Novel wire feeding evaporation system
By designing the wire feeding mechanism, swing mechanism and wire feeding pitch mechanism in the evaporative coating system, multi-dimensional fine adjustment of the coated wire is achieved, solving the problem of insufficient wire point adjustment capability in the existing system, and improving the coating quality and production efficiency.
Patent Information
- Application Number
- CN202411541251.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2024-10-31
- Publication Date
- 2025-02-11
- Estimated Expiration
- 2044-10-31
AI Technical Summary
The existing evaporative coating systems are difficult to achieve multi-dimensional fine adjustment during the wire feeding process, especially the adjustment ability of the wire-holding point position is very limited, resulting in low production efficiency and unstable product quality.
A new type of wire feeding evaporation system is designed, including a wire feeding mechanism, a swing mechanism and a wire feeding pitch mechanism. The wire feeding mechanism ensures the stable transport of the coated wire through the design of the wire feeding seat, wire feeding wheel, compression wheel and wire feeding tube; the swing mechanism realizes the precise adjustment of the longitudinal position of the coated wire by the swing of the wire feeding tube; the wire feeding pitch mechanism passes through Adjust the pitch angle of the wire feeding seat to achieve flexible adjustment of the lateral position of the coated wire.
The wire point adjustment of the coating wire during the evaporation process is realized, the accuracy and reliability of the coating process are improved, the stability and consistency of the coating quality are ensured, and the production efficiency is improved.
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Figure CN119411078A_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the technical field of vacuum evaporation coating, and in particular to a novel wire feeding evaporation system. Background Art
[0002] At present, evaporation coating technology is widely used in modern industrial production, especially in the fields of semiconductor, optical device and electronic component manufacturing. With the advancement of science and technology, the performance of evaporation coating equipment has been continuously improved to meet more complex and precise process requirements. The traditional evaporation coating system is mainly composed of an evaporation source, a vacuum chamber and a wire feeding device, which achieves high-quality thin film deposition by precisely controlling the temperature of the evaporation source and the wire feeding speed. However, with the continuous growth of market demand and the improvement of technical requirements, the existing evaporation coating system needs to be further optimized to improve production efficiency and product quality.
[0003] In the existing evaporation coating system, in order to achieve precise wire feeding control, a fixed wire feeding device is usually used. These devices mainly include a wire feeding wheel, a clamping wheel and a wire feeding tube. The wire feeding wheel is driven by a motor to rotate and the coated wire is fed into the evaporation source. In the process of wire feeding, it is difficult for the existing wire feeding device to achieve multi-dimensional fine adjustment, especially the adjustment ability of the wire point position is very limited. It is often achieved through manual adjustment or simple mechanical devices, which is not only cumbersome to operate, but also has low accuracy and cannot meet the requirements of high precision and high stability. Therefore, the problem that the wire point of the coating wire cannot be adjusted leads to low production efficiency and unstable product quality, which seriously affects the performance of the entire evaporation coating system.
[0004] In view of the above-mentioned related technologies, it is necessary to propose a new wire feeding evaporation system to solve one of the above-mentioned technical problems. Summary of the invention
[0005] In order to solve one of the above-mentioned technical problems, the present application provides a new wire feeding evaporation system.
[0006] A novel wire feeding evaporation system provided in this application adopts the following technical solution: A novel wire feeding evaporation system, comprising: A mounting seat, on which an evaporation mechanism can be lifted and lowered for evaporating the coated wire; A wire feeding mechanism is arranged on the side of the mounting seat close to the evaporation mechanism, and includes a wire feeding seat, a wire feeding wheel, a clamping wheel and a wire feeding tube. The tail end of the wire feeding seat is rotatably arranged on the mounting seat, the wire feeding wheel is rotatably arranged on the wire feeding seat, the clamping wheel is arranged on the wire feeding seat corresponding to the upper side of the wire feeding wheel, and the wire feeding tube is rotatably arranged on the wire feeding seat for conveying the coated wire; A swing mechanism is arranged on a side of the wire feeding seat close to the wire feeding tube, and the coated wire is swung by the swing mechanism to change the longitudinal wire point position; and The wire feeding pitch mechanism is arranged on the mounting seat, and the connecting part of the wire feeding pitch mechanism is connected to the wire feeding seat. The pitch angle of the wire feeding seat is adjusted by the wire feeding pitch mechanism to change the lateral wire point position of the coated wire.
