Supply and recovery integrated equipment for thin film frame IC (integrated circuit) products

Abstract

The invention provides film frame IC product supply and recovery integrated equipment which comprises a frame body, two partitioned containing cavities are formed in the frame body, a plurality of opening and closing drawers are arranged in the two containing cavities, and bearing clips used for loading to-be-tested film frame IC products are placed in the opening and closing drawers respectively; a grabbing device capable of moving in a lifting mode is arranged in the containing cavity located on the supply side, and the grabbing device is used for grabbing the thin film frame IC products to be tested loaded into the loading cartridge holder on the supply side. A pushing device capable of moving in a lifting mode is arranged in the containing cavity located on the recycling side, the thin film frame IC product to be tested located above the frame body is picked up to the pushing device, the pushing device is controlled to execute pushing action, and the pushing device is used for pushing the thin film frame IC product to be tested into a bearing clip loaded on the recycling side. According to the integrated equipment, products can be supplied and recycled in a circulating and reciprocating mode, it is ensured that a machine table continuously operates, and the operation efficiency of the machine table is greatly improved.

Description

Technical Field

[0001] The present application belongs to the field of wafer product processing technology, and in particular, relates to a thin film frame IC product supply and recovery integrated equipment. Background Art

[0002] In the process of processing and manufacturing wafer ring products, film frame IC products (wafer ring products) are intermediate products in one link of the semiconductor packaging manufacturing process. IC products need to be supplied and recycled for testing and marking in the test mark sorting machine in the next process.

[0003] At present, when the existing IC product processing equipment performs supply recovery operations, it is necessary to shut down the entire machine in different areas, which makes it impossible for the IC product supply recovery process to circulate back and forth. This leads to problems such as complicated production processes, high labor intensity for operators, and low machine operation efficiency. Ultimately, the product supply of the test mark sorting machine in the subsequent process will not be timely, and the entire production process will be seriously delayed. Summary of the invention

[0004] In view of this, the present application aims to propose an integrated supply and recovery device for thin-film frame IC products, so as to solve the problems that the existing IC product processing equipment needs to shut down the whole machine in different areas when performing supply and recovery operations, and the IC product supply and recovery process cannot be operated reciprocally, resulting in complicated production processes, high labor intensity for operators, and low machine operation efficiency.

[0005] To achieve the above purpose, the technical solution of this application is implemented as follows:

[0006] The present application provides a thin film frame IC product supply and recovery integrated device, comprising:

[0007] A frame body, wherein two compartments are provided in the frame body, wherein one compartment is a supply side, and the other compartment is a recovery side;

[0008] A plurality of openable and closable drawers are arranged in each of the two accommodating chambers, and a loading clip for loading the film frame IC product to be tested is placed in the openable and closable drawers;

[0009] A lifting and moving grabbing device is installed in the accommodating chamber located on the supply side, and the grabbing device is used to grab the film frame IC product to be tested loaded into the supply side loading clip, and control the grabbing device to rise, so as to lift the film frame IC product to be tested to the top of the frame body;

[0010] A lifting and moving pushing device is installed in the accommodating chamber located on the recovery side. The film frame IC product to be tested located above the frame main body) is picked up by an external picking robot and placed on the pushing device. The pushing device) is controlled to descend and the pushing device is manipulated to perform a pushing action, so as to push the film frame IC product to be tested into the receiving clip loaded on the recovery side.

[0011] Furthermore, an opening communicating with the accommodating chamber is provided at the top of the frame body, so that the grabbing device and the pushing device pass through the opening and rise to the top of the frame body;

[0012] A space is reserved between the two accommodating chambers, and linear guide mechanisms are installed on the inner walls on both sides of the accommodating chamber. The opening and closing drawer is slidably arranged on the linear guide mechanisms. A power output mechanism for providing opening and closing power for the opening and closing drawer is installed on the outer wall on one side of the accommodating chamber.

[0013] Furthermore, the linear guide mechanism is connected to the side panel of the opening and closing drawer, and a sliding bracket with an elastic structure is slidably provided on the side panel. The sliding bracket is fixedly connected to the front panel of the opening and closing drawer for adapting to magazines of different sizes.

[0014] Furthermore, a storage drawer is also installed in the supply side accommodating chamber, and the storage drawer is located below the bottom opening and closing drawer;

[0015] A recovery drawer is also arranged in the recovery side accommodating chamber, and a locking mechanism for locking the position of the recovery drawer is arranged on an outer wall of the recovery side accommodating chamber. The recovery drawer is used to recover unqualified products after testing.

[0016] Furthermore, a safety door device is provided between two adjacent opening and closing drawers in the same accommodating chamber.

[0017] Furthermore, a power lifting device is installed in each of the supply side accommodating chamber and the recovery side accommodating chamber, and the grabbing device is arranged on a movable tray of the supply side power lifting device;

[0018] The grabbing device comprises a first bracket, a first driving mechanism, a first linear guide rail and a grabbing mechanism, wherein the first bracket is arranged on the moving tray, a first fixture platform for lifting the film frame IC product to be tested is formed on the first bracket, the first driving mechanism and the first linear guide rail are both arranged on the moving tray, the moving part of the first linear guide rail is connected to the transmission part of the first driving mechanism, and the grabbing mechanism is arranged on the moving part of the first linear guide rail;

[0019] The first driving mechanism is controlled to move, and the transmission part of the first driving mechanism drives the moving part of the first linear guide to perform linear motion, so that the grasping mechanism performs a grasping action on the film frame of the film frame IC product to be tested, and then grasps the film frame IC product to be tested loaded in the receiving clip onto the first fixture platform.

