Turbo molecular pump impeller multi-size measuring device and method

Abstract

The invention belongs to the technical field of molecular pump impeller measurement, and provides a turbo molecular pump impeller multi-size measurement device and method. The cylindricity measuring assembly comprises a rotary clamping assembly arranged on a first platform, the first platform is further provided with an outer measuring scale assembly and an inner measuring scale assembly, and the outer measuring scale assembly and the inner measuring scale assembly are arranged corresponding to the outer wall and the inner wall of the molecular pump impeller respectively; the blade gap measuring assembly comprises a height gauge arranged on the first platform, a plurality of measuring pieces are arranged on the height gauge, and the plurality of measuring pieces are arranged corresponding to blades on the molecular pump impeller respectively; and the excircle radius measuring assembly comprises two groups of flat plates, the two groups of flat plates are symmetrically arranged about the axis of the molecular pump impeller, and a sliding distance measuring assembly is arranged between the two groups of flat plates and the first platform. The method can improve the measurement efficiency and reduce the cost while guaranteeing the measurement precision, and is suitable for the measurement work under the condition of mass production.

Description

Technical Field

[0001] The invention belongs to the technical field of molecular pump impeller measurement, and in particular relates to a multi-size measurement device and method for a turbomolecular pump impeller. Background Art

[0002] The molecular pump is a vacuum obtaining device. Its working principle is that the linear velocity of the blade reaches the thermal motion velocity of the molecule through high-speed rotation, and the gas obtains the directional velocity through momentum exchange with the blade to discharge the cavity; the magnetic levitation turbomolecular pump is used in various industries because of its advantages such as oil-free, wear-free, low noise and can be installed at any angle. The turbine rotor is an important component in the molecular pump and has a decisive influence on the vacuum performance of the molecular pump. Since the linear velocity of the impeller can be as high as 400m / s when the molecular pump is running, it will produce a certain deformation, and the gap between the impeller and other parts during assembly is very small. Therefore, after the turbine rotor is processed, it is usually necessary to measure some key dimensions so that the initial dimensions are within the specified error to avoid problems during installation and operation. The shape of the turbine blade is relatively complex, and its key dimensions include the outer radius, the gap between blades at each level, and the cylindricality. At present, the measurement method for the above key dimensions is mainly to measure each dimension separately. When measuring the blade gap, the turbine rotor is placed on the measuring platform, and the gap between blades at each level is measured using a height gauge; when measuring the outer diameter, a large vernier caliper is used, and multiple measurements are taken, and the maximum value is taken as the outer diameter.

[0003] The above measurement method can effectively measure the error of the key dimension of the turbine rotor, so as to determine whether it is within the error range, so as to improve the convenience during assembly and the stability during operation. However, the above measurement process needs to be carried out on different measuring tables, and the impeller needs to be repeatedly moved from the measuring table, which increases the time and economic cost of measuring a single impeller and reduces the convenience and efficiency in mass production. Summary of the invention

[0004] The purpose of the present invention is to provide a multi-size measurement device and method for a turbomolecular pump impeller to solve the above-mentioned problems, so as to improve the measurement efficiency and reduce the time and economic costs while ensuring the measurement accuracy of the key dimensions of the turbomolecular pump impeller, and to be suitable for the purpose of measurement work under mass production conditions.

[0005] To achieve the above object, the present invention provides the following solution: a multi-size measuring device for a turbomolecular pump impeller, comprising:

[0006] First platform;

[0007] The cylindricality measuring assembly comprises a rotating clamping assembly arranged on the first platform, the rotating clamping assembly is used to clamp the molecular pump impeller and ensure that the molecular pump impeller can rotate around the axis of the molecular pump impeller on the first platform, and the first platform is also provided with an outer measuring ruler assembly and an inner measuring ruler assembly, the outer measuring ruler assembly and the inner measuring ruler assembly are respectively arranged corresponding to the outer wall and the inner wall of the molecular pump impeller;

[0008] A blade clearance measuring assembly, comprising a height gauge arranged on the first platform, the height gauge being provided with a plurality of measuring pieces, the plurality of measuring pieces being respectively arranged corresponding to the blades on the molecular pump impeller;

[0009] The outer circle radius measuring component comprises two groups of flat plates, the two groups of flat plates are symmetrically arranged about the axis of the molecular pump impeller, and a sliding distance measuring component is arranged between the two groups of flat plates and the first platform.

