Liftable workpiece supporting plate transfer trolley

Abstract

The invention relates to the technical field of semiconductor processing, in particular to a liftable workpiece supporting plate transfer trolley which is characterized in that a fixed frame, a lifting mechanism, a movable frame and a pressing rod mechanism are all mounted on a bottom frame, and the lifting mechanism is used for controlling the position height of a front end pin shaft interface and is powered by a lithium battery; the fixed frame is used for providing a horizontal movement track for the movable frame, and the movable frame is used for horizontal movement to improve the operation range; the pressing rod mechanism is used for expanding the operation range of the movable frame, amplifying the torque and converting the rotating action into the lifting action. The device is simple in structure, high in assembly fault-tolerant rate, powered by a lithium battery, free of limitation of a power line and wide in movable range. The pressing rod mechanism is used for lengthening the operation range of the movable frame, amplifying the torque and converting the rotating action into the lifting action, the workpiece supporting plate does not need to be directly carried into a high-temperature cavity of machining equipment manually, it is guaranteed that the workpiece supporting plate is in a horizontal state in the transferring process, and the risk that workpieces fall off and are damaged is reduced.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor processing, and in particular to a liftable workpiece pallet transfer vehicle. Background Art

[0002] Currently in the field of semiconductor processing, coating (thin film deposition) is a process that deposits a thin film on the surface of a material to change the material's properties or increase its functionality. Coating technology is widely used in materials science, semiconductor manufacturing, optics and electronic device manufacturing. In order to improve the coating quality, during the coating process of parts, it is necessary to create high temperature and vacuum conditions in the cavity of the processing equipment; the process of placing the parts to be processed into the processing equipment is usually to use a small raising column to lift the parts to be processed and place them on the workpiece pallet, so that a gap is formed between the parts to be processed and the workpiece pallet, and the parts to be processed and the workpiece pallet are placed together in a fixed position in the cavity of the processing equipment, and the door of the processing equipment is closed to form a sealed cavity in the processing equipment. In order to improve the processing efficiency and processing quality, the processing equipment needs to be preheated to a certain temperature before placing the parts to be processed. This temperature is usually higher than 200°C, and manual handling methods pose a risk of scalding to operators; in order to improve processing efficiency, multiple parts to be processed are placed each time, and the total weight of the workpiece pallet and the parts to be processed is large. In addition, since the workpiece pallet and the parts to be processed are not rigidly connected, manual handling methods cannot ensure that the workpiece pallet remains horizontal during transportation, and there is a risk of falling and damage to the parts to be processed. Summary of the invention

[0003] In order to solve the above technical problems, the present invention provides a liftable workpiece pallet transfer vehicle.

[0004] The specific technical solutions are as follows: A liftable workpiece pallet transfer vehicle comprises a bottom frame, a lifting mechanism, a fixed frame, a movable frame and a pressure rod mechanism; The fixed frame, lifting mechanism, mobile frame and pressure rod mechanism are all installed on the bottom frame. The lifting mechanism is used to control the height of the front pin shaft interface position and is powered by a lithium battery. The fixed frame is used to provide a horizontal movement track for the mobile frame, and the mobile frame is used for horizontal movement to increase the operating range. The pressure rod mechanism is used to expand the operating range of the mobile frame, amplify the torque, and convert the rotational motion into a lifting motion.

[0005] The bottom frame comprises a lifting column bottom plate, on which a frame consisting of aluminum profiles A, aluminum profiles B, aluminum profiles C and aluminum profiles D is installed; and aluminum profile end covers A are arranged on both end surfaces of the aluminum profile B.

[0006] The lifting mechanism includes a pair of electric lifting columns, a lithium battery and a lifting column controller; the pair of electric lifting columns are arranged at symmetrical positions on both sides of the lifting column bottom plate; a lithium battery rack is arranged in the middle position of the inner side of the aluminum profile C, and the lithium battery is hung on the lithium battery rack, and a lifting column controller is arranged on the side of the lithium battery above the lifting column bottom plate, and the lifting column controller can synchronously control the two electric lifting columns.

