Rotary driving device for auxiliary chamber of single crystal furnace and working principle of rotary driving device

Abstract

The invention relates to the technical field of single crystal furnace driving, in particular to a single crystal furnace auxiliary chamber rotation driving device and a working principle thereof.The single crystal furnace auxiliary chamber rotation driving device comprises a supporting frame and a plurality of fixing seats arranged on the supporting frame, and the rotation driving device further comprises a moving seat, a driving output assembly, a mounting assembly and a plugging assembly; the driving output assembly is arranged between the fixing seats, the moving seat is movably arranged on the supporting frame and connected with the driving output assembly, the mounting assembly is arranged on the moving seat, and the plugging assembly is arranged on the supporting frame and connected with the driving output assembly. When the driving output assembly adjusts the height of the moving seat, the blocking assembly is controlled to control the opening and closing of a discharging opening of the single crystal furnace auxiliary chamber; the single crystal furnace auxiliary chamber can be automatically installed and clamped, the installation mode that a worker fixes the single crystal furnace auxiliary chamber in the high altitude through a bolt is not needed, the installation period of the single crystal furnace auxiliary chamber is shortened, and meanwhile the follow-up disassembly and assembly work of the single crystal furnace auxiliary chamber is facilitated.

Description

Technical Field

[0001] The invention relates to the technical field of single crystal furnace driving, and more specifically to a single crystal furnace auxiliary chamber rotation driving device and its working principle. Background Art

[0002] With the continuous development of the world economy, the demand for efficient energy in modernization construction is growing. Photovoltaic power generation, as a green energy and a major energy source for sustainable development of mankind, is increasingly valued and developed by countries around the world. As a basic material for photovoltaic power generation, single crystal silicon wafers have a wide market demand. The Czochralski single crystal silicon growth method is a common single crystal growth method. Its growth process is to immerse the seed crystal into the melt in a single crystal furnace, and then carry out the seeding, shoulder release, shoulder rotation, equal diameter and finishing processes in sequence, and finally obtain a single crystal silicon rod.

[0003] During the crystal pulling process of the single crystal furnace, the single crystal furnace sub-chamber can be controlled to move in the vertical direction by controlling the operation of the rotary drive device, thereby separating the single crystal from the furnace body, and the single crystal can be unloaded by controlling the rotation of the single crystal furnace to separate from the furnace body. However, during the installation of the single crystal furnace sub-chamber, the existing single crystal furnace sub-chamber rotary drive device requires workers to install it on the optional drive device using bolts at high altitude, which is very inconvenient and time-consuming, and the disassembly, assembly and maintenance of the single crystal furnace sub-chamber also takes a long time. Summary of the invention

[0004] The object of the present invention is to provide a single crystal furnace sub-chamber rotation driving device to solve the problems raised in the above background technology.

[0005] To achieve the above object, the present invention provides the following technical solutions: A single crystal furnace auxiliary chamber rotation drive device, comprising a support frame and a plurality of fixed seats, wherein the plurality of fixed seats are arranged on the support frame, the rotation drive device further comprises a movable seat, a drive output assembly, a mounting assembly and a blocking assembly, wherein the drive output assembly is arranged between the fixed seats, the movable seat is movably arranged on the support frame and connected to the drive output assembly, the drive output assembly adjusts the height of the movable seat and controls its rotation when working, the mounting assembly is arranged on the movable seat and is used to install the single crystal furnace auxiliary chamber, the blocking assembly is arranged on the support frame and connected to the drive output assembly, and when the drive output assembly adjusts the height of the movable seat, the blocking assembly controls the opening and closing of the unloading port of the single crystal furnace auxiliary chamber; The mounting assembly includes a rotating seat and a monitoring clamping module. The rotating seat is movably arranged on one side of the support frame and connected to the movable seat. The monitoring clamping module is arranged on the rotating seat and is used to monitor the position of the single crystal furnace sub-chamber and clamp and fix the single crystal furnace sub-chamber.

[0006] A further technical solution of the present application: the drive output component includes a height adjustment structure and a rotation structure, the height adjustment structure is arranged on the support frame and connected to the fixed seat, the number of the movable seats is two, one of the movable seats is connected to the height adjustment structure, and the height adjustment structure adjusts the height of the movable seat when working, and the rotation structure is arranged on the support frame and connected to the other movable seat, and is used to control the rotation of the movable seat and the rotating seat.

