Adjustable partition coating device

Abstract

The invention relates to the technical field of optical coating, in particular to an adjustable partition coating device which comprises an encircling base, a hollow frame and a lightweight frame. Wherein the reflecting mirror to be coated is arranged in the encircling base, the hollow frame is arranged on the outer side of the encircling base, and the hollow frame and the encircling base are jointly fixed on a rotating disc of an external coating machine; the lightweight frame is arranged above the hollow frame and is fixedly connected with the hollow frame; the lightweight frame adjusts a gap between the hollow frame and the reflector to be coated through no less than four adjustable jackscrews. According to the device provided by the invention, a partition coating function can be realized, a micron-dimension gap between the hollow shielding cover and the mirror surface of the to-be-coated reflecting mirror is adjusted through the jackscrew according to the mirror surface contour of the to-be-coated reflecting mirror, a coating shadow effect eliminating function is realized, the applicability of the device is improved, and the processing precision and cost are reduced.

Description

Technical Field

[0001] The invention belongs to the technical field of optical coating, and in particular relates to an adjustable partition coating device. Background Art

[0002] Space weather is the result of the combined effects of solar activity, the Earth's magnetic field, and the Earth's position in the solar system. The solar prominences, flares, and coronal mass ejections threaten the Earth's space environment and seriously affect human survival, production, and scientific research. The observation of extreme ultraviolet spectra (EUV) excited by different elements reflects the activity of different regions of the Sun. Therefore, multi-spectral EUV imaging detection of the Sun is extremely meaningful for space physics. It not only provides multi-perspective data that can be used to study the laws of solar activity, but also predict space weather. Space telescopes require lightweight and high integration. A set of optical systems can be used to achieve comprehensive observations of multiple spectrums of the Sun. Among them, the partition coating technology of extreme ultraviolet reflectors is a key technology. High-quality partition coating devices are the guarantee devices for manufacturing reflectors with low stress, high surface accuracy, no shadow effect on the thin film, and no stray light crosstalk in the channel.

[0003] Due to the short working wavelength and high surface accuracy of EUV-band space reflectors, the partition coating technology is difficult, and the stress relief coating technology and high-precision partition coating technology have long been blocked by foreign technology. The Atmospheric Imaging Assembly (AIA) payload of the US Solar Dynamics Observatory (SDO) and the Solar Extreme Ultraviolet Imager (SUVI) of the US Geostationary Environmental Observatory Satellite (GOES-R) both use the partition coating technology.

[0004] The Chinese patent publication number is CN219059095U, and the publication date is May 23, 2023. The utility model patent named "A coating partition lens coating tool" discloses the use of a traditional coating device that directly presses the mirror surface for shielding coating, which is also the coating device generally used in my country. Because of the rigid connection of this device, there is pressure on the mirror surface, and there is stress in the coating, which causes irreversible changes in the shape of the prepared reflector surface, and the imaging quality and resolution are reduced. Moreover, due to the gap between the shielding area and the mirror surface, there is overlap and shadow effect of different film boundaries in each quadrant, which causes stray light crosstalk in different bands. Therefore, it is necessary to design a device that can eliminate the stress of coating installation and does not affect the shape of the reflector surface. The gap between the edge of the shielding tool and the mirror surface can be adjusted according to the contour of the reflector mirror surface to eliminate the coating shadow effect and film construction problems, and eliminate channel crosstalk. A partitioned coating device that is convenient for installing and adjusting the coating. Summary of the invention

[0005] In view of this, the present invention aims to provide an adjustable partitioned coating device, which can accurately adjust the gap between the hollow frame that serves as a shield and the reflector to be coated according to the mirror profile of the reflector to be coated, thereby achieving the function of eliminating the coating shadow effect.

[0006] To achieve the above object, the technical solution created by the present invention is implemented as follows: An adjustable partitioned coating device is used for coating a reflective mirror to be coated, and is characterized in that it includes an embracing base, a hollow frame and a lightweight frame; wherein the reflective mirror to be coated is placed in the embracing base; the hollow frame is located on the outside of the embracing base and is fixed together with the embracing base on a rotating disk of an external coating machine; the lightweight frame is placed above the hollow frame and is fixedly connected to the hollow frame; the lightweight frame adjusts the gap between the hollow frame and the reflective mirror to be coated by means of no less than 4 adjustable top screws.

