Calibration system of laser

Abstract

The invention discloses a calibration system of a laser. The calibration system comprises the laser, a first calibration module, a control module and a calibration adjustment module, the first calibration module comprises a first transflective unit and a first detection unit; the first transflective unit is used for receiving the detection laser and generating first reflection laser; the first detection unit is used for receiving the first reflected laser and generating a first detection signal, and the first detection signal carries a first incident position signal of the first reflected laser on the first detection unit; the control module is electrically connected with the first detection unit and the calibration adjustment module and used for receiving the first detection signal, determining a first adjustment signal according to the first detection signal and a first preset point position and outputting the first adjustment signal to the calibration adjustment module so as to control the calibration adjustment module to adjust the emergent angle of the detection laser. The relation between the first incidence position and the first preset point position meets the first preset requirement. Therefore, efficient calibration of the emergent angle of the laser is realized.

Description

Technical Field

[0001] The present invention relates to the field of laser technology, and in particular to a laser calibration system. Background Art

[0002] The importance of laser pointing is reflected in many aspects, especially in high-precision and complex optical applications such as lithography systems, laser processing, laser communications and other fields.

[0003] The directivity of a traditional solid-state laser is adjusted by a rough adjustment mirror. The prior art lacks effective measures for calibrating the directivity of a solid-state laser and cannot ensure the consistency of the emission angle of the solid-state laser. Summary of the invention

[0004] The invention provides a laser calibration system to achieve efficient calibration of the laser emission angle.

[0005] According to one aspect of the present invention, there is provided a laser calibration system, comprising: a laser, a first calibration module, a control module and a calibration adjustment module;

[0006] The first calibration module includes a first transflective unit and a first detection unit;

[0007] The laser is used to output detection laser;

[0008] The first transflective unit is arranged on the optical path between the laser and the first detection unit at a first preset deflection angle, and is used to receive the detection laser and generate a first reflected laser;

[0009] The first detection unit is used to receive the first reflected laser and generate a first detection signal, the first detection signal carries a first incident position signal of the first reflected laser on the first detection unit; and the first detection unit includes a first preset point position;

[0010] The control module is electrically connected to the first detection unit and the calibration and adjustment module, respectively, and is used to receive the first detection signal, determine a first adjustment signal according to the first detection signal and the first preset point, and output the first adjustment signal to the calibration and adjustment module, so as to control the calibration and adjustment module to adjust the emission angle of the detection laser until the relationship between the first incident position and the first preset point meets the first preset requirement.

[0011] Optionally, the first transflective unit is further used to generate a first transmission laser;

[0012] The calibration system further comprises at least one set of second calibration modules;

[0013] The second calibration module includes a second transflective unit and a second detection unit;

[0014] The second transflective unit is disposed on the optical path between the first transflective unit and the second detection unit at a second preset deflection angle, and is used to receive the first transmitted laser and generate a second reflected laser;

[0015] The second detection unit is used to receive the second reflected laser and generate a second detection signal, the second detection signal carries a second incident position signal of the second reflected laser on the second detection unit; and the second detection unit includes a second preset point position;

[0016] The control module is also electrically connected to the second detection unit, and is used to receive the second detection signal, determine a second adjustment signal according to the second detection signal and the second preset point, and output the second adjustment signal to the calibration adjustment module, so as to control the calibration adjustment module to adjust the emission angle of the detection laser until the relationship between the first incident position and the first preset point meets the first preset requirement, and the relationship between the second incident position and the second preset point meets the second preset requirement.

[0017] Optionally, the calibration and adjustment module includes: at least one rotating reflection unit and at least one driving unit, and the driving unit is correspondingly connected to the rotating reflection unit;

[0018] The driving unit is electrically connected to the control module and connected to the rotating reflection unit; the driving unit is used to drive the rotating reflection unit to rotate according to the first adjustment signal to adjust the emission angle of the detection laser.

