System and method for realizing Fresnel incoherent correlation holographic super-resolution microscopy by multiplexing SLM

Abstract

The invention discloses a system and a method for realizing a Fresnel incoherent correlation holographic super-resolution microscope by multiplexing an SLM. The system comprises a microscope module, a polarization module, a spatial light modulation module, a holographic detection module and an image processing module, the microscope module uses a light source to irradiate a sample and collects sample light; the polarization module comprises a lens and a polarization unit and forms polarized sample light; the spatial light modulation module comprises a spatial light modulator and a conversion unit, and inputs the second modulated sample light into the holographic detection module; the holographic detection module comprises a second quarter-wave plate, an imaging lens unit and a polarization camera, and the image processing module acquires and processes a polarization image set to obtain a reproduced image. According to the method, the integrity of the pattern of the zone plate is kept, the problems of random errors and image quality weakening in the existing Fresnel incoherent correlation holographic technology are solved, and meanwhile, the flexibility of the system is improved.

Description

Technical Field

[0001] The present invention relates to the field of image technology, and in particular to a multiplexed SLM to realize a Fresnel incoherent correlation holographic super-resolution microscopy system and method. Background Art

[0002] Fresnel Incoherent Correlation Holography (FINCH) is an emerging microscopic imaging technology that uses Fresnel diffraction, incoherent light illumination and digital holographic reconstruction technology to break through the optical diffraction limit in imaging resolution, and can be easily combined with existing optical microscopes. A beam of light is divided into two parts through a spatial light modulator (SLM) and focused on different axial planes, and an interference holographic image is generated on the overlapping surface, from which the image of the sample is solved.

[0003] Currently, FINCH has two methods of using SLM. One is to randomly apply one of the two modulation patterns to any pixel, but this method will produce random errors and weaken the image quality. The other is to use polarization selectivity to modulate only horizontally polarized light and not vertically polarized light. However, this method is not flexible enough because it cannot modulate vertically polarized light. Both methods will eventually lead to inflexible subsequent operations and may cause deviations in the resolved image. Summary of the invention

[0004] A multiplexed SLM realizes a Fresnel incoherent correlation holographic super-resolution microscopy system, comprising: a microscope module, a polarization module, a spatial light modulation module, a holographic detection module and an image processing module; The microscope module illuminates the sample with a light source and collects the sample light; The polarizing module includes a lens and a polarizing unit. The lens receives the sample light and transmits it to the polarizing unit. The polarizing unit polarizes the sample light to form polarized sample light. The spatial light modulation module includes a spatial light modulator and a conversion unit, the spatial light modulator is divided into a first action surface and a second action surface, the polarized sample light is incident on the first action surface of the spatial light modulator at a preset angle for modulation to form a first modulated sample light, the conversion unit converts the direction of the first modulated sample light and inputs it into the second action surface of the spatial light modulator for modulation to form a second modulated sample light, and inputs it into the holographic detection module, wherein the spatial light modulator is loaded with a first wave zone plate pattern and a second wave zone plate pattern and displayed on the first action surface and the second action surface respectively, and the second modulated sample light includes a horizontally modulated sample light component and a vertically modulated sample light component; The holographic detection module includes a second quarter wave plate, an imaging lens unit and a polarization camera. The second quarter wave plate receives the horizontal modulated sample light component and the vertical modulated sample light component of the second modulated sample light and converts them into circularly polarized light. The imaging lens unit focuses the circularly polarized light. The polarization camera converts the focused circularly polarized light into linearly polarized light and sets a polarization phase difference between the horizontal component and the vertical component of the linearly polarized light to generate a polarization image set. The image processing module acquires and processes the polarization image set to obtain a complex amplitude holographic image. Through the parameters of the first zone plate pattern, the second zone plate pattern and the imaging lens unit, the focus of the horizontally modulated sample light and the focus of the vertically modulated sample light and the imaging lens unit are respectively obtained, and then the hologram propagation distance is obtained. The reproduced image is obtained through the hologram propagation distance and the complex amplitude holographic image.

[0005] As an implementable embodiment, the conversion unit includes a first quarter wave plate, a multiplexing lens unit and a main reflector in sequence; Wherein, the first quarter wave plate, the multiplexing lens unit and the main reflector are arranged to be coaxial with equal height; The optical axis of the first quarter wave plate is perpendicular to the horizontal direction. , the angle between the plane normal of the first quarter wave plate and the plane normal of the spatial light modulator is a preset angle; The distance between the center of the spatial light modulator and the multiplexing lens unit is equal to the focal length of the multiplexing lens unit, and the focal length of the multiplexing lens unit is the distance between the main reflector and the multiplexing lens unit; The spatial light modulator, the first quarter wave plate, the multiplexing lens unit and the main reflector are located in the same horizontal plane, and the optical axis is in a horizontal direction.

[0006] As an implementation method, the second modulated sample light is obtained by: Receiving polarized sample light through a first active surface of the spatial light modulator, and modulating a horizontal component of the polarized sample light in combination with a first zone plate pattern to form a first modulated sample light, wherein the first modulated sample light includes a first horizontal component and a first vertical component; The first quarter wave plate receives the first modulated sample light and adjusts the first horizontal component and the first vertical component into the first rotation direction component and the second rotation direction component of the circularly polarized light, focuses the light through the multiplexing lens unit to form modulated circularly polarized light, and the main reflector receives the modulated circularly polarized light and flips the direction, and collimates the light through the main reflector to form modulated circular parallel light, wherein the modulated circular parallel light includes the first rotation direction component and the second rotation direction component; The first quarter-wave plate receives the modulated circular parallel light and adjusts the first rotation direction component and the second rotation direction component to the vertical component and the horizontal component of the linearly polarized light to form modulated linear parallel light. The second active surface of the spatial light modulator receives the modulated linear parallel light, and modulates the horizontal component of the modulated linear parallel light in combination with the second wave zone plate pattern to form a second modulated sample light.

[0007] As an implementation method, the optical distance between the imaging lens unit and the spatial light modulator is equal to the focal length of the imaging lens unit; The distance between the imaging lens unit and the image acquisition unit is equal to the focal length of the imaging lens unit; The optical axis direction of the first quarter wave plate is perpendicular to the horizontal direction .

[0008] As an implementable method, the polarization image set is obtained by the following steps: The second quarter wave plate receives the second modulated sample light, and converts the horizontal modulated sample light component and the vertical modulated sample light component into the first circularly polarized light and the second circularly polarized light of the circularly polarized light, and the imaging lens unit focuses the circularly polarized light to form focused circularly polarized light; The polarizer of the polarization camera converts the focused first circularly polarized light and the second circularly polarized light into a first linearly polarized light component and a second linearly polarized light component, both of which have polarization directions equal to the direction of the polarizer, and generates interference, and adds a polarization phase difference between the first linearly polarized light component and the second linearly polarized light component, and uses images generated when the polarization phase difference is 0, π / 2, π, and 3π / 2 as a polarization image set, the polarization image set includes a first polarization image, a second polarization image, a third polarization image, and a fourth polarization image, and the polarization phase difference is equal to the polarizer direction of the polarization camera and the oblique Twice the direction angle.