[0007] The fixed frame is a bilaterally symmetrical structure, including a lifting column top plate and a circular track. The lifting column top plate is fixed above the electric lifting column. A frame composed of aluminum profiles G, aluminum profiles H, aluminum profiles I and aluminum profiles J is arranged above the lifting column top plate, and an aluminum profile end cover B is arranged on the exposed aluminum profile end surface; two baffles are arranged on the side of the aluminum profile H for placing a pressure rod mechanism, and an operation panel is arranged on the side of the tail of the aluminum profile H. The operation panel adjusts the height of the electric lifting column and the preset height in real time; two groups of aluminum profiles E are arranged on both sides of the two aluminum profiles I, two in each group, and an aluminum profile F is arranged above each group of aluminum profiles E. The connection between the aluminum profile F and the tail aluminum profile E uses a free angle bracket, and the connection with the front aluminum profile E uses a connecting plate to be locked from the side. The installation position of the connecting plate and the aluminum profile F is a long waist hole, and a pressure block is used to press the connecting plate and the aluminum profile F from the outside to connect and fix them.

[0008] A lower rectangular tube and an upper rectangular tube are respectively arranged on both sides of the movable frame, a workpiece support plate is placed on the two upper rectangular tubes, a limit connecting plate is arranged below the tail of the lower rectangular tube, the limit connecting plate is L-shaped, a screw pad is arranged on the inner wall of the tail of the lower rectangular tube, the limit connecting plate is connected and fixed to the lower rectangular tube by screws, an aluminum profile K is arranged on the inner side of the tail of the two lower rectangular tubes, the limit connecting plate is connected to the bottom of the aluminum profile K, a hole is opened at the end surface position of the aluminum profile K corresponding to the lower rectangular tube, and the two lower rectangular tubes are connected to the aluminum profile K by screws; an aluminum profile L is arranged at the tail of the movable frame, two pressure rod support plates are arranged in the middle position of the aluminum profile L, and the two pressure rod support plates are arranged at the middle position of the two pressure rod support plates. Two pressure rods are arranged between the pressure rod support plates, a knob plunger is arranged on the outer side of the pressure rod support plate on one side, an aluminum profile adapter block and a rotating bracket are arranged on the end faces of both sides of the aluminum profile L, a groove is arranged on the side of the aluminum profile adapter block, and a rotating shaft A is installed in the groove; a plurality of through holes are respectively processed on the sides of the upper rectangular tube and the lower rectangular tube, bushings are arranged in the through holes, and the rotating shaft A passes through the tail of the lower rectangular tube through the bushings, and the lower part of the lifting connecting rod is connected to the rotating shaft A with screws; a rotating shaft B is arranged in the bushing in the through hole at the tail of the upper rectangular tube, and the rotating shaft B is a stepped shaft, the outer side of which is connected to the upper mounting hole of the lifting connecting rod, and the inner side is connected to the upper mounting hole of the rotating bracket; Two sets of lifting link mechanisms are arranged in the middle and front positions of each set of upper rectangular tubes and lower rectangular tubes, and the lifting link mechanisms include two sets of lifting links, bushings and rotating shafts D. The rotating shafts D are optical axes, and threaded mounting holes are arranged in the middle of the two end faces. The bushings and rotating shafts D are passed through the through holes arranged on the sides of the upper rectangular tubes and the lower rectangular tubes, so that the upper and lower mounting holes of the lifting links are connected with the two rotating shafts D. A bushing is arranged on the outer side above the front end lifting link mechanism, and the bushing is connected to the rotating shaft D with screws.

[0009] Two groups of roller mechanisms are respectively arranged at the bottom of the two lower rectangular tubes of the mobile frame, and two arc notches are arranged on the outer side of the side of the lower rectangular tube. A rotating shaft C, a bearing, a roller, a bushing A and a roller mounting block are arranged in sequence in each notch. The rotating shaft C is a stepped shaft, and the middle position of the roller is an inner arc groove, the inner arc radius corresponds to the circular track, grooves are arranged on both sides, and bearings are arranged in the grooves. Screws are used to lock the roller mounting blocks from the inner sides of the lower rectangular tubes on both sides to fix the rotating shaft C and the roller; the rotating shaft E in the roller mechanism arranged at the front end of the mobile frame is longer than the rotating shaft C, and the end face extends out of the roller mounting block.

