Cover opening structure and method for opening and closing vacuum chamber by applying cover opening structure

Abstract

The invention discloses a cover opening structure and a method for opening and closing a vacuum chamber by applying the cover opening structure, the cover opening structure is used for opening or closing a cavity body of the vacuum chamber, and the cover opening structure comprises an opening and closing module for driving a cover body of the vacuum chamber to move along the height direction of the cavity body to open or close the cavity body; the sliding module is arranged on the cavity, abuts against the opening and closing module and is used for enabling the opening and closing module to slide in the length direction or the width direction of the cavity; and the movable lifting module is used for bearing and driving the opening and closing module and the cover body to move close to or far away from the cavity. According to the cover opening structure, the cavity can be opened, the cover body can be moved to the movable lifting module under the cooperation of the opening and closing module and the sliding module, the cover body is moved to the idle position through the movable lifting module, a larger operation space is provided for operators, and the use experience is improved.

Description

Technical Field

[0001] The present disclosure generally relates to the field of semiconductor device technology, and more specifically, to an opening cover structure, and further to a method for opening and closing a vacuum chamber using the opening cover structure. Background Art

[0002] During the assembly and debugging of semiconductor equipment, opening the upper cover of the vacuum chamber is a frequent and critical step. Since the weight and size of the upper cover of the vacuum chamber are usually large, lifting equipment or a hand winch is usually used to open the cover. However, these opening methods not only require more manpower and material support, but also may cause damage to the equipment or operators during operation. In addition, neither of these two opening methods can achieve complete separation of the chamber cover from the chamber, which limits the possibility of performing large operations on the internal structure of the chamber, and is not conducive to the operation and maintenance of the internal structure of the vacuum chamber.

[0003] In view of this, there is an urgent need to provide an opening cover structure and a method for opening and closing a vacuum chamber using the same to overcome the above technical problems. Summary of the invention

[0004] In order to at least solve one or more of the technical problems mentioned above, the present disclosure proposes, in multiple aspects, an opening cover structure and a method for opening and closing a vacuum chamber using the same.

[0005] In a first aspect, a cover opening structure is provided, which is used to open or close a cavity of a vacuum chamber, and the cover opening structure includes: an opening and closing module, which drives the cover of the vacuum chamber to move along the height direction of the cavity to open or close the cavity; a sliding module, which is arranged on the cavity and abuts against the opening and closing module, and is used to make the opening and closing module slide along the length direction or width direction of the cavity; and a movable lifting module, which abuts against any side wall of the cavity or has a certain distance, and is used to receive and drive the opening and closing module and the cover to move closer to or away from the cavity.

[0006] In some embodiments, the mobile lifting module includes: a carrying platform; a base; at least one group of scissor-type support arm groups, which are located between the carrying platform and the base, and the support arm group includes a first support wall and a second support arm, wherein the two ends of the first support arm are respectively fixedly connected to the carrying platform and the base, and the two ends of the second support arm are respectively slidably connected to the carrying platform and the base; and a driving mechanism, driving the end of the second support arm to slide close to or away from the first support arm.

[0007] In some embodiments, the lower surface of the supporting platform has a first limiting groove with a certain extension length, and the upper surface of the base has a second limiting groove corresponding to the first limiting groove; both ends of the second support arm are connected to guide wheels, and the guide wheels are respectively limited in the first limiting groove and the second limiting groove, and the driving mechanism drives the guide wheel to slide in the first limiting groove or the second limiting groove.

[0008] In some embodiments, the supporting platform and the base are both square; the mobile lifting module includes two groups of support arm groups symmetrically arranged, two guide wheels close to the supporting platform and two guide wheels close to the base are respectively connected by two connecting shafts, and the driving mechanism drives the connecting shafts to move.

[0009] In some embodiments, the connecting shaft has a threaded hole extending therethrough; the driving mechanism passes through the threaded hole and is rotatably connected to a fixed seat, wherein an external thread is provided on the driving mechanism, and the fixed seat is fixedly connected to the supporting platform or the base.

[0010] In some embodiments, the first limiting groove includes two fixed blocks fixedly connected to the lower surface of the supporting platform, and a bending portion with a certain length, wherein the first side wall of the bending portion is fixedly connected to the lower surface of the fixed block, and the second side wall is fixedly connected to the surface of the fixed block away from the other group of support arms; the guide wheel and the nut fix the end of the second support arm on the connecting shaft; and / or the second limiting groove includes two fixed blocks fixedly connected to the upper surface of the base, a limiting plate is installed on the upper surface of the fixed block, and the connecting shaft and the second support arm are respectively connected to the two ends of the guide wheel.

[0011] In some embodiments, two parallel sliding mechanisms are arranged above the carrying platform; the driving mechanism adjusts the mobile lifting module to rise or fall so that the sliding mechanism and the sliding module are at the same level.

[0012] In some embodiments, the opening and closing module includes: an upper mounting member, which is abutted against the cover body; a lower mounting member, which is abutted against the sliding module; two groups of hinge assemblies arranged opposite to each other, the two groups of hinge assemblies respectively including an upper hinge and a lower hinge rotatably connected through different connecting members, wherein the upper hinge is rotatably connected to the upper mounting member, and the lower hinge is rotatably connected to the lower mounting member; and a lead screw, which includes a driving section, a smooth section and a threaded section connected in sequence, the smooth section passes through a first connecting member and is slidably connected thereto, the threaded section passes through a second connecting member and is threadably connected thereto, wherein a first thrust bearing is provided on the smooth section between the driving section and the first connecting member.