[0009] As an implementation method, the distances between the focus of the horizontally modulated sample light and the focus of the vertically modulated sample light and the imaging lens unit are obtained by the first zone plate pattern, the second zone plate pattern and the parameters of the imaging lens unit, and then the hologram propagation distance is obtained, including the following steps: The distance between the focus of the vertically modulated sample light and the imaging lens unit is obtained by the focal length of the first zone plate pattern, the focal length of the imaging lens unit and the optical path of the spatial light modulator and recorded as a first distance; The distance between the focus of the horizontally modulated sample light and the imaging lens unit is obtained by the focal length of the second zone plate pattern, the focal length of the imaging lens unit and the optical path of the spatial light modulator and recorded as the second distance; Based on the first distance and the second distance, a third distance is obtained, and a hologram propagation distance is obtained through the third distance; The first distance is expressed as follows:

[0010] The second distance is expressed as follows:

[0011] The third distance is expressed as follows:

[0012] The hologram propagation distance is expressed as follows:

[0013] in, represents the distance between the focus of the vertical component of the reflected modulated sample light and the imaging lens unit, represents the distance between the focus of the horizontal component of the reflected modulated sample light and the imaging lens unit, represents the focal length of the first zone plate pattern, represents the focal length of the second zone plate pattern, represents the optical path between the imaging lens unit and the center of the second action surface zone plate of the spatial light modulator, represents the focal length of the imaging lens unit, Represents the hologram propagation distance.

[0014] As an implementable method, obtaining a reproduced image through the hologram propagation distance and the complex amplitude holographic image includes the following steps: Processing the polarization image set according to the polarization direction and the pixel arrangement to obtain a first polarization image, a second polarization image, a third polarization image, and a fourth polarization image; Obtaining a complex amplitude holographic image based on the first polarization image, the second polarization image, the third polarization image, and the fourth polarization image; According to the hologram propagation distance and the complex amplitude holographic image, image reconstruction calculation is performed in the Fresnel diffraction area to obtain a reconstructed image; The complex amplitude holographic image is expressed as follows:

[0015] The reproduced image is represented as follows:

[0016] in, represents the hologram propagation distance, , , , Represent polarization images, represents the complex amplitude holographic image, Represents the reproduced image, represents the Fourier transform, represents the inverse Fourier transform, represents the complex amplitude transfer function of Fresnel diffraction, , Indicates that the light Projection of the plane and The angle of the axis, Indicates that the light Projection of the plane and The angle of the axis, Represents an imaginary unit.

[0017] As an implementable embodiment, the microscope module includes an objective lens and a first lens, and the polarizing module also includes a second lens; The second lens receives the sample light and converts it into parallel sample light. The polarization unit generates a polarization direction that is parallel to the horizontal direction. Polarized sample light; The first lens and the second lens are arranged to be confocal.

[0018] As an implementable embodiment, the focal length of the first zone plate pattern, the focal length of the second zone plate pattern, and the focal length of the imaging lens unit meet a preset condition, wherein the preset condition is:

[0019] in, represents the focal length of the first zone plate pattern, represents the focal length of the second zone plate pattern, Indicates the focal length of the imaging lens unit.

[0020] A method for realizing Fresnel incoherent correlation holographic super-resolution microscopy by multiplexing SLM, a Fresnel incoherent correlation holographic super-resolution microscopy system based on multiplexing SLM, the system includes a microscope module, a polarizing module, a spatial light modulation module, a holographic detection module and an image processing module, and the method includes the following steps: The microscope module illuminates the sample with a light source and collects the sample light; The lens receives the sample light and transmits it to the polarization unit, and the polarization unit polarizes the sample light to form polarized sample light, wherein the polarization module includes the lens and the polarization unit; The spatial light modulator is divided into a first action surface and a second action surface, the polarized sample light is incident on the first action surface of the spatial light modulator at a preset angle for modulation to form a first modulated sample light, the conversion unit converts the direction of the first modulated sample light and inputs it into the second action surface of the spatial light modulator for modulation to form a second modulated sample light, and inputs it into the holographic detection module, wherein the spatial light modulator is loaded with a first wave zone plate pattern and a second wave zone plate pattern and displayed on the first action surface and the second action surface respectively, the second modulated sample light includes a horizontally modulated sample light component and a vertically modulated sample light component, wherein the spatial light modulation module includes a spatial light modulator and a conversion unit; The holographic detection module includes a second quarter wave plate, an imaging lens unit and a polarization camera, the second quarter wave plate receives the horizontal modulated sample light component and the vertical modulated sample light component of the second modulated sample light and converts them into circularly polarized light, the imaging lens unit focuses the circularly polarized light, the polarization camera converts the focused circularly polarized light into linearly polarized light and sets a polarization phase difference between the two components of the linearly polarized light to generate a polarization image set, wherein the two components are a first linearly polarized light component and a second linearly polarized light component in the same polarization direction, wherein the holographic detection module includes a second quarter wave plate, an imaging lens unit and a polarization camera; The image processing module acquires and processes the polarization image set to obtain a complex amplitude holographic image. Through the parameters of the first zone plate pattern, the second zone plate pattern and the imaging lens unit, the focus of the horizontally modulated sample light and the focus of the vertically modulated sample light and the imaging lens unit are respectively obtained, and then the hologram propagation distance is obtained. The reproduced image is obtained through the hologram propagation distance and the complex amplitude holographic image.

[0021] The present invention has significant technical effects due to the adoption of the above technical solutions: The present invention divides the SLM screen into two parts, and modulates both horizontal and vertical polarized light by multiplexing the optical path, so that the information contained in the sample light is retained to the greatest extent during the modulation process. This is more flexible than the existing solution that can only modulate one beam of light.

[0022] By reasonably setting the focal length of the Fresnel zone plate pattern loaded on the left and right half screens of the SLM, the maximum overlap plane of the two modulated light beams coincides with the focal plane when not modulated, so that there is no need to refocus before and after loading the pattern to the SLM. This is more convenient to use than the solution of modulating only one beam of light, because the maximum overlap plane of the latter cannot coincide with the native focal plane.

