Drying device and drying method for matrix integrated target material

Abstract

The invention provides a drying device and method for a matrix integrated target material. The drying device comprises a cavity used for containing the matrix integrated target material, a heating part arranged on the inner wall side of the cavity, a stirring part arranged in the cavity and a containing frame arranged in the cavity. Wherein the heating part comprises at least two sub-heating pieces, and a containing frame is arranged between every two adjacent sub-heating pieces; the stirring part comprises a stirring shaft and at least two layers of stirring blades, and the containing frame is arranged between every two adjacent layers of stirring blades; the containing frame comprises two rows of sub containing frames, a gap is formed between the two rows of sub containing frames, and the gap is used for arranging the stirring shaft so that the stirring shaft can rotate. According to the method, the drying turnover rate of the matrix integrated target material can be increased, the qualified rate of the dried target material is increased, and the application prospect is wide.

Description

Technical Field

[0001] The present invention relates to the technical field of target material drying, and in particular to a drying device and a drying method for a matrix integrated target material. Background Art

[0002] LCD display technology has been widely used in various fields. There are also many LCD display device manufacturers in China. However, the target materials required for production still rely on large-scale imports, and the drying method of LCD target materials is also firmly in the hands of other countries. After cleaning, LCD flat target materials need to dry the cleaning liquid in welding seams, BP steps, BP through holes and BP countersunk holes. The high-pressure air and hot air blower drying commonly used in China have problems such as uneven drying and high risk of handheld operation. The backward target material drying method and the limitations of drying turnover rate are bound to significantly reduce the production qualification rate of target materials.

[0003] CN113294978A discloses a method for drying a target material, which specifically includes the following steps: (1) rotating the target material around the center of the target; (2) introducing a dry gas with a humidity of ≤30% to dry the target material; wherein the dry gas in step (2) is in a circulating state, and a dehumidification treatment is performed before each cycle. However, this method is more suitable for circular targets, and is not suitable for matrix-integrated targets. In addition, the energy consumption of rotating the target material is high, and the economic cost is high.

[0004] CN118423956A discloses a drying method for LCD flat split target material, the drying method comprises rotating, drying and dehumidifying the target material to be dried in sequence to obtain the dried target material; wherein the rotation speed of the rotating process is 10-18r / min; and a dry gas with a certain humidity needs to be introduced during the drying process. While the method is also for split row target materials, it is not applicable to matrix integrated target materials and has a high cost.

[0005] Therefore, there is currently no drying method or device for matrix-integrated target materials, and there is an urgent need to develop a drying device and a drying method for matrix-integrated target materials to improve the drying efficiency of the matrix-integrated target materials and improve the drying pass rate. Summary of the invention

[0006] In order to solve the above technical problems, the present invention provides a drying device and a drying method for a matrix-integrated target material, which can improve the drying efficiency and drying qualification rate of the matrix-integrated target material and has broad application prospects.

[0007] To achieve this object, the present invention adopts the following technical solutions:

[0008] In a first aspect, the present invention provides a drying device for a matrix-integrated target material, the drying device comprising a cavity for placing the matrix-integrated target material, a heating portion arranged on the inner wall side of the cavity, a stirring portion arranged inside the cavity, and a holding rack arranged in the cavity; wherein the heating portion comprises at least two sub-heating elements, and a holding rack is arranged between two adjacent sub-heating elements; the stirring portion comprises a stirring shaft and at least two layers of stirring blades, and the holding rack is arranged between two adjacent layers of stirring blades; the holding rack comprises two columns of sub-holding racks, and a gap is provided between the two columns of sub-holding racks, and the gap is used to arrange the stirring shaft so that the stirring shaft can rotate.

[0009] It is worth noting that the present invention is directed to a matrix-integrated target material, which is different from a common target material. The matrix-integrated target material has welding seams, BP steps, BP through holes and BP countersunk holes, which are prone to residual cleaning liquid, making it difficult to remove them during the drying process. The present invention can significantly improve the uniformity of temperature distribution in the drying device by providing stirring blades and a holding rack that are spaced apart from each other, avoid the situation where the local temperature of the target material is too high during the drying process, and at the same time utilize the stirring effect of the stirring blades to improve the removal effect of the cleaning agent at the corners of the target material.