[0013] In a second aspect, a method for opening and closing a vacuum chamber using the above-mentioned opening cover structure is also provided, comprising: at the assembly position, the cover body is driven by the opening and closing module to move along the height direction of the cavity to open or close the cavity; before or after the cover body opens or closes the cavity, the cover body and the opening and closing module are driven by the sliding module to slide close to or away from the assembly position, and the cover body and the opening and closing module are moved from the sliding module to the moving lifting module and move away from the cavity; or the moving lifting module moves close to the cavity, and the cover body and the opening and closing module are moved from the moving lifting module to the sliding module.

[0014] In some embodiments, before the cover body and the opening and closing module are switched back and forth on the cavity and the movable lifting module, the guide wheel is moved in the first limit groove and the second limit groove by rotating the connecting shaft so that the sliding mechanism on the movable lifting module is at the same level as the sliding module.

[0015] According to the embodiment of the opening cover structure provided above in the present disclosure, the opening and closing module drives the cover body to open or close the cavity in the height direction of the cavity. After the cavity is opened, the opening and closing module and the cover body move from the assembly position to the edge of the cavity along the sliding module, and then move to the mobile lifting module. The mobile lifting module drives the opening and closing module and the cover body to move closer to or away from the cavity. This solution can not only open the cover body conveniently, but also move the cover body to the mobile lifting module, and move the cover body to an idle position through the mobile lifting module, thereby providing a larger operating space for the operator and improving the user experience. Furthermore, in some embodiments, since a scissor-type support arm group is provided between the bearing platform and the base of the mobile lifting module, the end of the second support arm can slide closer to or away from the first support arm to realize the lifting and lowering of the mobile lifting module. When the mobile lifting module is not needed, it can be folded and placed elsewhere to save space. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] By reading the detailed description below with reference to the accompanying drawings, the above and other objects, features and advantages of the exemplary embodiments of the present disclosure will become readily understood. In the accompanying drawings, several embodiments of the present disclosure are shown in an exemplary and non-limiting manner, and the same or corresponding reference numerals represent the same or corresponding parts, wherein:

[0017] Figure 1 A schematic diagram showing the cover opening structure in use;

[0018] Figure 2 A cross-sectional view of an opening and closing module is shown;

[0019] Figure 3 shows a side view of the opening and closing module;

[0020] Figure 4 A schematic diagram showing the arrangement of the opening and closing module and the sliding module on the vacuum chamber;

[0021] Figure 5 A schematic diagram of the mechanism of the mobile lifting module is shown.

[0022] In the figure: 100, opening and closing module; 200, sliding module; 300, moving lifting module; 400, vacuum chamber;

[0023] 101, upper mounting member; 102, lower mounting member; 103, first hinge assembly; 104, second hinge assembly; 105, upper hinge; 106, lower hinge; 107, first connecting member; 108, second connecting member; 109, lead screw; 109-1, driving section; 110, first thrust bearing; 111, second thrust bearing; 112, first bearing stopper; 113, second bearing stopper; 114, rotating pin; 115, hinge rotating spacer; 116, reinforcing rib; 117, roller; 118, fastener; 119, retaining ring; 120, limit system;

[0024] 1201, guide column; 1202, first guide block; 1203, second guide block;

[0025] 201, guide rail; 202, guide rail mounting block;

[0026] 301, bearing platform; 302, base; 303, first support arm group; 304, second support arm group; 305, first support arm; 306, second support arm; 307, first limiting groove; 308, second limiting groove; 309, connecting shaft; 310, reinforcing shaft; 311, driving rod; 312, fixing seat; 312-1, supporting rod; 313, limiting block; 314, caster; 315, caster lifting plate; 316, supporting member; 317, slide rail; 318, bending part; 319, fixing block; 320, limiting plate; 321, guide wheel; 401, cavity; 402, cover; 403, handle fixing strip; 404, handle. DETAILED DESCRIPTION

[0027] The following will be combined with the drawings in the embodiments of the present disclosure to clearly and completely describe the technical solutions in the embodiments of the present disclosure. Obviously, the described embodiments are part of the embodiments of the present disclosure, not all of the embodiments. Based on the embodiments in the present disclosure, all other embodiments obtained by those skilled in the art without creative work are within the scope of protection of the present disclosure.

[0028] It should be understood that the terms "include" and "comprising" used in the specification and claims of the present disclosure indicate the presence of described features, integers, steps, operations, elements and / or components, but do not exclude the presence or addition of one or more other features, integers, steps, operations, elements, components and / or collections thereof.

[0029] It should also be understood that the terms used in this disclosure are only for the purpose of describing specific embodiments and are not intended to limit the disclosure. As used in this disclosure and claims, the singular forms of "a", "an", and "the" are intended to include the plural forms unless the context clearly indicates otherwise. It should also be further understood that the term "and / or" used in this disclosure and claims refers to any combination of one or more of the associated listed items and all possible combinations, including these combinations.

[0030] As used in this specification and claims, the term "if" may be interpreted as "when" or "upon" or "in response to determining" or "in response to detecting," depending on the context. Similarly, the phrase "if it is determined" or "if [described condition or event] is detected" may be interpreted as meaning "upon determination" or "in response to determining" or "upon detection of [described condition or event]" or "in response to detecting [described condition or event]," depending on the context.

[0031] The specific implementation of the present disclosure is described in detail below with reference to the accompanying drawings.

