Wafer loading and unloading device

Abstract

The present application provides a loading and unloading device for wafers, which includes a frame mechanism, a material mechanism, a conveying device and an angle adjustment mechanism. The frame mechanism has a material feeding space, a conveying moving space and a pre-alignment space. The material feeding space and the conveying moving space are arranged along the width direction or the length direction, the conveying moving space and the pre-alignment space are arranged along the length direction, the conveying device is arranged in the conveying moving space, and the lifting mechanism of the conveying device includes a lifting base plate, a lifting column base plate, a lifting motor, a screw assembly and a lifting connecting piece. The lifting column base plate is arranged on the lifting base plate along the height direction, and the lifting base plate and the lifting column base plate are arranged along the width direction, so that the lifting column base plate, the lifting guide rail assembly and the screw assembly are arranged in sequence along the width direction, which is beneficial to reducing the distance of the conveying moving space in the length direction, reducing the size of the loading and unloading device along the length direction, and reducing the volume, space occupied and weight of the loading and unloading device.

Description

Technical Field

[0001] The present application relates to the field of wafer detection technology, and in particular to a loading and unloading device for wafers. Background Art

[0002] During the performance test of the wafer, the loading and unloading device is used to transport the wafer and perform basic inspection and calibration before the performance test. In the related technology, the loading and unloading device has a large volume, occupies a large space and has a large weight, and has a complex structure, making it difficult to prepare and install. Summary of the invention

[0003] The purpose of the present application is to provide a loading and unloading device for wafers to solve the technical problems in the related art that the loading and unloading device has a large volume, occupies a large space and has a large weight, and has a complex structure and is difficult to prepare and install.

[0004] In a first aspect, the present application provides a wafer loading and unloading device, comprising:

[0005] A frame mechanism, comprising a material feeding space, a conveying moving space and a pre-aligning space, wherein the material feeding space and the conveying moving space are sequentially arranged along a width direction or a length direction, and the conveying moving space and the pre-aligning space are arranged along the length direction;

[0006] A material mechanism, the material mechanism is arranged in the material feeding space, and the material mechanism is used to store a plurality of samples to be tested;

[0007] A conveying device, the conveying device is arranged in the conveying moving space, and the conveying device comprises:

[0008] A lifting mechanism, the lifting mechanism comprising a lifting base plate, a lifting column base plate, a lifting motor, a screw assembly and a lifting connection piece, the lifting column base plate is arranged on the lifting base plate along the height direction, the lifting base plate and the lifting column base plate are arranged along the width direction, the screw assembly is on the lifting column base plate along the height direction, the lifting connection piece is arranged on the screw assembly, the lifting motor is arranged on the lifting base plate, and drives the screw assembly to drive the lifting connection piece to lift and lower;

[0009] A rotating mechanism is installed on the lifting connection member along the height direction, and the rotating mechanism rises and falls along with the lifting mechanism;

[0010] A translation mechanism is installed on the rotation mechanism along the height direction, and the translation mechanism rotates in a horizontal plane along with the rotation mechanism;

[0011] A fork arm assembly, wherein the fork arm assembly is connected to the translation mechanism, and the fork arm assembly moves along with the translation mechanism to move into the material mechanism to take out and put back the sample to be tested;

[0012] An angle adjustment mechanism is provided on one side of the lifting mechanism along the length direction, and is used to rotate the sample to be tested to a preset state.

[0013] In the loading and unloading device for wafers provided in the present application, the pre-alignment space and the material feeding space are arranged along the height direction, the material feeding space and the conveying moving space are arranged along the length direction, the material mechanism is arranged in the material feeding space, the conveying device is arranged in the conveying moving space, the lifting mechanism includes a lifting base plate, a lifting column base plate, a lifting motor, a screw assembly and a lifting connecting piece, the lifting column base plate is arranged on the lifting base plate along the height direction, the lifting base plate and the lifting column base plate are arranged along the width direction, the screw assembly is on the lifting column base plate along the height direction, and the lifting connecting piece is arranged on the screw On the assembly, the lifting motor is arranged on the lifting base plate, and drives the screw assembly to drive the lifting connection to lift and lower. The rotating mechanism is installed on the lifting connection along the height direction, and the rotating mechanism rises and falls with the lifting mechanism. The translation mechanism is installed on the rotating mechanism along the height direction, and the translation mechanism rotates in the horizontal plane with the rotating mechanism. The fork arm assembly is connected to the translation mechanism, and the fork arm assembly moves with the translation mechanism to move to the material mechanism to take out and put back the sample to be tested. The angle adjustment mechanism is arranged on one side of the lifting mechanism along the length direction, and the angle adjustment mechanism is used to rotate the sample to be tested to a preset state. The lifting base plate and the lifting column base plate are arranged along the width direction, so that the lifting column base plate, the lifting guide rail assembly, and the screw assembly are arranged in sequence along the width direction, which is conducive to reducing the distance of the transmission moving space in the length direction, and reducing the size of the loading and unloading device along the length direction, reducing the volume, space occupied and weight of the loading and unloading device.

[0014] Among them, the loading and unloading device also includes a detection component and a recovery component. The detection component is arranged on one side of the translation mechanism along the length direction. The detection component, the recovery component and the angle adjustment mechanism are arranged in sequence along the height direction. The detection component is used to detect whether the sample to be tested is qualified, and the recovery component is used to place the unqualified sample to be tested.

[0015] Among them, the loading and unloading device also includes a controller component, which is electrically connected to the conveying device and the angle adjustment mechanism. The controller component is configured to control the translation mechanism to extend along the width direction in a first time period so that the fork arm assembly takes out the sample to be tested; control the translation mechanism to retract along the width direction in a second time period to transport the sample to be tested back to the first position; control the rotating mechanism to rotate around the height direction in a third time period so that the translation mechanism faces the detection component; control the lifting mechanism to lift and lower in a fourth time period; control the translation mechanism to extend along the length direction in a fifth time period to transport the sample to be tested to the detection table of the detection component; control the translation mechanism and the lifting mechanism to transport the sample to be tested that fails the inspection to the recovery component; and control the translation mechanism and the lifting mechanism to transport the sample to be tested that passes the inspection to the angle adjustment mechanism.

[0016] Wherein, the loading and unloading device also includes a recovery component, which is arranged on the frame mechanism and located above the angle adjustment mechanism, and the recovery component includes a recovery substrate and a recovery moving member, the recovery substrate is fixed on the frame mechanism, a recovery guide rail is provided on the recovery substrate, the recovery moving member is slidably connected to the recovery guide rail and can move along the length direction, and a first positioning block, a second positioning block and a third positioning block are provided on the recovery moving member, the second positioning block and the third positioning block are relatively spaced apart, the first positioning hole is provided on the side of the second positioning block and the third positioning block away from the conveying device, and the first positioning block, the second positioning block and the third positioning block enclose a recovery space for placing the sample to be tested;

[0017] The first positioning block is provided with a first step surface and a second step surface along the height direction, the second positioning block is provided with a third step surface and a fourth step surface along the height direction, and the third positioning block is provided with a fifth step surface and a sixth step surface along the height direction, the first step surface, the third step surface, and the fifth step surface are used to abut and limit the sample to be tested of a first size, the second step surface, the fourth step surface, and the sixth step surface are used to abut and limit the sample to be tested of a second size, and the first size is smaller than the second size.

[0018] Wherein, the angle adjustment mechanism comprises a connecting component and a plurality of suction cup arms connected to the peripheral side of the connecting component, each of the suction cup arms is provided with a first suction hole portion and a second suction hole portion on a side away from the connecting component, the first suction hole portion is located between the second suction hole portion and the connecting component, the first suction hole portion is used to absorb the sample to be tested of a first size, and the second suction hole portion is used to absorb the sample to be tested of a second size, and the first size is smaller than the second size;

[0019] The suction cup arm includes a first adsorption channel and a second adsorption channel, the first adsorption channel is connected to the first suction hole portion, and the second adsorption channel is connected to the second suction hole portion; in the height direction, the height of the first suction hole portion is lower than the height of the second suction hole portion, and the first adsorption channel is at least partially higher than the second adsorption channel.

[0020] Wherein, the angle adjustment mechanism further comprises an angle rotation component, a first air intake duct and a second air intake duct, and the connection component is arranged on the angle rotation component;

[0021] The angle rotation component has a receiving space, the first air intake duct and the second air intake duct are arranged in the receiving space of the angle rotation component, and the connecting component has a first air intake channel and a second air intake channel, the first air intake channel is respectively connected to the first air intake duct and the first adsorption channel, and the second air intake channel is respectively connected to the second air intake duct and the second adsorption channel.

[0022] Wherein, the connection assembly comprises a ventilation block and an adapter plate, the ventilation block is arranged on the angle rotation assembly, and the adapter plate is arranged between the ventilation block and the suction cup arm;

[0023] The ventilation block is provided with a first air suction hole axially penetrating therethrough, the first air suction hole is connected to the first air suction pipe, the adapter plate is provided with a plurality of second air suction holes axially penetrating therethrough, the ventilation block and the adapter plate are at least partially spaced apart, and form a ventilation space connecting the first air suction hole and the second air suction hole, the first air suction hole, the ventilation space and the second air suction hole form the first air suction channel;

[0024] The ventilation block is provided with a third air suction hole, a plurality of air suction sub-channels, and a plurality of fourth air suction holes. The third air suction hole and the fourth air suction hole are respectively provided on both sides of the ventilation block and axially penetrate at least a portion of the ventilation block. The air suction sub-channels are respectively connected to the third air suction hole and the fourth air suction hole. The adapter plate is provided with a plurality of fifth air suction holes axially penetrated therethrough. The fifth air suction hole corresponds to and is respectively connected to the fourth air suction hole and the second adsorption channel. The third air suction hole, the air suction sub-channel, the fourth air suction hole and the fifth air suction hole form the second air suction channel.