[0010] The drying device provided by the present invention mainly has the following characteristics:

[0011] A. First, the heating element of the present invention is not an integrated design, but is spaced apart from the holding rack, so that there is a certain distance between the heating element and the matrix integrated target on the holding rack, thereby avoiding the situation where the local temperature is too high and affects the performance of the target;

[0012] B. In the present invention, stirring blades are provided on the upper and lower sides of each holding rack. Through the disturbing effect of the stirring blades, on the one hand, the non-uniform heat originally emitted from the heating part can be quickly dispersed, and on the other hand, the airflow on the surface of the target material can be disturbed, thereby improving the removal effect of the cleaning agent in the welding seam, BP step, BP through hole or BP counterbore.

[0013] Preferably, the heating portion comprises an infrared radiation heating element.

[0014] The heating part of the present invention adopts an infrared radiation heating element. Compared with the use of a resistance wire, the heating is more uniform, the bending of the target material during the heating process is avoided, and the qualified rate of the target material after drying is higher.

[0015] Preferably, the sub-heating elements are disposed on both sides of the cavity.

[0016] In the present invention, sub-heating elements are preferably provided on both sides of the cavity, so that infrared radiation heating is performed on both sides relative to each other, resulting in a better heating effect.

[0017] Preferably, there is a gap distance between the sub-heating element and the holding rack, and the gap distance is 2-5 mm, for example, it can be 2 mm, 2.4 mm, 2.7 mm, 3 mm, 3.4 mm, 3.7 mm, 4 mm, 4.4 mm, 4.7 mm or 5 mm.

[0018] The present invention preferably sets the size of the gap distance within the above range, which has a better heating effect and can avoid the target material from bending.

[0019] Preferably, the stirring blades are arc-shaped stirring blades, and the arcs between two adjacent layers of stirring blades are in opposite directions.

[0020] It is worth mentioning that the opposite direction of the arc-shaped stirring blade is very critical for the target material drying of the present invention. The arc-shaped stirring blades arranged in opposite directions can not only realize the rotation and lateral movement of the airflow during the stirring process, but also realize the up and down flipping of the airflow. Through this up and down flipping structure, it is possible to avoid the situation where the inlet and outlet temperatures of the hot gas are too high and the outlet temperature is too low, thereby ensuring the same effect of drying a single batch of target materials, and having the advantages of drying multiple targets at a single time and a high turnover rate.

[0021] Preferably, the ratio of the length of a single arc-shaped stirring blade to the width of the cavity is 0.4 to 0.45:1, for example, it may be 0.4:1, 0.41:1, 0.42:1, 0.43:1, 0.44:1 or 0.45:1.

[0022] The present invention preferably limits the ratio of the length of the arc-shaped stirring blade to the width of the cavity to be within the above range, which can significantly improve the stirring effect.

[0023] Preferably, the arc-shaped stirring blade comprises an outer arc-shaped edge and an inner arc-shaped edge, and the inner arc-shaped edge is the edge of the recess.

[0024] Preferably, the ratio of the arc length of the inner arc edge to the outer arc edge is 0.6-0.8:1, for example, it can be 0.6:1, 0.63:1, 0.65:1, 0.67:1, 0.69:1, 0.72:1, 0.74:1, 0.76:1, 0.78:1 or 0.8:1.

[0025] The present invention limits the depression degree of the arc-shaped stirring blade by limiting the ratio. After various studies, it is found that the airflow has a better drying effect within the above-defined range.

[0026] Preferably, the central angle corresponding to the inner arc edge is 45-60°, for example, it can be 45°, 47°, 49°, 50°, 52°, 54°, 55°, 57°, 59° or 60°.