[0032] As shown in the figure, the present disclosure provides an opening structure, which is used to open or close a vacuum chamber 400. The opening structure includes an opening and closing module 100, a sliding module 200 and a moving lifting module 300. Specifically, the opening and closing module 100 of the opening structure is arranged above the cavity 401 of the vacuum chamber 400, and is used to drive the cover 402 of the vacuum chamber 400 to move along the height direction (i.e., the vertical direction) of the cavity 401, so as to open or close the cavity 401. The sliding module 200 is arranged on the cavity 401 and abuts against the opening and closing module 100, and is used to enable the opening and closing module 100 and the cover 402 to slide along the length direction or width direction of the cavity 401. After the cavity 401 is fully opened, the cover 402 is moved to one side from the assembly position to facilitate the operator to operate and maintain the internal structure of the vacuum chamber 400. The movable lifting module 300 abuts against or maintains a certain distance from any side wall of the cavity 401 , and is used to receive and drive the opening and closing module 100 and the cover 402 to move closer to or away from the cavity 401 , thereby providing a larger operating space for the operator.

[0033] The cover opening structure provided by the present disclosure opens the vacuum chamber 400 through the opening and closing module 100, which can not only reduce the number of operators, but also reduce the safety risks during the operation. By setting the mobile lifting module 300, the cover body 402 can be completely separated from the chamber 401 in the horizontal direction, providing a larger operating space for the operator, and also improving the efficiency of maintenance and operation.

[0034] The above content introduces the functions of each module of the cover opening structure, and the specific structure of the opening and closing module 100 in the cover opening structure will be described in detail below.

[0035] like Figures 2 to 4 As shown, in some embodiments, the opening and closing module 100 includes an upper mounting member 101 and a lower mounting member 102 arranged at intervals, two sets of hinge assemblies arranged between the upper mounting member 101 and the lower mounting member 102, and a lead screw 109 connected to the hinge assembly. The lower mounting member 102 abuts against the cavity 401 of the vacuum chamber 400, and the upper mounting member 101 abuts against the handle 404 on the cover 402. Specifically, the handle 404 has a horizontally arranged handle. When in use, the upper end of the upper mounting member 101 of the opening and closing module 100 abuts against the lower surface of the handle, and then the hinge assembly is driven to rotate by the lead screw 109, driving the handle to rise or fall, and then the handle 404 drives the cover 402 to open or close the cavity 401.

[0036] In a specific embodiment, the upper surface of the cover body 402 has a handle fixing strip 403 with a certain extended length, and the handle 404 is fixed on the cover body 402 by being connected to the handle fixing strip 403 .

[0037] Those skilled in the art will appreciate that the connection method between the handle 404 and the cover 402 is not limited in this solution. The handle 404 can be connected to the cover 402 via the handle fixing strip 403 as described above, or can be directly fixed to the cover 402.

[0038] like Figure 2 As shown, in a specific embodiment, the two hinge assemblies are respectively a first hinge assembly 103 and a second hinge assembly 104. The first hinge assembly 103 includes an upper hinge 105 rotatably connected to the upper mounting member 101 and a lower hinge 106 rotatably connected to the lower mounting member 102, wherein the upper hinge 105 and the lower hinge 106 are rotatably connected via a first connecting member 107. The second hinge assembly 104 also includes an upper hinge 105 rotatably connected to the upper mounting member 101 and a lower hinge 106 rotatably connected to the lower mounting member 102, wherein the upper hinge 105 and the lower hinge 106 are rotatably connected via a second connecting member 108.

[0039] The opening and closing module 100 of the present solution also has a lead screw 109 connected to the hinge assembly. The lead screw 109 includes a driving section 109-1, a smooth section and a threaded section which are connected in sequence, wherein the driving section 109-1 on the lead screw 109 is used to drive the lead screw 109 to rotate, the smooth section is used to pass through the first connecting member 107 and be slidably connected thereto, and the threaded section is used to pass through the second connecting member 108 and be threadedly connected thereto. In addition, a first thrust bearing 110 is also provided on the smooth section between the driving section 109-1 and the first connecting member 107 in the present solution.

[0040] When in use, the opening and closing module 100 is placed at the assembly position of the vacuum chamber 400, the ratchet wrench is put on the driving section 109-1 of the lead screw 109, and the ratchet wrench is turned clockwise or counterclockwise to rotate the lead screw 109, and the lead screw 109 will move forward or backward according to the rotation direction of the threaded section. When the lead screw 109 moves forward, the first thrust bearing 110 will give a thrust to the first connecting member 107, and due to the linkage structure of the hinge, the upper hinge 105 and the lower hinge 106 will rotate around the upper mounting member 101 and the lower mounting member 102 to make the upper mounting member 101 rise and abut against the handle 404 of the cover body 402, and then continue to drive the handle 404 to rise and open the chamber 401.

[0041] In a specific embodiment, in order to prevent the first thrust bearing 110 from moving on the smooth section, a first bearing stopper 112 is sleeved on the smooth section between the first thrust bearing 110 and the driving section 109 - 1 .

[0042] In a specific embodiment, when the cavity 401 needs to be closed, the lead screw 109 is rotated in the opposite direction so that the hinge assembly drives the upper mounting member 101 and the cover 402 to descend and then close the cavity 401. In order to provide assistance to the lead screw 109 when it retreats, a second thrust bearing 111 is provided on the smooth section of the first connecting member 107 away from the driving section 109-1. In addition, in order to prevent the second thrust bearing 111 from moving on the smooth section, a second bearing stopper 113 is sleeved on the sliding portion of the second thrust bearing 111 away from the first connecting member 107.

[0043] Those skilled in the art will appreciate that, in order to open the cover 402 , at least two handles 404 are symmetrically provided on the cover 402 , and the number of the opening and closing modules 100 in this solution is consistent with the number of the handles 404 , which are also symmetrically provided.

