Torque sensor and manufacturing method thereof

Abstract

The invention provides a torque sensor and a manufacturing method thereof, the torque sensor comprises a sensing main body and a strain gauge, and the strain gauge is bonded to the surface of a functional area of a transition body in the sensing main body through glass solder. Compared with a mode of fixing the strain gauge and the sensing main body through an adhesive in the prior art, the connecting structure of the strain gauge and the sensing main body can effectively avoid the creep phenomenon, eliminate the influence of loads in other directions, improve the measurement precision of the torque sensor, guarantee the accuracy of torque value measurement, and improve the reliability of the torque sensor. The high-quality use experience of the user is ensured; and no adhesive is used in the manufacturing process of the torque sensor, so that the problem of glue aging can be eliminated, the structural stability of the torque sensor is ensured, and the service life of the torque sensor is ensured.

Description

Technical Field

[0001] The present invention relates to the technical field of sensor equipment, and in particular to a torque sensor and a manufacturing method thereof. Background Art

[0002] Robotics is a growing and increasingly important field in industrial, medical, scientific, aerospace and other applications. In many situations where a robot arm or its attached tool and workpiece come into contact, the applied force and / or torque must be closely monitored. Force / torque sensors are therefore an important component of many robotic systems.

[0003] At present, torque sensors used in robot joints all tightly bond foil resistors to elastomers and use the resistors to form a Wheatstone bridge to achieve the change in resistance of the resistors when the deformation of the elastomer is transformed.

[0004] In this type of torque sensor structure, the elastomer and the resistor are fixed by adhesive. The thermal expansion coefficients of the elastomer, adhesive and resistor are quite different, which makes the sensor highly sensitive to temperature. As a result, the sensor has high requirements for the working environment, and the sensor measures data in different working environments with great differences, affecting the torque measurement accuracy. In addition, the elastomer and the resistor are bonded with adhesive, which will produce creep phenomenon. The sensor is prone to deformation over time, and the overall stability of the torque sensor is poor, affecting the normal use of users. Summary of the invention

[0005] The purpose of the present invention is to solve the technical problems in the torque sensor of the prior art, in which the elastomer and the resistor are fixed by adhesive, the measurement data of the sensor varies greatly in different working environments, which affects the torque measurement accuracy, and the sensor is prone to deformation over time, making it impossible for users to use it normally and effectively.

[0006] In order to solve the above technical problems, the present invention provides a torque sensor, which includes:

[0007] The sensing body comprises an annular inner ring body, an outer ring body arranged outside the inner ring body, and a transition body connected between the inner ring body and the outer ring body; the annular area of ​​the transition body close to the inner ring body is a functional area;

[0008] A strain gauge is bonded to the surface of the functional area of ​​the transition body through glass solder; a plurality of the strain gauges are provided, and the plurality of strain gauges are arranged at intervals along the circumference of the sensing body.

[0009] In some embodiments of the present application, the sensor body is a stainless steel member, and the sensor body has a thermal expansion coefficient that is close to that of glass.

[0010] In some embodiments of the present application, a plurality of the strain gauges are arranged in groups, each strain group includes two strain gauges, the two strain gauges in each strain group are arranged at right angles, and the two strain gauges in each strain group are arranged axially symmetrically with respect to the radial direction of the sensing body.

[0011] In some embodiments of the present application, the torque sensor includes a plurality of strain groups, and the plurality of strain groups are arranged at intervals along the circumference of the inner ring body, and the symmetry axes of two adjacent strain groups form an angle of 90°.

[0012] In some embodiments of the present application, the torque sensor includes two groups of strain units, each group of the strain units includes multiple strain groups; the strain groups in the two groups of strain units are arranged alternately, and the angle between the symmetry axes of two adjacent strain groups in the two groups of strain units is 36°.

[0013] In some embodiments of the present application, the annular area in the transition body close to the outer ring is a connection area, the connection area is arranged outside the functional area, and a stress groove is provided on the surface of the connection area of ​​the transition body.

