Parallel type five-degree-of-freedom piezoelectric micro-motion platform and motion excitation method

Abstract

The invention discloses a parallel type five-degree-of-freedom piezoelectric micro-motion platform and a motion excitation method, belongs to the field of piezoelectric driving, and solves the problems of motion degree-of-freedom expansion and system structure simplification of an existing mainstream piezoelectric driving platform. Two piezoelectric actuators with three-degree-of-freedom longitudinal bending movement are arranged on a base of the parallel five-degree-of-freedom piezoelectric micro-motion platform, the top ends of the two piezoelectric actuators with the three-degree-of-freedom longitudinal bending movement are fixedly connected with a flexible platform, and the bottom ends of the piezoelectric actuators are fixedly connected with the base; the flexible platform at the top end is driven to achieve five-degree-of-freedom motion output by setting the motion directions of the two piezoelectric actuators with the three-degree-of-freedom longitudinal bending motion. The parallel type five-degree-of-freedom piezoelectric micro-motion platform has the characteristics of compact structure, high motion resolution and the like. The method is also suitable for high-precision multi-degree-of-freedom flexible control scenes of objects such as cells and micro optical elements, and can also be applied to the fields of optical focusing, laser alignment and tracking and the like.

Description

Technical Field

[0001] The invention belongs to the technical field of piezoelectric drive, and in particular relates to a parallel five-degree-of-freedom piezoelectric micro-motion platform and a motion excitation method. Background Art

[0002] With the rapid development of micro-nano manufacturing, micro-nano assembly, micro-nano manipulation and other fields, multi-degree-of-freedom high-precision motion platforms, as hardware carriers for carrying micro-nano scale objects, have gradually become the common foundation for supporting the development of the above fields. Traditional multi-degree-of-freedom high-precision motion platforms mostly use a combination of electromagnetic drive components such as stepper motors and servo motors and transmission components such as ball screws and gear racks to achieve high-precision motion. The main technical approach is to convert the macroscopic rotational motion of the motor into linear or rotational motion at the end of the platform. However, the above traditional solutions are affected by the electromagnetic actuation principle and mechanical transmission links, and have problems such as low response speed, large system inertia, easy to generate electromagnetic interference, and complex system structure to achieve multi-degree-of-freedom motion. Therefore, there is an urgent need to explore new drive principles and transmission solutions to develop multi-degree-of-freedom high-precision motion platforms.

[0003] Piezoelectric drive uses the inverse piezoelectric effect of piezoelectric materials to realize the conversion of electrical energy into mechanical energy to generate motion output. It has outstanding advantages such as fast response speed, high motion accuracy, no electromagnetic interference, and direct drive without transmission. It has become one of the most representative driving technologies for multi-degree-of-freedom high-precision motion platforms. Most of the existing piezoelectric-driven multi-degree-of-freedom motion platforms use commercial piezoelectric stacks as actuators. By designing various complex flexible mechanisms, the output motion of the piezoelectric stack is converted and amplified to generate linear or rotational motion output. Most of them use a combination of flexible mechanisms to achieve multi-degree-of-freedom motion. However, the piezoelectric stack element only has a one-dimensional telescopic motion function, which often leads to a complex structure in the realization of multi-degree-of-freedom motion. Therefore, how to construct the piezoelectric motion platform through the main body and establish a multi-degree-of-freedom motion realization method is the key challenge faced in the current research and development of multi-degree-of-freedom high-precision piezoelectric platforms. Summary of the invention

[0004] In order to overcome the difficulties of expanding the degrees of freedom of motion and simplifying the system structure faced by the existing mainstream piezoelectric drive platforms, the present invention proposes a parallel five-degree-of-freedom piezoelectric micro-motion platform and a motion excitation method.

[0005] The present invention is achieved through the following scheme:

[0006] Solution 1: A parallel-type five-DOF piezoelectric micro-motion platform, the piezoelectric micro-motion platform comprising a flexible platform, a three-DOF longitudinal bending piezoelectric driver and a base, the three-DOF longitudinal bending piezoelectric driver comprising a three-DOF longitudinal bending piezoelectric driver 1 and a three-DOF longitudinal bending piezoelectric driver 2;

[0007] The three-degree-of-freedom longitudinal bending piezoelectric driver one and the three-degree-of-freedom longitudinal bending piezoelectric driver two are both mounted on the base, and are used to drive the flexible platform to output five-degree-of-freedom motion;

[0008] The flexible platform is mounted on the output ends of the three-degree-of-freedom longitudinal bending piezoelectric driver one and the three-degree-of-freedom longitudinal bending piezoelectric driver two;

[0009] The three-degree-of-freedom longitudinal bending piezoelectric actuator one and the three-degree-of-freedom longitudinal bending piezoelectric actuator two both include a flexible displacement amplification mechanism, an upper piezoelectric ceramic, a connecting piece, a lower piezoelectric ceramic, and a connecting base;

[0010] The upper piezoelectric ceramic is used to drive the flexible displacement amplification mechanism to move and output along the Z axis, and the end of the flexible displacement amplification mechanism is connected to the flexible platform;

[0011] The connecting piece is used to connect the flexible displacement amplification mechanism and the lower piezoelectric ceramic;

[0012] The connecting seat is used to connect the lower piezoelectric ceramic and the base.

