Water residue preventing and water quenching system for polycrystalline silicon broken material packaging
By designing a waterproof residual water quenching system for packaging polysilicon crushing materials and using multiple treatment modules in concert, the problem of moisture residue during polysilicon processing is solved, efficient processing and drying is achieved, and product quality and production efficiency are improved.
Patent Information
- Application Number
- CN202411880658.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-19
- Publication Date
- 2025-02-11
- Estimated Expiration
- 2044-12-19
AI Technical Summary
There is a moisture residue problem during the existing polysilicon processing process, which affects the subsequent processing effect and material performance.
A waterproof residual water quenching system for packaging polycrystalline silicon crushing material was designed, including integrated control unit, water quenching module, crushing module, screening module, moisture proof residual treatment module, drying module, quality detection module, environmental adaptability module and packaging Modules, through the collaborative work of these modules, efficient processing and drying of polysilicon crushed materials is achieved.
It effectively reduces moisture residue, improves the dryness and product quality of polycrystalline silicon crushing materials, ensures the stability and reliability of the materials under different environmental conditions, and improves production efficiency and product market competitiveness.
Smart Images

Figure CN119406533A_ABST
Abstract
Description
Technical Field
[0001] The invention relates to the technical field of polysilicon processing, and in particular to a polysilicon crushed material packaging and moisture-residue proof water quenching system. Background Art
[0002] Polycrystalline silicon is a polycrystalline material composed of many small crystals. It is a form of single-element silicon. Under supercooling conditions, when molten single-element silicon solidifies, silicon atoms are arranged into many crystal nuclei in the form of diamond lattices. These crystal nuclei grow into grains with different crystal plane orientations, and combine to form polycrystalline silicon. Polycrystalline silicon is widely used in photovoltaic, integrated circuit and other fields, and is an important basic material for photovoltaic industry and electronic information industry.
[0003] Water quenching is performed during the production of polysilicon to reduce the breakage loss rate of polysilicon materials. By rapidly cooling the silicon rods after high-temperature calcination, cracks will appear in the silicon rods, which can reduce the generation of dust and particles in the subsequent crushing process, thereby reducing the breakage loss rate. After the silicon rods after water quenching are crushed by the same crusher, the breakage loss of silicon materials can be significantly reduced from the original 3.5% to about 2%.
[0004] Residual moisture may cause material performance degradation, cause short circuits or corrosion in electronic devices, or affect photoelectric conversion efficiency in solar panels. Therefore, it is critical to ensure that the surface and interior of the polysilicon material are dry before packaging. Summary of the invention
[0005] The main purpose of the present invention is to provide a polysilicon crushed material packaging moisture residual water quenching system, which can effectively solve the problem that the existing device has residual moisture during the processing process that affects the subsequent processing effect.
[0006] To achieve the above object, the technical solution adopted by the present invention is:
[0007] A polysilicon crushed material packaging moisture residual water quenching system, the system comprises the following modules:
[0008] An integrated control unit for real-time monitoring and adjustment of the entire water quenching and packaging process, including but not limited to monitoring of temperature, pressure, and flow rate parameters;
[0009] Water quenching module, used to evenly and quickly cool the polysilicon crushed materials to reduce thermal shock and improve the mechanical properties of the materials;
[0010] Crushing module, used to crush the water-quenched polysilicon into required sizes to improve the utilization rate of materials;
[0011] Screening module, used to screen polysilicon crushed materials of different sizes to ensure that product quality meets the standards;
[0012] The moisture-residue-proof treatment module is used to remove moisture from the surface of polysilicon crushed materials, reduce moisture residue during packaging, and ensure that the product is dry;
[0013] Drying module, used to further dry the polysilicon crushed materials to ensure that there is no excess moisture before packaging;
[0014] Quality inspection module, used to inspect the quality of polysilicon crushed materials, including size, shape and purity, to ensure product quality;
[0015] Environmental adaptability module, used to ensure the performance and stability of polysilicon crushed materials under different environmental conditions, and improve the market adaptability of products;
[0016] The packaging module is used to seal and package the processed polysilicon crushed materials to ensure that moisture is not intruded and the product is protected from environmental influences.