[0007] By adopting the above technical scheme, the wire landing point of the coated wire can be adjusted during the evaporation process; specifically, the design of the wire feeding seat, wire feeding wheel, clamping wheel and wire feeding tube in the wire feeding mechanism ensures stable transportation of the coated wire; the swing mechanism achieves precise adjustment of the longitudinal position of the coated wire by swinging the wire feeding tube; at the same time, the wire feeding pitch mechanism achieves flexible adjustment of the lateral position of the coated wire by adjusting the pitch angle of the wire feeding seat; these designs enable the entire system to have higher accuracy and reliability during the coating process.
[0008] Optionally, the swing mechanism includes a swing motor and a swing gear, the swing motor is arranged on the side of the wire feeding seat, the swing gear is fastened on the outside of the wire feeding tube, and a driving gear is arranged on the motor shaft of the swing motor, and the driving gear is meshed with the swing gear.
[0009] By adopting the above technical solution, the coordinated use of the swing motor and the swing gear can realize the precise swing control of the wire feeding tube; specifically, the swing motor can accurately adjust the swing angle of the wire feeding tube through the engagement of the driving gear and the swing gear, thereby realizing the accurate change of the longitudinal wire point position of the coated wire; this design improves the flexibility and controllability of the coating process and ensures the stability and consistency of the coating quality.
[0010] Optionally, the wire feeding pitch mechanism includes a pitch motor, a coupling, an adjusting screw and a slider, the pitch motor is arranged on the mounting seat, the pitch motor is connected to the adjusting screw through the coupling, a U-shaped groove is arranged at the front end of the wire feeding seat, the slider is slidably connected in the U-shaped groove, the adjusting screw is arranged on one side corresponding to the U-shaped groove, the adjusting screw is in contact with the slider, and a threaded through hole is arranged in the center of the slider to cooperate with the adjusting screw, so that the slider can move up and down along the adjusting screw, thereby driving the pitch angle of the wire feeding seat to change.
[0011] By adopting the above technical scheme, the wire feeding pitch mechanism can accurately adjust the pitch angle of the wire feeding seat, thereby realizing the change of the lateral wire landing point position of the coated wire; the pitch motor is connected to the adjusting screw through the coupling, and the adjusting screw cooperates with the threaded through hole of the slider, so that the slider can move in the up and down directions under the drive of the adjusting screw, and then drive the front end of the slider to move up and down in the U-shaped groove, so as to realize the precise control of the pitch angle of the wire feeding seat; this design not only improves the flexibility and accuracy of the wire feeding process, but also effectively improves the coating quality.
[0012] Optionally, the evaporation mechanism includes an evaporation frame and an evaporation boat, the evaporation frame can be raised and lowered on the mounting base, a plurality of evaporation boats are arranged at equal intervals in the evaporation frame, and anodes and cathodes are arranged on both sides of the bottom of the corresponding evaporation boats, respectively, the evaporation frame is provided with a plurality of wire feeding ports corresponding to the evaporation boats, and the coated wire passes through the wire feeding ports and contacts the evaporation boat.
[0013] By adopting the above technical solution, efficient arrangement of the evaporation boat and precise contact of the coating wire can be achieved, the uniformity and stability of the evaporation coating process can be improved, material waste can be reduced, and the service life of the equipment can be extended.
[0014] Optionally, it also includes a lifting mechanism, which is arranged on the mounting seat, and the lifting mechanism is used to drive the evaporation mechanism to rise and fall.