[0010] Two positioning pins are arranged above each upper rectangular tube of the mobile frame. The positioning pins are round-headed. A limiting bending plate is arranged at the tail of the upper rectangular tube. A screw pad is arranged on the inner wall of the upper rectangular tube at the corresponding position. Screws are used to pass through the limiting bending plate and the upper rectangular tube to connect and fix them.

[0011] The main body of the pressure rod mechanism is an aluminum profile H, an aluminum profile end cover C is arranged at the rear end face of the aluminum profile H, a handle is arranged on the side of the rear end, and pressure rod limit A and pressure rod limit B are arranged on both sides of the front section respectively. The two structures are symmetrical, a circular groove is opened on the upper part of the front end, a chamfer is arranged on the bottom, and a circular hole processed on the side for inserting a knob plunger is arranged.

[0012] A caster mounting plate is arranged at the bottom of the aluminum profile B, caster support blocks are arranged between the two sides of the aluminum profile B and the caster mounting plate, and a caster is arranged at the bottom of the caster mounting plate. The caster is a universal anti-static type with a brake, and the tread is a markless polyurethane.

[0013] A limit baffle is arranged at the tail of the aluminum profile F, and the upper part of the limit baffle is higher than the upper end surface of the aluminum profile F; a limit plate is arranged on the front side of the aluminum profile F, and a pad is arranged between the limit plate and the aluminum profile F, and two notches are arranged in front and above the limit plate respectively, and a slope is processed in front of the upper notch; a docking block is arranged at the front end of the aluminum profile F, and a docking groove is processed at the front end of the docking block, and two semicircular grooves are processed on the top, and a docking pin is arranged in the outer semicircular groove; a track pad is arranged above the aluminum profile F, and an arc groove is processed on the upper part of the track pad, and a conical countersunk hole and a threaded hole are processed on the bottom, and the track pad is locked upward from the bottom of the aluminum profile F with screws, and a circular track is arranged in the arc groove of the track pad, and the front end of the circular track is placed in the semicircular groove on the inner side of the docking block.

[0014] Compared with the prior art, the present invention has the following beneficial technical effects: The present invention has a simple structure and a high assembly fault tolerance rate. The front pin interface position height is controlled by an electric lifting column. It is powered by a lithium battery, is free from the power line restriction, and has a wide movable range. The pressure rod mechanism is used to lengthen the operating range of the mobile frame, amplify the torque, and convert the rotation action into a lifting action. The workpiece pallet is directly moved into the high-temperature cavity of the processing equipment without manual labor, ensuring that the workpiece pallet is in a horizontal state during the transportation process, reducing the risk of the workpiece falling and being damaged, and avoiding the high temperature in the cavity of the processing equipment from causing burns to the operators, improving the stability of the workpiece pallet during transportation, and reducing the difficulty of operating the workpiece pallet lifting action. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a structural schematic diagram of the transfer vehicle of the present invention; Figure 2 for Figure 1 Exploded diagram of Figure 3 It is a schematic structural diagram of the bottom frame of the transfer vehicle of the present invention; Figure 4 It is a structural schematic diagram of the fixed frame of the transfer vehicle of the present invention; Figure 5 It is a structural schematic diagram of the mobile frame of the transfer vehicle of the present invention; Figure 6 It is a structural schematic diagram of the pressure rod mechanism of the transfer vehicle of the present invention; Figure 7-10 It is a working schematic diagram of the transfer vehicle of the present invention; In the figure, 1. electric lifting column; 2. lithium battery; 3. lifting column controller; 4. operation panel; 5. workpiece support plate; 6. lifting column bottom plate; 7. aluminum profile A; 8. caster; 9. caster mounting plate; 10. aluminum profile end cover A; 11. caster support block; 12. aluminum profile B; 13. aluminum profile C; 14. lithium battery rack; 15. aluminum profile D; 16. lifting column top plate; 17. baffle; 18. aluminum profile E; 19. connecting plate; 20. pressure block; 21. cushion block; 22. limit plate; 23. docking block; 24. track bottom plate; 25. docking pin; 26. circular track; 27. aluminum profile F; 28. limit baffle; 29. ​​aluminum profile G; 30. aluminum profile end cover B; 31. aluminum profile H; 32. free angle bracket; 33. aluminum profile L; 3 4. Pressure rod support plate; 35. Pressure rod; 36. Knob plunger; 37. Screw pad; 38. Aluminum profile adapter block; 39. Rotating bracket; 40. Limiting connecting plate; 41. Rotating shaft A; 42. Bushing; 43. Rotating shaft B; 44. Lifting connecting rod; 45. Roller mounting block; 46. Bushing A; 47. Bearing; 48. Roller; 49. Rotating shaft C; 50. Lower rectangular tube; 51. Upper rectangular tube; 52, rotating shaft D; 53, shaft sleeve B; 54, rotating shaft E; 55, positioning pin; 56, limiting bending plate; 57, aluminum profile H; 58, pressure rod limit A; 59, pressure rod limit B; 60, handle; 61, aluminum profile end cover C; 62, aluminum profile I; 63, aluminum profile J; 64, aluminum profile K; 65, processing equipment track; 66, notch; 67, long waist hole. DETAILED DESCRIPTION

