Silicon carbide tape reel defect detector

Abstract

The invention discloses a silicon carbide tape reel defect detector, which comprises: a bearing seat on which a rotatable carrying disc is arranged; the three-coordinate moving device comprises a rack, a Y-axis mover, a cross beam, an X-axis mover and a Z-axis mover, the Y-axis mover is arranged on the opposite side of the rack, the end of the cross beam is fixedly installed on a Y-axis moving seat of the Y-axis mover, the X-axis mover is arranged in the length direction of the cross beam, and the Z-axis mover is fixedly installed on an X-axis moving seat of the X-axis mover; and the visual camera is fixedly mounted on a Z-axis moving seat of the Z-axis mover. Compared with the prior art, the problem that silicon carbide tape reel defect detection is inconvenient due to the fact that the image collection position of an existing visual detection device is fixed is solved.

Description

Technical Field

[0001] The present invention relates to the technical field of product detection, and in particular to a silicon carbide reel defect detector. Background Art

[0002] Silicon carbide is a refractory material made from quartz sand, petroleum coke and sawdust through high-temperature smelting in a resistance furnace. It is a non-metallic carbide in which silicon and carbon are covalently bonded. High-purity single crystals can be used to manufacture semiconductor materials and silicon carbide fibers.

[0003] When the silicon carbide substrate is polished, it is mounted on the ceramic disk. After polishing, the multiple silicon carbide substrates attached to the ceramic disk are directly inspected for defects as a whole by the visual inspection device. The image acquisition position of the existing visual inspection device is fixed, and the image acquisition quality cannot meet the inspection requirements of multiple silicon carbide substrates on the ceramic disk. Summary of the invention

[0004] The purpose of the present invention is to provide a silicon carbide reel defect detector to solve the problem that the image acquisition position of the existing visual inspection device is fixed, which makes it inconvenient to detect defects in the silicon carbide reel.

[0005] In order to achieve the above object, the present invention adopts the following technical solution: a silicon carbide reel defect detector, comprising:

[0006] A supporting seat, on which a rotatable carrier plate is arranged;

[0007] The three-coordinate moving device comprises a frame, a Y-axis mover, a crossbeam, an X-axis mover and a Z-axis mover. The Y-axis mover is arranged on one opposite side of the frame, the end of the crossbeam is fixedly mounted on the Y-axis moving seat of the Y-axis mover, the X-axis mover is arranged along the length direction of the crossbeam, and the Z-axis mover is fixedly mounted on the X-axis moving seat of the X-axis mover:

[0008] A visual camera is fixedly mounted on a Z-axis moving seat of a Z-axis moving device;

[0009] The detection method of the silicon carbide reel defect detector comprises the following steps:

[0010] S1, placing silicon carbide and the ceramic disk as a whole on a carrier plate;

[0011] S2. Rotate the carrier plate horizontally to adjust the placement angle of silicon carbide and the ceramic plate;

[0012] S3, the visual camera 7 above the supporting seat realizes X-axis movement, Y-axis movement, and Z-axis movement through an X-axis mover, a Y-axis mover, and a Z-axis mover, collects multi-position images of silicon carbide, and detects the surface of silicon carbide;

[0013] S4. Remove the silicon carbide and the ceramic disk as a whole from the carrier.

[0014] As a further description of the above technical solution:

[0015] A lifting plate is arranged on the carrier, a storage groove for accommodating the lifting plate is arranged on the carrier, a guide rod is arranged on the back of the lifting plate, the guide rod passes through the carrier, a base plate is arranged on the top of the supporting seat, and a lifting assembly for driving the guide rod is arranged on the base plate.

[0016] As a further description of the above technical solution:

[0017] The lifting plate is an annular plate.

[0018] As a further description of the above technical solution:

[0019] The jacking assembly comprises an annular bottom plate, a jacking block and a jacking cylinder. The annular bottom plate is fixedly installed at the bottom of the guide rod, and the jacking block is fixedly installed on the piston rod of the jacking cylinder.

[0020] As a further description of the above technical solution:

[0021] A slide rail is arranged on the base plate, and the lifting cylinder is slidably connected to the slide rail.

