Amorphous alloy material and preparation method and application thereof

Abstract

The invention provides an amorphous alloy material and a preparation method and application thereof. Specifically, the invention relates to an amorphous alloy material, the amorphous alloy material comprises Ti, Zr, Be, Ni and Cu, and the atomic ratio of Ti to Zr to Be to Ni to Cu is (36-41): (22-25): (22-26): (7-8): (2-12). The invention further provides a method for preparing the amorphous alloy material. The invention further provides application of the amorphous alloy material in a tension and pressure sensor. Compared with a traditional material, the amorphous alloy not only has a unique isotropic structure, but also has remarkably improved yield strength and reduced Young modulus, so that synchronous optimization of the measuring range and the sensitivity is achieved.

Description

Technical Field

[0001] The present invention belongs to the field of materials and sensors. Specifically, the present invention relates to an amorphous alloy material and a preparation method and application thereof. Background Art

[0002] A tension and pressure sensor is a test device used to measure tension and pressure. Its core lies in its ability to convert physical force values ​​into quantifiable electrical signals. Tension and pressure sensors are widely used in many fields such as industrial automation, medical equipment, and building structure monitoring. In particular, in the precision control of the ball screw drive system of a humanoid robot, higher requirements are placed on the miniaturization and rapid response of tension and pressure sensors. The core components of tension and pressure sensors mainly include three parts: an elastomer, a resistance strain gauge, and a measurement circuit. When an external force acts on the elastomer, the elastomer will deform, and the resistance strain gauge attached to it will synchronize linear strain, thereby causing a dynamic change in the resistance of the strain gauge. The electrical signal is amplified by the unbalanced Wheatstone bridge, thereby achieving accurate measurement of tension and pressure.

[0003] Traditional tension and pressure sensors usually use alloy materials such as 17-4PH stainless steel, 7075-T6 aluminum alloy, 40Cr stainless steel or titanium alloy. The specific selection depends on the application scenario of the sensor. For example, in applications with a large range of measurement such as industrial manufacturing, high-strength stainless steel is used as the elastomer material to ensure the accuracy and fatigue life of the sensor; for example, in precision measurement scenarios such as medical equipment, 7075-T6 aluminum alloy with low Young's modulus is used as the elastomer material to ensure the high sensitivity of the sensor. However, the inherent crystal structure of these materials gives them anisotropic properties, that is, the periodicity and directionality of the lattice cause the crystal to exhibit different mechanical properties in different directions, including but not limited to Young's modulus, hardness and fracture toughness. This intrinsic property causes large deviations in the measurement accuracy of force sensors in both tension and compression, becoming a key bottleneck limiting the improvement of sensor performance.

[0004] Therefore, there is an urgent need for new materials for tensile pressure sensors, which not only have a unique isotropic structure, but also have significantly improved yield strength and reduced Young's modulus, so as to achieve simultaneous optimization of range and sensitivity. Summary of the invention

[0005] The object of the present invention is to provide an amorphous alloy material having isotropy and excellent mechanical properties.

[0006] Another object of the present invention is to provide a method for preparing the amorphous alloy material of the present invention.

[0007] Another object of the present invention is to provide an elastomer and a tension and pressure sensor, which utilizes the isotropy and excellent mechanical properties of amorphous alloys to achieve performance improvements in both tension and compression of the sensor. In addition, the elastomer of the present invention has a simple structure, which simplifies the manufacturing process. Since amorphous alloys have a low Young's modulus, a high elastic limit, and a low density, the tension and pressure sensor can be miniaturized at rated range and rated sensitivity, which can reach 50% of the prior art. Compared with other tension and pressure sensors of the same specifications, the tension and pressure sensor of the present invention has higher measurement accuracy, higher sensitivity, a wider range, and faster response speed.

[0008] The above-mentioned object of the present invention is achieved through the following technical solutions.