[0013] Furthermore, a preferred embodiment is provided, wherein the three-degree-of-freedom longitudinal bending piezoelectric actuator one and the three-degree-of-freedom longitudinal bending piezoelectric actuator two have the same structure.

[0014] Furthermore, a preferred embodiment is provided, wherein the upper piezoelectric ceramic is used for a single-degree-of-freedom motion output function; and the lower piezoelectric ceramic is used for a two-degree-of-freedom bending motion function.

[0015] Further, a preferred embodiment is provided, wherein the motion method of the three-degree-of-freedom longitudinal-bending piezoelectric actuator 1 is:

[0016] When the lower piezoelectric ceramic is stimulated in the X direction, the end of the three-degree-of-freedom longitudinal bending piezoelectric actuator one translates Xout1 along the X-axis direction, when the lower piezoelectric ceramic is stimulated in the Y direction, the end of the three-degree-of-freedom longitudinal bending piezoelectric actuator one translates Yout1 along the Y-axis direction, and when the upper piezoelectric ceramic is stimulated, the end of the three-degree-of-freedom longitudinal bending piezoelectric actuator one translates Zout1 along the Z-axis direction;

[0017] The three-degree-of-freedom longitudinal bending piezoelectric actuator 2 has the same motion output capability as the three-degree-of-freedom longitudinal bending piezoelectric actuator 1, which are respectively denoted as Xout2, Yout2, and Zout2.

[0018] Furthermore, a preferred embodiment is provided, wherein the flexible platform comprises a flexible hinge structure, and the flexible hinge structure is used for motion decoupling.

[0019] Furthermore, a preferred embodiment is provided, wherein the flexible hinge structure is implemented by any one of a straight circular structure, an elliptical structure, a straight beam structure and an optimized flexible hinge structure, and any combination of flexible hinge structures.

[0020] Furthermore, a preferred embodiment is provided, wherein the flexible displacement amplification mechanism comprises any one of a diamond displacement amplification mechanism, a bridge displacement amplification mechanism, a lever displacement amplification mechanism, an SR displacement amplification mechanism, or a combination of any of these amplification mechanisms.

[0021] Solution 2: A motion excitation method for a parallel five-DOF piezoelectric micro-motion platform, the motion excitation method comprising:

[0022] By stimulating the motion of the three-degree-of-freedom longitudinal bending piezoelectric actuator 1 and the three-degree-of-freedom longitudinal bending piezoelectric actuator 2, the flexible platform can move in the X direction, the Y direction and the Z direction, and rotate around the Y axis and the Z axis;

[0023] At the same time, the three-degree-of-freedom longitudinal bending piezoelectric driver 1 and the three-degree-of-freedom longitudinal bending piezoelectric driver 2 are stimulated to bend along the positive direction of the X-axis X out1+ and X out2+ , the flexible platform moves in the positive direction along the X-axis;

[0024] At the same time, the three-degree-of-freedom longitudinal bending piezoelectric driver 1 and the three-degree-of-freedom longitudinal bending piezoelectric driver 2 are stimulated to bend in the opposite direction of the X axis X out1- and X out2- , the flexible platform moves in the opposite direction along the X-axis;

[0025] At the same time, the three-degree-of-freedom longitudinal bending piezoelectric actuator 1 and the three-degree-of-freedom longitudinal bending piezoelectric actuator 2 are stimulated to bend along the positive direction of the Y axis Y out1+ and Y out2+ , the flexible platform moves along the positive direction of the Y axis;

[0026] At the same time, the three-degree-of-freedom longitudinal bending piezoelectric driver 1 and the three-degree-of-freedom longitudinal bending piezoelectric driver 2 are stimulated to bend along the Y-axis in the opposite direction Y out1- and Y out2- , the flexible platform moves in the opposite direction of the Y axis; at the same time, the three-degree-of-freedom longitudinal bending piezoelectric driver 1 and the three-degree-of-freedom longitudinal bending piezoelectric driver 2 are stimulated to move in the positive direction of the Z axis out1+ and Z out2+ , the flexible platform moves along the positive direction of the Z axis;

[0027] At the same time, the three-degree-of-freedom longitudinal bending piezoelectric actuator 1 and the three-degree-of-freedom longitudinal bending piezoelectric actuator 2 are stimulated to move in the opposite direction of the Z axis. out1- and Z out2-, the flexible platform moves in the opposite direction along the Z axis;

[0028] Stimulate the three-degree-of-freedom longitudinal bending piezoelectric actuator to move along the positive direction of the Z axis out1+ , and stimulate the three-degree-of-freedom longitudinal bending piezoelectric actuator to move in the opposite direction along the Z axis out2- , the flexible platform rotates clockwise around the Y axis;

[0029] Stimulate the three-degree-of-freedom longitudinal bending piezoelectric actuator to move in the opposite direction along the Z axis out1- , and excite the three-degree-of-freedom longitudinal bending piezoelectric actuator to move along the positive direction of the Z axis out2+ , the flexible platform rotates counterclockwise around the Y axis;