[0044] In a specific embodiment, the upper hinge 105 and the lower hinge 106 in the first hinge assembly 103 and the second hinge assembly 104 are both U-shaped members. The U-shaped member includes two side walls arranged opposite to each other and a bottom wall connecting the two side walls.

[0045] The first connecting member 107 is a hinge lifting driving shaft, which includes a connecting portion connected to the lead screw 109 and two extending portions connected to the upper hinge 105 and the lower hinge 106. The middle of the connecting portion has a cylindrical through hole, and the inner surface of the through hole is smooth. The two extending portions are symmetrically arranged on the outer periphery of the connecting portion and have a certain extension length along its radial direction.

[0046] During installation, the hinge lifting and lowering driving shaft is connected to the upper hinge 105 and the lower hinge 106 in the first hinge assembly 103 through the extension part, and is connected to the lead screw 109 through the connection part. Specifically, the hinge lifting and lowering driving shaft is placed between the two side walls at the ends of the upper hinge 105 and the lower hinge 106, one extension part sequentially passes through one side wall of the upper hinge 105 and one side wall of the lower hinge 106 and is fixed by the retaining ring 119, and the other extension part sequentially passes through the other side wall of the upper hinge 105 and the other side wall of the lower hinge 106 and is also fixed by the retaining ring 119. The smooth section of the lead screw 109 passes through the through hole on the connection part and is slidably connected to the hinge lifting and lowering driving shaft.

[0047] The second connecting member 108 is a T-shaped nut, which includes a connecting portion connected to the threaded section on the lead screw 109 and two extension portions connected to the upper hinge 105 and the lower hinge 106. The middle of the connecting portion has a cylindrical through hole, and the inner surface of the through hole has an internal thread that matches the external thread of the threaded section. The two extension portions are symmetrically arranged on the outer periphery of the connecting portion and have a certain extension length along its radial direction.

[0048] In this solution, the connection mode between the T-nut and the second hinge assembly 104 is similar to the connection mode between the hinge lifting driving shaft and the first hinge assembly 103, and the extension section is also connected to the upper hinge 105 and the lower hinge 106. The only difference is that the connection portion on the T-nut is threadedly connected to the threaded section on the lead screw 109.

[0049] Those skilled in the art will appreciate that, in other embodiments, the first connecting member 107 and the second connecting member 108 may also be of the same structure, for example, both are T-nuts, the lead screw 109 is threadedly connected to the two T-nuts, and the two nuts are connected to the lead screw 109 in opposite directions at the positions where they are connected, so that the upper mounting member 101 can be lifted and lowered.

[0050] In a specific embodiment, the upper mounting member 101 on the opening and closing module 100 has a certain extension length, and there is a preset distance between the two ends of the two upper hinges 105 connected to the upper mounting member 101. The lower mounting member 102 of the opening and closing module 100 also has a certain extension length, and there is a preset distance between the two ends of the two lower hinges 106 connected to the lower mounting member 102.

[0051] In this solution, since both the upper mounting member 101 and the lower mounting member 102 have a certain extension length, the contact area between the opening and closing module 100 and the handle 404 and the cavity 401 can be increased, thereby improving the stability of the opening and closing module 100. In addition, since there is a preset distance between the two ends of the two upper hinges 105 connected to the upper mounting member 101, and there is also a preset distance between the two ends of the two lower hinges 106 connected to the lower mounting member 102, it is possible to avoid structural stress concentration caused by the connection points being too close, thereby further improving the stability and durability of the entire opening and closing module 100.

[0052] In a specific embodiment, the upper mounting member 101 and the lower mounting member 102 are U-shaped grooves with openings arranged opposite to each other, and the U-shaped grooves include two side walls arranged opposite to each other and a bottom wall connecting the two side walls. When the upper mounting member 101 is connected to the upper hinge 105, the two side walls of the upper mounting member 101 are respectively connected to the two side walls of the upper hinge 105 through the rotating pin 114, and the transmission pin passes through the side wall and is fixed by the fastener 118. When the lower mounting member 102 is connected to the lower hinge 106, the two side walls of the lower mounting member 102 are respectively connected to the two side walls of the lower hinge 106 through the rotating pin 114.

[0053] Those skilled in the art can understand that, in order to reduce the friction between the hinge assembly and the upper mounting member 101 and the lower mounting member 102 and to improve the flexibility of rotation, a hinge rotation spacer 115 is sleeved on the rotation pin 114 .

[0054] In a specific embodiment, in order to improve the supporting strength of the opening and closing module 100, reinforcing ribs 116 connecting the two side walls are provided on the upper hinge 105 and the lower hinge 106, or reinforcing ribs 116 connecting the two side walls are provided on the upper mounting member 101 and the lower mounting member 102.

[0055] Those skilled in the art can understand that, in order to further improve the support strength of the opening and closing module 100 , reinforcing ribs 116 are provided on the U-shaped member on the hinge assembly and the U-shaped grooves on the upper mounting member 101 and the lower mounting member 102 .

[0056] In a specific embodiment, in order to facilitate the movement of the opening and closing module 100 on the cavity 401, a roller 117 is provided on the lower mounting member 102 of the opening and closing module 100. Specifically, the roller 117 has a connection structure provided on the central axis thereof, and the two ends of the connection structure respectively pass through the two side walls of the lower mounting member 102 and are fixed by a large gasket. The bottom wall of the lower mounting member 102 has a plurality of through holes provided therethrough, and the roller 117 passes through the through holes and abuts against the guide rail 201 provided on the cavity 401. When in use, after the opening and closing module 100 opens the cavity 401, the roller 117 moves in the guide rail so that the cover body 402 is moved from the assembly position to other positions under the drive of the opening and closing module 100, so that the operator can conveniently replace the components in the cavity 401 and other operations.