[0023] The use of plane mirrors to achieve optical path multiplexing and folding reduces the number of SLMs used and compresses the system volume, ultimately making the reproduced image clearer. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0025] Figure 1 It is a schematic diagram of the overall framework of the system of the present invention; Figure 2 It is a schematic diagram of the overall process of the method of the present invention; Figure 3 is a detailed schematic diagram of a specific embodiment of the system of the present invention; Figure 4 is a schematic diagram of a microscope module in the system of the present invention; Figure 5 is a schematic diagram of a polarizing module in the system of the present invention; Figure 6 is a schematic diagram of a spatial light modulation module in the system of the present invention; Figure 7 is a schematic diagram of a holographic detection module in the system of the present invention; Figure 8 It is a schematic diagram of the arrangement of polarization directions of polarizer modules of a polarization camera in the system of the present invention; Fig. 9 It is a flowchart of the image processing module of the present invention; Fig.10 It is a schematic diagram of a method of loading a zone plate pattern on an SLM of the present invention; Fig.11 It is a schematic diagram of a part of the original image obtained by directly observing gold particles with the optical microscope of the present invention; Fig.12 yes Fig.11 A schematic diagram of the corresponding part of the image reproduced after the output light of the optical microscope of the present invention is processed by the present invention; Fig.13 yes Fig.12 Schematic diagram of the intensity distribution curve on the middle yellow line; Fig.14 is a schematic diagram of another embodiment of the system of the present invention. DETAILED DESCRIPTION

[0026] The present invention is further described in detail below in conjunction with embodiments. The following embodiments are for explanation of the present invention but the present invention is not limited to the following embodiments.

[0027] Embodiment 1: A multiplexed SLM realizes a Fresnel incoherent correlation holographic super-resolution microscopy system, such as Figure 1As shown, it includes: a microscope module 100, a polarizing module 200, a spatial light modulation module 300, a holographic detection module 400 and an image processing module 500; The microscope module 100 uses a light source to illuminate the sample and collect the sample light; The polarization module 200 includes a lens and a polarization unit. The lens receives the sample light and transmits it to the polarization unit. The polarization unit polarizes the sample light to form polarized sample light. The spatial light modulation module 300 includes a spatial light modulator and a conversion unit, the spatial light modulator is divided into a first action surface and a second action surface, the polarized sample light is incident on the first action surface of the spatial light modulator at a preset angle for modulation to form a first modulated sample light, the conversion unit converts the direction of the first modulated sample light and inputs it into the second action surface of the spatial light modulator for modulation to form a second modulated sample light, and inputs it into the holographic detection module, wherein the spatial light modulator is loaded with a first wave zone plate pattern and a second wave zone plate pattern and displayed on the first action surface and the second action surface respectively, and the second modulated sample light includes a horizontally modulated sample light component and a vertically modulated sample light component; The holographic detection module 400 includes a second quarter wave plate, an imaging lens unit and a polarization camera. The second quarter wave plate receives the horizontal modulated sample light component and the vertical modulated sample light component of the second modulated sample light and converts them into circularly polarized light. The imaging lens unit focuses the circularly polarized light. The polarization camera converts the focused circularly polarized light into linearly polarized light and sets a polarization phase difference between the horizontal component and the vertical component of the linearly polarized light to generate a polarization image set. The image processing module 500 acquires and processes the polarization image set to obtain a complex amplitude holographic image, and obtains the distance between the focus of the horizontally modulated sample light and the focus of the vertically modulated sample light and the imaging lens unit through the parameters of the first wave plate pattern, the second wave plate pattern and the imaging lens unit, and then obtains the hologram propagation distance, and obtains the reproduced image through the hologram propagation distance and the complex amplitude holographic image.

[0028] The present invention divides the screen of the spatial light modulator into two parts, namely, a first action surface and a second action surface, and loads a wave zone plate pattern on each of the first action surface and the second action surface, which acts as a concave or convex reflector, thereby realizing SLM screen multiplexing. It can be understood that the surfaces of the first action surface and the second action surface are loaded with corresponding wave zone plate patterns and displayed. Considering that the SLM only has a modulation effect on horizontally polarized light, the core improvement of the present invention lies in the multiplexing of the spatial light modulator and the corresponding device for realizing multiplexing. The polarization direction of the light is changed by multiplexing lens units, the first quarter wave plate and the plane reflector, so that the polarization directions of the horizontal and vertical polarized lights before the incident SLM are interchanged, so that the light of the two polarization states is modulated respectively by the wave zone plate patterns on the two half screens of the SLM.

[0029] The present invention not only maintains the integrity of the wave plate pattern, and can avoid the random error and image quality reduction caused by randomly applying one of the two modulation patterns to any pixel, but also improves the method of using polarization selectivity to modulate only horizontally polarized light but not vertically polarized light, thereby realizing the modulation of horizontally and vertically polarized light respectively.

[0030] The SLM screen is divided into two parts, and both horizontal and vertical polarized light can be modulated by multiplexing the optical path, so that the information contained in the sample light is retained to the greatest extent during the modulation process. The optical path is multiplexed and folded using a plane mirror, which reduces the number of SLMs used and compresses the system volume.

[0031] The following are several exemplary embodiments: In one embodiment, the microscope module includes an objective lens and a first lens, and the polarizing module further includes a second lens; The second lens receives the sample light and converts it into parallel sample light. The polarization unit generates a polarization direction that is parallel to the horizontal direction. The first lens and the second lens are arranged to be confocal; in addition, the polarization unit comprises a polarization beam splitter and a half-wave plate; The second lens receives the sample light and converts it into parallel sample light. The polarization beam splitter transmits only the horizontal polarization component of the parallel sample light to form linear polarized light. The half-wave plate changes the polarization direction of the reflected linear polarized light to be parallel to the horizontal direction. That is, polarized sample light is formed, and the main optical axis direction of the half-wave plate is 22.5 degrees to the horizontal direction. 。 .

[0032] In addition, the focal length of the first zone plate pattern, the focal length of the second zone plate pattern, and the focal length of the imaging lens unit meet preset conditions, wherein the preset conditions are:

[0033] in, represents the focal length of the first zone plate pattern, represents the focal length of the second zone plate pattern, Indicates the focal length of the imaging lens unit.

[0034] In one embodiment, the conversion unit includes a first quarter wave plate, a multiplexing lens unit and a primary reflector in sequence; Wherein, the first quarter wave plate, the multiplexing lens unit and the main reflector are arranged to be coaxial with equal height; The optical axis of the first quarter wave plate is perpendicular to the horizontal direction. , the angle between the plane normal of the first quarter wave plate and the plane normal of the spatial light modulator is a preset angle; The distance between the center of the spatial light modulator and the multiplexing lens unit is equal to the focal length of the multiplexing lens unit, and the focal length of the multiplexing lens unit is the distance between the main reflector and the multiplexing lens unit; The spatial light modulator, the first quarter wave plate, the multiplexing lens unit and the main reflector are located in the same horizontal plane, and the optical axis is in a horizontal direction.

[0035] In one embodiment, the second modulated sample light is obtained by: Receiving polarized sample light through a first active surface of the spatial light modulator, and modulating a horizontal component of the polarized sample light in combination with a first zone plate pattern to form a first modulated sample light, wherein the first modulated sample light includes a first horizontal component and a first vertical component; The first quarter wave plate receives the first modulated sample light and adjusts the first horizontal component and the first vertical component into the first rotation direction component and the second rotation direction component of the circularly polarized light, focuses the light through the multiplexing lens unit to form modulated circularly polarized light, and the main reflector receives the modulated circularly polarized light and flips the direction, and collimates the light through the main reflector to form modulated circular parallel light, wherein the modulated circular parallel light includes the first rotation direction component and the second rotation direction component; The first quarter wave plate receives the modulated circular parallel light and adjusts the first rotation direction component and the second rotation direction component to the vertical component and the horizontal component of the linear polarized light to form the modulated linear parallel light. The second action surface of the spatial light modulator receives the modulated linear parallel light and modulates the horizontal component of the modulated linear parallel light in combination with the second zone plate pattern to form the second modulated sample light. That is to say, after the sample light passes through the conversion unit, the first horizontal component of the first modulated sample light is converted into the vertical modulated sample light of the second modulated sample light, and the first vertical component of the first modulated sample light is converted into the horizontal modulated sample light of the second modulated sample light.

