Six-degree-of-freedom motion platform

Abstract

The embodiment of the specification provides a six-degree-of-freedom motion platform. The six-degree-of-freedom motion platform comprises a base, a carrying disc, a plurality of groups of vertical driving mechanisms and a plurality of groups of horizontal driving mechanisms, the multiple sets of vertical driving mechanisms are arranged on the surface, close to the carrying disc, of the base and connected with the multiple different first side faces of the carrying disc so as to drive the carrying disc to do lifting and / or pitching motion relative to the base. The multiple sets of horizontal driving mechanisms are arranged on the surface, close to the carrying disc, of the base and connected with the multiple different second side faces of the carrying disc so as to drive the carrying disc to move and / or rotate relative to the base. The horizontal driving mechanisms and the vertical driving mechanisms are arranged at intervals. According to the six-degree-of-freedom parallel mechanism, the multiple sets of vertical driving mechanisms and the multiple sets of horizontal driving mechanisms are located in the same layer, movement in the six-degree-of-freedom direction is achieved through a single-layer mechanism, the movement precision is improved in combination with closed-loop control, meanwhile, occupied space size can be reduced, and integration compactness is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of motion platforms, and in particular to a six-degree-of-freedom motion platform. Background Art

[0002] Six-degree-of-freedom motion platforms are often used in the preparation and processing of semiconductor materials, integrated circuits, precision machining, biomedicine, optical imaging, etc. A six-degree-of-freedom motion platform is a mechanical device with six independent degrees of freedom that can perform translational and rotational motion in three-dimensional space. In the prior art, a six-degree-of-freedom motion platform is usually stacked with multiple single / double-degree-of-freedom platforms, which results in a large height or volume of the six-degree-of-freedom motion platform combination, thereby affecting the overall size of the device. Summary of the invention

[0003] In view of this, the embodiment of this specification provides a six-degree-of-freedom motion platform, which drives the carrier to produce three motion results of lifting, pitching, and lifting and pitching by setting multiple sets of vertical drive mechanisms, and drives the carrier to produce three motion results of displacement, rotation, and displacement and rotation by setting multiple sets of horizontal drive mechanisms. Multiple sets of vertical drive mechanisms and multiple sets of horizontal drive mechanisms are in the same layer, and the single-layer mechanism is used to realize the movement of six degrees of freedom, and the closed-loop control is combined to improve the motion accuracy, while also reducing the space occupied and improving the compactness of integration.

[0004] The embodiments of this specification provide the following technical solutions: a six-degree-of-freedom motion platform, including a base and a carrier, and also including:

[0005] A plurality of sets of vertical driving mechanisms are respectively arranged on the surface of the base close to the carrier and connected to a plurality of different first side surfaces of the carrier to drive the carrier to perform lifting and / or pitching motion relative to the base;

[0006] A plurality of sets of horizontal driving mechanisms are respectively arranged on the surface of the base close to the carrier and connected to a plurality of different second side surfaces of the carrier to drive the carrier to perform displacement and / or rotational movement relative to the base; wherein

[0007] The multiple groups of horizontal driving mechanisms are respectively arranged at intervals from the multiple groups of vertical driving mechanisms.

[0008] Preferably, the vertical driving mechanism comprises:

[0009] A support pad is disposed on a surface of the base close to the carrier plate;

[0010] A vertical drive assembly connected to the first side surface of the carrier;

[0011] A supporting connecting rod is used to connect the supporting pad and the vertical driving assembly; wherein

[0012] The support link is rotatably connected to the support pad, and the support link is fixedly connected to the vertical drive assembly.

[0013] Preferably, the vertical drive assembly comprises:

[0014] A first guide rail connected to the first side surface of the carrier plate;

[0015] a first drive motor connected to the supporting link and movably connected to the first guide rail, and capable of being displaced along the length direction of the first guide rail;

[0016] The first monitor is built into the vertical drive assembly to monitor the displacement distance of the first drive motor relative to the first guide rail.

[0017] Preferably, the connection method between the support pad and the base includes air film connection, oil film connection, and electromagnetic connection.

