Light source coupled magnetic domain imaging device and method

Abstract

The invention discloses a light source coupled magnetic domain imaging device and method, and belongs to the technical field of magnetic domain imaging. The device comprises: an optical fiber assembly connected in front of a polarizer, the optical fiber assembly comprising at least two optical fibers; the wavelength division multiplexer is connected in front of the optical fiber assembly, and the light source assembly is connected with the wavelength division multiplexer; adjustable optical attenuators which are connected between the wavelength division multiplexer and the optical fiber assembly and are in one-to-one correspondence with the at least two optical fibers; the lens assembly is at least arranged on an incident light path of a measured object, light emitted from the at least two optical fibers enters different positions of the lens assembly through the polarizer to reach the measured object, the light emitted from the at least two optical fibers is parallel, and light reflected by the measured object enters a camera at least through the lens assembly and the polarization analyzer.

Description

Technical Field

[0001] The present invention relates to the field of magnetic domain imaging technology, and in particular to a light source coupled magnetic domain imaging device and method. Background Art

[0002] In the current magnetic domain imaging equipment, the detection light emitted from the light source reaches the object to be measured after passing through the polarizer, objective lens and other lens groups, and the light reflected by the object to be measured then passes through the objective lens and other lens groups and the analyzer and enters the camera, so that the camera can collect the magnetic domain image. There are the following problems:

[0003] 1) After the position of the light source is fixed, the detection light it emits can only reach the object under test with a fixed incident direction or incident plane. In some cases, according to the magnetic domain state of the object under test, it is necessary to choose to use the polar magneto-optical Kerr effect or the longitudinal magneto-optical Kerr effect to image the object under test. The polar magneto-optical Kerr effect requires the incident light to irradiate the object under test vertically, and the longitudinal Kerr effect requires the incident light to irradiate the object under test at an angle and the incident plane of the incident light needs to be parallel to the direction of the magnetic domain under test. In the case where the magnetic domain state of the object under test is unclear, the optical path of the incident light needs to be adjusted multiple times to meet the imaging requirements. The existing magnetic domain imaging equipment cannot adjust or change the incident plane or incident direction of the detection light, and cannot adapt to the different detection requirements of the object under test.

[0004] 2) After the position of the object to be measured is determined, the optical axis of the detection light emitted by the light source is required to be aligned with the object to be measured, and the light spot formed by the detection light is located at the measured position of the object to be measured. The light spot is usually several microns, which requires high accuracy of the optical path structure. At the same time, it also puts forward certain requirements on the position and angle of the light source, resulting in an increase in the maintenance cost of the magnetic domain imaging equipment.

[0005] 3) Current magnetic domain imaging devices mostly use a single light source and a black-and-white camera, which can only produce single-frame images. When multiple measurements of the object need to be performed, the optical path needs to be adjusted multiple times and the images need to be taken separately, resulting in a slow imaging speed. Summary of the invention

[0006] The present invention provides a light source coupled magnetic domain imaging device and method, which are used to solve at least one of the above technical problems.

[0007] The present invention adopts the following technical solutions:

[0008] On the one hand, the present invention provides a light source coupled magnetic domain imaging device, the device comprising: an optical fiber assembly connected before a polarizer, the optical fiber assembly comprising at least two optical fibers; a wavelength division multiplexer connected before the optical fiber assembly, and a light source assembly connected to the wavelength division multiplexer; an adjustable optical attenuator connected between the wavelength division multiplexer and the optical fiber assembly and corresponding one-to-one to the at least two optical fibers; a lens assembly at least arranged in the incident light path of the object to be measured, the light emitted from the at least two optical fibers respectively enters different positions of the lens assembly through the polarizer to reach the object to be measured, and the light emitted from the at least two optical fibers is parallel, and the light reflected by the object to be measured enters the camera after at least passing through the lens assembly and the analyzer.

[0009] In a possible implementation of the present invention, the optical fiber assembly includes three optical fibers, and the light-emitting end faces of the three optical fibers are arranged in an L shape.

[0010] In a possible implementation of the present invention, the light source assembly includes a three-color LED lamp.

[0011] On the other hand, the present invention also provides a light source coupled magnetic domain imaging method, which uses a light source coupled magnetic domain imaging device as described above, and the method includes: controlling the light source component including a three-color LED lamp to generate emission light in a preset manner; adjusting the on-off of the at least two optical fibers by an adjustable optical attenuator, so that the emission light that has at least passed through the wavelength division multiplexer reaches the object to be measured through different positions of the incident lens component with a preset incident surface or incident direction, so that the magnetic domain imaging device obtains a magnetic domain image.