[0036] In one embodiment, the optical distance between the imaging lens unit and the spatial light modulator is equal to the focal length of the imaging lens unit; The distance between the imaging lens unit and the image acquisition unit is equal to the focal length of the imaging lens unit; The optical axis direction of the first quarter wave plate is perpendicular to the horizontal direction .

[0037] In one embodiment, the polarization image set is obtained by the following steps: The second quarter wave plate receives the vertical component and the horizontal component of the reflected modulated sample light and converts them into circularly polarized light, and the imaging lens unit focuses the light to form sample circularly polarized light; The polarizer of the polarization camera converts the focused first circularly polarized light and the second circularly polarized light into a first linearly polarized light component and a second linearly polarized light component, both of which have polarization directions equal to the direction of the polarizer, and generates interference, and adds a polarization phase difference between the first linearly polarized light component and the second linearly polarized light component, and uses images generated when the polarization phase difference is 0, π / 2, π, and 3π / 2 as a polarization image set, the polarization image set includes a first polarization image, a second polarization image, a third polarization image, and a fourth polarization image, and the polarization phase difference is equal to the polarizer direction of the polarization camera and the oblique Twice the direction angle.

[0038] In one embodiment, the distances between the focus of the horizontally modulated sample light and the focus of the vertically modulated sample light and the imaging lens unit are obtained by using the first zone plate pattern, the second zone plate pattern and the parameters of the imaging lens unit, and then the hologram propagation distance is obtained, including the following steps: The distance between the focus of the vertically modulated sample light and the imaging lens unit is obtained by the focal length of the first zone plate pattern, the focal length of the imaging lens unit and the optical path of the spatial light modulator and recorded as a first distance; The distance between the focus of the horizontally modulated sample light and the imaging lens unit is obtained by the focal length of the second zone plate pattern, the focal length of the imaging lens unit and the optical path of the spatial light modulator and recorded as the second distance; Based on the first distance and the second distance, a third distance is obtained, and a hologram propagation distance is obtained through the third distance; The first distance is expressed as follows:

[0039] The second distance is expressed as follows:

[0040] The third distance is expressed as follows:

[0041] The hologram propagation distance is expressed as follows:

[0042] in, represents the distance between the focus of the vertical component of the reflected modulated sample light and the imaging lens unit, represents the distance between the focus of the horizontal component of the reflected modulated sample light and the imaging lens unit, represents the focal length of the first zone plate pattern, represents the focal length of the second zone plate pattern, represents the optical path between the imaging lens unit and the center of the second action surface zone plate of the spatial light modulator, represents the focal length of the imaging lens unit, Represents the hologram propagation distance.

[0043] In one embodiment, the method of obtaining a reconstructed image through the hologram propagation distance and the complex amplitude holographic image comprises the following steps: Processing the polarization image set according to the polarization direction and the pixel arrangement to obtain a first polarization image, a second polarization image, a third polarization image, and a fourth polarization image; Obtaining a complex amplitude holographic image based on the first polarization image, the second polarization image, the third polarization image, and the fourth polarization image; According to the hologram propagation distance and the complex amplitude holographic image, image reconstruction calculation is performed in the Fresnel diffraction area to obtain a reconstructed image; The complex amplitude holographic image is expressed as follows:

[0044] The reproduced image is represented as follows:

[0045] in, represents the hologram propagation distance, , , , Represent polarization images, represents the complex amplitude holographic image, Represents the reproduced image, represents the Fourier transform, represents the inverse Fourier transform, represents the complex amplitude transfer function of Fresnel diffraction, , Indicates that the light Projection of the plane and The angle of the axis, Indicates that the light Projection of the plane and The angle of the axis, Represents an imaginary unit.

[0046] The following are specific embodiments: In one embodiment, the multiplexing SLM realizes the Fresnel incoherent correlation holographic super-resolution microscopy system, see the attached Figure 1 As shown, it includes a microscope module 100 , a polarizing module 200 , a spatial light modulation module 300 , a holographic detection module 400 , and finally an image processing module 500 .

[0047] Specific, combined Figure 4As shown, the microscope module 100 includes an objective lens 102, a first lens 103, and a first image plane 104. The objective lens 102 and the first lens 103 can magnify the sample 101 by a certain multiple and then image it onto the first image plane 104. If the observed light is a wide spectrum such as fluorescence, the microscope should also include a suitable filter to make the light emitted by the sample have better monochromaticity.

[0048] like Figure 5 As shown, Figure 5 is a specific embodiment of the polarizing module 200. In actual operation, the polarizing module 200 may include a second lens 201 and a polarizing unit 202. In other embodiments, for example Figure 3 The polarization unit 202 shown in the figure can be replaced by a combination of a polarization beam splitter 211 and a half-wave plate 212. The second lens 201 should have a suitable focal length f1, so that the sample light derived from the microscope module 100 can be transformed into parallel light. The polarization unit should be placed at a position behind the second lens 201 that does not interfere with other parts of the light path, and convert the sample light into a light in a direction parallel to the horizontal direction. The linearly polarized light is polarized and exported to the spatial light modulation module.

[0049] like Figure 6 As shown, the spatial light modulation module 300 includes a spatial light modulator 301, a first quarter wave plate 302, a multiplexing lens unit 303 and a main reflector 304. When in use, the spatial light modulator (Spatial Light Modulator, SLM), the first quarter wave plate 302 (Quarter Wave Plate 1, QWP1), the multiplexing lens unit 303, and the main reflector 304 are fixed in a suitable position by a fixing device or other fixing structure, so that the sample light is at an angle with the normal line of the SLM display screen plane. The first working surface (here, the left half plane) of the SLM display screen is incident from the direction of (the angle will be determined according to the optimal working angle calibrated by the SLM, which will not be repeated here); QWP1, i.e., the angle between the plane normal of the first quarter-wave plate 302 and the plane normal of the SLM display screen is also (The angle is explained above), the angle between the optical axis and the horizontal direction is ; L3, i.e., the multiplexing lens unit 303, has a focal length of f3 and is placed after QWP1, i.e., the first quarter wave plate 302, at a distance f3 from the SLM; the main reflector is placed at a distance f3 behind the multiplexing lens unit 303; the light incident on the first active surface of the SLM display screen passes through the first quarter wave plate 302 and the multiplexing lens unit 303, is reflected by M2, i.e., the main reflector 304, and then passes through L3, i.e., the multiplexing lens unit 303 and QWP1, i.e., the first quarter wave plate 302 again to reach the second active surface of the SLM (here, the right half plane); the light emitted from the SLM enters the holographic detection module, and L3, i.e., the multiplexing lens unit 303, QWP1, i.e., the first quarter wave plate 302, and the main reflector should maintain an equi-height coaxial relationship, and all components are in the same horizontal plane so that the optical axis remains horizontal. The left and right half planes of the SLM are each loaded with a wave zone plate pattern, which acts as a concave or convex reflector. An example pattern is as follows Fig.10 As shown, the two zone plates loaded are shown in Fig.10 shown.