[0015] By adopting the above technical solution, precise lifting and lowering control of the evaporation mechanism can be achieved, ensuring uniform evaporation of the coated wire at different heights and improving the coating quality; specifically, the setting of the lifting mechanism enables the evaporation mechanism to be lifted and lowered smoothly on the mounting base, avoiding instability and errors caused by manual operation, thereby ensuring the stability and consistency of the evaporation process.
[0016] Optionally, a sliding bearing is provided inside the wire feeding seat and close to one end of the wire feeding tube, and one end of the wire feeding tube is connected to the inner wall of the sliding bearing via a top screw.
[0017] By adopting the above technical solution, the setting of the sliding bearing can effectively reduce the friction of the wire feeding tube during rotation, improve the stability and service life of the wire feeding tube; the top wire connection method ensures the reliable fixation between the wire feeding tube and the sliding bearing, prevents loosening or falling off, and further improves the stability and reliability of the system.
[0018] Optionally, a guide wheel is provided at one end of the wire feeding seat away from the wire feeding wheel, and the coated wire is corrected by the guide wheel to enter the position of the wire feeding wheel. A driving motor is provided at the rear end of the wire feeding seat corresponding to the wire feeding wheel, and the motor shaft of the driving motor is connected to the wire feeding wheel.
[0019] By adopting the above technical scheme, the guide wheel can effectively correct the position of the coated wire entering the wire feeding wheel, ensuring that the coated wire enters the wire feeding wheel smoothly and accurately, avoiding poor feeding or wire jamming due to position offset, and improving the stability and reliability of the system; at the same time, the setting of the drive motor makes the power source of the wire feeding wheel more reliable, ensuring the continuous and uniform delivery of the coated wire, and further improving the efficiency and quality of the system.
[0020] Optionally, a plurality of wire feeding reels are provided on the mounting seat near the wire feeding mechanism, and the coated wire is transmitted to the wire feeding mechanism through the wire feeding reels.
[0021] By adopting the above technical solution, the friction of the coated wire during the transmission process can be effectively reduced, the transmission stability and reliability of the coated wire can be improved, and the problem of breakage or deformation of the coated wire caused by friction can be avoided, thereby ensuring the quality of the coating.
[0022] Optionally, it also includes a translation mechanism, which is used for the translation of the wire feeding mechanism. The translation mechanism includes a translation table, a servo motor, a translation screw and a moving seat. The translation table is arranged on the mounting seat, the servo motor is arranged on one side of the translation table, the translation screw is rotatably arranged on the translation table, and the moving seat is movably arranged on the translation table to support the wire feeding mechanism. The translation screw passes through the moving seat and is threadedly connected to the moving seat at the penetration point. One end of the translation screw is connected to the motor shaft of the servo motor.
[0023] By adopting the above technical scheme, the translation mechanism enables the wire feeding mechanism to move horizontally along the guide rail, thereby realizing precise positioning and smooth operation of the wire feeding mechanism; specifically, the structural design of the translation table and the moving seat ensures the stability and reliability of the wire feeding mechanism during the translation process, and the combination of the servo motor and the translation screw realizes precise control of the moving distance and speed of the wire feeding mechanism, thereby improving the system's degree of automation and ease of operation.
[0024] Optionally, a guide rail is provided on the mounting seat, and the lower parts of both ends of the movable seat are slidably connected to the guide rail.
[0025] By adopting the above technical solution, the moving seat can slide smoothly on the guide rail, ensuring the stability and accuracy of the wire feeding mechanism during the translation process, and avoiding the vibration or deviation generated during the movement that affects the coating quality; at the same time, the design of the guide rail makes the movement of the moving seat smoother, reduces friction, and extends the service life of the equipment.