[0007] Furthermore, the embracing base includes a base and an embracing module; wherein the embracing module embraces the reflector to be coated and is placed inside the base together with the reflector to be coated.

[0008] Furthermore, at least one top screw hole is evenly arranged on the side wall of the base along the circumference of the base, and a metal top screw passes through the top screw hole to contact the embracing module. The embracing module is pushed by rotating the metal top screw, so that the embracing module is in close contact with the reflector to be coated and the reflector to be coated is fixed in the base.

[0009] Furthermore, the surrounding module is a polytetrafluoroethylene ring.

[0010] Furthermore, the hollow frame includes a main frame and a hollow shielding cover; wherein the main frame is placed on the outside of the base and is positioned and connected to the base through positioning pins, and the hollow shielding cover is connected above the main frame and covers the reflector to be coated.

[0011] Furthermore, at least three mounting platforms are provided at the bottom of the main frame along the circumference of the main frame, and all the mounting platforms are connected to the rotating disk by screws.

[0012] Furthermore, the hollow shielding cover is made of polyimide, and a coating area of ​​no less than 3 quadrants is reserved on the hollow shielding cover, so that an external coating machine can coat the reflective mirror to be coated through the coating area.

[0013] Furthermore, the lightweight frame is connected to the main frame through screws on the side walls of the lightweight frame and covered with a hollow shielding cover.

[0014] Furthermore, a cross frame is provided on the lightweight frame, and all adjustable top screws are evenly distributed on the cross frame in a V shape. By rotating all the adjustable top screws to squeeze the hollow shielding cover, the distance between the hollow shielding cover and the reflector to be coated is adjusted.

[0015] Furthermore, a transparent protective cover covering the lightweight frame is arranged above the lightweight frame, and an adjustment hole corresponding to the adjustable top screw is arranged on the transparent protective cover.

[0016] Compared with the prior art, the invention can achieve the following beneficial effects: (1) The adjustable zoned coating device created by the present invention can realize the preparation of films with different central wavelengths and bandwidths on different zones of the reflector to be coated, making it not only suitable for industries with zoned coating requirements, but also particularly suitable for the coating of space reflectors in aerospace industries with extremely high requirements on regional position, surface shape accuracy, and film quality; (2) The adjustable partitioned coating device created by the present invention can adjust the gap between the hollow frame that plays a shielding role and the reflector to be coated according to the mirror profile of the reflector to be coated, thereby achieving the function of eliminating the coating shadow effect, so that the prepared film has the advantages of low stress, high surface accuracy and no shadow effect, ensuring that there will be no channel stray light crosstalk on the reflector to be coated, thereby increasing the applicability of the device and reducing the processing accuracy and cost; (3) The adjustable partitioned coating device created by the present invention is designed with an embracing module made of polytetrafluoroethylene; the surface shape increment of the reflector after coating is less than 1 / 300λ, and the surface shape still meets the index of better than 1 / 50λ, and the surface shape after coating is better than 1 / 50λ; (4) The positioning pin design in the adjustable partition coating device created by the present invention can ensure accurate adjustment of the coating and achieve high-quality partition coating; (5) The adjustable partition coating device 3 of the present invention is designed to add a transparent protective cover, and the transparent protective cover has corresponding positioning pin holes, which is convenient for adjustment before coating, and the top screw is adjusted to control the gap between the hollow shielding cover and the mirror surface of the reflector to be coated. The transparent cover has the advantage of visual adjustment, which keeps the mirror surface of the reflector to be coated clean and protects the safety of the mirror surface to prevent accidental scratches. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The drawings constituting part of the present invention are used to provide a further understanding of the present invention. The exemplary embodiments and descriptions of the present invention are used to explain the present invention and do not constitute an improper limitation on the present invention. In the drawings: Figure 1 A schematic diagram of the top view of the adjustable partition coating device according to an embodiment of the present invention; Figure 2 A schematic cross-sectional structural diagram of the adjustable partition coating device along the AA cross section according to an embodiment of the present invention; Figure 3 A schematic cross-sectional structural diagram of the adjustable partitioned coating device along the BB cross section according to an embodiment of the present invention; Figure 4 A schematic diagram of the structure of the main frame and the base as viewed from above according to an embodiment of the present invention; Figure 5It is the surface diagram of the reflector to be coated before coating; Figure 6 This is a surface diagram of the reflective mirror to be coated after using the adjustable partitioned coating device described in the embodiment of the invention.