[0007] A further technical solution of the present application: the height adjustment structure includes a positioning motor, a guide tube, a threaded rod and a screw sleeve, the guide tube is arranged on a support frame, the threaded rod is movably arranged in the guide tube, the positioning motor is arranged on the support frame and its output end is coaxially connected to the threaded rod, the screw sleeve is movably arranged in the guide tube and threadedly cooperates with the threaded rod, one of the movable seats is movably sleeved in the guide tube, the screw sleeve slides through the guide tube, and an annular groove that slides with the screw sleeve is formed on the inner wall of one of the movable seats.

[0008] A further technical solution of the present application is as follows: the rotating structure includes a steering motor, a drive shaft and a clamping strip, the steering motor is arranged on a support frame, the drive shaft is movably arranged on a fixed seat, wherein another movable seat is movably arranged on the drive shaft, the number of the clamping strip is at least one and is arranged on the drive shaft, the clamping strip and the movable seat are slidably matched, and the output end of the steering motor and the drive shaft are coaxially connected.

[0009] The present application has a further technical solution: the monitoring clamping module includes an upper clamping seat, a lower clamping seat, a monitoring transmission structure and a clamping execution structure, the upper clamping seat and the lower clamping seat are both arranged on a rotating seat, the lower clamping seat is arranged on one side of the upper clamping seat, and the clamping execution structure is arranged between the rotating seat and the lower clamping seat, and is used to perform the clamping and fixing work of the single crystal furnace sub-chamber. The monitoring transmission module is arranged on the upper clamping seat and connected to the clamping execution structure, and when the single crystal furnace sub-chamber passes through the upper clamping seat and moves toward the lower clamping seat, the monitoring transmission module is used to control the operation of the clamping execution structure.

[0010] The present application has a further technical solution: the clamping execution structure includes a guide frame, an outer sleeve, a piston rod, an inner tube, a connecting ring, a cylinder and a splint, the guide frame is arranged on a rotating seat, the inner tube is arranged on a rotating seat, the piston rod is movably arranged in the inner tube and is connected to the monitoring transmission module, the outer sleeve is movably sleeved on the outer wall of the inner tube, the outer sleeve and the guide frame are slidably matched and the two are connected by a spring, the connecting ring is arranged on the lower clamping seat, the number of the cylinders is several and the rings are arranged on the lower clamping seat, the number of the splints is several and the rings are arranged on the lower clamping seat, the splint is movably arranged on the lower splint and is elastically connected to the movable end of the cylinder, the cylinder is connected to the connecting ring through a connecting pipe, the outer sleeve is provided with an output hole, the output hole is provided with an electromagnetic valve, and the output hole is connected to the connecting ring.

[0011] The present application has a further technical solution: the monitoring transmission structure includes a resistance rod, a No. 1 pressure sensor and a push arm, the middle position of the resistance rod is hinged to the upper clamp seat and a torsion spring is provided at the hinge, the No. 1 pressure sensor is arranged at one end of the resistance rod, and the side of the resistance rod away from the No. 1 pressure sensor is movably connected through the push arm and the piston rod.

[0012] A further technical solution of the present application is as follows: the blocking assembly includes a closed mounting seat, an electric telescopic rod, a group of sealing plates, a guide rail, a slider and a top arm, the closed mounting seat is arranged on a rotating seat, a group of sealing plates are symmetrically and movably arranged on one side of the lower clamping seat, the sealing plates are semicircular, and each sealing plate is provided with a guide rail, the slider is movably arranged in the guide rail and the two are elastically connected, the top arm is movably arranged on the closed mounting seat and movably connected to the slider, the electric telescopic rod is arranged on the closed mounting seat and its movable end is connected to the top arm, a trigger structure is arranged on the closed mounting seat, and the trigger structure is electrically connected to the electric telescopic rod for monitoring the position of the moving seat and controlling the opening and closing of the electric telescopic rod.

[0013] A further technical solution of the present application is as follows: the trigger structure includes a trigger seat, a roller, a No. 2 pressure sensor and a recess, the trigger seat is arranged on a closed mounting seat, the roller is movably arranged on the trigger seat, the roller and the card strip are slidably matched, the No. 2 pressure sensor is arranged at an eccentric position of the roller, and the recess is arranged on the trigger seat and is located on the moving path of the No. 2 pressure sensor.