[0026] In summary, the present application includes at least one of the following beneficial technical effects: 1. Improve the life of the evaporation boat. The adjustable wire feeding point makes the surface of the evaporation boat corroded evenly, so the life of the evaporation boat can be maximized; make up for the uneven temperature of the evaporation boat surface. There are differences between different evaporation boats, resulting in different temperatures at the same position of different evaporation boats. The adjustable wire feeding point can make each evaporation boat find a suitable temperature point; adapt to evaporation boats of different shapes. In order to meet the requirements of different process routes, evaporation boats of different shapes are often required. Different shapes of evaporation boats will inevitably lead to different required wire feeding points; 2. Change the incident angle between the coating wire and the evaporation boat. Since wires of different materials have different melting points, different wire feeding angles are required. Different industries have different process requirements for thin films and also require different wire feeding angles. Or different coating rates may also require different wire feeding angles. Therefore, the angle between the wire and the evaporation boat should be adjustable when it is sent to the evaporation boat. 3. The source-substrate distance is adjustable. The distance between the evaporation boat surface and the base film to be deposited can be called the source-substrate distance, which has an important influence on the film-forming properties. BRIEF DESCRIPTION OF THE DRAWINGS
[0027] Figure 1 It is a three-dimensional view of a novel wire feeding evaporation system in this application.
[0028] Figure 2 This is a first-perspective side view of a novel wire feeding evaporation system in this application.
[0029] Figure 3 yes Figure 1 A schematic diagram of the enlarged structure at point A in the middle.
[0030] Figure 4 yes Figure 1 A magnified schematic diagram of the structure at point B in the middle.
[0031] Figure 5 It is a partial three-dimensional view of a novel wire feeding evaporation system (swing mechanism and wire feeding pitch mechanism) in the present application.
[0032] Figure 6 yes Figure 5 Partial cross-sectional view of the top view.
[0033] Figure 7 yes Figure 5 Partial sectional view of the side view.
[0034] Figure 8 yes Figure 7 A magnified schematic diagram of the structure.
[0035] Fig. 9 It is a side view from a second perspective of a novel wire feeding evaporation system in the present application.
[0036] Fig.10It is a top view of a novel wire feeding evaporation system in the present application, with multiple numbers installed simultaneously on both sides of a mounting base.
[0037] In the figure: 1. mounting base; 11. evaporation mechanism; 111. evaporation frame; 112. evaporation boat; 113. anode; 114. cathode; 115. wire feeding port; 12. wire feeding disc; 13. guide rail; 2. wire feeding mechanism; 21. wire feeding base; 22. wire feeding wheel; 23. clamping wheel; 24. wire feeding tube; 25. U-shaped groove; 26. sliding bearing; 27. guide wheel; 28. driving motor; 3. swing mechanism; 31. swing motor; 32. swing gear; 33. driving gear; 4. wire feeding pitch mechanism; 41. pitch motor; 42. coupling; 43. adjusting screw; 44. slider; 5. lifting mechanism; 6. translation mechanism; 61. translation stage; 62. servo motor; 63. translation screw; 64. moving base. DETAILED DESCRIPTION
[0038] The following is combined with Figure 1-10 This application is described in further detail.
[0039] refer to Figure 1-5 The embodiment of the present application discloses a novel wire feeding evaporation system, including a mounting base 1, a wire feeding mechanism 2, a swing mechanism 3 and a wire feeding pitch mechanism 4.
[0040] An evaporation mechanism 11 can be raised and lowered on the mounting seat 1 for evaporating the coated wire; the wire feeding mechanism 2 is arranged on the side of the mounting seat 1 close to the evaporation mechanism 11, and includes a wire feeding seat 21, a wire feeding wheel 22, a clamping wheel 23 and a wire feeding tube 24. The tail end of the wire feeding seat 21 can be rotatably arranged on the mounting seat 1, the wire feeding wheel 22 can be rotatably arranged on the wire feeding seat 21, the clamping wheel 23 is arranged on the wire feeding seat 21 corresponding to the upper part of the wire feeding wheel 22, and the wire feeding tube 24 can be rotatably arranged on the wire feeding seat 21 for conveying the coated wire; the swing mechanism 3 is arranged on the side of the wire feeding seat 21 close to the wire feeding tube 24, and the coated wire realizes the longitudinal wire point position change by the swing mechanism 3 to the wire feeding tube 24; the wire feeding pitch mechanism 4 is arranged on the mounting seat 1, and the connecting part of the wire feeding pitch mechanism 4 is connected to the wire feeding seat 21, and the coated wire realizes the lateral wire point position change by the wire feeding pitch mechanism 4 adjusting the pitch angle of the wire feeding seat 21.
