Coating equipment

Abstract

The invention relates to the technical field of semiconductors and photovoltaics, in particular to coating equipment, and aims at solving the problems that the coating equipment is poor in stability, large in occupied space, short in maintenance period and the like due to the fact that the coating equipment is complex in structure. The coating equipment comprises at least one set of process furnace assembly and at least one set of boat pushing assembly. Each set of process furnace assembly comprises a heating furnace and a coating furnace which are arranged adjacently, and each set of boat pushing assembly and each set of process furnace assembly are arranged in a one-to-one correspondence mode and are configured to convey the boat structure into or out of the heating furnace and the coating furnace included in the corresponding process furnace assembly. The position relation between the boat pushing assembly and the heating furnace does not need to be accurately adjusted, and in the process of installing the heating furnace, the coating furnace and the boat pushing assembly, installation personnel only need to accurately adjust the position relation between the boat pushing assembly and the coating furnace, and the boat structure can be conveyed into or out of the heating furnace and the coating furnace through one set of boat pushing assembly. And the structure of the coating equipment is simplified.

Description

Technical Field

[0001] The present disclosure relates to the field of semiconductor and photovoltaic technology, and in particular to a coating device. Background Art

[0002] Coating equipment includes atmospheric pressure chemical vapor deposition equipment, plasma enhanced chemical vapor deposition equipment and low pressure chemical vapor deposition equipment. Plasma enhanced chemical vapor deposition equipment is widely used due to its fast deposition rate, good film quality, fewer pinholes and low cracking. Plasma enhanced chemical vapor deposition equipment generally heats the boat structure and the products carried by the boat structure first, and then starts to input process gas into the equipment after heating to a certain temperature to achieve coating of the product.

[0003] However, the coating equipment in the related art has a complex structure, resulting in poor stability of the coating equipment, large occupied space, and short maintenance cycle. Summary of the invention

[0004] In view of this, an embodiment of the present application provides a coating device to solve the problems that the coating device has a complex structure, resulting in poor stability of the coating device, large occupied space, and short maintenance cycle.

[0005] In a first aspect, an embodiment of the present application provides a coating device, comprising: at least one group of process furnace assemblies, each group of the process furnace assemblies comprising a heating furnace and a coating furnace arranged adjacent to each other, the heating furnace being configured to accommodate a boat structure and a product carried by the boat structure, and to heat the product, the coating furnace comprising a first cavity and an electrode assembly, the first cavity having a first chamber, the electrode assembly being connected to the first cavity and extending into the first chamber, the first chamber being configured to accommodate the boat structure and the product carried by the boat structure, the boat structure having an electrode hole, the electrode assembly being insertable into the electrode hole during the process of the boat structure being transported into the first chamber, the electrode assembly being configured to provide electrical energy to the boat structure so that the boat structure ionizes the process gas in the first chamber to achieve coating of the product; at least one group of boat pusher assemblies, each group of the boat pusher assemblies being arranged in a one-to-one correspondence with each group of the process furnace assemblies, and being configured to transport the boat structure into or out of the heating furnace and the coating furnace included in the corresponding process furnace assembly.

[0006] In combination with the first aspect, in certain implementations of the first aspect, the number of the process furnace assemblies is multiple groups, and the multiple groups of process furnace assemblies are arranged in multiple rows and in at least one column; wherein the number of the push boat assemblies is multiple groups, and the coating equipment further includes: at least one group of lifting assemblies, each group of the lifting assemblies corresponds to a column of the process furnace assemblies, and each group of the lifting assemblies is connected to the multiple groups of push boat assemblies corresponding to the column of the process furnace assemblies, and is configured to drive the multiple groups of push boat assemblies corresponding to the column of the process furnace assemblies to move in a vertical direction.

[0007] In combination with the first aspect, in certain implementations of the first aspect, the heating furnace and the coating furnace in each group of the process furnace assemblies are arranged in a vertical direction, and the extension directions of the heating furnace and the coating furnace are the same; wherein the boat pusher assembly is configured to transport the boat structure along the extension direction of the heating furnace.

[0008] In combination with the first aspect, in certain implementations of the first aspect, the coating equipment also includes: at least one group of gas source components, which are connected to the first chamber and are configured to extract gas from the first chamber, achieve a vacuum state of the first chamber, and introduce the process gas into the first chamber.

[0009] In combination with the first aspect, in certain implementations of the first aspect, the coating equipment further includes: at least one group of RF power supply components, electrically connected to the electrode assembly and configured to provide RF voltage to the electrode assembly.

[0010] In combination with the first aspect, in certain implementations of the first aspect, multiple groups of the process furnace assemblies are arranged into multiple columns; wherein, the number of the gas source assemblies is multiple groups, and each group of the gas source assemblies is connected to multiple first chambers in the same row; and / or, the number of the RF power supply assemblies is multiple groups, and each group of the RF power supply assemblies is electrically connected to the respective electrode assemblies of the multiple coating furnaces in the same row.