[0014] A working principle of the single crystal furnace auxiliary chamber rotation drive device applied to the above technical solution, the specific content of the working principle is as follows: S100: placing the single crystal furnace auxiliary chamber on the rotating seat, monitoring the position of the single crystal furnace auxiliary chamber through the monitoring clamping module, and clamping and fixing the single crystal furnace auxiliary chamber; S200: After the single crystal furnace completes the processing of the product, the product is lifted by the single crystal furnace auxiliary chamber, and the driving output component is controlled to work, firstly the moving seat, the rotating seat and the single crystal furnace auxiliary chamber are controlled to move upward, then the rotating seat is controlled to rotate to a set angle, and finally the driving output component is controlled to work so that the rotating seat and the single crystal furnace auxiliary chamber are moved downward to release the product; S300: During the upward movement of the rotating seat and the auxiliary chamber of the single crystal furnace, the driving output component can simultaneously control the operation of the blocking component to block the discharge port of the auxiliary chamber of the single crystal furnace, and during the downward movement of the rotating seat and the auxiliary chamber of the single crystal furnace, the blocking component can be controlled to open the discharge port of the auxiliary chamber of the single crystal furnace.

[0015] Compared with the prior art, the technical solution provided by the embodiment of the present invention has the following beneficial effects: The embodiment of the present invention arranges a driving output component, an installation component and a sealing component, and utilizes the linkage effect between mechanical structures. On the one hand, it can automatically monitor the position of the single crystal furnace sub-chamber during the installation of the single crystal furnace sub-chamber. Through the interference between the single crystal furnace sub-chamber and the interference rod, when the single crystal furnace sub-chamber reaches the set position on the rotating seat, the cylinder is controlled to extend and control the position of the clamping plate, so as to realize the automatic installation and clamping of the single crystal furnace sub-chamber. There is no need for staff to use bolts to fix the installation at high altitude, which shortens the installation period of the single crystal furnace sub-chamber and facilitates the subsequent disassembly and assembly of the single crystal furnace sub-chamber. On the other hand, when the single crystal furnace sub-chamber is moving in the vertical direction to unload the product, the opening and closing of the discharge port of the single crystal furnace sub-chamber can be automatically controlled to avoid the safety hazard of the product falling from high altitude due to the discharge port being in an open state during the up and down movement of the single crystal furnace sub-chamber. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 Schematic diagram of the structure of the single crystal furnace auxiliary chamber rotation drive device in an embodiment of the present invention; Figure 2 It is a schematic structural diagram of a driving output component in a rotation driving device for a sub-chamber of a single crystal furnace according to an embodiment of the present invention; Figure 3 A half-section view of a guide tube in a rotation drive device for a sub-chamber of a single crystal furnace according to an embodiment of the present invention; Figure 4 It is a structural schematic diagram of the installation components in the single crystal furnace auxiliary chamber rotation drive device according to an embodiment of the present invention; Figure 5 It is a structural schematic diagram of a monitoring clamping module in a single crystal furnace auxiliary chamber rotation driving device according to an embodiment of the present invention; Figure 6 It is a structural schematic diagram of a clamping execution structure in a rotation driving device for a sub-chamber of a single crystal furnace according to an embodiment of the present invention; Figure 7It is a structural schematic diagram of a blocking component in a rotation driving device for a sub-chamber of a single crystal furnace according to an embodiment of the present invention; Figure 8 Schematic diagram of the trigger structure in the single crystal furnace sub-chamber rotation drive device in an embodiment of the present invention.

[0017] Explanation of the symbols in the schematic diagram: 1-support frame, 2-fixed seat, 3-positioning motor, 4-steering motor, 5-guide tube, 6-drive shaft, 7-card strip, 8-movable seat, 9-threaded rod, 10-thread sleeve, 11-ring groove, 12-rotating seat, 13-upper clamp seat, 14-lower clamp seat, 15-resistance rod, 16-No. 1 pressure sensor, 17-guide frame, 18-outer sleeve, 19-inner tube, 20-piston rod, 21-solenoid valve, 22-push arm, 23-spring, 24-cylinder, 25-plywood, 26-connecting ring, 27-connecting tube, 28-closed mounting seat, 29-sealing plate, 30-guide rail, 31-slider, 32-top arm, 33-electric telescopic rod, 34-trigger seat, 35-roller, 36-No. 2 pressure sensor, 37-notch. DETAILED DESCRIPTION

[0018] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention. The present invention is further described below in combination with the embodiments.

