Gas distribution device and gas distribution method

Abstract

The invention provides a gas distribution device and a gas distribution method. The gas distribution device comprises at least one gas distribution unit, the gas distribution unit comprises a gas distribution main body and at least two groups of gas delivery pipes, the gas distribution main body is provided with an inner cavity, the inner cavity comprises a gas mixing cavity and at least two gas distribution cavities which are not communicated with each other, and each group of gas delivery pipes comprises a plurality of gas delivery pipes; one group of gas conveying pipes is correspondingly communicated with one gas distribution cavity, the gas inlet ends of the gas conveying pipes in the same group are communicated with the same gas distribution cavity, the gas conveying pipes in different groups are correspondingly communicated with different gas distribution cavities, and the gas outlet ends of all the gas conveying pipes are uniformly distributed; and the gas outlet ends of all the gas conveying pipes are communicated with the gas mixing cavity. According to the technical scheme, the problem that when a gas distribution device in the prior art is adopted for gas distribution, gas mixing uniformity is poor can be solved.

Description

Technical Field

[0001] The present invention relates to the technical field of gas distribution devices, and in particular to a gas distribution device and a gas distribution method. Background Art

[0002] In many precision operations in industries and laboratories, the accuracy and uniformity of gas mixing are key factors in ensuring the reliability of experimental results and the high quality of production processes. As the core tool for achieving gas mixing, the performance of the gas distribution system is directly related to the accuracy and efficiency of applications in many fields such as chemical analysis, semiconductor manufacturing, environmental monitoring, and medical diagnosis. Existing gas distribution systems usually use dynamic mixing devices. Although dynamic mixing can accelerate the mixing process, it often introduces additional mechanical structures such as blades, baffles, and spirals. These structures not only increase the complexity of the system, but may also cause instability in gas flow, resulting in poor gas mixing uniformity. Summary of the invention

[0003] The main purpose of the present invention is to provide a gas distribution device and a gas distribution method, which can solve the problem of poor gas mixing uniformity when using the gas distribution device of the prior art to distribute gas.

[0004] In order to achieve the above-mentioned purpose, according to one aspect of the present invention, a gas distribution device is provided, comprising: at least one gas distribution unit, the gas distribution unit comprising a gas distribution body and at least two groups of gas delivery pipes, the gas distribution body having an inner cavity, the inner cavity comprising a gas mixing chamber and at least two gas distribution chambers that are not connected to each other, each group of gas delivery pipes comprising a plurality of gas delivery pipes, a group of gas delivery pipes correspondingly connected to a gas distribution chamber, the gas inlet ends of the gas delivery pipes in the same group are connected to the same gas distribution chamber, different groups of gas delivery pipes correspondingly connected to different gas distribution chambers, the gas outlet ends of all the gas delivery pipes are evenly distributed, and the gas outlet ends of all the gas delivery pipes are connected to the gas mixing chamber.

[0005] Furthermore, there are two groups of gas delivery tubes, six gas delivery tubes of the second group are arranged on the periphery of each gas delivery tube of the first group, and three gas delivery tubes of the first group and three gas delivery tubes of the second group are alternately arranged on the periphery of each gas delivery tube of the second group.

[0006] Furthermore, there are three groups of gas delivery tubes, and the periphery of each gas delivery tube in each group of gas delivery tubes is alternately provided with six gas delivery tubes of the other two groups, wherein the number of gas delivery tubes of the other two groups are both three.

[0007] Furthermore, the gas distribution body also has an exhaust port and at least two air inlets, the exhaust port is connected to the gas mixing chamber, and the at least two air inlets are connected to the at least two gas distribution chambers in a one-to-one correspondence.

[0008] Furthermore, there are three gas distribution units, two of which have two groups of gas delivery pipes, and the remaining gas distribution unit has three groups of gas delivery pipes.