[0016] The present invention is described in detail below in conjunction with the accompanying drawings, but the protection scope of the present invention is not limited by the accompanying drawings.

[0017] Figure 1 is a schematic diagram of the structure of the transfer vehicle of the present invention, Figure 2 for Figure 1 Exploded diagram of Figure 3 This is a schematic diagram of the structure of the bottom frame of the transfer vehicle of the present invention. Figure 4 It is a structural schematic diagram of the fixed frame of the transfer vehicle of the present invention, Figure 5 This is a schematic diagram of the structure of the mobile frame of the transfer vehicle of the present invention. Figure 6 This is a schematic diagram of the structure of the pressure rod mechanism of the transfer vehicle of the present invention, as shown in the figure: The liftable workpiece pallet transfer vehicle of the present invention comprises a bottom frame, a lifting mechanism, a fixed frame, a movable frame and a pressure rod mechanism; The fixed frame, lifting mechanism, mobile frame and pressure rod mechanism are all installed on the bottom frame. The lifting mechanism is used to control the height of the front pin shaft interface position and is powered by a lithium battery. The fixed frame is used to provide a horizontal movement track for the mobile frame, and the mobile frame is used for horizontal movement to increase the operating range. The pressure rod mechanism is used to expand the operating range of the mobile frame, amplify the torque, and convert the rotational motion into a lifting motion.

[0018] The bottom frame includes a lifting column bottom plate 6, on which a frame composed of aluminum profiles A7, aluminum profiles B12, aluminum profiles C13 and aluminum profiles D15 is installed; aluminum profile end covers A10 are provided at both ends of the aluminum profile B12. Caster mounting plates 9 are provided at the bottom of the aluminum profile B12, and caster support blocks 11 are provided between the two sides of the aluminum profile B12 and the caster mounting plates 9. Casters 8 are provided at the bottom of the caster mounting plates 9. The casters 8 are universal anti-static with brakes, and the tread is non-marking polyurethane.

[0019] The lifting mechanism includes a pair of electric lifting columns 1, a lithium battery 2 and a lifting column controller 3; the pair of electric lifting columns 1 are arranged at symmetrical positions on both sides of the lifting column base plate 6; a lithium battery rack 14 is arranged in the middle position on the inner side of the aluminum profile C13, and the lithium battery 2 is hung on the lithium battery rack 14, and a lifting column controller 3 is arranged on the side of the lithium battery 2 above the lifting column base plate 6, and the lifting column controller 3 can synchronously control the two electric lifting columns 1.