[0017] Preferably, the water quenching module comprises:
[0018] Temperature monitoring sensor, used to monitor the temperature of the water quenching liquid in real time to ensure the water quenching effect;
[0019] Flow control valve, which can accurately control the flow of water quenching liquid to adapt to different sizes of polysilicon crushed materials;
[0020] Emergency discharge device is used to quickly discharge water quenching liquid when the pressure is abnormal to prevent equipment damage.
[0021] Preferably, the moisture-residue prevention processing module comprises:
[0022] Vacuum degassing device, used to remove trace moisture on the surface and inside of polysilicon crushed materials;
[0023] Thermal imaging detection device, used to detect the drying uniformity of polysilicon crushed materials;
[0024] Automatic humidity control device, automatically adjusts the drying intensity according to the thermal imaging detection results.
[0025] Preferably, the packaging module comprises:
[0026] Automatic sealing device to ensure the tightness of the package and prevent the intrusion of moisture and contaminants;
[0027] Packaging material humidity regulating device, used to regulate the humidity of packaging materials and enhance the waterproof performance of packaging;
[0028] Package integrity testing device, used to test the sealing and strength of each package.
[0029] Preferably, the crushing module comprises:
[0030] Impact crusher, used to efficiently crush polysilicon and reduce material loss;
[0031] Particle size distribution analyzer, used to monitor the particle size distribution of crushed materials in real time to ensure product consistency;
[0032] Automatic feeding control device automatically adjusts the feeding speed according to the crusher load to ensure crushing efficiency.
[0033] Preferably, the screening module comprises:
[0034] Multi-layer vibrating screen, used to accurately screen polysilicon crushed materials of different particle sizes;
[0035] Automatic screen cleaning device, used to keep the screen clean and improve screening efficiency;
[0036] The particle size monitoring sensor is used to monitor the particle size of the polysilicon crushed material after screening and feed it back to the screening system.
[0037] Preferably, the drying module comprises:
[0038] Circulating hot air drying device, used to evenly dry the polysilicon crushed materials;
[0039] A humidity sensor array to monitor humidity changes during the drying process;
[0040] The temperature regulating device is used to control the temperature during the drying process to prevent overheating and damage to the material.
[0041] Preferably, the quality detection module includes:
[0042] X-ray fluorescence spectrometer, used to analyze the chemical composition of polysilicon crushed materials;
[0043] Automatic sorting device, used to automatically sort qualified and unqualified products according to quality inspection results;
[0044] An image recognition device is used to identify and classify foreign matter or defects in polysilicon crushed material.
[0045] Preferably, the environmental adaptability module includes:
[0046] Climate simulation chamber, used to simulate the performance of polysilicon crushed materials under different climate conditions;
[0047] Mechanical stress testing device, used to test the stability of polysilicon crushed materials under different mechanical stresses;
[0048] Environmental data recorder, used to record the performance data of polysilicon crushed materials under simulated environmental conditions.
[0049] Preferably, the integrated control unit comprises:
[0050] Remote monitoring device, allowing operators to remotely monitor system status;
[0051] Predictive maintenance algorithms predict maintenance needs based on equipment operating data to reduce unexpected downtime;
[0052] The operation log recorder is used to record all operations of operators and system events to facilitate fault tracing and performance analysis.
[0053] Compared with the prior art, the present invention has the following beneficial effects:
[0054] 1. The present invention uses an impact crusher and a multi-layer vibrating screen. The system can efficiently crush the water-quenched polysilicon into the required size and accurately screen the polysilicon crushed materials of different particle sizes. The crushing and screening process reduces material loss, improves material utilization, and thus improves the overall production efficiency.
[0055] 2. The moisture-proof residual treatment module of the present invention removes trace moisture on the surface and inside of the polysilicon crushed material through a vacuum degassing device, and automatically adjusts the drying intensity according to the thermal imaging detection results in combination with an automatic humidity control device, thereby effectively reducing the moisture residue during packaging, enhancing the product's moisture-proof residual performance, and ensuring the stability and reliability of the product under various environmental conditions.
[0056] 3. The quality inspection module of the present invention uses an X-ray fluorescence spectrometer to analyze the chemical composition of the polysilicon crushed material, and the automatic sorting device automatically sorts qualified and unqualified products according to the quality inspection results, thereby ensuring the consistency of product quality, reducing human errors, and improving the market competitiveness of products.