[0009] In the context of the present invention, the term "amorphous alloy" means that due to ultra-rapid solidification, the atoms in the alloy do not have time to arrange and crystallize in an orderly manner when solidifying, so the solid alloy obtained has a long-range disordered structure, the molecules (or atoms, ions) that make up the substance do not have regular periodicity in space, and there are no grains or grain boundaries of crystalline alloys.

[0010] In a first aspect, the present invention provides an amorphous alloy material, wherein the amorphous alloy material comprises Ti, Zr, Be, Ni and Cu, and the atomic ratio of Ti, Zr, Be, Ni and Cu is:

[0011] Ti:Zr:Be:Ni:Cu=(36~41):(22~25):(22~26):(7~8):(2~12).

[0012] The inventors of the present application unexpectedly discovered that when amorphous alloys (also known as metallic glass) are used in tensile pressure sensors, the yield strength of the tensile pressure sensors can be significantly improved, while reducing Young's modulus and improving sensitivity. Without wishing to be bound by theory, this may be because amorphous alloy materials have a unique disordered structure, and amorphous alloys can simultaneously have excellent properties such as low elastic modulus, high yield strength, high elastic limit, low thermal expansion coefficient and corrosion resistance; in addition, since amorphous alloys do not have crystal defects such as crystal planes and dislocations, their microstructure is isotropic, and the material behaves the same no matter from which direction the force is applied or the properties are observed.

[0013] The inventors of the present application further unexpectedly discovered that when the amorphous alloy material having the composition of the present invention is used in a tension pressure sensor, the yield strength of the tension pressure sensor can be more significantly improved, while the Young's modulus can be more significantly reduced and the sensitivity can be improved.

[0014] In the present invention, the proportion of each element has a significant impact on the performance of the final amorphous alloy material. If the Ti content is too high, the alloy processing performance will deteriorate, which is specifically manifested as a decrease in room temperature plasticity, and the material is more susceptible to brittle fracture during machining. In addition, too high a Ti content will also lead to poor fluidity of the alloy melt, different cooling rates at different locations of the alloy during the casting process, uneven mass distribution, and eventually crystallization or defects such as shrinkage and shrinkage cavities will occur, which will reduce the sensitivity of the prepared tension and pressure sensor. On the contrary, if the Ti content is too low, the glass forming ability and yield strength of the material will be reduced, which may not only cause the cast-formed material to crystallize, but also limit the sensor range and volume prepared therefrom.

[0015] Preferably, in the amorphous alloy material of the present invention, the amorphous alloy material comprises, by atomic percentage:

[0016] Ti 36%~41%, Zr 22%~25%, Be 22%~26%, Ni 7%~8%, Cu 2%~12%; and the sum of the atomic percentages of each component is equal to 100%.

[0017] Preferably, in the amorphous alloy material described in the present invention, the amorphous alloy material has the following chemical formula:

[0018] Ti 38.13 Zr 23.25 Be 24.18 Ni 7.44 Cu7、Ti 37.72 Zr 23 Be 23.92 Ni 7.36 Cu8、Ti 38.54 Zr 23.5 Be 24.44 Ni 7.52 Cu6、Ti 36.9 Zr 22.5 Be 23.4 Cu 10 Ni 7.2 or Ti 40.18 Zr 24.5 Be 25.48 Ni 7.84 Cu2.

[0019] In a second aspect, the present invention provides a method for preparing the amorphous alloy material of the present invention, comprising the following steps:

[0020] (1) mixing the elements of the amorphous alloy material according to a weight ratio to obtain an alloy raw material; and then melting the alloy raw material under vacuum conditions;

[0021] (2) Filling the molten alloy raw material into the die casting mold and applying pressure to shrink the pores;

[0022] (3) Rapidly cooling the pressurized alloy raw material so that the alloy raw material is completely solidified to produce an amorphous alloy material.