[0019] Optionally, the calibration and adjustment module includes: a first rotating reflection unit, a second rotating reflection unit, a first driving unit and a second driving unit;

[0020] The first driving unit is electrically connected to the control module and connected to the first rotating reflecting unit; the first driving unit is used to drive the first rotating reflecting unit to rotate according to the first adjustment signal to adjust the emission angle of the detection laser;

[0021] The second driving unit is electrically connected to the control module and connected to the second rotating reflecting unit; the second driving unit is used to drive the second rotating reflecting unit to rotate according to the first adjustment signal to adjust the emission angle of the detection laser.

[0022] Optionally, the second transflective unit is further used to receive the first transmitted laser and generate a second transmitted laser;

[0023] The calibration system also includes a laser elimination unit:

[0024] The laser elimination unit is located on a propagation path of the second transmission laser and is used for receiving the second transmission laser.

[0025] Optionally, a reflectivity of the second transflective unit is greater than or equal to a reflectivity of the first transflective unit.

[0026] Optionally, the first preset deflection angle and the second preset deflection angle are equal.

[0027] Optionally, the calibration system further comprises a housing for accommodating the first calibration module;

[0028] The housing includes at least two positioning pins; the laser includes at least two positioning holes;

[0029] The positioning pins and the positioning holes are connected correspondingly and are used to fix the first calibration module on the propagation path of the detection laser.

[0030] Optionally, the first preset requirement includes that the first incident position at least partially overlaps with the first preset point.

[0031] Optionally, the second preset requirement includes that the second incident position at least partially overlaps with the second preset point position.

[0032] The embodiment of the present invention determines whether the laser's emission angle is qualified by comparing the first incident position of the first reflected laser on the first detection unit with the first preset point. When the emission angle is unqualified, a first adjustment signal is determined according to the first incident position and the first preset point, and the first adjustment signal is transmitted to the calibration adjustment module to control the calibration adjustment module to adjust the emission angle of the detection laser until the relationship between the first incident position and the first preset point meets the first preset requirement. The above technical solution can effectively detect the emission angle and automatically calibrate when the emission angle is unqualified, thereby ensuring the consistency of the laser's emission angle.

[0033] It should be understood that the contents described in this section are not intended to identify the key or important features of the embodiments of the present invention, nor are they intended to limit the scope of the present invention. Other features of the present invention will become easily understood through the following description. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0035] Figure 1 is a schematic diagram of the structure of a first laser calibration system provided in an embodiment of the present invention;

[0036] Figure 2 is a schematic diagram of the structure of a second laser calibration system provided in an embodiment of the present invention;

[0037] Figure 3 is a schematic structural diagram of a third laser calibration system provided in an embodiment of the present invention;

[0038] Figure 4 is a schematic structural diagram of a fourth laser calibration system provided in an embodiment of the present invention;

[0039] Figure 5 is a schematic structural diagram of a fifth laser calibration system provided in an embodiment of the present invention;

[0040] Figure 6 is a schematic structural diagram of a sixth laser calibration system provided in an embodiment of the present invention;

[0041] Figure 7 is a schematic diagram of the structure of a seventh laser calibration system provided in an embodiment of the present invention;

[0042] Figure 8 is a schematic structural diagram of an eighth laser calibration system provided in an embodiment of the present invention;

[0043] Fig. 9 4 is a schematic diagram of the structure of a ninth laser calibration system provided according to an embodiment of the present invention. DETAILED DESCRIPTION

[0044] In order to enable those skilled in the art to better understand the scheme of the present invention, the technical scheme in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the present invention.

[0045] It should be noted that the terms "first", "second", etc. in the specification and claims of the present invention and the above-mentioned drawings are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequence. It should be understood that the data used in this way can be interchanged where appropriate, so that the embodiments of the present invention described herein can be implemented in an order other than those illustrated or described herein. In addition, any variation of the terms "including" and "having" is intended to cover non-exclusive inclusions, for example, a process, method, system, product or device that includes a series of steps or units is not necessarily limited to those steps or units clearly listed, but may include other steps or units that are not clearly listed or inherent to these processes, methods, products or devices.

