Cleaning system for dust removal tank of crystal pulling furnace

Abstract

The invention provides a cleaning system for a dust removal tank of a crystal pulling furnace, and relates to the technical field of semiconductors, the cleaning system for the dust removal tank of the crystal pulling furnace comprises a dismounting device, a moving device, a cleaning device and a control device; the control device is connected with the dismounting device, the moving device and the cleaning device. The control equipment is used for controlling the dismounting device to dismount the dust removal tank into a tank body and a filter element; the control equipment is used for controlling the moving device to transfer the tank body and the filter element into the cleaning device; the control equipment is used for controlling the cleaning device to clean the tank body and the filter element respectively. According to the invention, the automatic dismounting and cleaning process of the crystal pulling furnace dust removal tank can be realized, personnel participation is not needed, the cleaning difficulty of the crystal pulling furnace dust removal tank is reduced, and the cleaning efficiency is improved.

Description

Technical Field

[0001] The invention relates to the field of semiconductor technology, and in particular to a cleaning system for a dust removal tank of a crystal pulling furnace. Background Art

[0002] In the existing silicon wafer production process, the gas containing oxides and other impurities in the crystal pulling furnace needs to be filtered through a dust removal tank connected to the crystal pulling furnace. This action causes some oxide particles to accumulate in the dust removal tank. As the use time increases, the oxide particles and other impurities accumulate more and more. If backflow occurs, the crystal pulling furnace may also suck the oxide particles in the dust removal tank into the crystal pulling furnace and the thermal field, affecting the quality of the crystal rod, production time and thermal field life.

[0003] Therefore, the dust removal tank needs to be disassembled and cleaned regularly. However, at present, when cleaning the dust removal tank of the crystal pulling furnace, it is usually disassembled and cleaned manually, which has the problems of occupying many people and low cleaning efficiency, affecting the normal operation of the overall equipment of the crystal pulling furnace. Summary of the invention

[0004] The embodiment of the present invention provides a cleaning system for a dust removal tank of a crystal pulling furnace, which is used to solve the problem of large number of personnel and low cleaning efficiency when cleaning the dust removal tank of a crystal pulling furnace in the prior art.

[0005] To solve the above technical problems, the embodiments of the present invention provide the following technical solutions:

[0006] An embodiment of the present invention provides a cleaning system for a dust removal tank of a crystal pulling furnace, comprising:

[0007] dismantling devices, moving devices, cleaning devices and control equipment;

[0008] The control device is respectively connected to the disassembling device, the moving device and the cleaning device;

[0009] The control device is used to control the disassembly device to disassemble the dust removal tank into a tank body and a filter element;

[0010] The control device is used to control the moving device to transfer the tank and the filter element to the cleaning device;

[0011] The control device is used to control the cleaning device to clean the tank body and the filter element respectively.

[0012] In some embodiments, the control device is further used to control the disassembly device to disassemble the dust removal tank from the crystal pulling furnace body.

[0013] In some embodiments, the disassembly device includes a first mechanical arm structure and a screw disassembly assembly;

[0014] The control device is used to control the first robotic arm structure to install the screw removal assembly, use the screw removal assembly to remove the dust removal tank from the crystal pulling furnace body, and disassemble the removed dust removal tank into the tank body and the filter element.

[0015] In some embodiments, the disassembly device further comprises a first storage device;

[0016] The first storage device stores screw removal assemblies of different models;

[0017] The control device is used to control the first robotic arm structure to install a first screw removal component of a model corresponding to the installation screws of the dust removal can in the first storage device, and use the first screw removal component to remove the dust removal can from the crystal pulling furnace body, and to install a second screw removal component of a model corresponding to the installation screws of the filter element in the first storage device, and use the second screw removal component to disassemble the disassembled dust removal can into the can body and the filter element.

[0018] In some embodiments, the mobile device includes a hoisting component and a transport component;

[0019] The control device is used to control the hoisting assembly to hoist the filter element into the cleaning device;

[0020] The control device is used to control the transfer component to transfer the tank body to the cleaning device.

[0021] In some embodiments, the cleaning device includes a tank cleaning device and a filter element cleaning device;

[0022] The control device is used to control the tank cleaning device to enter the tank to clean the tank;

[0023] The filter element cleaning device includes a accommodating barrel and a filter element cleaning assembly connected to the accommodating barrel. The control device is used to control the moving device to place the filter element into the accommodating barrel, and to control the filter element cleaning assembly to clean the filter element in the accommodating barrel.