[0019] See also Figure 1-Figure 8 In one embodiment of the present application, a single crystal furnace auxiliary chamber rotation drive device includes a support frame 1 and a plurality of fixed seats 2, and the plurality of fixed seats 2 are arranged on the support frame 1. The rotation drive device also includes a movable seat 8, a drive output component, a mounting component and a plugging component. The drive output component is arranged between the fixed seats 2. The movable seat 8 is movably arranged on the support frame 1 and connected to the drive output component. When the drive output component is working, the height of the movable seat 8 is adjusted and its rotation is controlled. The mounting component is arranged on the movable seat 8 and is used to install the single crystal furnace auxiliary chamber. The plugging component is arranged on the support frame 1 and connected to the drive output component. When the drive output component adjusts the height of the movable seat 8, the plugging component controls the opening and closing of the unloading port of the single crystal furnace auxiliary chamber. The mounting assembly includes a rotating seat 12 and a monitoring clamping module. The rotating seat 12 is movably arranged on one side of the support frame 1 and connected to the movable seat 8. The monitoring clamping module is arranged on the rotating seat 12 and is used to monitor the position of the single crystal furnace sub-chamber and clamp and fix the single crystal furnace sub-chamber.

[0020] In a specific case of this embodiment, the drive output assembly includes a height adjustment structure and a rotation structure. The height adjustment structure is arranged on the support frame 1 and connected to the fixed seat 2. There are two movable seats 8, one of which is connected to the height adjustment structure. The height adjustment structure adjusts the height of the movable seat 8 when working. The rotation structure is arranged on the support frame 1 and connected to the other movable seat 8, and is used to control the rotation of the movable seat 8 and the rotating seat 12.

[0021] In another specific case of the present embodiment, the height adjustment structure includes a positioning motor 3, a guide tube 5, a threaded rod 9 and a screw sleeve 10, the guide tube 5 is arranged on the support frame 1, the threaded rod 9 is movably arranged in the guide tube 5, the positioning motor 3 is arranged on the support frame 1 and its output end is coaxially connected with the threaded rod 9, the screw sleeve 10 is movably arranged in the guide tube 5 and threadedly matched with the threaded rod 9, one of the movable seats 8 is movably sleeved in the guide tube 5, the screw sleeve 10 slides through the guide tube 5, and one of the movable seats 8 has an inner wall formed with a ring groove 11 that slides with the screw sleeve 10.

[0022] It should be noted that the rotating structure includes a steering motor 4, a drive shaft 6 and a clamping strip 7. The steering motor 4 is arranged on a support frame 1, and the drive shaft 6 is movably arranged on a fixed seat 2, wherein another movable seat 8 is movably arranged on the drive shaft 6, and the number of the clamping strip 7 is at least one and is arranged on the drive shaft 6. The clamping strip 7 and the movable seat 8 are slidably matched, and the output end of the steering motor 4 is coaxially connected to the drive shaft 6.

[0023] It should be noted that the positioning motor 3 and the steering motor 4 can be stepper motors or servo motors. In the present embodiment, the positioning motor 3 and the steering motor 4 are preferably servo motors. As for the specific model parameters of the servo motor, the best selection can be made according to the actual situation and no specific limitation is made here.