[0012] In a possible implementation of the present invention, the method also includes: controlling the three-color LED lights to light up at different times; when one of the three-color LED lights lights up to generate emitted light, adjusting the at least two optical fibers to pass light in sequence through the adjustable optical attenuator, so that the emitted light reaches the object to be measured through different positions of the incident lens assembly and at different incident surfaces or incident directions, so that the magnetic domain imaging device obtains the magnetic domain image of the object to be measured under the three different incident surfaces or incident directions of the emitted light.

[0013] In a possible implementation of the present invention, the method also includes: controlling two of the three-color LED lights to light up at staggered times; when one of the three-color LED lights lights up to generate emitted light, turning on the adjustable optical attenuator connected to the optical fiber corresponding to the first incident surface or incident direction, so that the emitted light passes through the first position of the incident lens assembly and reaches the object to be measured at the first incident surface or incident direction; when the other of the three-color LED lights lights up to generate emitted light, turning on the adjustable optical attenuator connected to the optical fiber different from the optical fiber corresponding to the first incident surface or incident direction, so that the emitted light passes through other positions of the incident lens assembly different from the first position and reaches the object to be measured at other incident surfaces or incident directions different from the first incident surface or incident direction, so that the magnetic domain imaging device obtains the magnetic domain image of the object to be measured under the two different incident surfaces or incident directions of the emitted light.

[0014] In a possible implementation of the present invention, the method also includes: turning on the adjustable optical attenuator connected to the optical fiber corresponding to the second incident surface or incident direction; controlling the three-color LED lights to light up at staggered times so that the emitted light passes through the second position of the incident lens assembly and reaches the object to be measured at the second incident surface or incident direction, thereby allowing the magnetic domain imaging device to obtain the magnetic domain image of the object to be measured under the three emitted lights and the same incident surface or incident direction.

[0015] In a possible implementation of the present invention, the method also includes: controlling the three-color LED lights to light up; adjusting the light transmission of one of the at least two optical fibers through the adjustable optical attenuator; the imaging device in the magnetic domain imaging device uses a color camera, and the color camera is used to collect three magnetic domain images of the object under test in three colors.

[0016] In a possible implementation of the present invention, when the optical fiber assembly includes three optical fibers whose light-emitting end faces are arranged in an L shape, the method also includes: making the emitted light of the optical fiber located at the L-shaped corner among the three optical fibers vertically incident on the object to be measured; controlling the three-color LED lights to light up at staggered times; when the three-color LED lights light up in sequence, turning on the adjustable optical attenuators connected to the three optical fibers in sequence; the imaging device in the magnetic domain imaging device uses a color camera, and the color camera is used to collect three magnetic domain images of the object to be measured in the transverse polar and longitudinal directions.

[0017] In a possible implementation of the present invention, the imaging device in the magnetic domain imaging device adopts a color camera. When the magnetic domain image captured by the color camera is a composite image including at least two emission lights, the method further includes: performing image decomposition on the composite image according to wavelength and / or color.

[0018] The present invention provides a light source coupled magnetic domain imaging device and method, which has the following beneficial effects:

[0019] The magnetic domain imaging device in the present invention controls the light transmission by using an optical fiber component in combination with an adjustable optical attenuator. Different optical fibers can make the detection light enter different positions of the lens component, thereby changing the incident surface or incident direction of the detection light entering the object to be measured, so that the magnetic domain imaging device can meet different detection requirements of the object to be measured. At the same time, the light source component is implemented by a three-color LED lamp, which is low in cost. After the position of the optical fiber component is fixed, the position of the light source component can be placed or changed at will, which reduces the maintenance cost of the optical path structure and also reduces the detection accuracy of the optical path structure. It is sufficient as long as the detection light can reach the object to be measured through the optical fiber component. In addition, the camera uses a color camera, which can obtain multiple magnetic domain images in one exposure, and realize fast imaging and simultaneous imaging of the object to be measured in different colors. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the technical solutions in the present invention or the prior art, the following briefly introduces the drawings required for use in the embodiments or the prior art descriptions. Obviously, the drawings described below are only some embodiments recorded in the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work. In the drawings:

[0021] Figure 1 A light path structure diagram of a light source coupled magnetic domain imaging device provided by the present invention;

[0022] Figure 2 A flow chart of a light source coupled magnetic domain imaging method provided by the present invention;

[0023] Figure 3 A schematic diagram of changing the incident direction provided by the present invention.