[0011] In combination with the first aspect, in certain implementations of the first aspect, the coating furnace has a first end and a second end in the extension direction of the coating furnace; the push boat assembly and the lifting assembly are arranged at the first end of the coating furnace; the gas source assembly is arranged at the second end of the coating furnace, and is connected to the first chamber through the second end of the coating furnace, and the RF power supply assembly and the electrode assembly are both arranged at the second end of the coating furnace.

[0012] In combination with the first aspect, in certain implementations of the first aspect, the lifting assembly includes: a first driving source; a first linear module extending in a vertical direction, connected to the first driving source, and connected to the first end of the boat push assembly, the first linear module being configured to drive the first end of the boat push assembly to move in a vertical direction under the drive of the first driving source; a transmission rod, the first end of the transmission rod being connected to the first driving source, the transmission rod rotating under the drive of the first driving source; a second linear module extending in a vertical direction, connected to the second end of the transmission rod, and connected to the second end of the boat push assembly, the second linear module being configured to drive the second end of the boat push assembly to move in a vertical direction under the drive of the transmission rod.

[0013] In combination with the first aspect, in certain implementations of the first aspect, the coating equipment also includes: at least one group of boat moving assemblies, each group of the boat moving assemblies is arranged adjacent to the multiple groups of boat pushing assemblies corresponding to a column of the process furnace assemblies, and is configured to transport the boat structure to the multiple groups of boat pushing assemblies corresponding to the column of the process furnace assemblies or to move the boat structure away from the multiple groups of boat pushing assemblies corresponding to the column of the process furnace assemblies.

[0014] In combination with the first aspect, in some implementations of the first aspect, the heating furnace includes a second cavity, and a material of the second cavity includes metal; and a material of the first cavity includes quartz.

[0015] The coating equipment in the related art uses a process furnace to achieve heating and coating of the product, that is, the process furnace first heats the product, and then coats the product after heating to a certain temperature. The inventor found that in order to achieve the coating function, an electrode assembly needs to be set in the process furnace. In the process of the push boat assembly transporting the boat structure into the process furnace, the electrode assembly needs to be inserted into the electrode hole of the boat structure, and the electrical connection state between the electrode assembly and the boat structure is ensured, which requires that the position error between the push boat assembly and the process furnace is very small. In other words, when installing the process furnace and the push boat assembly, the installer needs to accurately adjust the position relationship between the push boat assembly and the process furnace to ensure the position accuracy between the push boat assembly and the process furnace. However, when facing multiple process furnaces, there are errors in the placement positions between the multiple process furnaces, and the position accuracy between a push boat assembly and multiple process furnaces cannot be guaranteed. Therefore, the coating equipment in the related art is that a push boat assembly corresponds to a process furnace to accurately push the boat structure into the process furnace.

[0016] The process furnace assembly of the coating equipment disclosed in the present invention includes a heating furnace and a coating furnace. The heating furnace only needs to heat the boat structure, and the boat push assembly only needs to push the boat structure into the heating furnace. In other words, there is no electrode assembly in the heating furnace, and there is no need to insert the electrode assembly into the electrode hole of the boat structure, so there is no need to accurately adjust the positional relationship between the boat push assembly and the heating furnace. The coating furnace needs to coat the products carried by the boat structure, so the coating furnace is provided with an electrode assembly, and the positional relationship between the boat push assembly and the coating furnace needs to be accurately adjusted. In the process of installing the heating furnace, the coating furnace and the boat push assembly, the installer only needs to accurately adjust the positional relationship between the boat push assembly and the coating furnace to realize the use of a set of boat push assemblies to transport the boat structure into or out of the heating furnace and the coating furnace, which simplifies the structure of the coating equipment, thereby improving the stability of the coating equipment, reducing the floor space occupied by the coating equipment, and increasing the maintenance cycle of the coating equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] By describing the embodiments of the present application in more detail in conjunction with the accompanying drawings, the above and other purposes, features and advantages of the present application will become more apparent. The accompanying drawings are used to provide a further understanding of the embodiments of the present application and constitute a part of the specification. Together with the embodiments of the present application, they are used to explain the present application and do not constitute a limitation of the present application. In the accompanying drawings, the same reference numerals generally represent the same components or steps.

[0018] Figure 1 Shown is a schematic structural diagram of a coating device provided in one embodiment of the present disclosure.

[0019] Figure 2 Shown is a schematic structural diagram of a coating furnace and a boat structure provided in one embodiment of the present disclosure.

[0020] Figure 3 The present invention provides an embodiment of the present invention. Figure 2 Schematic diagram of the coating furnace and boat structure in area A shown.

[0021] Figure 4 Shown is a schematic structural diagram of a heating furnace and a boat structure provided in one embodiment of the present disclosure.