[0027] Preferably, the drying device further comprises a hot gas inlet arranged at the upper part of the cavity and a hot gas outlet arranged at the lower part of the cavity.

[0028] The invention provides a hot gas inlet and a hot gas outlet, allows gas to flow into the cavity, and provides a heat source externally, thereby enhancing the drying effect.

[0029] The hot gas inlet and the hot gas outlet are arranged on both sides of the cavity.

[0030] Preferably, the stirring part further includes a motor connected to the stirring shaft.

[0031] Preferably, the drying device also includes a connecting portion arranged on the side of the holding rack close to the center of the cavity, the connecting portion includes a first rod portion fixedly connected to the holding rack and a second annular portion for passing through the stirring shaft; the first rod portions connecting the two rows of holding racks are fixedly connected via the second annular portion.

[0032] The present invention fixes the containing rack and realizes the rotation of the rotating shaft through the second annular portion and the first rod portion.

[0033] Preferably, the first rod and the holding rack are arranged at an angle of 120-150°, for example, 120°, 124°, 127°, 130°, 134°, 137°, 140°, 144°, 147° or 150°, etc. This angle setting has stronger stability.

[0034] In a second aspect, the present invention provides a method for drying a matrix-integrated target material, wherein the drying method is performed using the drying device for the matrix-integrated target material described in the first aspect.

[0035] Preferably, the drying method comprises:

[0036] The matrix integrated target is placed on a holding rack, and the heating part and the stirring part are turned on, and hot gas is introduced at the same time for drying.

[0037] Preferably, the stirring speed of the stirring part is 100-200 r / min, for example, it can be 100 r / min, 112 r / min, 123 r / min, 134 r / min, 145 r / min, 156 r / min, 167 r / min, 178 r / min, 189 r / min or 200 r / min.

[0038] Preferably, the hot gas comprises any one of helium, argon or nitrogen or a combination of at least two of them, wherein typical but non-limiting combinations are a combination of helium and argon, a combination of nitrogen and argon, and a combination of helium and nitrogen.

[0039] Preferably, the temperature of the hot gas is 100-120°C, for example, it may be 100°C, 103°C, 105°C, 107°C, 109°C, 112°C, 114°C, 116°C, 118°C or 120°C.

[0040] The present invention preferably sets the stirring speed and the temperature of the hot gas within the above ranges to achieve a better drying effect.

[0041] Preferably, the drying time is 30 to 45 min, for example, 30 min, 32 min, 34 min, 35 min, 37 min, 39 min, 40 min, 42 min, 44 min or 45 min.

[0042] Compared with the prior art, the present invention has at least the following beneficial effects:

[0043] The drying device for the matrix integrated target material provided by the present invention can shorten the drying time of the matrix integrated target material, and the drying uniformity of multiple matrix integrated target materials in a single batch is high, thereby reducing the occurrence of abnormal products and having broad application prospects. BRIEF DESCRIPTION OF THE DRAWINGS

[0044] Figure 1 It is a schematic diagram of a drying device for a matrix-integrated target material provided in Examples 1 to 3 of the present invention.

[0045] In the figure: 1. Motor; 2. Stirring shaft; 3. Stirring blade; 4. Heating part; 5. Hot gas inlet; 6. Hot gas outlet; 7. Holding rack; 100. Matrix integrated target. DETAILED DESCRIPTION

[0046] For the convenience of understanding the present invention, the present invention lists the following embodiments. It should be understood by those skilled in the art that the embodiments are only to help understand the present invention and should not be regarded as specific limitations of the present invention.

[0047] It should be understood that, in the description of the present invention, the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention. In addition, the terms "first", "second", etc. are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined as "first", "second", etc. may explicitly or implicitly include one or more of the features. In the description of the present invention, unless otherwise specified, "multiple" means two or more.

[0048] It should be noted that in the description of the present invention, unless otherwise clearly specified and limited, the terms "disposed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood by specific circumstances.

