged between the corresponding side lifting upper side plates 322 and the lifting lower side plates 323, the top of the piston rod of the upper part of the material removal lifting cylinder 324 is connected to the outer side of the top of the lifting upper side plate 322, and the outer side and bottom of the cylinder of the lower part of the material removal lifting cylinder 324 are connected to the inner side of the lifting lower side plate 323, and each lifting lower side plate 323 is provided with a material removal lifting guide assembly 325 on both sides of the material removal lifting cylinder 324, and the top of the material removal lifting guide assembly 325 is connected to the bottom of the lifting upper side plate 322 through a guide side support plate 326.

[0049] The basket lifting chain platform 321 adopts a similar structure to the full basket output streamline 310, but the transmission distance is reduced, and it is only adapted to the width of one basket, and the purpose is to receive the defective full basket from the full basket output streamline 310. Furthermore, a guide and stop mechanism is set on the side and outer end of the basket lifting chain platform 321, such as a guide stop plate with an oblique outward opening. A pick-up sensor is set on the lifting upper side plate 322.

[0050] See also Fig. 9The full basket repair lifting streamline 340 includes a flower basket lifting platform 341, a lifting upper mounting plate 342, a lifting lower mounting plate 343, a repair lifting assembly 344 and a repair lifting guide assembly 345; one side of the repair lifting assembly 344 is fixed to the outer side surfaces of the lifting upper mounting plate 342 and the lifting lower mounting plate 343, the drive transmission section of the repair lifting assembly 344 is connected to the flower basket lifting platform 341, and the repair lifting guide assembly 345 is arranged on both sides of the repair lifting assembly 344 and connected to the outer side surfaces of the lifting upper mounting plate 342 and the lifting lower mounting plate 343.

[0051] The basket lifting platform 341 includes a platform flat plate, a platform rib plate and a platform vertical plate. The upper lifting mounting plate 342 and the lower lifting mounting plate 343 can be separated into two mounting plates or an integral mounting plate, which is mainly limited by the installation space. The repair lifting component 344 adopts a linear motor, a gear rack, a motor belt, etc., and a motor synchronous belt mechanism is adopted in the example in the figure.

[0052] The repair lifting guide assembly 345 has the same structure as the material picking lifting guide assembly 325, and adopts the structure of guide shaft and guide sleeve. Of course, the slide rail and slider mechanism can also be adopted, as long as it plays the role of guiding on both sides.

[0053] Furthermore, a repair lifting limit member 346 is set on the top end side of the flower basket lifting platform 341, and a repair lifting stroke limit member 347 is installed on the upper lifting mounting plate 342 and the lower lifting mounting plate 343. At the same time, a repair lifting position sensing member 348 is set on the upper lifting mounting plate 342, the lower lifting mounting plate 343 and the platform vertical plate of the flower basket lifting platform 341.

[0054] Among them, see Fig.10 The docking section flower basket transfer module 400 uses a robot or a gripper that moves in the overhead space set on the frame.

[0055] The silicon wafer full basket detection pre-selection docking device also includes a silicon wafer basket cooling module 500, which is arranged across the silicon wafer feeding docking belt line 100 to cool the full wafer basket below. In the illustrated example, the silicon wafer basket cooling module 500 uses multiple sets of cross-flow air curtain machines to air cool the full wafer basket below.

[0056] Preselection of docking method

[0057] A pre-selection docking method based on the aforementioned silicon wafer full basket detection pre-selection docking device, the pre-selection docking method comprises the following steps.

[0058] S1, silicon wafer cooling, the full wafer basket runs to the cooling position on the silicon wafer feeding docking belt line 100, and the silicon wafer basket cooling module 500 blows air to cool the full wafer basket below.

[0059] S2, full basket upper layer detection, the full-wafer basket after air cooling moves to the upper detection position of the silicon wafer feeding and docking belt line 100, and the full-basket defect detection module 200 performs upper layer defect detection on the full-wafer basket below.