[0022] Figure 5 Shown is a schematic structural diagram of a coating device provided in another embodiment of the present disclosure.

[0023] Figure 6 The present invention provides an embodiment of the present invention. Figure 4 A top view of the coating equipment is shown.

[0024] Figure 7 Shown is a schematic structural diagram of a coating device provided by an embodiment of the present disclosure after a group of push boat components are removed.

[0025] Figure 8 A schematic diagram of the structures of multiple groups of process furnace assemblies provided in one embodiment of the present disclosure is shown.

[0026] Fig. 9 A schematic diagram of the structure of a coating device provided by an embodiment of the present disclosure after removing the process furnace component is shown.

[0027] Reference numerals:

[0028] 1. Coating equipment; 10. Process furnace assembly; 100. Heating furnace; 110. Second cavity; 200. Coating furnace; 210. Electrode assembly; 220. First cavity; 221. First chamber; 201. First end of coating furnace; 202. Second end of coating furnace; 20. Push boat assembly; 21. First end of push boat assembly; 22. Second end of push boat assembly; 30. Boat structure; 31. Electrode hole; 40. Product; 50. Lifting assembly; 51. First driving source; 52. The first linear module; 53, the first transmission rod; 531, the first end of the first transmission rod; 532, the second end of the first transmission rod; 54, the second linear module; 60, the air source assembly; 70, the radio frequency power supply assembly; 80, the boat moving assembly; 81, the second driving source; 82, the third linear module; 83, the second transmission rod; 831, the first end of the second transmission rod; 832, the second end of the second transmission rod; 84, the fourth linear module; 85, the clamping member; 86, the connecting rod; 90, the frame. DETAILED DESCRIPTION

[0029] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0030] Figure 1 Shown is a schematic structural diagram of a coating device provided in one embodiment of the present disclosure. Figure 2 Shown is a schematic structural diagram of a coating furnace and a boat structure provided in one embodiment of the present disclosure. Figure 3 The present invention provides an embodiment of the present invention. Figure 2 Schematic diagram of the coating furnace and boat structure in area A shown. Figure 4 FIG. 1 is a schematic diagram of a heating furnace and a boat structure provided by an embodiment of the present disclosure. Figures 1 to 4 As shown, a coating device 1 provided in an embodiment of the present disclosure includes at least one set of process furnace assemblies 10 and at least one set of push boat assemblies 20 .

[0031] Each group of process furnace assemblies 10 includes a heating furnace 100 and a coating furnace 200 that are arranged adjacent to each other. Exemplarily, the heating furnace 100 and the coating furnace 200 can be arranged adjacent to each other in the vertical direction, or can be arranged adjacent to each other in the horizontal direction, so as to facilitate the transportation of the boat structure to the heating furnace 100 and the coating furnace 200. Exemplarily, the heating furnace 100 and the coating furnace 200 can be in contact, or there can be a certain gap. In practical applications, the coating equipment 1 also includes a frame 90. The frame 90 is used to support the heating furnace 100 and the coating furnace 200, so that the position between the heating furnace 100 and the coating furnace 200 is relatively stable. Exemplarily, the frame 90 can be assembled from components such as profiles, plates, and rods.

[0032] like Figure 4 As shown, the heating furnace 100 is configured to accommodate the boat structure 30 and the product 40 carried by the boat structure 30, and heat the product 40. Exemplarily, the heating furnace 100 has a thermal field, and the boat structure 30 and the product 40 carried by the boat structure 30 only need to be placed in the heating furnace 100, and the thermal field can heat the boat structure 30 and the product 40. Since the furnace size of the heating furnace 100 is larger than the size of the boat structure 30, the boat structure 30 can easily enter and exit the heating furnace 100. In other words, when installing the boat push assembly 20 and the heating furnace 100, there is no need to accurately adjust the positional relationship between the boat push assembly 20 and the heating furnace 100.

[0033] like Figure 2 and Figure 3 As shown, the coating furnace 200 is configured to accommodate the boat structure 30 and the product 40 carried by the boat structure 30, and to coat the product 40. Exemplarily, the coating furnace 200 includes an electrode assembly 210 and a first cavity 220. The first cavity 220 has a first chamber 221. The electrode assembly 210 is connected to the first cavity 220 and extends into the first chamber 221. The first chamber 221 is configured to accommodate the boat structure 30 and the product 40 carried by the boat structure 30. The boat structure 30 has an electrode hole 31. When the boat structure 30 is fed into the first chamber 221, the electrode assembly 210 can be inserted into the electrode hole 31, and the electrode assembly 210 is configured to provide electrical energy to the boat structure 30 so that the boat structure 30 ionizes the process gas in the first chamber 221 to achieve coating of the product 40. Since the electrode assembly 210 needs to be inserted into the electrode hole 31 and the electrode assembly 210 and the boat structure 30 are electrically connected, the electrode assembly 210 can provide electrical energy to the boat structure 30, which requires a small position error between the boat pusher assembly 20 and the coating furnace 200. In other words, only when the position error between the boat pusher assembly 20 and the coating furnace 200 is small can the electrode assembly 210 and the electrode hole 31 be plugged and matched, so that the electrode assembly 210 and the boat structure 30 remain electrically connected.