[0049] Those skilled in the art should understand that the present invention necessarily includes necessary pipelines, conventional valves and general pump equipment for realizing a complete process, but the above content does not belong to the main inventive point of the present invention. Those skilled in the art can add layouts on their own based on the process flow and equipment structure selection, and the present invention does not make special requirements and specific limitations on this.

[0050] Example 1

[0051] This embodiment provides a drying device for a matrix-integrated target material, see Figure 1 The drying device includes a cavity for placing the matrix integrated target 100, a heating part 4 arranged on the inner wall side of the cavity, a stirring part arranged inside the cavity, and a placing rack 7 arranged inside the cavity.

[0052] The heating portion 4 includes at least two sub-heating elements, and a holding frame 7 is arranged between two adjacent sub-heating elements.

[0053] The stirring part includes a stirring shaft 2 and at least two layers of stirring blades 3 , and the containing frame 7 is arranged between two adjacent layers of stirring blades 3 .

[0054] The containing rack 7 includes two rows of sub-containing racks 7 , and a gap is provided between the two rows of sub-containing racks 7 . The gap is used to arrange the stirring shaft 2 so that the stirring shaft 2 can rotate.

[0055] The heating part 4 includes an infrared radiation heating element; the sub-heating elements are arranged on both sides of the cavity.

[0056] There is a gap distance between the sub-heating element and the holding rack 7, and the gap distance is 3.5 mm.

[0057] The stirring blade 3 is an arc-shaped stirring blade 3, and the arcs between two adjacent layers of stirring blades 3 are in opposite directions; the ratio of the length of a single arc-shaped stirring blade 3 to the width of the cavity is 0.42:1; the arc-shaped stirring blade 3 includes an outer arc edge and an inner arc edge, and the inner arc edge is the edge of the recess; the ratio of the arc length of the inner arc edge to the outer arc edge is 0.7:1; the central angle corresponding to the inner arc edge is 55°.

[0058] The drying device further comprises a hot gas inlet 5 arranged at the upper part of the cavity and a hot gas outlet 6 arranged at the lower part of the cavity; the hot gas inlet 5 and the hot gas outlet 6 are arranged at both sides of the cavity.

[0059] The stirring part further includes a motor 1 connected to the stirring shaft 2 .

[0060] The drying device further comprises a connecting portion arranged on the side of the holding rack 7 close to the center of the cavity, the connecting portion comprising a first rod portion fixedly connected to the holding rack 7 and a second annular portion for passing through the stirring shaft 2; the first rod portions connected to the two rows of holding racks 7 are fixedly connected through the second annular portion. The first rod portion is arranged at an angle of 135° with the holding rack 7.

[0061] Example 2

[0062] This embodiment provides a drying device for a matrix-integrated target material, see Figure 1 The drying device includes a cavity for placing the matrix integrated target 100, a heating part 4 arranged on the inner wall side of the cavity, a stirring part arranged inside the cavity, and a placing rack 7 arranged inside the cavity.

[0063] The heating portion 4 includes at least two sub-heating elements, and a holding frame 7 is arranged between two adjacent sub-heating elements.

[0064] The stirring part includes a stirring shaft 2 and at least two layers of stirring blades 3 , and the containing frame 7 is arranged between two adjacent layers of stirring blades 3 .

[0065] The containing rack 7 includes two rows of sub-containing racks 7 , and a gap is provided between the two rows of sub-containing racks 7 . The gap is used to arrange the stirring shaft 2 so that the stirring shaft 2 can rotate.

[0066] The heating part 4 includes an infrared radiation heating element; the sub-heating elements are arranged on both sides of the cavity.

[0067] There is a gap distance between the sub-heating element and the holding rack 7, and the gap distance is 5 mm.

[0068] The stirring blade 3 is an arc-shaped stirring blade 3, and the arcs between two adjacent layers of stirring blades 3 are in opposite directions; the ratio of the length of a single arc-shaped stirring blade 3 to the width of the cavity is 0.45:1; the arc-shaped stirring blade 3 includes an outer arc edge and an inner arc edge, and the inner arc edge is the edge of the recess; the ratio of the arc length of the inner arc edge to the outer arc edge is 0.6:1; the central angle corresponding to the inner arc edge is 60°.