[0018] Preferably, the connection modes between the support link and the support pad include ball-and-socket connection, hinge connection, and universal joint connection.

[0019] Preferably, the horizontal driving mechanism comprises:

[0020] A horizontal driving assembly is disposed on a surface of the base close to the carrier plate;

[0021] A push rod connected to the horizontal drive assembly;

[0022] A hinge is used to connect the push rod and the second side surface of the carrier; wherein

[0023] The horizontal driving assembly can drive the push rod to generate displacement, and under the action of the hinge, the carrier plate is caused to perform displacement and / or rotational movement.

[0024] Preferably, the horizontal driving assembly comprises:

[0025] A second guide rail is disposed on a surface of the base close to the carrier plate;

[0026] a second driving motor connected to the push rod and movably connected to the second guide rail, and capable of moving along the length direction of the second guide rail;

[0027] The second monitor is built into the horizontal drive assembly to monitor the displacement distance of the second drive motor relative to the second guide rail.

[0028] Preferably, the push rod comprises a first push rod and a second push rod;

[0029] The hinge comprises a first hinge, a second hinge, and a third hinge; wherein

[0030] The first push rod is connected to the second driving motor, the first hinge connects the first push rod and the second push rod, the second hinge connects the second push rod and the third hinge, and the third hinge connects the second hinge and the second side surface of the carrier.

[0031] Preferably, the vertical driving mechanism and the horizontal driving mechanism are decoupled by the third hinge.

[0032] Preferably, the hinge is a Hooke's hinge and / or a ball hinge.

[0033] Compared with the prior art, the at least one technical solution adopted in the embodiments of this specification can achieve the following beneficial effects:

[0034] By setting up multiple sets of vertical drive mechanisms, the carrier plate can produce three kinds of motion results: lifting, pitching, and lifting and pitching. By setting up multiple sets of horizontal drive mechanisms, the carrier plate can produce three kinds of motion results: displacement, rotation, and displacement and rotation. In addition, multiple sets of vertical drive mechanisms and multiple sets of horizontal drive mechanisms are located in the same layer, and the single-layer mechanism can realize the movement in six degrees of freedom, and the closed-loop control can be combined to improve the motion accuracy. At the same time, it can also reduce the space occupied and improve the compactness of integration. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0036] Figure 1 It is a three-dimensional structural schematic diagram of the six-degree-of-freedom motion platform provided by the present application;

[0037] Figure 2 It is a three-dimensional structural schematic diagram of the vertical driving mechanism of the six-degree-of-freedom motion platform provided by the present application when working;

[0038] Figure 3 It is a three-dimensional structural schematic diagram of the horizontal driving mechanism of the six-degree-of-freedom motion platform provided by the present application when it is working;

[0039] Figure 4 This is a top view of the horizontal drive mechanism of the six-degree-of-freedom motion platform provided by the present application when it is working.

[0040] In the figure, 1, base; 2, carrier plate; 21, first side; 22, second side; 3, vertical drive mechanism; 31, support pad; 32, support connecting rod; 33, first drive motor; 34, first guide rail; 4, horizontal drive mechanism; 41, second guide rail; 42, second drive motor; 43, push rod; 431, first push rod; 432, second push rod; 44, first hinge; 45, second hinge; 46, third hinge. DETAILED DESCRIPTION

[0041] The embodiments of the present application are described in detail below with reference to the accompanying drawings.

[0042] The following describes the implementation methods of the present application through specific examples, and those skilled in the art can easily understand other advantages and effects of the present application from the contents disclosed in this specification. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. The present application can also be implemented or applied through other different specific implementation methods, and the details in this specification can also be modified or changed in various ways based on different viewpoints and applications without departing from the spirit of the present application. It should be noted that, in the absence of conflict, the following embodiments and the features in the embodiments can be combined with each other. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in the field without making creative work belong to the scope of protection of the present application.