[0034] Exemplarily, the electrode assembly 210 may be a combination of an electrode rod and an electrode head connected to each other, the electrode rod is connected to the first cavity 220 , and the electrode head is inserted into the electrode hole 31 .

[0035] Each group of boat pusher assemblies 20 is disposed in one-to-one correspondence with each group of process furnace assemblies 10. Each group of boat pusher assemblies 20 is configured to transport the boat structure 30 into or out of the heating furnace 100 and the coating furnace 200 included in the corresponding process furnace assembly 10.

[0036] The boat pusher assembly 20 can be a combination of a robot arm, linear modules in various directions, and other equipment to enable the boat structure 30 to be transported into or out of the heating furnace 100 and the coating furnace 200 included in the corresponding process furnace assembly 10 .

[0037] In actual application, the boat pusher assembly 20 first transports the boat structure 30 and the product 40 carried by the boat structure 30 into the heating furnace 100. After the product 40 is heated to a certain temperature in the heating furnace 100, the boat pusher assembly 20 transports the boat structure 30 and the product 40 carried by the boat structure 30 out of the heating furnace 100 and transports them into the coating furnace 200, which coats the product. Exemplarily, the coating furnace 200 may also be provided with a heating device to maintain the temperature of the product 40 during the coating process. Exemplarily, the heating device may be a heating wire, a heating tube, etc.

[0038] During the installation of the heating furnace 100, the coating furnace 200 and the push-boat assembly 20, the installer only needs to accurately adjust the positional relationship between the push-boat assembly 20 and the coating furnace 200 to realize using a set of push-boat assemblies 20 to transport the boat structure 30 into or out of the heating furnace 100 and the coating furnace 200, thereby simplifying the structure of the coating equipment 1, thereby improving the stability of the coating equipment 1, reducing the footprint of the coating equipment 1, and increasing the maintenance cycle of the coating equipment 1.

[0039] In some embodiments, the heating furnace 100 includes a second cavity 110. The material of the second cavity 110 includes metal. The coating furnace 200 includes a first cavity 220, and the material of the first cavity 220 includes quartz. Quartz is more easily damaged than metal, but the material of the first cavity 220 for coating is generally not metal, while the material of the second cavity 110 for heating can be metal or quartz, that is, the second cavity 110 has lower requirements on the material, so making the material of the second cavity 110 metal can not only increase the service life of the second cavity 110, but also reduce the process difficulty.

[0040] Exemplarily, the first cavity 220 includes an annular side wall, a furnace door and a furnace tail cover, which are respectively arranged at both ends of the annular side wall and close the first cavity 220. The electrode assembly 210 can be connected to the annular side wall or to the furnace tail cover. Exemplarily, the annular side wall has a first end of the annular side wall and a second end of the annular side wall in the extension direction of the coating furnace 200. The furnace door is located at the first end of the annular side wall, and the furnace tail cover is located at the second end of the annular side wall. The electrode assembly 210 is arranged at the second end of the annular side wall.

[0041] Exemplarily, the cross-sectional shape of the second cavity 110 includes a rectangular ring, that is, the shape of the second cavity 110 is a cube. Exemplarily, the cross-sectional shape of the first cavity 220 includes a circular ring, that is, the shape of the first cavity 220 is a cylinder. In practical applications, metals are easy to process into various shapes, and the second cavity 110 with a cross-sectional shape of a rectangular ring is easier to process. The material of the first cavity 220 is generally quartz, and quartz is generally processed into a cylinder.

[0042] Figure 5 Shown is a schematic structural diagram of a coating device provided in another embodiment of the present disclosure. Figure 6 The present invention provides an embodiment of the present invention. Figure 4 A top view of the coating equipment is shown. Figure 7 Shown is a schematic structural diagram of a coating device provided by an embodiment of the present disclosure after a group of push boat components are removed. Figure 8 FIG. 1 is a schematic diagram of the structure of multiple process furnace assemblies provided by an embodiment of the present disclosure. Figures 1 to 8 As shown, there are multiple groups of process furnace assemblies 10, which are arranged in multiple rows and at least one column. There are multiple groups of push boat assemblies 20. The coating device 1 also includes: at least one group of lifting assembly 50.

[0043] Exemplarily, the lifting assembly 50 may be a combination of a cylinder, a motor, and a transmission assembly, and the present disclosure does not make any specific limitation as long as it can provide a driving force in the vertical direction.