[0020] The fixed frame is a bilaterally symmetrical structure, including a lifting column top plate 16 and a circular track 26. The lifting column top plate 16 is fixed above the electric lifting column 1. A frame composed of aluminum profiles G29, aluminum profiles H31, aluminum profiles I62 and aluminum profiles J63 is arranged above the lifting column top plate 16. An aluminum profile end cover B30 is arranged on the exposed aluminum profile end surface; two baffles 17 are arranged on the side of the aluminum profile H31 for placing a pressure rod mechanism to prevent it from falling during the movement of the transfer vehicle; an operation panel 4 is arranged on the side of the tail of the aluminum profile H31. The operation panel 4 Adjust the height of the electric lifting column 1 and the preset height in real time; set two groups of aluminum profiles E18 on both sides of the two aluminum profiles I62, two in each group, and set aluminum profile F27 above each group of aluminum profiles E18. The connection between aluminum profile F27 and the tail aluminum profile E18 uses a free angle bracket 32, and the connection with the front aluminum profile E18 uses a connecting plate 19 to lock from the side. The installation position of the connecting plate 19 and the aluminum profile F27 is a long waist hole 67, and a pressure block 20 is used to press the connecting plate 19 and the aluminum profile F27 from the outside to connect and fix. By adjusting the long waist hole 67 of the connecting plate 19 and the free angle bracket 32, the horizontality of the two aluminum profiles F27 set above the aluminum profile E18 can be fine-tuned to improve the assembly fault tolerance rate.

[0021] A lower rectangular tube 50 and an upper rectangular tube 51 are respectively arranged on both sides of the mobile frame, and a workpiece support plate 5 is installed on the two upper rectangular tubes 51. A limit connecting plate 40 is arranged below the tail of the lower rectangular tube 50, and the limit connecting plate 40 is L-shaped. A screw pad 37 is arranged on the inner wall of the tail of the lower rectangular tube 50, and the limit connecting plate 40 is connected and fixed to the lower rectangular tube 50 by screws. An aluminum profile K64 is arranged on the inner side of the tail of the two lower rectangular tubes 50, and the limit connecting plate 40 is connected to the bottom of the aluminum profile K64. A hole is opened at the end surface position of the aluminum profile K64 corresponding to the lower rectangular tube 50, and the two lower rectangular tubes 50 are connected to the aluminum profile K64 by screws; an aluminum profile L33 is arranged at the tail of the mobile frame, and two pressure rod support plates 34 are arranged in the middle position of the aluminum profile L33. Two pressure rods 35 are arranged between the rod support plates 34, and a knob plunger 36 is arranged on the outer side of the pressure rod support plate 34 on one side. Aluminum profile adapter blocks 38 and rotating brackets 39 are respectively arranged on the end faces of both sides of the aluminum profile L33, and grooves are arranged on the sides of the aluminum profile adapter blocks 38, and a rotating shaft A41 is installed in the grooves; a plurality of through holes are respectively processed on the sides of the upper rectangular tube 51 and the lower rectangular tube 50, and bushings 42 are arranged in the through holes. The rotating shaft A41 passes through the tail of the lower rectangular tube 50 through the bushings 42, and the lower part of the lifting connecting rod 44 is connected to the rotating shaft A41 by screws; a rotating shaft B43 is arranged in the bushing 42 in the through hole at the tail of the upper rectangular tube 51, and the rotating shaft B43 is a stepped shaft, and the outer side is connected to the upper mounting hole of the lifting connecting rod 44, and the inner side is connected to the upper mounting hole of the rotating bracket 39; Two sets of lifting link mechanisms are arranged in the middle and front positions of each set of upper rectangular tubes 51 and lower rectangular tubes 50, and the lifting link mechanisms include two sets of lifting links 44, bushings 42 and rotating shafts D52. The rotating shafts D52 are optical axes, and threaded mounting holes are arranged in the middle of both end faces. The bushings 42 and the rotating shafts D52 are passed through the through holes arranged on the sides of the upper rectangular tubes 51 and the lower rectangular tubes 50, so that the upper and lower mounting holes of the lifting links 44 are connected with the two rotating shafts D52. A bushing is arranged on the outer side above the front end lifting link mechanism, and the bushing is connected to the rotating shaft D52 with screws.