[0043] It should be noted that various aspects of the embodiments within the scope of the appended claims are described below. It should be apparent that the aspects described herein can be embodied in a wide variety of forms, and any specific structure and / or function described herein is merely illustrative. Based on the present application, it should be understood by those skilled in the art that an aspect described herein can be implemented independently of any other aspect, and two or more of these aspects can be combined in various ways. For example, any number and aspect described herein can be used to implement the device and / or practice the method. In addition, other structures and / or functionalities other than one or more of the aspects described herein can be used to implement this device and / or practice this method.

[0044] It should also be noted that the illustrations provided in the following embodiments are only schematic illustrations of the basic concept of the present application. The drawings only show components related to the present application rather than being drawn according to the number, shape and size of components in actual implementation. In actual implementation, the type, quantity and proportion of each component may be changed arbitrarily, and the component layout may also be more complicated.

[0045] Additionally, in the following description, specific details are provided to facilitate a thorough understanding of the examples. However, it will be understood by those skilled in the art that the aspects described may be practiced without these specific details.

[0046] The technical solutions provided by various embodiments of the present application are described below in conjunction with the accompanying drawings.

[0047] Figure 1 : is a schematic diagram of the three-dimensional structure of the six-degree-of-freedom motion platform provided in the present application, which includes a base 1 and a carrier plate 2, three groups of vertical drive mechanisms 3 are arranged above the base 1, and the three groups of vertical drive mechanisms 3 are respectively connected to three different first side surfaces 21 of the carrier plate 2, and three groups of horizontal drive mechanisms 4 are also arranged above the base 1, and the three groups of horizontal drive mechanisms 4 are respectively arranged at intervals with the three groups of vertical drive mechanisms 3, and the three groups of horizontal drive mechanisms 4 are respectively connected to three different second side surfaces 22 of the carrier plate 2;

[0048] Among them, when the three groups of the vertical driving mechanisms 3 drive the carrier 2 to move, the carrier 2 can produce three motion results of lifting, pitching, and lifting combined with pitching; when the three groups of the horizontal driving mechanisms 4 drive the carrier 2 to move, the carrier 2 can produce three motion results of displacement, rotation, and displacement combined with rotation, thereby realizing the six-degree-of-freedom motion of the carrier 2.

[0049] The three groups of vertical drive mechanisms 3 and the three groups of horizontal drive mechanisms 4 are located in the same layer, and the movement in six degrees of freedom is achieved through the single-layer mechanism, and the movement accuracy is improved by combining closed-loop control.

[0050] It should be noted that the first side surface 21 and the second side surface 22 of the carrier plate 2 are both surfaces perpendicular to the top surface of the carrier plate 2 , and an acute angle is formed between adjacent first side surfaces 21 and second side surfaces 22 .

[0051] It should also be noted that, for the driving methods of the three groups of vertical driving mechanisms 3 and the three groups of horizontal driving mechanisms 4, if a screw drive is used in combination with a rotary encoder, a motion resolution of microns can be achieved; if a voice coil motor drive is used in combination with optical measurement, a motion resolution of hundreds of nanometers can be achieved; if a piezoelectric ceramic motor is used for driving, a nanometer-level motion resolution can be achieved, and the motion resolution is relatively high. Different driving methods can be selected according to actual conditions.

[0052] like Figure 1As shown, in some embodiments, the vertical drive mechanism 3 includes a support pad 31, a support link 32 and a vertical drive assembly, wherein the support pad 31 is disposed on the surface of the base 1 close to the carrier 2, the support link 32 is rotatably connected to the support pad 31, and the support link 32 is fixedly connected to the vertical drive assembly. The vertical drive assembly and the carrier 2 are supported by the support pad 31 and the support link 32, and the support link 32 can rotate relative to the support pad 31 to ensure that the carrier 2 can move relative to the base 1. The bottom end of the support link 32 is connected to the support pad 31 by a ball and socket connection, a universal joint connection or a hinge connection to ensure that the support link 32 can rotate within a certain range relative to the support pad 31.

[0053] In some embodiments, the support pad 31 is non-contact with the base 1. In this case, the support pad 31 is connected to the base 1 through an air film, an oil film or the principle of electromagnetic repulsion. In other embodiments, the support pad 31 is in contact with the base 1. In this case, the support pad 31 is connected to the base 1 through the principle of a universal roller or a rolling ball. The method of setting the support pad 31 on the base 1 can be selected according to the use requirements.