[0024] In some embodiments, the tank cleaning device includes a second robotic arm structure and a second storage device;

[0025] The second storage device stores washing components of different models;

[0026] The control device is used to control the second robotic arm structure to install a brush assembly of a corresponding model of the tank body in the second storage device, and to control the second robotic arm structure to drive the brush assembly into the tank body to clean the tank body.

[0027] In some embodiments, the filter element cleaning assembly includes at least one of the following:

[0028] Filter element purge device; filter element dust collection device; filter element washing device;

[0029] The control device is specifically used for at least one of the following:

[0030] Controlling the filter element purge device to purge the filter element in the accommodating barrel;

[0031] Controlling the filter element dust suction device to absorb particles in the filter element in the accommodating barrel;

[0032] The filter element cleaning device is controlled to clean the filter element in the accommodating barrel.

[0033] In some embodiments, the filter element cleaning assembly includes:

[0034] Drying devices;

[0035] Wherein, the control device is used to control the drying device to dry the cleaned filter element.

[0036] In some embodiments, after the tank body and the filter element are cleaned respectively, the control device is further used to control the disassembly device to install the tank body and the filter element.

[0037] The embodiments of the present invention have the following beneficial effects:

[0038] The cleaning system for the dust removal tank of the crystal pulling furnace provided in the embodiment of the present invention controls the disassembly device in sequence through a control device to disassemble the dust removal tank into a tank body and a filter element, the moving device transfers the tank body and the filter element to the cleaning device, and the cleaning device cleans the tank body and the filter element respectively, thereby realizing the automatic disassembly and cleaning process of the dust removal tank of the crystal pulling furnace without the need for human participation, reducing the difficulty of cleaning the dust removal tank of the crystal pulling furnace and improving the cleaning efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0039] Figure 1 A schematic structural diagram of a cleaning system for a dust removal tank of a crystal pulling furnace provided in an embodiment of the present invention.

[0040] Reference numerals:

[0041] 1: control device; 2: carrying device; 3: filter element; 4: first mechanical arm structure; 5: first storage device; 6: containing bucket; 7: filter element purge device; 8: filter element dust suction device; 9: filter element washing device. DETAILED DESCRIPTION

[0042] In order to make the technical problems, technical solutions and advantages to be solved by the embodiments of the present invention more clear, a detailed description will be given below with reference to the accompanying drawings and specific embodiments.

[0043] In order to make the purpose, technical solution and advantages of the embodiment of the present invention clearer, the technical solution of the embodiment of the present invention will be clearly and completely described below in conjunction with the drawings of the embodiment of the present invention. Obviously, the described embodiment is a part of the embodiment of the present invention, not all of the embodiments. Based on the described embodiment of the present invention, all other embodiments obtained by ordinary technicians in this field belong to the scope of protection of the present invention.

[0044] In order to solve the problem in the prior art that a large number of personnel are required and the cleaning efficiency is low when cleaning the dust removal tank of a crystal pulling furnace, an embodiment of the present invention provides a cleaning system for the dust removal tank of a crystal pulling furnace.

[0045] like Figure 1 As shown, an embodiment of the present invention provides a cleaning system for a dust removal tank of a crystal pulling furnace, comprising:

[0046] Disassembly device, moving device, cleaning device and control equipment 1;

[0047] It should be noted that the control device 1 may also be referred to as a control system or a control console, and the control device 1 may be operated and controlled by an operator. Optionally, the control device 1 may be a personal computer or a programmable logic controller (PLC).

[0048] The control device 1 is connected to the disassembling device, the moving device and the cleaning device respectively.

[0049] The disassembling device, the moving device and the cleaning device can be arranged according to the cleaning route of the dust removal tank of the crystal pulling furnace.

[0050] Optionally, the disassembly device, moving device, cleaning device and control equipment 1 can all be set on a movable carrying device 2, and the disassembly device, moving device, cleaning device and control equipment can be moved by the carrying device 2 to facilitate the transfer of the disassembly device, moving device, cleaning device and control equipment to different crystal pulling furnaces to clean the dust removal tank of the crystal pulling furnace.

[0051] Among them, Figure 1 As shown, the carrying device 2 can be a movable vehicle, called an automatic dust tank cleaning vehicle.