[0020] Furthermore, the first bracket includes two first lifting units that are symmetrically arranged, and the first linear guide rail is located between the two first lifting units;

[0021] The first lifting unit includes a first support frame and a first support plate arranged on the first support frame. A first guide bar is arranged on an edge of the first support plate away from the first linear guide rail. The two first guide bars are used to guide the film frame. A second limit block is also installed on the first guide bar to limit the film frame.

[0022] Furthermore, the pushing device is arranged on a movable tray of the power lifting device on the recovery side;

[0023] The pushing device includes a second bracket, a second driving mechanism, a second linear guide rail and a pushing mechanism, the second bracket is arranged on the mobile tray, a second fixture platform for lifting the film frame IC product to be tested is formed on the second bracket, the second driving mechanism and the second linear guide rail are both arranged on the mobile tray, the moving part of the second linear guide rail is connected to the transmission part of the second driving mechanism, and the grabbing mechanism is arranged on the moving part of the second linear guide rail;

[0024] The second driving mechanism is controlled to move, and the transmission part of the second driving mechanism drives the moving part of the second linear guide rail to perform linear motion, so that the pushing mechanism performs a pushing action on the film frame of the film frame IC product to be tested, and then pushes the film frame IC product placed on the second fixture platform into the receiving clip.

[0025] Furthermore, the second bracket includes two second lifting units that are symmetrically arranged, and the second linear guide rail is located between the two second lifting units;

[0026] The second lifting unit includes a second support frame and a second support plate arranged on the second support frame. A second guide bar is arranged on an edge of one side of the second support plate away from the second linear guide rail. The two second guide bars are used to guide the film frame.

[0027] Furthermore, a fixed plate is provided on the movable tray, and a first detection sensor for detecting whether a product exists is installed on the fixed plate;

[0028] The movable tray is also provided with a fixed bracket, and the fixed bracket is equipped with a second detection sensor for detecting whether the product is accurately in place.

[0029] Compared with the prior art, the film frame IC product supply and recovery integrated device described in this application has the following beneficial effects:

[0030] The present application describes an integrated device for supplying and recycling thin-film frame IC products, which is divided into a recycling side and a grasping side. Based on the cooperation of a power lifting device, a grasping device on the grasping side and a pushing device on the recycling side, the device can safely, stably and efficiently split the products in the loading magazines and send them into empty loading magazines for sorting. At the same time, the drawers can be opened and closed automatically, and the recycled products can be supplied repeatedly to ensure the continuous and uninterrupted operation of the machine, which greatly improves the operation efficiency of the machine. Moreover, the device is highly integrated, occupies a smaller area than existing equipment, and has a higher space utilization rate. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] The drawings constituting a part of the present application are used to provide a further understanding of the present application. The illustrative embodiments and descriptions of the present application are used to explain the present application and do not constitute an improper limitation on the present application. In the drawings:

[0032] Figure 1 This is a schematic diagram of the structure of a thin film frame IC product supply and recovery integrated device from a first angle according to an embodiment of the present application;

[0033] Figure 2 This is a second angle structural diagram of a film frame IC product supply and recovery integrated device according to an embodiment of the present application;

[0034] Figure 3 This is a front view of a film frame IC product supply and recovery integrated device according to an embodiment of the present application;

[0035] Figure 4 This is a schematic diagram of the main structure of the framework described in the embodiment of the present application;

[0036] Figure 5 This is a schematic diagram of the internal structure of a thin film frame IC product supply and recovery integrated device according to an embodiment of the present application;

[0037] Figure 6 This is a schematic diagram of the structure of opening and closing drawers and containing magazines according to an embodiment of the present application;

[0038] Figure 7 This is a schematic diagram of the second angle structure of the opening and closing drawer according to the embodiment of the present application;

[0039] Figure 8 This is a schematic diagram of the second angle structure of the opening and closing drawer according to the embodiment of the present application;

[0040] Fig. 9 This is a schematic diagram of the recycling drawer structure described in an embodiment of the present application;

[0041] Fig.10 This is a schematic diagram of the structure of the grabbing device and the power lifting device described in the embodiment of the present application;

[0042] Fig.11 This is a schematic diagram of the structure of the pushing device and the power lifting device described in the embodiment of the present application;

[0043] Fig.12 This is a schematic diagram of the structure of the grabbing device described in an embodiment of the present application;

[0044] Fig.13 This is a schematic diagram of the structure of the pushing device described in the embodiment of the present application;

[0045] Fig.14 This is a schematic diagram of the first bracket structure described in an embodiment of the present application;

[0046] Fig.15 This is a schematic diagram of the second bracket structure described in an embodiment of the present application.

[0047] Description of reference numerals:

[0048] 1. Frame body; 101. Opening; 102. Through slot; 103. Through slot hole; 104. Limiting unit; 2. Opening and closing drawer; 201. First limiting plate; 202. Locking bolt; 203. Second limiting plate; 204. First limiting block; 3. Grasping device; 301. First bracket; 3001. First support frame; 3002. First support plate; 3003. First guide strip; 3004. Second limiting block; 3005. Limiting column; 302. First driving mechanism; 303. First linear guide rail; 304. Grasping mechanism; 3041. Clamping claw base plate; 3042. Clamping claw cylinder; 3043. First clamping claw; 3044. Second clamping claw; 4. Pushing device; 401. Second bracket; 4001. Second support frame; 4002. Second support plate; 4003. Second Guide bar; 402, second drive mechanism; 403, second linear guide rail; 404, push mechanism; 4041, push base plate; 4042, push rod; 5, magazine holder; 6, film frame; 7, linear guide mechanism; 8, power output mechanism; 9, sliding bracket; 901, strip-shaped embedded slot; 902, bearing follower; 903, connecting ring; 904, tension spring; 10, storage drawer; 11, recycling drawer; 1101, notch; 12, locking mechanism; 1201, fixing plate; 1202, rotary locking cylinder; 1203, locking block; 13, safety partition door device; 1301, partition door panel; 1302, mounting bracket; 1303, sliding wheel; 14, power lifting device; 1401, moving tray; 15, first detection sensor; 16, second detection sensor. DETAILED DESCRIPTION