[0046] Figure 1 is a schematic diagram of the structure of a first laser calibration system provided in an embodiment of the present invention;

[0047] Figure 2 is a schematic diagram of the structure of a second laser calibration system provided in an embodiment of the present invention; Figure 3 is a schematic structural diagram of a third laser calibration system provided in an embodiment of the present invention; Figure 4 is a schematic structural diagram of a fourth laser calibration system provided in an embodiment of the present invention; Figure 5 is a schematic diagram of the structure of the fifth laser calibration system provided according to an embodiment of the present invention. This embodiment can be applied to calibrate the light output angle of a solid-state laser to ensure the consistency of the light output angle. Figure 1 As shown, the system includes: a laser 1, a first calibration module 2, a control module (not shown in the figure) and a calibration adjustment module 3; the first calibration module 2 includes a first transflective unit 21 and a first detection unit 22; the laser 1 is used to output a detection laser; the first transflective unit 21 is set on the optical path between the laser 1 and the first detection unit 22 at a first preset deflection angle, and is used to receive the detection laser and generate a first reflected laser; the first detection unit 22 is used to receive the first reflected laser and generate a first detection signal, and the first detection signal carries a first incident position signal of the first reflected laser on the first detection unit 22; and the first detection unit 22 includes a first preset point position; the control module is electrically connected to the first detection unit 22 and the calibration adjustment module 3 respectively, and is used to receive the first detection signal, determine the first adjustment signal according to the first detection signal and the first preset point position, and output the first adjustment signal to the calibration adjustment module 3, so as to control the calibration adjustment module 3 to adjust the emission angle of the detection laser until the relationship between the first incident position and the first preset point position meets the first preset requirement.

[0048] Specifically, Figure 1As shown, the laser 1 can be a solid laser, which is a laser that uses solid materials as a gain medium and has the characteristics of small size, easy use and high output power. The first calibration module 2 includes a first transflective unit 21 and a first detection unit 22, the first transflective unit 21 can be a semi-transparent and semi-reflective mirror, and the first detection unit 22 can be a photodiode position detector. The first transflective unit 21 is set on the optical path between the laser 1 and the first detection unit 22 at a first preset deflection angle, wherein the first preset deflection angle can be understood as the angle α between the first transflective unit 21 and the vertical direction, and the value range of the first preset deflection angle can be 0°<α<90°. The detection laser is reflected by the first transflective unit 21 to generate a first reflected laser that is incident on the first detection unit 22. The first detection unit 22 can detect the incident position of the first reflected laser and generate a first detection signal carrying the first incident position signal of the first reflected laser on the first detection unit 22. The first detection unit 22 includes a first preset point position, and the first preset point position can be any position of the first detection unit 22.

[0049] The control module is electrically connected to the first detection unit 22 and the calibration adjustment module 3 respectively, and is used to receive a first detection signal, compare the first incident position carried in the first detection signal with the first preset point, determine the offset angle of the detection laser light path, determine the first adjustment signal according to the offset angle and output the first adjustment signal to the calibration adjustment module 3, so as to control the calibration adjustment module 3 to adjust the exit angle of the detection laser until the relationship between the first incident position and the first preset point meets the first preset requirement.

[0050] Optionally, the first preset requirement includes that the first incident position at least partially overlaps with the first preset point position.

[0051] Specifically, when the first incident position and the first preset point just coincide, that is, the first incident position is the first preset point, this is the most ideal calibration state. In actual operation, there is a certain error between the first incident position and the first preset point. Within the allowable error range, the first incident position and the first preset point can partially coincide or differ by a preset distance to meet the calibration requirements for the detection laser.

[0052] The following describes the value of the first preset angle, the setting of the first preset point, and the setting of the first preset requirement by taking examples.

[0053] For example, 1) Figure 1 As shown, the first preset deflection angle can be set to 45 degrees, the first preset point can be the center point a of the first detection unit 22, and the first preset requirement is that the first incident position at least partially overlaps with the first preset point.