[0057] In some embodiments, the opening and closing module 100 is further provided with a limiting system 120, and the limiting system 120 includes a vertically arranged guide column 1201, one end of which is fixedly connected to the lower mounting member 102, and the other end of which extends upward through a limiting hole on the upper mounting member 101. In this solution, the vertically arranged guide column 1201 is connected to the upper mounting member 101 and the lower mounting member 102 respectively, so that the opening and closing module 100 can be limited in the horizontal direction to prevent it from shaking when opening or closing the cavity 401.

[0058] like Figure 3 As shown, in a specific embodiment, the limiting system 120 includes a guide column 1201, a first guide block 1202 and a second guide block 1203. Specifically, the first guide block 1202 is fixedly connected to the lower mounting member 102, and the second guide block 1203 is fixedly connected to the upper mounting member 101. One end of the guide column 1201 is fixedly connected to the first guide block 1202, and the other end of the guide column 1201 passes through a limiting hole provided on the second guide block 1203 and then extends upward. More specifically, the first guide block 1202 is provided on the side wall of the lower mounting member 102, and the second guide block 1203 is provided on the side wall of the upper mounting member 101.

[0059] Those skilled in the art may understand that, in other embodiments, the limiting hole may not be provided on the second guide block 1203 , but may be provided between the second guide block 1203 and the side wall of the upper mounting member 101 .

[0060] Those skilled in the art may also understand that, in the present solution, the number of the limiting systems 120 is not limited, and may be two, three, or other positive integers.

[0061] In the solution disclosed herein, since the opening and closing module 100 is the basis for opening the cover, the entire opening and closing module 100 can be integrated into the cavity 401 according to the usage before opening the cover, which saves the time of opening the cover during convenient use and reduces maintenance costs.

[0062] The above content introduces the specific structure of the opening and closing module 100 in detail, and the specific structure of the sliding module 200 in the cover opening structure is described in detail below.

[0063] In some embodiments, the sliding module 200 includes a guide rail 201 symmetrically arranged on the cavity 401, wherein the guide rail 201 may be extended only along the length direction of the cavity 401, or may be extended only along the width direction of the guide rail 201. Of course, the guide rail 201 may also be extended along both the length direction of the cavity 401 and the width direction of the guide rail 201.

[0064] In the solution disclosed herein, when there is enough space above the cavity 401, the guide rail 201 can be directly installed above the cavity 401. When there is not enough space above the cavity 401 to install the guide rail 201, a plurality of guide rail mounting blocks 202 can be provided on the side wall of the cavity 401, and the guide rail 201 is fixedly provided above the guide rail mounting blocks 202.

[0065] It is worth noting that the guide rail 201 in this solution is detachably connected to the cavity 401 or the guide rail mounting block 202. The main purpose of this design is to ensure that the guide rail 201 does not cause any obstruction to the operator during operation, thereby ensuring the smooth operation process and the convenience of the operator. Through the easy-to-detach connection mechanism, the operator can quickly remove or install the guide rail 201 as needed, so as to perform maintenance and operation inside the cavity 401 more flexibly.

[0066] In a specific embodiment, the vacuum chamber 400 is rectangular. A plurality of interconnected guide rails 201 are respectively arranged on two sides in the length direction of the vacuum chamber 400. The purpose of such arrangement is to enable the operator to selectively disassemble one or more of the plurality of guide rails 201 according to the needs, thereby further improving the user experience of the operator.

[0067] The above content introduces the specific structures of the opening and closing module 100 and the sliding module 200 in detail, and the specific structure of the movable lifting module 300 in the cover opening structure is described in detail below.

[0068] like Figure 5As shown, the mobile lifting module 300 provided by the present disclosure abuts against any side wall of the cavity 401 or has a certain distance therefrom, and is used to receive the opening and closing module 100 and the cover 402, and drive the two to move closer to or away from the cavity 401. The mobile lifting module 300 includes a carrier platform 301 and a base 302 that are spaced and arranged opposite to each other, at least one set of support arms arranged between the two in a scissor-like manner, and a driving mechanism that drives the mobile lifting module 300 to rise or fall.

[0069] In some embodiments, the carrying platform 301 and the base 302 are both square and are profile frames with a hollow portion in the middle. Two parallel sliding mechanisms are arranged above the carrying platform 301, wherein the sliding mechanism in this solution is a slide rail 317 with a certain extension length. When in use, the driving mechanism drives the support arm group to make the slide rail 317 on the carrying platform 301 and the sliding module on the cavity 401 at the same horizontal height, thereby moving the cover body 402 and the opening and closing module 100 along the sliding module 200 to the sliding mechanism above the carrying platform 301.

[0070] In some embodiments, a plurality of casters 314 and support members 316 are mounted on the lower surface of the base 302, wherein the casters 314 are provided with caster lift plates 315 for adjusting the height of the casters 314. When in use, the caster lift plates 315 are adjusted so that the casters 314 abut against the ground, and the support members 316 are away from the ground. The mobile lifting module 300 is pushed to the side wall of the vacuum chamber 400, and the caster lift plates 315 are adjusted so that the support members 316 abut against the ground, and the casters 314 are away from the ground. In this solution, the height of the mobile lifting module 300 is adjusted by the driving mechanism, and the position of the mobile lifting module 300 is adjusted by the casters 314, so that the sliding module 200 on the cavity 401 and the slide rails 317 on the carrying platform 301 are not only located on the same horizontal plane, but also on the same horizontal line. When the operator is working, after opening the cover body 402 through the opening and closing module 100, the opening and closing module 100 and the cover body 402 move to the movable lifting module 300 through the sliding module, and then push the movable lifting module 300 to make the cover body 402 and the opening and closing module 100 away from the cavity 401, thereby providing the operator with a larger operating space.

