A bell-shaped furnace for debinding and sintering and a method for using the same

Abstract

The present invention discloses a bell-shaped furnace for debinding and sintering and a method for using the bell-shaped furnace, which relates to the technical field of bell-shaped furnaces and includes a furnace body; it is characterized in that a thermal field control mechanism is provided on the furnace body, and the thermal field control mechanism includes: a first heating mechanism, which is provided on the furnace body and is used for high-temperature sintering; a second heating mechanism, which is provided on the furnace body and is used for low-temperature preheating and debinding; and a temperature detection mechanism. The present invention integrates the first heating mechanism and the second heating mechanism in the same bell-shaped furnace by providing a thermal field control mechanism, thereby achieving a seamless connection between low-temperature debinding and high-temperature sintering; this method omits the intermediate material transfer link, effectively avoiding the problem of material damage caused by transfer, while reducing the temperature loss during the transfer process, and significantly reducing energy consumption; this integrated design not only improves production efficiency, but also ensures the continuity and stability of the process.

Description

Technical Field

[0001] The invention relates to the technical field of bell furnaces, and in particular to a debinding and sintering integrated bell furnace and a use method thereof. Background Art

[0002] The bell furnace is an industrial heating equipment, widely used in processes such as semiconductor silicon annealing, semiconductor silicon carbide oxidation and semiconductor nitride ceramic sintering; it gets its name from its unique structural design - the top of the furnace is shaped like a bell and can be easily moved up and down to load and unload workpieces.

[0003] In the prior art, bell furnaces are mainly used to sinter oxide ceramic structural parts such as alumina, zirconium oxide, yttrium oxide, etc. for semiconductors. During the sintering process, it is necessary to remove the binder first, that is, to remove the additives in the ceramic molding, and then sintering.

[0004] However, the bell furnace still has the following defects during use:

[0005] Due to the limited temperature control accuracy of existing bell furnaces, the current sintering process requires the ceramic material to undergo low-temperature debinding in a special device and then be transferred to another device to complete high-temperature sintering. During this conversion process, even slight vibrations may cause difficult-to-detect microcracks in the ceramic material, especially for electrostatic chucks manufactured by tape casting and containing multi-layer electrode structures. This is particularly prominent; in the transfer from debinding to sintering, microcracks are easily formed in the ceramic matrix, and these problems are often only exposed in the subsequent high-temperature sintering stage, which ultimately leads to defects in the finished product, which not only wastes raw materials but also increases energy consumption;

[0006] In addition, although there are furnaces on the market that integrate debinding and sintering functions, these devices still have difficulties in accurately controlling the specific temperature of each processing stage; this lack of temperature control accuracy directly leads to unstable product quality. Summary of the invention

[0007] In order to overcome the above technical problems, the purpose of the present invention is to provide a debinding and sintering integrated bell-shaped furnace and a method of using the same, so as to solve the problem of low temperature control accuracy of the existing debinding and sintering integrated bell-shaped furnace mentioned in the above background technology, which affects product quality.

[0008] The purpose of the present invention can be achieved through the following technical solutions:

[0009] A debinding and sintering integrated bell-shaped furnace, comprising a furnace body; a thermal field control mechanism is arranged on the furnace body, and the thermal field control mechanism comprises:

[0010] A first heating mechanism, which is disposed in the furnace body and is used for high-temperature sintering;

[0011] A second heating mechanism, which is disposed in the furnace body and is used for low-temperature preheating and debinding;

[0012] and a temperature detection mechanism, the temperature detection mechanism comprising a K-type thermocouple and a B-type thermocouple; the K-type thermocouple is arranged in the furnace body and is used to detect a first temperature T1 inside the furnace body; the B-type thermocouple is arranged in the furnace body and is used to detect a second temperature T2 inside the furnace body;

[0013] The ideal temperature and the detected temperature in the furnace at the same time are T and t respectively;

[0014] When T<600℃, t=T1;

[0015] When T>700℃, t=T2;

[0016] When 600℃≤T≤700℃, t=[100-(T-600)]%×T1+(T-600)%×T2.

[0017] Preferably, the second heating mechanism comprises a heater and a delivery pipe; the heater is installed in a shell outside the furnace body; the output end of the heater is connected to the inside of the furnace body through the delivery pipe;

[0018] The outer cover of the heater is provided with a protective cover; the inner wall of the protective cover is provided with a heat insulation layer.