[0054] At this time, the center point of the first transflective unit 21 can be set on the perpendicular line of the first detection unit 22. In this way, when the first incident position at least partially coincides with the center point a of the first detection unit 22, the emission angle of the detection laser is qualified. Otherwise, the detection laser needs to be calibrated through the calibration and adjustment module 3 until the first incident position at least partially coincides with the center point a of the first detection unit 22, and the calibration is completed.

[0055] 2) If Figure 2 As shown, the first preset deflection angle can be set to 30 degrees. If the center point of the first transflective unit 21 is on the vertical line of the first detection unit 22, in this case, the first preset point position can be point b located at the side of the center point a of the first detection unit 22 close to the laser 1. The first preset requirement is that the first incident position at least partially overlaps with the first preset point position.

[0056] That is to say, when the first incident position at least partially coincides with point b of the first detection unit 22, the emission angle of the detection laser is qualified. Otherwise, the detection laser needs to be calibrated through the calibration adjustment module 3 until the first incident position at least partially coincides with point b of the first detection unit 22, and the calibration is completed.

[0057] It is understandable that if Figure 3 As shown, when the first deflection angle is 30 degrees, the first detection unit 22 can also be adjusted according to the propagation path of the first reflected laser, for example, the first detection unit 22 is moved a certain distance in the direction close to the laser 1, so that the first incident position of the qualified detection laser at least partially overlaps with the center point a of the first detection unit 22. The first incident position at least partially overlaps with the center point a of the first detection unit 22 as a first preset requirement. At this time, when the first incident position at least partially overlaps with the center point a of the first detection unit 22, the emission angle of the detection laser is qualified, otherwise it is necessary to calibrate the detection laser through the calibration adjustment module 3 until the first incident position at least partially overlaps with the center point a of the first detection unit 22, and the calibration is completed.

[0058] 3) If Figure 4 As shown, the first preset deflection angle can be set to 60 degrees. If the center point of the first transflective unit 21 is on the vertical line of the first detection unit 22, in this case, the first preset point position can be point c located on the side of the center point a of the first detection unit 22 away from the laser 1. The first preset requirement is that the first incident position at least partially overlaps with the first preset point position.

[0059] That is to say, when the first incident position at least partially coincides with point c of the first detection unit 22, the emission angle of the detection laser is qualified. Otherwise, the detection laser needs to be calibrated through the calibration adjustment module 3 until the first incident position at least partially coincides with point c of the first detection unit 22, and the calibration is completed.

[0060] It is understandable that if Figure 5 As shown, when the first deflection angle is 60 degrees, the first detection unit 22 can also be adjusted according to the propagation path of the first reflected laser, for example, the first detection unit 22 is moved a certain distance away from the laser 1, so that the first incident position of the qualified detection laser at least partially overlaps with the center point a of the first detection unit 22. The first incident position at least partially overlaps with the center point a of the first detection unit 22 as a first preset requirement. At this time, when the first incident position at least partially overlaps with the center point a of the first detection unit 22, the emission angle of the detection laser is qualified, otherwise it is necessary to calibrate the detection laser through the calibration adjustment module 3 until the first incident position at least partially overlaps with the center point a of the first detection unit 22, and the calibration is completed.

[0061] The above-mentioned values ​​of the first preset angle and the setting of the first preset point are only examples. The value of the first preset angle can be any value between 0°<α<90°, and the first preset point can be any position of the first detection unit 22, which can be set according to actual conditions and detection requirements. The specific first preset angle and the first preset point are not limited.

[0062] The embodiment of the present invention determines whether the laser's emission angle is qualified by comparing the first incident position of the first reflected laser on the first detection unit with the first preset point. When the emission angle is unqualified, a first adjustment signal is determined according to the first incident position and the first preset point, and the first adjustment signal is transmitted to the calibration adjustment module to control the calibration adjustment module to adjust the emission angle of the detection laser until the relationship between the first incident position and the first preset point meets the first preset requirement. The above technical solution can effectively detect the light emission angle and automatically calibrate when the light emission angle is unqualified, thereby ensuring the consistency of the laser's light emission angle.