[0009] Furthermore, the two gas distribution chambers are arranged in sequence on one side of the gas mixing chamber along the gas delivery direction, and the gas distribution device also includes a first spacing structure and a second spacing structure, both of which are installed in the inner cavity, the first spacing structure is arranged between the gas mixing chamber and the gas distribution chamber adjacent to the gas mixing chamber, and the second spacing structure is arranged between two adjacent gas distribution chambers, wherein one group of gas delivery pipes passes through the first spacing structure to connect the gas mixing chamber and the gas distribution chamber adjacent to the gas mixing chamber, and another group of gas delivery pipes passes through the first spacing structure and the second spacing structure to connect the gas mixing chamber and the gas distribution chamber arranged at a distance from the gas mixing chamber.

[0010] Furthermore, the gas delivery tube is a capillary tube.

[0011] Furthermore, the inner diameter of the capillary tube ranges from 0.05 mm to 1.0 mm.

[0012] Furthermore, the gas distribution device also includes a first gas pipeline, the gas outlet end of the first gas pipeline is configured to communicate with the gas distribution chamber, and a humidifying device or a drying device is provided on the first gas pipeline.

[0013] According to another aspect of the present invention, a gas distribution method is provided. Using the above-mentioned gas distribution device, the gas distribution method includes: selecting the type of gas distribution device according to the amount of gas to be mixed; and then inputting the gas to be mixed into the corresponding gas distribution chambers respectively.

[0014] The technical solution of the present invention is applied, and at least one gas distribution unit is provided, and the gas distribution unit includes a gas distribution body and at least two groups of gas delivery pipes, each group of gas delivery pipes includes multiple gas delivery pipes, and the gas outlet ends of all gas delivery pipes are evenly distributed, and the gas outlet ends of all gas delivery pipes are connected to the gas mixing chamber. When different gases enter the gas mixing chamber from their respective gas delivery pipes, due to the uniform distribution of the gas outlet ends, each gas quickly diffuses in the mixing chamber and mixes evenly with the surrounding gas, thereby achieving highly uniform gas mixing. Compared with the prior art that promotes gas mixing by increasing turbulence, the gas distribution device of the present application avoids unnecessary turbulence, maintains the stability of the flow field, and improves the uniformity of gas mixing through fine gas distribution and uniform gas output. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] The accompanying drawings constituting a part of the present invention are used to provide a further understanding of the present invention. The exemplary embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation of the present invention. In the accompanying drawings:

[0016] Figure 1 A schematic structural diagram of a gas distribution device according to an embodiment of the present invention is shown;

[0017] Figure 2 A schematic structural diagram of a gas distribution device according to another embodiment of the present invention is shown;

[0018] Figure 3 A schematic structural diagram of a gas distribution device according to another embodiment of the present invention is shown;

[0019] Figure 4 A schematic structural diagram of a gas distribution device according to another embodiment of the present invention is shown;

[0020] Figure 5 A partial enlarged view of a cross section of a gas distribution device according to an embodiment of the present invention is shown (wherein, a cross section of a gas distribution device having two groups of gas delivery pipes, the right side is a partial enlarged view of the cross section on the left side);

[0021] Figure 6 A partial enlarged view of a cross section of a gas distribution device according to another embodiment of the present invention is shown (wherein, a cross section of a gas distribution device having three groups of gas delivery pipes, the right side is a partial enlarged view of the cross section on the left side);

[0022] Figure 7 A flow chart of the gas distribution method of the present invention is shown.

[0023] The above drawings include the following reference numerals:

[0024] 10. Gas distribution body; 11. Inner cavity; 111. Gas mixing cavity; 1111. Exhaust port; 112. Gas distribution cavity; 1121. Air inlet; 20. Gas delivery pipe; 30. First spacing structure; 40. Second spacing structure; 50. First gas pipeline; 51. Second gas pipeline; 52. Third gas pipeline; 53. Fourth gas pipeline; 54. Fifth gas pipeline; 55. Sixth gas pipeline; 60. Humidifier; 70. Dryer; 80. Mass flow meter; 90. Flow valve; 100. Gas supply tank. DETAILED DESCRIPTION

[0025] It should be noted that, in the absence of conflict, the embodiments of the present invention and the features in the embodiments can be combined with each other. The present invention will be described in detail below with reference to the accompanying drawings and in combination with the embodiments.