[0024] in:

[0025] 101. light source assembly, 1011. red LED light, 1012. blue LED light, 1013. green LED light, 102. wavelength division multiplexer, 103. adjustable optical attenuator, 104. optical fiber assembly, 105. polarizer, 106. beam splitter, 107. objective lens, 108. object to be measured, 109. analyzer, 110. camera, 111. control / processor, 301. detection light. DETAILED DESCRIPTION

[0026] In order to enable those skilled in the art to better understand the technical solutions in the present invention, the technical solutions in the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of this specification, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the present invention.

[0027] The method of the present invention is described in detail below with reference to the accompanying drawings.

[0028] Figure 1 The optical path structure diagram of a magnetic domain imaging device coupled with a light source provided by the present invention is as follows: Figure 1 As shown, the magnetic domain imaging device in the present invention at least includes:

[0029] The light source assembly 101, Figure 1 The three-color LED lamp shown in FIG. 1 includes a red LED lamp 1011 , a blue LED lamp 1012 , and a green LED lamp 1013 , which are mainly used to provide detection light 301 for the magnetic domain imaging device.

[0030] The wavelength division multiplexer 102 is connected to the light source assembly 101 and is used to multiplex the detection light 301 emitted by the three-color LED lamp to synthesize a beam of light, which can be either monochromatic light, multi-color composite light, or white light according to the on and off of the three-color LED lamp.

[0031] The adjustable optical attenuator 103 and the optical fiber assembly 104 are composed of N optical fibers bundled together. To ensure that the detection light 301 can reach the object 108 under test in different incident directions or incident planes, the value of N is limited to be greater than or equal to 2. Figure 1 The optical fiber assembly 104 is composed of five optical fibers, and the five optical fibers are respectively connected to a corresponding adjustable optical attenuator 103, and the adjustable optical attenuator 103 can be used to control whether the optical fiber passes light or not.

[0032] In one example, in order to detect the longitudinal magnetic domain, the transverse magnetic domain and the polar magnetic domain of the object 108, the optical fiber assembly 104 of the present invention is provided as follows: Figure 1 The arrangement of the five optical fibers shown in the figure may also include three optical fibers arranged in an "L" shape, and when the optical fibers at the corners of the "L" shape arrangement are lighted, the detection light 301 can be vertically incident on the object to be measured 108. Specifically, the light emitted by the optical fibers at the corners of the "L" shape arrangement can be coaxial with the optical axis of the illumination light path.

[0033] The polarizer 105 is used to convert the detection light 301 into polarized light.

[0034] Lens assembly (including Figure 1The beam splitter 106 and the objective lens 107 are arranged in front of the object 108 to be measured, and the detection light 301 reaches the object 108 to be measured through the incident lens assembly.

[0035] In order to allow the detection light 301 reflected by the object 108 to enter the camera 110 and reduce the difficulty of building the optical path, a spectroscope 106 is further arranged in the optical path before the objective lens 107 . The light reflected by the object 108 passes through the objective lens 107 and the spectroscope 106 and then enters the analyzer 109 and then enters the camera 110 .

[0036] like Figure 1 As shown, a control / processor 111 is also provided in the optical path structure, which is mainly connected to the light source assembly 101, the adjustable light attenuator 103 and the camera 110, and is used to control the three devices to cooperate with each other during the magnetic domain imaging process, so that the camera 110 can collect the magnetic domain image with the incident direction or incident surface changed. The specific control process can be found in the method embodiment and related descriptions, and this embodiment will not be repeated here.

[0037] In the above optical path structure, the light source assembly 101, the wavelength division multiplexer 102, the adjustable optical attenuator 103, the optical fiber assembly 104, the polarizer 105, the beam splitter 106 and the objective lens 107 constitute the incident optical path of the object to be measured 108, and the objective lens 107, the beam splitter 106 and the analyzer 109 constitute the output optical path of the object to be measured 108, that is, the detection light 301 emitted by the three-color LED lamp is converted into polarized light after passing through the wavelength division multiplexer 102, the adjustable optical attenuator 103, the optical fiber assembly 104 and the polarizer 105, and the polarized light reaches the object to be measured 108 through the beam splitter 106 and the objective lens 107, and the light reflected by the object to be measured 108 passes through the objective lens 107 and the beam splitter 106 and enters the camera 110 through the analyzer 109, so that the camera 110 collects the magnetic domain image of the object to be measured 108.