[0044] Each set of lifting assemblies 50 corresponds to a row of process furnace assemblies 10, and each set of lifting assemblies 50 is connected to multiple sets of boat pusher assemblies 20 corresponding to the row of process furnace assemblies 10. Each set of lifting assemblies 50 is configured to drive multiple sets of boat pusher assemblies 20 corresponding to the row of process furnace assemblies 10 to move in the vertical direction, so that one set of lifting assemblies 50 can drive multiple sets of boat pusher assemblies 20 to move up and down, reducing the number of configurations of the lifting assemblies 50, thereby further simplifying the structure of the coating device 1.

[0045] For example, Figure 1As shown, multiple groups of process furnace assemblies 10 are arranged in three rows and in one column, and the number of push boat assemblies 20 is three groups. Only one lifting assembly 50 is needed to drive the lifting of three groups of push boat assemblies 20. For example, Figures 5 to 8 As shown, a plurality of process furnace assemblies 10 are arranged in three rows and two columns, and the number of the boat pusher assemblies 20 is six. Only two lifting assemblies 50 are needed to drive the lifting of the six boat pusher assemblies 20.

[0046] In some embodiments, the heating furnace 100 and the coating furnace 200 in each group of process furnace assemblies 10 are arranged in a vertical direction, and the heating furnace 100 and the coating furnace 200 extend in the same direction. Exemplarily, the extending directions of the heating furnace 100 and the coating furnace 200 are both horizontal. The boat pusher assembly 20 is configured to transport the boat structure 30 along the extending direction of the heating furnace 100.

[0047] The lifting assembly 50 can drive multiple groups of boat pusher assemblies 20 to move, and can also drive each boat pusher assembly 20 to move between the heating furnace 100 and the coating furnace 200. The boat pusher assembly 20 only needs to move along the extension direction of the heating furnace 100, which simplifies the structure of the boat pusher assembly 20. In other words, the lifting assembly 50 replaces the lifting function of the boat pusher assembly 20, so that the boat pusher assembly 20 only needs to move along the extension direction of the heating furnace 100.

[0048] In some embodiments, the coating device 1 further includes at least one set of gas source components 60 . The gas source components 60 are connected to the first chamber 221 , and are configured to extract gas from the first chamber 221 , realize the vacuum state of the first chamber 221 , and provide process gas for the first chamber 221 .

[0049] Exemplarily, the gas source assembly 60 may include a vacuum pump, a vacuum pipeline, and a gas supply device. The vacuum pipeline may have three ends connected to each other, a first end connected to the first chamber 221, a second end connected to the vacuum device, and a third end connected to the gas supply device. By starting the vacuum device, the gas in the first chamber 221 can be extracted to achieve a vacuum state of the first chamber 221. By starting the gas supply device, the process gas can be delivered into the first chamber 221.

[0050] In some embodiments, multiple groups of process furnace assemblies 10 are arranged in multiple columns. For example, there are multiple groups of gas source assemblies 60, and each group of gas source assemblies 60 is connected to the first chambers 221 of multiple coating furnaces 200 in the same row, which reduces the number of gas source assemblies 60 and further simplifies the structure of the coating device 1.

[0051] For example, Figures 5 to 7As shown, six groups of process furnace assemblies 10 are arranged in three rows and two columns, and are equipped with three groups of gas source assemblies 60. Each group of gas source assemblies 60 is connected to the first chamber 221 of each of the two coating furnaces 200 in the same row. In practical applications, generally, multiple coating furnaces 200 in the same row start coating together and end coating together. Therefore, each group of gas source assemblies 60 is connected to the first chamber 221 of each of the multiple coating furnaces 200 in the same row, so that the multiple coating furnaces 200 in the same row can be coated synchronously.

[0052] Exemplarily, according to actual needs, each group of gas source components 60 can be arranged to be connected to the first chamber 221 of each of the multiple coating furnaces 200 in the same column, or each group of gas source components 60 can be arranged to be connected to the first chamber 221 of each of the multiple coating furnaces 200 at a specific position, so as to facilitate synchronous coating of the multiple coating furnaces 200.

[0053] In some embodiments, the coating device 1 further includes at least one set of RF power components 70. The RF power components 70 are electrically connected to the electrode components 210 and are configured to provide RF voltage to the electrode components 210. The RF power components 70 only need to be connected to the electrode components 210 of the coating furnace 200, and there is no need to provide the RF power components 70 for the heating furnace 100, which reduces the number of configurations of the RF power components 70 and further simplifies the structure of the coating device 1.