[0049] In order to make the objectives, technical solutions and advantages of the present application more clearly understood, the present application is further described in detail below in combination with specific embodiments and with reference to the accompanying drawings.

[0050] It should be noted that, unless otherwise defined, the technical terms or scientific terms used in the embodiments of the present application should be the usual meanings understood by people with ordinary skills in the field to which the present application belongs. The "first", "second" and similar words used in the embodiments of the present application do not represent any order, quantity or importance, but are only used to distinguish different components. "Including" or "comprising" and similar words mean that the elements or objects appearing in front of the word cover the elements or objects listed after the word and their equivalents, without excluding other elements or objects. "Connect" or "connected" and similar words are not limited to physical or mechanical connections, but can include electrical connections, whether direct or indirect. "Up", "down", "left", "right" and the like are only used to indicate relative positional relationships. When the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0051] See also Figures 1 to 3 As shown, this embodiment provides a film frame IC product supply and recovery integrated device, including:

[0052] The frame body 1 has two compartments, one compartment is a supply side, and the other compartment is a recovery side.

[0053] Multiple open and close drawers 2 are arranged in the two accommodating chambers, and the open and close drawers 2 contain loading clips 5 for loading the film frame IC products to be tested;

[0054] A lifting and moving grabbing device 3 is installed in the accommodating chamber on the supply side. The grabbing device 3 is used to grab the film frame IC product to be tested loaded into the supply side loading clip 5, and control the grabbing device 3 to rise, so as to lift the film frame IC product to be tested to the top of the frame body 1;

[0055] A lifting and moving pushing device 4 is installed in the accommodating chamber located on the recovery side. The film frame IC product to be tested located above the frame body 1 is picked up by an external picking robot and placed on the pushing device. The pushing device 4 is controlled to descend and manipulated to perform a pushing action, so as to push the film frame IC product to be tested into the receiving clip 5 loaded on the recovery side.

[0056] Specifically, in this embodiment, the film frame IC product is an intermediate product of one link in the semiconductor packaging manufacturing process. Based on the equipment, the supply and recovery of IC products to the test mark sorting machine in the next process can be realized, and the testing and marking of the products can be effectively completed, and then enter the next process, which can be used for the processing and manufacturing of 8-inch and 12-inch wafer ring products.

[0057] The frame body 1 provided in the present application is provided with two independent accommodating chambers, one of which is used as a supply side, and the other is used as a recovery side. Multiple opening and closing drawers 2 are arranged and slidably arranged in the two accommodating chambers, and the receiving clip 5 loaded with the film frame IC product to be tested is placed in the receiving clip 5 (the receiving clip 5 is provided with a bottom support at the bottom, and multiple empty spaces for storing the film frame IC product to be tested (that is, a wafer ring product formed by encapsulating a plurality of chips above the film frame) are horizontally arranged on the inner side). The present application does not involve the structural setting of the receiving clip 5, and no further details will be given here.

[0058] To be more specific, on the supply side: a corresponding number of leadless device IC products on the film frame to be tested are placed in the receiving clip 5, and the IC products in the receiving clip 5 are grabbed by the grabbing device 3 installed in the chamber. After the leadless device IC on the film frame to be tested is taken and delivered, the next process of testing and marking is carried out, and the opening and closing drawer 2 on the supply side will be automatically opened, and the operator will be prompted to take out the empty receiving clip 5, and load the receiving clip 5 loaded with the IC products to be tested.

[0059] Recycling side: The IC products that have been tested and marked are recycled into the empty receiving clip 5. When the receiving clip 5 is fully loaded, the opening and closing drawer 2 on the recycling side will automatically open, prompting the operator to take out the fully loaded receiving clip 5 and place the empty receiving clip 5 into the containing chamber on the recycling side.

[0060] In addition, it should be noted that the present embodiment only provides a technical solution for the structure of the integrated device. The control system provided inside the device can realize the coordinated control of various mechanism components to complete the supply and recovery operations of IC products. The control system is not within the scope of protection of the present application and will not be elaborated on here.

[0061] The integrated equipment described in the present application can realize automatic opening and closing of drawers through the coordinated arrangement of various device components, and can realize the cyclical supply of recycled products, thereby ensuring the continuous and uninterrupted operation of the machine, greatly improving the operating efficiency of the machine; moreover, the equipment is highly integrated, occupies a smaller area than existing equipment, and has a higher space utilization rate.

[0062] In some embodiments, Figures 4 to 5 As shown, an opening 101 communicating with the accommodating chamber is provided at the top of the frame body 1, so that the grasping device 3 and the pushing device 4 pass through the opening 101 and rise to the top of the frame body 1;

[0063] A gap is reserved between the two accommodating chambers. Linear guide mechanisms 7 are installed on the inner walls of both sides of the accommodating chambers. The opening and closing drawer 2 is slidably arranged on the linear guide mechanisms 7. A power output mechanism 8 for providing opening and closing power for the opening and closing drawer 2 is installed on one outer wall of the accommodating chamber.