[0057] 4. The integrated control unit in the present invention allows operators to remotely monitor the system status through remote monitoring devices and predictive maintenance algorithms, and predict maintenance requirements based on equipment operation data to reduce unexpected downtime; the emergency discharge device in the water quenching module quickly discharges water quenching liquid when the pressure is abnormal to prevent equipment damage; the safety and reliability of the system are improved, production risks are reduced, and the safety of operators is guaranteed. BRIEF DESCRIPTION OF THE DRAWINGS
[0058] Figure 1 It is a block diagram of the system composition of the present invention;
[0059] Figure 2 It is a schematic diagram of the operation flow of the present invention. DETAILED DESCRIPTION
[0060] In order to make the technical means, creative features, objectives and effects achieved by the present invention easy to understand, the present invention is further explained below in conjunction with specific implementation methods.
[0061] like Figure 1 and Figure 2 As shown, a polysilicon crushed material packaging moisture residual water quenching system, the system includes the following modules:
[0062] An integrated control unit for real-time monitoring and adjustment of the entire water quenching and packaging process, including but not limited to monitoring of temperature, pressure, and flow rate parameters;
[0063] Furthermore, the integrated control unit comprises:
[0064] Remote monitoring device, allowing operators to remotely monitor system status;
[0065] Predictive maintenance algorithms predict maintenance needs based on equipment operating data to reduce unexpected downtime;
[0066] The operation log recorder is used to record all operations of operators and system events to facilitate fault tracing and performance analysis.
[0067] The integrated control unit is the brain of the system, responsible for monitoring and adjusting the entire water quenching and packaging process. The unit collects key parameters such as temperature, pressure, flow rate, etc. in real time through advanced sensors and actuators, and processes them using advanced control algorithms;
[0068] The temperature sensor adopts an infrared non-contact sensor to avoid interference with the water quenching liquid; the pressure sensor is installed at the inlet and outlet of the water quenching module to monitor the water pressure change; the flow rate sensor is installed in the water quenching liquid delivery pipeline to ensure the uniform distribution of the water quenching liquid.
[0069] Water quenching module, used to evenly and quickly cool the polysilicon crushed materials to reduce thermal shock and improve the mechanical properties of the materials;
[0070] Furthermore, the water quenching module comprises:
[0071] Temperature monitoring sensor, used to monitor the temperature of the water quenching liquid in real time to ensure the water quenching effect;
[0072] Flow control valve, which can accurately control the flow of water quenching liquid to adapt to different sizes of polysilicon crushed materials;
[0073] Emergency discharge device is used to quickly discharge water quenching liquid when the pressure is abnormal to prevent equipment damage.
[0074] The temperature monitoring sensor adopts high-precision thermocouple or thermistor to ensure accurate measurement of the temperature of the water quenching liquid; the flow control valve adopts an electric control valve to achieve precise flow regulation; the emergency discharge device automatically starts when the system pressure exceeds the preset value to protect the equipment from damage. The preset pressure value is determined according to the pressure bearing capacity of the tank during actual use.
[0075] Crushing module, used to crush the water-quenched polysilicon into required sizes to improve the utilization rate of materials;
[0076] Furthermore, the crushing module comprises:
[0077] Impact crusher, used to efficiently crush polysilicon and reduce material loss;
[0078] Particle size distribution analyzer, used to monitor the particle size distribution of crushed materials in real time to ensure product consistency;
[0079] Automatic feeding control device automatically adjusts the feeding speed according to the crusher load to ensure crushing efficiency.
[0080] The impact crusher adopts a hammer crusher, which performs impact crushing through a high-speed rotating hammer; the particle size distribution analyzer adopts a laser particle size analyzer to monitor the particle size distribution of the crushed material in real time; the automatic feeding control device adopts a variable frequency speed regulator to automatically adjust the feeding speed according to the crusher load and the discharge efficiency of the discharge port.
[0081] Screening module, used to screen polysilicon crushed materials of different sizes to ensure that product quality meets the standards;
[0082] Furthermore, the screening module includes:
[0083] Multi-layer vibrating screen, used to accurately screen polysilicon crushed materials of different particle sizes;
[0084] Automatic screen cleaning device, used to keep the screen clean and improve screening efficiency;
[0085] The particle size monitoring sensor is used to monitor the particle size of the polysilicon crushed material after screening and feed it back to the screening system.