[0024] In actual application, the auxiliary chamber of the single crystal furnace is placed on the rotating seat 12, and the position of the auxiliary chamber of the single crystal furnace is monitored by the monitoring clamping module, and the auxiliary chamber of the single crystal furnace is clamped and fixed; after the single crystal furnace completes the processing of the product, the product is lifted by the auxiliary chamber of the single crystal furnace, and the threaded rod 9 is driven to rotate by controlling the positioning motor 3 to be energized. Under the action of the threaded cooperation between the threaded rod 9 and the screw sleeve 10, the movable seat 8 is controlled to move in the vertical direction along the guide tube 5, and the movable seat 8, the rotating seat 12 and the auxiliary chamber of the single crystal furnace are first controlled to move upward, and then the steering is controlled. The motor 4 is powered on and rotates, and under the action of the drive shaft 6 and the clamping strip 7, the movable seat 8 is controlled to rotate, and then the rotating seat 12 is controlled to rotate to a set angle, and finally the positioning motor 3 is controlled to rotate in the opposite direction, so that the rotating seat 12 and the single crystal furnace auxiliary chamber move downward to release the product; during the upward movement of the rotating seat 12 and the single crystal furnace auxiliary chamber, the driving output component can simultaneously control the operation of the blocking component, and can block the discharge port of the single crystal furnace auxiliary chamber, and during the downward movement of the rotating seat 12 and the single crystal furnace auxiliary chamber, the blocking component can be controlled to open the discharge port of the single crystal furnace auxiliary chamber.

[0025] See also Figure 1 , Figure 4 , Figure 5 as well as Figure 6 As another preferred embodiment of the present application, the monitoring clamping module includes an upper clamping seat 13, a lower clamping seat 14, a monitoring transmission structure and a clamping execution structure. The upper clamping seat 13 and the lower clamping seat 14 are both arranged on the rotating seat 12, and the lower clamping seat 14 is arranged on one side of the upper clamping seat 13. The clamping execution structure is arranged between the rotating seat 12 and the lower clamping seat 14, and is used to perform the clamping and fixing work of the single crystal furnace sub-chamber. The monitoring transmission module is arranged on the upper clamping seat 13 and is connected to the clamping execution structure. When the single crystal furnace sub-chamber passes through the upper clamping seat 13 and moves toward the lower clamping seat 14, the monitoring transmission module is used to control the clamping execution structure to work.

[0026] In a specific case of this embodiment, the clamping execution structure includes a guide frame 17, an outer sleeve 18, a piston rod 20, an inner tube 19, a connecting ring 26, a cylinder 24 and a clamping plate 25. The guide frame 17 is arranged on the rotating seat 12, the inner tube 19 is arranged on the rotating seat 12, the piston rod 20 is movably arranged in the inner tube 19 and connected to the monitoring transmission module, the outer sleeve 18 is movably sleeved on the outer wall of the inner tube 19, the outer sleeve 18 and the guide frame 17 are slidably matched and the two are connected. The connecting ring 26 is connected through a spring 23, and is arranged on the lower clamp seat 14. The number of the cylinders 24 is several and they are arranged on the lower clamp seat 14. The number of the clamps 25 is several and they are arranged on the lower clamp seat 14. The clamps 25 are movably arranged on the lower clamp plates 25 and are elastically connected to the movable ends of the cylinders 24. The cylinders 24 are connected to the connecting ring 26 through a connecting pipe 27. An output hole is arranged on the outer sleeve 18, and an electromagnetic valve 21 is arranged on the output hole. The output hole is connected to the connecting ring 26.

[0027] In another specific case of the present embodiment, the monitoring transmission structure includes a resistance rod 15, a No. 1 pressure sensor 16 and a push arm 22. The middle position of the resistance rod 15 is hinged to the upper clamp seat 13 and a torsion spring is provided at the hinge. The No. 1 pressure sensor 16 is provided at one end of the resistance rod 15. The side of the resistance rod 15 away from the No. 1 pressure sensor 16 is movably connected to the piston rod 20 through the push arm 22.

[0028] When installing the single crystal furnace auxiliary chamber, the single crystal furnace auxiliary chamber is lifted by a crane through the upper clamping seat 13 and moved toward the lower clamping seat 14. During this process, the single crystal furnace auxiliary chamber and the abutment rod 15 come into conflict, driving the abutment rod 15 to rotate along its hinge, so that the abutment rod 15 Figure 5 The horizontal state shown is changed into a vertical state. During this process, the resistance rod 15 can use the push arm 22 to control the piston rod 20 to rotate relative to the inner tube 19, and control the outer sleeve 18 to move relative to the inner tube 19, until the No. 1 pressure sensor 16 and the upper limit ring of the single crystal furnace auxiliary chamber (the single crystal furnace auxiliary chamber is integrally formed, not shown in the figure) are in conflict. At this time, it can feedback to the solenoid valve 21 and control the solenoid valve 21 to open, and the air between the inner tube 19 and the outer sleeve 18 is input into the cylinder 24. The resistance rod 15 can also limit the vertical direction of the single crystal furnace auxiliary chamber. The cylinder 24 extends, driving the clamps 25 to move toward each other, thereby clamping and fixing the single crystal furnace auxiliary chamber.