[0026] Prior art, such as Chinese patent CN116785954A discloses a gas distribution device, which realizes uniform mixing of gas through multi-stage spiral and stirring mechanisms such as baffles, guide cone sleeves, mixing vanes, etc.; Chinese patent CN115228313A discloses a gas mixing device, which realizes mixing of airflow through a vortexer, and then increases the Reynolds number of airflow and turbulence through airflow microchannels, and then increases the mixing degree of airflow through spiral guide grooves; Chinese patent CN211913375U discloses a gas dilution system based on capillaries, which achieves the purpose of accurately controlling the zero-point gas flow rate and the standard gas flow rate by controlling the length, inner diameter, number and pressure difference of the capillaries on both sides of the capillaries; Chinese patent CN116688788A discloses a multi-component dynamic gas distribution device and method, which realizes the mixing of various gases such as equal pressure, unequal amount and unequal pressure through a venturi jet mixer, and realizes the mixing of gas dispersion without amplification effect through a corrugated plate static mixer, and the two mixing devices are used in combination to realize uniform mixing of proportioned gases. Among them, the above four patents all achieve uniform mixing of gases by increasing turbulence after mixing two or more airflows, which has the problem of uneven mixing. Due to the uneven distribution of the initial mixed gas, different parts of the gas may experience different mixing paths, resulting in inconsistency in the overall gas composition after the mixing is completed. Chinese patent CN116785954A and Chinese patent CN116688788A increase the mixing uniformity of gases by means of baffles, mixing rotors and corrugated plate disturbances, respectively, but have the problems of large airflow fluctuations and poor flow rate stability.

[0027] In order to solve the above problems, refer to Figures 1 to 4 As shown, the present invention provides a gas distribution device, which includes: at least one gas distribution unit, the gas distribution unit includes a gas distribution body 10 and at least two groups of gas delivery pipes 20, the gas distribution body 10 has an inner cavity 11, the inner cavity 11 includes a gas mixing chamber 111 and at least two gas distribution chambers 112 that are not connected to each other, each group of gas delivery pipes 20 includes multiple gas delivery pipes 20, a group of gas delivery pipes 20 is correspondingly connected to a gas distribution chamber 112, the gas inlet ends of the gas delivery pipes 20 in the same group are all connected to the same gas distribution chamber 112, different groups of gas delivery pipes 20 are correspondingly connected to different gas distribution chambers 112, the gas outlet ends of all the gas delivery pipes 20 are evenly distributed, and the gas outlet ends of all the gas delivery pipes 20 are connected to the gas mixing chamber 111.

[0028] In this embodiment, each group of gas delivery pipes 20 is connected to a corresponding gas distribution chamber 112. Before each gas enters the mixing chamber, it is first pre-distributed through its own gas distribution chamber 112 to ensure that each gas is evenly distributed in an independent space before entering the mixing stage, reducing direct collisions and flow rate differences between gases, thereby improving the controllability and accuracy of the mixing process. The gas outlet ends of all gas delivery pipes 20 are evenly distributed, and they are all connected to the gas mixing chamber 111. When different gases enter the gas mixing chamber 111 from their respective gas delivery pipes 20, due to the uniform distribution of the gas outlet ends, each gas quickly diffuses in the mixing chamber and is evenly mixed with the surrounding gas, thereby achieving highly uniform gas mixing. Compared with the prior art that promotes gas mixing by increasing turbulence, the gas distribution device of the present application avoids unnecessary turbulence, maintains the stability of the flow field, and improves the uniformity of gas mixing through fine gas distribution and uniform gas output.

[0029] In addition, compared with the prior art that increases the mixing uniformity of the gas through disturbances such as baffles, mixing impellers and corrugated plates, the gas delivery pipe 20 of the gas distribution device of the present application is stationary and is not provided with disturbance structures such as blades, baffles, and spirals. The flow field velocity is stable, avoiding the volatility of the traditional gas distribution method. The present application can form a stable pressure difference at both ends of the gas delivery pipe 20 by precisely controlling the air pressure input into each gas distribution chamber 112, thereby achieving stable control of the gas flow rate in the gas delivery pipe 20, thereby achieving flow ratio control of the gas to be mixed.