[0023] In a specific embodiment of the present invention, the amorphous alloy is prepared by die casting, wherein the process of preparing the amorphous alloy elastomer by die casting is as follows:

[0024] (1) Melting the alloy raw materials under high vacuum conditions in an induction furnace or an electric arc furnace to minimize gas and oxide impurities in the alloy;

[0025] (2) The molten alloy is rapidly injected into a preheated mold under high pressure (usually several hundred to several thousand MPa). After the alloy is filled, a pressure of 200-300 MPa is maintained for 4-8 minutes to ensure the density of the alloy and reduce shrinkage porosity.

[0026] (3) The mold usually has good thermal conductivity and is quickly cooled by circulating water (thousands to millions of degrees per second). When the alloy is completely solidified, the amorphous alloy rod is removed from the mold through the mold opening and closing mechanism.

[0027] (4) Processing the amorphous alloy rods prepared by die casting into the designed structure and size.

[0028] In a third aspect, the present invention provides use of the amorphous alloy material of the present invention in a tension and pressure sensor.

[0029] In a fourth aspect, the present invention provides an elastomer, which is composed of the amorphous alloy material of the present invention.

[0030] In a fifth aspect, the present invention provides a tension pressure sensor, which includes the elastomer of the present invention.

[0031] In a specific embodiment of the present invention, the tension and pressure sensor of the present invention comprises: an amorphous alloy elastomer, a resistance strain gauge, and a measurement circuit, wherein the measurement circuit comprises a Wheatstone bridge processing module, a display instrument, and a signal line.

[0032] The tension and pressure sensor of the present invention is prepared by the following steps: according to the use range, sensitivity requirements, use temperature, etc. of the sensor, an amorphous alloy with good forming ability, high yield strength, low Young's modulus, and low thermal expansion coefficient is selected, and according to its performance parameters such as modulus, density, Poisson's ratio and the design specification of the sensor, the requirements such as the structure, size, and thickness of the strain gauge bonding beam are determined in combination with finite element analysis, and the amorphous alloy sheet prepared by die casting is processed to obtain an elastomer. Two half-bridge resistance strain gauges are respectively pasted on the upper and lower beam patch areas of the elastomer, and the resistance strain gauge-Wheatstone bridge processing module-display instrument are successively connected through signal lines. The two ends of the elastomer are connected to the device to be tested by threads. When the sensor receives tension and pressure loading, the resistance value change generated by the resistance strain gauge is amplified and compensated by the Wheatstone bridge, converted into a quantifiable analog signal and output to the display instrument, and finally converted into a standard digital signal according to the communication type and read from the display instrument. Through calibration test, the static performance of the sensor in terms of sensitivity, linearity, repeatability, hysteresis, zero output, overload range, and creep characteristics in full scale of tension and pressure can be obtained. Through high-frequency servo motor, the tension and pressure sensor is loaded at 10Hz frequency and full scale, and the full scale output signal of the display instrument is recorded. If the repeatability is below 0.5%FS, the sensor has good response.

[0033] In the present invention, the linearity of the sensor has a required range, preferably, the linearity is 0.01% FS~0.5% FS, more preferably, 0.01% FS~0.3% FS.

[0034] In the present invention, the repeatability of the sensor has a required range, preferably, the repeatability is 0.01% FS~0.5% FS, more preferably, 0.01% FS~0.3% FS.

[0035] In the present invention, the hysteresis of the sensor has a required range, preferably, the hysteresis is 0.01% FS~0.5% FS, more preferably, 0.01% FS~0.3% FS.

[0036] In the present invention, the zero-point output of the sensor has a required range, preferably, the range is 0.01% FS~0.1% FS.

[0037] In the present invention, the overload range of the sensor has a required range, preferably, the range is 200% FS~300% FS.

[0038] In the present invention, the creep characteristic of the sensor has a required range. Preferably, the creep characteristic is defined as the output signal fluctuation range of the sensor being 0.01% FS to 1.0% FS after being loaded at full scale and maintained for 30 minutes.