[0010] Preferably, the rotating clamping assembly includes a circular guide rail fixedly connected to the top of the first platform, and a plurality of sliding plates are slidably connected to the circular guide rail. The plurality of sliding plates are used to support the molecular pump impeller to rotate on the circular guide rail, and a clamping member is arranged between the inner side of the circular guide rail and the first platform.

[0011] Preferably, the clamping member includes a through groove opened on the top of the first platform, the through groove is located on the inner side of the circular guide rail, the second platform is fixedly connected inside the first platform, the top of the second platform is fixedly connected to a three-jaw chuck, the top of the three-jaw chuck passes through the through groove, and the three-jaw chuck is coaxially arranged with the circular guide rail, the jaw ends of the three-jaw chuck are respectively rotatably connected with guide wheels, and the guide wheels are arranged corresponding to the inner wall of the molecular pump impeller.

[0012] Preferably, the internal measuring ruler assembly includes a micrometer bracket vertically fixedly connected to the top of the second platform, the top of the micrometer bracket passes through the three-jaw chuck and is located inside the molecular pump impeller, and a plurality of internal micrometers are fixedly connected to the micrometer bracket from bottom to top, and the plurality of internal micrometers are respectively in contact with the inner wall of the molecular pump impeller.

[0013] Preferably, the external measuring ruler assembly comprises an external micrometer fixedly connected to the top of the first platform, and the external micrometer contacts the outer wall of the molecular pump impeller.

[0014] Preferably, the measuring member comprises a vernier slidably connected to the height gauge, a first moving grid circuit board is arranged inside the vernier, and the first moving grid circuit board is used to measure the position of the vernier on the height gauge.

[0015] Preferably, one end of the measuring cursor close to the molecular pump impeller is fixedly connected to a contact plate, and the contact plate is arranged corresponding to the blades of the molecular pump impeller.

[0016] Preferably, a guide rail is fixedly connected to the first platform, a base is slidably connected to the guide rail, the height gauge is vertically fixedly connected to the top of the base, and the base is used to adjust the distance between the height gauge and the molecular pump impeller.

[0017] Preferably, the sliding distance measuring assembly includes two groups of linear guides fixedly connected to the top of the first platform, the two groups of linear guides are arranged in parallel, and the circular guide is located between the two linear guides, two groups of sliders are slidably connected to the two groups of linear guides respectively, a second moving grid circuit board is arranged in the slider, the second moving grid circuit board is used to measure the distance between the two sliders on the same linear guide, the flat plate is fixedly connected between the two groups of sliders located at the same end of the two linear guides, the two groups of flat plates are arranged in parallel, and the molecular pump impeller is located between the two flat plates.

[0018] A method for measuring multiple dimensions of a turbomolecular pump impeller, the operating steps comprising:

[0019] Fix the molecular pump impeller on the rotating clamping assembly, and make the outer and inner measuring ruler assembly and the outer measuring ruler assembly close to the inner and outer walls of the molecular pump impeller respectively, and rotate the molecular pump impeller to measure the cylindricity;

[0020] Adjust several measuring pieces to fit the upper end surface or lower end surface of the molecular pump impeller (12 blades) to measure the blade clearance;

[0021] The two sets of flat plates are brought into close contact with the outer diameter of the molecular pump impeller by means of a sliding distance measuring assembly, and the outer radius is measured.