[0025] Among them, the angle adjustment mechanism also includes a detection camera, which is arranged above the multiple suction cup arms, and the detection camera is used to detect the angle difference between the marking position of the sample to be tested and the preset position. The loading and unloading device also includes a controller component, and the controller component is electrically connected to the detection camera and the angle rotation component. The controller component is used to control the angle rotation component to rotate to a target angle according to the angle difference.

[0026] Wherein, the material mechanism comprises a carrying platform assembly and a material box, the material box is arranged on the carrying platform assembly, and the material box is used to place the sample to be tested;

[0027] The supporting platform assembly includes a supporting base plate, a first supporting plate and a second supporting plate, the first supporting plate and the second supporting plate being fixed to the supporting base plate and respectively arranged on both sides of the supporting base plate, the first supporting plate and the second supporting plate being respectively used to place both sides of the material box, a first front positioning bar and a first rear positioning bar are provided on the first supporting plate, a second front positioning bar and a second rear positioning bar are provided on the second supporting plate, the first front positioning bar, the first rear positioning bar, the second front positioning bar and the second rear positioning bar abut against and limit the material box of a first size; a third front positioning bar and a third rear positioning bar are provided on the first supporting plate, a fourth front positioning bar and a fourth rear positioning bar are provided on the second supporting plate, the third front positioning bar, the third rear positioning bar, the fourth front positioning bar and the fourth rear positioning bar abut against and limit the material box of a second size, the first size being smaller than the second size.

[0028] Wherein, the first support plate is spaced apart from the bearing bottom plate to form a first gap, the bearing platform assembly further comprises a first induction member and a first sensor, the first induction member is arranged on the bearing bottom plate and at least partially penetrates the first support plate, the first induction member is used to abut against the material box of a first size, the first induction member can move along the height direction, the first sensor is arranged on a side of the first support plate facing the bearing bottom plate, the first sensor is arranged corresponding to the first induction member, and the first sensor is used to detect position information of the first induction member;

[0029] The second support plate is spaced apart from the carrying base plate to form a second gap, the carrying platform assembly further includes a second induction member and a second sensor, the second induction member is disposed on the carrying base plate and at least partially penetrates the second support plate, the second induction member is used to abut against the material box of the first size, the second induction member can move along the height direction, the second sensor is disposed on a side of the second support plate facing the carrying base plate, the second sensor is disposed corresponding to the second induction member, and the second sensor is used to detect position information of the second induction member;

[0030] The carrying platform assembly further includes a third induction member and a third sensor, wherein the third induction member is disposed on the carrying bottom plate and at least partially penetrates the first supporting plate, the third induction member is used to abut against the material box of the second size, the third induction member can move along the height direction, the third sensor is disposed on a side of the first supporting plate facing the carrying bottom plate, the third sensor is disposed corresponding to the third induction member, and the third sensor is used to detect position information of the third induction member;

[0031] The supporting platform assembly also includes a fourth sensing member and a fourth sensor. The fourth sensing member is arranged on the supporting base plate and at least partially penetrates the second support plate. The fourth sensing member is used to abut the material box of the second size. The fourth sensing member can move along the height direction. The fourth sensor is arranged on the side of the second support plate facing the supporting base plate. The fourth sensor is arranged corresponding to the fourth sensing member, and the fourth sensor is used to detect the position information of the fourth sensing member.

[0032] The first sensing member includes a first sensing block, a first elastic member and a second elastic member, the first elastic member and the second elastic member are respectively arranged at two ends of the first sensing block, and the first elastic member and the second elastic member are respectively connected to the first sensing block and the bearing base plate, and the first sensing block is used to protrude from the first supporting plate under the elastic support of the first elastic member and the second elastic member;

[0033] The second sensing member includes a second sensing block, a third elastic member and a fourth elastic member, wherein the third elastic member and the fourth elastic member are respectively arranged at two ends of the second sensing block, and the third elastic member and the fourth elastic member are respectively connected to the second sensing block and the bearing base plate, and the second sensing block is used to protrude from the second supporting plate under the elastic support of the third elastic member and the fourth elastic member;

[0034] The third sensing member includes a third sensing block, a fifth elastic member and a sixth elastic member, wherein the fifth elastic member and the sixth elastic member are respectively arranged at two ends of the third sensing block, and the fifth elastic member and the sixth elastic member are respectively connected to the third sensing block and the bearing bottom plate, and the third sensing block is used to protrude from the first supporting plate under the elastic support of the fifth elastic member and the sixth elastic member;

[0035] The fourth sensing member includes a fourth sensing block, a seventh elastic member and an eighth elastic member, the seventh elastic member and the eighth elastic member are respectively arranged at two ends of the fourth sensing block, and the seventh elastic member and the eighth elastic member are respectively connected to the fourth sensing block and the supporting base plate, and the fourth sensing block is used to protrude from the second supporting plate under the elastic support of the seventh elastic member and the eighth elastic member.

[0036] Among them, the frame mechanism also has an electric control installation space, and the electric control installation space, the conveying movement space and the pre-alignment space are arranged in sequence along the length direction; the loading and unloading device also includes a controller component, and the controller component is arranged in the electric control installation space. BRIEF DESCRIPTION OF THE DRAWINGS

[0037] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0038] Figure 1 This is a schematic diagram of the structure of a loading and unloading device provided in the embodiment of the present application. Figure 1 ;

[0039] Figure 2 It is a structural schematic diagram of a loading and unloading device provided in an embodiment of the present application, which does not include a frame mechanism;

[0040] Figure 3 It is a structural schematic diagram of a conveying device provided in an embodiment of the present application;

[0041] Figure 4 is an exploded schematic diagram of a conveying device provided in an embodiment of the present application;

[0042] Figure 5 It is a structural schematic diagram of a material box of a first size provided in an embodiment of the present application and arranged on a carrying platform assembly;

[0043] Figure 6 It is a structural schematic diagram of a material box of a second size provided in an embodiment of the present application and arranged on a carrying platform assembly;

[0044] Figure 7 It is a structural schematic diagram of a material box provided in an embodiment of the present application;

[0045] Figure 8 It is a schematic diagram of the bottom structure of a material box provided in an embodiment of the present application;

[0046] Fig. 9 It is a structural schematic diagram of a carrier platform assembly provided in an embodiment of the present application;

[0047] Fig.10 is an exploded schematic diagram of a carrier platform assembly provided in an embodiment of the present application;

[0048] Fig.11 yes Fig.10A magnified schematic diagram of the middle A area;

[0049] Fig.12 It is a structural schematic diagram of a rotating mechanism provided in an embodiment of the present application;

[0050] Fig.13 It is a structural schematic diagram of a translation mechanism and a fork arm assembly provided in an embodiment of the present application;

[0051] Fig.14 It is a structural schematic diagram of an angle adjustment mechanism provided in an embodiment of the present application;

[0052] Fig.15 It is a schematic diagram of the cross-sectional structure of a suction cup arm provided in an embodiment of the present application;

[0053] Fig.16 It is a cross-sectional schematic diagram of a suction cup arm, a connecting assembly and an angle rotation assembly provided in an embodiment of the present application;

[0054] Fig.17 It is a schematic diagram of a structure in which a plurality of suction cup arms are arranged on a connecting assembly provided in an embodiment of the present application;

[0055] Fig.18 It is an exploded schematic diagram of a plurality of suction cup arms provided on a connecting assembly provided in an embodiment of the present application;

[0056] Fig.19 is a cross-sectional schematic diagram of a first air intake duct portion in an angle adjustment mechanism provided in an embodiment of the present application;

[0057] Fig. 20 is a cross-sectional schematic diagram of a second air intake duct portion in an angle adjustment mechanism provided in an embodiment of the present application;

[0058] Fig.21 It is a structural schematic diagram of a recycling component provided in an embodiment of the present application;

[0059] Fig. 22 It is a structural schematic diagram of a material box of a first size provided in an embodiment of the present application provided in a recycling component;

[0060] Fig.23 It is a structural schematic diagram of a material box of a second size provided in an embodiment of the present application provided in a recycling component;

[0061] Fig.24 This is a schematic diagram of a loading and unloading device provided in the embodiment of the present application. Figure 2 .

[0062] Description of labels:

[0063] Loading and unloading device 100, frame mechanism 10, material feeding space 101, conveying and moving space 102, pre-alignment space 103, electric control installation space 104, material mechanism 20, bearing platform assembly 21, bearing bottom plate 211, first support plate 212, second support plate 213, first front positioning bar 221, first rear positioning bar 222, second front positioning bar 223, second rear positioning bar 224, third front positioning bar 225, third rear positioning bar 226, fourth front positioning bar 227, fourth rear positioning bar 228, first sensing element 231, first sensing element 232, second sensing element 233, second sensor 234, third sensing element 235, third sensor 236, fourth sensing element 237, fourth sensor 238, material box 24, first side plate 241, second side plate 242, first bottom pull rod 243, second bottom pull rod 244, top connecting panel 245, conveying device 30, lifting mechanism 31, lifting bottom plate 311, lifting column base plate 312, lifting motor 313, screw rod assembly 314, lifting connecting piece 315, lifting guide rail assembly 316, rotating mechanism 32, rotating bottom plate 321, a rotating assembly 322, a translation mechanism 33, a translation base plate 331, a translation guide rail assembly 332, a fork arm assembly 34, a first fork arm 341, a second fork arm 342, an angle adjustment mechanism 40, a connecting assembly 41, a ventilation block 411, a first suction hole 4111, a third suction hole 4112, a suction sub-channel 4113, a fourth suction hole 4114, a transfer plate 412, a second suction hole 4121, a fifth suction hole 4122, a ventilation space 413, a suction cup arm 42, a first suction hole portion 421, a second suction hole portion 422, a first suction channel 4 23. second adsorption channel 424. first air suction duct 43. second air suction duct 44. angle rotation component 45. accommodating space 451. detection camera 46. recovery component 50. recovery substrate 51. recovery moving part 52. door panel 521. support plate 522. recovery guide rail 53. first positioning block 54. first step surface 541. second step surface 542. second positioning block 55. third step surface 551. fourth step surface 552. third positioning block 56. fifth step surface 561. sixth step surface 562. photoelectric sensor 57. detection component 60. DETAILED DESCRIPTION

[0064] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0065] It should be noted that the terms "first", "second", etc. in the specification and claims of this application and the above drawings are used to distinguish different objects rather than to describe a specific order. In addition, the terms "including" and "having" and any variations thereof are intended to cover non-exclusive inclusions.