[0054] Exemplarily, the coating furnace 200 may include at least one pair of electrode plates, the RF power supply assembly 70 may be electrically connected to the at least one pair of electrode plates, and the RF power supply assembly 70 provides RF voltage to the at least one pair of electrode plates, so that the at least one pair of electrode plates ionizes the process gas in the first chamber 221. The boat structure 30 needs to be placed between the at least one pair of electrode plates. Since the at least one pair of electrode plates needs to be placed in the first chamber 221, the remaining space in the first chamber 221 becomes smaller. Therefore, during the installation of the coating furnace 200 and the push boat assembly 20, the installer also needs to accurately adjust the positional relationship between the push boat assembly 20 and the coating furnace 200 to ensure that the boat structure 30 does not hit any electrode plate.

[0055] In some embodiments, multiple groups of process furnace assemblies 10 are arranged in multiple columns. For example, there are multiple groups of RF power assemblies 70, and each group of RF power assemblies 70 is electrically connected to the electrode assemblies 210 of the multiple coating furnaces 200 in the same row, which reduces the number of RF power assemblies 70 and further simplifies the structure of the coating device 1.

[0056] For example, Figures 5 to 7As shown, six groups of process furnace assemblies 10 are arranged in three rows and two columns, and three groups of RF power supply assemblies 70 are configured. Each group of RF power supply assemblies 70 is electrically connected to the electrode assemblies 210 of the two coating furnaces 200 in the same row. In practical applications, generally, multiple coating furnaces 200 in the same row start coating together and end coating together. Therefore, each group of RF power supply assemblies 70 is electrically connected to the electrode assemblies 210 of the multiple coating furnaces 200 in the same row, so that the multiple coating furnaces 200 in the same row can be coated synchronously.

[0057] Exemplarily, according to actual needs, each group of RF power components 70 can be electrically connected to the electrode components 210 of each of the multiple coating furnaces 200 in the same column, or each group of RF power components 70 can be electrically connected to the electrode components 210 of each of the multiple coating furnaces 200 at specific positions to facilitate synchronous coating of the multiple coating furnaces 200.

[0058] In some embodiments, the coating furnace 200 has a first end 201 and a second end 202 of the coating furnace in the extension direction of the coating furnace 200. The boat pusher assembly 20 and the lifting assembly 50 are arranged at the first end 201 of the coating furnace. The gas source assembly 60 is arranged at the second end 202 of the coating furnace, and the second end 202 of the coating furnace is connected to the first chamber 221. The RF power supply assembly 70 and the electrode assembly 210 are both arranged at the second end 202 of the coating furnace. In other words, all the supporting equipment of the process furnace assembly 10 are arranged at both ends of the process furnace assembly 10, so that the process furnace assembly 10 can be arranged in multiple rows and columns, thereby improving the compactness of the coating equipment.

[0059] In some embodiments, Fig. 9 As shown, the lifting assembly 50 includes: a first driving source 51 , a first linear module 52 , a first transmission rod 53 and a second linear module 54 .

[0060] Exemplarily, the first driving source 51 may be a motor, a rotary electric cylinder or the like.

[0061] The first linear module 52 extends in the vertical direction, is connected to the first driving source 51, and is connected to the first end 21 of the boat push assembly. The first linear module 52 is configured to drive the first end 21 of the boat push assembly to move in the vertical direction under the drive of the first driving source 51. Exemplarily, the first linear module 52 can be a belt transmission assembly, a slide rail and slider transmission assembly, etc., as long as it can realize transmission in the vertical direction and provide force in the vertical direction.

[0062] The first end 531 of the first transmission rod is connected to the first driving source 51, and the first transmission rod 53 rotates under the drive of the first driving source 51. The first transmission rod 53 may be a single rod or a combination of multiple rods.

[0063] The second linear module 54 extends in the vertical direction, is connected to the second end 532 of the first transmission rod, and is connected to the second end 22 of the boat push assembly. The second linear module 54 is configured to drive the second end 22 of the boat push assembly to move in the vertical direction under the drive of the first transmission rod 53. Exemplarily, the second linear module 54 can be a belt drive assembly, a slide rail and slider drive assembly, etc., as long as it can realize transmission in the vertical direction and provide force in the vertical direction.

[0064] The first transmission rod 53 is used to connect the first driving source 51 and the second linear module 54, so that the first linear module 52 and the second linear module 54 synchronously drive the two ends of the boat push assembly 20 to move in the vertical direction, making the movement of the boat push assembly 20 in the vertical direction more stable and accurate.

[0065] Exemplarily, the lifting assembly 50 further includes at least one guide rod, which extends in the vertical direction. The two ends of the boat push assembly 20 respectively have guide holes, and the guide rod is inserted into the guide hole, so that the guide rod is used to guide the boat push assembly 20, further improving the stability and accuracy of the movement of the boat push assembly 20 in the vertical direction. Exemplarily, the guide rod can be connected to the first linear module 52, and can also be connected to the second linear module 54. In the case of multiple guide rods, some guide rods can be connected to the first linear module 52, and some guide rods can be connected to the second linear module 54.