[0014] In some embodiments of the present application, the outer ring body is provided with a through external force application opening, and the inner ring body is provided with a through internal force application opening, and both the external force application opening and the internal force application opening extend along the axial direction of the sensor body.

[0015] In some embodiments of the present application, there are multiple external force openings, and the multiple external force openings are arranged on the outer ring body at intervals along the circumference of the outer ring body; there are multiple internal force openings, and the multiple internal force openings are arranged on the inner ring body at intervals along the circumference of the inner ring body.

[0016] The present invention also provides a method for manufacturing a torque sensor, which comprises the following steps:

[0017] Processing the sensing body through the substrate;

[0018] Setting glass solder on the surface of a set area of ​​the sensor body and sintering the glass solder into glass;

[0019] The strain gauge is then placed on the glass with the front side of the strain gauge facing upward, and the strain gauge and the glass are bonded under high temperature conditions.

[0020] In some embodiments of the present application, the substrate is stainless steel, and the thermal expansion coefficient of the stainless steel is close to the thermal expansion coefficient of the glass.

[0021] In some embodiments of the present application, after completing the step of processing the sensor body through the substrate, the manufacturing method further includes performing heat treatment and deep cryogenic treatment on the sensor body.

[0022] In some embodiments of the present application, before performing the step of setting glass solder on the surface of the set area of ​​the sensor body, the manufacturing method further includes performing sandblasting on the surface of the set area of ​​the sensor body.

[0023] In some embodiments of the present application, the glass solder is a glass powder colloid, and the glass powder colloid is made of nano-level pure silicon dioxide.

[0024] In some embodiments of the present application, in the step of sintering the glass solder into glass, the sintering temperature is 530°C-540°C; in the step of bonding the strain gauge to the glass, the bonding temperature is 470°C-490°C.

[0025] In some embodiments of the present application, in the step of bonding the strain gauge to the glass, the strain gauge is suspended inside the glass, and both sides of the strain gauge are spaced apart from the surface of the glass and the surface of the sensing body.

[0026] In some embodiments of the present application, after completing the step of bonding the strain gauge to the glass, the manufacturing method further includes performing a high temperature aging treatment on the bonded strain gauge and the glass.

[0027] It can be seen from the above technical scheme that the beneficial effects of the present invention are as follows: in the torque sensor of the present invention and its manufacturing method, the torque sensor includes a sensing body and a strain gauge, and the strain gauge is bonded to the surface of the functional area of ​​the transition body in the sensing body through glass solder. Compared with the traditional technology in which the strain gauge is fixed to the sensing body through an adhesive, the connection structure between the strain gauge and the sensing body in the present application can effectively avoid the occurrence of creep phenomenon, eliminate the influence of loads in other directions, improve the measurement accuracy of the torque sensor, ensure the accuracy of torque value measurement, and ensure the user's high-quality use experience; and no adhesive is used in the manufacturing process of the torque sensor, which can eliminate the problem of glue aging, ensure the structural stability of the torque sensor, and ensure the service life of the torque sensor. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 It is a schematic structural diagram of an embodiment of a torque sensor of the present invention.

[0029] Figure 2 It is a front view of an embodiment of a torque sensor of the present invention.

[0030] Figure 3 It is a flowchart of the steps of the manufacturing method of the torque sensor of the present invention.

[0031] The description of the accompanying drawings is as follows: 100, torque sensor; 10, sensing body; 11, inner ring body; 110, mounting port; 111, internal force opening; 12, outer ring body; 121, external force opening; 13, transition body; 131, functional area; 132, connection area; 133, stress groove; 20, strain gauge; 30, step structure; 40, strain group; 50, strain unit. DETAILED DESCRIPTION

[0032] Typical embodiments that embody the features and advantages of the present invention will be described in detail in the following description. It should be understood that the present invention can have various changes in different embodiments without departing from the scope of the present invention, and the descriptions and illustrations therein are essentially used for illustration purposes rather than for limiting the present invention.