[0066] In this specification, for the sake of convenience, the words and phrases indicating the orientation or positional relationship such as "middle", "upper", "lower", "front", "back", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like are used to illustrate the positional relationship of the constituent elements with reference to the drawings. This is only for the convenience of describing this specification and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore cannot be understood as a limitation of the present disclosure. The positional relationship of the constituent elements is appropriately changed according to the orientation of the constituent elements being described. Therefore, it is not limited to the words and phrases described in the specification, and can be appropriately replaced according to the circumstances.

[0067] In this specification, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection, or an electrical connection; it can be a direct connection, or an indirect connection through an intermediate, or the internal communication of two elements. For ordinary technicians in this field, the meanings of the above terms in this disclosure can be understood according to the circumstances.

[0068] During the performance test of the wafer, the loading and unloading device is used to transport the wafer and perform basic inspection and calibration before the performance test. In the related technology, the loading and unloading device has a large volume, occupies a large space and has a large weight, and has a complex structure, making it difficult to prepare and install.

[0069] Please refer to Figures 1 to 4 , Figure 1 This is a schematic diagram of a loading and unloading device provided in the embodiment of the present application. Figure 1 , Figure 2 It is a structural schematic diagram of a loading and unloading device provided in an embodiment of the present application, excluding a frame mechanism, Figure 3 is a schematic diagram of the structure of a transmission device provided in an embodiment of the present application, Figure 4 The present application provides a wafer loading and unloading device 100 to solve the technical problems in the related art that the loading and unloading device has a large volume, occupies a large space and has a large weight, and has a complex structure and is difficult to prepare and install.

[0070] The loading and unloading device 100 includes a frame mechanism 10, a material mechanism 20, a conveying device 30 and an angle adjustment mechanism 40. The frame mechanism 10 has a material feeding space 101, a conveying moving space 102 and a pre-alignment space 103, wherein the material feeding space 101 and the conveying moving space 102 are sequentially arranged along the width direction W or the length direction L, and the conveying moving space 102 and the pre-alignment space 103 are arranged along the length direction L.

[0071] The material mechanism 20 is disposed in the material feeding space 101 , and the material mechanism 20 is used to store a plurality of samples to be tested.

[0072] The conveying device 30 is arranged in the conveying moving space 102, and the conveying device 30 includes a lifting mechanism 31, a rotating mechanism 32, a translation mechanism 33 and a fork arm assembly 34. The lifting mechanism 31 includes a lifting base plate 311, a lifting column base plate 312, a lifting motor 313, a screw assembly 314 and a lifting connection member 315. The lifting column base plate 312 is arranged on the lifting base plate 311 along the height direction H, the lifting base plate 311 and the lifting column base plate 312 are arranged along the width direction W, the screw assembly 314 is arranged on the lifting column base plate 312 along the height direction H, the lifting connection member 315 is arranged on the screw assembly 314, the lifting motor 313 is arranged on the lifting base plate 311, and drives the screw assembly 314 to drive the lifting connection member 315 to rise and fall. The rotating mechanism 32 is installed on the lifting connection member 315 along the height direction H, and the rotating mechanism 32 rises and falls with the lifting mechanism 31. The translation mechanism 33 is installed on the rotating mechanism 32 along the height direction H, and the translation mechanism 33 rotates in the horizontal plane along with the rotating mechanism 32. The fork arm assembly 34 is connected to the translation mechanism 33, and the fork arm assembly 34 moves along with the translation mechanism 33 to move into the material mechanism 20 to take out and put back the sample to be tested.

[0073] The angle adjustment mechanism 40 is disposed on one side of the lifting mechanism 31 along the length direction L. The angle adjustment mechanism 40 is used to rotate the sample to be tested to a preset state.

[0074] Wherein, the length direction L, the width direction W, and the height direction H are as follows: Figure 1 As shown, the length direction L, the width direction W, and the height direction H mentioned later can all refer to Figure 1 , this application does not impose any restrictions on this.

[0075] The loading and unloading device 100 includes a frame mechanism 10, and the frame mechanism 10 can be used to carry other structural members of the loading and unloading device 100, such as the material mechanism 20, the conveying device 30, the angle adjustment mechanism 40, etc. In one embodiment, in the frame mechanism 10, the material feeding space 101 and the conveying moving space 102 are arranged along the length direction L, and the material feeding space 101 and the pre-alignment space 103 are arranged along the height direction H, that is, the material feeding space 101 is located above the pre-alignment space 103.

[0076] The material mechanism 20 is used to store a plurality of samples to be tested, wherein the samples to be tested include but are not limited to wafers, tablets or other products. The present application uses the sample to be tested as a tablet as an example, which should not be understood as a limitation of the present application. Among them, the tablet is a wafer with an iron ring. Specifically, the tablet includes a bearing iron ring, a blue film and a wafer, the bearing iron ring is attached with a blue film, and the wafer is attached with the blue film. A groove is provided on the inner side of the bearing iron ring, which can be used to fit the edge of the wafer and fix the wafer to ensure that the wafer does not move during processing. Optionally, the bearing iron ring can be made of stainless steel or other durable materials. The blue film is attached to the back of the wafer and can be used to protect the wafer during the wafer dicing process to prevent the stress generated during cutting from causing damage to the chip on the wafer.

[0077] The loading and unloading device 100 further includes a lifting mechanism 31, which is fixed to the frame mechanism 10. The lifting mechanism 31 includes a lifting bottom plate 311 and a lifting column base plate 312, and the lifting column base plate 312 is arranged on the lifting bottom plate 311 along the height direction H, and the lifting column base plate 312 and the lifting bottom plate 311 are arranged vertically. The lifting column base plate 312 and the lifting bottom plate 311 include aluminum alloy machined parts, and the supporting structural parts of the lifting mechanism 31 are composed of aluminum alloy machined parts, which can improve the supporting performance and structural rigidity of the bottom of the lifting mechanism 31, and improve the structural stability of the lifting mechanism 31.

[0078] The lifting mechanism 31 further includes the lifting motor 313, the screw assembly 314 and the lifting connection member 315. The screw assembly 314 is arranged on the lifting column base plate 312 along the height direction H. The lifting connection member 315 is arranged on the screw assembly 314, and the lifting connection member 315 is used to connect and carry the rotating mechanism 32, the translation mechanism 33 and the fork arm assembly 34. The lifting motor 313 drives the rotating mechanism 32, the translation mechanism 33 and the fork arm assembly 34 to lift. Further, the lifting mechanism 31 further includes a lifting rail assembly 316. The lifting rail assembly 316 is arranged on the lifting column base plate 312. The lifting rail assembly 316 extends along the height direction H. The lifting connection member 315 is slidably connected to the lifting rail assembly 316 to drive the rotating mechanism 32, the translation mechanism 33 and the fork arm assembly 34 to lift along the height direction H. In this embodiment, the lifting rail assembly 316 includes two lifting rails, and the two lifting rails are respectively arranged at the two ends of the lifting column base plate 312. Similarly, the lifting connector 315 is slidably connected to the two lifting rails to improve the stability of the lifting connector 315 in lifting and sliding. Further, the lifting rail assembly 316 also includes two lifting sliders, which are arranged on the lifting rails and used to connect the lifting connector 315.

[0079] In the loading and unloading device of the related art, the lifting mechanism is arranged on the side of the conveying moving space away from the material feeding space. In other words, the lifting mechanism is arranged directly opposite the material feeding space. In other words, the lifting column base plate of the lifting mechanism is parallel to the width direction W of the loading and unloading device. The lifting mechanism is arranged on the side of the conveying moving space away from the material feeding space, so that the lifting column base plate, the guide rail assembly, and the screw assembly are arranged in sequence along the length direction L, resulting in the extension of the distance of the conveying moving space in the length direction L, thereby extending the size of the loading and unloading device along the length direction L and increasing the volume of the loading and unloading device.

[0080] In the lifting mechanism 31 provided in the present application, the lifting bottom plate 311 and the lifting column base plate 312 are arranged along the width direction W, that is, the lifting column base plate 312 is arranged adjacent to the material feeding space 101. In other words, the lifting column base plate 312 is parallel to the length direction L of the loading and unloading device 100. The lifting mechanism 31 is arranged on a side of the conveying moving space 102 adjacent to the material feeding space 101, so that the lifting column base plate 312, the lifting guide rail assembly 316, and the lead screw assembly are arranged in sequence along the width direction W, which is conducive to reducing the distance of the conveying moving space 102 in the length direction L, and reducing the size of the loading and unloading device 100 along the length direction L, reducing the volume, occupied space and weight of the loading and unloading device 100.