[0060] S3, full basket lower layer inspection, the full flower basket after upper layer inspection moves to the end transfer position, the docking section flower basket transfer module 400 picks up the flower basket from above and transfers it to the lower layer inspection position, and the full basket defect detection module 200 performs lower layer defect detection on the full flower basket above.

[0061] S4, flower basket transfer. After the upper and lower layer inspections, the full flower baskets that are OK will be directly transferred to the sorting machine by the docking section flower basket transfer module 400, and the full flower baskets that are NG will be transferred to the full basket defect removal module 300 by the docking section flower basket transfer module 400, and proceed to the next step.

[0062] S5, NG flower basket repair, the full basket defect removal module 300 transports the full flower basket detected as NG to the manual repair position at the outer end, and the defective pieces are manually removed to perform full basket repair.

[0063] S6. Repair basket transfer. The repaired flower basket is transferred from the lower layer to the inner end by the full basket defect removal module 300 and lifted to the transfer position, and then transferred to the sorting machine by the docking section flower basket transfer module 400.

[0064] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A silicon wafer full basket detection pre-selection docking device, characterized in that: The silicon wafer full basket detection pre-selection docking device comprises a silicon wafer feeding docking belt line (100), a full basket defect detection module (200), a full basket defect rejection module (300) and a docking section basket transfer module (400); The full basket defect detection module (200) and the full basket defect rejection module (300) are arranged at the end of the flow line of the silicon wafer feeding and docking belt line (100); The full basket defect rejection module (300) adopts a "U"-shaped material basket supply method in which the upper layer of the defective basket is output and the lower layer of the repair basket is flowed in and lifted; The docking section flower basket transport module (400) is used for spatial transport of silicon wafer flower baskets.

2. The silicon wafer full basket detection pre-selection docking device according to claim 1, characterized in that: The silicon wafer feeding docking belt line (100) comprises a docking belt frame (110), a belt driving assembly (120) and a docking belt (130); a plurality of belt basket sensors (140) are arranged on the docking belt frame (110) on both sides of the docking belt (130).

3. The silicon wafer full basket detection pre-selection docking device according to claim 2, characterized in that: The full basket defect detection module (200) comprises a flower basket upper layer detection component (210) and a flower basket lower layer detection component (220), wherein the flower basket upper layer detection component (210) and the flower basket lower layer detection component (220) both comprise a defect detection camera unit (202), a detection light source (203) and a detection outer sealing plate (204) arranged on a detection frame (201), wherein the defect detection camera unit (202) and the detection light source (203) of the flower basket upper layer detection component (210) are arranged downward, and the defect detection camera unit (202) and the detection light source (203) of the flower basket lower layer detection component (220) are arranged upward.

4. The silicon wafer full basket detection pre-selection docking device according to claim 2, characterized in that: The full basket defect rejection module (300) comprises a full basket output flow line (310), a full basket rejection lifting flow line (320), a full basket inflow flow line (330) and a full basket repair lifting flow line (340) arranged on a full basket defect rejection rack (350); The full basket output streamline (310) and the full basket inflow streamline (330) are arranged on the full blue defect rejection rack (350) with intervals in the upper and lower parts, the full basket rejection lifting streamline (320) is vertically arranged at the outer end of the full basket output streamline (310), and the full basket repair lifting streamline (340) is vertically arranged at the inner end of the full basket inflow streamline (330).

5. The silicon wafer full basket detection pre-selection docking device according to claim 4, characterized in that: The full basket output streamline (310) and the full basket inflow streamline (330) both comprise a full basket streamline frame (301), a full basket streamline driving assembly (302), a full basket streamline blocking buffer block assembly (303) and a full basket streamline in-position sensor (304); the full basket streamline driving assembly (302) is arranged on the full basket streamline frame (301), and the full basket streamline blocking buffer block assembly (303) and the full basket streamline in-position sensor (304) are arranged on both sides of the full basket streamline frame (301) in the transport direction; the full basket output streamline (310) and / or the full basket inflow streamline (330) further comprise a side guide plate (305) and a side push module (306) for guiding the silicon wafer basket.