[0064] The linear guide mechanism 7 is connected to the side panel of the opening and closing drawer 2, and a sliding bracket 9 with an elastic structure is also slidably arranged on the side panel. The sliding bracket 9 is fixedly connected to the front panel of the opening and closing drawer 2 for adapting to magazines 5 of different sizes.

[0065] Specifically, in this embodiment, two openings 101 connected to the accommodating chamber are opened at the top of the frame body 1 to provide space for the grasping device 3 and the pushing device 4 to perform up and down lifting, thereby realizing the transfer operation of the IC product from inside the chamber to outside the chamber and from outside the chamber to inside the chamber, thereby completing the supply and recovery of the IC product.

[0066] like Figures 6 to 8 As shown, the opening and closing drawer 2 includes a front panel, a bottom panel, and two side panels connected to the bottom panel, the two side panels are respectively connected to the sliding parts of the linear guide mechanism 7 arranged on the inner wall of the accommodating chamber, and the bottom panel is provided with a limiting member for limiting the position of the loaded magazine 5, the limiting member includes two first limiting plates 201, and locking bolts 202 arranged on the first limiting plates 201, and the two first limiting plates 201 are located at a diagonal position on one side close to the front panel;

[0067] It should be noted that the linear guide mechanism 7 adopted in this embodiment adopts a linear guide rail with a slide rail structure, which can also be replaced by a shaft + bearing, V-rail, etc., as long as it can achieve linear and stable guidance, which will not be further elaborated here.

[0068] A second limiting plate 203 and a first limiting block 204 are respectively provided at one end of the bottom plate away from the front panel, and a gap is reserved between the second limiting plate 203 and the first limiting block 204. The two first limiting plates 201 and the locking bolts 202 cooperate with the second limiting plate 203 and the first limiting block 204 to form a limiting space for limiting the magazine 5.

[0069] A strip-shaped through slot 102 is provided on the side panel of the frame body 1, and a connecting bracket is provided at the movable end of the power output mechanism 8. The connecting bracket passes through the through slot 102 and is fixedly connected to the side panel. There are two sliding brackets 9, and the two sliding brackets 9 are respectively located on the outer sides of the two side panels. The two sliding brackets 9 are fixedly connected by a reinforcing plate, and the front panel of the opening and closing drawer 2 is fixed on the two sliding brackets 9.

[0070] It should be noted that the power output mechanism 8 used in this embodiment can adopt the current pneumatic method, or can use linear power output such as motor belt drive or motor screw. As long as the linear power output within the stroke requirement can meet the device requirements, no further details will be given here.

[0071] like Figures 5 to 8 As shown, the sliding bracket 9 is provided with a plurality of strip-shaped embedding slots 901 arranged at intervals, and a bearing follower 902 is installed on the side plate. The bearing follower 902 is correspondingly arranged in the strip-shaped embedding slot 901, and the side plate slides along the strip-shaped embedding slot 901 through the bearing follower 902. A connecting ring 903 is respectively provided on the sliding bracket 9 and the side plate, and a tension spring 904 is installed between the two connecting rings 903.

[0072] A bearing follower 902 and a tension spring 904 are arranged between the side panel of the opening and closing drawer 2 and the sliding bracket 9. The drawer sliding bracket 9 is connected to the side panel with an elastic structure design. If a non-standard size of the magazine 5 is encountered, the elastic structure design can effectively accommodate magazines 5 of different sizes to ensure the normal operation of the machine.

[0073] like Figure 5 As shown, a limit unit 104 is installed on the inner wall of the frame body 1. The limit unit 104 is used to limit the tail end of the side panel of the drawer when opening and closing. The limit unit 104 includes a mounting part and a buffer arranged on the mounting part. The mounting part is fixed on the inner wall of the frame body 1. The limit unit 104 is set to open and close the drawer 2. When the tail end collides with the buffer, it is decelerated and limited.

[0074] In addition, two symmetrically arranged guide wheels are installed on the inner wall of the side panel corresponding to each opening and closing drawer 2 to ensure the stability of the movement of the automatic opening and closing drawer 2 on the supply and recovery side.

[0075] It should be noted that in the present application, a notch is reserved on the bottom plate of the opening and closing drawer 2, and a through-beam sensor is installed in each accommodating chamber, which can irradiate through the notch. The through-beam sensor set in the present application can detect whether the product has slipped out of the magazine to avoid damage to the product during subsequent mechanism movement. A through-beam sensor is also installed on the side wall of each accommodating chamber to confirm whether there is a magazine 5 in the corresponding opening and closing drawer 2 to ensure the effectiveness of the subsequent corresponding mechanism action.

[0076] In some embodiments, Figure 1 , Figure 3 and Fig. 9 As shown, a storage drawer 10 is also installed in the supply side accommodating chamber, and the storage drawer 10 is located below the bottom opening and closing drawer 2;

[0077] A recovery drawer 11 is also installed in the recovery side accommodating chamber. A locking mechanism 12 for locking the recovery drawer 11 is installed on an outer wall of the recovery side accommodating chamber. The recovery drawer 11 is used to recover unqualified products after testing.