[0081] In the loading and unloading device 100 provided in the present application, the pre-alignment space 103 and the material feeding space 101 are arranged along the height direction H, the material feeding space 101 and the conveying moving space 102 are arranged along the length direction L, the material mechanism 20 is arranged in the material feeding space 101, the conveying device 30 is arranged in the conveying moving space 102, the lifting mechanism 31 includes the lifting bottom plate 311, the lifting column base plate 312, the lifting motor 313, the screw rod assembly 314 and the lifting connection piece 315, the lifting column base plate 312 is arranged on the lifting bottom plate 311 along the height direction H, the lifting bottom plate 311 and the lifting column base plate 312 are arranged along the width direction W, the screw rod assembly 314 is arranged on the lifting column base plate 312 along the height direction H, and the lifting connection piece 315 is arranged on the lifting column base plate 312. 15 is arranged on the screw assembly 314, the lifting motor 313 is arranged on the lifting base plate 311, and drives the screw assembly 314 to drive the lifting connection member 315 to lift and lower, the rotating mechanism 32 is installed on the lifting connection member 315 along the height direction H, the rotating mechanism 32 is lifted and lowered with the lifting mechanism 31, the translation mechanism 33 is installed on the rotating mechanism 32 along the height direction H, the translation mechanism 33 rotates in the horizontal plane with the rotating mechanism 32, the fork arm assembly 34 is connected to the translation mechanism 33, the fork arm assembly 34 moves with the translation mechanism 33 to move into the material mechanism 20 to take out and put back the sample to be tested, the angle adjustment mechanism 40 is arranged on one side of the lifting mechanism 31 along the length direction L, and the angle adjustment mechanism 40 is used to rotate the sample to be tested to a preset state. The lifting base plate 311 and the lifting column base plate 312 are arranged along the width direction W, so that the lifting column base plate 312, the lifting guide rail assembly 316, and the screw assembly are arranged in sequence along the width direction W, which is beneficial to reducing the distance of the conveying moving space 102 in the length direction L, and reducing the size of the loading and unloading device 100 along the length direction L, reducing the volume, occupied space and weight of the loading and unloading device 100.

[0082] Please refer to Figures 5 to 11 , Figure 5 is a structural schematic diagram of a material box of a first size provided in an embodiment of the present application and arranged on a carrier platform assembly, Figure 6 is a schematic diagram of a structure in which a material box of a second size is arranged on a carrying platform assembly provided in an embodiment of the present application. Figure 7 is a structural schematic diagram of a material box provided in an embodiment of the present application, Figure 8 is a schematic diagram of the bottom structure of a material box provided in an embodiment of the present application, Fig. 9 is a structural schematic diagram of a carrier platform assembly provided in an embodiment of the present application, Fig.10 is an exploded schematic diagram of a carrier platform assembly provided in an embodiment of the present application, Fig.11 yes Fig.10 A magnified schematic diagram of area A in the middle.

[0083] In one embodiment, the material mechanism 20 includes a carrier assembly 21 and a material box 24. The material box 24 is disposed on the carrier assembly 21, and the material box 24 is used to place the sample to be tested.

[0084] In this embodiment, the loading and unloading device 100 can transport and detect the samples to be tested of two sizes, and the size of the sample to be tested can be a first size and a second size, and the first size is smaller than the second size. It should be noted that, optionally, when the sample to be tested is a sheet and the sample to be tested is of the first size, the first size can be the size of the supporting iron ring, the first size is 8 inches, and the size of the wafer can be 4 inches or 6 inches. When the sample to be tested is of the second size, the second size can be the size of the supporting iron ring, the second size is 12 inches, and the size of the wafer can be 6 inches or 8 inches. This application does not impose any restrictions on this.

[0085] Similarly, the material box 24 also includes material boxes 24 of two sizes, the material box 24 includes a material box 24 of a first size and a material box 24 of a second size, the first size is smaller than the second size, the material box 24 of the first size is used to place the sample to be tested of the first size, and the material box 24 of the second size is used to place the sample to be tested of the second size. Moreover, in this embodiment, the support platform assembly 21 can be used to place the material box 24 of the first size and the material box 24 of the second size. It should be noted that if the sample to be tested is not placed in the material box 24 of the second size, the material box 24 of the first size and the material box 24 of the second size can be placed on the support platform assembly 21 at the same time, and the material box 24 of the second size is arranged outside the material box 24 of the first size.

[0086] Specifically, in this embodiment, the material box 24 includes a first side panel 241, a second side panel 242, a first bottom tie rod 243, a second bottom tie rod 244, and a top connecting panel 245. The first bottom tie rod 243 and the second bottom tie rod 244 are arranged at intervals at the bottom of the first side panel 241 and the second side panel 242, and respectively connect the first side panel 241 and the second side panel 242. The first bottom tie rod 243 is located in the middle area of ​​the first side panel 241 and the second side panel 242, which can improve the connection stability of the first side panel 241 and the second side panel 242. The top connecting panel 245 is disposed on the top of the first side panel 241 and the second side panel 242 and respectively connects the first side panel 241 and the second side panel 242. The first side panel 241 and the second side panel 242 are fixed to each other through the first bottom tie rod 243, the second bottom tie rod 244, and the top connecting panel 245. The first side panel 241, the second side panel 242, the first bottom tie rod 243, the second bottom tie rod 244, and the top connecting panel 245 enclose a receiving space for receiving the sample to be tested. Further, the first side panel 241 and the second side panel 242 are respectively provided with a plurality of snap-fit ​​grooves, and the first side panel 241 and the second side panel 242 are used to place and fix the sample to be tested.

[0087] In one embodiment, the material box 24 also includes two side guards, which are respectively arranged on the first side plate 241 and the second side plate 242 on one side close to the conveying device 30, and the two side guards are respectively rotated to connect the first side plate 241 and the second side plate 242. The baffles can be used to block the sample to be tested to prevent the sample to be tested from falling out of the material box 24. There is no need to set a baffle rod, which can reduce the space occupied by the material box 24.

[0088] The carrying platform assembly 21 includes a carrying base plate 211, a first support plate 212 and a second support plate 213. The first support plate 212 and the second support plate 213 are fixed on the carrying base plate 211 and are respectively arranged on both sides of the carrying base plate 211. The first support plate 212 and the second support plate 213 are respectively used to place both sides of the material box 24. The first support plate 212 is provided with a first front positioning bar 221 and a first rear positioning bar 222. The second support plate 213 is provided with a second front positioning bar 223 and a second rear positioning bar 224. The first front positioning bar 221, the first rear positioning bar 222, the second front positioning bar 223, and the second rear positioning bar 224 abut and limit the material box 24 of the first size.

[0089] The first front positioning bar 221 is closer to the conveying device 30 than the first rear positioning bar 222, and the second front positioning bar 223 is closer to the conveying device 30 than the second rear positioning bar 224. Both the first rear positioning bar 222 and the second rear positioning bar 224 are provided with a bending portion, and the bending portions of the first rear positioning bar 222 and the second rear positioning bar 224 cooperate to limit the material box 24 of the first size.

[0090] The first support plate 212 is provided with a third front positioning bar 225 and a third rear positioning bar 226, and the second support plate 213 is provided with a fourth front positioning bar 227 and a fourth rear positioning bar 228. The third front positioning bar 225, the third rear positioning bar 226, the fourth front positioning bar 227, and the fourth rear positioning bar 228 abut and limit the material box 24 of the second size, and the first size is smaller than the second size.

[0091] The third front positioning bar 225 is closer to the conveying device 30 than the third rear positioning bar 226, and the fourth front positioning bar 227 is closer to the conveying device 30 than the fourth rear positioning bar 228. The third rear positioning bar 226 and the fourth rear positioning bar 228 are both provided with a bending portion, and the bending portions of the third rear positioning bar 226 and the fourth rear positioning bar 228 cooperate to limit the material box 24 of the second size.

[0092] It should be noted that the first front positioning bar 221 and the first rear positioning bar 222 are arranged separately, and the second front positioning bar 223 and the second rear positioning bar 224 are arranged separately. On the one hand, it is beneficial to reduce the material cost of the bearing platform assembly 21 and reduce the overall weight of the bearing platform assembly 21 and the transport detection device. On the other hand, when the material box 24 of the second size is placed on the bearing platform assembly 21, one end of the first bottom pull rod 243 of the material box 24 can be accommodated between the first front positioning bar 221 and the first rear positioning bar 222, and the other end can be accommodated between the second front positioning bar 223 and the second rear positioning bar 224, so that the bearing platform assembly 21 can place the material box 24 of the second size.

[0093] In one embodiment, the first support plate 212 is spaced apart from the supporting base plate 211 to form a first gap, and the supporting platform assembly 21 further includes a first sensing member 231 and a first sensor 232, wherein the first sensing member 231 is disposed on the supporting base plate 211 and at least partially penetrates the first support plate 212, the first sensing member 231 is used to abut against the material box 24 of a first size, the first sensing member 231 is movable along the height direction H, the first sensor 232 is disposed on a side of the first support plate 212 facing the supporting base plate 211, the first sensor 232 is disposed corresponding to the first sensing member 231, and the first sensor 232 is used to detect position information of the first sensing member 231.

[0094] In this embodiment, the first sensing member 231 can move along the height direction H to protrude from the first support plate 212 or be flush with the first support plate 212. The initial state of the first sensing member 231 is to protrude from the first support plate 212. When the material box 24 of the first size is placed on the support platform assembly 21, the material box 24 abuts against the first sensing member 231 and drives the first sensing member 231 to move downward along the height direction H, so that the first sensing member 231 enters a pressed state and is flush with the first support plate 212. At this time, the first sensor 232 detects the movement of the first sensing member 231 and outputs corresponding sensing information to the controller assembly of the loading and unloading device 100, and the controller assembly outputs the corresponding size information of the material box 24.

[0095] The second support plate 213 is spaced apart from the supporting base plate 211 to form a second gap. The supporting platform assembly 21 also includes a second sensing member 233 and a second sensor 234. The second sensing member 233 is disposed on the supporting base plate 211 and at least partially penetrates the second support plate 213. The second sensing member 233 is used to abut the material box 24 of the first size. The second sensing member 233 can move along the height direction H. The second sensor 234 is disposed on the side of the second support plate 213 facing the supporting base plate 211. The second sensor 234 is disposed corresponding to the second sensing member 233, and the second sensor 234 is used to detect the position information of the second sensing member 233.