[0022] Compared with the prior art, the present invention has the following advantages and technical effects: the main function of the rotating clamping component is to clamp the molecular pump impeller 1 on the first platform and ensure that the molecular pump impeller can still rotate around its own axis after clamping; the main function of the inner measuring ruler component is to measure the cylindricity of the inner wall of the molecular pump impeller by measuring the vibration of the inner wall of the molecular pump impeller during the rotation of the molecular pump impeller; the main function of the outer measuring ruler component is to measure the cylindricity of the outer wall of the molecular pump impeller by measuring the vibration of the outer wall of the molecular pump impeller during the rotation of the molecular pump impeller; the main function of the height ruler is to display the height of different measuring pieces; the main function of the plurality of measuring pieces is to measure the gap between the blades by contacting with the blades at different positions on the molecular pump impeller; the main function of the two sets of flat plates is to provide a measurement reference for the sliding distance measuring component by clamping on both sides of the molecular pump impeller; the main function of the sliding distance measuring component is to move the flat plate to contact with the blades of the molecular pump impeller and measure the outer radius of the molecular pump impeller based on this. On the whole, the present invention concentrates the key dimensions that need to be measured for the molecular pump impeller on a test bench, and can measure all the key dimensions at one time, avoiding repeated disassembly and assembly of the molecular pump impeller on the test device, thereby ensuring the measurement accuracy of its key dimensions, while increasing efficiency and convenience and reducing time and economic costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0024] Figure 1 It is a schematic diagram of the measuring device of the present invention clamping the molecular pump impeller;

[0025] Figure 2 Another schematic diagram of the measuring device of the present invention clamping the molecular pump impeller;

[0026] Figure 3 This is a schematic diagram of the measuring device of the present invention after the flat plate is removed;

[0027] Figure 4 for Figure 3 A partial enlarged view in FIG.

[0028] Figure 5 This is a schematic diagram of the measuring device of the present invention after removing the flat plate and the three-jaw chuck;

[0029] Figure 6 for Figure 5 A partial enlarged view of B in FIG.

[0030] Among them, 1. the first platform; 2. the second platform; 3. the handle rotating rod; 4. the plate; 5. the plate support; 6. the linear guide rail; 7. the slider; 8. the limit block; 9. the guide rail; 10. the base; 11. the height gauge; 12. the molecular pump impeller; 13. the external micrometer; 14. the three-jaw chuck; 15. the micrometer bracket; 16. the internal micrometer; 17. the extension block; 18. the circular guide rail; 19. the sliding plate; 20. the through groove; 21. the guide wheel; 22. the vernier; 23. the contact plate; 24. the plate clamp; 25. the pulley. DETAILED DESCRIPTION

[0031] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0032] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the present invention is further described in detail below with reference to the accompanying drawings and specific embodiments.

[0033] Reference Figure 1-Figure 6 The present invention provides a multi-size measuring device for a turbomolecular pump impeller, comprising:

[0034] First platform 1;

[0035] The cylindricality measuring assembly includes a rotating clamping assembly arranged on the first platform 1, the rotating clamping assembly is used to clamp the molecular pump impeller 12 and ensure that the molecular pump impeller 12 can rotate around the axis of the molecular pump impeller 12 on the first platform 1, and the first platform 1 is also provided with an outer measuring ruler assembly and an inner measuring ruler assembly, and the outer measuring ruler assembly and the inner measuring ruler assembly are respectively arranged corresponding to the outer wall and the inner wall of the molecular pump impeller 12;

[0036] The blade clearance measuring assembly comprises a height gauge 11 arranged on the first platform 1, and a plurality of measuring pieces are arranged on the height gauge 11, and the plurality of measuring pieces are respectively arranged corresponding to the blades on the molecular pump impeller 12;

[0037] The outer circle radius measuring assembly comprises two groups of flat plates 4 , which are symmetrically arranged about the axis of the molecular pump impeller 12 , and a sliding distance measuring assembly is arranged between the two groups of flat plates 4 and the first platform 1 .

[0038] The main function of the rotating clamping assembly is to clamp the molecular pump impeller 12 on the first platform 1 and ensure that the molecular pump impeller 12 can still rotate around its own axis after clamping; the main function of the inner measuring ruler assembly is to measure the cylindricity of the inner wall of the molecular pump impeller 12 by measuring the vibration of the inner wall of the molecular pump impeller 12 during the rotation of the molecular pump impeller 12; the main function of the outer measuring ruler assembly is to measure the cylindricity of the outer wall of the molecular pump impeller 12 by measuring the vibration of the outer wall of the molecular pump impeller 12 during the rotation of the molecular pump impeller 12; the main function of the height ruler 11 is to display the height of different measuring pieces; the main function of several measuring pieces is to measure the gap between the blades by contacting with the blades at different positions on the molecular pump impeller 12; the main function of the two sets of flat plates 4 is to provide a measurement reference for the sliding distance measuring assembly by clamping on both sides of the molecular pump impeller 12; the main function of the sliding distance measuring assembly is to move the flat plate 4 to contact with the blades of the molecular pump impeller 12 and measure the outer radius of the molecular pump impeller 12 based on this. On the whole, the present invention concentrates the key dimensions that need to be measured for the molecular pump impeller on a test bench, and can measure all the key dimensions at one time, avoiding repeated disassembly and assembly of the molecular pump impeller on the test device, thereby ensuring the measurement accuracy of its key dimensions, while increasing efficiency and convenience and reducing time and economic costs.