[0078] Specifically, in the present embodiment, the storage drawer 10 and the recovery drawer 11 are slidably matched with the linear guide mechanism 7 provided on the inner wall of the frame body 1, and the storage drawer 10 and the recovery drawer 11 are manually opened and closed. Furthermore, a manually opened and closed storage drawer 10 is installed in the accommodating chamber on the supply side, and the storage drawer 10 is located below the bottom opening and closing drawer 2. Customer documents can be placed in the storage drawer 10. A baffle is provided at the end of the bottom plate of the storage drawer 10, and grooves reserved for the corresponding radiation sensor are provided on the bottom plate and the baffle. A handle is provided on the front panel of the storage drawer 10.

[0079] A recovery drawer 11 is arranged in the accommodating chamber on the recovery side. The recovery drawer 11 is similar in appearance and structure to the storage drawer 10. The difference from the storage drawer 10 is that a limiting member for limiting the position of the magazine 5 is arranged on the side of the bottom plate close to the front panel. The limiting member has the same structure as the limiting member installed on the opening and closing drawer 2, and will not be repeated here.

[0080] At the same time, similar to the opening and closing drawer 2, in the recovery drawer 11, a limit plate and a limit block are respectively arranged at one end of the bottom plate away from the front panel, and a gap is reserved between the limit plate and the limit block. The two limit plates, the locking bolts, the limit plate and the limit block cooperate to form a limit space for limiting the position of the magazine 5. The recovery drawer 11 is used to recover unqualified products after testing.

[0081] For the recovery side, a through slot 103 is provided on one side plate of the frame body 1, and the locking mechanism 12 includes a fixed plate 1201 and a rotary locking cylinder 1202 installed on the fixed plate 1201, the fixed plate 1201 is fixed on the outer wall of the frame body 1, and the rotary locking cylinder 1202 is located in the through slot 103;

[0082] A notch 1101 is provided on the side panel of the recovery drawer 11 , and a locking block 1203 is provided at the action end of the rotary locking cylinder 1202 . The locking block 1203 can be rotated to the notch 1101 to lock the recovery drawer 11 in position.

[0083] In some embodiments, Figure 5 and Figure 6 As shown, a safety door device 13 is further provided between two adjacent opening and closing drawers 2 in the same accommodating chamber.

[0084] Specifically, in this embodiment, the safety partition door device 13 is located above the opening and closing drawer 2, and the safety partition door device 13 includes a partition door panel 1301. The partition door panel 1301 has connecting parts extending outward on both sides of one end. The two connecting parts are connected to the mounting bracket 1302 arranged thereunder. The mounting bracket 1302 is fixed to the inner wall of the frame body 1 by a locking bolt 202. The inner walls of the mounting brackets 1302 on both sides are respectively equipped with sliding wheels 1303, and the sliding wheels 1303 are located above the side panels.

[0085] The present application installs a safety door device 13 above each opening and closing drawer 2. The device uses gravity characteristics to automatically open and close as the opening and closing drawer 2 opens and closes, ensuring safety when taking out and placing the magazine 5.

[0086] When the IC product without lead devices on the film frame to be tested is taken and delivered, the receiving drawer on the supply side will be automatically opened, prompting the operator to take out the empty magazine and load the receiving magazine 5 loaded with the IC product to be tested. At this time, the safety partition door device 13 on the supply side is closed to avoid manual loading, which may cause safety hazards when the hand goes deep into the equipment. When the opening and closing drawer 2 on the supply side is closed, the safety partition door is opened synchronously to improve the safety of the equipment.

[0087] The IC products that have been tested and marked are recycled into the empty loading clip 5. When the loading clip 5 is fully loaded, the opening and closing drawer 2 on the recycling side will automatically open. At this time, the safety partition door device 13 on the recycling side is closed to prevent hands from reaching into the equipment when manually loading the clip, causing safety hazards. When the opening and closing drawer 2 on the recycling side is closed, the safety partition door is opened synchronously to improve the safety of the equipment, prompting the operator to take out the fully loaded loading clip 5 and put the empty loading clip 5 into the opening and closing drawer 2 on the recycling side.

[0088] In some embodiments, Figures 1 to 4 ,and Fig.10 , Fig.11 As shown, a power lifting device 14 is installed in each of the supply side accommodating chamber and the recovery side accommodating chamber, and the grabbing device 3 is arranged on a moving tray 1401 of the supply side power lifting device 14;

[0089] The gripping device 3 includes a first bracket 301, a first driving mechanism 302, a first linear guide rail 303 and a gripping mechanism 304. The first bracket 301 is arranged on the mobile tray 1401. A first fixture platform 6 for lifting the film frame IC product to be tested is formed on the first bracket 301. The first driving mechanism 302 and the first linear guide rail 303 are both arranged on the mobile tray 1401. The gripping mechanism 304 is arranged on the moving part of the first linear guide rail 303 and is connected to the transmission part of the first driving mechanism 302.

[0090] The first driving mechanism 302 is controlled to move, and the transmission part of the first driving mechanism 302 drives the grasping mechanism 304 to make a linear motion on the first linear guide rail 303, so that the grasping mechanism 304 performs a grasping action on the film frame 6 of the film frame IC product to be tested, and then grasps the film frame IC product to be tested loaded in the receiving clip onto the first fixture platform.

[0091] Specifically, in this embodiment, the power lifting device 14 arranged in the Z direction drives the grasping device 3 which can reciprocate along the Y direction, so that the leadless device IC products on the film frame to be tested loaded in the carrying clip on the supply side of the equipment can be grasped and placed on the first fixture platform in turn, so as to be convenient for the subsequent picking and delivering mechanism to take them away.