[0071] In some embodiments, the support arm group includes a first support arm 305 and a second support arm 306 arranged crosswise, wherein the first support arm 305 and the second support arm 306 each include a plurality of rotatably connected connecting rods, and the connecting rods on the first support arm 305 and the connecting rods on the second support arm 306 are rotatably connected through a connecting member. The first support arm 305 has two ends, one end is fixedly connected to the bearing platform 301, and the other end is fixedly connected to the base 302. The second support arm 306 also has two ends, one end is slidably connected to a limiting groove provided on the bearing platform 301, and the other end is slidably connected to a limiting groove provided on the base 302. The driving mechanism is connected to the second support arm 306, and drives the end of the second support arm 306 to slide close to or away from the first support arm 305 in the limiting groove, thereby causing the connecting rod to rotate and drive the bearing platform 301 to rise or fall.

[0072] In a specific embodiment, the lower surface of the carrying platform 301 has a first limiting groove 307 with a certain extension length, and the upper surface of the base 302 has a second limiting groove 308 corresponding to the first limiting groove 307. Both ends of the second support arm 306 are provided with a guide wheel 321, one of the guide wheels 321 slides in the first limiting groove 307, and the other guide wheel 321 slides in the second limiting groove 308. In this solution, the guide wheel 321 is connected to the driving mechanism, and slides under the action of the driving mechanism.

[0073] Those skilled in the art will appreciate that the carrying platform 301 and the base 302 may also have other structures besides the profile frame, such as a square plate structure.

[0074] like Figure 5 As shown, in some embodiments, the mobile lifting module 300 includes two groups of support arm groups that are symmetrically and parallelly arranged, and the carrying platform 301 and the base 302 each include two symmetrically arranged long sides and two symmetrically arranged short sides. Both groups of support arm groups are arranged along the long sides of the carrying platform 301 and the base 302.

[0075] Those skilled in the art will appreciate that the definition of the long side and the short side of the carrying platform 301 is only for the convenience of describing the present solution, and does not limit the present solution. That is, in other embodiments, the two groups of support arms may also be arranged on the short sides of the profile frame.

[0076] In a specific embodiment, the two groups of support arm groups are connected by a plurality of reinforcing shafts 310. One end of the reinforcing shaft 310 is connected to the connection between the first support arm 305 and the second support arm 306 in the first group of support arm groups 303, and the other end of the reinforcing shaft 310 is connected to the connection between the first support arm 305 and the second support arm 306 in the second support arm group 304. In addition, the reinforcing shaft 310 is also connected to the connecting end between the connecting rods in the two groups of support arm groups. For example, the first support arm 305 on the first group of support arm groups has two connecting rods connected in sequence, and the connecting ends of the two connecting rods have connecting holes, and one end of the connecting rod passes through the connecting holes on the two connecting rods in sequence to connect to the first support arm 305. Similarly, the other end of the connecting rod is connected to the first support arm 305 on the second group of support arm groups in the same way.

[0077] In a specific embodiment, the two guide wheels 321 close to the bearing platform 301 and the two guide wheels 321 close to the base 302 in the two groups of support arm groups are connected by two connecting shafts 309 respectively, and the driving mechanism drives the connecting shaft 309 to move, thereby driving the guide wheels 321 to move. Specifically, the driving mechanism is a driving rod 311, whose outer surface is provided with an external thread, and the connecting shaft 309 is provided with a threaded hole that is arranged in a direction perpendicular to the line connecting the two guide wheels 321, and the driving rod 311 is threadedly connected to the connecting shaft 309 through the threaded hole. In addition, a fixed seat 312 is also fixedly connected to the bearing platform 301 or the base 302, and one end of the driving rod 311 is inserted into the fixed seat 312 after passing through the connecting shaft 309 and is rotatably connected to the fixed seat 312. When in use, the driving rod rotates, so that the connecting shaft 309 threadedly connected thereto moves back and forth along the long side direction, thereby realizing the lifting and lowering of the mobile lifting module.

[0078] In a specific embodiment, the driving rod 311 includes a driving part and a connecting part connected to each other, and the cross-sectional area of ​​the connecting part is smaller than the cross-sectional area of ​​the driving part. In addition, a limit block 313 is also provided on the connecting part between the driving part and the connecting shaft 309, and the limit block 313 is fixed on the short side.

[0079] In this solution, the connecting shaft 309 connecting the two guide wheels 321 close to the carrying platform 301 is the upper connecting shaft, and the connecting shaft 309 connecting the two guide wheels 321 close to the base 302 is the lower connecting shaft. It can be understood by those skilled in the art that the number and position of the drive rod 311 can be set according to different requirements. For example, the drive rod 311 is only connected to the upper connecting shaft 309, or the drive rod 311 is only connected to the lower connecting shaft 309, or a plurality of drive rods 311 are provided, which are connected to both the upper connecting shaft and the lower connecting shaft.