[0052] The control device 1 is used to control the disassembly device to disassemble the dust removal tank into a tank body and a filter element 3, that is, the filter element 3 in the dust removal tank is disassembled from the tank body by the disassembly device, so as to realize the automatic disassembly and assembly of the dust removal tank filter element 3. Since the filter element of the dust removal tank of the crystal pulling furnace is relatively heavy, it is difficult to remove the filter element by manual disassembly, and it requires a lot of manpower. The disassembly device provided in the embodiment of the present invention can realize the automatic disassembly of the dust removal tank.

[0053] The control device 1 is used to control the moving device to transfer the tank body and the filter element 3 to the cleaning device, that is, after the dust removal tank is disassembled, the moving device is controlled to transfer the tank body and the filter element 3 to the cleaning device for cleaning.

[0054] The control device 1 is used to control the cleaning device to clean the tank body and the filter element 3 respectively.

[0055] In this embodiment, the disassembly device is used to realize the automatic disassembly process of the dust removal tank of the crystal pulling furnace, and the transfer device and the cleaning device are used to realize the automatic cleaning process of the dust removal tank after disassembly, without the participation of personnel, thereby reducing the cleaning difficulty of the dust removal tank of the crystal pulling furnace and improving the cleaning efficiency. In addition, the disassembled tank body and the filter element 3 are cleaned separately, which can reduce the cleaning difficulty of the dust removal tank and ensure the cleaning effect of each structure in the dust removal tank.

[0056] In some embodiments, the control device 1 is further used to control the disassembly device to disassemble the dust removal tank from the crystal pulling furnace body.

[0057] That is, in this embodiment, after the control equipment and the disassembly device are moved to a position close to the crystal pulling furnace, the dust removal tank structure can also be automatically disassembled from the crystal pulling furnace body by controlling the disassembly device without the need for human intervention, thereby reducing the difficulty of disassembling the dust removal tank and improving cleaning efficiency.

[0058] In some embodiments, the disassembly device includes a first mechanical arm structure 4 and a screw disassembly assembly (or referred to as a screw disassembly tool);

[0059] The control device 1 is used to control the first mechanical arm structure 4 to install the screw removal assembly, use the screw removal assembly to remove the dust removal tank from the crystal pulling furnace body, and disassemble the removed dust removal tank into the tank body and the filter element 3.

[0060] Since the dust removal tank is installed on the crystal pulling furnace body by screws, and the filter element in the dust removal tank structure is also installed on the tank body by screws, in this embodiment, a first robotic arm structure 4 and a screw disassembly assembly are provided in the disassembly device. After the control device 1 controls the first robotic arm structure 4 to automatically install the screw disassembly assembly, the dust removal tank is disassembled from the crystal pulling furnace body by driving the screw disassembly assembly through the first robotic arm structure 4 in turn, and the dust removal tank is disassembled into the tank body and the filter element 3 by driving the screw disassembly assembly through the first robotic arm structure 4.

[0061] It should be noted that dust removal tanks of different models and sizes are installed on the crystal pulling furnace body by screws of different models, and the filter element is installed by screws of different models. Therefore, in order to be applicable to dust removal tanks of different models and sizes, in some embodiments, the disassembly device further includes a first storage device 5, in which screw disassembly assemblies of different models are stored.

[0062] The control device 1 is used to control the first robotic arm structure 4 to install a first screw removal assembly of a corresponding model of the installation screws of the dust removal tank in the first storage device 5, and use the first screw removal assembly to remove the dust removal tank from the crystal pulling furnace body, wherein the installation screws of the dust removal tank are the screws for installing the dust removal tank on the crystal pulling furnace body.

[0063] That is, after the dust tank automatic cleaning vehicle moves to a position close to the crystal pulling furnace, the control device 1 obtains the model of the dust tank installation screws in advance, controls the first mechanical arm structure 4 to install the first screw removal assembly corresponding to the model of the dust tank installation screws in the first storage device 5, and then controls the first mechanical arm structure 4 to drive the first screw installation assembly to move to the installation position of the dust tank installation screws, disassembles the dust tank installation screws, and removes the dust tank from the crystal pulling furnace body. Afterwards, the control device 1 is also used to control the first mechanical arm structure 4 to drive the disassembled dust tank to move to a stable position for subsequent operations.

[0064] Furthermore, the control device 1 is used to control the first mechanical arm structure 4 to install a second screw removal assembly of a model corresponding to the installation screw of the filter element 3 in the first storage device 5, and use the second screw removal assembly to disassemble the dust removal tank into the tank body and the filter element after disassembly. The installation screw of the filter element is a screw for installing the filter element and the tank body.