[0096] In this embodiment, the second sensing member 233 can move along the height direction H to protrude from the second support plate 213 or be flush with the second support plate 213. The initial state of the second sensing member 233 is to protrude from the second support plate 213. When the material box 24 of the first size is placed on the support platform assembly 21, the material box 24 abuts against the second sensing member 233 and drives the second sensing member 233 to move downward along the height direction H, so that the second sensing member 233 enters a pressed state and is flush with the second support plate 213. At this time, the second sensor 234 detects the movement of the second sensing member 233 and outputs corresponding sensing information to the controller assembly of the loading and unloading device 100, and the controller assembly outputs the corresponding size information of the material box 24.

[0097] The first sensing element 231 and the first sensor 232 are respectively arranged at the position of the first support plate 212, and the second sensing element 233 and the second sensor 234 are respectively arranged at the position of the second support plate 213, and they can all be used to sense and confirm the material box 24 of the first size, which is beneficial to improve the recognition accuracy of the material box 24 of the first size.

[0098] The support platform assembly 21 also includes a third sensing member 235 and a third sensor 236. The third sensing member 235 is arranged on the support base plate 211 and at least partially penetrates the first support plate 212. The third sensing member 235 is used to abut the material box 24 of the second size. The third sensing member 235 can move along the height direction H. The third sensor 236 is arranged on the side of the first support plate 212 facing the support base plate 211. The third sensor 236 is arranged corresponding to the third sensing member 235, and the third sensor 236 is used to detect the position information of the third sensing member 235.

[0099] In this embodiment, the third sensing member 235 can move along the height direction H to protrude from the third support plate or be flush with the third support plate. The initial state of the third sensing member 235 is protruding from the third support plate. When the support platform assembly 21 places the material box 24 of the second size, the material box 24 abuts against the third sensing member 235 and drives the third sensing member 235 to move downward along the height direction H, so that the third sensing member 235 enters a pressed state and is flush with the third support plate. At this time, the third sensor 236 detects the movement of the third sensing member 235 and outputs corresponding sensor information to the controller assembly of the loading and unloading device 100, and the controller assembly outputs the corresponding size information of the material box 24.

[0100] The supporting platform assembly 21 also includes a fourth sensing member 237 and a fourth sensor 238. The fourth sensing member 237 is arranged on the supporting base plate 211 and at least partially penetrates the second support plate 213. The fourth sensing member 237 is used to abut the material box 24 of the second size. The fourth sensing member 237 can move along the height direction H. The fourth sensor 238 is arranged on the side of the second support plate 213 facing the supporting base plate 211. The fourth sensor 238 is arranged corresponding to the fourth sensing member 237, and the fourth sensor 238 is used to detect the position information of the fourth sensing member 237.

[0101] In this embodiment, the fourth sensing member 237 can move along the height direction H to protrude from the fourth support plate or be flush with the fourth support plate. The initial state of the fourth sensing member 237 is to protrude from the fourth support plate. When the material box 24 of the second size is placed on the support platform assembly 21, the material box 24 abuts against the fourth sensing member 237 and drives the fourth sensing member 237 to move downward along the height direction H, so that the fourth sensing member 237 enters a pressed state and is flush with the fourth support plate. At this time, the fourth sensor 238 detects the movement of the fourth sensing member 237 and outputs corresponding sensor information to the controller assembly of the loading and unloading device 100, and the controller assembly outputs the corresponding size information of the material box 24.

[0102] The third sensing element 235 and the third sensor 236 are respectively arranged at the position of the first support plate 212, and the fourth sensing element 237 and the fourth sensor 238 are respectively arranged at the position of the second support plate 213, which can be used to sense and confirm the material box 24 of the second size, which is beneficial to improve the recognition accuracy of the material box 24 of the second size.

[0103] It should be noted that, taking the first sensing member 231 and the first sensor 232 as an example, in the present embodiment, when the first sensing member 231 is in the initial state, the first sensor 232 emits a detection light to the first sensing member 231, and when the first sensing member 231 moves, the first sensor 232 detects the movement of the first sensing member 231 and emits a corresponding sensor signal. In other embodiments, it may also be that when the first sensing member 231 is in the initial state, the detection light emitted by the first sensor 232 is spaced from the first sensing member 231, and when the first sensing member 231 moves down along the height direction H to be flush with the first support plate 212, the detection light emitted by the first sensor 232 is projected to the first sensing member 231, and the first sensor 232 detects the movement of the first sensing member 231 and emits a corresponding sensor signal.

[0104] In one embodiment, the first sensing member 231 includes a first sensing block, a first elastic member, and a second elastic member, the first elastic member and the second elastic member are respectively arranged at two ends of the first sensing block, and the first elastic member and the second elastic member are respectively connected to the first sensing block and the supporting base plate 211, and the first sensing block is used to protrude from the first supporting plate 212 under the elastic support of the first elastic member and the second elastic member.

[0105] When the material box 24 of the first size is placed on the supporting platform assembly 21, the material box 24 abuts against the first sensing block and drives the first sensing block to move downward along the height direction H, so that the first elastic member and the second elastic member are elastically compressed. When the material box 24 of the first size is moved out of the supporting platform assembly 21, the first elastic member and the second elastic member recover and deform and drive the first sensing block to move upward along the height direction H and protrude from the first support plate 212.

[0106] The second sensing member 233 includes a second sensing block, a third elastic member and a fourth elastic member. The third elastic member and the fourth elastic member are respectively arranged at two ends of the second sensing block, and the third elastic member and the fourth elastic member are respectively connected to the second sensing block and the supporting base plate 211. The second sensing block is used to protrude from the second supporting plate 213 under the elastic support of the third elastic member and the fourth elastic member.

[0107] When the material box 24 of the first size is placed on the supporting platform assembly 21, the material box 24 abuts against the second sensing block and drives the second sensing block to move downward along the height direction H, so that the third elastic member and the fourth elastic member are elastically compressed. When the material box 24 of the first size is moved out of the supporting platform assembly 21, the third elastic member and the fourth elastic member recover and deform and drive the second sensing block to move upward along the height direction H and protrude from the second support plate 213.

[0108] The third sensing member 235 includes a third sensing block, a fifth elastic member and a sixth elastic member. The fifth elastic member and the sixth elastic member are respectively arranged at two ends of the third sensing block, and the fifth elastic member and the sixth elastic member are respectively connected to the third sensing block and the supporting base plate 211. The third sensing block is used to protrude from the first supporting plate 212 under the elastic support of the fifth elastic member and the sixth elastic member.

[0109] When the material box 24 of the second size is placed on the supporting platform assembly 21, the material box 24 abuts against the third sensing block and drives the third sensing block to move downward along the height direction H, so that the fifth elastic member and the sixth elastic member are elastically compressed. When the material box 24 of the second size is moved out of the supporting platform assembly 21, the fifth elastic member and the sixth elastic member recover and deform and drive the third sensing block to move upward along the height direction H and protrude from the first support plate 212.

[0110] The fourth sensing member 237 includes a fourth sensing block, a seventh elastic member and an eighth elastic member, the seventh elastic member and the eighth elastic member are respectively arranged at both ends of the fourth sensing block, and the seventh elastic member and the eighth elastic member are respectively connected to the fourth sensing block and the supporting base plate 211, and the fourth sensing block is used to protrude from the second support plate 213 under the elastic support of the seventh elastic member and the eighth elastic member.

[0111] When the material box 24 of the second size is placed on the supporting platform assembly 21, the material box 24 abuts against the fourth sensing block and drives the fourth sensing block to move downward along the height direction H, so that the seventh elastic member and the eighth elastic member are elastically compressed. When the material box 24 of the second size is moved out of the supporting platform assembly 21, the seventh elastic member and the eighth elastic member recover their deformation and drive the fourth sensing block to move upward along the height direction H and protrude from the second support plate 213.

[0112] Please refer to Figure 3 , Fig.12 and Fig.13 , Fig.12 is a structural schematic diagram of a rotating mechanism provided in an embodiment of the present application, Fig.13 It is a structural schematic diagram of a translation mechanism and a fork arm assembly provided in an embodiment of the present application.

[0113] In one embodiment, the conveying device 30 further includes the rotating mechanism 32, which is installed on the lifting connection member 315 along the height direction H. Specifically, the rotating mechanism 32 includes a rotating base plate 321 and a rotating assembly 322, and the rotating assembly 322 is arranged on the rotating base plate 321. The rotating base plate 321 is fixed to the lifting connection member 315, and the rotating base plate 321 includes an aluminum alloy machined part, which can improve the support performance and structural rigidity of the bottom of the rotating mechanism 32, and improve the structural stability of the rotating mechanism 32. The rotating assembly 322 is used to connect the translation mechanism 33 and the fork arm assembly 34, and drive the translation mechanism 33 and the fork arm assembly 34 to rotate. It should be noted that, in this embodiment, the rotation axis of the rotating assembly 322 is close to or coincides with the central axis of the translation assembly and the fork arm assembly 34, so that the translation assembly and the fork arm assembly 34 can occupy a smaller space range during the rotation process compared to setting the rotation axis at the end side of the translation assembly and the fork arm assembly 34. In particular, when the translation assembly and the fork arm assembly 34 need to transport large-sized samples to be tested, it can avoid that the translation assembly and the fork arm assembly 34 occupy too much space in the loading and unloading device 100 when transporting the samples to be tested and rotating, thereby effectively reducing the space occupied by the translation assembly and the fork arm assembly 34.

[0114] In one embodiment, the conveying device 30 also includes a translation mechanism 33, which includes a translation base plate 331 and a translation guide rail assembly 332, wherein the translation base plate 331 is connected to the rotating assembly 322 of the rotating mechanism 32, and the translation guide rail assembly 332 is arranged on the translation base plate 331, and the translation guide rail assembly 332 is arranged along the length direction L of the translation base plate 331, and the fork arm assembly 34 is slidably connected to the translation guide rail assembly 332.

[0115] In one embodiment, the fork arm assembly 34 includes a first fork arm 341 and a second fork arm 342, the translation rail assembly 332 includes a first translation rail and a second translation rail, the first fork arm 341 is slidably connected to the first translation rail, and the second fork arm 342 is slidably connected to the second translation rail. Further, the translation rail assembly 332 also includes two translation sliders, which are arranged on the first translation rail and the second translation rail and are used to connect the first fork arm 341 and the second fork arm 342.