[0019] Preferably, the temperature detection mechanism further includes a driving mechanism; the driving mechanism is installed outside the furnace body; the driving mechanism is used to drive the K-type thermocouple to move, so that when the temperature is greater than the maximum detection temperature of the K-type thermocouple, the K-type thermocouple can be pulled out of the furnace body;

[0020] An isolation cover is arranged in the furnace body; when the K-type thermocouple is plugged into the furnace body, the isolation cover covers the K-type thermocouple.

[0021] Preferably, the driving mechanism includes a mounting seat, a motor, a screw and a slide; the mounting seat is fixed to the outer wall of the furnace body, the motor is mounted on the mounting seat, the screw is rotatably connected to the mounting seat, the output end of the motor is coaxially connected to the mounting seat, the slide is slidably connected to the mounting seat, and the slide is threadedly connected to the screw, and the K-type thermocouple is mounted on the slide; the motor is used to drive the K-type thermocouple to translate along its axis.

[0022] Preferably, the driving mechanism further comprises a belt and two wheels; one of the wheels is coaxially connected to the output end of the motor, the other wheel is coaxially connected to the screw rod, and the belt is tensioned on the two wheels.

[0023] Preferably, the temperature detection mechanism further comprises an electric control cabinet arranged on one side of the shell, and the electric control cabinet is connected to the first heating mechanism, the heater, the K-type thermocouple and the B-type thermocouple through electrical control.

[0024] Preferably, the furnace body is formed by splicing a plurality of foamed corundum ceramics; gaps are provided between adjacent foamed corundum ceramics to allow thermal expansion.

[0025] Preferably, a material platform is provided below the furnace body, and a translation mechanism and a lifting mechanism for driving the material platform to translate and lift are provided on the shell; a limiting mechanism is provided on the shell; when the translation mechanism drives the material platform to move to align with the bottom opening of the furnace body, the material platform conflicts with the limiting mechanism, and then the lifting mechanism can be used to drive the material platform to rise to seal the bottom opening of the furnace body.

[0026] Preferably, a binder removal mechanism is provided on the top of the furnace body; the binder removal mechanism comprises a fume processor provided on one side of the shell, at least one binder removal hole is provided on the top of the furnace body, and the binder removal hole is connected to the fume processor through an exhaust pipe;

[0027] A blower is installed on the exhaust pipe; the blower is used to introduce harmful gases generated in the furnace body into the flue gas treatment device.

[0028] A method for using a debinding and sintering integrated bell-shaped furnace comprises the following steps:

[0029] Step 1, low-temperature debinding: The furnace body is heated by the second heating mechanism so that the temperature inside the furnace body rises from room temperature to the debinding temperature, thereby performing low-temperature debinding on the materials in the furnace body; in this process, the first temperature T1 measured by the K-type thermocouple is used as the detection temperature t; by comparing the detection temperature t with the ideal temperature T at the same time, the temperature inside the furnace body is adjusted by the second heating mechanism until the detection temperature t matches the ideal temperature T at the same time;

[0030] Step 2, high temperature sintering: the material in the furnace body is sintered at high temperature by the first heating mechanism; in this process, when the ideal temperature T at a certain moment is lower than 600°C, the first temperature T1 measured by the K-type thermocouple is used as the detection temperature t at the same moment; when the ideal temperature T at a certain moment is higher than 700°C, the second temperature T2 measured by the B-type thermocouple is used as the detection temperature t at the same moment; when the ideal temperature T at a certain moment is 600-700°C, the detection temperature t is calculated by the formula t=[100-(T-600)]%×T1+(T-600)%×T2; by comparing the detection temperature t with the ideal temperature T at the same moment, the temperature in the furnace body is adjusted by the first heating mechanism until the detection temperature t matches the ideal temperature T at the same moment.

[0031] Beneficial effects of the present invention:

[0032] 1. By setting up a thermal field control mechanism, the first heating mechanism and the second heating mechanism are integrated in the same bell-shaped furnace, realizing the seamless connection between low-temperature debinding and high-temperature sintering; this method omits the intermediate material transfer link, effectively avoiding the material damage caused by transfer, while reducing the temperature loss during the transfer process and significantly reducing energy consumption; this integrated design not only improves production efficiency, but also ensures the continuity and stability of the process;