[0092] Further, the power lifting device 14 described in the present application adopts a lifting method that cooperates with a motor, a pulley, a belt, and a screw module. It can also be implemented by directly connecting the motor module + a guide rail, or a linear motor + a guide rail platform. Furthermore, the power lifting device 14 of the present application is composed of a power source motor, a pulley, a belt, a driven wheel, and a screw module. The power source motor drives the Z-axis moving tray 1401 to move in the Z direction through the pulley, the belt, the driven wheel, and the screw module, and then drives the Y-axis grasping device 3 to move up and down, wherein the moving tray 1401 is fixedly set on the moving part of the screw module, and the moving tray 1401 includes a substrate bracket and a support plate arranged on the substrate bracket, and the grasping device 3 is installed on the support plate.

[0093] The power lifting device 14 in this embodiment can enable the grabbing device 3 that reciprocates along the Y direction to achieve reciprocating motion at a specified position in the Z direction. The power lifting device 14 can stay at any position within the specified range. When clips of different specifications and sizes are used, they can be set at will according to needs, which greatly improves compatibility, flexibility and efficiency.

[0094] In the present application, the grabbing device 3 that reciprocates along the Y direction is driven by a motor to grab the products to be tested in the supply-side magazine 5 one by one to the designated position, so as to facilitate the picking and delivering device of the machine to grab the products.

[0095] Specifically, if Fig.12 As shown, a guide rail substrate is provided on the support plate of the power lifting device 14, on which a guide rail is provided, a clamping jaw substrate 3041 is connected to the movable support of the guide rail, on which a clamping jaw cylinder 3042 is provided, and the action end of the clamping jaw cylinder 3042 is provided with a matching first clamping jaw 3043 and a second clamping jaw 3044, and the opening and closing of the upper and lower clamping jaws are controlled by the clamping jaw cylinder 3042 to grasp the edge portion of the film frame 6; one side of the clamping jaw substrate 3041 is connected to the belt of the Y-direction power source placed on the support plate through a belt pressure plate, and the Y-direction power source is composed of a motor, a motor bracket, a tensioning bolt, a tensioning bracket, a pulley, a belt, a driven wheel, a driven wheel bracket, and a driven wheel shaft, which drives the upper and lower clamping jaws to realize reciprocating motion along the Y direction.

[0096] It should be noted that the clamping jaws in the reciprocating grasping device 3 along the Y direction can adopt the current clamping jaws and clamping jaw cylinder 3042 method, or can be realized by an opening and closing mechanism powered by an ordinary cylinder or a motor, as long as the clamping jaws can perform the grasping action, which will not be further elaborated here.

[0097] In some embodiments, Fig.14 As shown, the first bracket 301 includes two first lifting units which are symmetrically arranged, and the first linear guide rail 303 is located between the two first lifting units;

[0098] The first lifting unit includes a first support frame 3001 and a first support plate 3002 arranged on the first support frame 3001. A first guide bar 3003 is arranged on the edge of the first support plate 3002 away from the first linear guide rail 303. The two first guide bars 3003 are used to guide the film frame 6. The first guide bar 3003 is also provided with a second limit block 3004 for limiting the film frame 6.

[0099] Specifically, in this embodiment, two symmetrical first lifting units are arranged at intervals, wherein the first lifting unit is composed of a first support frame 3001, a first support plate 3002, and a first guide bar 3003. The first support plate 3002 is arranged on the first support frame 3001, and the first guide bar 3003 is arranged at the edge of the first support plate 3002. The inner wall of the first guide bar 3003 is provided with a groove. The grooves provided on the two first guide bars 3003 form a placement space for placing the film frame 6. The two first guide bars 3003 are provided with a groove. A notch is also provided on the top end face, and a second limit block 3004 is arranged at the notch by a fastening bolt. A gap is reserved between the limit block and the notch for the film frame 6 to pass through. In addition, in order to better limit the film frame 6, limit columns 3005 are provided at the edge of one end of the two first support plates 3002 close to the power lifting device 14. The two limit columns 3005 (pins) correspond to the two notches provided on the film frame 6 to accurately locate the position of the film frame 6, so that the film frame IC product placed on the first bracket 301 is more stable.

[0100] The end of the two first guide bars 3003 that first contacts the film frame 6 is the guide end, which is tilted outward relative to the first support plate 3002 and forms an inclined angle with other parts of the guide plate. By tilting the guide ends of the two first guide bars 3003 outward relative to the first support plate 3002, it is convenient for the film frame IC product discharged from the loading clip 5 to pass accurately along the guide space left between the two first guide bars 3003, thereby achieving the effect of smoothly entering the first bracket 301.

[0101] In some embodiments, Fig.13 As shown, the pushing device 4 is arranged on the moving tray 1401 of the power lifting device 14 on the recovery side;

[0102] The pushing device 4 includes a second bracket 401, a second driving mechanism 402, a second linear guide rail 403 and a pushing mechanism 404. The second bracket 401 is arranged on the moving tray 1401. A second fixture platform for lifting the film frame IC product is formed on the second bracket 401. The second driving mechanism 402 and the second linear guide rail 403 are both arranged on the moving tray 1401. The grabbing mechanism 304 is arranged on the moving part of the second linear guide rail 403 and is connected to the transmission part of the second driving mechanism 402.

[0103] The second driving mechanism 402 is controlled to move, and the transmission part of the second driving mechanism 402 drives the grasping mechanism 304 to move linearly along the second linear guide rail 403, so that the pushing mechanism 404 performs a pushing action on the film frame 6, and then pushes the film frame IC product placed on the second fixture platform into the receiving clip 5.