[0069] The drying device further comprises a hot gas inlet 5 arranged at the upper part of the cavity and a hot gas outlet 6 arranged at the lower part of the cavity; the hot gas inlet 5 and the hot gas outlet 6 are arranged at both sides of the cavity.

[0070] The stirring part further includes a motor 1 connected to the stirring shaft 2 .

[0071] The drying device further comprises a connecting portion arranged on the side of the holding rack 7 close to the center of the cavity, the connecting portion comprising a first rod portion fixedly connected to the holding rack 7 and a second annular portion for passing through the stirring shaft 2; the first rod portions connected to the two rows of holding racks 7 are fixedly connected through the second annular portion. The first rod portion is arranged at an angle of 150° with the holding rack 7.

[0072] Example 3

[0073] This embodiment provides a drying device for a matrix-integrated target material, see Figure 1 The drying device includes a cavity for placing the matrix integrated target 100, a heating part 4 arranged on the inner wall side of the cavity, a stirring part arranged inside the cavity, and a placing rack 7 arranged inside the cavity.

[0074] The heating portion 4 includes at least two sub-heating elements, and a holding frame 7 is arranged between two adjacent sub-heating elements.

[0075] The stirring part includes a stirring shaft 2 and at least two layers of stirring blades 3 , and the containing frame 7 is arranged between two adjacent layers of stirring blades 3 .

[0076] The containing rack 7 includes two rows of sub-containing racks 7 , and a gap is provided between the two rows of sub-containing racks 7 . The gap is used to arrange the stirring shaft 2 so that the stirring shaft 2 can rotate.

[0077] The heating part 4 includes an infrared radiation heating element; the sub-heating elements are arranged on both sides of the cavity.

[0078] There is a gap distance between the sub-heating element and the holding rack 7, and the gap distance is 2 mm.

[0079] The stirring blade 3 is an arc-shaped stirring blade 3, and the arcs between two adjacent layers of stirring blades 3 are in opposite directions; the ratio of the length of a single arc-shaped stirring blade 3 to the width of the cavity is 0.4:1; the arc-shaped stirring blade 3 includes an outer arc edge and an inner arc edge, and the inner arc edge is the edge of the recess; the ratio of the arc length of the inner arc edge to the outer arc edge is 0.8:1; the central angle corresponding to the inner arc edge is 45°.

[0080] The drying device further comprises a hot gas inlet 5 arranged at the upper part of the cavity and a hot gas outlet 6 arranged at the lower part of the cavity; the hot gas inlet 5 and the hot gas outlet 6 are arranged at both sides of the cavity.

[0081] The stirring part further includes a motor 1 connected to the stirring shaft 2 .

[0082] The drying device further comprises a connecting portion arranged on the side of the holding rack 7 close to the center of the cavity, the connecting portion comprising a first rod portion fixedly connected to the holding rack 7 and a second annular portion for passing through the stirring shaft 2; the first rod portions connected to the two rows of holding racks 7 are fixedly connected through the second annular portion. The first rod portion is arranged at an angle of 120° with the holding rack 7.

[0083] Example 4

[0084] This embodiment provides a drying device for a matrix integrated target material. The drying device is the same as Embodiment 1 except that the ratio of the arc length of the inner arc edge to the arc length of the outer arc edge is 0.5:1, and the rest is not repeated here.

[0085] Example 5

[0086] This embodiment provides a drying device for a matrix integrated target material. The drying device is the same as Embodiment 1 except that the ratio of the arc length of the inner arc edge to the arc length of the outer arc edge is 0.9:1, and the rest is not repeated here.

[0087] Example 6

[0088] The present embodiment provides a drying device for a matrix-integrated target material. The drying device is the same as that of Embodiment 1 except that there is a gap distance of 10 mm between the sub-heating element and the holding rack, and the rest thereof will not be described again.