[0022] Two groups of roller mechanisms are respectively arranged at the bottom of the two lower rectangular tubes 50 of the mobile frame, and two arc notches are arranged on the outer side of the side of the lower rectangular tube 50. A rotating shaft C49, a bearing 47, a roller 48, a bushing A46 and a roller mounting block 45 are arranged in sequence in each notch. The rotating shaft C49 is a stepped shaft, and the middle position of the roller 48 is an inner arc groove, and the inner arc radius corresponds to the circular track 26. Grooves are arranged on both sides, and bearings 47 are arranged in the grooves. Screws are used to lock the roller mounting blocks 45 from the inner sides of the lower rectangular tubes 50 on both sides to fix the rotating shaft C49 and the roller 48. The rotating shaft E54 in the roller mechanism arranged at the front end of the mobile frame is longer than the rotating shaft C49, and the end face protrudes out of the roller mounting block 45.

[0023] Two positioning pins 55 are arranged above each upper rectangular tube 51 of the mobile frame. The positioning pins 55 are round-headed. A limiting bending plate 56 is arranged at the tail of the upper rectangular tube 51. A screw pad 37 is arranged on the inner wall of the upper rectangular tube 51 at the corresponding position. Screws are used to pass through the limiting bending plate 56 and the upper rectangular tube 51 to connect and fix.

[0024] The main body of the pressure rod mechanism is aluminum profile H57, and an aluminum profile end cover C61 is set at the rear end face of the aluminum profile H57, a handle 60 is set on the side of the rear, and pressure rod limit A58 and pressure rod limit B59 are respectively set on both sides of the front section. The two structures are symmetrical, a circular groove 66 is opened on the upper part of the front end, a chamfer is set on the bottom, and a circular hole processed on the side for inserting the knob plunger 36 is set.

[0025] A limit baffle 28 is arranged at the tail of the aluminum profile F27, and the upper part of the limit baffle 28 is higher than the upper end surface of the aluminum profile F27; a limit plate 22 is arranged on the front side of the aluminum profile F27, and a pad 21 is arranged between the limit plate 22 and the aluminum profile F27, and two notches are arranged in front and above the limit plate respectively, and a slope is processed in front of the upper notch; a docking block 23 is arranged at the front end of the aluminum profile F27, and a docking groove is processed at the front end of the docking block 23, and two semicircular grooves are processed on the top, and a docking pin 25 is arranged in the outer semicircular groove; a track pad 24 is arranged above the aluminum profile F27, and an arc groove is processed on the upper part of the track pad 24, and a conical countersunk hole and a threaded hole are processed on the bottom, and the track pad 24 is locked upward from the bottom of the aluminum profile F27 with screws, and a circular track 26 is arranged in the arc groove of the track pad 24, and the front end of the circular track 26 is placed in the semicircular groove on the inner side of the docking block 23.

[0026] Figure 7-10 It is a working schematic diagram of the transfer vehicle of the present invention, as shown in the figure: when working, the workpiece support plate 5 is placed above the upper rectangular tube 51 of the mobile mechanism, the control button on the operation panel 4 is operated to move the transfer vehicle, the height and position of the middle frame are adjusted, and the docking pin shaft 25 and the circular track 26 at the front end of the transfer vehicle are aligned with the structure of the processing equipment; the pressure rod mechanism is clamped in the rotating mechanism pressure rod 35 at the tail of the mobile frame, and the pressure rod mechanism is pressed down to make the upper rectangular tube lift the workpiece support plate 5 and move upward, and at the same time, the shaft sleeve 42 on the side of the upper rectangular tube 51 is separated from the limit plate 22; the pressure rod mechanism is pushed to make the mobile frame lift the workpiece support plate 5 and the workpiece into the processing cavity. After the workpiece support plate 5 is placed, the pressure rod mechanism is pulled to make the mobile frame withdraw from the processing equipment cavity, the pressure rod is raised, and the shaft sleeve set on the side of the mobile frame falls into the card groove of the limit plate 22, the mobile frame is fixed, the electric lifting column 1 is controlled to rise, the docking pin shaft 25 interface between the front end of the transfer vehicle and the processing equipment is unlocked, and the mobile transfer vehicle withdraws from the processing equipment.