[0063] Figure 6 1 is a schematic diagram of the structure of the sixth laser calibration system provided according to an embodiment of the present invention. This embodiment describes a solution of adding a second calibration module on the basis of the above embodiment. Figure 6As shown, the first transflective unit 21 is also used to generate a first transmitted laser; the calibration system also includes at least one group of second calibration modules 4; the second calibration module 4 includes a second transflective unit 41 and a second detection unit 42; the second transflective unit 41 is set on the optical path between the first transflective unit 21 and the second detection unit 42 at a second preset deflection angle, and is used to receive the first transmitted laser and generate a second reflected laser; the second detection unit 42 is used to receive the second reflected laser and generate a second detection signal, and the second detection signal carries a second incident position signal of the second reflected laser on the second detection unit 42; and the second detection unit 42 includes a second preset point; the control module is also electrically connected to the second detection unit 42, and is used to receive the second detection signal, determine the second adjustment signal according to the second detection signal and the second preset point, and output the second adjustment signal to the calibration adjustment module 3, so as to control the calibration adjustment module 3 to adjust the emission angle of the detection laser until the relationship between the first incident position and the first preset point meets the first preset requirement, and the relationship between the second incident position and the second preset point meets the second preset requirement.

[0064] Specifically, Figure 6 As shown, in order to improve the accuracy of detection, at least one group of second calibration modules 4 can be added to the calibration system. This embodiment takes the addition of a group of second calibration modules 4 as an example for explanation. The detection laser can be transmitted while being reflected by the first transflective unit 21 to generate a first transmitted laser. The second calibration module 4 includes a second transflective unit 41 and a second detection unit 42. The second transflective unit 41 can be a semi-transparent and semi-reflective mirror, and the second detection unit 42 can be a photodiode position detector. The second transflective unit 41 is arranged on the optical path between the first transflective unit 21 and the second detection unit 42 at a second preset deflection angle, wherein the second preset deflection angle can be understood as the angle β between the second transflective unit 41 and the vertical direction. The value range of the second preset deflection angle can be 0°<β<90°. After the first transmitted laser passes through the second transflective unit 41, a second reflected laser can be generated and incident on the second detection unit 42. The second detection unit 42 can receive the second reflected laser and generate a second detection signal carrying a second incident position signal of the second reflected laser on the second detection unit 42. Among them, the second preset point position can be any position of the second detection unit 42. In addition, the above-mentioned adding of a group of second calibration modules 4 is only an example, and the specific number of groups of the second calibration modules 4 added is not specifically limited.

[0065] The control module is also connected to the second detection unit 42, receives the second detection signal emitted by the second detection unit 42, compares the second incident position carried in the second detection signal with the second preset point, determines the offset angle of the detection laser light path, determines the second adjustment signal according to the offset angle and outputs the second adjustment signal to the calibration adjustment module 3, so as to control the calibration adjustment module 3 to adjust the emission angle of the detection laser until the relationship between the first incident position and the first preset point meets the first preset requirement, and the relationship between the second incident position and the second preset point meets the second preset requirement.

[0066] Optionally, the second preset requirement includes that the second incident position at least partially overlaps with the second preset point position.

[0067] Specifically, when the second incident position and the second preset point just coincide, that is, the second incident position is the second preset point, this is the most ideal calibration state. In actual operation, there is a certain error between the second incident position and the second preset point. Within the allowable error range, the second incident position and the second preset point can partially coincide or differ by a preset distance to meet the calibration requirements for the detection laser.

[0068] It should be noted that the value of the second preset angle, the setting of the second preset point and the setting of the second preset requirement are the same as the design concept of the value of the first preset angle, the setting of the first preset point and the setting of the first preset requirement, and will not be repeated here.

[0069] In the embodiment of the present invention, a second calibration module is added. When the calibration adjustment module 3 is controlled to adjust the emission angle of the detection laser, not only the relationship between the first incident position and the first preset point position needs to meet the first preset requirement, but also the relationship between the second incident position and the second preset point position needs to meet the second preset requirement. The above scheme is used for multi-layer detection, which greatly improves the detection accuracy.