[0030] Stimulate the three-degree-of-freedom longitudinal bending piezoelectric actuator to move Y along the positive direction of the Y axis out1+ , and stimulate the three-degree-of-freedom longitudinal bending piezoelectric actuator to move in the opposite direction along the Y axis out2- , the flexible platform rotates clockwise around the Z axis;

[0031] Stimulate the three-degree-of-freedom longitudinal bending piezoelectric actuator to move Y in the opposite direction along the Y axis out1- , and stimulate the three-degree-of-freedom longitudinal bending piezoelectric actuator to move along the positive direction of the Y axis Y out2+ , the flexible platform rotates counterclockwise around the Z axis.

[0032] The invention can be applied to the fields of optical focusing, laser alignment and tracking.

[0033] Beneficial effects of the present invention:

[0034] The parallel five-DOF piezoelectric micro-motion platform and motion excitation method described in the present invention aim to overcome the deficiencies in the prior art and achieve accurate and stable micro-motion control with more degrees of freedom through innovative body design and motion excitation method. The parallel five-DOF piezoelectric micro-motion platform described in the present invention combines the advantages of the parallel mechanism and the high-precision characteristics of the piezoelectric drive, providing a new multi-DOF high-precision motion platform solution for high-precision automated control and precision positioning application scenarios.

[0035] The parallel-type five-degree-of-freedom piezoelectric micro-motion platform described in the present invention utilizes the high-precision characteristics of piezoelectric materials to achieve nanometer-level precision displacement control within the micrometer range.

[0036] The parallel type five-DOF piezoelectric micro-motion platform proposed by the present invention enhances the rigidity of the platform through the coordinated work of two piezoelectric drivers. Compared with the series structure in the prior art, the parallel mechanism can effectively reduce the error and vibration in the movement and improve the stability of the platform in dynamic operation.

[0037] The fast response characteristics of the parallel five-DOF piezoelectric micro-motion platform of the present invention enable the platform to quickly adjust its position to meet different operational requirements. This fast response capability is particularly important for precision applications that require real-time adjustment, such as sample positioning in a microscope or precision control in a micro-operation system.

[0038] The parallel five-DOF piezoelectric micro-motion platform of the present invention has five-DOF motion capability and can realize precise control in multiple directions and angles. This multi-DOF design enables the platform to adapt to complex application scenarios and provide a wider range of operation options for precision positioning, micro-nano manufacturing, optical alignment and other fields.

[0039] Compared with traditional micro-motion platforms, the parallel five-DOF piezoelectric micro-motion platform of the present invention reduces the dependence on complex mechanical transmission systems, reduces the complexity of the system, and improves reliability and convenience of maintenance.

[0040] In summary, the parallel five-DOF piezoelectric micro-motion platform described in the present invention simplifies the design and reduces energy consumption while improving accuracy, stability and response speed, thus providing an effective solution for high-precision and high-stability applications. BRIEF DESCRIPTION OF THE DRAWINGS

[0041] Figure 1 Schematic diagram of the overall structure of the parallel five-DOF piezoelectric micro-motion platform described in Implementation Example 1.

[0042] Figure 2 Schematic diagram of the structure of two identical three-degree-of-freedom longitudinal-bending piezoelectric actuators described in implementation mode one.

[0043] Figure 3 Schematic diagram of the output motion of two identical three-degree-of-freedom longitudinal-bending piezoelectric actuators described in embodiment one.

[0044] Figure 3 In the figure, (a) is a schematic diagram of the structure of two three-degree-of-freedom longitudinal bending piezoelectric actuators described in embodiment one, (b) is a schematic diagram of the bending of the two three-degree-of-freedom longitudinal bending piezoelectric actuators described in embodiment one along the X-axis, (c) is a schematic diagram of the bending of the two three-degree-of-freedom longitudinal bending piezoelectric actuators described in embodiment one along the Y-axis, and (d) is a schematic diagram of the extension of the two three-degree-of-freedom longitudinal bending piezoelectric actuators described in embodiment one along the Z-axis.

[0045] Figure 4(a) is a schematic diagram of the end motion of the parallel five-degree-of-freedom piezoelectric micro-motion platform described in embodiment eight, (b) is a schematic diagram of the linear motion of the flexible platform along the Y axis described in embodiment seven, (c) is a schematic diagram of the linear motion of the flexible platform along the Z axis described in embodiment seven, (d) is a schematic diagram of the rotation of the flexible platform around the Y axis described in embodiment seven, and (e) is a schematic diagram of the rotation of the flexible platform around the Z axis described in embodiment seven.

[0046] In the figure, a flexible platform 1, a three-degree-of-freedom longitudinal bending piezoelectric actuator 1 2-1, a three-degree-of-freedom longitudinal bending piezoelectric actuator 2 2-2, a base 3, a flexible displacement amplification mechanism 2-1-1, an upper piezoelectric ceramic 2-1-2, a connecting piece 2-1-3, a lower piezoelectric ceramic 2-1-4, and a connecting base 2-1-5. DETAILED DESCRIPTION

[0047] The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments; based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention.