[0104] Specifically, in the present embodiment, a Z-direction power lifting device 14 is installed in the accommodating chamber on the recovery side, which drives the pushing device 4 moving in the Y direction in the same connection mode as the supply side, so that the recovery side film frame IC product placed on the pushing device 4 can achieve reciprocating motion along the Z direction according to the specified target. The Z-direction power lifting device 14 can drive the pushing device 4 moving along the Y direction to achieve reciprocating motion in the Z direction at a specified position. The set pushing device 4 can transport the tested product on the film frame IC product on the recovery side by the picking and delivering device, and push it back to the empty slot of the magazine 5 on the recovery side for product recovery.

[0105] On the recovery side, the pushing device 4 moving along the Y direction adopts the same setting as the grasping device 3. When it is detected that the tested wafer ring product is present on the second fixture platform located on the recovery side, the push rod 4042 of the pushing device 4 is installed on the guide rail through the pushing substrate 4041 (the same as the clamping claw substrate 3041), and under the power source connection mode equivalent to the reciprocating motion of the grasping device 3 along the Y direction, the wafer ring product is sent to the vacant position of the magazine 5 on the recovery side.

[0106] In addition, it should be noted that the second driving mechanism 402 and the second linear guide rail 403 on the recovery side adopt the same structural arrangement as the first driving mechanism 302 and the first linear guide rail 303 on the supply side, that is, one side of the pushing base plate 4041 is connected as a whole with the belt of the Y-direction power source placed on the support plate through a belt pressure plate, and the Y-direction power source is composed of a motor, a motor bracket, a tensioning bolt, a tensioning bracket, a pulley, a belt, a driven wheel, a driven wheel bracket, and a driven wheel shaft, which drives the push rod 4042 to achieve reciprocating motion in the Y direction.

[0107] In some embodiments, Fig.15As shown, the second bracket 401 includes two second lifting units which are symmetrically arranged, and the second linear guide rail 403 is located between the two second lifting units;

[0108] The second lifting unit includes a second support frame 4001 and a second support plate 4002 arranged on the second support frame 4001 . A second guide bar 4003 is arranged on an edge of one side of the second support plate 4002 away from the second linear guide rail 403 . The two second guide bars 4003 are used to guide the film frame 6 .

[0109] Specifically, in this embodiment, two symmetrical second lifting units are arranged at intervals, wherein the second lifting unit is composed of a second support frame 4001, a second support plate 4002, and a second guide bar 4003. The second support plate 4002 is arranged on the second support frame 4001, and the second guide bar 4003 is arranged at the edge of the second support plate 4002. The inner wall of the second guide bar 4003 is provided with a groove. The grooves provided on the two second guide bars 4003 form a placement space for placing the film frame 6. Under the action of the power source motor, the push rod 4042 is driven to push the film frame 6 placed on the second bracket 401, and then the film frame together with the IC product is pushed to the idle position of the magazine 5.

[0110] In some embodiments, Figures 10 to 13 As shown, a fixed plate is provided on the mobile tray 1401, and a first detection sensor 15 for detecting whether a product exists is installed on the fixed plate;

[0111] The movable tray 1401 is also provided with a fixed bracket, on which a second detection sensor 16 for detecting whether the product is accurately in place is installed.

[0112] Specifically, in the present embodiment, a first detection sensor 15 is provided at the front end of the support plate on the supply side to confirm whether there is a wafer ring product to be tested in the receiving clip 5, so as to ensure accurate material picking along the clamping claws; if a vacancy is found in the receiving clip 5, it is directly skipped and only the position where the wafer ring to be tested exists is grabbed, so as to improve efficiency; the pushing device 4 moving along the Y direction on the recovery side adopts the same setting to ensure that the tested wafer ring pushed back each time is located in the vacant position in the receiving clip 5 to avoid abnormal stacking.

[0113] A second detection sensor 16 is provided at the front end of the support plate on the supply side, which is used to detect whether the wafer ring product to be tested has been grasped to the specified position of the first fixture platform. When grasped to the specified position, the clamp is opened under the control of the clamp cylinder 3042, and continues to move along the Y direction until it stops at the specified position after the clamp avoids the wafer ring product to be tested, so as to facilitate the subsequent picking and delivering device to take away the wafer ring product to be tested; the pushing device 4 moving along the Y direction on the recovery side adopts the same setting, which is used to detect whether the wafer ring product to be tested has been placed at the specified position of the second fixture platform on the recovery side, so as to facilitate the subsequent accurate recovery into the loading clip 5.

[0114] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or replace some or all of the technical features therein by equivalents. These modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present invention, and they should all be included in the scope of the claims and specification of the present invention.

[0115] The embodiments of the present application are intended to cover all such substitutions, modifications and variations that fall within the broad scope of the appended claims. Therefore, any omissions, modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the embodiments of the present application should be included in the scope of protection of the present application.

Claims

1. A film frame IC product supply and recovery integrated equipment, characterized in that: include: A frame body (1), wherein two accommodating chambers with different regions are arranged in the frame body (1), wherein one of the accommodating chambers is a supply side, and the other of the accommodating chambers is a recovery side; A plurality of openable and closable drawers (2) are arranged in each of the two accommodating chambers, and a loading clip (5) for loading the film frame IC product to be tested is placed in the openable and closable drawers (2); The accommodating chamber located on the supply side is provided with a lifting and moving grabbing device (3), which is used to grab the film frame IC product to be tested loaded into the supply side loading clip (5), and control the grabbing device (3) to rise, so as to lift the film frame IC product to be tested to the top of the frame body (1); A lifting and moving pushing device (4) is installed in the containing chamber located on the recovery side. The film frame IC product to be tested located above the frame body (1) is picked up by an external picking robot and placed on the pushing device. The pushing device (4) is controlled to descend and manipulated to perform a pushing action, so as to push the film frame IC product to be tested into a loading clip (5) loaded on the recovery side.