[0039] A further optimized solution is that the rotating clamping assembly includes a circular guide rail 18 fixedly connected to the top of the first platform 1, and a plurality of sliding plates 19 are slidably connected to the circular guide rail 18. The plurality of sliding plates 19 are used to support the molecular pump impeller 12 to rotate on the circular guide rail 18, and a clamping member is arranged between the inner side of the circular guide rail 18 and the first platform 1.

[0040] As a further optimization scheme, the four bottom corners of the sliding plate 19 are horizontally rotatably connected with pulleys 25 , and the four sets of pulleys 25 are respectively located on both sides of the circular guide rail 18 and fit with the side walls of the circular guide rail 18 .

[0041] like Figure 1 , Figure 3 and Figure 4 As shown, three sets of sliding plates 19 are arranged on the circular guide rail 18, and the three sets of sliding plates 19 are arranged at equal intervals. The molecular pump impeller 12 is vertically placed on the three sets of sliding plates 19, and the molecular pump impeller 12 is rotated to realize its rotation on the circular guide rail 18.

[0042] A further optimized solution is that the clamping part includes a through groove 20 opened on the top of the first platform 1, the through groove 20 is located on the inner side of the circular guide rail 18, the second platform 2 is fixedly connected to the first platform 1, the top of the second platform 2 is fixedly connected to the three-jaw chuck 14, the top of the three-jaw chuck 14 passes through the through groove 20, and the three-jaw chuck 14 is coaxially arranged with the circular guide rail 18, the claw ends of the three-jaw chuck 14 are respectively rotatably connected with guide wheels 21, and the guide wheels 21 are arranged corresponding to the inner wall of the molecular pump impeller 12.

[0043] In a further optimized solution, a handle rotating rod 3 is rotatably connected inside the first platform 1, and the end of the handle rotating rod 3 away from the handle is transmission-connected to the three-jaw chuck 14. When in use, the operator shakes the handle rotating rod 3 to rotate and drive the three groups of claws on the three-jaw chuck 14 to move outward, thereby clamping the inner side of the molecular pump impeller 12.

[0044] The three-jaw chuck 14 is a common structure, and its working principle and working process are not described in detail.

[0045] like Figure 3-Figure 5 As shown, the main function of the guide wheel 21 is to ensure that after the three-jaw chuck 14 clamps the molecular pump impeller 12, the molecular pump impeller 12 can still rotate relative to the three-jaw chuck 14. After the operator places the molecular pump impeller 12 on the three sets of sliding plates 19, he shakes the handle turning rod 3 to drive the three sets of claws on the three-jaw chuck 14 to move outward until the guide wheels 21 on the three sets of claws are all in contact with the inner side wall of the molecular pump impeller 12. Since the three-jaw chuck 14 itself has a centering function, when the three-jaw chuck 14 clamps the molecular pump impeller 12 tightly, the molecular pump impeller 12, the three-jaw chuck 14 and the circular guide rail 18 are on the same axis, ensuring that the molecular pump impeller 12 will not deflect its own axis when it rotates.

[0046] A further optimized solution is that the internal measuring ruler assembly includes a micrometer bracket 15 vertically fixedly connected to the top of the second platform 2, the top of the micrometer bracket 15 passes through the three-jaw chuck 14 and is located inside the molecular pump impeller 12, and a plurality of internal micrometers 16 are fixedly connected to the micrometer bracket 15 from bottom to top, and the plurality of internal micrometers 16 are respectively in contact with the inner wall of the molecular pump impeller 12.