6. The silicon wafer full basket detection pre-selection docking device according to claim 4, characterized in that: The full basket rejection lifting streamline (320) comprises a basket lifting chain platform (321), a lifting upper side plate (322), a lifting lower side plate (323), a material rejection lifting cylinder (324) and a material rejection lifting guide assembly (325); The side of the flower basket lifting chain platform (321) is supported and arranged between two lifting upper side plates (322), and two material-removing lifting cylinders (324) are vertically arranged between the corresponding side lifting upper side plates (322) and the lifting lower side plates (323). The top of the piston rod of the upper part of the material-removing lifting cylinder (324) is connected to the outer side of the top of the lifting upper side plate (322), and the outer side and bottom of the cylinder of the lower part of the material-removing lifting cylinder (324) are connected to the inner side of the lifting lower side plate (323). A material-removing lifting guide assembly (325) is arranged on both sides of the material-removing lifting cylinder (324) on each lifting lower side plate (323), and the top of the material-removing lifting guide assembly (325) is connected to the bottom of the lifting upper side plate (322) through a guide side support plate (326).

7. The silicon wafer full basket detection pre-selection docking device according to claim 4, characterized in that: The full basket repair lifting streamline (340) comprises a basket lifting platform (341), an upper lifting mounting plate (342), a lower lifting mounting plate (343), a repair lifting assembly (344) and a repair lifting guide assembly (345); One side of the repair lifting component (344) is fixed to the outer side surfaces of the upper lifting mounting plate (342) and the lower lifting mounting plate (343), the drive transmission section of the repair lifting component (344) is connected to the flower basket lifting platform (341), and the repair lifting guide component (345) is arranged on both sides of the repair lifting component (344) and connected to the outer side surfaces of the upper lifting mounting plate (342) and the lower lifting mounting plate (343).

8. The silicon wafer full basket detection pre-selection docking device according to claim 4, characterized in that: The silicon wafer full basket detection pre-selection docking device further comprises a silicon wafer basket cooling module (500), wherein the silicon wafer basket cooling module (500) is arranged across the silicon wafer feeding docking belt line (100) and is used to cool the full wafer basket below.

9. The silicon wafer full basket detection pre-selection docking device according to claim 1, characterized in that: The docking section flower basket transfer module (400) adopts a robot or a clamping claw that moves in the overhead space arranged on a frame.

10. A preselection docking method based on the silicon wafer full basket detection preselection docking device according to claim 8, characterized in that: The preselected docking method comprises: S1, cooling of silicon wafers, a full wafer basket moves to a cooling position on a silicon wafer feeding docking belt line (100), and a silicon wafer basket cooling module (500) blows air to cool the full wafer basket below; S2, upper layer inspection of the full basket, the full-wafer basket after air cooling moves to the upper inspection position of the silicon wafer feeding docking belt line (100), and the full-basket defect inspection module (200) performs upper layer defect inspection on the full-wafer basket below; S3, full basket lower layer inspection, the full flower basket that has been inspected on the upper layer moves to the end transfer position, the docking section flower basket transfer module (400) picks up the flower basket from the top and transfers it to the lower layer inspection position, and the full basket defect inspection module (200) performs a lower layer defect inspection on the full flower basket on the top; S4, flower basket transfer: after the upper and lower layers are inspected, the full flower baskets that are inspected OK will be directly transported to the sorting machine by the docking section flower basket transfer module (400), and the full flower baskets that are inspected NG will be transported by the docking section flower basket transfer module (400) to the full basket defect removal module (300), and then proceed to the next step; S5, NG flower basket repair, full basket defect removal module (300) transports the full flower basket detected as NG to the manual repair position at the outer end, where defective pieces are removed manually to perform full basket repair; S6, repair basket transfer, the repaired flower basket is transferred from the lower layer to the inner end by the full basket defect removal module (300) and lifted to the transfer position, and then transferred to the sorting machine by the docking section flower basket transfer module (400).

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