[0022] As a further description of the above technical solution:

[0023] The cross section of the lifting block is in a "C" shape, and an arc-shaped groove body whose shape matches the annular bottom plate is arranged on the lifting block.

[0024] In summary, due to the adoption of the above technical solution, the beneficial effects of the present invention are:

[0025] 1. In the present invention, when detecting defects on the surface of silicon carbide, after the silicon carbide and the ceramic disk are placed as a whole on the carrier of the support seat, the carrier can be rotated to adjust its posture to control the placement angle of the product to be consistent during each detection. Then the visual camera realizes X-axis movement, Y-axis movement, and Z-axis movement through a three-coordinate moving device, and moves to multiple detection points required for detection and set according to requirements. The visual camera collects images at multiple detection points respectively to fully detect whether there are defects on the silicon carbide surface.

[0026] 2. In the present invention, the lifting plate is driven by the lifting assembly to push the silicon carbide and ceramic disk on the carrier plate upward or store them downward in the storage groove, so as to facilitate the removal of the silicon carbide and ceramic disk as a whole and avoid the friction damage caused by the need to push the silicon carbide and ceramic disk horizontally during the removal process. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required for use in the embodiments are briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present invention and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without creative work.

[0028] Figure 1 A schematic diagram of the structure of a silicon carbide reel defect detector Figure 1 .

[0029] Figure 2 A schematic diagram of the structure of a silicon carbide reel defect detector Figure 2 .

[0030] Figure 3 The present invention is a schematic diagram of the structure of a carrier disc in a silicon carbide reel defect detector.

[0031] Figure 4 A cross-sectional view of a carrier disc in a silicon carbide reel defect detector.

[0032] Figure 5 The present invention is a schematic diagram of the structure of a silicon carbide reel in a silicon carbide reel defect detector.

[0033] Legend:

[0034] 1. Support seat; 11. Carrying plate; 111. Lifting plate; 112. Guide rod; 113. Storage groove; 12. Base plate; 13. Annular bottom plate; 14. Lifting block; 141. Arc trough body; 15. Lifting cylinder; 16. Slide rail; 2. Rack; 3. Y-axis mover; 4. Beam; 5. X-axis mover; 6. Z-axis mover; 7. Visual camera; 8. Ceramic disk; 9. Silicon carbide. DETAILED DESCRIPTION

[0035] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Generally, the components of the embodiments of the present invention described and shown in the drawings here can be arranged and designed in various different configurations.

[0036] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the invention claimed for protection, but merely represents selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0037] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0038] In the description of the embodiments of the present invention, it should be noted that the terms "upper", "inner", etc. indicate directions or positional relationships based on the directions or positional relationships shown in the accompanying drawings, or are directions or positional relationships in which the inventive product is usually placed when in use. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore should not be understood as a limitation on the present invention.

[0039] In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "set", "install", "connect", and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a direct connection, or an indirect connection through an intermediate medium, or it can be the internal communication of two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0040] Example 1

[0041] See also Figure 1-5 The present invention provides a technical solution: a silicon carbide reel defect detector, comprising:

[0042] A supporting seat 1, on which a rotatable carrier plate 11 is arranged;

[0043] The three-coordinate moving device comprises a frame 2, a Y-axis moving device 3, a crossbeam 4, an X-axis moving device 5 and a Z-axis moving device 6. The Y-axis moving device 3 is arranged on one opposite side of the frame 2. The end of the crossbeam 4 is fixedly mounted on the Y-axis moving seat of the Y-axis moving device 3. The X-axis moving device 5 is arranged along the length direction of the crossbeam 4. The Z-axis moving device 6 is fixedly mounted on the X-axis moving seat of the X-axis moving device 5.