[0050] like Figure 7 As shown, the holographic detection module 400 includes a second quarter wave plate 401, an imaging lens unit 402, and a polarization camera 403. The light path is emitted from the spatial light modulation module and passes through QWP2, i.e., the second quarter wave plate 401. The optical axis of QWP2, i.e., the second quarter wave plate 401, is in a horizontal plane. ; L4, i.e., the imaging lens group 402, has a focal length of f4 and is placed behind QWP2, i.e., the second quarter wave plate 401; the polarization camera is placed at f4 behind the imaging lens group 402, and a polarizer group is placed in front of the sensor plane. The polarization directions of the polarizer group include horizontal, vertical, and , four polarization directions at 135° to the horizontal direction, and there are preset arrangements, such as Figure 8 As shown; the polarization camera 403 is connected to a computer or other server, and all components should maintain an equi-height coaxial relationship.

[0051] The image processing module 500 acquires and processes the polarization image set to obtain a complex amplitude holographic image, and obtains the distance between the focus of the horizontally modulated sample light and the focus of the vertically modulated sample light and the imaging lens unit through the parameters of the first wave plate pattern, the second wave plate pattern and the imaging lens unit, and then obtains the hologram propagation distance, and obtains the reproduced image through the hologram propagation distance and the complex amplitude holographic image.

[0052] The image processing module 500 is specifically a process of reversing the holographic program to calculate the super-resolution image. The overall process can be seen in the attached Fig. 9 As shown, the steps of implementation combined with the specific parameters of the entire implementation process are as follows: Calculate the focal position f of the vertically modulated sample light respectively sand the focal position f of the horizontally modulated sample light p , and the hologram propagation distance z is calculated r and as a preset parameter; The polarization image set obtained by the polarization camera is sorted into four phase-shift holograms according to the polarization direction. The four phase-shift holograms correspond to phases 0, π / 2, π, and 3π / 2 respectively. Calculate the complex amplitude hologram U through four polarization images; According to the hologram propagation distance z r ,wavelength , wave number k and complex amplitude hologram, and calculate the reconstructed image U f .

[0053] In actual operation, Figure 3 As shown, Figure 3 This is a specific structural diagram made according to the scheme of the present invention. Combined with the sample optical path transmission, the process of the entire system is as follows: The fluorescent light or reflected light emitted by the sample 101 when irradiated by a light source such as a mercury lamp is collected by the objective lens 102 and enters the first lens 103, and is reflected by the built-in folding reflector 601 to form an image on the first image plane 104, and then enters the polarizing module; the second lens 201 and the first lens 103 in the polarizing module 200 must meet the cofocal condition, so that the sample light becomes parallel light after passing through the second lens 201, and the parallel light becomes linearly polarized light polarized in the horizontal direction after passing through the polarization beam splitter 211, and after being reflected by the first folding reflector 602, it enters the half-wave plate 212, and its main optical axis direction should be 22.5° with the horizontal direction, so that the polarization direction of the sample light becomes linearly polarized light polarized in the horizontal direction. , and introduced into the spatial light modulation module 300. The polarization beam splitter 211 and the half-wave plate 212 here jointly constitute a polarization unit, which is equivalent to a horizontal direction. The polarizer is not used, but the polarization beam splitter separates another beam of vertically polarized light, which can be used for ordinary wide-field imaging or other imaging methods.

[0054] The spatial light modulator 301 is fixed in a suitable position so that the sample light emitted from the half-wave plate is reflected by the third folding reflector 603 to be aligned with the normal line of the SLM display screen plane. The direction of the incident light enters the right half plane of the SLM display screen; the distance that the light travels from the second lens 201 to the spatial light modulator 301 is equal to the focal length of the second lens 201; the angle between the plane normal of the first quarter wave plate 302 and the plane normal of the SLM display screen is . Determined by the SLM model used in this example. If a different brand or model of SLM is used, the angle should be changed according to the relevant product instructions. The SLM used in this example only modulates the incident light polarized in the horizontal direction, and only reflects the incident light polarized in the vertical direction.

[0055] The left and right half screens of the SLM should be loaded with two Fresnel zone plate patterns with different focal lengths, usually one positive and one negative. The focal lengths of the two zone plate patterns should satisfy the following relationship:

[0056] Among them, f s is the focal length of the Fresnel zone plate pattern loaded on the right half of the screen, f p The focal length of the Fresnel zone plate pattern loaded on the left half of the screen. Here we need to explain that the zone plate pattern loaded on the SLM has a corresponding focal length because the grayscale value of the zone plate pattern changes according to a specific rule. From a functional point of view, it has the same modulation effect on the light phase as the physical element of the zone plate.

[0057] The wave plate optical axis of the first quarter wave plate 302 is aligned with the horizontal direction. The multiplexing lens unit 303 is placed after the first quarter wave plate 302, with a focal length of f3 and a distance from the center of the SLM screen of f3; the main reflector 304 is placed after the multiplexing lens unit 303 at f3; the light emitted from the spatial light modulator 301 enters the holographic detection module after being reflected by the fourth folding reflector 604. The first quarter wave plate 302, the multiplexing lens unit 303 and the main reflector 304 should maintain a strict equal height coaxial relationship.

[0058] After being processed by the previous modules, the sample light has become polarized sample light. After the polarized sample light enters the spatial light modulator 301 for the first time, the horizontal component of the polarized sample light, i.e., E s The vertical component of the polarized sample light modulated by the zone plate pattern on the first action surface (here the right half of the screen) is E p Without modulation, it can be understood that the first modulated sample light is formed at this time; after passing through the first quarter wave plate 302, the first modulated sample light includes a first horizontal component and a first vertical component, that is, the horizontal and vertical directions are respectively changed into the first rotation direction E1 and the second rotation direction E2 of circularly polarized light with opposite rotation directions; the circularly polarized light is focused by the multiplexing lens unit 303, reflected by the main reflector 304, and the rotation direction is reversed, and it is collimated into parallel light by the multiplexing lens unit 303 again; when passing through the first quarter wave plate 302 again, the circularly polarized light becomes linearly polarized light, but at this time its horizontal component is E p (unmodulated), and the vertical component is E s(has been modulated), at this time, modulated line parallel light has been formed; after the modulated line parallel light enters the spatial light modulator 301 for the second time, its horizontal component is modulated by the wave plate pattern of the second active surface of the spatial light modulator 301 (here is the left half screen), while the vertical component is not subject to additional modulation. At this time, it is already the second modulated sample light, and both the vertical component and the horizontal component have been modulated and reflected by the fourth folding reflector 604 into the holographic detection module.