[0018] Description of reference numerals: 1. Surrounding base; 101. Base; 102. Surrounding module; 103. Metal top screw; 2. Hollow frame; 201. Main frame; 202. Hollow shielding cover; 203. Mounting table; 3. Lightweight frame; 4. Reflector to be coated; 5. Adjustable top screw; 6. Positioning pin; 7. Transparent protective cover. DETAILED DESCRIPTION

[0019] In order to make the purpose, technical solution and advantages of the invention more clear, the invention is further described in detail below in conjunction with the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described here are only used to explain the invention and do not constitute a limitation of the invention.

[0020] It should be noted that, in the absence of conflict, the embodiments of the present invention and the features in the embodiments may be combined with each other.

[0021] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention. In addition, the terms "first", "second", etc. are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, features defined as "first", "second", etc. may explicitly or implicitly include one or more of the features. In the description of the present invention, unless otherwise specified, "multiple" means two or more.

[0022] In the description of the invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the invention can be understood according to specific circumstances.

[0023] The present invention will be described in detail below with reference to the accompanying drawings and in combination with embodiments.

[0024] like Figures 1 to 4 As shown, the adjustable partition coating device described in the embodiment of the invention includes an embracing base 1, a hollow frame 2 and a lightweight frame 3. The reflector 4 to be coated is placed in the embracing base 1. The hollow frame 2 is placed on the outside of the embracing base 1 and is fixed together with the embracing base 1 on the rotating disk of the external coating machine, and the lightweight frame 3 is placed above the hollow frame 2 and is fixedly connected to the hollow frame 2. The gap between the hollow frame 2 and the reflector 4 to be coated is adjusted by at least 4 adjustable top screws 5 located on the lightweight frame 3.

[0025] The embracing base 1 includes a base 101 and an embracing module 102. The embracing mold ring 102 embraces the reflector 4 to be coated and is placed inside the base 101 together with the reflector 4 to be coated. On the side wall of the base 101, there are at least one top screw hole evenly arranged along the circumference of the base 101. In this embodiment, one top screw hole is preferably provided. The metal top screw 103 passes through the top screw hole and contacts the embracing module 102. By rotating the metal top screw 103 to push the embracing module 102, the base 101 and the embracing module 102 hold the back step surface of the reflector 4 to be coated tightly, thereby realizing the axial and radial positioning of the reflector 4 to be coated, preventing the reflector 4 to be coated and the adjustable partition coating device from relative movement during the coating process, ensuring the accuracy of the partition coating position, and the clamping process does not affect the surface shape of the reflector 4 to be coated. In the embodiment of the present invention, the material of the base 101 is aluminum alloy. At the same time, in order to reduce the clamping stress of the reflective mirror 4 to be coated, the material of the surrounding module 102 is a flexible material with little outgassing and stable chemical properties. In the embodiment of the present invention, the surrounding module 102 preferably uses a polytetrafluoroethylene material.

[0026] The hollow frame 2 includes a main frame 201 and a hollow shielding cover 202. The main frame 201 is placed outside the base 101 and is coaxially positioned and connected to the base 101 through four positioning pins 6. The hollow shielding cover 202 is connected to the top of the circular main frame 201 through countersunk screws, so that the hollow shielding cover 202 covers the reflector 4 to be coated.