[0080] Those skilled in the art may also understand that the setting position of the fixing seat 312 will be adjusted according to the setting position of the driving rod 311. For example, when the driving rod 311 is only connected to the upper connecting shaft 309, the fixing seat 312 is fixedly connected to the bearing platform 301. When the driving rod 311 is only connected to the lower connecting shaft 309, the fixing seat 312 is fixedly connected to the base 302. In this solution, since there is a hollow portion in the middle of the profile frame, in order to connect the fixing seat 312 to the profile frame, a support rod 312-1 parallel to the long side may be provided on the hollow portion, and the fixing seat 312 is fixedly connected to the lower surface of the support rod 312-1.

[0081] Next, the specific structure of the limiting groove is described in detail. It can be understood by those skilled in the art that the structures of the first limiting groove 307 and the second limiting groove 308 can be the same or different in different schemes. For example, in one scheme, the first limiting groove 307 and the second limiting groove 308 have the same structure and are symmetrically arranged. In another scheme, the first limiting groove 307 and the second limiting groove 308 have different structures, and they are respectively arranged in two forms.

[0082] In a specific embodiment, the first limiting groove 307 includes a bending portion 318 and two fixed blocks 319 arranged at intervals along the length direction of the bearing platform 301, wherein one fixed block 319 is arranged at the end of the long side, and the other fixed block 319 is arranged at the area between the two ends of the long side of the bearing platform 301. In this solution, the bending portion 318 includes bending portions 318 that are connected to each other and at right angles, and the bending portion 318 includes a first side wall and a second side wall. The upper surfaces of the two fixed blocks 319 are fixedly connected to the lower surface of the bearing platform, the first side wall of the bending portion 318 is fixedly connected to the lower surface of the fixed block 319, and the second side wall is fixedly connected to the surface of the fixed block 319 away from the other group of support arm groups. The guide wheel 321 is arranged on the second side wall, and the two fixing blocks 319 limit the guide wheel 321 in the length direction, the second side wall and the connecting shaft 309 limit the guide wheel 321 in the width direction, and the first side wall and the lower surface of the supporting platform 301 limit the guide wheel 321 in the height direction.

[0083] In this solution, the end of the second support arm is also connected to the connecting shaft. Specifically, the guide wheel 321 and the nut fix the end of the second support arm 306 on the connecting shaft 309.

[0084] In another specific embodiment, the second limiting groove 308 is symmetrically arranged with the first limiting groove 307, and includes two fixing blocks 319 fixedly connected to the upper surface of the base 302, and a limiting plate 320 is installed on the upper surface of the fixing block 319, and one end of the guide wheel 321 in the width direction is connected to the connecting shaft 309, and the other end is connected to the second support arm 306. In this solution, the two fixing blocks 319 limit the guide wheel 321 in the length direction, the connecting shaft 309 and the second support arm 306 limit the guide wheel 321 in the width direction, and the limiting plate 320 and the upper surface of the base 302 limit the guide wheel 321 in the height direction.

[0085] The cover opening structure provided by the present disclosure can be operated adaptively according to different needs of the operator. When the cavity does not need to be opened very wide for operation, it is only necessary to open the cavity through the opening and closing module and then move the cover on the cavity. When the cavity needs to be fully opened for operation, the cover can be moved to the mobile lifting module, thereby providing the operator with a larger operating space and improving the user experience.

[0086] In a second aspect, a method for opening and closing the vacuum chamber 400 using the above-mentioned opening cover structure is also provided.

[0087] When opening the cover, there are mainly three steps, namely:

[0088] Step 1: Adjust the height and position of the mobile lifting module 300;

[0089] Step 2: Use the opening and closing module 100 to open the cavity 401;

[0090] Step three: the opening and closing module 100 and the cover body 402 move onto the movable lifting module 300 , and the movable lifting module 300 drives the two to move away from the cavity 401 .

[0091] Those skilled in the art can understand that, in this solution, the order of step one and step two is not specifically limited.

[0092] In a specific embodiment, when opening the cover, the opening and closing module 100 moves to the assembly position on the sliding module 200, the ratchet wrench is put on the driving section 109-1 of the screw 109, and the ratchet wrench is rotated to adjust the height of the opening and closing module 100, first making the upper support 316 on the opening and closing module 100 abut against the handle 404 on the cover body 402, and then continuing to adjust the height of the opening and closing module 100 so that the cover body 402 moves in a direction away from the cavity 401 driven by the opening and closing module 100 and then opens the cavity 401.

[0093] Move the mobile lifting module 300 to the side wall of the vacuum chamber 400, then adjust the position of the mobile lifting module 300 by the casters 314, and adjust the height of the mobile lifting module 300 by the driving mechanism, so that the sliding module 200 on the cavity 401 and the slide rail 317 on the supporting platform 301 are not only located on the same horizontal plane, but also on the same horizontal line.

[0094] After the opening and closing module 100 opens the cavity 401, the opening and closing module 100 and the cover body 402 move from the sliding module 200 above the cavity 401 to the sliding mechanism of the movable lifting module 300, and then the movable lifting module 300 together with the opening and closing module 100 and the cover body 402 are pushed to an idle position to avoid affecting the operator's operation.

[0095] When the operator finishes the work, the mobile lifting module 300 moves from its idle position to the side wall of the vacuum chamber 400, and then the opening and closing module 100 and the cover body 402 move along the slide rail 317 on the mobile lifting module 300 to the guide rail 201 on the cavity 401 and continue to move to the assembly position and then stop moving, and then adjust the opening and closing module 100 to make the cover body 402 move toward the cavity 401 to close the cavity 401.

[0096] It is worth noting that, in this solution, after the vacuum chamber 400 is closed, the movable lifting module 300 can be moved to an idle position, and then the height of the carrying platform 301 can be lowered by adjusting the support arm, thereby saving occupied space.