[0065] That is, after the dust removal tank is removed from the crystal pulling furnace body, the control device 1 obtains the model of the installation screws of the filter element 3 in advance, controls the first mechanical arm structure 4 to install the second screw removal assembly corresponding to the model of the installation screws of the filter element 3 in the first storage device 5, and then controls the first mechanical arm structure 4 to drive the second screw installation assembly to move to the installation position of the installation screws of the filter element, disassembles the installation screws of the filter element, and disassembles the dust removal tank into the tank body and the filter element.

[0066] In some embodiments, the mobile device includes a hoisting component and a transport component;

[0067] The control device 1 is used to control the lifting assembly to lift the filter element 3 into the cleaning device.

[0068] Optionally, the hoisting assembly can also be a hoisting tool, and the hoisting assembly can be an independent structure, that is, the filter element is transported to the cleaning device for cleaning by hoisting through the hoisting assembly. The hoisting assembly can also be used in conjunction with the first mechanical arm structure 4, that is, the first mechanical arm structure 4 is controlled to remove the screw removal assembly, the hoisting assembly is installed, and the first mechanical arm structure 4 drives the hoisting assembly to load and remove the filter element, and then the first mechanical arm structure 4 drives the hoisting assembly to hoist the filter element to the cleaning device.

[0069] The control device 1 is used to control the transfer component to transfer the tank to the cleaning device.

[0070] Optionally, the transfer assembly can be a movable bearing platform. The first mechanical arm structure 4 can be controlled to use the first screw disassembly assembly to disassemble the dust removal tank from the crystal pulling furnace body, and then the disassembled dust removal tank can be placed on the bearing platform. After that, the first mechanical arm structure 4 can be controlled to use the second screw disassembly assembly to disassemble the disassembled dust removal tank into a tank body and a filter element on the bearing platform, and then the lifting assembly can be controlled to lift the filter element 3 to the cleaning device. At this time, the tank body is located on the bearing platform, and the bearing platform is controlled to move to transfer the tank body to the cleaning device for cleaning.

[0071] In some embodiments, the cleaning device includes a tank cleaning device and a filter element cleaning device;

[0072] The control device 1 is used to control the tank cleaning device to enter the tank to clean the tank.

[0073] It should be noted that when the dust removal tank is in use, since the filter element 3 is installed inside the tank body, particles such as oxide impurities will be stored on the inner wall of the tank body. Therefore, the interior of the tank body needs to be cleaned in a targeted manner. Therefore, in this optional embodiment, a tank cleaning device is used to penetrate into the interior of the tank body and clean the interior of the tank body through the tank cleaning device.

[0074] The filter element cleaning device includes a accommodating barrel 6 and a filter element cleaning assembly connected to the accommodating barrel 6 , and the control device 1 is used to control the moving device to place the filter element 3 into the accommodating barrel 6 , and to control the filter element cleaning assembly to clean the filter element 3 in the accommodating barrel 6 .

[0075] It should be noted that the entire filter element 3 needs to be cleaned, so in this embodiment, a containing barrel 6 is provided in the filter element cleaning device, and the containing barrel 6 is used to contain the filter element 3. In the containing barrel 6, the filter element cleaning assembly is used to fully clean the filter element 3 in the containing barrel 6. By placing the filter element 3 in the containing barrel 6 for cleaning, it is possible to avoid the oxide particles cleaned from the filter element 3 from polluting the environment, and it is also convenient to realize operations such as cleaning and drying the filter element 3.

[0076] Optionally, the tank cleaning device includes a second mechanical arm structure and a second storage device;

[0077] The second storage device stores washing components of different models;

[0078] The control device is used to control the second robotic arm structure to install a brush assembly of a corresponding model of the tank body in the second storage device, and to control the second robotic arm structure to drive the brush assembly into the tank body to clean the tank body.

[0079] It should be noted that the second mechanical arm structure and the first mechanical arm structure 4 can be reused as the same mechanical arm structure, or can be two different mechanical arm structures, such as Figure 1 As shown, in the embodiment of the present invention, the second mechanical arm structure and the first mechanical arm structure 4 are reused as the same mechanical arm structure for explanation. That is, the same mechanical arm structure can realize the installation of the first screw disassembly component, dismantle the installation screws of the dust removal tank, dismantle the dust removal tank from the crystal pulling furnace body, install the second screw disassembly component, and dismantle the dust removal tank into the tank body and the filter element after disassembly. It can also be controlled to install the washing component of the corresponding model of the tank body. After installing the washing component of the corresponding model of the tank body, the washing component is inserted deep into the tank body to clean the tank body.