[0039] The present invention has the following beneficial effects:

[0040] 1. The tension and pressure sensor of the present invention uses amorphous alloy as the material for preparing the elastomer. Compared with traditional materials, amorphous alloy significantly improves the yield strength (the increase is expected to be more than 1.8 times), while reducing the Young's modulus (can be reduced by at least 49%), and has a lighter weight. These improvements enable the prepared tension and pressure sensor to maintain high strength while increasing the response speed and sensitivity by more than 3 times, and reducing the total volume by half, successfully achieving the dual optimization of compact structure and enhanced performance.

[0041] 2. The amorphous alloy elastomer of the present invention has an isotropic microstructure, consistent mechanical behavior in all directions, and no defects such as crystal planes and dislocations. The force sensor of the present invention has a small deviation in bidirectional measurement accuracy, which for the first time solves the key bottleneck of slow multi-directional measurement response frequency and large accuracy deviation of the sensor without compensation. At the same time, the alloy system is diverse and has a wide range of components, which can meet the requirements of sensors for elastomer materials in different usage scenarios.

[0042] 3. The tension and pressure sensor of the present invention successfully solves the problem of the difficulty in reconciling the sensitivity and stiffness of the force sensor by optimizing the technical solution of the elastomeric material. There is no need to design a complicated structure for the existing sensor, but the excellent mechanical properties and unique microstructure of the amorphous alloy are utilized to make the sensor more accurate in the multi-range mode. BRIEF DESCRIPTION OF THE DRAWINGS

[0043] The embodiments of the present invention are described in detail below with reference to the accompanying drawings, wherein:

[0044] Figure 1 A schematic diagram showing the structure of an amorphous alloy elastic body of a tension and pressure sensor according to a specific embodiment of the present invention;

[0045] Figure 2 A schematic diagram showing the appearance of a tension and pressure detection device according to a specific embodiment of the present invention;

[0046] Figure 3 The XRD patterns of Examples 1 to 5 of the present invention are shown, and the diffuse bun peaks thereof confirm the amorphous structure of the material;

[0047] Figure 4 The XRD patterns of Comparative Examples 2 to 4 are shown, and the scattered diffraction peaks thereof indicate the presence of crystallization in the structure of the material.

[0048] Description of reference numerals:

[0049] 1. Connection end; 2. Stress beam; 3. Resistance strain gauge; 4. Beam patch area; 5. Housing; 6. Measurement circuit. DETAILED DESCRIPTION

[0050] The present invention is further described in detail below in conjunction with specific embodiments. The given examples are only for illustrating the present invention, but not for limiting the scope of the present invention.

[0051] Figure 1 The schematic diagram of the structure of the amorphous alloy elastomer of a specific embodiment of the present invention is shown. As shown in the figure, the structure of the elastomer is S-shaped, which is mainly determined by the parameters such as the structural dimensions of the connection end 1, the stress beam 2, the resistance strain gauge 3, and the crossbeam patch area 4. Among them, the connection end 1 is usually a threaded structure to ensure the connection strength between the detection device and the workpiece to be measured; the thickness and material of the stress beam 2 determine the sensitivity of the sensor. Under the same material, the thinner the stress beam, the easier it is to deform, and the greater the sensitivity; the resistance strain gauge 3 is usually arranged on the upper and lower crossbeam patch areas 4 of the elastomer, where the strain is large and uniform, and a stable signal can be obtained; the structural dimensions of the crossbeam patch area 4 are determined according to the use scenario of the sensor, the structure of the elastomer, the size and type of the resistance strain gauge, and the force distribution of the elastomer, combined with finite element simulation. The elastomer of the present invention is selected from amorphous alloys, which have excellent elastic limit, high yield strength, low elastic modulus, vibration resistance, corrosion resistance and other properties, and can greatly improve the sensitivity of the sensor without losing the stiffness of the elastomer.