[0070] Figure 7 FIG. 1 is a schematic diagram of the structure of the seventh laser calibration system provided according to an embodiment of the present invention. The present invention further refines the calibration adjustment module. Figure 7 As shown, the calibration and adjustment module 3 includes: at least one rotating reflection unit and at least one driving unit, the driving unit is correspondingly connected to the rotating reflection unit; the driving unit is electrically connected to the control module and connected to the rotating reflection unit; the driving unit is used to drive the rotating reflection unit to rotate according to the first adjustment signal to adjust the emission angle of the detection laser.

[0071] Specifically, Figure 7As shown, the rotating reflection unit can be a rotating reflector, and the driving unit can be a motor. When the first section calibration module 2 detects that the emission angle of the detection laser is unqualified, the calibration adjustment module 3 needs to adjust the emission angle of the detection laser according to the first adjustment signal. There can be at least one rotating reflection unit and at least one driving unit in the calibration adjustment module 3, wherein the driving unit is connected to the control module for receiving the first adjustment signal, and the driving unit is connected to the rotating reflection unit, and drives the rotating reflection unit to rotate in the horizontal direction and / or in the vertical direction according to the first adjustment signal to adjust the emission angle of the detection laser.

[0072] In the embodiment of the present invention, the driving unit is electrically connected to the control module and connected to the rotating reflective unit, so that the driving unit can drive the rotating reflective unit to rotate according to the first adjustment signal to adjust the emission angle of the detection laser, so as to realize the automatic calibration of the laser emission angle, thereby ensuring the consistency of the laser emission angle.

[0073] The embodiment of the present invention further describes the calibration module. Figure 7 As shown, the calibration and adjustment module 3 includes: a first rotating reflection unit 31, a second rotating reflection unit 32, a first driving unit (not shown in the figure) and a second driving unit (not shown in the figure); the first driving unit is electrically connected to the control module and connected to the first rotating reflection unit 31; the first driving unit is used to drive the first rotating reflection unit 31 to rotate according to the first adjustment signal to adjust the emission angle of the detection laser; the second driving unit 32 is electrically connected to the control module and connected to the second rotating reflection unit 32; the second driving unit is used to drive the second rotating reflection unit 32 to rotate according to the first adjustment signal to adjust the emission angle of the detection laser.

[0074] Specifically, Figure 7As shown, the embodiment of the present invention is illustrated by taking the calibration and adjustment module 3 including two rotating reflection units and two driving units. When the first calibration module 2 detects that the emission angle of the detection laser is unqualified, the calibration and adjustment module 3 needs to adjust the emission angle of the detection laser according to the first adjustment signal. When the calibration and adjustment module 3 calibrates the detection laser, only the first rotating reflection unit 31 can rotate, or only the second rotating reflection unit 32 can rotate, or the first rotating reflection unit 31 and the second rotating reflection unit 32 can cooperate with each other to adjust the emission angle of the detection laser. Therefore, a first driving unit is set to be connected to the control module for receiving the first adjustment signal, and the first driving unit is connected to the first rotating reflection unit 31, and is used to drive the first rotating reflection unit 31 to rotate in the horizontal direction and / or in the vertical direction according to the first adjustment signal to adjust the emission angle of the detection laser. The second driving unit 32 is set to be connected to the control module, receive the first adjustment signal, and the second driving unit is connected to the second rotating reflection unit 32, so that the second driving unit can drive the second rotating reflection unit 32 to rotate in the horizontal direction and / or in the vertical direction according to the first adjustment signal to adjust the emission angle of the detection laser.

[0075] That is to say, when the detected emission angle is unqualified, the position of the detection laser projected on the second rotation reflection unit 32 can be adjusted by adjusting the position of the first rotation reflection unit 31, thereby changing the incident angle of the detection laser on the second rotation reflection unit 32, so that the detection laser is emitted at a suitable emission angle. Alternatively, the position of the second rotation reflection unit 32 is directly adjusted to change the incident angle of the detection laser on the second rotation reflection unit 32, so that the detection laser is emitted at a suitable emission angle. Alternatively, the positions of the first rotation reflection unit 31 and the second rotation reflection unit 32 can be adjusted simultaneously to cooperate with each other, so that the detection laser is emitted at a suitable emission angle.