[0030] like Figure 1 and Figure 5 As shown, in one embodiment of the present invention, the gas delivery tubes 20 are divided into two groups, and six gas delivery tubes 20 of the second group are arranged on the periphery of each gas delivery tube 20 of the first group of gas delivery tubes 20, and three gas delivery tubes 20 of the first group and three gas delivery tubes 20 of the second group are alternately arranged on the periphery of each gas delivery tube 20 of the second group of gas delivery tubes 20.

[0031] In this embodiment, there are two groups of gas delivery tubes 20 and two gas distribution chambers 112. The two groups of gas delivery tubes 20 are connected to the two gas distribution chambers 112 in a one-to-one correspondence, and can be used to mix and dilute the two gases. For example, the first group of gas delivery tubes 20 is used to pass low-concentration sample gas, and the second group of gas delivery tubes 20 is used to pass the main component carrier gas (referring to a high-purity, stable gas used to carry or dilute the sample gas). The first group of gas delivery tubes 20 and the second group of gas delivery tubes 20 are arranged in the above-mentioned specific layout, that is, the periphery of each first group of gas delivery tubes 20 is surrounded by six second group of gas delivery tubes 20, and the periphery of each gas delivery tube 20 of the second group of gas delivery tubes 20 is alternately provided with three first group of gas delivery tubes 20 and three second group of gas delivery tubes 20. It can be seen from the above that the number of the second group of gas delivery tubes 20 is twice that of the first group of gas delivery tubes 20. This arrangement is to ensure that even if the concentration of the low-concentration sample gas is low, the main component carrier gas can fully surround and dilute it, avoiding the local excessive concentration caused by the uneven distribution of the main component carrier gas, thereby ensuring the uniformity of the final output mixed gas. It should be noted that Figure 5 The cross section and a partial enlarged view of the cross section of the gas distribution device of this embodiment are shown. In the partial enlarged view, the gas delivery pipe 20 marked with a is the gas delivery pipe 20 of the first group, and the gas delivery pipe 20 marked with b is the gas delivery pipe 20 of the second group.

[0032] like Figure 2 and Figure 6 As shown, in one embodiment of the present invention, there are three groups of gas delivery pipes 20, and the periphery of each gas delivery pipe 20 of each group of gas delivery pipes 20 is alternately provided with six gas delivery pipes 20 of the other two groups, wherein the number of gas delivery pipes 20 of the other two groups are both three.

[0033] In the present embodiment, there are three groups of gas delivery pipes 20 and three gas distribution chambers 112. The three groups of gas delivery pipes 20 are connected to the three gas distribution chambers 112 in a one-to-one correspondence, and can be used to mix and dilute the three gases. In traditional mixing methods, gases are usually mixed in a larger space, which is prone to local uneven concentrations. In the gas distribution device of the present application, since the gas delivery pipes 20 are arranged in the above manner, each gas can be mixed with the other two gases at the same time, which greatly reduces the formation of local high-concentration or low-concentration areas in the mixing chamber, thereby improving the uniformity of the mixed gas. In addition, by precisely controlling the flow rate of each group of gas delivery pipes 20, it is possible to ensure that the three gases have a stable and uniform flow rate before entering the mixing chamber, so that the microscopic diffusion of the gas in the mixing chamber is more uniform, reducing airflow fluctuations and improving the stability of the mixing, thereby achieving high-uniformity and stable-ratio gas distribution of the three gases. It should be noted that Figure 6A cross-section and a partially enlarged view of the cross-section of the gas distribution device of this embodiment are shown. In the partially enlarged view, the gas delivery pipe 20 marked with a is the gas delivery pipe 20 of the first group, the gas delivery pipe 20 marked with b is the gas delivery pipe 20 of the second group, and the gas delivery pipe 20 marked with c is the gas delivery pipe 20 of the third group.