[0041] The wire feeding evaporation system can adjust the wire point of the coated wire during the evaporation process; specifically, the design of the wire feeding seat 21, the wire feeding wheel 22, the clamping wheel 23 and the wire feeding tube 24 in the wire feeding mechanism 2 ensures stable feeding of the coated wire; the swing mechanism 3 achieves precise adjustment of the longitudinal position of the coated wire by swinging the wire feeding tube 24; at the same time, the wire feeding pitch mechanism 4 achieves flexible adjustment of the lateral position of the coated wire by adjusting the pitch angle of the wire feeding seat 21; these designs make the entire system have higher accuracy and reliability during the coating process; refer to Figure 6 In the present embodiment, more specifically, the swing mechanism 3 includes a swing motor 31 and a swing gear 32. The swing motor 31 is arranged on the side of the wire feeding seat 21. The swing gear 32 is fastened on the outside of the wire feeding tube 24. A driving gear 33 is arranged on the motor shaft of the swing motor 31. The driving gear 33 and the swing gear 32 are meshed with each other. The coordinated use of the swing motor 31 and the swing gear 32 realizes the precise swing control of the wire feeding tube 24. Specifically, the swing motor 31 can accurately adjust the swing angle of the wire feeding tube 24 through the meshing of the driving gear 33 and the swing gear 32, thereby realizing the accurate change of the longitudinal wire point position of the coated wire. This design improves the flexibility and controllability of the coating process and ensures the stability and consistency of the coating quality.
[0042] refer to Figure 7-8 In this embodiment, more specifically, the wire feeding pitch mechanism 4 includes a pitch motor 41, a coupling 42, an adjusting screw 43 and a slider 44. The pitch motor 41 is arranged on the mounting seat 1, and the pitch motor 41 is connected to the adjusting screw 43 through the coupling 42. A U-shaped groove 25 is arranged at the front end of the wire feeding seat 21, and the slider 44 is slidably connected in the U-shaped groove 25. The adjusting screw 43 is arranged on one side corresponding to the U-shaped groove 25, and the adjusting screw 43 is in contact with the slider 44. A threaded through hole is arranged at the center of the slider 44 to cooperate with the adjusting screw 43, so that the slider 44 can move up and down along the adjusting screw 43 to drive the wire feeding. The pitch angle of the wire holder 21 changes, and the wire feeding pitch mechanism 4 can accurately adjust the pitch angle of the wire feeding holder 21, thereby realizing the change of the lateral wire landing point position of the coated wire; the pitch motor 41 is connected to the adjusting screw 43 through the coupling 42, and the adjusting screw 43 cooperates with the threaded through hole of the slider 44, so that the slider 44 can move in the up and down directions under the drive of the adjusting screw 43, and then drive the front end of the slider 44 to move up and down in the U-shaped groove 25, so as to realize the precise control of the pitch angle of the wire feeding holder 21; this design not only improves the flexibility and accuracy of the wire feeding process, but also effectively improves the coating quality.
[0043] refer to Fig. 9 In the present embodiment, more specifically, the evaporation mechanism 11 comprises an evaporation frame 111 and an evaporation boat 112. The evaporation frame 111 can be raised and lowered on the mounting base 1. A plurality of evaporation boats 112 are arranged at equal intervals in the evaporation frame 111, and anodes 113 and cathodes 114 are arranged on both sides of the bottom of the corresponding evaporation boats 112, respectively. The evaporation frame 111 is provided with a plurality of wire feeding ports 115 corresponding to the evaporation boats 112. The coating wire passes through the wire feeding ports 115 and contacts with the evaporation boats 112, which can realize efficient arrangement of the evaporation boats 112 and precise contact of the coating wire, thereby improving the uniformity and stability of the evaporation coating process, reducing material waste, and extending the service life of the equipment.