[0029] See also Figure 1-Figure 8As another preferred embodiment of the present application, the blocking assembly includes a closed mounting seat 28, an electric telescopic rod 33, a group of sealing plates 29, a guide rail 30, a slider 31 and a top arm 32. The closed mounting seat 28 is arranged on the rotating seat 12, and a group of the sealing plates 29 are symmetrically and movably arranged on one side of the lower clamping seat 14. The sealing plates 29 are semicircular, and each of the sealing plates 29 is provided with a guide rail 30. The slider 31 is movably arranged in the guide rail 30 and the two are elastically connected. The top arm 32 is movably arranged on the closed mounting seat 28 and is movably connected to the slider 31. The electric telescopic rod 33 is arranged on the closed mounting seat 28 and its movable end is connected to the top arm 32. A trigger structure is arranged on the closed mounting seat 28, and the trigger structure is electrically connected to the electric telescopic rod 33, which is used to monitor the position of the movable seat 8 and control the opening and closing of the electric telescopic rod 33.

[0030] In this exemplary embodiment, the trigger structure includes a trigger seat 34, a roller 35, a second pressure sensor 36 and a recess 37. The trigger seat 34 is set on the closed mounting seat 28, the roller 35 is movably set on the trigger seat 34, the roller 35 and the clamping strip 7 are slidably matched, the second pressure sensor 36 is set at an eccentric position of the roller 35, and the recess 37 is set on the trigger seat 34 and is located on the moving path of the second pressure sensor 36.

[0031] This embodiment is illustrative, and is not limited to the No. 1 pressure sensor 16 and the No. 2 pressure sensor 36 to control the operation of related electronic components. Infrared ranging sensors or ultrasonic ranging sensors may also be used instead, which are not listed one by one here.

[0032] When the positioning motor 3 is energized to drive the threaded rod 9 to rotate, thereby causing the rotating seat 12 to move upward, the friction resistance between the card strip 7 and the roller 35 can be used to control the rotation of the roller 35, thereby driving the No. 2 pressure sensor 36 to rotate and enter the recess 37 and conflict with the trigger seat 34. The No. 2 pressure sensor 36 is pressurized and controls the electric telescopic rod 33 to be energized and extended, thereby driving the top arm 32 to move synchronously. Under the action of the top arm 32 and the slider 31 and the sliding cooperation of the slider 31 and the guide rail 30, the sealing plate 29 is controlled to rotate and close, thereby sealing the unloading port of the single crystal furnace auxiliary chamber during the upward movement to prevent the product from falling from the single crystal furnace auxiliary chamber during the upward movement. In the process of the rotating seat 12 moving downward, the roller 35 is reversed and reset. At this time, the No. 2 pressure sensor 36 is out of the pressurized state. At this time, the No. 2 pressure sensor 36 controls the electric telescopic rod 33 to delay the contraction, so that when the single crystal furnace auxiliary chamber moves down to a safe position, the sealing plate 29 is unfolded, so that the unloading port is opened to facilitate the staff to take materials.

[0033] See also Figure 1-Figure 8In another embodiment of the present application, a working principle of the single crystal furnace auxiliary chamber rotation drive device applied to the above embodiment is as follows: S100: placing the single crystal furnace auxiliary chamber on the rotating seat 12, monitoring the position of the single crystal furnace auxiliary chamber through a monitoring clamping module, and clamping and fixing the single crystal furnace auxiliary chamber; S200: After the single crystal furnace completes the processing of the product, the product is lifted by the single crystal furnace auxiliary chamber, and the driving output component is controlled to work, firstly the moving seat 8, the rotating seat 12 and the single crystal furnace auxiliary chamber are controlled to move upward, then the rotating seat 12 is controlled to rotate to a set angle, and finally the driving output component is controlled to work so that the rotating seat 12 and the single crystal furnace auxiliary chamber are moved downward to release the product; S300: During the upward movement of the rotating seat 12 and the single crystal furnace auxiliary chamber, the driving output component can simultaneously control the operation of the blocking component to block the discharge port of the single crystal furnace auxiliary chamber, and during the downward movement of the rotating seat 12 and the single crystal furnace auxiliary chamber, the blocking component can be controlled to open the discharge port of the single crystal furnace auxiliary chamber.