[0059] The vertical component E of the second modulated sample light emitted from the fourth folding mirror s and the horizontal component E p It passes through the second quarter wave plate 401 and becomes circularly polarized light again. The optical path between the imaging lens unit 402 (focal length is f4) and the center of the left half screen zone plate of the spatial light modulator 301 is f4, and the optical path between the imaging lens unit 402 (focal length is f4) and the CCD plane of the polarization camera 403 is also f4. Therefore, when the SLM does not apply a phase modulation pattern, it can ensure that the sample light can be focused on the CCD plane of the polarization camera through the imaging lens unit after various conversions and then entering the holographic detection module. After passing through the second quarter wave plate 401, the vertical component E of the second modulated sample light s and the horizontal component E p The polarizer array in front of the CCD of the polarization camera converts the two components corresponding to the circular polarized light back into linear polarized light and causes interference between the two components. The polarization directions of the two components are equal to the direction of the polarizer. By applying a constant phase difference between the two components of the linear polarized light, polarization images with phase differences of 0, π / 2, π, and 3π / 2 are formed into a polarization image set.

[0060] After acquiring the four-phase polarization images captured by the camera, the steps to calculate the super-resolution reconstructed image are as follows: Step 1: Calculate the focal positions of the s-light and p-light modulated by the SLM respectively. The calculation formula is as follows:

[0061]

[0062] Among them, z s 、z p The focal distances of the s-light and p-light are the positions of the imaging lens unit 402, f p 、f s are the focal lengths of the left and right half-screen zone plates of the spatial light modulator 301, respectively; l4 is the optical path between the imaging lens unit 402 and the center of the right half-screen zone plate of the spatial light modulator 301; f4 is the focal length of the imaging lens group 402; l4 and f4 should be strictly equal. Then the hologram propagation distance z is calculated. r , the formula is as follows:

[0063] Step 2: Arrange the original image acquired by the polarization camera into four phase-shift holograms according to the polarization direction and pixel arrangement, corresponding to phases 0, π / 2, π, and 3π / 2, respectively. Suppose the phase-shift holograms are I1, I2, I3, and I4; Step 3: Obtain the complex amplitude holographic image U through the phase-shifted holograms I1, I2, I3, and I4. The formula is as follows:

[0064] Step 4: According to the hologram propagation distance z r ,wavelength , wave number and U, the reconstructed image U is calculated in the Fresnel diffraction region f , which is expressed as follows:

[0065] in, represents the Fourier transform, represents the inverse Fourier transform, represents the complex amplitude transfer function of Fresnel diffraction, , are the angles between the projection of the light on the xz plane and the yz plane and the z axis, Represents an imaginary unit.

[0066] Through the above steps, the present invention has achieved the following effects: Figures 11 to 13 shown. Fig.11 It is a part of the image obtained by direct observation under an optical microscope. Fig.11 is the corresponding part of the image reconstructed after the output light of the optical microscope is processed by the present invention, Fig.13 for Fig.11 The straight line determined by the coordinates (1926, 1206) and (1939, 1202) Fig.12 Ordinary optical microscopes cannot distinguish Fig.11 The bright spots shown by Fig.12 As shown in FIG. 1 , the present invention can distinguish that the bright spot is actually composed of two reflected light spots of gold particles, and can be Fig.13 Further explanation.

[0067] That is to say, the present invention divides the SLM screen into two parts, and modulates both horizontal and vertical polarized light by multiplexing the optical path, so that the information contained in the sample light is retained to the greatest extent during the modulation process. It is more flexible than the existing solution that can only modulate one beam of light. By reasonably setting the focal length of the Fresnel zone plate pattern loaded on the left and right half screens of the SLM, the maximum overlap surface of the two modulated light beams coincides with the focal plane when not modulated, so that there is no need to refocus before and after loading the pattern to the SLM, which is more convenient to use than the solution of only modulating one beam of light, because the maximum overlap surface of the latter and the native focal plane cannot coincide. The use of plane reflectors to achieve optical path multiplexing and folding reduces the number of SLMs used and compresses the system volume.

[0068] In addition, in other embodiments, the plane reflector is increased or decreased or its position in the optical path is changed, and the folding mode of the optical path is modified accordingly; a 4f relay optical path is set at an appropriate place; the QWP, the half-wave plate and the polarization beam splitter are moved to the other end of the lens adjacent thereto. The overall schematic diagram is shown in FIG. Fig.14 shown.

[0069] Embodiment 2: A method for realizing Fresnel incoherent correlation holographic super-resolution microscopy by multiplexing SLM is provided. A Fresnel incoherent correlation holographic super-resolution microscopy system is realized based on multiplexing SLM. The system includes a microscope module, a polarizing module, a spatial light modulation module, a holographic detection module and an image processing module. Figure 2 As shown, the method comprises the following steps: S100, the microscope module uses a light source to illuminate the sample and collects the sample light; S200, a lens receives sample light and transmits the sample light to a polarization unit, and the polarization unit polarizes the sample light to form polarized sample light, wherein the polarization module includes a lens and a polarization unit; S300, dividing the spatial light modulator into a first action surface and a second action surface, polarized sample light is incident on the first action surface of the spatial light modulator at a preset angle for modulation to form a first modulated sample light, a conversion unit converts the direction of the first modulated sample light and inputs it into the second action surface of the spatial light modulator for modulation to form a second modulated sample light, and inputs it into the holographic detection module, wherein the spatial light modulator is loaded with a first wave zone plate pattern and a second wave zone plate pattern and displayed on the first action surface and the second action surface respectively, the second modulated sample light includes a horizontally modulated sample light component and a vertically modulated sample light component, wherein the spatial light modulation module includes a spatial light modulator and a conversion unit; S400, the holographic detection module includes a second quarter wave plate, an imaging lens unit and a polarization camera, the second quarter wave plate receives the horizontal modulated sample light component and the vertical modulated sample light component of the second modulated sample light and converts them into circularly polarized light, the imaging lens unit focuses the circularly polarized light, the polarization camera converts the focused circularly polarized light into linearly polarized light and sets a polarization phase difference between the two components of the linearly polarized light to generate a polarization image set, wherein the two components are a first linearly polarized light component and a second linearly polarized light component in the same polarization direction, wherein the holographic detection module includes a second quarter wave plate, an imaging lens unit and a polarization camera; S500, the image processing module acquires and processes the polarization image set to obtain a complex amplitude holographic image, and obtains the distance between the focus of the horizontally modulated sample light and the focus of the vertically modulated sample light and the imaging lens unit through the parameters of the first wave plate pattern, the second wave plate pattern and the imaging lens unit, and then obtains the hologram propagation distance, and obtains the reproduced image through the hologram propagation distance and the complex amplitude holographic image.

[0070] Various changes and modifications can be made without departing from the spirit and scope of the present invention, and all equivalent technical solutions also belong to the scope of the present invention.