[0116] Optionally, when the fork arm assembly 34 takes out the sample to be tested from the material box 24, any one of the first fork arm 341 and the second fork arm 342 can be moved into the material box 24 to take out the sample to be tested, and at the same time, the other of the first fork arm 341 and the second fork arm 342 can also be moved to the material box 24 and place the sample to be tested.

[0117] Also optionally, when the fork arm assembly 34 places the sample to be tested on the chuck of the probe station and performs a performance test, any one of the first fork arm 341 and the second fork arm 342 can move to the location of the chuck to take away the tested sample to be tested, and at the same time, the other of the first fork arm 341 and the second fork arm 342 can also move to the location of the chuck and place the sample to be tested. In this embodiment, the fork arm assembly 34 can achieve more efficient transportation of the sample to be tested by setting a double fork arm.

[0118] Optionally, the first fork arm 341 adsorbs and fixes the sample to be tested by forming a vacuum or negative pressure on the fork arm surface, and the second fork arm 342 adsorbs and fixes the sample to be tested by forming a vacuum or negative pressure on the fork arm surface.

[0119] In this embodiment, two adsorption holes are provided on the first fork arm 341 and the second fork arm 342 for adsorbing the sample to be tested. The two adsorption holes can prevent the first fork arm 341 and the second fork arm 342 from failing to adsorb the sample to be tested of the first size, thereby preventing air leakage and vacuum air path failure.

[0120] Please refer to Fig.14 , Fig.14 It is a structural schematic diagram of an angle adjustment mechanism provided in an embodiment of the present application.

[0121] In one embodiment, the angle adjustment mechanism 40 includes a connecting component 41 and a plurality of suction cup arms 42 connected to the peripheral side of the connecting component 41, and each of the suction cup arms 42 is provided with a first suction hole portion 421 and a second suction hole portion 422 on a side away from the connecting component 41, and the first suction hole portion 421 is located between the second suction hole portion 422 and the connecting component 41, that is, the first suction hole portion 421 is closer to the connecting component 41 than the second suction hole portion 422. The first suction hole portion 421 is used to absorb the sample to be tested of a first size, and the second suction hole portion 422 is used to absorb the sample to be tested of a second size, and the first size is smaller than the second size.

[0122] Optionally, in this embodiment, the number of the suction cup arms 42 is 4, and the 4 suction cup arms 42 respectively surround the connecting component 41 and are evenly spaced, that is, two adjacent suction cup arms 42 are perpendicular to each other. In other embodiments, the number of the suction cup arms 42 can also be 3, or 5, or 6, or more than 6, and the present application does not impose any restrictions on this. When multiple suction cup arms 42 adsorb the sample to be tested, the number of the suction cup arms 42 is 4, which can adsorb the four sides of the sample to be tested respectively to improve the adsorption stability of the sample to be tested.

[0123] Please also refer to Figures 15 to 18 , Fig.15 is a schematic diagram of the cross-sectional structure of a suction cup arm provided in an embodiment of the present application, Fig.16 is a cross-sectional schematic diagram of a suction cup arm, a connecting assembly and an angle rotation assembly provided in an embodiment of the present application, Fig.17 is a schematic diagram of a structure in which a plurality of suction cup arms are arranged on a connecting component provided in an embodiment of the present application, Fig.18 It is an exploded schematic diagram of a plurality of suction cup arms provided on a connecting component provided in an embodiment of the present application.

[0124] In one embodiment, the suction cup arm 42 includes a first suction channel 423 and a second suction channel 424, and the angle adjustment mechanism 40 also includes a first suction pipe 43 and a second suction pipe 44. The first suction pipe 43 is connected to the first suction channel 423, and the first suction channel 423 is connected to the first suction hole 421. The first suction pipe 43 is evacuated to form a negative pressure, and the first suction hole 421 is evacuated through the first suction channel 423 and the sample to be tested of the first size is adsorbed. The second suction channel 424 is connected to the second suction hole 422. The second suction pipe 44 is connected to the second suction channel 424, and the second suction channel 424 is connected to the second suction hole 422. The second suction pipe 44 is evacuated to form a negative pressure, and the second suction hole 422 is evacuated through the second suction channel 424 and the sample to be tested of the second size is adsorbed.

[0125] In the height direction H, the height of the first suction hole portion 421 is lower than the height of the second suction hole portion 422 , and the first suction channel 423 is at least partially higher than the second suction channel 424 .

[0126] The height of the first suction hole 421 is lower than that of the second suction hole 422. When the sample to be tested of the second size needs to be adsorbed, air is sucked and vacuumed above the second suction hole 422, and the first suction hole 421 does not need to be sucked. The sample to be tested of the second size is higher than the first suction hole 421, and the sample to be tested will not interfere with the first suction hole 421. Similarly, when the sample to be tested of the first size needs to be adsorbed, air is sucked and vacuumed above the first suction hole 421, and the second suction hole 422 does not need to be sucked.

[0127] In one embodiment, the angle adjustment mechanism 40 further includes an angle rotation component 45, and the connection component 41 is disposed on the angle rotation component 45. The angle rotation component 45 has a receiving space 451, and the first air intake duct 43 and the second air intake duct 44 are disposed in the receiving space 451 of the angle rotation component 45.

[0128] The first air intake duct 43 and the second air intake duct 44 are arranged in the receiving space 451 of the angle rotation component 45, which can reduce the air pipe setting space in the angle adjustment mechanism 40, thereby reducing the overall occupied space of the angle adjustment mechanism 40, and can avoid the first air intake duct 43 and the second air intake duct 44 being easily scratched or damaged by sharp objects when they are arranged in the outside.

[0129] The connecting component 41 has a first air intake channel and a second air intake channel therein. The first air intake channel is connected to the first air intake pipe 43 and the first adsorption channel 423 respectively, and the second air intake channel is connected to the second air intake pipe 44 and the second adsorption channel 424 respectively.

[0130] Please also refer to Fig.19 and Fig. 20 , Fig.19 is a cross-sectional schematic diagram of a first air intake duct portion in an angle adjustment mechanism provided in an embodiment of the present application, Fig. 20 It is a cross-sectional schematic diagram of a second air intake duct portion in an angle adjustment mechanism provided in an embodiment of the present application.

[0131] In one embodiment, the connection assembly 41 includes a ventilation block 411 and an adapter plate 412 , wherein the ventilation block 411 is disposed on the angle rotation assembly 45 , and the adapter plate 412 is disposed between the ventilation block 411 and the suction cup arm 42 .

[0132] The ventilation block 411 is provided with a first air suction hole 4111 that penetrates axially, and the first air suction hole 4111 is connected to the first air suction pipe 43. The adapter plate 412 is provided with a plurality of second air suction holes 4121 that penetrate axially. The ventilation block 411 and the adapter plate 412 are at least partially spaced apart, and form a ventilation space 413 that connects the first air suction hole 4111 and the second air suction hole 4121. The first air suction hole 4111, the ventilation space 413 and the second air suction hole 4121 form the first air suction channel. The number of the second air suction holes 4121 is multiple, and the number of the second air suction holes 4121 corresponds to the number of the suction cup arms 42. The second air suction holes 4121 are provided corresponding to the first adsorption channel 423 of the suction cup arms 42.

[0133] Among them, the vacuum path of the first suction pipe 43 is the first suction pipe 43, the first suction hole 4111, the ventilation space 413, the second suction hole 4121, the first adsorption channel 423, and the first suction hole part 421, and finally the sample to be tested of the first size is adsorbed.

[0134] The ventilation block 411 is provided with a third air intake hole 4112, a plurality of air intake sub-channels 4113, and a plurality of fourth air intake holes 4114. The third air intake hole 4112 and the fourth air intake hole 4114 are respectively provided on both sides of the ventilation block 411 and axially penetrate at least a portion of the ventilation block 411. The air intake sub-channels 4113 are respectively connected to the third air intake hole 4112 and the fourth air intake hole 4114. The adapter plate 412 is provided with a plurality of fifth air intake holes 4122 axially penetrated therethrough. The fifth air intake hole 4122 corresponds to and is respectively connected to the fourth air intake hole 4114 and the second adsorption channel 424. The third air intake hole 4112, the air intake sub-channels 4113, the fourth air intake hole 4114 and the fifth air intake hole 4122 form the second air intake channel.

[0135] Among them, the number of the suction sub-channels 4113 and the fourth suction holes 4114 is multiple, and the number of the suction sub-channels 4113 and the fourth suction holes 4114 corresponds to the number of the suction cup arms 42, and the fourth suction hole 4114 is set corresponding to the second adsorption channel 424 of the suction cup arm 42.

[0136] Among them, the vacuum path of the second air suction pipe 44 is the second air suction pipe 44, the third air suction hole 4112, the air suction sub-channel 4113, the fourth air suction hole 4114, the fifth air suction hole 4122, the second adsorption channel 424, and the second suction hole portion 422, and finally the sample to be tested of the second size is adsorbed.

[0137] The loading and unloading device 100 also includes a first suction device and a second suction device, wherein the first suction device is connected to the first suction pipe 43, and the second suction device is connected to the second suction pipe 44. The first suction device and the second suction device are electrically connected to the controller component, and when the angle adjustment mechanism 40 places and adjusts the sample to be tested of the first size, the controller component controls the first suction device to suction and evacuate, so that the first suction hole portion 421 of the suction cup arm 42 suctions and evacuates, so as to adsorb and fix the sample to be tested of the first size. When the angle adjustment mechanism 40 places and adjusts the sample to be tested of the second size, the controller component controls the second suction device to suction and evacuate, so that the second suction hole portion 422 of the suction cup arm 42 suctions and evacuates, so as to adsorb and fix the sample to be tested of the second size.