[0034] See also Figures 1 to 4 As shown, in one embodiment of the present invention, the gas distribution body 10 also has an exhaust port 1111 and at least two air inlets 1121 , the exhaust port 1111 is connected to the gas mixing chamber 111 , and the at least two air inlets 1121 are connected to at least two gas distribution chambers 112 in a one-to-one correspondence.

[0035] In this embodiment, at least two gas inlets 1121 are connected to at least two gas distribution chambers 112 in a one-to-one correspondence, ensuring that multiple gases can enter their respective gas distribution chambers 112 independently and accurately, and avoiding direct mixing of different gases at the gas inlet 1121. The exhaust port 1111 is connected to the gas mixing chamber 111, and the mixed gas can be directly discharged from the exhaust port 1111. Since the gas outlet end of the gas delivery pipe 20 is evenly distributed in the mixing chamber, it is conducive to the rapid diffusion and uniform mixing of the gas in the entire mixing chamber, reducing the mixing dead angle, and improving the efficiency and uniformity of gas mixing.

[0036] In one embodiment, the outlet ends of all gas delivery pipes 20 are aligned. On the one hand, each gas contacts the space of the mixing chamber almost simultaneously at the microscopic level, promoting uniform distribution and rapid diffusion of different gases in the space. A tiny portion of each gas can quickly contact a tiny portion of other gases, reducing dead corners in the mixing process, thereby improving the uniformity of gas mixing. On the other hand, the alignment of the outlet ends helps to form a smoother and more stable airflow entry pattern, reducing turbulence and airflow interference that may be caused by the misalignment of the outlet ends when the gas enters the mixing chamber. Turbulence can cause uneven gas distribution, while stable airflow helps to maintain the uniformity and stability of the gas during the mixing process.

[0037] See also Figures 1 to 4 As shown, in one embodiment of the present invention, there are three gas distribution units, two of which have two groups of gas delivery pipes 20, and the remaining gas distribution unit has three groups of gas delivery pipes 20.

[0038] In this embodiment, there are three gas distribution units, of which two gas distribution units have two groups of gas delivery pipes 20, and the remaining one gas distribution unit has three groups of gas delivery pipes 20, that is, the two gas distribution units with two groups of gas delivery pipes 20 can be used to mix and dilute two gases, and the gas distribution unit with three groups of gas delivery pipes 20 can be used to mix and dilute three gases. The above three gas distribution units can be used to mix five gases. For the convenience of expression, the two gas distribution units with two groups of gas delivery pipes 20 are named as gas distribution unit one and gas distribution unit two, respectively, and the gas distribution unit with three groups of gas delivery pipes 20 is named as gas distribution unit three, gas A is delivered to the gas mixing chamber of gas distribution unit one through a group of gas delivery pipes 20 of gas distribution unit one, and gas B is delivered to the gas mixing chamber of gas distribution unit one through another group of gas delivery pipes 20 of gas distribution unit one, so as to form a stable and uniform mixed gas one, gas C is delivered to the gas mixing chamber of gas distribution unit three through a group of gas delivery pipes 20 of gas distribution unit three, gas D and gas E are delivered to the gas mixing chamber of gas distribution unit three through the remaining two groups of gas delivery pipes 20 of gas distribution unit three, respectively, so as to form a stable and uniform mixed gas two, finally, the above-mentioned mixed gas one is delivered to the gas mixing chamber of gas distribution unit two through a group of gas delivery pipes 20 of gas distribution unit two, and the mixed gas two is delivered to the gas mixing chamber of gas distribution unit three through another group of gas delivery pipes 20 of gas distribution unit two, and finally, the uniform mixing of the five gases is completed.