[0033] In the description of the present application, it should be understood that in the embodiments shown in the drawings, the indications of directions or positional relationships (such as up, down, left, right, front and back, etc.) are only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the devices or elements referred to must have a specific orientation, be constructed and operate in a specific orientation. These descriptions are appropriate when these elements are in the positions shown in the drawings. If the descriptions of the positions of these elements change, the indications of these directions also change accordingly.

[0034] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of this application, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0035] See also Figure 1 and Figure 2 An embodiment of the present application provides a torque sensor 100 capable of sensing and detecting the torsional moment on a rotating or non-rotating mechanical component. The torque sensor 100 includes a sensing body 10 and a strain gauge 20 .

[0036] The sensing body 10 includes an annular inner ring body 11, an outer ring body 12 arranged outside the inner ring body 11, and a transition body 13 connected between the inner ring body 11 and the outer ring body 12. The annular region of the transition body 13 close to the inner ring body 11 is a functional area 131. The strain gauge 20 is bonded to the surface of the functional area 131 of the transition body 13 by glass solder. A plurality of strain gauges 20 are provided, and the plurality of strain gauges 20 are arranged at intervals along the circumference of the sensing body 10.

[0037] In some embodiments of the present application, the outer contour of the sensor body 10 is circular. The sensor body 10 can be a stainless steel part, and the stainless steel can be made of 17-4PH stainless steel, 630 stainless steel and other materials.

[0038] The sensing body 10 has a thermal expansion coefficient that is similar to that of glass, which can reduce the sensitivity of the torque sensor 100 to the ambient temperature, ensure the stability of the torque sensor 100 in various temperature environments, and ensure the accuracy of the data measured by the torque sensor 100.

[0039] The inner ring body 11, the outer ring body 12 and the transition body 13 connected between the inner ring body 11 and the outer ring body 12 are all in a circular shape. The setting of the circular profile is conducive to the rotation between related components of the torque sensor 100 in a robot or other equipment, thereby realizing the rapid assembly of the joints in the robot or other equipment and the transmission of torque.

[0040] In some examples, a through installation opening 110 is formed inside the inner ring body 11 , and the installation opening 110 can be used to achieve connection between the torque sensor 100 and related components, so that the torque sensor 100 and the related components are assembled and fixed.

[0041] The inner ring body 11 is also provided with an inner force application opening 111, which is arranged through and extends along the axis direction of the sensor body 10. The inner force application opening 111 can have any suitable geometric shape, such as a circle or other polygon.

[0042] The torque measured by the torque sensor 100 can be transmitted through a connection member connected to the inner force application opening 111 through some static components such as a rotating shaft, thereby achieving torque measurement at the inner ring body 11 area of ​​the sensor body 10.

[0043] In some examples, a plurality of inner force application openings 111 may be provided, and the plurality of inner force application openings 111 are arranged on the inner ring body 11 at intervals along the circumference of the inner ring body 11. The plurality of inner force application openings 111 may have the same size or may be provided in different sizes.

[0044] In some embodiments of the present application, the sensor body 10 further includes a transition body 13 , which is in a circular ring shape and connected to the outer periphery of the inner ring body 11 .

[0045] The transition body 13 is solid, that is, there is no through opening on the transition body 13. In the sensor body 10, the surfaces of the outer ring body 12 and the inner ring body 11 both extend outwardly beyond the surface of the transition body 13.

[0046] In some examples, the transition body 13 may include a functional area 131 and a connection area 132 . The functional area 131 is an annular area of ​​the transition body 13 close to the inner ring body 11 , and the connection area 132 is an annular area of ​​the transition body 13 close to the outer ring body 12 .

[0047] A step structure 30 is formed at a connection between the functional area 131 of the transition body 13 and the inner ring body 11 , and a step structure 30 is formed at a connection between the connection area 132 of the transition body 13 and the outer ring body 12 .