Claims

1. A liftable workpiece pallet transfer vehicle, characterized in that: It includes a bottom frame, a lifting mechanism, a fixed frame, a mobile frame and a pressure rod mechanism; The fixed frame, lifting mechanism, mobile frame and pressure rod mechanism are all installed on the bottom frame. The lifting mechanism is used to control the height of the front pin shaft interface position and is powered by a lithium battery. The fixed frame is used to provide a horizontal movement track for the mobile frame, and the mobile frame is used for horizontal movement to increase the operating range. The pressure rod mechanism is used to expand the operating range of the mobile frame, amplify the torque, and convert the rotational motion into a lifting motion.

2. The liftable workpiece pallet transfer vehicle according to claim 1 is characterized in that: The bottom frame comprises a lifting column bottom plate, on which a frame consisting of aluminum profiles A, aluminum profiles B, aluminum profiles C and aluminum profiles D is installed; and aluminum profile end covers A are arranged on both end surfaces of the aluminum profile B.

3. The liftable workpiece pallet transfer vehicle according to claim 2 is characterized in that: The lifting mechanism includes a pair of electric lifting columns, a lithium battery and a lifting column controller; the pair of electric lifting columns are arranged at symmetrical positions on both sides of the lifting column bottom plate; a lithium battery rack is arranged in the middle position of the inner side of the aluminum profile C, and the lithium battery is hung on the lithium battery rack, and a lifting column controller is arranged on the side of the lithium battery above the lifting column bottom plate, and the lifting column controller can synchronously control the two electric lifting columns.

4. The liftable workpiece pallet transfer vehicle according to claim 2, characterized in that: The fixed frame is a bilaterally symmetrical structure, including a lifting column top plate and a circular track. The lifting column top plate is fixed above the electric lifting column. A frame composed of aluminum profiles G, aluminum profiles H, aluminum profiles I and aluminum profiles J is arranged above the lifting column top plate, and an aluminum profile end cover B is arranged on the exposed aluminum profile end surface; two baffles are arranged on the side of the aluminum profile H for placing a pressure rod mechanism, and an operation panel is arranged on the side of the tail of the aluminum profile H. The operation panel adjusts the height of the electric lifting column and the preset height in real time; two groups of aluminum profiles E are arranged on both sides of the two aluminum profiles I, two in each group, and an aluminum profile F is arranged above each group of aluminum profiles E. The connection between the aluminum profile F and the tail aluminum profile E uses a free angle bracket, and the connection with the front aluminum profile E uses a connecting plate to be locked from the side. The installation position of the connecting plate and the aluminum profile F is a long waist hole, and a pressure block is used to press the connecting plate and the aluminum profile F from the outside to connect and fix them.

5. The liftable workpiece pallet transfer vehicle according to claim 2, characterized in that: A lower rectangular tube and an upper rectangular tube are respectively arranged on both sides of the movable frame, a workpiece support plate is placed on the two upper rectangular tubes, a limit connecting plate is arranged below the tail of the lower rectangular tube, the limit connecting plate is L-shaped, a screw pad is arranged on the inner wall of the tail of the lower rectangular tube, the limit connecting plate is connected and fixed to the lower rectangular tube by screws, an aluminum profile K is arranged on the inner side of the tail of the two lower rectangular tubes, the limit connecting plate is connected to the bottom of the aluminum profile K, a hole is opened at the end surface position of the aluminum profile K corresponding to the lower rectangular tube, and the two lower rectangular tubes are connected to the aluminum profile K by screws; an aluminum profile L is arranged at the tail of the movable frame, two pressure rod support plates are arranged in the middle position of the aluminum profile L, and the two pressure rod support plates are arranged at the middle position of the two pressure rod support plates. Two pressure rods are arranged between the pressure rod support plates, a knob plunger is arranged on the outer side of the pressure rod support plate on one side, an aluminum profile adapter block and a rotating bracket are arranged on the end faces of both sides of the aluminum profile L, a groove is arranged on the side of the aluminum profile adapter block, and a rotating shaft A is installed in the groove; a plurality of through holes are respectively processed on the sides of the upper rectangular tube and the lower rectangular tube, bushings are arranged in the through holes, and the rotating shaft A passes through the tail of the lower rectangular tube through the bushings, and the lower part of the lifting connecting rod is connected to the rotating shaft A with screws; a rotating shaft B is arranged in the bushing in the through hole at the tail of the upper rectangular tube, and the rotating shaft B is a stepped shaft, the outer side of which is connected to the upper mounting hole of the lifting connecting rod, and the inner side is connected to the upper mounting hole of the rotating bracket; Two sets of lifting link mechanisms are arranged in the middle and front positions of each set of upper rectangular tubes and lower rectangular tubes, and the lifting link mechanisms include two sets of lifting links, bushings and rotating shafts D. The rotating shafts D are optical axes, and threaded mounting holes are arranged in the middle of the two end faces. The bushings and rotating shafts D are passed through the through holes arranged on the sides of the upper rectangular tubes and the lower rectangular tubes, so that the upper and lower mounting holes of the lifting links are connected with the two rotating shafts D. A bushing is arranged on the outer side above the front end lifting link mechanism, and the bushing is connected to the rotating shaft D with screws.