[0066] In some embodiments, the coating equipment 1 further includes: at least one group of boat moving assemblies 80. Each group of boat moving assemblies 80 is arranged adjacent to multiple groups of boat pushing assemblies 20 corresponding to a row of process furnace assemblies 10. Each group of boat moving assemblies 80 is configured to move the boat structure 30 to the multiple groups of boat pushing assemblies 20 corresponding to the row of process furnace assemblies 10 or to move the boat structure 30 away from the multiple groups of boat pushing assemblies 20 corresponding to the row of process furnace assemblies 10. In other words, the upper and lower boat structures 30 of the multiple groups of boat pushing assemblies 20 corresponding to a row of process furnace assemblies 10 can be realized by using one group of boat moving assemblies 80, that is, the sharing of the boat moving assemblies 80 is realized, the number of configurations of the boat moving assemblies 80 is reduced, and the structure of the coating equipment is further simplified.

[0067] Exemplarily, by providing the boat moving assembly 80 , the boat structure 30 on the boat pushing assembly 20 can be moved to a cache position or an incoming material conveying line, and when the boat pushing assembly 20 needs to be provided with the boat structure 30 , the boat structure 30 can be provided to the boat pushing assembly 20 in a timely manner.

[0068] Exemplarily, the boat moving assembly 80 includes a second driving source 81 , a third linear module 82 , a second transmission rod 83 , a fourth linear module 84 , and at least two clamping members 85 .

[0069] Exemplarily, the second driving source 81 may be a motor, a rotary electric cylinder or the like.

[0070] The third linear module 82 extends in the vertical direction, is connected to the second driving source 81, and is connected to at least one clamping member 85. The first linear module 52 is configured to drive the at least one clamping member 85 to move in the vertical direction under the drive of the second driving source 81. Exemplarily, the third linear module 82 can be a belt transmission assembly, a slide rail and slider transmission assembly, etc., as long as it can realize transmission in the vertical direction and provide force in the vertical direction.

[0071] The first end 831 of the first transmission rod is connected to the second driving source 81, and the second transmission rod 83 rotates under the drive of the second driving source 81. The second transmission rod 83 may be a single rod or a combination of multiple rods.

[0072] The fourth linear module 84 extends in the vertical direction, is connected to the second end 832 of the first transmission rod, and is connected to at least another clamping member 85. The fourth linear module 84 is configured to drive at least another clamping member 85 to move in the vertical direction under the drive of the second transmission rod 83. Exemplarily, the fourth linear module 84 can be a belt transmission assembly, a slide rail and slider transmission assembly, etc., as long as it can realize transmission in the vertical direction and provide force in the vertical direction.

[0073] The second transmission rod 83 is used to connect the second driving source 81 and the fourth linear module 84, so that the third linear module 82 and the fourth linear module 84 synchronously drive at least two clamping members 85 to move in the vertical direction, making the movement of the boat push assembly 20 in the vertical direction more stable and accurate.

[0074] Exemplarily, the boat moving assembly 80 also includes a connecting rod 86, one end of which is connected to at least one clamping member 85 connected to the third linear module 82, and the other end of the connecting rod 86 is connected to at least one clamping member 85 connected to the fourth linear module 84, so that the at least two clamping members 85 can move more synchronously in the vertical direction, and the boat pushing assembly 20 can move more smoothly and accurately in the vertical direction.

[0075] In the embodiments of the present disclosure, if not clearly defined, the connection form may be a detachable connection by means of bolts and nuts, screws, buckles, magnetic attraction, etc. In some connections, if the form of detachable matching is not clearly defined, a non-detachable connection may be made by means of welding, bonding, etc.

[0076] The basic principles of the present application are described above in conjunction with specific embodiments. However, it should be noted that the advantages, strengths, effects, etc. mentioned in the present application are only examples and not limitations, and it cannot be considered that these advantages, strengths, effects, etc. are required by each embodiment of the present application. In addition, the specific details disclosed above are only for the purpose of illustration and ease of understanding, not for limitation, and the above details do not limit the present application to being implemented by adopting the above specific details.

[0077] The block diagrams of the devices, apparatuses, equipment, and systems involved in this application are only illustrative examples and are not intended to require or imply that they must be connected, arranged, and configured in the manner shown in the block diagram. As will be appreciated by those skilled in the art, these devices, apparatuses, equipment, and systems can be connected, arranged, and configured in any manner. Words such as "including", "comprising", "having", etc. are open words, referring to "including but not limited to", and can be used interchangeably with them. The words "or" and "and" used here refer to the words "and / or" and can be used interchangeably with them, unless the context clearly indicates otherwise. The words "such as" used here refer to the phrase "such as but not limited to", and can be used interchangeably with them.

[0078] It should also be noted that in the apparatus, device and method of the present application, each component or each step can be decomposed and / or recombined. Such decomposition and / or recombination should be regarded as equivalent solutions of the present application.