[0097] Those skilled in the art can understand that, when there is no need to open the cover, the opening and closing module 100 can also be moved onto the movable lifting module 300, and then moved together with the movable lifting module 300 to an idle position for storage.

[0098] The lid opening method provided by the present disclosure is not only simple to operate, but also can provide a larger operating space for the operator, thereby improving the operator's user experience.

[0099] Although multiple embodiments of the present disclosure have been shown and described herein, it will be apparent to those skilled in the art that such embodiments are provided by way of example only. Those skilled in the art may think of many changes, modifications, and alternatives without departing from the thought and spirit of the present disclosure. It should be understood that in the process of practicing the present disclosure, various alternatives to the embodiments of the present disclosure described herein may be adopted. The attached claims are intended to define the scope of protection of the present disclosure, and therefore cover equivalents or alternatives within the scope of these claims.

Claims

1. A cover opening structure, used to open or close the cavity of a vacuum chamber, characterized in that: The cover opening structure comprises: An opening and closing module drives the cover of the vacuum chamber to move along the height direction of the chamber to open or close the chamber; a sliding module, which is disposed on the cavity and abuts against the opening and closing module, and is used to make the opening and closing module slide along the length direction or the width direction of the cavity; and The movable lifting module is in contact with or has a certain distance from any side wall of the cavity, and is used to receive and drive the opening and closing module and the cover body to move closer to or away from the cavity.

2. The cover opening structure according to claim 1, characterized in that: The mobile lifting module comprises: Carrying platform; Base; At least one set of scissor-shaped support arm groups, which are located between the load-bearing platform and the base, and the support arm group includes a first support wall and a second support arm, wherein the two ends of the first support arm are respectively fixedly connected to the load-bearing platform and the base, and the two ends of the second support arm are respectively slidably connected to the load-bearing platform and the base; and The driving mechanism drives the end of the second supporting arm to slide close to or away from the first supporting arm.

3. The cover opening structure according to claim 2, characterized in that: The lower surface of the carrying platform has a first limiting groove with a certain extension length, and the upper surface of the base has a second limiting groove arranged corresponding to the first limiting groove; Both ends of the second support arm are connected with guide wheels, and the guide wheels are respectively limited in the first limiting groove and the second limiting groove, and the driving mechanism drives the guide wheels to slide in the first limiting groove or the second limiting groove.

4. The cover opening structure according to claim 2 or 3, characterized in that: The carrying platform and the base are both square; The mobile lifting module includes two groups of support arm groups that are symmetrically arranged. Two guide wheels close to the bearing platform and two guide wheels close to the base are respectively connected through two connecting shafts, and the driving mechanism drives the connecting shafts to move.

5. The cover opening structure according to claim 4, characterized in that: The connecting shaft is provided with a threaded hole extending therethrough; The driving mechanism is rotatably connected to the fixing seat after passing through the threaded hole, wherein the driving mechanism is provided with an external thread, and the fixing seat is fixedly connected to the bearing platform or the base.

6. The cover opening structure according to claim 3, characterized in that: The first limiting groove includes two fixing blocks fixedly connected to the lower surface of the carrying platform, and a bending portion with a certain length, wherein the first side wall of the bending portion is fixedly connected to the lower surface of the fixing block, and the second side wall is fixedly connected to the surface of the fixing block away from the other group of support arms; the guide wheel and the nut fix the end of the second support arm to the connecting shaft; and / or The second limiting groove includes two fixing blocks fixedly connected to the upper surface of the base, a limiting plate is installed on the upper surface of the fixing block, and the connecting shaft and the second supporting arm are respectively connected to the two ends of the guide wheel.

7. The cover opening structure according to claim 2 or 3, characterized in that: Two parallel sliding mechanisms are arranged above the carrying platform; The driving mechanism adjusts the movable lifting module to rise or fall so that the sliding mechanism and the sliding module are at the same level.

8. The cover opening structure according to claim 1, characterized in that: The opening and closing module comprises: an upper mounting member abutting against the cover body; A lower mounting member abutting against the sliding module; A hinge assembly, comprising a first hinge assembly and a second hinge assembly; the first hinge assembly comprises an upper hinge and a lower hinge rotatably connected via a first connecting member, the second hinge assembly comprises an upper hinge and a lower hinge rotatably connected via a second connecting member, the upper hinge is rotatably connected to the upper mounting member, and the lower hinge is rotatably connected to the lower mounting member; and The lead screw comprises a driving section, a smooth section and a threaded section which are connected in sequence, wherein the smooth section passes through a first connecting member and is slidably connected thereto, and the threaded section passes through a second connecting member and is threadedly connected thereto, wherein a first thrust bearing is arranged on the smooth section between the driving section and the first connecting member.

9. A method for opening and closing a vacuum chamber using the cover opening structure according to any one of claims 1 to 7, characterized in that: include: In the assembly position, the cover body is driven by the opening and closing module to move along the height direction of the cavity to open or close the cavity; Before or after the cover opens or closes the cavity, the cover and the opening and closing module are driven by the sliding module to slide toward or away from the assembly position, and The cover body and the opening and closing module are moved from the sliding module to the movable lifting module and move away from the cavity; or the movable lifting module moves toward the cavity, and the cover body and the opening and closing module are moved from the movable lifting module to the sliding module.

10. The method according to claim 9, characterized in that Before the cover body and the opening and closing module are switched back and forth on the cavity and the movable lifting module, the guide wheel is moved in the first limiting groove and the second limiting groove by rotating the connecting shaft, so that the sliding mechanism on the movable lifting module is at the same level as the sliding module.

Images