[0034] The present invention and its embodiments are described schematically above, and the description is not restrictive. The drawings show only one embodiment of the present invention, and the actual structure is not limited thereto. Therefore, if a person skilled in the art is inspired by it and designs a structural method and an embodiment similar to the technical solution without creativity without departing from the purpose of the invention, they shall all fall within the protection scope of the present invention.

[0035] In addition, it should be understood that although the present specification is described according to implementation modes, not every implementation mode contains only one independent technical solution. This description of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment may also be appropriately combined to form other implementation modes that can be understood by those skilled in the art.

Claims

1. A single crystal furnace auxiliary chamber rotation drive device, comprising a support frame and a plurality of fixing seats, wherein the plurality of fixing seats are arranged on the support frame, characterized in that: The rotary drive device also includes a moving seat, a drive output assembly, a mounting assembly and a plugging assembly, wherein the drive output assembly is arranged between the fixed seats, the moving seat is movably arranged on the support frame and connected to the drive output assembly, the drive output assembly adjusts the height of the moving seat and controls its rotation when working, the mounting assembly is arranged on the moving seat and is used to install the single crystal furnace auxiliary chamber, the plugging assembly is arranged on the support frame and connected to the drive output assembly, and when the drive output assembly adjusts the height of the moving seat, the plugging assembly controls the opening and closing of the unloading port of the single crystal furnace auxiliary chamber; The mounting assembly includes a rotating seat and a monitoring clamping module. The rotating seat is movably arranged on one side of the support frame and connected to the movable seat. The monitoring clamping module is arranged on the rotating seat and is used to monitor the position of the single crystal furnace sub-chamber and clamp and fix the single crystal furnace sub-chamber.

2. The single crystal furnace auxiliary chamber rotation driving device according to claim 1, characterized in that: The drive output assembly includes a height adjustment structure and a rotation structure, wherein the height adjustment structure is arranged on the support frame and connected to the fixed seat, there are two movable seats, one of which is connected to the height adjustment structure, and the height adjustment structure adjusts the height of the movable seat when working, and the rotation structure is arranged on the support frame and connected to the other movable seat, and is used to control the rotation of the movable seat and the rotating seat.

3. The single crystal furnace auxiliary chamber rotation driving device according to claim 2, characterized in that: The height adjustment structure includes a positioning motor, a guide tube, a threaded rod and a screw sleeve, the guide tube is arranged on a support frame, the threaded rod is movably arranged in the guide tube, the positioning motor is arranged on the support frame and its output end is coaxially connected with the threaded rod, the screw sleeve is movably arranged in the guide tube and threadedly cooperates with the threaded rod, one of the movable seats is movably sleeved in the guide tube, the screw sleeve slides through the guide tube, and an annular groove that slides with the screw sleeve is formed on the inner wall of one of the movable seats.

4. The single crystal furnace auxiliary chamber rotation driving device according to claim 2, characterized in that: The rotating structure includes a steering motor, a drive shaft and a clamping strip, wherein the steering motor is arranged on a support frame, the drive shaft is movably arranged on a fixed seat, wherein another movable seat is movably arranged on the drive shaft, the number of the clamping strip is at least one and is arranged on the drive shaft, the clamping strip and the movable seat are slidably matched, and the output end of the steering motor is coaxially connected to the drive shaft.

5. The single crystal furnace auxiliary chamber rotation driving device according to claim 1, characterized in that: The monitoring clamping module includes an upper clamping seat, a lower clamping seat, a monitoring transmission structure and a clamping execution structure. The upper clamping seat and the lower clamping seat are both arranged on a rotating seat, and the lower clamping seat is arranged on one side of the upper clamping seat. The clamping execution structure is arranged between the rotating seat and the lower clamping seat, and is used to perform the clamping and fixing work of the single crystal furnace sub-chamber. The monitoring transmission module is arranged on the upper clamping seat and connected to the clamping execution structure. When the single crystal furnace sub-chamber passes through the upper clamping seat and moves toward the lower clamping seat, the monitoring transmission module is used to control the clamping execution structure to work.