[0038] It should be noted that Figure 1 The optical path structure shown is only an exemplary description of this embodiment and is not used to limit the specific optical path structure. In actual use, the polarizer 105, the optical fiber assembly 104 and other optical devices can be arranged in the incident light path of the object to be measured 108, and their sequence is not limited. At the same time, the composition form of the light source assembly 101, the number of optical fibers of the optical fiber assembly 104, etc. are also exemplary descriptions, and can be replaced or adjusted according to imaging requirements in actual use.

[0039] based on Figure 1 The optical path structure shown in the figure, the magnetic domain imaging method in the present invention at least includes the following execution steps:

[0040] Step 201: Control a light source assembly including a three-color LED lamp to generate emitted light in a preset manner.

[0041] Step 202, adjusting the on / off of at least two optical fibers by an adjustable optical attenuator, so that the emitted light passing through at least the wavelength division multiplexer reaches the object to be measured through different positions of the incident lens assembly with a preset incident surface or incident direction, so that the magnetic domain imaging device obtains a magnetic domain image.

[0042] The emission light from the three-color LED lamp, i.e., the aforementioned detection light 301, is combined by the wavelength division multiplexer 102, and then emitted from the corresponding optical fiber through the turned-on adjustable optical attenuator 103 to enter the polarizer 105, and then enters the object to be measured 108 through the lens components such as the beam splitter 106 and the objective lens 107. In this process, turning on different adjustable optical attenuators 103 can allow light to pass through different optical fibers, so that the detection light 301 can enter different positions of the objective lens 107, and finally reach the object to be measured 108 with different incident surfaces or incident directions, so as to meet different detection requirements for the object to be measured 108. Figure 3 (a) and Figure 3 As shown in (b), the detection light 301 emitted from the light-emitting surface enters different positions of the lens group and reaches the object to be measured 108 in different incident directions. Figure 3 The detection light 301 in (a) enters the left side of the lens group and reaches the object 108 from the left side of the central axis of the object 108. Figure 3 The detection light 301 in (b) is incident on the right side of the lens group and reaches the object 108 from the right side of the central axis of the object 108. The position of the incident lens group of the detection light 301 is changed by passing light through different optical fibers, so that the detection light 301 reaches the object 108 with different incident directions.

[0043] In one example, by controlling the light emission mode of the three-color LED lamp and the opening and closing of the adjustable light attenuator 103 through the control / processor 111, the following can be achieved:

[0044] Magnetic domain images of the object 108 under three types of emitted light with different incident planes or incident directions: by controlling the three-color LED lights to light up at different times, when one of the three-color LED lights lights up, at least two optical fibers are controlled to pass light in sequence by the opening and closing of the adjustable optical attenuator 103, so that the emitted light (that is, the aforementioned detection light 301) can be incident on different positions of the lens assembly and reach the object 108 under different incident planes or incident directions, and the light reflected from the object 108 enters the camera 110 after passing through the lens assembly and the analyzer 109 to obtain a magnetic domain image. Thus, the magnetic domain images of the object 108 under three types of emitted light and different incident planes or incident directions can be obtained.

[0045] For example, when the optical fiber assembly 104 includes two optical fibers, the three-color LED lights are controlled to light up at different times. It is assumed that the red LED light 1011 is controlled to light up first, then the blue LED light 1012 is controlled to light up, and finally the green LED light 1013 is controlled to light up. In each time period when the LED lights are on, the two optical fibers are controlled by the adjustable optical attenuator 103 to pass light in sequence. In this way, in a time period when one LED light is on, the emitted light can reach the object under test 108 through the two optical fibers with different incident planes or incident directions, and finally the camera 110 collects six magnetic domain images of the object under test 108 in three colors and two incident planes or incident directions.