[0054] like Figure 1-Figure 2 As shown, in some embodiments, the vertical drive assembly includes a first guide rail 34, a first drive motor 33 and a first monitor, the first guide rail 34 is connected to the first side surface 21 of the carrier 2, the first drive motor 33 is installed on the first guide rail 34, the output end of the first drive motor 33 is connected to the support link 32, when the first drive motor 33 outputs thrust, it pushes the carrier 2 in the vertical direction in the reverse direction to adjust the position of the carrier 2, and the first monitor is built into the vertical drive assembly to monitor the displacement distance of the first drive motor 33 relative to the first guide rail 34. Since the first guide rail 34 is connected to the first side surface 21 of the carrier 2, the first guide rail 34 and the carrier 2 move synchronously, so the displacement distance of the first guide rail 34 relative to the first drive motor 33 is monitored by the first monitor, so the displacement distance of the carrier 2 relative to the first drive motor 33 can be monitored.

[0055] like Figure 1 , Figure 3-Figure 4As shown, in some embodiments, the horizontal driving mechanism 4 includes: a horizontal driving assembly, which is arranged on the surface of the base 1 close to the carrier 2; a push rod 43, which is connected to the horizontal driving assembly; and a hinge, which is used to connect the push rod 43 and the second side surface 22 of the carrier 2. The horizontal driving assembly can drive the push rod 43 to produce displacement, and under the action of the hinge, the carrier 2 is ordered to move and / or rotate. By setting the structure of the hinge and the push rod 43, the movement displacement and / or rotation movement of the carrier 2 is achieved.

[0056] The horizontal driving assembly includes a second guide rail 41, a second driving motor 42 and a second monitor. The second guide rail 41 is installed on the base 1. The second guide rail 41 is connected to the second driving motor 42. The output end of the second driving motor 42 is connected to the carrier 2 through the push rod 43. When the second driving motor 42 outputs thrust, under the action of the reverse force, the second driving motor 42 pushes the carrier 2 to move through the push rod 43, so as to realize the movement of the carrier 2 in the horizontal plane. The second monitor is built into the horizontal driving assembly to monitor the displacement distance of the second driving motor 42 relative to the second guide rail 41. Since the second guide rail 41 is connected to the second side surface 22 of the carrier 2, the second guide rail 41 and the carrier 2 move synchronously. Therefore, by monitoring the displacement distance of the second driving motor 42 relative to the second guide rail 41 through the second monitor, the displacement distance of the carrier 2 relative to the second driving motor 42 can be monitored.

[0057] like Figure 1 , Figure 3-Figure 4As shown, in some embodiments, the push rod 43 includes a first push rod 431 and a second push rod 432; the hinge includes a first hinge 44, a second hinge 45, and a third hinge 46. The first push rod 431 is connected to the second drive motor 42, the first hinge 44 connects the first push rod 431 and the second push rod 432, the second hinge 45 connects the second push rod 432 and the third hinge 46, and the third hinge 46 connects the second hinge 45 and the second side surface 22 of the carrier 2. The first end of the first push rod 431 is connected to the output end of the second drive motor 42, the second end of the first push rod 431 is connected to the first side of the first hinge 44, the second side of the first hinge 44 is connected to the first end of the second push rod 432, the second end of the second push rod 432 is connected to the first side of the second hinge 45, the second side of the second hinge 45 is connected to the first side of the third hinge 46, and the second side of the third hinge 46 is connected to the second side surface 22 of the carrier 2. When the second drive motor 42 is working, the second drive motor 42 drives the first push rod 431 to move, the first push rod 431 drives the first hinge 44 to move, the first hinge 44 drives the second push rod 432 to move, the second push rod 432 drives the second hinge 45 to move, and the second hinge 45 drives the carrier 2 to move through the third hinge 46, thereby realizing the movement displacement and / or rotation movement of the carrier 2 relative to the second drive motor 42.