[0044] In the present embodiment, more specifically, it also includes a lifting mechanism 5, which is arranged on the mounting base 1. The lifting mechanism 5 is used to drive the evaporation mechanism 11 to rise and fall, and can realize precise lifting and lowering control of the evaporation mechanism 11, ensure uniform evaporation of the coated wire at different heights, and improve the coating quality; the lifting mechanism 5 includes a lifting motor and a motor screw, which are installed on both sides of the mounting base 1; guide shafts are installed at the four corners, and the motor screw is driven by the motor shaft of the lifting motor. A connecting plate is threadedly connected to the motor screw, and the connecting plate is connected to the evaporation frame 111 to achieve up and down movement, thereby adjusting the source-base distance between the evaporation boat 112 and the film to be coated; specifically, the setting of the lifting mechanism 5 enables the evaporation mechanism 11 to be smoothly lifted and lowered on the mounting base 1, avoiding instability and errors caused by manual operation, thereby ensuring the stability and consistency of the evaporation process.
[0045] In this embodiment, more specifically, a sliding bearing 26 is provided inside the wire feeding seat 21 and close to one end of the wire feeding tube 24. One end of the wire feeding tube 24 is connected to the inner wall of the sliding bearing 26 by a top screw. The setting of the sliding bearing 26 can effectively reduce the friction of the wire feeding tube 24 during rotation, thereby improving the stability and service life of the wire feeding tube 24. The top screw connection method ensures the reliable fixation between the wire feeding tube 24 and the sliding bearing 26 to prevent loosening or falling off, thereby further improving the stability and reliability of the system.
[0046] In the present embodiment, more specifically, a guide wheel 27 is provided at one end of the wire feeding seat 21 away from the wire feeding wheel 22, and the coated wire is corrected to enter the position of the wire feeding wheel 22 through the guide wheel 27, and a drive motor 28 is provided at the rear end of the wire feeding seat 21 corresponding to the wire feeding wheel 22, and the motor shaft of the drive motor 28 is connected to the wire feeding wheel 22. The guide wheel 27 can effectively correct the position of the coated wire entering the wire feeding wheel 22, ensuring that the coated wire enters the wire feeding wheel 22 smoothly and accurately, avoiding poor feeding or wire jamming due to position offset, and improving the stability and reliability of the system; at the same time, the setting of the drive motor 28 makes the power source of the wire feeding wheel 22 more reliable, ensures the continuous and uniform transportation of the coated wire, and further improves the efficiency and quality of the system.
[0047] In this embodiment, more specifically, a plurality of wire feeding reels 12 are arranged on the mounting seat 1 near the wire feeding mechanism 2. The coated wire is transmitted to the wire feeding mechanism 2 through the wire feeding reels 12, which can effectively reduce the friction of the coated wire during the transmission process, improve the transmission stability and reliability of the coated wire, avoid the breakage or deformation of the coated wire caused by friction, thereby ensuring the coating quality.
[0048] refer to Fig. 9In this embodiment, more specifically, it also includes a translation mechanism 6, which is used for the translation of the wire feeding mechanism 2. The translation mechanism 6 includes a translation platform 61, a servo motor 62, a translation screw 63 and a moving seat 64. The translation platform 61 is arranged on the mounting seat 1, the servo motor 62 is arranged on one side of the translation platform 61, the translation screw 63 is rotatably arranged on the translation platform 61, and the moving seat 64 is movably arranged on the translation platform 61 to support the wire feeding mechanism 2. The translation screw 63 passes through the moving seat 64, and the screw at the place where the translation screw 63 passes through the moving seat 64 is screwed. The translation mechanism 6 is connected with a threaded connection, and one end of the translation screw 63 is connected to the motor shaft of the servo motor 62. The translation mechanism 6 enables the wire feeding mechanism 2 to move horizontally along the guide rail 13, thereby realizing precise positioning and smooth operation of the wire feeding mechanism 2; specifically, the structural design of the translation platform 61 and the moving seat 64 ensures the stability and reliability of the wire feeding mechanism 2 during the translation process. The combination of the servo motor 62 and the translation screw 63 realizes precise control of the moving distance and speed of the wire feeding mechanism 2, thereby improving the degree of automation and ease of operation of the system.