[0033] 2. By setting up a temperature detection mechanism, K-type thermocouples and B-type thermocouples are used in combination. This method ensures the smooth transition detection of the temperature in the furnace from a low temperature state to a high temperature state, thereby providing precise control of the temperature in the furnace during the entire high-temperature sintering process, improving the accuracy of temperature control, and helping to achieve more stable process conditions; this gradual replacement method not only ensures the continuity and accuracy of the measurement, but also enables the temperature changes in the entire process to be accurately captured, thereby optimizing the effect of high-temperature sintering;

[0034] 3. By setting up a debinding mechanism, the harmful gases generated during the low-temperature debinding process can be quickly purified, significantly reducing the impact on the environment and improving the quality of the working environment; this design not only helps to protect the environment, but also improves the safety of the operation site and the working conditions of employees. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] The present invention will be further described below in conjunction with the accompanying drawings.

[0036] Figure 1 It is a schematic diagram of the overall three-dimensional structure of the present invention;

[0037] Figure 2 It is a schematic diagram of the main cutaway enlarged structure of the present invention;

[0038] Figure 3 The present invention Figure 2 A schematic diagram of the enlarged structure of the middle A area;

[0039] Figure 4 This is a schematic diagram of the main enlarged structure of the driving mechanism of the present invention;

[0040] Figure 5 It is a schematic diagram of an enlarged top view of the driving mechanism of the present invention;

[0041] Figure 6 It is a schematic diagram of the side cutaway structure of the present invention;

[0042] Figure 7 It is a schematic diagram of the enlarged structure of the present invention from top view;

[0043] Figure 8 It is a flow chart of the method of the present invention.

[0044] In the figure: 1. Shell; 2. Furnace body; 3. Thermal field control mechanism; 31. First heating mechanism; 32. Second heating mechanism; 321. Heater; 322. Delivery pipe; 323. Protective cover; 33. Temperature detection mechanism; 331. K-type thermocouple; 332. B-type thermocouple; 333. Driving mechanism; 3331. Mounting seat; 3332. Motor; 3333. Screw rod; 3334. Rotating wheel; 3335. Belt; 3336. Sliding seat; 3337. Isolation cover; 334. Electric control cabinet; 4. Material platform; 5. Translation mechanism; 6. Lifting mechanism; 7. Limiting mechanism; 8. Glue removal mechanism; 81. Glue removal hole; 82. Exhaust pipe. DETAILED DESCRIPTION

[0045] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0046] like Figure 1-Figure 7 As shown, a debinding and sintering integrated bell-shaped furnace, such as Figure 1-Figure 3 As shown, it includes a furnace body 2; a thermal field control mechanism 3 is arranged on the furnace body 2, and the thermal field control mechanism 3 includes: a first heating mechanism 31, the first heating mechanism 31 is arranged in the furnace body 2 and is used for high-temperature sintering; a second heating mechanism 32, the second heating mechanism 32 is arranged in the furnace body 2 and is used for low-temperature preheating and debinding; and a temperature detection mechanism 33, the temperature detection mechanism 33 includes a K-type thermocouple 331 and a B-type thermocouple 332; the K-type thermocouple 331 is arranged in the furnace body 2 and is used to detect a first temperature T1 inside the furnace body 2; the B-type thermocouple 332 is arranged in the furnace body 2 and is used to detect a second temperature T2 inside the furnace body 2;

[0047] The ideal temperature and the detection temperature at the same time in the furnace body 2 are T and t respectively; it can be understood that the ideal temperature refers to the temperature at which the material can achieve the best sintering effect during the high-temperature sintering period; this temperature is determined by repeated sintering experiments to ensure that the sintering performance of the material is optimal at this temperature;

[0048] When T<600℃, t=T1;

[0049] When T>700℃, t=T2;

[0050] When 600℃≤T≤700℃, t=[100-(T-600)]%×T1+(T-600)%×T2.

[0051] It should be noted that the design of the integrated bell-shaped furnace for debinding and sintering omits the intermediate material transfer process, which solves the problem of easy damage to materials during transfer, while reducing temperature loss during transfer and energy consumption.