[0079] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use the present application. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein may be applied to other aspects without departing from the scope of the present application. Therefore, the present application is not intended to be limited to the aspects shown herein, but rather to the widest scope consistent with the principles and novel features disclosed herein.

[0080] The above description has been given for the purpose of illustration and description. In addition, this description is not intended to limit the embodiments of the present application to the forms disclosed herein. Although multiple example aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, changes, additions and sub-combinations thereof.

Claims

1. A coating device, characterized in that: include: At least one group of process furnace assemblies, each group of the process furnace assemblies includes a heating furnace and a coating furnace arranged adjacent to each other, the heating furnace is configured to accommodate a boat structure and a product carried by the boat structure, and to heat the product, the coating furnace includes a first cavity and an electrode assembly, the first cavity has a first chamber, the electrode assembly is connected to the first cavity and extends into the first chamber, the first chamber is configured to accommodate the boat structure and the product carried by the boat structure, the boat structure has an electrode hole, the electrode assembly can be inserted into the electrode hole during the process of the boat structure being transported into the first chamber, the electrode assembly is configured to provide electrical energy to the boat structure, so that the boat structure ionizes the process gas in the first chamber to achieve coating of the product; At least one group of boat pusher assemblies, each group of the boat pusher assemblies is arranged in one-to-one correspondence with each group of the process furnace assemblies, and is configured to transport the boat structure into or out of the heating furnace and the coating furnace included in the corresponding process furnace assembly.

2. The coating device according to claim 1, characterized in that: The number of the process furnace components is multiple groups, and the multiple groups of process furnace components are arranged in multiple rows and arranged in at least one column; Wherein, the number of the push boat assemblies is multiple groups, and the coating equipment further includes: At least one group of lifting assemblies, each group of the lifting assemblies corresponds to a column of the process furnace assemblies, each group of the lifting assemblies is connected to multiple groups of the push boat assemblies corresponding to the column of the process furnace assemblies, and is configured to drive the multiple groups of the push boat assemblies corresponding to the column of the process furnace assemblies to move in a vertical direction.

3. The coating device according to claim 2, characterized in that: The heating furnace and the coating furnace in each group of the process furnace assemblies are arranged in a vertical direction, and the heating furnace and the coating furnace have the same extension direction; Wherein, the boat pusher assembly is configured to transport the boat structure along an extension direction of the heating furnace.

4. The coating device according to claim 2, characterized in that: Also includes: At least one group of gas source components is communicated with the first chamber and is configured to extract gas from the first chamber to achieve a vacuum state of the first chamber and introduce the process gas into the first chamber.

5. The coating device according to claim 4, characterized in that: Also includes: At least one set of radio frequency power supply components is electrically connected to the electrode assembly and is configured to provide radio frequency voltage to the electrode assembly.

6. The coating device according to claim 5, characterized in that: A plurality of groups of the process furnace components are arranged into a plurality of rows; There are multiple groups of gas source components, and each group of gas source components is connected to multiple first chambers in the same row; and / or there are multiple groups of RF power supply components, and each group of RF power supply components is electrically connected to the electrode assemblies of the multiple coating furnaces in the same row.

7. The coating device according to claim 5 or 6, characterized in that: The coating furnace has a first end and a second end in the extension direction of the coating furnace; The boat pusher assembly and the lifting assembly are disposed at a first end of the coating furnace; The gas source component is arranged at the second end of the coating furnace, and is connected to the first chamber through the second end of the coating furnace. The RF power supply component and the electrode component are both arranged at the second end of the coating furnace.

8. The coating device according to any one of claims 2 to 6, characterized in that: The lifting assembly comprises: a first driving source; A first linear module extends in a vertical direction, is connected to the first driving source, and is connected to the first end of the boat push assembly, and the first linear module is configured to drive the first end of the boat push assembly to move in a vertical direction under the drive of the first driving source; a transmission rod, a first end of which is connected to the first driving source, and the transmission rod rotates under the drive of the first driving source; The second linear module extends in the vertical direction, is connected to the second end of the transmission rod, and is connected to the second end of the boat push assembly. The second linear module is configured to drive the second end of the boat push assembly to move in the vertical direction under the drive of the transmission rod.

9. The coating device according to any one of claims 2 to 6, characterized in that: Also includes: At least one group of boat moving assemblies, each group of the boat moving assemblies is arranged adjacent to the multiple groups of the boat pushing assemblies corresponding to a row of the process furnace assemblies, and is configured to move the boat structure to the multiple groups of the boat pushing assemblies corresponding to the row of the process furnace assemblies or to move the boat structure away from the multiple groups of the boat pushing assemblies corresponding to the row of the process furnace assemblies.

10. The coating device according to any one of claims 1 to 6, characterized in that: The heating furnace comprises a second cavity, and the material of the second cavity comprises metal; The material of the first cavity includes quartz.

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