[0048] Implementation method 1, see Figures 1 to 3 This embodiment is described. This embodiment proposes a parallel type five-DOF piezoelectric micro-motion platform, the piezoelectric micro-motion platform includes a flexible platform 1, a three-DOF longitudinal bending piezoelectric driver and a base 3, the three-DOF longitudinal bending piezoelectric driver includes a three-DOF longitudinal bending piezoelectric driver one 2-1 and a three-DOF longitudinal bending piezoelectric driver two 2-2;

[0049] The three-degree-of-freedom longitudinal bending piezoelectric driver 1 2 - 1 and the three-degree-of-freedom longitudinal bending piezoelectric driver 2 2 - 2 are both mounted on the base 3 and are used to drive the flexible platform 1 to output five-degree-of-freedom motion;

[0050] The flexible platform 1 is mounted on the output ends of the three-degree-of-freedom longitudinal bending piezoelectric driver 1 2-1 and the three-degree-of-freedom longitudinal bending piezoelectric driver 2 2-2;

[0051] The three-degree-of-freedom longitudinal bending piezoelectric actuator 1 2-1 and the three-degree-of-freedom longitudinal bending piezoelectric actuator 2-2 both include a flexible displacement amplification mechanism 2-1-1, an upper piezoelectric ceramic 2-1-2, a connecting piece 2-1-3, a lower piezoelectric ceramic 2-1-4, and a connecting base 2-1-5;

[0052] The upper piezoelectric ceramic 2-1-2 has the ability to output along the X-axis direction, and is used to drive the flexible displacement amplification mechanism 2-1-1 to output along the Z-axis. The end of the flexible displacement amplification mechanism 2-1-1 is connected to the flexible platform 1.

[0053] The connecting member 2-1-3 is used to connect the flexible displacement amplification mechanism 2-1-1 and the lower piezoelectric ceramic 2-1-4, and the lower piezoelectric ceramic 2-1-4 has a two-degree-of-freedom motion output capability of bending along the X-axis and bending along the Y-axis;

[0054] The connecting seat 2 - 1 - 5 is used to connect the lower piezoelectric ceramic 2 - 1 - 4 and the base 3 .

[0055] Embodiment 2. This embodiment further limits the parallel type five-DOF piezoelectric micro-motion platform described in embodiment 1. The three-DOF longitudinal bending piezoelectric driver 1 2-1 and the three-DOF longitudinal bending piezoelectric driver 2 2-2 have the same structure.

[0056] Embodiment 3: This embodiment further limits the parallel type five-DOF piezoelectric micro-motion platform described in embodiment 1, which has a single-DOF motion output function; the lower piezoelectric ceramic 2-1-4 has a two-DOF bending motion function.

[0057] The upper piezoelectric ceramic 2-1-2 described in this embodiment is implemented by a functional element having a piezoelectric property, and the lower piezoelectric ceramic 2-1-4 is implemented by a functional element having a piezoelectric property.

[0058] Embodiment 4: This embodiment further limits the parallel type five-DOF piezoelectric micro-motion platform described in embodiment 1. The motion method of the three-DOF longitudinal bending piezoelectric actuator 2-1 is:

[0059] When the lower piezoelectric ceramic 2-1-4 is excited in the X direction, the end of the three-degree-of-freedom longitudinal bending piezoelectric actuator 2-1 moves in translation along the X-axis direction. out1 When the lower piezoelectric ceramic 2-1-4 is stimulated in the Y direction, the end of the three-degree-of-freedom longitudinal bending piezoelectric actuator 2-1 moves Y along the Y axis. out1 When the upper piezoelectric ceramic 2-1-2 is excited, the end of the three-degree-of-freedom longitudinal bending piezoelectric actuator 2-1 moves in translation along the Z-axis direction. out1 ;

[0060] The three-degree-of-freedom longitudinal bending piezoelectric actuator 2-2 has the same motion output capability as the three-degree-of-freedom longitudinal bending piezoelectric actuator 1-2-1, which are respectively denoted as Xout2, Yout2, and Zout2.

[0061] Embodiment 5: This embodiment further limits the parallel-type five-DOF piezoelectric micro-motion platform described in Embodiment 1. The flexible platform 1 includes a flexible hinge structure, and the flexible hinge structure is used for motion decoupling.

[0062] Embodiment 6. This embodiment is a further limitation of the parallel type five-DOF piezoelectric micro-motion platform described in embodiment 5. The flexible hinge structure is implemented by any one of a straight circular structure, an elliptical structure, a straight beam structure, and an optimized flexible hinge structure, as well as any combination of flexible hinge structures.

[0063] Embodiment 7. This embodiment is a further limitation of the parallel type five-DOF piezoelectric micro-motion platform described in embodiment 1. The flexible displacement amplification mechanism 2-1-1 includes any one of a diamond displacement amplification mechanism, a bridge displacement amplification mechanism, a lever displacement amplification mechanism, and an SR displacement amplification mechanism, or a combination of any of their amplification mechanisms.