[0089] Example 7

[0090] The present embodiment provides a drying device for a matrix-integrated target material. The drying device is the same as that of Embodiment 1 except that there is a gap distance of 1 mm between the sub-heating element and the holding rack, and the rest thereof will not be described again.

[0091] Example 8

[0092] This embodiment provides a drying device for a matrix-integrated target material. Except that the heating part of the drying device is a resistance wire, the rest of the drying device is the same as that of Embodiment 1, and will not be described again here.

[0093] Example 9

[0094] This embodiment provides a drying device for a matrix-integrated target material. The drying device is the same as Embodiment 1 except that the central angle of the inner arc edge is 80°, and the details are not described again.

[0095] Example 10

[0096] This embodiment provides a drying device for a matrix-integrated target material. The drying device is the same as Embodiment 1 except that the central angle of the inner arc edge is 30°, and the details are not described again.

[0097] Embodiment 11

[0098] This embodiment provides a drying device for a matrix-integrated target material. The drying device is the same as Embodiment 1 except that a hot gas outlet and a hot gas inlet are not provided, and the details are not repeated here.

[0099] Example 12

[0100] The present embodiment provides a drying device for a matrix-integrated target material. The drying device is the same as that of Embodiment 1 except that the arc directions between two adjacent layers of stirring blades are the same, and details thereof will not be repeated here.

[0101] Comparative Example 1

[0102] This comparative example provides a drying device for a matrix-integrated target material. The drying device is the same as Example 1 except that a stirring portion is not provided, and details thereof will not be repeated here.

[0103] Comparative Example 2

[0104] This comparative example provides a drying device for a matrix-integrated target material. The drying device is the same as Example 1 except that the lower part of the last holding rack is not provided with stirring blades and sub-heating elements, and the rest is not described again.

[0105] Application Example 1

[0106] This application example provides a method for drying a matrix-integrated target material. The method for drying a matrix-integrated target material is performed using the drying device for the matrix-integrated target material provided in Example 1, and specifically includes:

[0107] The matrix integrated target is placed on a holding rack, and the heating part and the stirring part are turned on. The stirring speed is 150 r / min. At the same time, hot gas (helium) at a temperature of 110° C. is introduced for drying for 32 minutes to obtain a dried matrix integrated target.

[0108] Application Example 2

[0109] This application example provides a method for drying a matrix-integrated target material. The method for drying a matrix-integrated target material is performed using the drying device for the matrix-integrated target material provided in Example 2, and specifically includes:

[0110] The matrix integrated target is placed on a holding rack, and the heating part and the stirring part are turned on. The stirring speed is 1100 r / min. At the same time, hot gas (nitrogen) at a temperature of 120° C. is introduced for drying for 30 minutes to obtain a dried matrix integrated target.

[0111] Application Example 3

[0112] This application example provides a method for drying a matrix-integrated target material. The method for drying a matrix-integrated target material is performed using the drying device for the matrix-integrated target material provided in Example 3, and specifically includes:

[0113] The matrix integrated target is placed on a holding rack, and the heating part and the stirring part are turned on. The stirring speed is 1200 r / min. At the same time, hot gas (argon) at a temperature of 100° C. is introduced for drying for 45 minutes to obtain a dried matrix integrated target.

[0114] Application Examples 4 to 12 and Comparative Application Examples 1 to 2

[0115] Application Examples 4 to 12 and Application Comparative Examples 1 to 2 provide a method for drying a matrix-integrated target material. The method for drying a matrix-integrated target material is the same as that of Application Example 1 except that the drying devices for the matrix-integrated target material in Examples 4 to 12 and Comparative Examples 1 to 2 are used respectively, and will not be described in detail here. If there are no related components, no related operations are performed.

[0116] For the convenience of statistics, the above drying devices all use 4 layers of upper and lower holding racks, which can process 8 matrix integrated target materials at a time. However, the present invention can also be applied to other numbers of holding racks to achieve the same drying effect.