[0076] In the embodiment of the present invention, two rotating reflection units and two driving units are provided to cooperate with each other to adjust the emission angle of the detection laser, so that the adjustment of the calibration adjustment module is more precise, and the calibration efficiency is further improved.

[0077] Optionally, the reflectivity of the second transflective unit 41 is greater than or equal to the reflectivity of the first transflective unit 21 .

[0078] Specifically, the reflectivity of the second transflective unit 41 and the reflectivity of the first transflective unit 21 can be 5%. Setting the reflectivity of the second transflective unit 41 equal to the reflectivity of the first transflective unit 21 can ensure the consistency of the detection laser reflection behavior, thereby improving the detection accuracy.

[0079] The reflectivity of the second transflective unit 41 can be greater than the reflectivity of the first transflective unit 21. When the detection laser passes through the first transflective unit 21, the power of the first transmitted laser will be reduced. Correspondingly, the power of the second reflected laser reflected by the second transflective unit 41 and received by the second detection laser will also be reduced. Therefore, the second transflective unit 41 with a higher reflectivity can be appropriately used to make the laser powers received by the first detection unit 22 and the second detection unit 42 as close as possible, so as to further improve the detection accuracy.

[0080] Optionally, the first preset deflection angle and the second preset deflection angle are equal.

[0081] Specifically, by setting the first preset deflection angle and the second preset deflection angle to be equal, the consistency of the detected laser reflection behavior is ensured, thereby further improving the detection accuracy.

[0082] The embodiment of the present invention describes a laser elimination unit in a calibration detection system. Figure 8 FIG. 8 is a schematic diagram of the structure of the eighth laser calibration system according to an embodiment of the present invention. Figure 8 As shown, the second transflective unit 41 is also used to receive the first transmitted laser and generate the second transmitted laser; the calibration system also includes a laser elimination unit 5: the laser elimination unit 5 is located on the propagation path of the second transmitted laser and is used to receive the second transmitted laser.

[0083] Specifically, Figure 8 As shown, the laser detection system includes a laser detection device, and the laser detection device includes a first calibration module and a housing for accommodating the first calibration module. The detection laser will pass through the second transflective unit 41. At this time, if the laser is not eliminated, the laser may hit the housing of the laser detection device, causing damage to the housing and affecting the life of the laser detection device. The laser elimination unit 5 can be a power receiving device. The laser elimination unit 5 is set on the propagation path of the second transmitted laser to eliminate the second transmitted laser, prevent it from damaging the housing of the laser detection device, and improve the life of the laser detection device.

[0084] Optionally, Fig. 9 FIG. 1 is a schematic diagram of the structure of a ninth laser calibration system according to an embodiment of the present invention. Fig. 9 As shown, the calibration system also includes a shell 6 for accommodating the first calibration module 2; the shell 6 includes at least two positioning pins 7; the laser 1 includes at least two positioning holes (not shown in the figure); the positioning pins 7 and the positioning holes are correspondingly connected to fix the first calibration module 2 on the propagation path of the detection laser.

[0085] Specifically, Fig. 9As shown, the laser calibration system includes a laser 1 and a laser calibration device, and the laser calibration device includes a first calibration module 2, a laser elimination unit 5, and a housing 6 for accommodating the first calibration module 2. When calibrating the emission angle of the laser 1, it is first necessary to insert the positioning pin 7 on the laser calibration device into the positioning hole on the laser 1, and fix the laser 1 to the laser calibration device to ensure that the first calibration module 2 is located on the propagation path of the detection laser to improve the calibration accuracy.