[0064] Embodiments 1 to 7 provide a structural implementation scheme of a parallel type five-DOF piezoelectric micro-motion platform. Figure 1 A parallel five-degree-of-freedom piezoelectric micro-motion platform, the parallel five-degree-of-freedom piezoelectric micro-motion platform includes a flexible platform 1, two identical three-degree-of-freedom longitudinal bending piezoelectric drivers 2-1 and 2-2, and a base 3; wherein the two identical three-degree-of-freedom longitudinal bending piezoelectric drivers 2-1 and 2-2 are installed on the base 3, and are used to drive the flexible platform 1 to output five-degree-of-freedom motion; the flexible platform 1 is installed at the output ends of two identical three-degree-of-freedom longitudinal bending piezoelectric drivers 2-1 and 2-2; the outer frame of the flexible platform 1 is connected to the base 3.

[0065] See also Figure 2The three-degree-of-freedom longitudinal bending piezoelectric drivers 2-1 and 2-2 have the same structure, and only one of them is described here. They include a flexible displacement amplification mechanism 2-1-1, an upper piezoelectric ceramic 2-1-2, a connector 2-1-3, a lower piezoelectric ceramic 2-1-4, and a connecting base 2-1-5; the upper piezoelectric ceramic 2-1-2 has the ability to output motion along the X-axis direction, and is used to drive the flexible displacement amplification mechanism 2-1-1 to output motion along the Z-axis. The end of the flexible displacement amplification mechanism 2-1-1 is used to connect to the flexible platform 1. The connecting piece 2-1-3 is used to connect the flexible displacement amplifying mechanism 2-1-1 and the lower piezoelectric ceramic 2-1-4, and the lower piezoelectric ceramic 2-1-4 has two-degree-of-freedom motion output capability of bending along the X-axis and bending along the Y-axis; the connecting seat 2-1-5 is used to connect the lower piezoelectric ceramic 2-1-4 and the base 3; the flexible displacement amplifying mechanism 2-1-1 is one of a diamond displacement amplifying mechanism, a bridge displacement amplifying mechanism, a lever displacement amplifying mechanism, an SR displacement amplifying mechanism, and a combination of multiple amplifying mechanisms; the upper piezoelectric ceramic 2-1-2 has a single-degree-of-freedom output, which is a commercial piezoelectric stack or a stack formed by bonding multiple piezoelectric ceramic sheets; the lower piezoelectric ceramic 2-1-4 has two-degree-of-freedom bending motion capability, which is a piezoelectric stack formed by bonding multiple four-partitioned piezoelectric ceramic sheets or four identical commercial piezoelectric stacks.

[0066] See also Figure 3 The three-degree-of-freedom longitudinal bending piezoelectric actuator 2-1 has a three-degree-of-freedom motion output capability. When the lower piezoelectric ceramic 2-1-4 is stimulated in the X direction, the end of the three-degree-of-freedom longitudinal bending piezoelectric actuator 2-1 bends along the X-axis direction. out1 By changing the excitation signal, the bending output along the positive and reverse directions of the X-axis can be realized; when the Y direction of the lower piezoelectric ceramic 2-1-4 is excited, the end of the three-degree-of-freedom longitudinal bending piezoelectric actuator 2-1 bends Y along the Y-axis direction. out1 By changing the excitation signal, the bending output along the positive and reverse directions of the X-axis can be realized; when the upper piezoelectric ceramic 2-1-2 is excited, the end of the three-degree-of-freedom longitudinal bending piezoelectric actuator 2-1 moves along the Z-axis direction. out1 By changing the excitation signal, the forward and reverse motion output along the Z axis can be realized; the three-degree-of-freedom longitudinal bending piezoelectric driver 2-2 also has the ability to output three-degree-of-freedom motion, and its three-degree-of-freedom motion output is recorded as X out2 , Y out2 , Z out2 .

[0067] Embodiment 8: This embodiment proposes a motion excitation method for a coupled five-DOF piezoelectric micro-motion platform, the motion excitation method comprising:

[0068] By stimulating the movement of the three-degree-of-freedom longitudinal bending piezoelectric actuator 1 2-1 and the three-degree-of-freedom longitudinal bending piezoelectric actuator 2 2-2, the flexible platform 1 can move along the X direction, the Y direction and the Z direction, and rotate around the Y axis and the Z axis;

[0069] At the same time, the three-degree-of-freedom longitudinal bending piezoelectric driver 1 2-1 and the three-degree-of-freedom longitudinal bending piezoelectric driver 2-2 are stimulated to bend along the positive direction of the X-axis X out1+ and X out2+ , the flexible platform 1 moves in the positive direction along the X-axis;

[0070] At the same time, the three-degree-of-freedom longitudinal bending piezoelectric driver 1 2-1 and the three-degree-of-freedom longitudinal bending piezoelectric driver 2-2 are stimulated to bend in the opposite direction of the X axis X out1- and X out2- , the flexible platform 1 moves in the opposite direction along the X-axis;