[0052] Figure 2 The structural schematic diagram of a micro tension and pressure testing device of a specific implementation scheme of the present invention is shown. As shown in the figure, the preparation process of the present invention includes the following steps: according to the use range of the sensor, the full-scale sensitivity requirements, the use temperature, etc., the specific composition of the amorphous alloy shown in the present invention is selected, and the material of the present invention has a high yield strength, a low Young's modulus, and a low thermal expansion coefficient. According to the performance parameters such as the modulus, density, Poisson's ratio of the material and the design specifications of the sensor, the structure, size, thickness of the stress beam 2 and other requirements of the elastomer are determined in combination with finite element analysis, and the amorphous alloy tension and pressure sensor elastomer is obtained after processing. Two sets of resistance strain gauges 3 are respectively pasted to the preset crossbeam patch areas 4 of the upper and lower stress beams, and the internal electronic components of the sensor are encapsulated with a housing 5 to prevent corrosion and damage. The structural schematic diagram of the amorphous alloy elastomer is shown in FIG. Figure 1 As shown. The workpiece to be tested is fixed to the connection end 1 of the detection device through a threaded connection. When the detection device is working, the resistance value of the resistance strain gauge 3 changes linearly with the stress, and is converted into a standard signal through a series of processing such as filtering, amplification, conditioning, and compensation by the measurement circuit 6, and finally output to an external display instrument. The measurement circuit includes a Wheatstone bridge processing module, a display instrument, and a signal line.

[0053] Example 1

[0054] This embodiment shows a tension and pressure sensor elastomer made of an amorphous alloy, wherein the amorphous alloy material is composed of the following elements in atomic percentages: Ti 36.9%, Zr 22.5%, Be 23.4%, Cu 10% and Ni 7.2%.

[0055] Figure 1 The structure of the amorphous alloy elastomer of this embodiment is shown. The preparation method of the elastomer is as follows: a specific component with high yield strength and low Young's modulus in the amorphous alloy system is selected: Ti 36.9 Zr 22.5 Be 23.4 Cu 10 Ni 7.2 Amorphous alloy. (1) Prepare high-purity raw materials according to the weight ratio of each element of the alloy, clean the raw materials and put them into a high vacuum induction furnace. (2) Use a mechanical pump and a molecular pump to pump the vacuum degree in the cavity to 10 -3 Pa, minimizing gas and oxide impurities in the alloy. (3) The alloy raw materials are repeatedly melted under high vacuum conditions in an induction furnace, the oscillation frequency can be between 2 kHz and 10 kHz, and the maximum input current is about 90 A. (4) The molten alloy is rapidly injected into the preheated mold under a high pressure of 300 MPa. After the alloy is filled, the pressure of 200 MPa is maintained for 5 minutes to ensure the density of the alloy and reduce shrinkage porosity. (5) The mold usually has good thermal conductivity and is rapidly cooled by circulating water (8000K / s). When the alloy is completely solidified, the amorphous alloy sheet is removed from the mold by the mold opening and closing mechanism. (6) The amorphous alloy sheet prepared by die casting is processed into the structure and size of the elastomer.

[0056] Ti of this embodiment 36.9 Zr 22.5 Be 23.4 Cu 10 Ni 7.2 The yield strength of amorphous alloy is 2100 MPa and Young's modulus is 108 GPa. The connection end 1 is threaded, which has the advantages of simple structure, convenient assembly and disassembly, strong reliability, and can ensure the stable and reliable connection between the sensor and the transmission parts during operation. The resistance strain gauge 3 selects two half-bridge resistors and places them in the upper and lower beam patch areas of the elastic body, one of which is used as a working strain gauge and the other as a compensation strain gauge, and a Wheatstone bridge circuit structure is constructed through the signal line.

[0057] By applying linear tension and pressure to the amorphous alloy elastomer through standard calibration equipment, the sensitivity of the elastic axis can be obtained.

[0058] Example 2

[0059] This embodiment shows a tension and pressure sensor elastomer made of an amorphous alloy, wherein the amorphous alloy material is composed of the following elements in atomic percentages: Ti 40.18%, Zr 24.5%, Be 25.48%, Ni 7.84% and Cu 2%.