[0058] It should be noted that the first hinge 44, the second hinge 45 and the third hinge 46 can all adopt Hooke's hinge and / or ball hinge, and both Hooke's hinge and ball hinge can realize multi-dimensional freedom movement, thereby ensuring the diversity of the movement direction of the carrier 2 relative to the second drive motor 42.

[0059] like Figure 1-Figure 4 As shown, in some embodiments, the vertical drive mechanism 3 is decoupled from the horizontal drive mechanism 4 by the third hinge 46. By providing the third hinge 46 to decouple the vertical drive mechanism 3 and the horizontal drive mechanism 4, the vertical drive mechanism 3 and the horizontal drive mechanism 4 form two independent motion systems, and the vertical lifting of the carrier plate will not affect the normal operation of the horizontal drive mechanism, thereby improving the motion accuracy and stability.

[0060] In some embodiments, the six-degree-of-freedom motion platform further includes a position feedback device, which is used to monitor the displacement distances of the three groups of vertical drive mechanisms 3 and the three groups of horizontal drive mechanisms 4. By providing a position feedback device, the displacement distances of the three groups of vertical drive mechanisms 3 and the three groups of horizontal drive mechanisms 4 can be monitored respectively and precise displacement control can be achieved, thereby achieving precise adjustment of the carrier 2.

[0061] Please refer to Figure 1-Figure 4 , the specific working process of the above-mentioned six-degree-of-freedom motion platform will be described below:

[0062] During the operation of the vertical drive mechanism 3, the first drive motor 33 moves to generate thrust, and the moving power is controlled by the position feedback device, so that the third hinge 46 near the carrier 2 in the push rod 43 connected to the carrier 2 bends and moves, and then the carrier 2 moves in the vertical direction. When the three vertical drive mechanisms 3 are displaced, the carrier 2 produces three motion results: lifting, pitching, and lifting and pitching. Since the third hinge 46 in the push rod 43 is a hinge that can decouple the vertical direction, the vertical lifting of the carrier 2 will not affect the normal operation of the horizontal drive mechanism 4.

[0063] When the horizontal drive mechanism 4 is working, the second drive motor 42 moves to generate thrust, and the moving distance is controlled by the position feedback device. In the push rod 43 connected thereto, the first hinge 44 and the second hinge 45 close to the second guide rail 41 bend and move, and then the carrier 2 moves in the horizontal direction. By controlling the position movement of a single second drive motor 42 and performing matrix conversion, the carrier 2 can be translated and rotated in the horizontal direction. When the three groups of the horizontal drive mechanisms 4 are displaced, the carrier 2 produces three motion results: displacement, rotation, and displacement combined with rotation.

[0064] It should be noted that the above embodiments are all implementation processes of setting three groups of the vertical drive mechanisms 3 and three groups of the horizontal drive mechanisms 4. In other embodiments, the number of vertical drive mechanisms 3 and horizontal drive mechanisms 4 is not limited to this case, and their number can be set according to the shape of the carrier 2, such as four groups, five groups, or other numbers.

[0065] In summary, compared with the prior art, the present application has at least the following effects:

[0066] The structure of the present application is more compact: because the driving devices are distributed around the moving carrier, the cavity between the moving carrier and the base is significantly reduced. At the same time, only one layer of structure can meet the movement in six directions, avoiding multi-layer stacking, reducing the space occupied, and improving the compactness of integration.

[0067] The present application has a greater moving distance: through the support and drive of the horizontal drive assembly, the carrier can achieve mm / cm level movement and large-angle rotation in the horizontal direction; the ball-and-socket or hinge connection between the support pad and the support link allows the carrier to meet large-angle tilt or pitch; through the decoupling hinge of the vertical drive assembly and the horizontal push rod, the carrier can achieve mm level movement; the moving range in six degrees of freedom meets the requirements of integrated circuits, biological detection, focusing and equalization and other processes.

[0068] The solution of the present invention has higher motion resolution: for example, using a lead screw drive in combination with a rotary encoder can achieve micron-level motion resolution; using a voice coil motor drive in combination with optical measurement can achieve hundreds of nanometer-level motion resolution; using a piezoelectric ceramic motor for driving can achieve nanometer-level motion resolution.