[0071] The various embodiments in this specification are described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same or similar parts between the various embodiments can be referenced to each other.

[0072] It will be appreciated by those skilled in the art that embodiments of the present invention may be provided as methods, devices, or computer program products. Therefore, the present invention may take the form of a complete hardware embodiment, a complete software embodiment, or an embodiment combining software and hardware. Moreover, the present invention may take the form of a computer program product implemented on one or more computer-usable storage media (including but not limited to disk storage, CD-ROM, optical storage, etc.) containing computer-usable program code.

[0073] The present invention is described with reference to the flowcharts and / or block diagrams of the method, terminal device (system), and computer program product according to the present invention. It should be understood that each process and / or block in the flowchart and / or block diagram, as well as the combination of the processes and / or blocks in the flowchart and / or block diagram, can be implemented by computer program instructions. These computer program instructions can be provided to a processor of a general-purpose computer, a special-purpose computer, an embedded processor, or other programmable data processing terminal device to generate a machine, so that the instructions executed by the processor of the computer or other programmable data processing terminal device generate instructions for implementing the processes in the flowchart and / or block diagram. Figure 1 A process or multiple processes and / or boxes Figure 1 A device that provides the functions specified in a block or multiple blocks.

[0074] These computer program instructions may also be stored in a computer readable memory capable of directing a computer or other programmable data processing terminal device to operate in a specific manner, so that the instructions stored in the computer readable memory produce a manufactured product including an instruction device, which implements the process Figure 1 A process or multiple processes and / or boxes Figure 1 A function specified in one or more boxes.

[0075] These computer program instructions can also be loaded onto a computer or other programmable data processing terminal device so that a series of operating steps are executed on the computer or other programmable terminal device to produce a computer-implemented process, thereby providing instructions for executing on the computer or other programmable terminal device to implement the process. Figure 1 A process or multiple processes and / or boxes Figure 1 The steps for the functions specified in one or more boxes.

[0076] It should be noted that: The "one embodiment" or "embodiment" mentioned in the specification means that the specific features, structures or characteristics described in conjunction with the embodiment are included in at least one embodiment of the present invention. Therefore, the phrases "one embodiment" or "embodiment" appearing in various places throughout the specification do not necessarily refer to the same embodiment.

[0077] In addition, it should be noted that the shapes and names of the parts and components of the specific embodiments described in this specification may be different. Any equivalent or simple changes made based on the structure, features and principles described in the patent concept of the present invention are included in the protection scope of the patent of the present invention. The technicians in the technical field of the present invention can make various modifications or supplements to the specific embodiments described or replace them in a similar manner, as long as they do not deviate from the structure of the present invention or exceed the scope defined by the claims, they should all fall within the protection scope of the present invention.

Claims

1. A multiplexed SLM to realize Fresnel incoherent correlation holographic super-resolution microscopy system, characterized in that: include: Microscope module, polarization module, spatial light modulation module, holographic detection module and image processing module; The microscope module illuminates the sample with a light source and collects the sample light; The polarizing module includes a lens and a polarizing unit. The lens receives the sample light and transmits it to the polarizing unit. The polarizing unit polarizes the sample light to form polarized sample light. The spatial light modulation module includes a spatial light modulator and a conversion unit, the spatial light modulator is divided into a first action surface and a second action surface, the polarized sample light is incident on the first action surface of the spatial light modulator at a preset angle for modulation to form a first modulated sample light, the conversion unit converts the direction of the first modulated sample light and inputs it into the second action surface of the spatial light modulator for modulation to form a second modulated sample light, and inputs it into the holographic detection module, wherein the spatial light modulator is loaded with a first wave zone plate pattern and a second wave zone plate pattern and displayed on the first action surface and the second action surface respectively, and the second modulated sample light includes a horizontally modulated sample light component and a vertically modulated sample light component; The holographic detection module includes a second quarter-wave plate, an imaging lens unit and a polarization camera, wherein the second quarter-wave plate receives the horizontal modulated sample light component and the vertical modulated sample light component of the second modulated sample light and converts them into circularly polarized light, the imaging lens unit focuses the circularly polarized light, and the polarization camera converts the focused circularly polarized light into linearly polarized light and sets a polarization phase difference between the two components of the linearly polarized light to generate a polarization image set, wherein the two components are a first linearly polarized light component and a second linearly polarized light component in the same polarization direction; The image processing module acquires and processes the polarization image set to obtain a complex amplitude holographic image. Through the parameters of the first zone plate pattern, the second zone plate pattern and the imaging lens unit, the focus of the horizontally modulated sample light and the focus of the vertically modulated sample light and the imaging lens unit are respectively obtained, and then the hologram propagation distance is obtained. The reproduced image is obtained through the hologram propagation distance and the complex amplitude holographic image.

2. The Fresnel incoherent correlation holographic super-resolution microscopy system realized by multiplexing SLM according to claim 1, characterized in that: The conversion unit includes a first quarter wave plate, a multiplexing lens unit and a main reflector in sequence; Wherein, the first quarter wave plate, the multiplexing lens unit and the main reflector are arranged to be coaxial with equal height; The optical axis of the first quarter wave plate is perpendicular to the horizontal direction. , the angle between the plane normal of the first quarter wave plate and the plane normal of the spatial light modulator is a preset angle; The distance between the center of the spatial light modulator and the multiplexing lens unit is equal to the focal length of the multiplexing lens unit, and the focal length of the multiplexing lens unit is the distance between the main reflector and the multiplexing lens unit; The spatial light modulator, the first quarter wave plate, the multiplexing lens unit and the main reflector are located in the same horizontal plane, and the optical axis is in a horizontal direction.

3. The Fresnel incoherent correlation holographic super-resolution microscopy system realized by multiplexing SLM according to claim 1, characterized in that: The second modulated sample light is obtained by: Receiving polarized sample light through a first active surface of the spatial light modulator, and modulating a horizontal component of the polarized sample light in combination with a first zone plate pattern to form a first modulated sample light, wherein the first modulated sample light includes a first horizontal component and a first vertical component; The first quarter wave plate receives the first modulated sample light and adjusts the first horizontal component and the first vertical component into the first rotation direction component and the second rotation direction component of the circularly polarized light, focuses the light through the multiplexing lens unit to form modulated circularly polarized light, and the main reflector receives the modulated circularly polarized light and flips the direction, and collimates the light through the main reflector to form modulated circular parallel light, wherein the modulated circular parallel light includes the first rotation direction component and the second rotation direction component; The first quarter-wave plate receives the modulated circular parallel light and adjusts the first rotation direction component and the second rotation direction component to the vertical component and the horizontal component of the linearly polarized light to form modulated linear parallel light. The second active surface of the spatial light modulator receives the modulated linear parallel light, and modulates the horizontal component of the modulated linear parallel light in combination with the second wave zone plate pattern to form a second modulated sample light.