[0049] In this embodiment, more specifically, a guide rail 13 is provided on the mounting seat 1, and the lower parts of the two ends of the movable seat 64 are slidably connected to the guide rail 13. The movable seat 64 can slide smoothly on the guide rail 13, thereby ensuring the stability and accuracy of the wire feeding mechanism 2 during the translation process, and avoiding the vibration or deviation generated during the movement to affect the coating quality; at the same time, the design of the guide rail 13 makes the movement of the movable seat 64 smoother, reduces friction, and extends the service life of the equipment.
[0050] The implementation principle of a novel wire feeding evaporation system in an embodiment of the present application is as follows: through the synergistic effect of the swing mechanism 3 and the wire feeding pitch mechanism 4, multi-dimensional fine adjustment of the wire landing point position of the coated wire is achieved; specifically, the swing mechanism 3 drives the swing gear 32 to rotate through the swing motor 31, driving the wire feeding tube 24 to swing, thereby changing the longitudinal position of the coated wire on the evaporation boat 112; the wire feeding pitch mechanism 4 drives the adjusting screw 43 to rotate through the pitch motor 41, driving the slider 44 to move up and down along the adjusting screw 43, thereby driving the pitch angle of the wire feeding seat 21 to change, thereby achieving the lateral position adjustment of the coated wire on the evaporation boat 112; this multi-dimensional fine adjustment method greatly improves the accuracy and stability of the wire landing point position of the coated wire, thereby improving the quality and production efficiency of the evaporation coating.
[0051] The above are all preferred embodiments of the present application, and the protection scope of the present application is not limited thereto. Therefore, any equivalent changes made according to the structure, shape, and principle of the present application should be included in the protection scope of the present application.
Claims
1. A new type of wire feeding evaporation system, characterized in that ,include: A mounting seat (1), wherein an evaporation mechanism (11) is arranged on the mounting seat (1) in a liftable manner and is used for evaporating the coated wire; A wire feeding mechanism (2) is arranged on the side of the mounting seat (1) close to the evaporation mechanism (11), and comprises a wire feeding seat (21), a wire feeding wheel (22), a clamping wheel (23) and a wire feeding tube (24); the tail end of the wire feeding seat (21) is rotatably arranged on the mounting seat (1); the wire feeding wheel (22) is rotatably arranged on the wire feeding seat (21); the clamping wheel (23) is arranged on the wire feeding seat (21) corresponding to the upper side of the wire feeding wheel (22); and the wire feeding tube (24) is rotatably arranged on the wire feeding seat (21) for conveying coated wire; A swing mechanism (3) is arranged on a side of the wire feeding seat (21) close to the wire feeding tube (24), and the coated wire is swung by the swing mechanism (3) to change the longitudinal wire point position; and A wire feeding pitch mechanism (4) is arranged on the mounting seat (1); a connecting portion of the wire feeding pitch mechanism (4) is connected to the wire feeding seat (21); and the pitch angle of the wire feeding seat (21) is adjusted by the wire feeding pitch mechanism (4) to change the lateral wire point position of the coated wire.
2. A novel wire feeding evaporation system according to claim 1, characterized in that: The swing mechanism (3) comprises a swing motor (31) and a swing gear (32); the swing motor (31) is arranged on the side of the wire feeding seat (21); the swing gear (32) is tightly sleeved on the outside of the wire feeding tube (24); a driving gear (33) is arranged on the motor shaft of the swing motor (31); the driving gear (33) and the swing gear (32) are meshed with each other.