[0086] The multi-layer vibrating screen uses a high-frequency vibrating screen to achieve precise screening. At the same time, the moisture on the surface of polysilicon can be initially separated through screening; the automatic screen cleaning device uses ultrasonic cleaning technology to keep the screen clean; the particle size monitoring sensor uses a photoelectric sensor to monitor the particle size of the polysilicon crushed material after screening.
[0087] The moisture-residue-proof treatment module is used to remove moisture from the surface of polysilicon crushed materials, reduce moisture residue during packaging, and ensure that the product is dry;
[0088] Furthermore, the moisture-proof residual processing module includes:
[0089] Vacuum degassing device, used to remove trace moisture on the surface and inside of polysilicon crushed materials;
[0090] Thermal imaging detection device, used to detect the drying uniformity of polysilicon crushed materials;
[0091] Automatic humidity control device, automatically adjusts the drying intensity according to the thermal imaging detection results.
[0092] The vacuum degassing device uses a rotary evaporator to remove moisture in a vacuum environment; the thermal imaging detection device can monitor the temperature distribution of the polysilicon crushed material in real time to ensure uniform drying; the automatic humidity control device automatically adjusts the drying intensity according to the thermal imaging results to achieve the best drying effect.
[0093] Drying module, used to further dry the polysilicon crushed materials to ensure that there is no excess moisture before packaging;
[0094] Furthermore, the drying module comprises:
[0095] Circulating hot air drying device, used to evenly dry the polysilicon crushed materials;
[0096] A humidity sensor array to monitor humidity changes during the drying process;
[0097] The temperature regulating device is used to control the temperature during the drying process to prevent overheating and damage to the material.
[0098] The circulating hot air drying device adopts a hot air circulation system to evenly dry the polysilicon crushed materials; the humidity sensor array adopts a multi-point arrangement to monitor the humidity changes during the drying process, avoid detection of blind spots, and improve the drying effect; the temperature adjustment device adopts a PID controller to control the temperature during the drying process and the operating power of the circulating hot air drying device according to the feedback data from the temperature sensor.
[0099] Quality inspection module, used to inspect the quality of polysilicon crushed materials, including size, shape and purity, to ensure product quality;
[0100] Furthermore, the quality detection module includes:
[0101] X-ray fluorescence spectrometer, used to analyze the chemical composition of polysilicon crushed materials;
[0102] Automatic sorting device, used to automatically sort qualified and unqualified products according to quality inspection results;
[0103] An image recognition device is used to identify and classify foreign matter or defects in polysilicon crushed material.
[0104] The X-ray fluorescence spectrometer is used to analyze the chemical composition of the polysilicon crushed materials and provide sorting data for the sorting device. The automatic sorting device uses a robotic arm to perform sorting and automatically sorts qualified and unqualified products according to the quality inspection results. The image recognition device can use a machine vision system to identify and classify foreign matter or defects in the polysilicon crushed materials.
[0105] The environmental adaptability module is used to ensure the performance and stability of polysilicon crushed materials under different environmental conditions and improve the market adaptability of the product.
[0106] Furthermore, the environmental adaptability module includes:
[0107] Climate simulation chamber, used to simulate the performance of polysilicon crushed materials under different climate conditions;
[0108] Mechanical stress testing device, used to test the stability of polysilicon crushed materials under different mechanical stresses;
[0109] Environmental data recorder, used to record the performance data of polysilicon crushed materials under simulated environmental conditions.
[0110] The climate simulation chamber is used to simulate different temperature, humidity and pressure conditions; the mechanical stress testing device is used to test the stability of polysilicon crushed materials under different mechanical stresses; the environmental data recorder is used to record the performance data of polysilicon crushed materials under simulated environmental conditions.
[0111] The packaging module is used to seal and package the processed polysilicon crushed materials to ensure moisture-proof intrusion and protect the products from environmental impacts;
[0112] Furthermore, the packaging module includes:
[0113] Automatic sealing device to ensure the tightness of the package and prevent the intrusion of moisture and contaminants;
[0114] Packaging material humidity regulating device, used to regulate the humidity of packaging materials and enhance the waterproof performance of packaging;
[0115] Package integrity testing device, used to test the sealing and strength of each package.