[0027] The embodiment of the present invention takes the four-quadrant zone coating of the reflector 4 to be coated as an example, and a 1 / 4 quadrant coating area is reserved on the hollow shielding cover 202, so that the external coating machine performs four-quadrant zone coating on the reflector 4 to be coated through the coating area. It should be noted that the adjustable zone coating device provided in the embodiment of the present invention only takes the four-quadrant zone coating as a specific embodiment, and corresponds to the 1 / 4 quadrant coating area reserved on the hollow shielding cover 202. The division and setting of the coating area can be adaptively adjusted according to the actual situation, including but not limited to three-area, five-area, six-area, N-area coating, etc. The coating area reserved on the hollow shielding cover 202 can be adjusted to 1 / 3 quadrant, 1 / 5 quadrant, 1 / 6 fan-shaped, 1 / N quadrant, etc. (N=3,4,5,...).

[0028] At the bottom of the main frame 201, no less than three mounting platforms 203 are provided along the circumference of the main frame 201. All the mounting platforms 203 are connected to the rotating disk of the external coating machine by screws, so that the hollow frame 2 as a whole is installed together with the surrounding base 1 on the rotating disk of the external coating machine.

[0029] In the embodiment of the present invention, the main frame 201 and the base 101 are made of the same material, which is aluminum alloy. At the same time, the embodiment of the present invention preferably uses polyimide to make the hollow shielding cover 202. This material has good mechanical processing performance, moderate hardness, and elasticity. It can be slightly deformed under external pressure; the amount of degassing under vacuum is very small, which does not affect the coating quality. Even if the reflector 4 to be coated is accidentally touched, scratches, pitting and other defects will not be generated on the mirror surface of the reflector 4 to be coated, and it is friendly to the mirror surface of the reflector 4 to be coated.

[0030] The lightweight frame 3 is connected to the main frame 201 through the countersunk screws on the side wall of the lightweight frame 3 and covers the hollow shielding cover 202. A cross frame is provided on the lightweight frame 3, and all the adjustable top screws 5 are evenly distributed on the cross frame in a V shape. By rotating the adjustable top screws 5 to squeeze the hollow shielding cover 202, the hollow shielding cover 202 undergoes uniform elastic deformation, and the micrometer-level gap between the hollow shielding cover 202 and the mirror surface of the reflector 4 to be coated is controlled, or the mirror surface of the reflector 4 to be coated is infinitely close to eliminate the coating shadow effect. The angle of the cross frame is adjusted according to the coating area on the hollow shielding cover 202. For example, when four areas are coated, the angle of the cross frame is 90°; when five areas are coated, the angle of the cross frame is 72°; when six areas are coated, the angle of the cross frame is 60°. The adjustable partition coating device described in the embodiment of the invention also includes a dustproof transparent protective cover 7, which covers the lightweight frame 3 and is provided with an adjustment hole corresponding to the adjustable top screw 5. When it is necessary to adjust the gap between the hollow shielding cover 202 and the mirror surface of the reflector 4 to be coated, insert a screwdriver into the adjustment hole to screw the corresponding adjustable top screw 5. The transparent protective cover 7 has the advantage of visual adjustment, which keeps the mirror surface of the reflector 4 to be coated clean while also protecting the safety of the mirror surface and preventing the screwdriver from accidentally scratching the mirror surface. If coating is required, the transparent protective cover 7 needs to be removed before coating.

[0031] In the process of using the adjustable partition coating device described in the embodiment of the invention: First, place the reflector 4 to be coated in the base 101, rotate the metal top screw 103 to squeeze the embracing module 102, so that the base 101, the embracing module 102 and the reflector 4 to be coated are locked. Then connect the hollow shielding cover 202 to the main frame 201, and connect the base 101 to the main frame 201 through the positioning pin 6. The positioning pin 6 can be used for precise positioning of the installation and adjustment, and the coating area is strictly divided. Then connect the lightweight frame 3 to the main frame 201 and cover the hollow shielding cover 202, and install the adjustable top screw 5 on the cross frame. Finally, the transparent protective cover 7 is installed on the lightweight frame 3 according to the positional relationship between the adjustable top screw 5 and the adjustment hole. Before coating, remove the transparent protective cover 7, and install the adjustable partition coating device provided in the embodiment of the present invention on the rotating disk of the external coating machine as a whole by screws, and realize regional coating by rotating the coating area on the hollow shielding cover 202.