[0052] Taking a bell-shaped furnace of model FZP (T) 425 / 17 with a furnace body size of 1400×550×550mm as an example, the electrostatic chuck is subjected to debinding and sintering. During the low-temperature debinding process, the second heating mechanism 32 is started to gradually increase the temperature inside the furnace body 2 and keep it warm according to the following steps. During the whole process, only the K-type thermocouple 331 is used for temperature monitoring because all temperatures are within its detection range: from room temperature to 100°C, it takes 420min; at 10 Keep warm at 0℃ for 120min; then heat to 150℃, which takes 1080min, and keep warm at this temperature for 120min; then heat to 180℃, which takes 900min, and keep warm for 120min; then heat to 220℃, which takes 600min, and keep warm for 120min; then heat to 250℃, which takes 180min, and keep warm for 60min; finally heat to 380℃, which takes 600min, and keep warm at this temperature for 120min. Through the above steps, the temperature setting of the entire low-temperature debinding work is completed; during the whole process, the K-type thermocouple 331 continuously detects the temperature inside the furnace body 2 to ensure the accuracy of temperature control, thereby achieving efficient low-temperature debinding operation;

[0053] After the low-temperature debinding work is completed, when the high-temperature sintering is carried out, the temperature is gradually increased and kept warm through the first heating mechanism 31, and the specific steps are as follows: first, the temperature is increased from the initial state to 450°C, which takes 150 minutes; then the temperature is increased to 600°C, which takes 210 minutes; then the temperature is further increased to 800°C, which also takes 210 minutes; then the temperature is increased to 1250°C, which takes 90 minutes; then the temperature is further increased to 1450°C, which takes 170 minutes; finally, the temperature is increased to 1600°C, which takes 120 minutes, and the temperature is kept at this temperature for 200 minutes; after the entire high-temperature sintering process is completed, the furnace is automatically The first heating mechanism 31 uses a high-purity special protection type silicon molybdenum rod as a heating element, and its rated power is 110KW. It can be understood that the high-purity special protection type silicon molybdenum rod is a prior art and will not be described in detail. According to different temperature ranges, the heating power is dynamically adjusted: 30KW is used at 450-800℃; 50KW is used at 800-1250℃; 70KW is used during the heating process of 1250-1600℃; and in the 1600℃ insulation stage, the power is reduced to 45KW. This precise power control ensures an efficient and stable high-temperature sintering process.

[0054] During the high-temperature sintering process, in order to ensure the accuracy of temperature measurement, since the temperature in the furnace body 2 may exceed the maximum detection range of the K-type thermocouple 331 and also be lower than the minimum detection range of the B-type thermocouple 332, it is necessary to gradually switch from the K-type thermocouple 331 to the B-type thermocouple 332; specifically, in the initial stage, when the temperature in the furnace body 2 is within the effective range of the K-type thermocouple 331, only the K-type thermocouple 331 is used for temperature measurement; as the temperature rises to the overlapping range that both the K-type thermocouple 331 and the B-type thermocouple 332 can accurately detect (for example, 600°C to 700°C), the K-type thermocouple 331 and the B-type thermocouple 332 are gradually switched. The detection ratio of the two thermocouples is changed, and the detection temperature t is calculated by a formula to smoothly transition and maintain measurement accuracy. For example, when T is 620°C, t=[100-(T-600)]%×T1+(T-600)%×T2 is obtained by substituting into the formula; when the temperature exceeds 700°C and enters the effective range of the B-type thermocouple 332, the temperature measurement is completely dependent on the B-type thermocouple 332; this method ensures a smooth transition from a low temperature state to a high temperature state, thereby providing precise control of the temperature in the furnace body 2 during the entire high temperature sintering process, improving the accuracy of temperature control, and helping to achieve more stable process conditions;

[0055] This gradual replacement method not only ensures the continuity and accuracy of the measurement, but also enables the temperature changes throughout the process to be accurately captured, thereby optimizing the effect of high-temperature sintering.

[0056] like Figure 1-Figure 3 As shown, the second heating mechanism 32 includes a heater 321 and a delivery pipe 322; it can be understood that the heater 321 is a prior art and will not be described in detail; the heater 321 is installed in the shell 1 outside the furnace body 2; the output end of the heater 321 is connected to the inside of the furnace body 2 through the delivery pipe 322; the outer cover of the heater 321 is provided with a protective cover 323; the inner wall of the protective cover 323 is provided with a heat insulation layer, which is a prior art and will not be described in detail. The heat insulation layer is used to reduce the heat loss of the heater 321 during operation, thereby ensuring that the preheated air is close to the ideal temperature.

[0057] It should be noted that, during the low-temperature debinding process, the air is preheated by the heater 321, and the heated air is introduced into the furnace body 2 through the conveying pipe 322, so that the material in the furnace body 2 is heated by heat convection; the preheating power of the heater 321 is 13kw, and the production condition usage is 40%.