[0080] When cleaning the tank body, the tank body can be controlled to rotate. During the rotation of the tank body, the washing assembly is controlled to gradually move down from the top of the tank body along the vertical direction to the bottom of the tank body, and this can be repeated multiple times to ensure the cleaning effect of the tank body.

[0081] Wherein, the scrubbing component includes a brush, a scraper and the like.

[0082] The design method of reusing the second robot arm structure and the first robot arm structure 4 as the same robot arm structure can reduce the occupied space of the cleaning system of the crystal pulling furnace tank provided in the embodiment of the present invention and simplify the system structure.

[0083] Furthermore, the second storage device and the first storage device 5 can be reused as the same storage device, or can be two different storage devices, such as Figure 1 As shown, in the embodiment of the present invention, the second storage device and the first storage device 5 are multiplexed into the same storage device as an example for description.

[0084] That is, the first storage device 5 can store not only screw disassembly components of different models, but also washing components of different models. This design can reduce the occupied space of the cleaning system and simplify the system structure.

[0085] Optionally, the filter element cleaning assembly includes at least one of the following:

[0086] Filter element purge device 7; filter element dust suction device 8; filter element washing device 9;

[0087] The control device is specifically used to clean the filter element 3 in the accommodating barrel 6 by at least one of the following methods:

[0088] Method 1: Control the filter element purge device 7 to purge the filter element 3 in the accommodating barrel 6 .

[0089] The filter element purge device 7 may be disposed on the inner wall surface of the accommodating barrel 6 or communicated with the bottom of the accommodating barrel 6, and the filter element 3 is purged by the filter element purge device 7 to achieve the purpose of cleaning the filter element 3;

[0090] Optionally, the number of the filter element purge device 7 may be one or more. When the filter element purge device 7 is connected to the bottom of the accommodating barrel 6, the number of the filter element purge device 7 may be one. The filter element purge device 7 passes compressed air into the accommodating barrel 6 to bring out the oxide particles in the filter element 3 through the flow of compressed air, thereby cleaning the filter element 3. When the filter element purge device 7 is arranged on the inner wall surface of the accommodating barrel 6, the number of the filter element purge devices 7 may be multiple, and the multiple filter element purge devices 7 are evenly arranged on the inner wall surface of the accommodating barrel 6, so that the filter element 3 is fully purged by multiple filter element purge devices 7 to ensure the cleaning effect of the filter element 3.

[0091] Method 2: Control the filter element dust suction device 8 to absorb the particles in the filter element 3 in the accommodating barrel 6 .

[0092] The filter element dust collecting device 8 may be arranged to be connected to the side wall of the accommodating barrel 6 or the bottom of the accommodating barrel 6 .

[0093] In this method, the filter element 3 is vacuumed by a filter element vacuum device 8 with a large suction force, so that the oxide particles in the filter element 3 are sucked out, thereby cleaning the filter element 3.

[0094] Method three: controlling the filter element cleaning device 9 to clean the filter element 3 in the accommodating barrel 6 .

[0095] Among them, the filter element cleaning device 9 is connected to the accommodating barrel 6, and the filter element cleaning device 9 can rotate, and the filter element cleaning device 9 is located on one side of the filter element 3, and the filter element cleaning device 9 is also connected to the water system. When cleaning, it sprays clean water toward the filter element 3 while cleaning the filter element 3, so as to achieve the effect of cleaning the filter element 3.

[0096] It should also be noted that the above three methods can be performed separately, or two or three of them can be selected and performed simultaneously to ensure efficient cleaning of the filter element 3.

[0097] In some embodiments, the filter element cleaning assembly includes:

[0098] Drying devices;

[0099] The control device 1 is used to control the drying device to dry the cleaned filter element 3.

[0100] In this embodiment, after the filter element 3 is cleaned by using the three methods mentioned above, the cleaned filter element 3 is dried by a drying device, and the dried filter element can continue to be used.

[0101] In some embodiments, the filter element cleaning device further comprises a particle detector;

[0102] The particle detector is used to detect the concentration of particulate matter in the storage barrel 6. When the concentration is less than the concentration threshold, it is determined that the cleaning of the filter element 3 is completed. When the concentration is greater than or equal to the concentration threshold, the filter element cleaning device continues to be controlled to clean the filter element 3 in the above manner until the monitored concentration of particulate matter in the storage barrel 6 is less than the concentration threshold.

[0103] In some embodiments, after the tank body and the filter element 3 are cleaned respectively, the control device 1 is further used to control the disassembly device to install the tank body and the filter element.