[0047] like Figure 3 and Figure 5 As shown, the middle of the micrometer bracket 15 is fixedly connected to two groups of extension blocks 17 of different lengths, and the ends of the extension blocks 17 away from the micrometer bracket 15 are fixedly connected to the internal micrometers 16. The top of the micrometer bracket 15 is directly fixedly connected to an internal micrometer 16. After the molecular pump impeller 12 is clamped by the three-jaw chuck 14, the probes of the three groups of internal micrometers 16 can contact different parts of the inner wall of the molecular pump impeller 12 respectively.

[0048] In a further optimized solution, the external measuring ruler assembly includes an external micrometer 13 fixedly connected to the top of the first platform 1 , and the external micrometer 13 is in contact with the outer wall of the molecular pump impeller 12 .

[0049] like Figure 2 As shown, the external micrometer 13 can be fixed on the first platform 1 by a magnetic block. The probe of the external micrometer 13 contacts the outer wall of the molecular pump impeller 12.

[0050] According to a further optimized solution, the readings of the internal micrometer 16 and the external micrometer 13 are transmitted to a computer via a signal line to display the measured values.

[0051] According to a further optimized solution, the measuring part includes a cursor 22 slidably connected to the height gauge 11 , and a first moving grid circuit board (not shown in the figure) is arranged in the cursor 22 , and the first moving grid circuit board is used to measure the position of the cursor 22 on the height gauge 11 .

[0052] According to a further optimized solution, one end of the measuring cursor 22 close to the molecular pump impeller 12 is fixedly connected with a contact plate 23 , and the contact plate 23 is arranged corresponding to the blades of the molecular pump impeller 12 .

[0053] like Figure 1 and Figure 6 As shown, the first dynamic grid circuit board can record the distance of the cursor 22 relative to the fixed position. The main function of the contact plate 23 is to ensure that the cursor 22 can contact the blade end surface to be measured.

[0054] In a further optimized solution, a locking device is provided on the cursor 22, which can lock the cursor at any position of the height gauge 11. The locking device can be a locking bolt or a fixing clamp.

[0055] According to a further optimization scheme, a guide rail 9 is fixedly connected to the first platform 1 , a base 10 is slidably connected to the guide rail 9 , a height gauge 11 is vertically fixedly connected to the top of the base 10 , and the base 10 is used to adjust the distance between the height gauge 11 and the molecular pump impeller 12 .

[0056] like Figure 1 As shown, before clamping the molecular pump impeller 12 , the base 10 can be moved outward so that the height gauge 11 drives several cursors 22 away from the center position, which facilitates the replacement and clamping of the molecular pump impeller 12 .

[0057] A further optimized solution is that the sliding distance measuring component includes two groups of linear guides 6 fixedly connected to the top of the first platform 1, the two groups of linear guides 6 are arranged in parallel, and the circular guide 18 is located between the two linear guides 6, two groups of sliders 7 are slidably connected to the two groups of linear guides 6, and a second moving grid circuit board is arranged in the slider 7. The second moving grid circuit board is used to measure the distance between the two sliders 7 on the same linear guide 6, and a plate 4 is fixedly connected between the two groups of sliders 7 located at the same end of the two linear guides 6, the two groups of plates 4 are arranged in parallel, and the molecular pump impeller 12 is located between the two plates 4.

[0058] A further optimized solution is that a flat plate support 5 is fixedly connected between two sets of sliders 7 located at the same end of the two linear guide rails 6, and a groove for placing the flat plate 4 is opened on the flat plate support 5. The end of the flat plate support 5 is detachably connected to a flat plate clamp 24, and the main function of the flat plate clamp 24 is to clamp the flat plate 4 in the groove.

[0059] To further optimize the solution, a digital display screen is provided on a slider 7, and the distance between the two sliders 7 on the same linear guide rail 6 can be displayed on the display screen. When the two plates 4 are in contact with the molecular pump impeller 12 respectively, the distance between the two plates 4 can be obtained through the value on the display screen, and the outer diameter of the molecular pump impeller 12 can be obtained.