[0046] Magnetic domain images of the object 108 under two different incident planes or incident directions of the emitted light: by controlling two of the three-color LED lights to light up at different times, when one of the two LED lights lights up, at least two optical fibers are controlled to pass light in sequence by opening and closing the adjustable optical attenuator 103, so that the emitted light (that is, the aforementioned detection light 301) can be incident on different positions of the lens assembly and reach the object 108 under different incident planes or incident directions. The light reflected from the object 108 enters the camera 110 after passing through the lens assembly and the analyzer 109 to obtain a magnetic domain image. Thus, the magnetic domain images of the object 108 under two different incident planes or incident directions can be obtained. Alternatively, when one of the two LED lights is on, the adjustable optical attenuator 103 connected to the optical fiber corresponding to the first incident direction or incident surface is controlled to be turned on, so that the corresponding optical fiber can pass light so that the emitted light can reach the object under test 108 at the first incident surface or incident direction. When the other of the two LED lights is on, the adjustable optical attenuator 103 connected to the optical fiber corresponding to the second incident surface or incident direction is controlled to be turned on, so that the corresponding optical fiber can pass light so that the emitted light can reach the object under test 108 at the second incident surface or incident direction. The light reflected from the object under test 108 enters the camera 110 after passing through the lens assembly and the analyzer 109 to obtain a magnetic domain image. Thus, the magnetic domain image of the object under test 108 in two emitted lights and different incident surfaces or incident directions can be obtained. It should be noted that the aforementioned second incident surface or incident direction is different from the first incident surface or incident direction.

[0047] For example, when the optical fiber assembly 104 includes two optical fibers, the red LED light 1011 and the blue LED light 1012 in the three-color LED light are controlled to light up at staggered times. Assume that the red LED light 1011 is controlled to light up first, and then the blue LED light 1012 is controlled to light up. In each time period when the LED light is on, the two optical fibers are controlled by the adjustable optical attenuator 103 to pass light in sequence. In this way, in a time period when the LED light is on, the emitted light can reach the object to be measured 108 through the two optical fibers with different incident planes or incident directions, and finally the camera 110 collects four magnetic domain images of the object to be measured 108 in two colors and two incident planes or incident directions.

[0048] Magnetic domain images of the object 108 under three kinds of emitted light and the same incident plane or incident direction: by continuously turning on the adjustable optical attenuator 103 connected to any one of the optical fibers, allowing light to pass through any one of the optical fibers, controlling the three-color LED lights to light up at staggered times to generate emitted light, so that the emitted light can reach the object 108 under the incident plane or incident direction corresponding to any one of the optical fibers, and the light reflected from the object 108 enters the camera 110 after passing through the lens assembly and the analyzer 109 to obtain a magnetic domain image. Thus, three magnetic domain images of the object 108 under three kinds of emitted light and the same incident plane or incident direction can be obtained.

[0049] Similarly, if two of the three-color LED lights are controlled to light up at different times, and the adjustable optical attenuator 103 connected to the optical fiber corresponding to the first incident surface or incident direction is turned on to allow light to pass through the corresponding optical fiber, two magnetic domain images of the object under test 108 under two emitted lights and the same incident surface or incident direction can be obtained.

[0050] Through the above process, it is possible to arbitrarily change the incident surface or incident direction when detecting the object 108 to meet different detection requirements of the object 108, and the change of different incident surfaces or incident directions can be achieved only by controlling the LED and the adjustable optical attenuator 103. The control method is simple and the cost of the optical path structure is low. At the same time, after the position of the optical fiber component 104 is fixed, the position of the light source component 101 can be changed at will, which reduces the maintenance cost of the optical path structure. The angle and position requirements of the detection light 301 emitted by the optical fiber component 104 are low, which also reduces the accuracy requirements of the optical path structure.

[0051] In addition, by using the present invention to obtain the corresponding magnetic domain image, it is possible to compare the magnetic domain images of emitted light of different colors with the same incident surface or incident direction to find out the quality of the imaging effect of the current object 108 under test when the emitted light is of a certain color; it is also possible to compare the magnetic domain images of emitted light of the same color with different incident surfaces or incident directions to meet the imaging requirements of different magnetic domains on the object 108 under test; it is also possible to piece together the magnetic domain images of different colors, different incident surfaces or incident directions to obtain a three-dimensional magnetic domain image that can reflect different magnetic domains in one picture; it is also possible to obtain a magnetic domain image with better effect based on the combination of the color, incident direction or incident surface of the emitted light with better imaging effect.