[0044] A visual camera 7, which is fixedly mounted on a Z-axis moving seat of a Z-axis mover 6;

[0045] The detection method of the silicon carbide reel defect detector comprises the following steps:

[0046] S1, placing the silicon carbide 9 and the ceramic plate 8 as a whole on the carrier plate 11;

[0047] S2, horizontally rotate the carrier plate 11 to adjust the placement angle of the silicon carbide 9 and the ceramic plate 8;

[0048] S3, the visual camera 7 above the supporting seat 1 realizes X-axis movement, Y-axis movement, and Z-axis movement through the X-axis mover 5, the Y-axis mover 3, and the Z-axis mover 6, and performs multi-position image acquisition on the silicon carbide to detect the silicon carbide surface;

[0049] S4, remove the silicon carbide 9 and the ceramic disk 8 from the carrier 11 as a whole.

[0050] Specifically, taking the Y-axis mover 3 as an example, the moving principle of the Y-axis mover 3 is as follows: the Y-axis moving seat is slidably connected to the guide rail, a rack arranged in parallel is provided on one side of the guide rail, the output end of the driving motor on the Y-axis moving seat is connected to the gear, the gear is meshed with the rack, and the Y-axis moving seat is controlled to drive the crossbeam 4 to move. The moving principle of the X-axis mover 5 and the Z-axis mover 6 is the same.

[0051] Working principle: Six sheets of silicon carbide 9 are arranged on the ceramic disk 8. When inspecting the defects on the surface of silicon carbide 9, after placing the silicon carbide 9 and the ceramic disk 8 as a whole on the carrier 11 of the support seat 1, the carrier 11 can rotate to adjust the posture of the silicon carbide 9 and the ceramic disk 8 as a whole, and control the placement angle of the silicon carbide 9 and the ceramic disk 8 as a whole to be consistent each time the inspection is carried out. After that, the visual camera 7 realizes X-axis movement, Y-axis movement, and Z-axis movement through the three-coordinate moving device, and moves to the multiple inspection points required for the inspection and set according to the requirements. The visual camera 7 collects images at multiple inspection points respectively to fully detect whether there are defects on the silicon carbide surface. After the inspection is completed, the silicon carbide 9 and the ceramic disk 8 are removed from the carrier 11 as a whole.

[0052] Example 2

[0053] This embodiment further makes the following technical solutions as an improvement on the above embodiment: a lifting plate 111 is provided on the carrier 11, a receiving groove 113 for receiving the lifting plate 111 is provided on the carrier 11, a guide rod 112 is provided on the back of the lifting plate 111, the guide rod 112 is penetrated through the carrier 11, a base plate 12 is provided on the top of the support seat 1, and a lifting assembly for driving the guide rod 112 is provided on the base plate 12. The lifting plate 111 is driven by the lifting assembly to push the silicon carbide and ceramic disc on the carrier 11 upward or downward to be received in the receiving groove 113, so as to facilitate the removal of the silicon carbide and ceramic disc as a whole, and avoid the friction damage caused by the need to push the ceramic disc horizontally during the removal process.

[0054] The lifting plate 111 is an annular plate, which has a large contact area with the ceramic disc, and can lift and support the ceramic disc stably to avoid damage to the ceramic disc.

[0055] Example 3

[0056] Based on the above embodiments, this embodiment further makes the following improved technical solutions: the lifting assembly includes an annular base plate 13, a lifting block 14 and a lifting cylinder 15, the annular base plate 13 is fixedly mounted on the bottom of the guide rod 112, and the lifting block 14 is fixedly mounted on the piston rod of the lifting cylinder 15.

[0057] The lifting cylinder 15 drives the lifting block 14 to move up and down through the piston rod, so that it drives the annular bottom plate 13 to move up and down, thereby realizing the lifting of the lifting plate 111. The annular bottom plate 13 can also increase the overall deadweight of the lifting member, effectively ensuring that the lifting plate 111 is reset under the action of gravity.

[0058] Four lifting cylinders 15 arranged circumferentially are provided on the base plate 12 to ensure the smooth lifting of the annular bottom plate 13 and the lifting plate 111 .

[0059] Example 4

[0060] This embodiment further provides the following improved technical solutions based on the above embodiment: a slide rail 16 is provided on the base plate 12, and the lifting cylinder 15 is slidably connected to the slide rail 16. The lifting cylinder 15 can move toward the outside of the base plate 12 through the slide rail 16, and the lifting block 14 is separated from the bottom of the annular bottom plate 13, so that the lifting block 14 and the lifting cylinder 15 can be disassembled and maintained.