[0060] In a further optimized solution, both ends of the linear guide rail 6 are respectively fixedly connected to the limit blocks 8, and the limit blocks 8 are fixedly connected to the first platform 1. The ends of the limit blocks 8 fit with the ends of the linear guide rail 6. The main function of the limit blocks 8 is to limit the slider 7 to prevent the slider 7 from detaching from the linear guide rail 6. At the same time, by fitting the slider 7 with the limit blocks 8, it can be used as the 0 position for calibrating the digital display screen on the slider 7, which is convenient for instrument calibration before measurement.

[0061] A method for measuring multiple dimensions of a turbomolecular pump impeller, the operating steps comprising:

[0062] Fix the molecular pump impeller 12 on the rotating clamping assembly, and make the outer inner measuring ruler assembly and the outer measuring ruler assembly close to the inner and outer walls of the molecular pump impeller 12 respectively, and rotate the molecular pump impeller 12 to measure the cylindricity;

[0063] The staff places the molecular pump impeller 12 on the three sliding plates 19, and it is not necessary to ensure that it is strictly concentric with the circular guide rail 18 during placement. Then, the handle rotating rod 3 of the three-jaw chuck 14 is rotated to make the claws of the three-jaw chuck 14 move outward synchronously until the three groups of guide wheels 21 press against the inner wall of the molecular pump impeller 12. Then, the internal micrometer bracket 15 and the external micrometer 13 are adjusted to make the probes of the external micrometer 13 and the three groups of internal micrometers 16 close to the outer wall and inner wall of the molecular pump impeller 12. Then, the molecular pump impeller 12 is rotated to measure the coaxiality.

[0064] Adjust several measuring pieces to fit the upper end surface or the lower end surface of the molecular pump impeller 12 blades to measure the blade clearance;

[0065] Afterwards, the staff roughly adjusts each cursor 22 to the appropriate position, and then pushes the height gauge 11 to drive the base 10 to move inward to the appropriate position along the direction of the guide rail 9, and then adjusts each cursor 22 so that its corresponding contact plate 23 is close to the upper end face or lower end face of the blade to be measured, and the blade clearance can be measured by reading the data.

[0066] The two sets of flat plates 4 are brought into close contact with the outer diameter of the molecular pump impeller 12 by means of a sliding distance measuring assembly, and the outer radius is measured.

[0067] Finally, the staff moves the flat plates 4 so that the two sets of flat plates 4 are respectively close to the edge of the molecular pump impeller 12, that is, the outer diameter, and the outer diameter value of the molecular pump impeller 12 can be read.

[0068] In the description of the present invention, it should be understood that the terms "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside" and "outside" etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0069] The embodiments described above are only descriptions of the preferred modes of the present invention, and are not intended to limit the scope of the present invention. Without departing from the design spirit of the present invention, various modifications and improvements made to the technical solutions of the present invention by ordinary technicians in this field should all fall within the protection scope determined by the claims of the present invention.

Claims

1. A multi-size measuring device for a turbomolecular pump impeller, characterized in that: include: First platform (1); A cylindricity measurement component, comprising a rotating clamping component arranged on the first platform (1), the rotating clamping component being used to clamp the molecular pump impeller (12) and ensure that the molecular pump impeller (12) can rotate around the axis of the molecular pump impeller (12) on the first platform (1), and an outer measuring ruler component and an inner measuring ruler component are also arranged on the first platform (1), the outer measuring ruler component and the inner measuring ruler component are respectively arranged corresponding to the outer wall and the inner wall of the molecular pump impeller (12); A blade clearance measuring assembly comprises a height gauge (11) arranged on the first platform (1), the height gauge (11) being provided with a plurality of measuring pieces, the plurality of measuring pieces being respectively arranged corresponding to blades on a molecular pump impeller (12); The outer circle radius measuring component comprises two groups of flat plates (4), the two groups of flat plates (4) are symmetrically arranged about the axis of the molecular pump impeller (12), and a sliding distance measuring component is arranged between the two groups of flat plates (4) and the first platform (1).

2. A multi-size measurement device for a turbomolecular pump impeller according to claim 1, characterized in that: The rotating clamping assembly comprises a circular guide rail (18) fixedly connected to the top of the first platform (1), a plurality of sliding plates (19) being slidably connected to the circular guide rail (18), the plurality of sliding plates (19) being used to support the molecular pump impeller (12) to rotate on the circular guide rail (18), and a clamping member is arranged between the inner side of the circular guide rail (18) and the first platform (1).