[0039] It should be noted that in actual application, the number of gas distribution units with two groups of gas delivery pipes 20 and the number of gas distribution units with three groups of gas delivery pipes 20 can be set according to the gas distribution needs, and the gas distribution units with two groups of gas delivery pipes 20 and the gas distribution units with three groups of gas delivery pipes 20 can be combined in different ways to achieve the mixing needs of different numbers of multiple gases. The specific process is not repeated here. When the required number of gas distribution exceeds 3, the mixing and dilution of multiple gases can be achieved by combining the gas distribution unit with two groups of gas delivery pipes 20 and the gas distribution unit with three groups of gas delivery pipes 20. Specifically, the gases to be mixed are passed through the gas distribution unit with two groups of gas delivery pipes 20 and the gas distribution unit with three groups of gas delivery pipes 20 in the required proportion to obtain a highly uniform and stable mixed gas, and then the obtained two different mixed gases are mixed and diluted through the gas distribution unit with two groups of gas delivery pipes 20, so that a highly uniform and stable mixed gas preparation of multiple gases can be obtained. In addition, the dynamic preparation of ultra-low concentration dilution gas of the target gas can be achieved by combining a gas distribution unit having two groups of gas delivery pipes 20 and a gas distribution unit having three groups of gas delivery pipes 20 .

[0040] See also Figures 1 to 4As shown, in one embodiment of the present invention, two gas distribution chambers 112 are arranged in sequence on one side of the gas mixing chamber 111 along the gas delivery direction, and the gas distribution device also includes a first spacing structure 30 and a second spacing structure 40, and the first spacing structure 30 and the second spacing structure 40 are both installed in the inner cavity 11, the first spacing structure 30 is arranged between the gas mixing chamber 111 and the gas distribution chamber 112 adjacent to the gas mixing chamber 111, and the second spacing structure 40 is arranged between two adjacent gas distribution chambers 112, wherein one group of gas delivery pipes 20 passes through the first spacing structure 30 to connect the gas mixing chamber 111 and the gas distribution chamber 112 adjacent to the gas mixing chamber 111, and another group of gas delivery pipes 20 passes through the first spacing structure 30 and the second spacing structure 40 to connect the gas mixing chamber 111 and the gas distribution chamber 112 spaced apart from the gas mixing chamber 111.

[0041] In this embodiment, the first spacing structure 30 is disposed between the gas mixing chamber 111 and the gas distribution chamber 112 adjacent to the gas mixing chamber 111, and the second spacing structure 40 is disposed between two adjacent gas distribution chambers 112, which can achieve accurate isolation of the gas and avoid cross contamination of the gas during transportation. At the same time, the above layout design allows the gas distribution device to achieve effective distribution and mixing of multiple groups of gases in a limited space, which helps to achieve miniaturization and compact structure of the device.

[0042] In one embodiment, the first spacing structure 30 and the second spacing structure 40 are both partitions to ensure the air tightness of the gas mixing chamber 111 and the gas distribution chamber 112 .

[0043] In one embodiment of the present invention, the gas delivery tube 20 is a capillary tube.

[0044] In this embodiment, the gas delivery tube 20 is a capillary tube. On the one hand, the gas flow rate can be precisely controlled on a micro scale. This precise control is achieved by changing the pressure difference at both ends of the capillary tube or adjusting the number of capillaries, thereby achieving fine adjustment of the proportion of different gases. On the other hand, the output ends of the gas outlets of all gas delivery tubes 20 are densely arranged to form a "pixel-level" distribution, which helps to achieve high-uniform mixing of gases. The small size and high-density arrangement characteristics of the capillary tube enable the gas distribution device to achieve structural miniaturization. A large number of capillaries can be densely arranged in a limited space, which can reduce the volume of the entire gas distribution device.

[0045] In addition, the inner and outer diameters of the capillaries are very small, and the dense and staggered arrangement of the gas outlets can achieve a pixel-like effect, so that different concentration ratios can be adjusted by displaying different colors with different pixels. At the same time, since the pixels are small enough, high uniformity gas distribution can be achieved. Since the capillaries are small enough, taking a thick capillary with an inner diameter of 0.2 mm and an outer diameter of 0.3 mm as an example, the inner cavity 11 of the gas distribution body 10 with a diameter of 2 cm can accommodate about 3,700 capillaries, realizing the miniaturization of the device.

[0046] In one embodiment of the present invention, the inner diameter of the capillary tube ranges from 0.05 mm to 1.0 mm.