[0060] The structure and preparation method of the rotating shaft in this embodiment refer to those in Embodiment 1.

[0061] Example 3

[0062] This embodiment shows a tension and pressure sensor elastomer made of an amorphous alloy, wherein the amorphous alloy material is composed of the following elements in atomic percentages: Ti 38.13%, Zr 23.25%, Be 24.18%, Ni 7.44% and Cu 7%.

[0063] The structure and preparation method of the rotating shaft in this embodiment refer to those in Embodiment 1.

[0064] Example 4

[0065] This embodiment shows a tension and pressure sensor elastomer made of an amorphous alloy, wherein the amorphous alloy material is composed of the following elements in atomic percentages: Ti 37.72%, Zr 23%, Be 23.92%, Ni 7.36% and Cu 8%.

[0066] The structure and preparation method of the rotating shaft in this embodiment refer to those in Embodiment 1.

[0067] Example 5

[0068] This embodiment shows a tension and pressure sensor elastomer made of an amorphous alloy, wherein the amorphous alloy material is composed of the following elements in atomic percentages: Ti 38.54%, Zr 23.5%, Be 24.44%, Ni 7.52% and Cu 6%.

[0069] The structure and preparation method of the rotating shaft in this embodiment refer to those in Embodiment 1.

[0070] Comparative Example 1

[0071] The raw material for the preparation of this comparative example is 17-4PH stainless steel, and its preparation process is as follows: (1) The alloy is melted by vacuum induction melting, and the chemical composition is adjusted by adding alloying elements (such as chromium, nickel, copper, niobium, etc.) to ensure that the standard requirements of 17-4PH are met. (2) The molten steel is cooled and solidified to form an ingot or billet. (3) The ingot or billet is hot rolled or forged to form a plate of the required shape and size. (4) The material is heated to 950℃~1050℃ (solution treatment), and then rapidly cooled (air cooling or oil cooling) to dissolve carbides and improve the hardness and toughness of the material. (4) The plate after solution treatment is heated to 480℃~550℃ (aging treatment) and maintained for more than 4 hours to promote the formation of precipitation phase and further improve the strength of the material. (5) The stainless steel plate is processed by turning, milling, drilling, etc. to finally achieve the structure and size of the elastomer.

[0072] Comparative Example 2

[0073] This comparative example shows a tension and pressure sensor elastomer made of an amorphous alloy, wherein the amorphous alloy material is composed of the following elements in atomic proportions: Ti 30%, Zr 30%, Be 18%, Ni 15%, and Al 7%.

[0074] The structure and preparation method of the rotating shaft in this comparative example refer to those in Example 1.

[0075] Ti of this comparative example 30 Zr 30 Be 18 Ni 15 The yield strength of Al7 amorphous alloy is 1500 MPa and Young's modulus is 160 GPa. Its microstructure is crystallized, its forming ability is limited, and there may be defects such as crystal planes and phase changes. By applying linear tension and pressure to the amorphous alloy elastomer through standard calibration equipment, the sensitivity of the elastic axis can be obtained. See Table 1.

[0076] Comparative Example 3

[0077] This comparative example shows a tension and pressure sensor elastomer made of an amorphous alloy, wherein the amorphous alloy material is composed of the following elements in atomic percentages: Ti 27%, Zr 25%, Be 14%, Ni 14%, and Al 20%.

[0078] The structure and preparation method of the rotating shaft in this comparative example refer to those in Example 1.

[0079] Ti of this comparative example 27 Zr 25 Be 14 Ni 14 Al 20The yield strength of amorphous alloy is 1200 MPa and Young's modulus is 140 GPa. Its microstructure is crystallized, its forming ability is limited, and there may be defects such as crystal planes and phase changes. By applying linear tension and pressure to the amorphous alloy elastomer through standard calibration equipment, the sensitivity of the elastic axis can be obtained. See Table 1.