3. A multi-dimensional measurement device for a turbomolecular pump impeller according to claim 2, characterized in that: The clamping member comprises a through groove (20) opened on the top of the first platform (1), the through groove (20) is located on the inner side of the circular guide rail (18), the first platform (1) is fixedly connected with the second platform (2), the top of the second platform (2) is fixedly connected with a three-jaw chuck (14), the top of the three-jaw chuck (14) passes through the through groove (20), and the three-jaw chuck (14) and the circular guide rail (18) are coaxially arranged, and the jaw ends of the three-jaw chuck (14) are respectively rotatably connected with guide wheels (21), and the guide wheels (21) are arranged corresponding to the inner wall of the molecular pump impeller (12).

4. A multi-dimensional measurement device for a turbomolecular pump impeller according to claim 3, characterized in that: The internal measuring ruler assembly comprises a dial gauge bracket (15) vertically fixedly connected to the top of the second platform (2), the top of the dial gauge bracket (15) passes through the three-jaw chuck (14) and is located inside the molecular pump impeller (12), and a plurality of internal dial gauges (16) are fixedly connected to the dial gauge bracket (15) from bottom to top, and the plurality of internal dial gauges (16) are respectively in contact with the inner wall of the molecular pump impeller (12).

5. The multi-dimensional measurement device for a turbomolecular pump impeller according to claim 1, characterized in that: The external measuring ruler assembly comprises an external micrometer (13) fixedly connected to the top of the first platform (1), and the external micrometer (13) is in contact with the outer wall of the molecular pump impeller (12).

6. The multi-dimensional measurement device for a turbomolecular pump impeller according to claim 1, characterized in that: The measuring member comprises a vernier (22) slidably connected to the height gauge (11), a first moving grid circuit board being arranged inside the vernier (22), and the first moving grid circuit board being used to measure the position of the vernier (22) on the height gauge (11).

7. A multi-dimensional measurement device for a turbomolecular pump impeller according to claim 6, characterized in that: One end of the measuring cursor (22) close to the molecular pump impeller (12) is fixedly connected to a contact plate (23), and the contact plate (23) is arranged corresponding to the blades of the molecular pump impeller (12).

8. The multi-dimensional measurement device for a turbomolecular pump impeller according to claim 1, characterized in that: A guide rail (9) is fixedly connected to the first platform (1), a base (10) is slidably connected to the guide rail (9), the height gauge (11) is vertically fixedly connected to the top of the base (10), and the base (10) is used to adjust the distance between the height gauge (11) and the molecular pump impeller (12).

9. The multi-dimensional measurement device for a turbomolecular pump impeller according to claim 2, characterized in that: The sliding distance measuring assembly comprises two groups of linear guide rails (6) fixedly connected to the top of the first platform (1), the two groups of linear guide rails (6) are arranged in parallel, and the circular guide rail (18) is located between the two linear guide rails (6), two groups of sliding blocks (7) are respectively slidably connected to the two groups of linear guide rails (6), a second moving grid circuit board is arranged in the sliding block (7), and the second moving grid circuit board is used to measure the distance between the two sliding blocks (7) on the same linear guide rail (6), the flat plate (4) is fixedly connected between the two groups of sliding blocks (7) located at the same end of the two linear guide rails (6), the two groups of flat plates (4) are arranged in parallel, and the molecular pump impeller (12) is located between the two flat plates (4).

10. A method for measuring multiple dimensions of a turbomolecular pump impeller, based on the device for measuring multiple dimensions of a turbomolecular pump impeller according to claim 1, characterized in that: The steps include: The molecular pump impeller (12) is fixed on the rotating clamping assembly, and the outer inner measuring ruler assembly and the outer measuring ruler assembly are respectively placed in close contact with the inner and outer walls of the molecular pump impeller (12), and the molecular pump impeller (12) is rotated to measure the cylindricity; Adjusting a plurality of measuring pieces to fit the upper end surface or the lower end surface of the blades of the molecular pump impeller (12) to measure the blade clearance; The two sets of flat plates (4) are brought into close contact with the outer diameter of the molecular pump impeller (12) by means of a sliding distance measuring assembly, and the outer radius is measured.

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