[0058] like Figure 2-Figure 5As shown, the temperature detection mechanism 33 also includes a driving mechanism 333; the driving mechanism 333 is installed on the outside of the furnace body 2; the driving mechanism 333 is used to drive the K-type thermocouple 331 to move, so that when the temperature is greater than the highest detection temperature of the K-type thermocouple 331, the K-type thermocouple 331 can be pulled out of the furnace body 2; the driving mechanism 333 includes a mounting seat 3331, a motor 3332, a screw rod 3333 and a slide seat 3336; the mounting seat 3331 is fixedly arranged on the outer wall of the furnace body 2, the motor 3332 is installed on the mounting seat 3331, the screw rod 3333 is rotatably connected to the mounting seat 3331, the output end of the motor 3332 is coaxially connected to the mounting seat 3331, and the slide seat 3336 is slidably connected to The mounting seat 3331 is provided with a slide seat 3336 which is threadedly connected to the screw rod 3333, and the K-type thermocouple 331 is installed on the slide seat 3336; the motor 3332 is used to drive the K-type thermocouple 331 to translate along its axis; an isolation cover 3337 is provided in the furnace body 2; when the K-type thermocouple 331 is plugged into the furnace body 2, the isolation cover 3337 is provided on the K-type thermocouple 331; the detection end of the K-type thermocouple 331 is protected by the isolation cover 3337 to prevent the K-type thermocouple 331 from being damaged when it moves, and at the same time, the furnace body 2 is isolated from the inside and the outside by the isolation cover 3337, so that the movement of the K-type thermocouple 331 will not affect the temperature environment of the furnace body 2, thereby ensuring that the temperature in the furnace body 2 is uniform and stable. Among them, the isolation cover 3337 is made of a material with good thermal conductivity, such as 99 corundum, that is, high-purity alumina, so that the K-type thermocouple 331 can accurately detect the actual temperature inside the furnace body 2 through the heat conduction of the isolation cover 3337. At the same time, the setting of the isolation cover 3337 provides a certain guide for the movement of the K-type thermocouple 331 and prevents the K-type thermocouple 331 from excessive thermal melting deformation at high temperature.

[0059] It should be noted that when the temperature in the furnace body 2 is greater than the temperature detection range of the K-type thermocouple 331, the K-type thermocouple 331 is abandoned at this time. In order to prevent the K-type thermocouple 331 from being damaged by excessively high temperature, a driving mechanism 333 is provided so that when the temperature in the furnace body 2 is greater than the detection range of the K-type thermocouple 331, the K-type thermocouple 331 is pulled out from the furnace body 2. When in use, the motor 3332 drives the screw rod 3333 to rotate, and the screw rod 3333 drives the slide seat 3336 to move, thereby driving the detection end of the K-type thermocouple 331 to move in the isolation cover 3337 until the detection end of the K-type thermocouple 331 is moved out of the furnace body 2. At this time, although the K-type thermocouple 331 has been moved out of the furnace body 2, due to the provision of the isolation cover 3337, it can be ensured that the furnace body 2 is still in a relatively sealed state, and the temperature in the furnace body 2 will not change due to the movement of the K-type thermocouple 331, thereby ensuring the high-temperature sintering effect on the product.

[0060] like Figure 2-Figure 5As shown, the driving mechanism 333 also includes a belt 3335 and two rotating wheels 3334 ; one of the rotating wheels 3334 is coaxially connected to the output end of the motor 3332 , and the other rotating wheel 3334 is coaxially connected to the screw rod 3333 , and the belt 3335 is tensioned on the two rotating wheels 3334 .

[0061] It should be noted that since the space between the shell 1 and the furnace body 2 is limited, the space occupied by the driving mechanism 333 in the width direction between the shell 1 and the furnace body 2 can be reduced by arranging a rotating wheel 3334 and a belt 3335, thereby ensuring that the driving mechanism 333 can be hidden in the shell 1 for use; specifically, one of the rotating wheels 3334 is driven to rotate by the motor 3332, and the other rotating wheel 3334 is driven to rotate by the belt 3335, thereby driving the screw rod 3333 to rotate, thereby driving the K-type thermocouple 331 to move.