[0048] In some examples, a strain gauge 20 is provided on the surface of the functional area 131 of the transition body 13. The strain gauge 20 may be bonded to the transition body 13 by glass solder. A plurality of strain gauges 20 may be provided, and the plurality of strain gauges 20 are arranged at intervals along the circumference of the sensing body 10.

[0049] A stress groove 133 is formed on the surface of the connection area 132 of the transition body 13. The stress groove 133 is generally circular and is arranged corresponding to the outer contour of the transition body 13. The stress groove 133 can be used to orient / guide the applied stress and strain relative to the position of the strain gauge 20.

[0050] In some embodiments of the present application, the sensor body 10 further includes an outer ring body 12. The outer ring body 12 is annular and connected to the outer periphery of the transition body 13.

[0051] The outer ring body 12 is provided with an external force application opening 121, which is arranged through and extends along the axis direction of the sensor body 10. The external force application opening 121 can have any suitable geometric shape, such as a circle or other polygon.

[0052] The torque measured by the torque sensor 100 can be transmitted through some static components such as a rotating shaft and connected to the connecting components of the outer force opening 121 and the inner force opening 111 to achieve torque measurement at the outer ring body 12 and the inner ring body 11 area of ​​the sensor body 10.

[0053] In some examples, a plurality of external force application openings 121 may be provided, and the plurality of external force application openings 121 are arranged on the outer ring body 12 at intervals along the circumference of the outer ring body 12. The plurality of external force application openings 121 may have the same size or may be provided in different sizes.

[0054] In addition, in some examples, the outer ring body 12 may be provided with a threaded hole 122, which is provided through the outer ring body 12 in the thickness direction. A plurality of threaded holes 122 may be provided, and may be arranged at intervals on the outer ring body 12.

[0055] By driving a screw into the threaded hole 122 , the torque sensor 100 fixed by the pin connection can be lifted up, so that the torque sensor 100 is disconnected and fixed, so as to facilitate the disassembly of the torque sensor 100 .

[0056] Furthermore, in some embodiments of the present application, the torque sensor 100 may further include a strain gauge 20. The strain gauge 20 may include or consist of at least one of a silicon strain gauge, a foil strain gauge, and a thin layer strain gauge.

[0057] When the strain gauge 20 is a silicon strain gauge, not only can the torque sensor 100 have a higher accuracy, but also the torque sensor 100 can be miniaturized.

[0058] In addition, silicon strain gauges have a wide operating temperature range and can work stably for a long time in harsh industrial environments. The digital circuits in silicon strain gauges are carefully designed for various working conditions and have strong anti-interference capabilities, and can resist the influence of factors such as frequency, electromagnetic interference, and surge voltage. Silicon strain gauges use temperature compensation circuits, which can automatically adjust errors caused by temperature changes to ensure the accuracy of measurement results.

[0059] The strain gauge 20 is disposed on the functional area 131 of the sensor body 10. When the torque sensor 100 is working, the sensor body 10 is used to withstand the torque and deform, and the strain gauge 20 is used to convert the deformation into a change in resistance value, thereby measuring the corresponding torque value.

[0060] The strain gauge 20 is bonded to the surface of the functional area 131 of the transition body 13 by glass solder. Compared with the conventional method in which the strain gauge 20 is fixed to the sensing body 10 by adhesive, the connection structure formed by the strain gauge 20 and the sensing body 10 by glass solder bonding in the present application can effectively avoid the occurrence of creep phenomenon, eliminate the influence of loads in other directions, improve the overall stability and measurement accuracy of the torque sensor 100, ensure the accuracy of torque value measurement, and ensure a high-quality user experience.

[0061] In some examples, a plurality of strain gauges 20 are arranged in groups, and each strain group 40 includes two strain gauges 20. The two strain gauges 20 in each strain group 40 are arranged at a right angle, and the two strain gauges 20 in each strain group 40 are arranged axially symmetrically with respect to the radial direction of the sensing body 10.

[0062] The plurality of strain gauges 20 can form a plurality of groups of Wheatstone bridges on the sensing body 10. When the sensing body 10 is deformed, the resistance value of the strain gauge 20 changes accordingly.