[0116] The automatic sealing device adopts heat sealing technology to ensure the sealing of the package through hot pressure sealing; the packaging material humidity adjustment device adopts a dehumidifier to adjust the humidity of the packaging material; the packaging integrity testing device adopts a negative pressure sealing tester to detect the sealing through negative pressure to ensure the integrity of the package.
[0117] Embodiment: In the actual application process of the present invention, the polysilicon crushed material is firstly rapidly cooled by a water quenching module to reduce thermal shock and improve the mechanical properties of the material; the temperature of the water quenching liquid is monitored in real time by a temperature monitoring sensor, and the flow rate is precisely controlled by a flow control valve; the emergency discharge device ensures that the water quenching liquid is quickly discharged when the pressure is abnormal to prevent equipment damage.
[0118] Then, the multi-layer vibrating screen in the screening module is used to accurately screen the polysilicon crushed materials of different particle sizes, the automatic screen cleaning device keeps the screen clean, and the particle size monitoring sensor monitors the particle size of the polysilicon crushed materials after screening.
[0119] Subsequently, the water-quenched polysilicon is crushed into required sizes by the impact crusher in the crushing module, the particle size distribution analyzer monitors the particle size distribution of the crushed material in real time, and the automatic feeding control device automatically adjusts the feeding speed according to the crusher load.
[0120] Next, the polysilicon crushed material enters the moisture residue treatment module, in which the vacuum degassing device removes trace moisture on the surface and inside; the thermal imaging detection device monitors the drying uniformity in real time, and the automatic humidity control device automatically adjusts the drying intensity according to the detection results.
[0121] Then it is sent into the drying module, and the polysilicon crushed material is evenly dried by the circulating hot air drying device. The humidity sensor array monitors the humidity changes during the drying process, and the temperature regulating device controls the temperature during the drying process.
[0122] The X-ray fluorescence spectrometer in the quality inspection module analyzes the chemical composition of the polysilicon crushed materials, the automatic sorting device automatically sorts qualified and unqualified products according to the quality inspection results, and the image recognition device identifies and classifies foreign matter or defects in the polysilicon crushed materials.
[0123] Then, the climate simulation room in the environmental adaptability module simulates the performance of polysilicon crushed materials under different climatic conditions, the mechanical stress testing device tests the stability of polysilicon crushed materials under different mechanical stresses, and the environmental data recorder records the performance data of polysilicon crushed materials under simulated environmental conditions.
[0124] Finally, in the packaging module, the polysilicon crushed materials after drying inspection are sealed and packaged by the automatic sealing device. The packaging material humidity adjustment device adjusts the humidity of the packaging material to enhance the waterproof performance of the packaging. The packaging integrity testing device tests the sealing and strength of each package to ensure the safety of the product during transportation and storage.
[0125] Through the above embodiments, it can be seen that the polysilicon crushed material packaging moisture residue water quenching system can effectively improve the processing efficiency and product quality of polysilicon crushed material, while ensuring the performance and stability of the product under different environmental conditions.
[0126] The above shows and describes the basic principles and main features of the present invention and the advantages of the present invention. It should be understood by those skilled in the art that the present invention is not limited to the above embodiments. The above embodiments and descriptions are only for explaining the principles of the present invention. Without departing from the spirit and scope of the present invention, the present invention may have various changes and improvements, which fall within the scope of the present invention to be protected. The scope of protection of the present invention is defined by the attached claims and their equivalents.
Claims
1. A polysilicon crushed material packaging and moisture-residual water quenching system, characterized by: The system includes the following modules: Integrated control unit for real-time monitoring and adjustment of the entire water quenching and packaging process, including but not limited to monitoring of temperature, pressure, and flow rate parameters; Water quenching module, used to evenly and quickly cool the polysilicon crushed materials to reduce thermal shock and improve the mechanical properties of the materials; Crushing module, used to crush the water-quenched polysilicon into required sizes to improve the utilization rate of materials; Screening module, used to screen polysilicon crushed materials of different sizes to ensure that product quality meets the standards; The moisture-residue-proof treatment module is used to remove moisture from the surface of polysilicon crushed materials, reduce moisture residue during packaging, and ensure that the product is dry; Drying module, used to further dry the polysilicon crushed materials to ensure that there is no excess moisture before packaging; Quality inspection module, used to inspect the quality of polysilicon crushed materials, including size, shape and purity, to ensure product quality; Environmental adaptability module, used to ensure the performance and stability of polysilicon crushed materials under different environmental conditions, and improve the market adaptability of products; The packaging module is used to seal and package the processed polysilicon crushed materials to ensure that moisture is not intruded and the product is protected from environmental influences.