[0071] At the same time, the three-degree-of-freedom longitudinal bending piezoelectric actuator 1 2-1 and the three-degree-of-freedom longitudinal bending piezoelectric actuator 2-2 are stimulated to bend along the positive direction of the Y axis Y out1+ and Y out2+ , the flexible platform 1 moves along the positive direction of the Y axis;

[0072] At the same time, the three-degree-of-freedom longitudinal bending piezoelectric actuator 1 2-1 and the three-degree-of-freedom longitudinal bending piezoelectric actuator 2-2 are stimulated to bend along the Y-axis in the opposite direction Y out1- and Y out2- , the flexible platform 1 moves in the opposite direction of the Y axis; at the same time, the three-degree-of-freedom longitudinal bending piezoelectric driver 1 2-1 and the three-degree-of-freedom longitudinal bending piezoelectric driver 2-2 are stimulated to move in the positive direction of the Z axis Z out1+ and Z out2+ , the flexible platform 1 moves along the positive direction of the Z axis;

[0073] At the same time, the three-degree-of-freedom longitudinal bending piezoelectric actuator 1 2-1 and the three-degree-of-freedom longitudinal bending piezoelectric actuator 2-2 are stimulated to move in the opposite direction of the Z axis. out1- and Z out2- , the flexible platform 1 moves in the opposite direction along the Z axis;

[0074] The three-degree-of-freedom longitudinal bending piezoelectric actuator 2-1 is stimulated to move along the positive direction of the Z axis. out1+ , and stimulate the three-degree-of-freedom longitudinal bending piezoelectric actuator 2-2 to move in the opposite direction of the Z axis out2- , the flexible platform 1 rotates clockwise around the Y axis;

[0075] The three-degree-of-freedom longitudinal bending piezoelectric actuator 2-1 is stimulated to move in the opposite direction of the Z axis. out1-, and stimulate the three-degree-of-freedom longitudinal bending piezoelectric actuator 2-2 to move along the positive direction of the Z axis Z out2+ , the flexible platform 1 rotates counterclockwise around the Y axis;

[0076] The three-degree-of-freedom longitudinal bending piezoelectric actuator 2-1 is stimulated to move along the positive direction of the Y axis Y out1+ , and stimulate the three-degree-of-freedom longitudinal bending piezoelectric actuator 2-2 to move in the opposite direction of the Y axis out2- , the flexible platform 1 rotates clockwise around the Z axis;

[0077] The three-degree-of-freedom longitudinal bending piezoelectric actuator 2-1 is stimulated to move in the opposite direction Y along the Y axis. out1- , and stimulate the three-degree-of-freedom longitudinal bending piezoelectric actuator 2-2 to move along the positive direction of the Y axis Y out2+ , the flexible platform 1 rotates counterclockwise around the Z axis.

[0078] This embodiment provides a motion excitation scheme for a parallel five-DOF piezoelectric micro-motion platform. Figure 4 The parallel five-DOF piezoelectric micro-motion platform and motion excitation method are specifically designed to achieve movement in the X, Y and Z directions, rotation around the Y axis and rotation around the Z axis:

[0079] (1) Simultaneously excite the three-degree-of-freedom longitudinal bending piezoelectric actuators 2-1 and 2-2 to bend along the positive direction of the X-axis out1+ and X out2+ , the flexible platform 1 moves in the positive direction along the X-axis; at the same time, the three-degree-of-freedom longitudinal bending piezoelectric actuators 2-1 and 2-2 are stimulated to bend in the opposite direction of the X-axis. out1- and X out2- , the flexible platform 1 moves in the opposite direction along the X-axis.

[0080] (2) Simultaneously excite the three-degree-of-freedom longitudinal bending piezoelectric actuators 2-1 and 2-2 to bend along the positive direction of the Y axis Y out1+ and Y out2+ , the flexible platform 1 moves along the positive direction of the Y axis; at the same time, the three-degree-of-freedom longitudinal bending piezoelectric actuators 2-1 and 2-2 are stimulated to bend along the reverse direction of the Y axis Y out1- and Y out2- , the flexible platform 1 moves in the opposite direction along the Y axis.

[0081] (3) Simultaneously excite the three-degree-of-freedom longitudinal-bending piezoelectric actuators 2-1 and 2-2 to move along the positive direction of the Z axis. out1+ and Z out2+ , the flexible platform 1 moves along the positive direction of the Z axis; at the same time, the three-degree-of-freedom longitudinal and bending piezoelectric actuators 2-1 and 2-2 are stimulated to move along the negative direction of the Z axis. out1- and Z out2-, the flexible platform 1 moves in the opposite direction along the Z axis.

[0082] (4) Excite the three-degree-of-freedom longitudinal bending piezoelectric actuator 2-1 to move along the positive direction of the Z axis out1+ , and stimulate the three-degree-of-freedom longitudinal bending piezoelectric actuator 2-2 to move in the opposite direction of the Z axis out2- , the flexible platform 1 rotates clockwise around the Y axis; the three-degree-of-freedom longitudinal bending piezoelectric actuator 2-1 is stimulated to move in the opposite direction along the Z axis out1- , and excites the three-degree-of-freedom longitudinal bending piezoelectric actuator 2-2 to move along the positive direction of the Z axis out2+ , the flexible platform 1 rotates counterclockwise around the Y axis.