[0061] Example 5

[0062] This embodiment further provides the following improved technical solution based on the above embodiment: the cross section of the lifting block 14 is “C” shaped, and an arcuate groove body 141 whose shape matches the annular bottom plate 13 is provided on the lifting block 14 .

[0063] Under normal conditions, in order to ensure the free rotation of the carrier 11, the lifting cylinder 15 moves toward the outside of the base plate 12 through the slide rail 16, and the lifting block 14 is separated from the annular bottom plate 13 to achieve avoidance;

[0064] When lifting the carrier plate 11, the lifting cylinder 15 moves in the opposite direction along the slide rail 16, and the lifting block 14 clamps the annular bottom plate 13 through the arc-shaped groove body 141, effectively ensuring the smooth lifting and lowering of the annular bottom plate 13, preventing the horizontal displacement of the annular bottom plate 13, and protecting the guide rod 112. Then, the lifting cylinder 15 lifts the lifting block 14 upward, so that the annular bottom plate 13 and the lifting plate 111 are lifted upward.

[0065] In addition, the plurality of lifting blocks 14 clamp the annular bottom plate 13 through the arc-shaped groove body 141 , and when the supporting base 1 is moved or transported, the carrier plate 11 is locked, and the rotation angle of the carrier plate 11 is limited to avoid damage during transportation.

[0066] The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes according to the technical scheme and inventive concept of the present invention within the technical scope disclosed by the present invention, which should be covered by the protection scope of the present invention.

Claims

1. A silicon carbide reel defect detector, characterized in that: include: A supporting seat, on which a rotatable carrier plate is arranged; A three-coordinate moving device, comprising a frame, a Y-axis mover, a crossbeam, an X-axis mover and a Z-axis mover, wherein the Y-axis mover is arranged on one opposite side of the frame, the end of the crossbeam is fixedly mounted on the Y-axis moving seat of the Y-axis mover, the X-axis mover is arranged along the length direction of the crossbeam, and the Z-axis mover is fixedly mounted on the X-axis moving seat of the X-axis mover; A visual camera, which is fixedly mounted on the Z-axis moving seat of the Z-axis mover; The detection method of the silicon carbide reel defect detector comprises the following steps: S1, placing silicon carbide and the ceramic disk as a whole on a carrier plate; S2. Rotate the carrier plate horizontally to adjust the placement angle of silicon carbide and the ceramic plate; S3, the visual camera 7 above the supporting seat realizes X-axis movement, Y-axis movement, and Z-axis movement through an X-axis mover, a Y-axis mover, and a Z-axis mover, collects multi-position images of silicon carbide, and detects the surface of silicon carbide; S4. Remove the silicon carbide and the ceramic disk as a whole from the carrier.

2. A silicon carbide reel defect detector according to claim 1, characterized in that: A lifting plate is arranged on the carrier, a storage groove for accommodating the lifting plate is arranged on the carrier, a guide rod is arranged on the back of the lifting plate, the guide rod passes through the carrier, a base plate is arranged on the top of the supporting seat, and a lifting component for driving the guide rod is arranged on the base plate.

3. A silicon carbide reel defect detector according to claim 2, characterized in that: The lifting plate is an annular plate.

4. A silicon carbide reel defect detector according to claim 2, characterized in that: The lifting assembly comprises an annular bottom plate, a lifting block and a lifting cylinder. The annular bottom plate is fixedly mounted on the bottom of the guide rod, and the lifting block is fixedly mounted on the piston rod of the lifting cylinder.

5. A silicon carbide reel defect detector according to claim 4, characterized in that: A slide rail is arranged on the base plate, and the lifting cylinder is slidably connected to the slide rail.

6. A silicon carbide reel defect detector according to claim 5, characterized in that: The cross section of the lifting block is "C"-shaped, and the lifting block is provided with an arc-shaped groove body whose shape matches the annular bottom plate.

7. A silicon carbide reel defect detector according to claim 4, characterized in that: The base plate is provided with four jacking cylinders arranged circumferentially.

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