2. A polysilicon crushed material packaging and moisture residual water quenching system according to claim 1, characterized in that: The water quenching module comprises: Temperature monitoring sensor, used to monitor the temperature of the water quenching liquid in real time to ensure the water quenching effect; Flow control valve, which can accurately control the flow of water quenching liquid to adapt to different sizes of polysilicon crushed materials; Emergency discharge device is used to quickly discharge water quenching liquid when the pressure is abnormal to prevent equipment damage.
3. The polysilicon crushed material packaging and moisture residual water quenching system according to claim 1, characterized in that: The moisture-proof residual treatment module comprises: Vacuum degassing device, used to remove trace moisture on the surface and inside of polysilicon crushed materials; Thermal imaging detection device, used to detect the drying uniformity of polysilicon crushed materials; Automatic humidity control device, automatically adjusts the drying intensity according to the thermal imaging detection results.
4. The polysilicon crushed material packaging and moisture residual water quenching system according to claim 1, characterized in that: The packaging module comprises: Automatic sealing device to ensure the tightness of the package and prevent the intrusion of moisture and contaminants; Packaging material humidity regulating device, used to regulate the humidity of packaging materials and enhance the waterproof performance of packaging; Package integrity testing device, used to test the sealing and strength of each package.
5. The polysilicon crushed material packaging and moisture residual water quenching system according to claim 1, characterized in that: The crushing module comprises: Impact crusher, used to efficiently crush polysilicon and reduce material loss; Particle size distribution analyzer, used to monitor the particle size distribution of crushed materials in real time to ensure product consistency; Automatic feeding control device automatically adjusts the feeding speed according to the crusher load to ensure crushing efficiency.
6. The polysilicon crushed material packaging and moisture residual water quenching system according to claim 1, characterized in that: The screening module comprises: Multi-layer vibrating screen, used to accurately screen polysilicon crushed materials of different particle sizes; Automatic screen cleaning device, used to keep the screen clean and improve screening efficiency; The particle size monitoring sensor is used to monitor the particle size of the polysilicon crushed material after screening and feed it back to the screening system.
7. The polysilicon crushed material packaging and moisture residual water quenching system according to claim 1, characterized in that: The drying module comprises: Circulating hot air drying device, used to evenly dry the polysilicon crushed materials; A humidity sensor array to monitor humidity changes during the drying process; The temperature regulating device is used to control the temperature during the drying process to prevent overheating and damage to the material.
8. The polysilicon crushed material packaging and moisture residual water quenching system according to claim 1, characterized in that: The quality detection module comprises: X-ray fluorescence spectrometer, used to analyze the chemical composition of polysilicon crushed materials; Automatic sorting device, used to automatically sort qualified and unqualified products according to quality inspection results; An image recognition device is used to identify and classify foreign matter or defects in polysilicon crushed material.
9. The polysilicon crushed material packaging and moisture residual water quenching system according to claim 1, characterized in that: The environmental adaptability module includes: Climate simulation chamber, used to simulate the performance of polysilicon crushed materials under different climate conditions; Mechanical stress testing device, used to test the stability of polysilicon crushed materials under different mechanical stresses; Environmental data recorder, used to record the performance data of polysilicon crushed materials under simulated environmental conditions.
10. The polysilicon crushed material packaging and moisture residual water quenching system according to claim 1, characterized in that: The integrated control unit comprises: Remote monitoring device, allowing operators to remotely monitor system status; Predictive maintenance algorithms predict maintenance needs based on equipment operating data to reduce unexpected downtime; The operation log recorder is used to record all operations of operators and system events to facilitate fault tracing and performance analysis.
Citation Information
Patent Citations
Method for purifying quartz glass raw material
CN102515175A
Pollution-free silicon material crushing and cleaning method
CN106000993A
Utilization method of blast furnace water-quenched slag
CN108046264A
Post-treatment process of polycrystalline silicon
CN114875486A
Method and system for drying electronic grade polycrystalline silicon block
CN115682683A
Cited By
Vacuumizing device and polycrystalline silicon coral material water quenching crushing method and system
CN120054725A