[0104] Among them, the first storage device 5 can also store screw installation components of different models. After the tank body and the filter element 3 are cleaned respectively, the control device is specifically used to install a first screw installation component of a corresponding model of the installation screws of the filter element in the first storage device, and the tank body and the filter element are installed as a dust removal tank by using the first screw installation component, and the control device is specifically used to install a second screw installation component of a corresponding model of the installation screws of the dust removal tank in the first storage device, and the dust removal tank is installed on the crystal pulling furnace body by using the second screw installation component.

[0105] The above is a preferred embodiment of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the principles of the present invention. These improvements and modifications should also be regarded as the scope of protection of the present invention.

Claims

1. A cleaning system for a crystal pulling furnace dust removal tank, characterized in that: include: dismantling devices, moving devices, cleaning devices and control equipment; The control device is respectively connected to the disassembling device, the moving device and the cleaning device; The control device is used to control the disassembly device to disassemble the dust removal tank into a tank body and a filter element; The control device is used to control the moving device to transfer the tank and the filter element to the cleaning device; The control device is used to control the cleaning device to clean the tank body and the filter element respectively.

2. The cleaning system for the dust removal tank of the crystal pulling furnace according to claim 1, characterized in that: The control device is also used to control the disassembly device to disassemble the dust removal tank from the crystal pulling furnace body.

3. The cleaning system for the dust removal tank of the crystal pulling furnace according to claim 2, characterized in that: The disassembly device comprises a first mechanical arm structure and a screw disassembly assembly; The control device is used to control the first robotic arm structure to install the screw removal assembly, use the screw removal assembly to remove the dust removal tank from the crystal pulling furnace body, and disassemble the removed dust removal tank into the tank body and the filter element.

4. The cleaning system for the dust removal tank of the crystal pulling furnace according to claim 3, characterized in that: The disassembly device further comprises a first storage device; The first storage device stores screw removal assemblies of different models; The control device is used to control the first robotic arm structure to install a first screw removal component of a model corresponding to the installation screws of the dust removal can in the first storage device, and use the first screw removal component to remove the dust removal can from the crystal pulling furnace body, and to install a second screw removal component of a model corresponding to the installation screws of the filter element in the first storage device, and use the second screw removal component to disassemble the disassembled dust removal can into the can body and the filter element.

5. The cleaning system for the dust removal tank of the crystal pulling furnace according to claim 1, characterized in that: The mobile device includes a hoisting component and a transfer component; The control device is used to control the hoisting assembly to hoist the filter element into the cleaning device; The control device is used to control the transfer component to transfer the tank body to the cleaning device.

6. The cleaning system for the dust removal tank of the crystal pulling furnace according to claim 1, characterized in that: The cleaning device comprises a tank cleaning device and a filter element cleaning device; The control device is used to control the tank cleaning device to enter the tank to clean the tank; The filter element cleaning device includes a accommodating barrel and a filter element cleaning assembly connected to the accommodating barrel. The control device is used to control the moving device to place the filter element into the accommodating barrel, and to control the filter element cleaning assembly to clean the filter element in the accommodating barrel.

7. The cleaning system for the dust removal tank of the crystal pulling furnace according to claim 6, characterized in that: The tank cleaning device includes a second mechanical arm structure and a second storage device; The second storage device stores washing components of different models; The control device is used to control the second robotic arm structure to install a brush assembly of a corresponding model of the tank body in the second storage device, and to control the second robotic arm structure to drive the brush assembly into the tank body to clean the tank body.

8. The cleaning system for the dust removal tank of the crystal pulling furnace according to claim 6, characterized in that: The filter element cleaning assembly includes at least one of the following: Filter element purge device; filter element dust collection device; filter element washing device; The control device is specifically used for at least one of the following: Controlling the filter element purge device to purge the filter element in the accommodating barrel; Controlling the filter element dust suction device to absorb particles in the filter element in the accommodating barrel; The filter element cleaning device is controlled to clean the filter element in the accommodating barrel.

9. The cleaning system for the dust removal tank of the crystal pulling furnace according to claim 6, characterized in that: The filter element cleaning assembly comprises: Drying devices; Wherein, the control device is used to control the drying device to dry the cleaned filter element.

10. The cleaning system for the dust removal tank of a crystal pulling furnace according to claim 1, characterized in that: After the tank body and the filter element are cleaned respectively, the control device is also used to control the disassembly device to install the tank body and the filter element.

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