3. A novel wire feeding evaporation system according to claim 1, characterized in that: The wire feeding pitch mechanism (4) comprises a pitch motor (41), a coupling (42), an adjusting screw (43) and a slider (44); the pitch motor (41) is arranged on the mounting seat (1); the pitch motor (41) is connected to the adjusting screw (43) through the coupling (42); a U-shaped groove (25) is arranged at the front end of the wire feeding seat (21); the slider (44) is slidably connected in the U-shaped groove (25); the adjusting screw (43) is arranged at one side corresponding to the U-shaped groove (25); the adjusting screw (43) contacts the slider (44); a threaded through hole is arranged at the center of the slider (44) to cooperate with the adjusting screw (43), so that the slider (44) can move up and down along the adjusting screw (43), thereby driving the pitch angle of the wire feeding seat (21) to change.
4. A novel wire feeding evaporation system according to claim 1, characterized in that: The evaporation mechanism (11) comprises an evaporation frame (111) and an evaporation boat (112); the evaporation frame (111) can be raised and lowered on the mounting seat (1); a plurality of evaporation boats (112) are arranged at equal intervals in the evaporation frame (111), and anodes (113) and cathodes (114) are arranged on both sides of the bottom of the corresponding evaporation boats (112); the evaporation frame (111) is provided with a plurality of wire feeding ports (115) corresponding to the evaporation boats (112); and the coating wire passes through the wire feeding ports (115) and contacts the evaporation boats (112).
5. A novel wire feeding evaporation system according to claim 4, characterized in that: It also comprises a lifting mechanism (5) which is arranged on the mounting seat (1), and the lifting mechanism (5) is used to drive the evaporation mechanism (11) to move up and down.
6. A novel wire feeding evaporation system according to claim 1, characterized in that: A sliding bearing (26) is arranged inside the wire feeding seat (21) and close to one end of the wire feeding tube (24); one end of the wire feeding tube (24) is connected to the inner wall of the sliding bearing (26) via a top screw.
7. A novel wire feeding evaporation system according to claim 1, characterized in that: A guide wheel (27) is arranged at one end of the wire feeding seat (21) away from the wire feeding wheel (22), and the coated wire is corrected by the guide wheel (27) to enter the position of the wire feeding wheel (22). A driving motor (28) is arranged at the rear end of the wire feeding seat (21) corresponding to the wire feeding wheel (22), and the motor shaft of the driving motor (28) is connected to the wire feeding wheel (22).
8. A novel wire feeding evaporation system according to claim 1, characterized in that: The mounting seat (1) is provided with a plurality of wire feeding reels (12) near the wire feeding mechanism (2), and the coated wire is transmitted to the wire feeding mechanism (2) via the wire feeding reels (12).
9. A novel wire feeding evaporation system according to claim 1, characterized in that: The invention also comprises a translation mechanism (6), wherein the translation mechanism (6) is used for the translation of the wire feeding mechanism (2), and the translation mechanism (6) comprises a translation platform (61), a servo motor (62), a translation screw (63) and a movable seat (64). The translation platform (61) is arranged on the mounting seat (1), the servo motor (62) is arranged on one side of the translation platform (61), the translation screw (63) is rotatably arranged on the translation platform (61), the movable seat (64) is movably arranged on the translation platform (61) to support the wire feeding mechanism (2), the translation screw (63) passes through the movable seat (64) and is threadedly connected to the portion where the movable seat (64) passes through, and one end of the translation screw (63) is connected to the motor shaft of the servo motor (62).
10. A novel wire feeding evaporation system according to claim 9, characterized in that: A guide rail (13) is provided on the mounting seat (1), and the lower parts of both ends of the movable seat (64) are slidably connected to the guide rail (13).
Citation Information
Patent Citations
Compact wire feeder
CN216514085U
Evaporation device and vacuum coating device
CN219449843U
Metal conduit clamping mechanism and evaporation wire feeding device
CN221192292U
Wire feeding head, wire feeding device and evaporation coating device
CN221837082U
Wire-shaped material supply device provided with cutter mechanism for evaporating source
JP1985197868A
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