6. The liftable workpiece pallet transfer vehicle according to claim 2, characterized in that: Two groups of roller mechanisms are respectively arranged at the bottom of the two lower rectangular tubes of the mobile frame, and two arc notches are arranged on the outer side of the side of the lower rectangular tube. A rotating shaft C, a bearing, a roller, a bushing A and a roller mounting block are arranged in sequence in each notch. The rotating shaft C is a stepped shaft, and the middle position of the roller is an inner arc groove, the inner arc radius corresponds to the circular track, grooves are arranged on both sides, and bearings are arranged in the grooves. Screws are used to lock the roller mounting blocks from the inner sides of the lower rectangular tubes on both sides to fix the rotating shaft C and the roller; the rotating shaft E in the roller mechanism arranged at the front end of the mobile frame is longer than the rotating shaft C, and the end face extends out of the roller mounting block.

7. The liftable workpiece pallet transfer vehicle according to claim 5, characterized in that: Two positioning pins are arranged above each upper rectangular tube of the mobile frame. The positioning pins are round-headed. A limiting bending plate is arranged at the tail of the upper rectangular tube. A screw pad is arranged on the inner wall of the upper rectangular tube at the corresponding position. Screws are used to pass through the limiting bending plate and the upper rectangular tube to connect and fix them.

8. The liftable workpiece pallet transfer vehicle according to claim 1, characterized in that: The main body of the pressure rod mechanism is an aluminum profile H, an aluminum profile end cover C is arranged at the rear end face of the aluminum profile H, a handle is arranged on the side of the rear end, and pressure rod limit A and pressure rod limit B are arranged on both sides of the front section respectively. The two structures are symmetrical, a circular groove is opened on the upper part of the front end, a chamfer is arranged on the bottom, and a circular hole processed on the side for inserting a knob plunger is arranged.

9. The liftable workpiece pallet transfer vehicle according to claim 2, characterized in that: A caster mounting plate is arranged at the bottom of the aluminum profile B, caster support blocks are arranged between the two sides of the aluminum profile B and the caster mounting plate, and a caster is arranged at the bottom of the caster mounting plate. The caster is a universal anti-static type with a brake, and the tread is a markless polyurethane.

10. The liftable workpiece pallet transfer vehicle according to claim 4, characterized in that: A limit baffle is arranged at the tail of the aluminum profile F, and the upper part of the limit baffle is higher than the upper end surface of the aluminum profile F; a limit plate is arranged on the front side of the aluminum profile F, and a pad is arranged between the limit plate and the aluminum profile F, and two notches are arranged in front and above the limit plate respectively, and a slope is processed in front of the upper notch; a docking block is arranged at the front end of the aluminum profile F, and a docking groove is processed at the front end of the docking block, and two semicircular grooves are processed on the top, and a docking pin is arranged in the outer semicircular groove; a track pad is arranged above the aluminum profile F, and an arc groove is processed on the upper part of the track pad, and a conical countersunk hole and a threaded hole are processed on the bottom, and the track pad is locked upward from the bottom of the aluminum profile F with screws, and a circular track is arranged in the arc groove of the track pad, and the front end of the circular track is placed in the semicircular groove on the inner side of the docking block.

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