[0063] In some embodiments of the present application, the torque sensor 100 may further include a measurement circuit and a signal processing unit. The measurement circuit is connected to the strain gauge 20 and is used to convert the resistance change of the strain gauge 20 into an electrical signal. The signal processing unit is connected to the measurement circuit and is used to receive the electrical signal output by the measurement circuit and perform data processing to obtain the torque value.

[0064] In some examples, the torque sensor 100 includes a plurality of strain groups 40 , and the plurality of strain groups 40 are arranged at intervals along the circumference of the inner ring body 11 , and the symmetry axes of two adjacent strain groups 40 form an angle of 90°.

[0065] In some examples, the torque sensor 100 may include two sets of strain cells 50. The strain cells 50 form a Wheatstone bridge.

[0066] Each group of strain units 50 includes a plurality of strain groups 40. The strain groups 40 in the two groups of strain units 50 are arranged alternately, and the angle between the symmetry axes of two adjacent strain groups 40 in the two groups of strain units 50 is 36°.

[0067] This arrangement can eliminate the crosstalk caused to the torque sensor 100 in the axial direction, radial direction and bending moment direction, reduce the influence of such crosstalk on the measurement result of the torque sensor 100, and ensure the stability and accuracy of the measurement of the torque sensor 100.

[0068] When the torque sensor 100 of the present application is in use, the sensing body 10 is deformed by the torque, and the Wheatstone bridge formed by the strain gauge 20 can convert the deformation into a change in resistance value. The measurement circuit converts it into an electrical signal corresponding to the resistance change of the strain gauge 20. The signal processing unit receives the electrical signal output by the measurement circuit and processes it to obtain the torque value.

[0069] See also Figure 3 An embodiment of the present application further provides a method for manufacturing a torque sensor 100, which is used to manufacture the torque sensor 100 of the above structure. The specific structure of the torque sensor 100 has been described above and will not be repeated here.

[0070] Specifically, the manufacturing method of the torque sensor 100 includes the following steps:

[0071] S10, processing the sensing body 10 by a substrate;

[0072] S20, placing glass solder on the surface of a set area of ​​the sensor body 10, and sintering the glass solder into glass;

[0073] S30, placing the strain gauge 20 on the glass with the front side of the strain gauge 20 facing upward, and bonding the strain gauge 20 to the glass under high temperature conditions.

[0074] In some embodiments of the present application, in step S10, the substrate may be a stainless steel member, and the stainless steel may be made of 17-4PH stainless steel, 630 stainless steel, or the like.

[0075] The substrate may be made of stainless steel having a thermal expansion coefficient close to that of glass, which can reduce the sensitivity of the torque sensor 100 to ambient temperature, ensure the stability of the torque sensor 100 in various temperature environments, and ensure the accuracy of the data measured by the torque sensor 100.

[0076] In step S10, the stainless steel substrate can be machined into a ring-shaped sensor body 10. After the machining is completed, the sensor body 10 is degreased and cleaned.

[0077] After degreasing and cleaning, the sensor body 10 is subjected to a heat treatment at 480° C. and a cryogenic treatment at −160° C. to improve the overall hardness and toughness of the sensor body 10 and enhance the overall structural stability of the torque sensor 100 .

[0078] Regarding step S20 , before setting the glass solder, the set area of ​​the sensor body 10 is firstly sandblasted to facilitate the subsequent connection of the glass solder and improve the strength of the connection between the glass solder and the sensor body 10 .

[0079] The glass solder in the present application is a glass powder colloid, which uses nano-level pure silicon dioxide. This kind of glass solder can effectively reduce the introduction of metal ions, avoid the influence of metal ions on the measurement of the torque sensor 100, and ensure the overall measurement accuracy of the manufactured torque sensor 100.

[0080] A certain number of glass powder colloids can be printed on the surface of a set area of ​​the sensor body 10 by printing, and the shape of the printed glass powder colloids is elliptical. Two adjacent glass powder colloids are perpendicular to each other, so as to facilitate the subsequent positioning and fixing of the strain gauge 20.