[0047] In this embodiment, the inner diameter of the capillary tube ranges from 0.05 mm to 1.0 mm, which can ensure a more consistent flow rate of the gas when passing through, reduce turbulence, and allow the gas molecules to mix quickly and evenly in the gas mixing chamber, thereby improving the uniformity of the mixed gas.

[0048] In one embodiment, the number of the capillaries is 100 to 100,000, the inner diameter of the capillaries is in the range of 0.05 mm to 1.0 mm, and the length of the capillaries is in the range of 10 mm to 200 mm.

[0049] In one embodiment, the cross-section of a group of gas delivery tubes 20 can be any one of circular, square, and hexagonal.

[0050] Preferably, the cross section of a group of gas delivery tubes 20 is circular or regular hexagonal.

[0051] In one embodiment, the capillary tube can be made of any one of quartz glass, carbonate glass, stainless steel, polytetrafluoroethylene (PTFE), and polyetheretherketone (PEEK).

[0052] In one embodiment, the cross section of the gas distribution body 10 can be any one of circular, square, and hexagonal.

[0053] Preferably, the cross section of the gas distribution body 10 is circular or regular hexagonal.

[0054] In one embodiment, the material of the gas distribution body 10 can be made of any one of quartz glass, carbonate glass, stainless steel, aluminum alloy, and polyetheretherketone (PEEK).

[0055] In one embodiment of the present invention, the gas distribution device further includes a first gas pipeline 50 , the gas outlet end of the first gas pipeline 50 is configured to communicate with the gas distribution chamber 112 , and a humidifying device 60 or a drying device 70 is provided on the first gas pipeline 50 .

[0056] In this embodiment, the gas inlet end of the first gas pipeline can be connected to an external gas supply device to transport the gas to be mixed to the corresponding gas distribution chamber 112 through the first gas pipeline 50. A humidifying device 60 or a drying device 70 is provided on the gas pipeline. The humidifying device 60 is used to humidify the gas, and the drying device 70 is used to dry the gas.

[0057] like Figure 1 He Ru Figure 4 As shown, in one embodiment, the gas delivery pipes 20 of the gas distribution device are divided into two groups, and the outer periphery of each gas delivery pipe 20 of the first group of gas delivery pipes 20 is provided with six gas delivery pipes 20 of the second group, and the outer periphery of each gas delivery pipe 20 of the second group of gas delivery pipes 20 is alternately provided with three gas delivery pipes 20 of the first group and three gas delivery pipes 20 of the second group. The humidifying device 60 is a gas washing bottle filled with deionized water, and the drying device 70 is a drying tube filled with desiccant. The gas distribution device also includes two first gas delivery pipelines 50, a second gas delivery pipeline 51, a third gas delivery pipeline 52, a fourth gas delivery pipeline 53, a fifth gas delivery pipeline 54, three flow valves 90 and two gas supply tanks 100, wherein one gas supply tank 100 is used to supply nitrogen, and the other gas supply tank 100 is used to supply VOC gas (i.e., volatile organic compound) with a gas concentration of 10ppm to be diluted.

[0058] The air inlet end of the fifth gas pipeline 54 is connected to a gas supply tank 100 for supplying VOC gas with a gas concentration of 10 ppm to be diluted, one end of the second gas pipeline 51 is connected to the air outlet end of the fifth gas pipeline 54, the other end of the second gas pipeline 51 extends into the gas washing bottle, and the second gas pipeline 51 is provided with a flow valve 90 and a mass flow meter 80, one end of the third gas pipeline 52 is connected to the gas washing bottle, and the other end of the third gas pipeline 52 is connected to the air inlet end of the fourth gas pipeline 53, one end of one of the first gas pipelines 50 is connected to the air outlet end of the fifth gas pipeline 54, and the other end of the first gas pipeline 50 is connected to the air inlet end of the fourth gas pipeline 53, the first gas pipeline 50 is provided with a flow valve 90 and a drying pipe, and the air outlet end of the fourth gas pipeline 53 is connected to one of the gas distribution chambers 112 of the gas distribution device. One end of the sixth gas pipeline 55 is connected to another gas supply tank 100 for supplying nitrogen, and the other end of the sixth gas pipeline 55 is connected to another gas distribution chamber 112 of the gas distribution device, and a flow valve 90 and a mass flow meter 80 are provided on the sixth gas pipeline 55. Part of the nitrogen is transported through the first gas pipeline 50, and the drying pipe on the first gas pipeline 50 can dry the nitrogen in the first gas pipeline 50, and then transport it to the gas distribution chamber 112 through the third gas pipeline 52 and the fourth gas pipeline 53. Part of the nitrogen reaches the washing bottle through the second gas pipeline 51, and the washing bottle humidifies the gas, and then transports it to the gas distribution chamber 112 through the fourth gas pipeline 53. By controlling the flow valve 90 on the first gas pipeline 50 and the second gas pipeline 51, the humidity and total flow rate of the nitrogen can be controlled. By controlling the flow valve 90 on the sixth gas pipeline 55, the flow of VOC gas can be controlled and passed into the corresponding gas distribution chamber 112.