[0138] It should be noted that in the drawings of the present application, in order to facilitate production and preparation, the first adsorption channel 423 and the second adsorption channel 424 of the suction cup arm 42 at least partially penetrate the suction cup arm 42. In order to achieve the sealing of the first adsorption channel 423 and the second adsorption channel 424 for the convenience of vacuuming, it is only necessary to set a seal to block the part of the first adsorption channel 423 and the second adsorption channel 424 that penetrates the suction cup arm 42, which should not be understood as a limitation on the present application. Similarly, in order to facilitate production and preparation, the suction sub-channel 4113 of the ventilation block 411 at least partially penetrates the ventilation block 411. In order to achieve the sealing of the suction sub-channel 4113 for the convenience of vacuuming, it is only necessary to set a seal to block the part of the suction sub-channel 4113 that penetrates the ventilation block 411, which should not be understood as a limitation on the present application.

[0139] Among them, the angle rotation component 45 is connected to the connection component 41, and the angle rotation component 45 can be used to drive the connection component 41 and the suction cup arm 42 to rotate, thereby driving the sample to be tested on the suction cup arm 42 to rotate, so as to adjust the position of the sample to be tested, so that the calibrated sample to be tested can be quickly tested when transported to the probe station for performance testing.

[0140] Please refer to Fig.14In one embodiment, the angle adjustment mechanism 40 further includes a detection camera 46, which is disposed above the plurality of suction cup arms 42, and is used to detect the angle difference between the marked position of the sample to be tested and the preset position. The loading and unloading device 100 further includes the controller component, which is electrically connected to the detection camera 46 and the angle rotation component 45, and is used to control the angle rotation component 45 to rotate to a target angle according to the angle difference.

[0141] The detection camera 46 is used to detect the marked position of the sample to be tested, wherein the marked position of the sample to be tested includes but is not limited to the center position of the sample to be tested, or the notch position, or the cutting edge position, or the grain arrangement position or other positioning points.

[0142] Please refer to Fig.21 , Fig. 22 and Fig.23 , Fig.21 is a schematic diagram of the structure of a recycling component provided in an embodiment of the present application, Fig. 22 is a schematic diagram of a structure in which a material box of a first size is arranged in a recycling component provided in an embodiment of the present application. Fig.23 It is a structural schematic diagram of a material box of a second size provided in an embodiment of the present application and arranged in a recycling component.

[0143] In one embodiment, the loading and unloading device 100 also includes a recovery component 50, which is arranged on the frame mechanism 10 and above the angle adjustment mechanism 40. The recovery component 50 includes a recovery substrate 51 and a recovery movable member 52. The recovery substrate 51 is fixed on the frame mechanism 10. A recovery guide rail 53 is provided on the recovery substrate 51. The recovery movable member 52 is slidably connected to the recovery guide rail 53 and can move along the length direction L. A first positioning block 54, a second positioning block 55 and a third positioning block 56 are provided on the recovery movable member 52. The second positioning block 55 and the third positioning block 56 are relatively spaced apart. The first positioning hole is provided on the side of the second positioning block 55 and the third positioning block 56 away from the conveying device 30. The first positioning block 54, the second positioning block 55 and the third positioning block 56 enclose a recovery space for placing the sample to be tested.

[0144] The first positioning block 54 is provided with a first step surface 541 and a second step surface 542 along the height direction H, the second positioning block 55 is provided with a third step surface 551 and a fourth step surface 552 along the height direction H, and the third positioning block 56 is provided with a fifth step surface 561 and a sixth step surface 562 along the height direction H, the first step surface 541, the third step surface 551, and the fifth step surface 561 are used to abut and limit the sample to be tested of a first size, the second step surface 542, the fourth step surface 552, and the sixth step surface 562 are used to abut and limit the sample to be tested of a second size, and the first size is smaller than the second size.

[0145] Specifically, the recovery moving member 52 includes a connected door panel 521 and a support plate 522, wherein the door panel 521 and the support plate 522 are vertically connected, wherein the door panel 521 is arranged on the side of the support plate 522 away from the conveying device 30, and the door panel 521 is used for the user to pull out and remove the sample to be tested in the recovery component 50, and the support plate 522 is used to slideably connect the recovery guide rail 53 and to set the first positioning block 54, the second positioning block 55 and the third positioning block 56.

[0146] Furthermore, the recycling component 50 also includes a photoelectric sensor 57, which is arranged on the side of the first positioning block 54 away from the door panel 521, and the photoelectric sensor 57 is electrically connected to the controller component. The photoelectric sensor 57 is used to detect the sample to be tested and send the detection signal to the controller component. The controller component is used to notify the user whether the sample to be tested is placed in the recycling component 50 according to the detection signal, so as to facilitate the user to operate the loading and unloading device 100.

[0147] In one embodiment, the frame mechanism 10 further comprises an electric control installation space 104 , which is sequentially arranged with the conveying and moving space 102 and the pre-alignment space 103 along the length direction L. The loading and unloading device 100 further comprises the controller component, which is arranged in the electric control installation space 104 .

[0148] It should be noted that the recovery component 50 is used to place the unqualified samples to be tested. Specifically, for example, in this embodiment, the angle adjustment mechanism 40, the recovery component 50, and the material mechanism 20 are arranged in sequence along the height direction H, and the material mechanism 20 and the conveying device 30 are arranged along the length direction L. The controller component is configured to control the translation mechanism 33 to extend along the length direction L in the first time period, so that the fork arm component 34 adsorbs and takes out the sample to be tested; the controller component is configured to control the translation mechanism 33 to retract along the length direction L in the second time period, and transport the sample to be tested back to the first position; the controller component is configured to control the lifting mechanism 31 to lift and lower in the third time period and drive the fork arm component 34 to lift and lower, so that the fork arm component 34 corresponds to the angle adjustment mechanism 40; the controller component is configured to control the translation mechanism 33 to extend along the length direction L in the fourth time period, so as to place the sample to be tested on the fork arm component 34 on the angle adjustment mechanism 40 for preliminary testing. If the sample fails the preliminary test, the conveyor 30 transports the sample on the angle adjustment mechanism 40 to the recovery component 50 for the user to take out and recycle. If the sample passes the preliminary test, the conveyor 30 transports the sample on the angle adjustment mechanism 40 to the probe station for the next performance test.

[0149] Please refer to Figure 3 and Fig.24 , Fig.24 This is a schematic diagram of a loading and unloading device provided in the embodiment of the present application. Figure 2 .

[0150] In one embodiment, in the frame mechanism 10, the material feeding space 101 and the conveying moving space 102 are arranged along the width direction W, that is, they are arranged on the side of the lifting column base plate 312 away from the lifting bottom plate 311 along the width direction W, and the material mechanism 20 is arranged on the lifting column base plate 312 along the height direction H, that is, the height of the material mechanism 20 is higher than the lifting column base plate 312.

[0151] In this embodiment, the loading and unloading device 100 also includes a detection component 60, which is arranged on one side of the translation mechanism 33 along the length direction L. The detection component 60, the recovery component 50 and the angle adjustment mechanism 40 are arranged in sequence along the height direction H. The detection component 60 is used to detect whether the sample to be tested is qualified, and the recovery component 50 is used to place the unqualified sample to be tested.

[0152] Specifically, the detection component 60 can be used to take pictures of the sample to be tested and detect whether the sample to be tested has problems such as appearance defects. If the detection component 60 detects that the sample to be tested has problems such as appearance defects, the controller component controls the conveying component to place the sample to be tested on the detection component 60 into the recovery component 50 so that the user can take it out and recycle it.

[0153] Specifically, for example, in this embodiment, the controller component is configured to control the translation mechanism 33 to extend along the width direction W in the first time period, so that the fork arm component 34 takes out the sample to be tested; control the translation mechanism 33 to retract along the width direction W in the second time period, and transport the sample to be tested back to the first position; control the rotation mechanism 32 to rotate around the height direction H in the third time period, so that the translation mechanism 33 faces the detection component 60; control the lifting mechanism 31 to rise and fall in the fourth time period; control the translation mechanism 33 to extend along the length direction L in the fifth time period, and transport the sample to be tested to the detection table of the detection component 60. If the appearance inspection of the sample to be tested fails, the conveying device 30 conveys the sample to be tested in the detection component 60 to the recovery component 50 for the user to take out and recycle. If the appearance inspection of the sample to be tested passes, the conveying device 30 conveys the sample to be tested in the detection component 60 to the angle adjustment mechanism 40 for preliminary inspection.

[0154] Mentioning "embodiment" and "implementation method" in this application means that the specific features, structures or characteristics described in conjunction with the embodiment may be included in at least one embodiment of the present application. The appearance of the phrases in various places in the specification does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment that is mutually exclusive with other embodiments. It is explicitly and implicitly understood by those skilled in the art that the embodiments described in this application can be combined with other embodiments. In addition, it should also be understood that the features, structures or characteristics described in the various embodiments of the present application can be arbitrarily combined to form another embodiment that does not deviate from the spirit and scope of the technical solution of the present application, provided that there is no contradiction between them.

[0155] The above is part of the implementation methods of the present application. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the principles of the present application. These improvements and modifications are also considered to be within the scope of protection of the present application.