[0080] Comparative Example 4

[0081] This comparative example shows a tension and pressure sensor elastomer made of an amorphous alloy, wherein the amorphous alloy material is composed of the following elements in atomic proportions: Ti 46%, Zr 29%, Be 8%, Ni 8%, and Al 9%.

[0082] The structure and preparation method of the rotating shaft in this comparative example refer to those in Example 1.

[0083] Ti of this comparative example 46 Zr 29 The yield strength of Be8Ni8Al9 amorphous alloy is 2000 MPa and Young's modulus is 200 GPa. During the manufacturing process of the alloy, due to the different cooling rates and uneven mass distribution of the melt, crystallization eventually occurs, and defects such as shrinkage and shrinkage cavities may exist. By applying linear tension and pressure to the alloy elastomer through standard calibration equipment, the sensitivity of the elastic axis can be obtained. As shown in Table 1, although the yield strength of the comparative example is as high as 2000 MPa, the sensitivity of the tension and pressure sensor prepared by it is lower than the predicted value (1.0 mV / V), which may be due to defects such as pores inside the material.

[0084] Table 1 shows the material properties and sensitivity properties of the tension and pressure sensor elastomers prepared in Examples 1 to 5 of the present invention and Comparative Examples 1 to 4.

[0085] Material Yield strength (MPa) Young's modulus (GPa) Sensitivity (mV / V) <![CDATA[Ti 36.9 Zr 22.5 Be 23.4 Cu 10 Ni 7.2 (Example 1)]]> 2100 108 3.05 <![CDATA[Ti 40.18 Zr 24.5 Be 25.48 Ni 7.84 Cu2 (Example 2)]]> 2150 105 3.005 <![CDATA[Ti 38.13 Zr 23.25 Be 24.18 Ni 7.44 Cu7 (Example 3)]]> 2100 100 3.156 <![CDATA[Ti 37.72 Zr 23 Be 23.92 Ni 7.36 Cu8 (Example 4)]]> 2100 98.7 3.197 <![CDATA[Ti 38.54 Zr 23.5 Be 24.44 Ni 7.52 Cu6 (Example 5)]]> 2150 100 3.156 17-4PH stainless steel (Comparative Example 1) 1200 200 1.0 <![CDATA[Ti 30 Zr 30 Be 18 Ni 15 Al7 (Comparative Example 2)]]> 1500 160 1.07 <![CDATA[Ti 27 Zr 25 Be 14 Ni 14 Al 20 (Comparative Example 3)]]> 1200 140 1.25 <![CDATA[Ti 46 Zr 29 Be8Ni8Al9 (Comparative Example 4)]]> 2000 200 0.87

[0086] In summary, the present invention adopts a new isotropic material, amorphous alloy, to design and prepare a micro, tension-compression bidirectional force sensor elastomer. Because it has both high yield strength and low Young's modulus, it can effectively solve the contradiction between the range and sensitivity of the sensor: the yield strength of the amorphous alloy of the present invention is up to 1.8 times that of 17-4PH stainless steel, so the range of the tension and pressure sensor prepared by it can be increased by at least 1.8 times; at the same time, its Young's modulus is only 49% of that of 17-4PH stainless steel at the lowest, and the sensitivity can be increased by at least 3 times. At the same time, the amorphous alloy elastomer can be integrally formed by die casting, and no subsequent heat treatment is required to improve the material performance. The core of improving the material performance lies mainly in the composition design and the conditioning of the microstructure, which is conducive to the automated mass production of sensors. Finally, the amorphous alloy elastomer of the present invention is isotropic, which can effectively solve the measurement accuracy deviation of the force sensor in tension and compression.

[0087] Example 6

[0088] This example uses Ti of Example 1 36.9 Zr 22.5 Be 23.4 Cu 10 Ni 7.2 The micro tension and pressure testing device of the present invention is prepared by using an amorphous alloy elastomer.

[0089] Figure 2 The schematic diagram of the structure of the amorphous alloy micro tension and pressure sensor of this embodiment is shown. The elastic body of this embodiment has an outer size of 13*13*5 mm 3 .