[0081] After the glass powder colloid is printed on the sensor body 10, the glass powder colloid can be sintered into glass under high temperature conditions. Specifically, the sensor body 10 printed with the glass powder colloid is placed in a tunnel furnace and a sintering temperature of 530° C. to 540° C. is provided. Under the action of high temperature, the glass powder colloid is sintered into glass.

[0082] In step S30, after the glass is sintered, the strain gauge 20 is placed on the glass with the front side of the strain gauge 20 facing upwards. The strain gauge 20 is bonded to the glass under high temperature conditions.

[0083] Specifically, a furnace temperature of 470° C.-490° C. is provided in the tunnel furnace. Under this temperature condition, the strain gauge 20 can generate a bonding effect with the glass, so that the strain gauge 20 is connected to the glass, thereby achieving the fixation of the strain gauge 20 on the sensor body 10 .

[0084] After the strain gauge 20 is fixed on the sensor body 10 , the sensor body 10 and the strain gauge 20 are placed under a high temperature condition of 250° C. for high temperature aging to eliminate the stress of the strain gauge 20 and ensure the overall stability of the torque sensor 100 and the torque measurement accuracy.

[0085] In step S30 , during the step of bonding the strain gauge 20 to the glass, the strain gauge 20 is suspended inside the glass, and a gap is formed between two sides of the strain gauge 20 and the surface of the glass and the surface of the sensor body 10 .

[0086] This glass-glass micro-melting process can bond a smaller strain gauge 20 to glass. Since the thermal expansion coefficients of the sensor body 10, glass, and strain gauge 20 are similar, the sensor body 10 and the strain gauge 20 are bonded by glass welding, which makes the torque sensor 100 smaller in size and improves the life of the torque sensor 100 and its resistance to high and low temperature shock.

[0087] In the manufacturing method of the torque sensor 100 of the present application, the connection between the strain gauge 20 and the glass is achieved by welding bonding, which replaces the adhesive in the traditional technical solution, which can not only improve the overall manufacturing quality of the torque sensor 100, but also ensure the sensitivity of the torque sensor 100. In addition, without using adhesive, the problem of glue aging can be eliminated, and the service life of the torque sensor 100 can be guaranteed. In addition, in the manufacturing method, the thermal expansion coefficients of the strain gauge 20, glass and sensor body 10 used are similar, so the torque sensor 100 manufactured in this way can effectively avoid abnormalities such as the breakage of the strain gauge 20 in high and low temperature environments, so that the torque sensor 100 has better resistance to high and low temperature impact, and the torque sensor 100 is applicable to a wider environment.

[0088] Regarding the torque sensor and its manufacturing method of the present application, the torque sensor includes a sensing body and a strain gauge, and the strain gauge is bonded to the surface of the functional area of ​​the transition body in the sensing body through glass solder. Compared with the traditional technology in which the strain gauge is fixed to the sensing body through an adhesive, the connection structure between the strain gauge and the sensing body in the present application can effectively avoid the occurrence of creep phenomenon, eliminate the influence of loads in other directions, improve the measurement accuracy of the torque sensor, ensure the accuracy of torque value measurement, and ensure the user's high-quality use experience; and no adhesive is used in the manufacturing process of the torque sensor, which can eliminate the problem of glue aging, ensure the structural stability of the torque sensor, and ensure the service life of the torque sensor.

[0089] Although the present invention has been described with reference to several typical embodiments, it should be understood that the terms used are illustrative and exemplary, rather than restrictive. Since the present invention can be embodied in a variety of forms without departing from the spirit or essence of the invention, it should be understood that the above embodiments are not limited to any of the foregoing details, but should be interpreted broadly within the spirit and scope defined by the appended claims, so all changes and modifications falling within the scope of the claims or their equivalents should be covered by the appended claims.