[0117] Test method: During the drying process, the temperature of a total of 9 test points including the top, middle, bottom, left, middle and right in the entire cavity is monitored in real time, and the maximum temperature difference of the 9 test points at the same time point is counted as the temperature extreme value to calculate the uniformity of the drying process; and the flatness of the matrix integrated target material after drying is tested, and the worst flatness in a single batch is used to evaluate whether deflection occurs during the drying process; and the BP steps, welds, BP countersunk holes and BP through holes are observed to see if there is any liquid phase residue. If so, the number of matrix integrated targets with liquid phase residue in a single batch is divided by the total number, which is recorded as the drying failure rate (only used to judge the effect of liquid phase drying).

[0118] The test results of the above application examples and application comparison examples are shown in Table 1.

[0119] Table 1

[0120]

[0121]

[0122] From Table 1 we can see that:

[0123] (1) It can be seen from the application examples 1 to 3 that the drying device for the matrix integrated target provided by the present invention has the advantages of short drying time and being able to dry multiple matrix integrated targets at a time. Moreover, during drying, the temperature range is within 1°C, the flatness of the matrix integrated target after drying is within 0.3 μm, and the drying failure rate is 0, which has broad application prospects.

[0124] (2) It can be seen from the comprehensive application examples 1 and application examples 4 to 5 that the ratio of the arc length of the inner arc edge to the outer arc edge in application example 1 is 0.7:1. Compared with 0.5:1 and 0.9:1 respectively used in application examples 4 to 5, the temperature extreme difference in application example 1 is only 0.8°C, the flatness is only 0.2μm, and the drying failure rate is 0, while the temperature extreme difference in application examples 4 to 5 is as high as 2.3°C and 3.5°C respectively, and the flatness in application example 5 is as high as 2.0μm, and samples with residual detergent appear in application examples 4 to 5. This shows that the ratio of the arc length of the inner arc edge to the outer arc edge determines the width ratio of the widest part to the narrowest part of the entire arc-shaped stirring blade, which has a key influence on the disturbance of the airflow. The present invention can further improve the uniformity of drying and the success rate of drying by preferably adopting a reasonable range of ratios;

[0125] (3) It can be seen from the combined application examples 1 and 6-7 that the gap distance in application example 1 is 3.5 mm. Compared with 10 mm and 1 mm respectively used in application examples 6-7, the temperature extreme difference in application example 1 is only 0.8°C, the flatness is only 0.2 μm, and the drying failure rate is 0. However, the temperature extreme difference in application example 7 is as high as 12.5°C, and the failure rate in application example 6 is as high as 25%. This shows that the distance between the heating component and the target material will be conducive to the full diffusion of heat and avoid the situation where the local temperature is too high. The present invention can further improve the uniformity of drying and the success rate of drying by preferably using a gap distance within a reasonable range;

[0126] (4) It can be seen from the combination of Application Example 1 and Application Example 8 that the infrared radiation heating element used in Application Example 1 is only 0.8°C, the flatness is only 0.2μm, and the drying failure rate is 0, compared with the resistance wire used in Application Example 8. However, the temperature difference in Application Example 8 is as high as 15.4°C and the flatness is as high as 12.3μm. This shows that the use of infrared radiation heating components is more conducive to improving the uniformity of drying and avoiding the bending of the target material.

[0127] (5) It can be seen from the combined application examples 1 and 9 to 10 that the present invention can further improve the uniformity of drying and the success rate of drying by preferably adopting a suitable range of the central angle;

[0128] (6) It can be seen from the combined application examples 1 and 11 that if the hot gas outlet and hot gas inlet are not provided, the upward and downward flow of the gas phase will be reduced, and the heat source of the hot gas will be reduced, and the success rate of drying will be significantly reduced;

[0129] (7) It can be seen from Application Example 1 and Application Example 12 that the arc directions between the two adjacent layers of stirring blades are the same, resulting in no up and down flipping effect of the airflow. Since the hot gas enters from the upper part and flows out from the lower part, the drying success rate of the matrix integrated target material in the lower two layers is low, and the temperature difference inside is large;

[0130] (8) It can be seen from the comprehensive application example 1 and the application comparison examples 1-2 that the stirring part and ensuring that stirring blades are provided on both the upper and lower sides of each holding rack are very important for improving the temperature uniformity and the success rate of drying.