[0062] like Figure 1-Figure 3 As shown, the temperature detection mechanism 33 also includes an electric control cabinet 334 arranged on one side of the shell 1, and the electric control cabinet 334 is connected to the first heating mechanism 31, the heater 321, the K-type thermocouple 331 and the B-type thermocouple 332 through electrical control; it can be understood that the electric control cabinet 334 is a prior art, and the temperature inside the furnace body 2 is measured according to the K-type thermocouple 331 and the B-type thermocouple 332. The output power of the high-temperature heating element 31 and the heater 321 is controlled by the electric control cabinet 334 to achieve accurate adjustment of the temperature inside the furnace body 2, improve the accuracy of temperature control, and ensure the uniformity of the temperature field.

[0063] like Figure 1-Figure 2 As shown, the furnace body 2 is formed by splicing together a plurality of high-purity foamed corundum ceramics; gaps are provided between adjacent high-purity foamed corundum ceramics to allow thermal expansion; it is understandable that high-purity foamed corundum ceramics are prior art and will not be described in detail. The furnace body 2 structure formed by splicing together a plurality of high-purity foamed corundum ceramics can reduce the overall processing difficulty. At the same time, the splicing gaps between adjacent high-purity foamed corundum ceramics can reserve expansion space for the furnace body 2 when it heats up and expands, thereby preventing the problem of slag falling caused by excessive squeezing between adjacent high-purity foamed corundum ceramics and improving the service life of the high-purity foamed corundum ceramics.

[0064] like Figure 1-Figure 2 and Figure 6As shown, a material platform 4 is arranged below the furnace body 2, and a translation mechanism 5 and a lifting mechanism 6 for driving the material platform 4 to translate and lift are arranged on the shell 1; it can be understood that the present application does not limit the specific structure and installation method of the material platform 4, the translation mechanism 5 and the lifting mechanism 6, and only one feasible technical solution is provided below; a limiting mechanism 7 is arranged on the shell 1; when the translation mechanism 5 drives the material platform 4 to move to the bottom opening of the furnace body 2, the material platform 4 conflicts with the limiting mechanism 7, and then the lifting mechanism 6 can drive the material platform 4 to rise to seal the bottom opening of the furnace body 2.

[0065] It should be noted that when in use, the material to be debinded and sintered is positioned and placed on the material platform 4, and then the material platform 4 is driven by the translation mechanism 5 to move to just below the bottom opening of the furnace body 2. At this time, the material platform 4 conflicts with the limiting mechanism 7, and then the material platform 4 is driven up by the lifting mechanism 6, driving the material platform 4 to seal the bottom opening of the furnace body 2. At this time, the material on the material platform 4 moves into the furnace body 2, and the furnace body 2 is in a relatively sealed state, which is convenient for the next step of debinding and sintering.

[0066] like Figure 1 and Figure 7 As shown, a debinding mechanism 8 is provided on the top of the furnace body 2; it can be understood that the present application does not limit the specific structure and installation method of the debinding mechanism 8, and only a feasible technical solution is provided below; the debinding mechanism 8 includes a flue gas processor arranged on one side of the shell 1, and at least one debinding hole 81 is opened on the top of the furnace body 2, and the debinding hole 81 is connected to the flue gas processor through an exhaust pipe 82; a blower is installed on the exhaust pipe 82; the blower is used to introduce harmful gases generated in the furnace body 2 into the flue gas processor.

[0067] It should be noted that, during the work of positioning and debinding the material, the material in the furnace body 2 is heated by the heater 321. When the K-type thermocouple 331 detects that the temperature in the furnace body 2 reaches the debinding temperature, the blower is started to allow the harmful gases emitted by the heated material in the furnace body 2 to be introduced into the flue gas processor through the exhaust pipe 82, and the harmful gases are purified by the flue gas processor before being discharged. During this process, the heater 321 continuously introduces preheated air into the furnace body 2 to reduce the temperature change in the furnace body 2, ensure the uniformity of the temperature field, and realize the debinding work. It can be understood that in order to reduce the influence of the debinding mechanism 8 on the high-temperature sintering work, an electromagnetic valve is installed on the exhaust pipe 82 to ensure the stability of the temperature environment in the furnace body 2 during high-temperature sintering. It can be understood that the electromagnetic valve is a prior art and will not be described in detail.