[0052] In one example, to achieve rapid imaging, the camera 110 in the optical path structure of the present invention may adopt a color camera, which can realize the acquisition of magnetic domain images of the object under test 108 in three colors / wavelengths by a single exposure. Specifically, all three-color LED lights are controlled to light up, and at least one of the two optical fibers is allowed to pass light by turning on the adjustable optical attenuator 103, so that the emission light generated by the three-color LED lights reaches the object under test 108 as an incident light or incident direction, and the light reflected from the object under test 108 passes through the lens assembly and the analyzer 109 and enters the color camera, so that the color camera can acquire a composite magnetic domain image of the object under test 108 in three colors at one time, or acquire three magnetic domain images of the object under test 108 in three colors, so that multiple magnetic domain images can be acquired at one time.

[0053] Furthermore, if the image captured by the color camera is a composite magnetic domain image, the composite magnetic domain image will be decomposed according to color / wavelength to obtain three magnetic domain images in different colors.

[0054] In one example, in order to detect the transverse, polar and longitudinal Kerr effects of the object under test 108, the optical fiber assembly 104 in the optical path structure is required to include at least three optical fibers distributed in an "L" shape, and the light emitted from the optical fiber at the "L"-shaped corner can be vertically incident on the object under test 108. In this way, by controlling the three-color LED lights to light up at staggered times, when the three-color LED lights light up in sequence, the adjustable optical attenuators 103 connected to the "L"-shaped optical fibers are turned on in sequence, so that the emitted light reaches the object under test 108, and the light reflected from the object under test 108 enters the color camera after passing through the lens assembly and the analyzer 109, so that the color camera can collect three magnetic domain images of the transverse magnetic domain, polar magnetic domain and longitudinal magnetic domain of the object under test 108.

[0055] Assume that when the red LED light 1011 is on, the adjustable optical attenuator 103 connected to the optical fiber above the corner in the "L"-shaped distribution optical fiber is turned on to allow light to pass through the optical fiber above the "L"-shaped corner; when the blue LED light 1012 is on, the adjustable optical attenuator 103 connected to the optical fiber at the corner in the "L"-shaped distribution optical fiber is turned on to allow light to pass through the optical fiber at the "L"-shaped corner; when the green LED light 1013 is on, the adjustable optical attenuator 103 connected to the optical fiber on the right side of the corner in the "L"-shaped distribution optical fiber is turned on to allow light to pass through the optical fiber on the right side of the "L"-shaped corner; the light reaching the object 108 is reflected by the object 108, enters the color camera through the lens assembly and the analyzer 109, and the color camera collects three magnetic domain images of the transverse magnetic domain, the longitudinal magnetic domain, and the polar magnetic domain of the object 108.

[0056] It should be noted that, in the above process, the exposure time of the color camera should be greater than the total time of the three-color LEDs lighting up at different times, so as to ensure effective imaging of the color camera.

[0057] Each embodiment of the present invention is described in a progressive manner, and the same or similar parts between the embodiments can be referred to each other, and each embodiment focuses on the differences from other embodiments. In particular, for the IoT device and medium embodiments, since they are basically similar to the method embodiments, the description is relatively simple, and the relevant parts can be referred to the partial description of the method embodiments.

[0058] Those skilled in the art will appreciate that embodiments of the present invention may be provided as methods, systems, or computer program products. Therefore, the present invention may take the form of a complete hardware embodiment, a complete software embodiment, or an embodiment combining software and hardware. Moreover, the present invention may take the form of a computer program product implemented on one or more computer-usable storage media (including but not limited to disk storage, CD-ROM, optical storage, etc.) containing computer-usable program code.

[0059] It should also be noted that the terms "include", "comprises" or any other variations thereof are intended to cover non-exclusive inclusion, so that a process, method, commodity or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, commodity or device. In the absence of more restrictions, the elements defined by the sentence "comprises a ..." do not exclude the existence of other identical elements in the process, method, commodity or device including the elements.

[0060] The above are only embodiments of the present invention and are not intended to limit the present invention. For those skilled in the art, the present invention may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. A light source coupled magnetic domain imaging device, characterized in that: The device comprises: An optical fiber assembly connected before the polarizer, the optical fiber assembly comprising at least two optical fibers; A wavelength division multiplexer connected before the optical fiber assembly, and a light source assembly connected to the wavelength division multiplexer; An adjustable optical attenuator connected between the wavelength division multiplexer and the optical fiber assembly and corresponding one-to-one to the at least two optical fibers; A lens assembly is at least arranged in the incident light path of the object to be measured, and the light emitted from the at least two optical fibers is incident on different positions of the lens assembly through a polarizer to reach the object to be measured, and the light emitted from the at least two optical fibers is parallel, and the light reflected by the object to be measured enters the camera after at least passing through the lens assembly and the polarizer.