[0069] The same or similar parts of the various embodiments in this specification can be referred to each other, and each embodiment focuses on the differences from other embodiments. In particular, for the method embodiment described later, since it corresponds to the system, the description is relatively simple, and the relevant parts can be referred to the partial description of the system embodiment.

[0070] The above is only a specific implementation of the present application, but the protection scope of the present application is not limited thereto. Any changes or substitutions that can be easily thought of by a person skilled in the art within the technical scope disclosed in the present application should be included in the protection scope of the present application. Therefore, the protection scope of the present application shall be based on the protection scope of the claims.

Claims

1. A six-degree-of-freedom motion platform, comprising a base and a carrier, characterized in that: Also includes: A plurality of sets of vertical driving mechanisms are respectively arranged on the surface of the base close to the carrier and connected to a plurality of different first side surfaces of the carrier to drive the carrier to perform lifting and / or pitching motion relative to the base; A plurality of sets of horizontal driving mechanisms are respectively arranged on the surface of the base close to the carrier and connected to a plurality of different second side surfaces of the carrier to drive the carrier to perform displacement and / or rotational movement relative to the base; in The multiple groups of horizontal driving mechanisms are respectively arranged at intervals from the multiple groups of vertical driving mechanisms.

2. The six-degree-of-freedom motion platform according to claim 1, characterized in that: The vertical driving mechanism comprises: A support pad is disposed on a surface of the base close to the carrier plate; A vertical drive assembly connected to the first side surface of the carrier; A supporting connecting rod is used to connect the supporting pad and the vertical driving assembly; wherein The support link is rotatably connected to the support pad, and the support link is fixedly connected to the vertical drive assembly.

3. The six-degree-of-freedom motion platform according to claim 2, characterized in that: The vertical drive assembly comprises: A first guide rail connected to the first side surface of the carrier plate; a first drive motor connected to the supporting link and movably connected to the first guide rail, and capable of being displaced along the length direction of the first guide rail; The first monitor is built into the vertical drive assembly to monitor the displacement distance of the first drive motor relative to the first guide rail.

4. The six-degree-of-freedom motion platform according to claim 2, characterized in that: The connection modes between the support pad and the base include air film connection, oil film connection, and electromagnetic connection.

5. The six-degree-of-freedom motion platform according to claim 2, characterized in that: The connection modes between the support link and the support pad include ball-and-socket connection, hinge connection, and universal joint connection.

6. The six-degree-of-freedom motion platform according to claim 1, characterized in that: The horizontal driving mechanism comprises: A horizontal driving assembly is disposed on a surface of the base close to the carrier plate; A push rod connected to the horizontal drive assembly; A hinge is used to connect the push rod and the second side surface of the carrier; wherein The horizontal driving assembly can drive the push rod to generate displacement, and under the action of the hinge, the carrier plate is caused to perform displacement and / or rotational movement.

7. The six-degree-of-freedom motion platform according to claim 6, characterized in that: The horizontal drive assembly comprises: A second guide rail is disposed on a surface of the base close to the carrier plate; a second driving motor connected to the push rod and movably connected to the second guide rail, and capable of moving along the length direction of the second guide rail; The second monitor is built into the horizontal drive assembly to monitor the displacement distance of the second drive motor relative to the second guide rail.

8. The six-degree-of-freedom motion platform according to claim 6, characterized in that: The push rod comprises a first push rod and a second push rod; The hinge includes a first hinge, a second hinge, and a third hinge; in The first push rod is connected to the second driving motor, the first hinge connects the first push rod and the second push rod, the second hinge connects the second push rod and the third hinge, and the third hinge connects the second hinge and the second side surface of the carrier.

9. The six-degree-of-freedom motion platform according to claim 8, characterized in that: The vertical driving mechanism and the horizontal driving mechanism are decoupled by the third hinge.

10. The six-degree-of-freedom motion platform according to claim 6, characterized in that: The hinge adopts a Hooke hinge and / or a ball hinge.

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