[0083] (5) Excite the three-degree-of-freedom longitudinal bending piezoelectric actuator 2-1 to move along the positive direction of the Y axis Y out1+ , and stimulate the three-degree-of-freedom longitudinal bending piezoelectric actuator 2-2 to move in the opposite direction of the Y axis out2- , the flexible platform 1 rotates clockwise around the Z axis; the three-degree-of-freedom longitudinal bending piezoelectric actuator 2-1 is stimulated to move in the opposite direction along the Y axis Y out1- , and excites the three-degree-of-freedom longitudinal bending piezoelectric actuator 2-2 to move along the positive direction of the Z axis Y out2+ , the flexible platform 1 rotates counterclockwise around the Z axis.

[0084] Those skilled in the art will appreciate that the above are only preferred embodiments of the present invention, and the features described in the various embodiments and / or claims of the present disclosure may be combined or combined in a variety of ways, even if such combinations or combinations are not explicitly described in the present disclosure. The above are only preferred embodiments of the present invention, and are not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art may still combine the technical solutions described in the aforementioned embodiments, or perform equivalent substitutions on some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention shall be included in the protection scope of the present invention.

[0085] Although preferred embodiments of the present invention have been described, additional changes and modifications may be made to these embodiments by those skilled in the art once the basic inventive concepts are known. Therefore, the appended claims are intended to be interpreted as preferred embodiments and all changes and modifications that fall within the scope of the present invention. Obviously, those skilled in the art may make various changes and modifications to the present invention without departing from the spirit and scope of the present invention. Thus, if these modifications and variations of the present invention fall within the scope of the claims of the present invention and their equivalents, the present invention is also intended to include these modifications and variations.

Claims

1. A parallel five-DOF piezoelectric micro-motion platform, characterized in that: The piezoelectric micro-motion platform comprises a flexible platform (1), a three-degree-of-freedom longitudinal bending piezoelectric driver and a base (3), wherein the three-degree-of-freedom longitudinal bending piezoelectric driver comprises a three-degree-of-freedom longitudinal bending piezoelectric driver 1 (2-1) and a three-degree-of-freedom longitudinal bending piezoelectric driver 2 (2-2); The three-degree-of-freedom longitudinal bending piezoelectric driver one (2-1) and the three-degree-of-freedom longitudinal bending piezoelectric driver two (2-2) are both mounted on a base (3) and are used to drive the flexible platform (1) to output five-degree-of-freedom motion; The flexible platform (1) is installed at the output ends of a three-degree-of-freedom longitudinal bending piezoelectric driver 1 (2-1) and a three-degree-of-freedom longitudinal bending piezoelectric driver 2 (2-2); The three-degree-of-freedom longitudinal bending piezoelectric driver one (2-1) and the three-degree-of-freedom longitudinal bending piezoelectric driver two (2-2) both comprise a flexible displacement amplification mechanism (2-1-1), an upper piezoelectric ceramic (2-1-2), a connecting piece (2-1-3), a lower piezoelectric ceramic (2-1-4), and a connecting base (2-1-5); The upper piezoelectric ceramic (2-1-2) is used to drive the flexible displacement amplifying mechanism (2-1-1) to move and output along the Z axis, and the end of the flexible displacement amplifying mechanism (2-1-1) is connected to the flexible platform (1); The connecting piece (2-1-3) is used to connect the flexible displacement amplification mechanism (2-1-1) and the lower piezoelectric ceramic (2-1-4); The connecting seat (2-1-5) is used to connect the lower piezoelectric ceramic (2-1-4) and the base (3).

2. The parallel type five-DOF piezoelectric micro-motion platform according to claim 1, characterized in that: The three-degree-of-freedom longitudinal bending piezoelectric actuator one (2-1) and the three-degree-of-freedom longitudinal bending piezoelectric actuator two (2-2) have the same structure.

3. The parallel type five-DOF piezoelectric micro-motion platform according to claim 1, characterized in that: The upper piezoelectric ceramic (2-1-2) is used for single-degree-of-freedom motion output; and the lower piezoelectric ceramic (2-1-4) is used for two-degree-of-freedom bending motion output.

4. The parallel type five-DOF piezoelectric micro-motion platform according to claim 1, characterized in that: The motion method of the three-degree-of-freedom longitudinal-bending piezoelectric actuator 1 (2-1) is: When the lower piezoelectric ceramic (2-1-4) is stimulated in the X direction, the end of the three-degree-of-freedom longitudinal bending piezoelectric driver (2-1) moves in a translational motion Xout1 along the X-axis direction; when the lower piezoelectric ceramic (2-1-4) is stimulated in the Y direction, the end of the three-degree-of-freedom longitudinal bending piezoelectric driver (2-1) moves in a translational motion Yout1 along the Y-axis direction; when the upper piezoelectric ceramic (2-1-2) is stimulated, the end of the three-degree-of-freedom longitudinal bending piezoelectric driver (2-1) moves in a translational motion Zout1 along the Z-axis direction; The three-degree-of-freedom longitudinal bending piezoelectric actuator 2 (2-2) has the same motion output capability as the three-degree-of-freedom longitudinal bending piezoelectric actuator 1 (2-1), which are respectively denoted as Xout2, Yout2, and Zout2.