[0131] The present invention illustrates the detailed features of the present invention through the above embodiments, but the present invention is not limited to the above detailed features, that is, it does not mean that the present invention must rely on the above detailed features to be implemented. Those skilled in the art should understand that any improvement to the present invention, equivalent replacement of the technical features selected by the present invention, addition of auxiliary technical features, selection of specific methods, etc., all fall within the protection scope and disclosure scope of the present invention.

Claims

1. A drying device for a matrix integrated target material, characterized in that: The drying device comprises a cavity for placing a matrix integrated target material, a heating part arranged on the inner wall side of the cavity, a stirring part arranged inside the cavity, and a placing rack arranged inside the cavity; Wherein, the heating part comprises at least two sub-heating elements, and a holding rack is arranged between two adjacent sub-heating elements; The stirring part comprises a stirring shaft and at least two layers of stirring blades, and the containing rack is arranged between two adjacent layers of stirring blades; The containing rack comprises two rows of sub-containing racks, and a gap is provided between the two rows of sub-containing racks. The gap is used to arrange the stirring shaft so that the stirring shaft can rotate.

2. The drying device according to claim 1, characterized in that: The heating part includes an infrared radiation heating element; Preferably, the sub-heating elements are disposed on both sides of the cavity.

3. The drying device according to claim 1 or 2, characterized in that: There is a gap distance between the sub-heating element and the containing rack, and the gap distance is 2-5 mm.

4. The drying device according to any one of claims 1 to 3, characterized in that: The stirring blades are arc-shaped stirring blades, and the arcs between two adjacent layers of stirring blades face in opposite directions; Preferably, the ratio of the length of a single arc-shaped stirring blade to the width of the cavity is 0.4 to 0.45:1; Preferably, the arc-shaped stirring blade comprises an outer arc-shaped edge and an inner arc-shaped edge, and the inner arc-shaped edge is the edge of the concave portion; Preferably, the ratio of the arc length of the inner arc-shaped edge to the arc length of the outer arc-shaped edge is 0.6-0.8:1; Preferably, the central angle corresponding to the inner arc edge is 45-60°.

5. The drying device according to any one of claims 1 to 4, characterized in that: The drying device further comprises a hot gas inlet disposed at the upper portion of the cavity and a hot gas outlet disposed at the lower portion of the cavity; The hot gas inlet and the hot gas outlet are arranged on both sides of the cavity.

6. The drying device according to any one of claims 1 to 5, characterized in that: The stirring part also includes a motor connected to the stirring shaft; Preferably, the drying device further comprises a connecting portion arranged on one side of the holding rack close to the center of the cavity, the connecting portion comprising a first rod portion fixedly connected to the holding rack and a second annular portion for passing through the stirring shaft; the first rod portions connecting the two rows of holding racks are fixedly connected via the second annular portion; Preferably, the first rod portion and the containing rack are arranged at an angle of 120-150°.

7. A method for drying a matrix integrated target material, characterized in that: The drying method is carried out using the drying device for the matrix-integrated target material according to any one of claims 1 to 6.

8. The drying method according to claim 7, characterized in that: The drying method comprises: The matrix integrated target is placed on a holding rack, and the heating part and the stirring part are turned on, and hot gas is introduced at the same time for drying.

9. The drying method according to claim 8, characterized in that: The stirring speed of the stirring part is 100-200 r / min.

10. The drying method according to claim 8 or 9, characterized in that: The hot gas includes any one of helium, argon or nitrogen, or a combination of at least two of them; Preferably, the temperature of the hot gas is 100-120°C; Preferably, the drying time is 30 to 45 minutes.

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