2. The film frame IC product supply and recovery integrated equipment according to claim 1, characterized in that: The top of the frame body (1) is provided with an opening (101) which is in communication with the accommodating chamber, so that the grasping device (3) and the pushing device (4) can pass through the opening (101) and rise to the top of the frame body (1); A space is reserved between the two accommodating chambers, and linear guide mechanisms (7) are installed on the inner walls on both sides of the accommodating chamber. The opening and closing drawer (2) is slidably arranged on the linear guide mechanisms (7), and a power output mechanism (8) for providing opening and closing power to the opening and closing drawer (2) is installed on the outer wall on one side of the accommodating chamber.

3. The film frame IC product supply and recovery integrated device according to claim 2, characterized in that: The linear guide mechanism (7) is connected to the side panel of the opening and closing drawer (2), and a sliding bracket (9) with an elastic structure is also slidably arranged on the side panel. The sliding bracket (9) is fixedly connected to the front panel of the opening and closing drawer (2) and is used to adapt to magazines (5) of different sizes.

4. The film frame IC product supply and recovery integrated device according to claim 1, characterized in that: A storage drawer (10) is also installed in the supply side accommodating chamber, and the storage drawer (10) is located below the bottom opening and closing drawer (2); A recovery drawer (11) is also arranged in the recovery side accommodating chamber, and a locking mechanism (12) for locking the position of the recovery drawer (11) is arranged on an outer wall of the recovery side accommodating chamber. The recovery drawer (11) is used to recover unqualified products after testing.

5. The film frame IC product supply and recovery integrated device according to claim 1, characterized in that: A safety door device (13) is also provided between two adjacent opening and closing drawers (2) in the same accommodating chamber.

6. The film frame IC product supply and recovery integrated device according to claim 1, characterized in that: A power lifting device (14) is installed in each of the supply-side accommodating chamber and the recovery-side accommodating chamber, and the grabbing device (3) is arranged on a movable tray (1401) of the supply-side power lifting device (14); The gripping device (3) comprises a first bracket (301), a first driving mechanism (302), a first linear guide rail (303) and a gripping mechanism (304); the first bracket (301) is arranged on the moving tray (1401); a first fixture platform for lifting the thin film frame IC product to be tested is formed on the first bracket (301); the first driving mechanism (302) and the first linear guide rail (303) are both arranged on the moving tray (1401); the moving part of the first linear guide rail (303) is connected to the transmission part of the first driving mechanism (302); and the gripping mechanism (304) is arranged on the moving part of the first linear guide rail (303); The first driving mechanism (302) is controlled to move, and the transmission part of the first driving mechanism (302) drives the moving part of the first linear guide rail (303) to perform linear motion, so that the grasping mechanism (304) performs a grasping action on the film frame of the film frame IC product to be tested, and then grasps the film frame IC product to be tested loaded in the receiving clip onto the first fixture platform.

7. The film frame IC product supply and recovery integrated device according to claim 6, characterized in that: The first bracket (301) comprises two first lifting units which are symmetrically arranged, and the first linear guide rail (303) is located between the two first lifting units; The first lifting unit comprises a first support frame (3001) and a first support plate (3002) arranged on the first support frame (3001); a first guide bar (3003) is arranged on an edge of the first support plate (3002) away from the first linear guide rail (303); the two first guide bars (3003) are used to guide the film frame; the first guide bar (3003) is also provided with a second limit block (3004) for limiting the film frame.

8. The film frame IC product supply and recovery integrated device according to claim 6, characterized in that: The pushing device (4) is arranged on a moving tray (1401) of a power lifting device (14) on the recovery side; The pushing device (4) comprises a second bracket (401), a second driving mechanism (402), a second linear guide rail (403) and a pushing mechanism (404); the second bracket (401) is arranged on the moving tray (1401); a second fixture platform for lifting the thin film frame IC product to be tested is formed on the second bracket (401); the second driving mechanism (402) and the second linear guide rail (403) are both arranged on the moving tray (1401); the moving part of the second linear guide rail (403) is connected to the transmission part of the second driving mechanism (402); and the grabbing mechanism (304) is arranged on the moving part of the second linear guide rail (403); The second driving mechanism (402) is controlled to move, and the transmission part of the second driving mechanism (402) drives the moving part of the second linear guide rail (403) to perform linear motion, so that the pushing mechanism (404) performs a pushing action on the film frame, thereby pushing the film frame IC product placed on the second fixture platform into the receiving clip (5).

9. The film frame IC product supply and recovery integrated device according to claim 8, characterized in that: The second bracket (401) comprises two second lifting units which are symmetrically arranged, and the second linear guide rail (403) is located between the two second lifting units; The second lifting unit comprises a second support frame (4001) and a second support plate (4002) arranged on the second support frame (4001), and a second guide bar (4003) is arranged on an edge of one side of the second support plate (4002) away from the second linear guide rail (403), and the two second guide bars (4003) are used to guide the film frame.

10. The film frame IC product supply and recovery integrated device according to claim 8, characterized in that: The movable tray (1401) is provided with a fixed plate, and the fixed plate is provided with a first detection sensor (15) for detecting whether a product exists; The movable tray (1401) is also provided with a fixed bracket, and the fixed bracket is equipped with a second detection sensor (16) for detecting whether the product is accurately in place.

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