2. The light source coupled magnetic domain imaging device according to claim 1, characterized in that: The optical fiber assembly comprises three optical fibers, and the light-emitting end faces of the three optical fibers are arranged in an L shape.

3. The light source coupled magnetic domain imaging device according to claim 1, characterized in that: The light source assembly includes a three-color LED lamp.

4. A light source coupled magnetic domain imaging method, using a light source coupled magnetic domain imaging device as claimed in any one of claims 1 to 3, characterized in that: The method comprises: Controlling the light source assembly including the three-color LED lamp to generate emitted light in a preset manner; By adjusting the on / off of the at least two optical fibers through an adjustable optical attenuator, the emitted light passing through at least the wavelength division multiplexer reaches the object to be measured through different positions of the incident lens assembly with a preset incident surface or incident direction, so that the magnetic domain imaging device obtains a magnetic domain image.

5. The method for magnetic domain imaging by light source coupling according to claim 4, characterized in that: The method further comprises: Controlling the three-color LED lights to light up at different times; When one of the three-color LED lights is turned on to generate emitted light, the adjustable optical attenuator is used to adjust the at least two optical fibers to pass light in sequence, so that the emitted light reaches the object to be measured through different positions of the incident lens assembly with different incident planes or incident directions, thereby enabling the magnetic domain imaging device to obtain the magnetic domain image of the object to be measured under the three different incident planes or incident directions of the emitted light.

6. The method for magnetic domain imaging by light source coupling according to claim 5, characterized in that: The method further comprises: Controlling two of the three-color LED lights to light up at different times; When one of the two three-color LED lights is lit up to generate emitted light, the adjustable optical attenuator connected to the optical fiber corresponding to the first incident surface or incident direction is turned on, so that the emitted light passes through the first position of the incident lens assembly and reaches the object under test at the first incident surface or incident direction; when the other one of the three-color LED lights is lit up to generate emitted light, the adjustable optical attenuator connected to the optical fiber different from the optical fiber corresponding to the first incident surface or incident direction is turned on, so that the emitted light passes through other positions of the incident lens assembly different from the first position and reaches the object under test at other incident surfaces or incident directions different from the first incident surface or incident direction, so that the magnetic domain imaging device obtains the magnetic domain image of the object under test under different incident surfaces or incident directions of the two emitted lights.

7. The method for magnetic domain imaging by light source coupling according to claim 4, characterized in that: The method further comprises: Turning on the adjustable optical attenuator connected to the optical fiber corresponding to the second incident surface or the incident direction; The three-color LED lights are controlled to light up at different times so that the emitted light reaches the object to be measured through the second position of the incident lens assembly at the second incident surface or incident direction, thereby enabling the magnetic domain imaging device to obtain the magnetic domain image of the object to be measured under the three emitted lights and the same incident surface or incident direction.

8. The method for magnetic domain imaging by light source coupling according to claim 4, characterized in that: The method further comprises: Controlling all the three-color LED lights to light up; The adjustable optical attenuator is used to adjust the light transmission of one of the at least two optical fibers; the imaging device in the magnetic domain imaging device adopts a color camera, and the color camera is used to collect three magnetic domain images of the object under test in three colors.

9. The method for magnetic domain imaging by light source coupling according to claim 4, characterized in that: When the optical fiber assembly includes three optical fibers whose light-emitting end faces are arranged in an L shape, the method further includes: Make the outgoing light of the optical fiber located at the L-shaped corner among the three optical fibers vertically incident on the object to be measured; Controlling the three-color LED lights to light up at different times; When the three-color LED lights light up in sequence, the adjustable optical attenuators connected to the three optical fibers are turned on in sequence; The imaging device in the magnetic domain imaging device adopts a color camera, and three magnetic domain images of the object to be measured in the transverse direction, polar direction and longitudinal direction are collected by the color camera.

10. The method for magnetic domain imaging by light source coupling according to claim 4, characterized in that: The imaging device in the magnetic domain imaging device adopts a color camera. When the magnetic domain image captured by the color camera is a composite image including at least two types of emitted light, the method further includes: The composite image is decomposed according to wavelength and / or color.

Images