5. The parallel type five-DOF piezoelectric micro-motion platform according to claim 1, characterized in that: The flexible platform (1) comprises a flexible hinge structure, and the flexible hinge structure is used for motion decoupling.

6. The parallel type five-DOF piezoelectric micro-motion platform according to claim 5, characterized in that: The flexible hinge structure is implemented by any one of a straight circular structure, an elliptical structure, a straight beam structure and an optimized flexible hinge structure.

7. The parallel type five-DOF piezoelectric micro-motion platform according to claim 1, characterized in that: The flexible displacement amplification mechanism (2-1-1) comprises any one of a diamond displacement amplification mechanism, a bridge displacement amplification mechanism, a lever displacement amplification mechanism, an SR displacement amplification mechanism, or a combination of any of these amplification mechanisms.

8. A motion excitation method for a parallel five-DOF piezoelectric micro-motion platform, characterized in that: The motion motivation method comprises: By stimulating the movement of the three-degree-of-freedom longitudinal bending piezoelectric actuator 1 (2-1) and the three-degree-of-freedom longitudinal bending piezoelectric actuator 2 (2-2), the flexible platform (1) can move along the X direction, the Y direction and the Z direction, and rotate around the Y axis and the Z axis; Simultaneously, the three-degree-of-freedom longitudinal bending piezoelectric actuator 1 (2-1) and the three-degree-of-freedom longitudinal bending piezoelectric actuator 2 (2-2) are stimulated to bend along the positive direction of the X-axis, i.e., Xout1+ and Xout2+, and the flexible platform (1) moves along the positive direction of the X-axis; Simultaneously, the three-degree-of-freedom longitudinal bending piezoelectric actuator 1 (2-1) and the three-degree-of-freedom longitudinal bending piezoelectric actuator 2 (2-2) are stimulated to bend in the opposite direction of the X-axis, i.e., Xout1- and Xout2-, and the flexible platform (1) moves in the opposite direction along the X-axis; Simultaneously, the three-degree-of-freedom longitudinal bending piezoelectric actuator 1 (2-1) and the three-degree-of-freedom longitudinal bending piezoelectric actuator 2 (2-2) are stimulated to bend along the positive direction of the Y axis, i.e., Yout1+ and Yout2+, and the flexible platform (1) moves along the positive direction of the Y axis; Simultaneously, the three-degree-of-freedom longitudinal bending piezoelectric actuator 1 (2-1) and the three-degree-of-freedom longitudinal bending piezoelectric actuator 2 (2-2) are stimulated to bend in the opposite direction of the Y axis, namely Yout1- and Yout2-, and the flexible platform (1) moves in the opposite direction of the Y axis; Simultaneously, the three-degree-of-freedom longitudinal bending piezoelectric actuator 1 (2-1) and the three-degree-of-freedom longitudinal bending piezoelectric actuator 2 (2-2) are stimulated to move along the positive direction of the Z axis (Zout1+ and Zout2+), and the flexible platform (1) moves along the positive direction of the Z axis; Simultaneously, the three-degree-of-freedom longitudinal bending piezoelectric actuator 1 (2-1) and the three-degree-of-freedom longitudinal bending piezoelectric actuator 2 (2-2) are stimulated to move in the opposite direction of the Z axis, namely, Zout1- and Zout2-, and the flexible platform (1) moves in the opposite direction of the Z axis; The three-degree-of-freedom longitudinal bending piezoelectric actuator 1 (2-1) is stimulated to move Zout1+ along the positive direction of the Z axis, and the three-degree-of-freedom longitudinal bending piezoelectric actuator 2 (2-2) is stimulated to move Zout2- along the negative direction of the Z axis, and the flexible platform (1) rotates clockwise around the Y axis; The three-degree-of-freedom longitudinal bending piezoelectric actuator 1 (2-1) is stimulated to move Zout1- in the negative direction of the Z axis, and the three-degree-of-freedom longitudinal bending piezoelectric actuator 2 (2-2) is stimulated to move Zout2+ in the positive direction of the Z axis, and the flexible platform (1) rotates counterclockwise around the Y axis; The three-degree-of-freedom longitudinal bending piezoelectric actuator 1 (2-1) is stimulated to move Yout1+ along the positive direction of the Y axis, and the three-degree-of-freedom longitudinal bending piezoelectric actuator 2 (2-2) is stimulated to move Yout2- along the negative direction of the Y axis, and the flexible platform (1) rotates clockwise around the Z axis; The three-degree-of-freedom longitudinal bending piezoelectric actuator 1 (2-1) is stimulated to move Yout1- in the opposite direction of the Y axis, and the three-degree-of-freedom longitudinal bending piezoelectric actuator 2 (2-2) is stimulated to move Yout2+ in the positive direction of the Y axis, and the flexible platform (1) rotates counterclockwise around the Z axis.

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