[0068] like Figure 1-Figure 8 As shown, a method for using a debinding and sintering integrated bell-shaped furnace comprises the following steps:

[0069] Step 1, low-temperature debinding: The furnace body 2 is heated by the second heating mechanism 32, so that the temperature inside the furnace body 2 rises from room temperature to the debinding temperature, thereby performing low-temperature debinding on the material in the furnace body 2; in this process, the first temperature T1 measured by the K-type thermocouple 331 is used as the detection temperature t; by comparing the detection temperature t with the ideal temperature T at the same time, the temperature inside the furnace body 2 is adjusted by the second heating mechanism 32 until the detection temperature t matches the ideal temperature T at the same time;

[0070] Step 2, high temperature sintering: The material in the furnace body 2 is sintered at high temperature by the first heating mechanism 31; in this process, when the ideal temperature T at a certain moment is lower than 600°C, the first temperature T1 measured by the K-type thermocouple 331 is used as the detection temperature t at the same moment; when the ideal temperature T at a certain moment is higher than 700°C, the second temperature T2 measured by the B-type thermocouple 332 is used as the detection temperature t at the same moment; when the ideal temperature T at a certain moment is 600-700°C, the detection temperature t is calculated by the formula t=[100-(T-600)]%×T1+(T-600)%×T2; by comparing the detection temperature t with the ideal temperature T at the same moment, the temperature in the furnace body 2 is adjusted by the first heating mechanism 31 until the detection temperature t matches the ideal temperature T at the same moment.

[0071] It should be understood that the method of adjusting the temperature inside the furnace body 2 by the first heating mechanism 31 (or the second heating mechanism 32) is a prior art. For example, when the detected temperature t is lower than the ideal temperature T, the heating power of the first heating mechanism 31 (or the second heating mechanism 32) can be increased to increase the value of the detected temperature t to the value of the ideal temperature T; when the detected temperature t is higher than the ideal temperature T, the heating power of the first heating mechanism 31 (or the second heating mechanism 32) can be reduced to reduce the value of the detected temperature t to the value of the ideal temperature T.

[0072] In the description of the present invention, it should be understood that the terms "upper", "lower", "left", "right", etc. indicate directions or positional relationships based on the directions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific direction and a specific direction structure and operation, and therefore, cannot be understood as a limitation on the present invention. In addition, "first" and "second" are only for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, unless otherwise specified, "multiple" means two or more.

[0073] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", etc. should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be an indirect connection through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0074] The above is a detailed description of an embodiment of the present invention, but the content is only a preferred embodiment of the present invention and cannot be considered to limit the scope of implementation of the present invention. All equivalent changes and improvements made within the scope of the present invention should still fall within the scope of the patent coverage of the present invention.

Claims

1. A debinding and sintering integrated bell-shaped furnace, comprising a furnace body (2); characterized in that: The furnace body (2) is provided with a thermal field control mechanism (3), and the thermal field control mechanism (3) comprises: A first heating mechanism (31), the first heating mechanism (31) being arranged on the furnace body (2) and used for high-temperature sintering; A second heating mechanism (32), the second heating mechanism (32) being arranged on the furnace body (2) and used for low-temperature preheating and debinding; and a temperature detection mechanism (33), the temperature detection mechanism (33) comprising a K-type thermocouple (331) and a B-type thermocouple (332); the K-type thermocouple (331) is arranged on the furnace body (2) and is used to detect a first temperature T1 inside the furnace body (2); the B-type thermocouple (332) is arranged on the furnace body (2) and is used to detect a second temperature T2 inside the furnace body (2); The ideal temperature and the detected temperature in the furnace body (2) at the same time are T and t respectively; When T<600℃, t=T1; When T>700℃, t=T2; When 600℃≤T≤700℃, t=[100-(T-600)]%×T1+(T-600)%×T2; By comparing the detected temperature t with the ideal temperature T at the same time, the temperature inside the furnace body (2) is adjusted by the first heating mechanism (31) or the second heating mechanism (32) until the detected temperature t matches the ideal temperature T at the same time.

2. The debinding and sintering integrated bell-shaped furnace according to claim 1, characterized in that: The second heating mechanism (32) comprises a heater (321) and a delivery pipe (322); the heater (321) is installed in a shell (1) outside the furnace body (2); the output end of the heater (321) is connected to the interior of the furnace body (2) through the delivery pipe (322); The heater (321) is externally covered with a protective cover (323); and the inner wall of the protective cover (323) is provided with a heat insulation layer.

3. The debinding and sintering integrated bell-shaped furnace according to claim 2, characterized in that: The temperature detection mechanism (33) further comprises a driving mechanism (333); the driving mechanism (333) is installed outside the furnace body (2); the driving mechanism (333) is used to drive the K-type thermocouple (331) to be inserted into or removed from the furnace body (2); An isolation cover (3337) is provided in the furnace body (2); when the K-type thermocouple (331) is plugged into the furnace body (2), the isolation cover (3337) covers the K-type thermocouple (331).