[0032] In order to more clearly demonstrate the effect of coating the reflector 4 to be coated by the adjustable partition coating device according to the embodiment of the present invention, a 92% aperture test of the reflector 4 to be coated is performed using a ZYGO interferometer, and the surface shape diagram before coating is obtained (such as Figure 5As shown), and using a ZYGO interferometer to perform a 92% aperture test on the magnetron sputtering coating process after the adjustable partition coating device described in the embodiment of the invention is used to obtain a surface shape diagram after coating (as shown Figure 6 as shown).

[0033] from Figure 5 It can be seen that the RMS (mirror surface roughness) of the mirror 4 to be coated before coating is 0.016λ (λ represents the wavelength of the laser emitted by the ZYGO interferometer). Figure 6 It can be seen that after the coating process is completed using the adjustable partitioned coating device described in the embodiment of the invention, the RMS of the four-quadrant coating areas on the reflector 4 to be coated are 0.018λ, 0.018λ, 0.017λ and 0.013λ respectively, and the roughness changes are 0.002λ, 0.002λ, 0.001λ and -0.003λ respectively, achieving the design indicator of the shape change after coating being less than 1 / 300λ. It can be seen that the adjustable partitioned coating device described in the embodiment of the invention has a good coating effect on the reflector 4 to be coated.

[0034] The above specific implementations do not constitute a limitation on the protection scope of the present invention. It should be understood by those skilled in the art that various modifications, combinations, sub-combinations and substitutions can be made according to design requirements and other factors. Any modification, equivalent substitution and improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. An adjustable zone coating device for coating a reflective mirror to be coated, characterized in that: It includes an embracing base, a hollow frame and a lightweight frame; wherein the reflector to be coated is placed in the embracing base; the hollow frame is located on the outside of the embracing base and is fixed together with the embracing base on a rotating disk of an external coating machine; the lightweight frame is placed above the hollow frame and is fixedly connected to the hollow frame; the lightweight frame adjusts the gap between the hollow frame and the reflector to be coated by means of no less than 4 adjustable top screws.

2. The adjustable partition coating device according to claim 1, characterized in that: The embracing base includes a base and an embracing module; wherein the embracing module embraces the reflector to be coated and is placed inside the base together with the reflector to be coated.

3. The adjustable partition coating device according to claim 2, characterized in that: At least one top screw hole is evenly arranged on the side wall of the base along the circumference of the base. A metal top screw passes through the top screw hole and contacts the embracing module. The embracing module is pushed by rotating the metal top screw so that the embracing module is in close contact with the reflector to be coated and the reflector to be coated is fixed in the base.

4. The adjustable partition coating device according to any one of claims 2 or 3, characterized in that: The surrounding module is a polytetrafluoroethylene ring.

5. The adjustable partition coating device according to claim 1, characterized in that: The hollow frame includes a main frame and a hollow shielding cover; wherein the main frame is placed on the outside of the base and is positioned and connected to the base through positioning pins; the hollow shielding cover is connected above the main frame and covers the reflector to be coated.

6. The adjustable partition coating device according to claim 5, characterized in that: At the bottom of the main frame, no less than three mounting platforms are arranged along the circumference of the main frame, and all the mounting platforms are connected to the rotating disk by screws.

7. The adjustable partition coating device according to claim 5, characterized in that: The hollow shielding cover is made of polyimide, and a coating area of ​​no less than 3 quadrants is reserved on the hollow shielding cover, so that the external coating machine coats the reflective mirror to be coated through the coating area.

8. The adjustable partition coating device according to claim 5, characterized in that: The lightweight frame is connected to the main frame through screws on the side walls of the lightweight frame and covers the hollow shielding cover.

9. The adjustable partition coating device according to claim 5, characterized in that: A cross frame is provided on the lightweight frame, and all adjustable top screws are distributed in a V shape on the cross frame. The hollow shielding cover is squeezed by rotating the adjustable top screws, thereby adjusting the distance between the hollow shielding cover and the reflector to be coated.

10. The adjustable partition coating device according to claim 1, characterized in that: A transparent protective cover covering the lightweight frame is also arranged above the lightweight frame, and an adjustment hole corresponding to the adjustable top screw is arranged on the transparent protective cover.

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