Claims

1. A torque sensor, characterized in that: include: The sensing body comprises an annular inner ring body, an outer ring body arranged outside the inner ring body, and a transition body connected between the inner ring body and the outer ring body; the annular area of ​​the transition body close to the inner ring body is a functional area; A strain gauge is bonded to the surface of the functional area of ​​the transition body through glass solder; a plurality of the strain gauges are provided, and the plurality of strain gauges are arranged at intervals along the circumference of the sensing body.

2. The torque sensor according to claim 1, characterized in that: The sensing body is a stainless steel part, and the sensing body has a thermal expansion coefficient that is close to that of glass.

3. The torque sensor according to claim 1, characterized in that: The plurality of strain gauges are arranged in groups, each strain group includes two strain gauges, the two strain gauges in each strain group are arranged at a right angle, and the two strain gauges in each strain group are arranged axially symmetrically with respect to the radial direction of the sensing body.

4. The torque sensor according to claim 3, characterized in that: The torque sensor comprises a plurality of strain groups, which are arranged at intervals along the circumference of the inner ring body, and the symmetry axes of two adjacent strain groups form an angle of 90°.

5. The torque sensor according to claim 4, characterized in that: The torque sensor includes two groups of strain units, each group of strain units includes a plurality of strain groups; the strain groups in the two groups of strain units are arranged alternately, and the angle between the symmetry axes of two adjacent strain groups in the two groups of strain units is 36°.

6. The torque sensor according to claim 1, characterized in that: The annular area in the transition body close to the outer ring is a connection area, and the connection area is arranged outside the functional area. A stress groove is provided on the surface of the connection area of ​​the transition body.

7. The torque sensor according to claim 1, characterized in that: The outer ring body is provided with a through external force application opening, and the inner ring body is provided with a through internal force application opening. Both the external force application opening and the internal force application opening extend along the axial direction of the sensor body.

8. The torque sensor according to claim 7, characterized in that: There are multiple external force application openings, which are arranged on the outer ring body at intervals along the circumference of the outer ring body; there are multiple internal force application openings, which are arranged on the inner ring body at intervals along the circumference of the inner ring body.

9. A method for manufacturing a torque sensor, characterized in that: The steps include: Processing the sensing body through the substrate; Setting glass solder on the surface of a set area of ​​the sensor body and sintering the glass solder into glass; The strain gauge is then placed on the glass with the front side of the strain gauge facing upward, and the strain gauge and the glass are bonded under high temperature conditions.

10. The method for manufacturing a torque sensor according to claim 9, characterized in that: The substrate is stainless steel, and the thermal expansion coefficient of the stainless steel is close to the thermal expansion coefficient of the glass.

11. The method for manufacturing a torque sensor according to claim 9, characterized in that: After completing the step of processing the sensor body through the substrate, the manufacturing method further comprises performing heat treatment and deep cryogenic treatment on the sensor body.

12. The method for manufacturing a torque sensor according to claim 9, characterized in that: Before providing the glass solder on the surface of the set area of ​​the sensor body, the manufacturing method further includes performing a sandblasting process on the surface of the set area of ​​the sensor body.

13. The method for manufacturing a torque sensor according to claim 9, characterized in that: The glass solder is a glass powder colloid, and the glass powder colloid is made of nano-level pure silicon dioxide.

14. The method for manufacturing a torque sensor according to claim 9, characterized in that: In the step of sintering the glass solder into glass, the sintering temperature is 530°C-540°C; in the step of bonding the strain gauge to the glass, the bonding temperature is 470°C-490°C.

15. The method for manufacturing a torque sensor according to claim 9, characterized in that: In the step of bonding the strain gauge to the glass, the strain gauge is suspended inside the glass, and both sides of the strain gauge are spaced apart from the surface of the glass and the surface of the sensing body.

16. The method for manufacturing a torque sensor according to claim 9, characterized in that: After completing the step of bonding the strain gauge to the glass, the manufacturing method further comprises performing a high temperature aging treatment on the bonded strain gauge and the glass.

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