[0090] Through standard calibration equipment, the sensor is subjected to a tensile force of 20 N in a fixed step length until it reaches the full scale, and then the tensile force is unloaded at the same step length. The above steps are repeated three times, and the output signal of the sensor under each load is recorded. In addition, pressure is applied to the sensor in the same steps to evaluate the measurement accuracy of the sensor in both tension and compression. According to calculations, the sensitivity of the sensor is 4.92 mV / V, the linearity is less than 0.08% FS, the repeatability is less than 0.03% FS, and the hysteresis is less than 0.09% FS under an excitation voltage of 15 V, tension and compression, and a full-scale load of 200 N.

[0091] According to the performance of the calibration measurement above, the tension and pressure sensor of this example can reach 4.92mV / V at a range of ±200 N, while the commercial tension and pressure sensors with the same specifications on the market can only reach a maximum range of 80 N·m, a sensitivity of 1.5 mV / V, a linearity of 0.1% FS, a repeatability of 0.15% FS, and a hysteresis of 0.2% FS. It is worth noting that in order to achieve a range of 200 N·m and a sensitivity of 4.9 mV / V, the existing technology needs to rely on a minimum of 130*130*20 mm 3 In contrast, the sensor in this example not only breaks through the limitations of range and sensitivity, but also achieves miniaturization of the device, providing an optimized solution that combines high load capacity, high measurement sensitivity and compact size.

[0092] At the same time, the tension and pressure sensor of this embodiment was calibrated and tested in the range of 0 to 1 N·m with a fixed step size of 0.1 N, achieving an accuracy of 0.1% FS. Therefore, the resolution of the tension and pressure sensor of this embodiment can reach 0.1 N.

[0093] In addition, the tension pressure sensor is loaded at a frequency of 10 Hz and a range of ±200 N through a high-frequency servo motor, and the full-scale output signal fluctuation of the display instrument is recorded. Since the signal fluctuation is below 0.5% FS, the sensor can be used at a frequency of 10 times / second, and the tension pressure sensor has a high response frequency.

Claims

1. An amorphous alloy material, wherein: The amorphous alloy material comprises Ti, Zr, Be, Ni and Cu, and the atomic ratio of Ti, Zr, Be, Ni and Cu is: Ti:Zr:Be:Ni:Cu=(36~41):(22~25):(22~26):(7~8):(2~12).

2. The amorphous alloy material according to claim 1, wherein: The amorphous alloy material comprises, by atomic percentage: Ti 36%~41%, Zr 22%~25%, Be 22%~26%, Ni 7%~8%, Cu 2%~12%; and the sum of the atomic percentages of each component is equal to 100%.

3. The amorphous alloy material according to claim 1, wherein: The amorphous alloy material has the following chemical formula: Ti 38.13 Zr 23.25 Be 24.18 Ni 7.44 Cu7, Ti 37.72 Zr 23 Be 23.92 Ni 7.36 Cu8, Ti 38.54 Zr 23.5 Be 24.44 Ni 7.52 Cu6, Ti 36.9 Zr 22.5 Be 23.4 Cu 10 Ni 7.2 or Ti 40.18 Zr 24.5 Be 25.48 Ni 7.84 Cu2.

4. A method for preparing the amorphous alloy material according to any one of claims 1 to 3, comprising the following steps: (1) mixing the elements of the amorphous alloy material according to a weight ratio to obtain an alloy raw material; and then melting the alloy raw material under vacuum conditions; (2) Filling the molten alloy raw material into the die casting mold and applying pressure to shrink the pores; (3) Rapidly cooling the pressurized alloy raw material so that the alloy raw material is completely solidified to produce an amorphous alloy material.

5. Use of the amorphous alloy material according to any one of claims 1 to 3 in a tension and pressure sensor. 6 . An elastomer, comprising the amorphous alloy material according to claim 1 .

7. A tension and pressure sensor, comprising the elastic body according to claim 6.

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