[0086] The above specific implementations do not constitute a limitation on the protection scope of the present invention. It should be understood by those skilled in the art that various modifications, combinations, sub-combinations and substitutions can be made according to design requirements and other factors. Any modification, equivalent substitution and improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. A laser calibration system, characterized in that: include: A laser, a first calibration module, a control module, and a calibration adjustment module; The first calibration module includes a first transflective unit and a first detection unit; The laser is used to output detection laser; The first transflective unit is arranged on the optical path between the laser and the first detection unit at a first preset deflection angle, and is used to receive the detection laser and generate a first reflected laser; The first detection unit is used to receive the first reflected laser and generate a first detection signal, the first detection signal carries a first incident position signal of the first reflected laser on the first detection unit; and the first detection unit includes a first preset point position; The control module is electrically connected to the first detection unit and the calibration and adjustment module, respectively, and is used to receive the first detection signal, determine a first adjustment signal according to the first detection signal and the first preset point, and output the first adjustment signal to the calibration and adjustment module, so as to control the calibration and adjustment module to adjust the emission angle of the detection laser until the relationship between the first incident position and the first preset point meets the first preset requirement.

2. The calibration system according to claim 1, characterized in that The first transflective unit is also used to generate a first transmission laser; The calibration system further comprises at least one set of second calibration modules; The second calibration module includes a second transflective unit and a second detection unit; The second transflective unit is disposed on the optical path between the first transflective unit and the second detection unit at a second preset deflection angle, and is used to receive the first transmitted laser and generate a second reflected laser; The second detection unit is used to receive the second reflected laser and generate a second detection signal, the second detection signal carries a second incident position signal of the second reflected laser on the second detection unit; and the second detection unit includes a second preset point position; The control module is also electrically connected to the second detection unit, and is used to receive the second detection signal, determine a second adjustment signal according to the second detection signal and the second preset point, and output the second adjustment signal to the calibration adjustment module, so as to control the calibration adjustment module to adjust the emission angle of the detection laser until the relationship between the first incident position and the first preset point meets the first preset requirement, and the relationship between the second incident position and the second preset point meets the second preset requirement.

3. The calibration system according to claim 1, characterized in that: The calibration and adjustment module comprises: at least one rotating reflection unit and at least one driving unit, wherein the driving unit is correspondingly connected to the rotating reflection unit; The driving unit is electrically connected to the control module and connected to the rotating reflection unit; the driving unit is used to drive the rotating reflection unit to rotate according to the first adjustment signal to adjust the emission angle of the detection laser.

4. The calibration system according to claim 3, characterized in that: The calibration and adjustment module includes: a first rotating reflection unit, a second rotating reflection unit, a first driving unit and a second driving unit; The first driving unit is electrically connected to the control module and connected to the first rotating reflecting unit; the first driving unit is used to drive the first rotating reflecting unit to rotate according to the first adjustment signal to adjust the emission angle of the detection laser; The second driving unit is electrically connected to the control module and connected to the second rotating reflecting unit; the second driving unit is used to drive the second rotating reflecting unit to rotate according to the first adjustment signal to adjust the emission angle of the detection laser.

5. The calibration system according to claim 2, characterized in that: The second transflective unit is further used to receive the first transmission laser and generate a second transmission laser; The calibration system also includes a laser elimination unit: The laser elimination unit is located on a propagation path of the second transmission laser and is used for receiving the second transmission laser.

6. The calibration system according to claim 2, characterized in that: The reflectivity of the second transflective unit is greater than or equal to the reflectivity of the first transflective unit.

7. The calibration system according to claim 2, characterized in that: The first preset deflection angle and the second preset deflection angle are equal.

8. The calibration system according to claim 1, characterized in that: The calibration system further comprises a housing for accommodating the first calibration module; The housing includes at least two positioning pins; the laser includes at least two positioning holes; The positioning pins and the positioning holes are connected correspondingly and are used to fix the first calibration module on the propagation path of the detection laser.

9. The calibration system according to claim 1, characterized in that: The first preset requirement includes that the first incident position at least partially overlaps with the first preset point.

10. The calibration system according to claim 2, characterized in that: The second preset requirement includes that the second incident position at least partially overlaps with the second preset point.

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