Claims

1. A wafer loading and unloading device, characterized in that: include: A frame mechanism, comprising a material feeding space, a conveying moving space and a pre-aligning space, wherein the material feeding space and the conveying moving space are arranged along a length direction, and the conveying moving space and the pre-aligning space are arranged along the length direction; A material mechanism, disposed in the material feeding space, for storing a plurality of samples to be tested; A conveying device is arranged in the conveying moving space, and the conveying device comprises: A lifting mechanism, the lifting mechanism comprises a lifting base plate, a lifting column base plate, a lifting guide rail assembly, a lifting motor, a screw assembly and a lifting connection piece, the lifting column base plate is arranged on the lifting base plate along the height direction, the lifting base plate and the lifting column base plate are arranged along the width direction, the lifting guide rail assembly is arranged on the lifting column base plate and extends along the height direction, the screw assembly is on the lifting column base plate along the height direction, the lifting connection piece is arranged on the screw assembly and slidably connected to the lifting guide rail assembly, the lifting motor is arranged on the lifting base plate, and drives the screw assembly to drive the lifting connection piece to lift and lower, the lifting column base plate, the lifting guide rail assembly, and the screw assembly are arranged in sequence along the width direction; A rotating mechanism is installed on the lifting connection member along the height direction, and the rotating mechanism rises and falls along with the lifting mechanism; A translation mechanism is installed on the rotation mechanism along the height direction, and the translation mechanism rotates in a horizontal plane along with the rotation mechanism; A fork arm assembly connected to the translation mechanism, wherein the fork arm assembly moves along with the translation mechanism to move into the material mechanism to take out and put back the sample to be tested; An angle adjustment mechanism, disposed in the pre-alignment space and on one side of the lifting mechanism along the length direction, for rotating the sample to be tested to a preset state; A recovery component is arranged on the frame mechanism and is located above the angle adjustment mechanism, the recovery component includes a recovery substrate and a recovery moving member, the recovery substrate is fixed on the frame mechanism, a recovery guide rail is arranged on the recovery substrate, the recovery moving member is slidably connected to the recovery guide rail and can move along the length direction, a first positioning block, a second positioning block and a third positioning block are arranged on the recovery moving member, the second positioning block and the third positioning block are arranged with relative intervals, the first positioning block is arranged on the side of the second positioning block and the third positioning block away from the conveying device, and the first positioning block, the second positioning block and the third positioning block enclose a recovery space for placing the sample to be tested; The first positioning block is provided with a first step surface and a second step surface along the height direction, the second positioning block is provided with a third step surface and a fourth step surface along the height direction, and the third positioning block is provided with a fifth step surface and a sixth step surface along the height direction, the first step surface, the third step surface, and the fifth step surface are used to abut and limit the sample to be tested of a first size, the second step surface, the fourth step surface, and the sixth step surface are used to abut and limit the sample to be tested of a second size, and the first size is smaller than the second size.

2. The loading and unloading device according to claim 1, characterized in that: The angle adjustment mechanism includes a connecting component and a plurality of suction cup arms connected to the peripheral side of the connecting component, each of the suction cup arms is provided with a first suction hole portion and a second suction hole portion on a side away from the connecting component, the first suction hole portion is located between the second suction hole portion and the connecting component, the first suction hole portion is used to absorb the sample to be tested of a first size, and the second suction hole portion is used to absorb the sample to be tested of a second size, and the first size is smaller than the second size; The suction cup arm includes a first suction channel and a second suction channel, the first suction channel is connected to the first suction hole portion, and the second suction channel is connected to the second suction hole portion; In the height direction, the height of the first suction hole portion is lower than the height of the second suction hole portion, and the first adsorption channel is at least partially higher than the second adsorption channel.

3. The loading and unloading device according to claim 2, characterized in that: The angle adjustment mechanism further comprises an angle rotation assembly, a first air intake duct and a second air intake duct, and the connection assembly is arranged on the angle rotation assembly; The angle rotation component has a receiving space, the first air intake duct and the second air intake duct are arranged in the receiving space of the angle rotation component, and the connecting component has a first air intake channel and a second air intake channel, the first air intake channel is respectively connected to the first air intake duct and the first adsorption channel, and the second air intake channel is respectively connected to the second air intake duct and the second adsorption channel.

4. The loading and unloading device according to claim 3 is characterized in that: The connecting assembly comprises a ventilation block and an adapter plate, wherein the ventilation block is arranged on the angle rotation assembly, and the adapter plate is arranged between the ventilation block and the suction cup arm; The ventilation block is provided with a first air suction hole axially extending therethrough, the first air suction hole is connected to the first air suction pipe, the adapter plate is provided with a plurality of second air suction holes axially extending therethrough, the ventilation block and the adapter plate are at least partially spaced apart, and form a ventilation space connecting the first air suction hole and the second air suction hole, the first air suction hole, the ventilation space and the second air suction hole form the first air suction channel; The ventilation block is provided with a third air suction hole, a plurality of air suction sub-channels, and a plurality of fourth air suction holes. The third air suction hole and the fourth air suction hole are respectively provided on both sides of the ventilation block and axially penetrate at least a portion of the ventilation block. The air suction sub-channels are respectively connected to the third air suction hole and the fourth air suction hole. The adapter plate is provided with a plurality of fifth air suction holes axially penetrated therethrough. The fifth air suction hole corresponds to and is respectively connected to the fourth air suction hole and the second adsorption channel. The third air suction hole, the air suction sub-channel, the fourth air suction hole and the fifth air suction hole form the second air suction channel.

5. The loading and unloading device according to claim 3, characterized in that: The angle adjustment mechanism also includes a detection camera, which is arranged above the multiple suction cup arms. The detection camera is used to detect the angle difference between the marked position of the sample to be tested and the preset position. The loading and unloading device also includes a controller component, which is electrically connected to the detection camera and the angle rotation component. The controller component is used to control the angle rotation component to rotate to a target angle according to the angle difference.

6. The loading and unloading device according to claim 1, characterized in that: The material mechanism includes a carrying platform assembly and a material box, wherein the material box is arranged on the carrying platform assembly and is used to place the sample to be tested; The supporting platform assembly includes a supporting base plate, a first supporting plate and a second supporting plate, the first supporting plate and the second supporting plate being fixed to the supporting base plate and respectively arranged on both sides of the supporting base plate, the first supporting plate and the second supporting plate being respectively used to place both sides of the material box, a first front positioning bar and a first rear positioning bar are provided on the first supporting plate, a second front positioning bar and a second rear positioning bar are provided on the second supporting plate, the first front positioning bar, the first rear positioning bar, the second front positioning bar and the second rear positioning bar abut against and limit the material box of a first size; a third front positioning bar and a third rear positioning bar are provided on the first supporting plate, a fourth front positioning bar and a fourth rear positioning bar are provided on the second supporting plate, the third front positioning bar, the third rear positioning bar, the fourth front positioning bar and the fourth rear positioning bar abut against and limit the material box of a second size, the first size being smaller than the second size.

7. The loading and unloading device according to claim 6, characterized in that: The first support plate is spaced apart from the bearing bottom plate to form a first gap, the bearing platform assembly further comprises a first induction member and a first sensor, the first induction member is arranged on the bearing bottom plate and at least partially penetrates the first support plate, the first induction member is used to abut against the material box of a first size, the first induction member can move along the height direction, the first sensor is arranged on a side of the first support plate facing the bearing bottom plate, the first sensor is arranged corresponding to the first induction member, and the first sensor is used to detect position information of the first induction member; The second support plate is spaced apart from the carrying base plate to form a second gap, the carrying platform assembly further includes a second induction member and a second sensor, the second induction member is disposed on the carrying base plate and at least partially penetrates the second support plate, the second induction member is used to abut against the material box of the first size, the second induction member can move along the height direction, the second sensor is disposed on a side of the second support plate facing the carrying base plate, the second sensor is disposed corresponding to the second induction member, and the second sensor is used to detect position information of the second induction member; The carrying platform assembly further includes a third induction member and a third sensor, wherein the third induction member is disposed on the carrying bottom plate and at least partially penetrates the first supporting plate, the third induction member is used to abut against the material box of the second size, the third induction member can move along the height direction, the third sensor is disposed on a side of the first supporting plate facing the carrying bottom plate, the third sensor is disposed corresponding to the third induction member, and the third sensor is used to detect position information of the third induction member; The supporting platform assembly also includes a fourth sensing member and a fourth sensor. The fourth sensing member is arranged on the supporting base plate and at least partially penetrates the second support plate. The fourth sensing member is used to abut the material box of the second size. The fourth sensing member can move along the height direction. The fourth sensor is arranged on the side of the second support plate facing the supporting base plate. The fourth sensor is arranged corresponding to the fourth sensing member, and the fourth sensor is used to detect the position information of the fourth sensing member.

8. The loading and unloading device according to claim 7, characterized in that: The first sensing member includes a first sensing block, a first elastic member, and a second elastic member, wherein the first elastic member and the second elastic member are respectively disposed at two ends of the first sensing block, and the first elastic member and the second elastic member are respectively connected to the first sensing block and the supporting base plate, and the first sensing block is used to protrude from the first supporting plate under the elastic support of the first elastic member and the second elastic member; The second sensing member includes a second sensing block, a third elastic member and a fourth elastic member, wherein the third elastic member and the fourth elastic member are respectively arranged at two ends of the second sensing block, and the third elastic member and the fourth elastic member are respectively connected to the second sensing block and the bearing base plate, and the second sensing block is used to protrude from the second supporting plate under the elastic support of the third elastic member and the fourth elastic member; The third sensing member includes a third sensing block, a fifth elastic member and a sixth elastic member, wherein the fifth elastic member and the sixth elastic member are respectively arranged at two ends of the third sensing block, and the fifth elastic member and the sixth elastic member are respectively connected to the third sensing block and the bearing bottom plate, and the third sensing block is used to protrude from the first supporting plate under the elastic support of the fifth elastic member and the sixth elastic member; The fourth sensing member includes a fourth sensing block, a seventh elastic member and an eighth elastic member, the seventh elastic member and the eighth elastic member are respectively arranged at two ends of the fourth sensing block, and the seventh elastic member and the eighth elastic member are respectively connected to the fourth sensing block and the supporting base plate, and the fourth sensing block is used to protrude from the second supporting plate under the elastic support of the seventh elastic member and the eighth elastic member.

9. The loading and unloading device according to claim 1, characterized in that: The frame mechanism also has an electric control installation space, which is arranged in sequence along the length direction with the conveying movement space and the pre-alignment space; the loading and unloading device also includes a controller component, which is arranged in the electric control installation space.

Images