6. The single crystal furnace auxiliary chamber rotation driving device according to claim 5, characterized in that: The clamping execution structure includes a guide frame, an outer sleeve, a piston rod, an inner tube, a connecting ring, a cylinder and a clamping plate. The guide frame is arranged on a rotating seat, the inner tube is arranged on a rotating seat, the piston rod is movably arranged in the inner tube and is connected to the monitoring transmission module, the outer sleeve is movably sleeved on the outer wall of the inner tube, the outer sleeve and the guide frame are slidably matched and are connected by a spring, the connecting ring is arranged on the lower clamping seat, the number of the cylinders is several and the rings are arranged on the lower clamping seat, the number of the clamping plates is several and the rings are arranged on the lower clamping seat, the clamping plate is movably arranged on the lower clamping plate and is elastically connected to the movable end of the cylinder, the cylinder is connected to the connecting ring through a connecting pipe, the outer sleeve is provided with an output hole, the output hole is provided with an electromagnetic valve, and the output hole is connected to the connecting ring.

7. The single crystal furnace auxiliary chamber rotation driving device according to claim 6, characterized in that: The monitoring transmission structure includes a resistance rod, a No. 1 pressure sensor and a push arm. The middle position of the resistance rod is hinged to the upper clamp seat and a torsion spring is provided at the hinge. The No. 1 pressure sensor is arranged at one end of the resistance rod, and the side of the resistance rod away from the No. 1 pressure sensor is movably connected through the push arm and the piston rod.

8. The single crystal furnace auxiliary chamber rotation driving device according to claim 4, characterized in that: The blocking assembly includes a closed mounting seat, an electric telescopic rod, a group of sealing plates, a guide rail, a slider and a top arm. The closed mounting seat is arranged on a rotating seat, a group of sealing plates are symmetrically and movably arranged on one side of the lower clamping seat, the sealing plates are semicircular, and each sealing plate is provided with a guide rail, the slider is movably arranged in the guide rail and the two are elastically connected, the top arm is movably arranged on the closed mounting seat and movably connected to the slider, the electric telescopic rod is arranged on the closed mounting seat and its movable end is connected to the top arm, and a trigger structure is arranged on the closed mounting seat, and the trigger structure is electrically connected to the electric telescopic rod, and is used to monitor the position of the moving seat and control the opening and closing of the electric telescopic rod.

9. The single crystal furnace auxiliary chamber rotation driving device according to claim 8, characterized in that: The trigger structure includes a trigger seat, a roller, a No. 2 pressure sensor and a recess. The trigger seat is arranged on a closed mounting seat, the roller is movably arranged on the trigger seat, the roller and the clamping strip are slidably matched, the No. 2 pressure sensor is arranged at an eccentric position of the roller, and the recess is arranged on the trigger seat and is located on the moving path of the No. 2 pressure sensor.

10. A working principle of the single crystal furnace auxiliary chamber rotation driving device applied to claim 1, characterized in that: The specific contents of the working principle are as follows: S100: placing the single crystal furnace auxiliary chamber on the rotating seat, monitoring the position of the single crystal furnace auxiliary chamber through the monitoring clamping module, and clamping and fixing the single crystal furnace auxiliary chamber; S200: After the single crystal furnace completes the processing of the product, the product is lifted by the single crystal furnace auxiliary chamber, and the driving output component is controlled to work, firstly the moving seat, the rotating seat and the single crystal furnace auxiliary chamber are controlled to move upward, then the rotating seat is controlled to rotate to a set angle, and finally the driving output component is controlled to work so that the rotating seat and the single crystal furnace auxiliary chamber are moved downward to release the product; S300: During the upward movement of the rotating seat and the auxiliary chamber of the single crystal furnace, the driving output component can simultaneously control the operation of the blocking component to block the discharge port of the auxiliary chamber of the single crystal furnace, and during the downward movement of the rotating seat and the auxiliary chamber of the single crystal furnace, the blocking component can be controlled to open the discharge port of the auxiliary chamber of the single crystal furnace.

Images