4. The debinding and sintering integrated bell-shaped furnace according to claim 3, characterized in that: The driving mechanism (333) comprises a mounting seat (3331), a motor (3332), a screw (3333) and a slide seat (3336); the mounting seat (3331) is fixedly arranged on the outer wall of the furnace body (2); the motor (3332) is mounted on the mounting seat (3331); the screw (3333) is rotatably connected to the mounting seat (3331); the output end of the motor (3332) is coaxially connected to the mounting seat (3331); the slide seat (3336) is slidably connected to the mounting seat (3331); the slide seat (3336) is threadedly connected to the screw (3333); and the K-type thermocouple (331) is mounted on the slide seat (3336); the motor (3332) is used to drive the K-type thermocouple (331) to translate along its axis.

5. The debinding and sintering integrated bell-shaped furnace according to claim 4, characterized in that: The driving mechanism (333) further comprises a belt (3335) and two rotating wheels (3334); one of the rotating wheels (3334) is coaxially connected to the output end of the motor (3332), the other rotating wheel (3334) is coaxially connected to the screw rod (3333), and the belt (3335) is tensioned on the two rotating wheels (3334).

6. The debinding and sintering integrated bell-shaped furnace according to claim 2, characterized in that: The temperature detection mechanism (33) further comprises an electric control cabinet (334) arranged on one side of the housing (1); the electric control cabinet (334) is electrically controlled and connected to the first heating mechanism (31), the heater (321), the K-type thermocouple (331), and the B-type thermocouple (332).

7. The debinding and sintering integrated bell-shaped furnace according to claim 1, characterized in that: The furnace body (2) is formed by splicing together a plurality of foamed corundum ceramics.

8. The debinding and sintering integrated bell-shaped furnace according to claim 6, characterized in that: A material platform (4) is arranged below the furnace body (2), and a translation mechanism (5) and a lifting mechanism (6) for driving the material platform (4) to translate and lift are arranged on the shell (1); a limit mechanism (7) is arranged on the shell (1); when the translation mechanism (5) drives the material platform (4) to move to a position aligned with the bottom opening of the furnace body (2), the material platform (4) contacts the limit mechanism (7), and then the lifting mechanism (6) can drive the material platform (4) to rise to seal the bottom opening of the furnace body (2).

9. The debinding and sintering integrated bell-shaped furnace according to claim 1, characterized in that: A binder removal mechanism (8) is provided on the top of the furnace body (2); the binder removal mechanism (8) comprises a flue gas processor arranged on one side of the shell (1); at least one binder removal hole (81) is opened on the top of the furnace body (2); the binder removal hole (81) is connected to the flue gas processor via an exhaust pipe (82); A blower is installed on the exhaust pipe (82); the blower is used to introduce harmful gases generated in the furnace body (2) into the flue gas treatment device.

10. The method for using the debinding and sintering integrated bell-shaped furnace according to any one of claims 1 to 9, characterized in that: The following steps are involved: Step 1, low-temperature debinding: the furnace body (2) is heated by the second heating mechanism (32) so that the temperature inside the furnace body (2) rises from room temperature to the debinding temperature, thereby performing low-temperature debinding on the material inside the furnace body (2); in this process, a first temperature T1 measured by a K-type thermocouple (331) is used as a detection temperature t; the detection temperature t is compared with an ideal temperature T at the same time, and then the temperature inside the furnace body (2) is adjusted by the second heating mechanism (32) until the detection temperature t matches the ideal temperature T at the same time; Step 2, high temperature sintering: the material in the furnace body (2) is subjected to high temperature sintering by means of the first heating mechanism (31); during this process, when the ideal temperature T at a certain moment is lower than 600° C., a first temperature T1 measured by a K-type thermocouple (331) is used as the detection temperature t at the same moment; when the ideal temperature T at a certain moment is higher than 700° C., a second temperature T2 measured by a B-type thermocouple (332) is used as the detection temperature t at the same moment; when the ideal temperature T at a certain moment is between 600 and 700° C., the detection temperature t is calculated by means of the formula t=[100-(T-600)]%×T1+(T-600)%×T2; and the detection temperature t is compared with the ideal temperature T at the same moment, and then the temperature in the furnace body (2) is adjusted by means of the first heating mechanism (31) until the detection temperature t matches the ideal temperature T at the same moment.

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