4. The Fresnel incoherent correlation holographic super-resolution microscopy system realized by multiplexing SLM according to claim 1, characterized in that: The optical distance between the imaging lens unit and the spatial light modulator is equal to the focal length of the imaging lens unit; The distance between the imaging lens unit and the image acquisition unit is equal to the focal length of the imaging lens unit; The optical axis direction of the first quarter wave plate is perpendicular to the horizontal direction .

5. The Fresnel incoherent correlation holographic super-resolution microscopy system realized by multiplexing SLM according to claim 1, characterized in that: The polarization image set is obtained by the following steps: The second quarter wave plate receives the second modulated sample light, and converts the horizontal modulated sample light component and the vertical modulated sample light component into the first circularly polarized light and the second circularly polarized light of the circularly polarized light, and the imaging lens unit focuses the circularly polarized light to form focused circularly polarized light; The polarizer of the polarization camera converts the focused first circularly polarized light and the second circularly polarized light into a first linearly polarized light component and a second linearly polarized light component, both of which have polarization directions equal to the direction of the polarizer, and generates interference, and adds a polarization phase difference between the first linearly polarized light component and the second linearly polarized light component, and uses images generated when the polarization phase difference is 0, π / 2, π, and 3π / 2 as a polarization image set, the polarization image set includes a first polarization image, a second polarization image, a third polarization image, and a fourth polarization image, and the polarization phase difference is equal to the polarizer direction of the polarization camera and the oblique Twice the direction angle.

6. The Fresnel incoherent correlation holographic super-resolution microscopy system realized by multiplexing SLM according to claim 1, characterized in that: The method of obtaining the distances between the focus of the horizontally modulated sample light and the focus of the vertically modulated sample light and the imaging lens unit respectively through the first zone plate pattern, the second zone plate pattern and the parameters of the imaging lens unit, and then obtaining the hologram propagation distance, comprises the following steps: The distance between the focus of the vertically modulated sample light and the imaging lens unit is obtained by the focal length of the first zone plate pattern, the focal length of the imaging lens unit and the optical path of the spatial light modulator and recorded as a first distance; The distance between the focus of the horizontally modulated sample light and the imaging lens unit is obtained by the focal length of the second zone plate pattern, the focal length of the imaging lens unit and the optical path of the spatial light modulator and recorded as the second distance; Based on the first distance and the second distance, a third distance is obtained, and a hologram propagation distance is obtained through the third distance; The first distance is expressed as follows: The second distance is expressed as follows: The third distance is expressed as follows: The hologram propagation distance is expressed as follows: in, represents the distance between the focus of the vertical component of the reflected modulated sample light and the imaging lens unit, represents the distance between the focus of the horizontal component of the reflected modulated sample light and the imaging lens unit, represents the focal length of the first zone plate pattern, represents the focal length of the second zone plate pattern, represents the optical path between the imaging lens unit and the center of the second action surface zone plate of the spatial light modulator, represents the focal length of the imaging lens unit, Represents the hologram propagation distance.

7. The Fresnel incoherent correlation holographic super-resolution microscopy system realized by multiplexing SLM according to claim 1, characterized in that: The method of obtaining a reproduced image through the hologram propagation distance and the complex amplitude holographic image comprises the following steps: Processing the polarization image set according to the polarization direction and the pixel arrangement to obtain a first polarization image, a second polarization image, a third polarization image, and a fourth polarization image; Obtaining a complex amplitude holographic image based on the first polarization image, the second polarization image, the third polarization image, and the fourth polarization image; According to the hologram propagation distance and the complex amplitude holographic image, image reconstruction calculation is performed in the Fresnel diffraction area to obtain a reconstructed image; The complex amplitude holographic image is expressed as follows: The reproduced image is represented as follows: in, represents the hologram propagation distance, , , , Represent polarization images, represents the complex amplitude holographic image, Represents the reproduced image, represents the Fourier transform, represents the inverse Fourier transform, represents the complex amplitude transfer function of Fresnel diffraction, , Indicates that the light Projection of the plane and The angle of the axis, Indicates that the light Projection of the plane and The angle of the axis, Represents an imaginary unit.

8. The Fresnel incoherent correlation holographic super-resolution microscopy system realized by multiplexing SLM according to claim 1, characterized in that: The microscope module includes an objective lens and a first lens, and the polarizing module also includes a second lens; The second lens receives the sample light and converts it into parallel sample light. The polarization unit generates a polarization direction that is parallel to the horizontal direction. Polarized sample light; The first lens and the second lens are arranged to be confocal.

9. The Fresnel incoherent correlation holographic super-resolution microscopy system realized by multiplexing SLM according to claim 1, characterized in that: The focal length of the first zone plate pattern, the focal length of the second zone plate pattern, and the focal length of the imaging lens unit meet preset conditions, wherein the preset conditions are: in, represents the focal length of the first zone plate pattern, represents the focal length of the second zone plate pattern, Indicates the focal length of the imaging lens unit.

10. A method for realizing Fresnel incoherent correlation holographic super-resolution microscopy by multiplexing SLM, and a Fresnel incoherent correlation holographic super-resolution microscopy system based on multiplexing SLM, the system comprising a microscope module, a polarizing module, a spatial light modulation module, a holographic detection module and an image processing module, characterized in that: The method comprises the following steps: The microscope module illuminates the sample with a light source and collects the sample light; The lens receives the sample light and transmits it to the polarization unit, and the polarization unit polarizes the sample light to form polarized sample light, wherein the polarization module includes the lens and the polarization unit; The spatial light modulator is divided into a first action surface and a second action surface, the polarized sample light is incident on the first action surface of the spatial light modulator at a preset angle for modulation to form a first modulated sample light, the conversion unit converts the direction of the first modulated sample light and inputs it into the second action surface of the spatial light modulator for modulation to form a second modulated sample light, and inputs it into the holographic detection module, wherein the spatial light modulator is loaded with a first wave zone plate pattern and a second wave zone plate pattern and displayed on the first action surface and the second action surface respectively, the second modulated sample light includes a horizontally modulated sample light component and a vertically modulated sample light component, wherein the spatial light modulation module includes a spatial light modulator and a conversion unit; The holographic detection module includes a second quarter wave plate, an imaging lens unit and a polarization camera, the second quarter wave plate receives the horizontal modulated sample light component and the vertical modulated sample light component of the second modulated sample light and converts them into circularly polarized light, the imaging lens unit focuses the circularly polarized light, the polarization camera converts the focused circularly polarized light into linearly polarized light and sets a polarization phase difference between the two components of the linearly polarized light to generate a polarization image set, wherein the two components are a first linearly polarized light component and a second linearly polarized light component in the same polarization direction, wherein the holographic detection module includes a second quarter wave plate, an imaging lens unit and a polarization camera; The image processing module acquires and processes the polarization image set to obtain a complex amplitude holographic image. Through the parameters of the first zone plate pattern, the second zone plate pattern and the imaging lens unit, the focus of the horizontally modulated sample light and the focus of the vertically modulated sample light and the imaging lens unit are respectively obtained, and then the hologram propagation distance is obtained. The reproduced image is obtained through the hologram propagation distance and the complex amplitude holographic image.

Images