[0059] Among them, the range of the mass flowmeter 80 on the sixth gas pipeline 55 is 0-100ml / min, and the control accuracy is 0.1%. The ranges of the mass flowmeters 80 on the first gas pipeline 50 and the second gas pipeline 51 are both 0-10L / min, and the control accuracy is 0.1%. By controlling the mass flowmeter 80 on the sixth gas pipeline 55 to 10ml / min, the mass flowmeter 80 on the second gas pipeline 51 to 1L / min, and the mass flowmeter 80 on the first gas pipeline 50 to 4L / mim, dynamic high uniformity preparation of VOC gas with a relative humidity of 20% and a concentration of 20ppb can be achieved.

[0060] like Figure 7 As shown, according to another aspect of the present invention, a gas distribution method is provided, using the above-mentioned gas distribution device, the gas distribution method includes: selecting the type of gas distribution device according to the amount of gas to be mixed; and then inputting the gas to be mixed into the corresponding gas distribution chambers respectively.

[0061] In this embodiment, first, the type of gas distribution device is selected according to the number of gases required for mixing. For example: if only two gases need to be mixed, such as the main component carrier gas and the sample gas, a two-way gas distribution device (i.e., a gas distribution unit with two groups of gas delivery pipes 20) should be selected; if three gases need to be mixed, a three-way gas distribution device (i.e., a gas distribution unit with three groups of gas delivery pipes 20) can be selected. For the mixing of more than three gases, a method of connecting multiple two-way or three-way gas distribution devices in series can be used to achieve this. Then, an independent gas distribution chamber is allocated for each gas to be mixed, and they are evenly distributed in the gas mixing chamber through the gas outlet ends of their respective gas delivery pipes to achieve mixed gas distribution.

[0062] From the above description, it can be seen that the above-mentioned embodiments of the present invention achieve the following technical effects: at least one gas distribution unit is provided, the gas distribution unit includes a gas distribution body and at least two groups of gas delivery pipes, each group of gas delivery pipes includes multiple gas delivery pipes, the gas outlet ends of all gas delivery pipes are evenly distributed, and the gas outlet ends of all gas delivery pipes are connected to the gas mixing chamber, when different gases enter the gas mixing chamber from their respective gas delivery pipes, due to the uniform distribution of the gas outlet ends, each gas quickly diffuses in the mixing chamber and mixes evenly with the surrounding gas, thereby achieving highly uniform gas mixing. Compared with the prior art that promotes gas mixing by increasing turbulence, the gas distribution device of the present application avoids unnecessary turbulence, maintains the stability of the flow field, and improves the uniformity of gas mixing through fine gas distribution and uniform gas output.

[0063] Obviously, the above-described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the present invention.

[0064] It should be noted that the terms used herein are only for describing specific embodiments and are not intended to limit the exemplary embodiments according to the present application. As used herein, unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. In addition, it should be understood that when the terms "comprise" and / or "include" are used in this specification, it indicates the presence of features, steps, operations, devices, components and / or combinations thereof.

[0065] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. For those skilled in the art, the present invention may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A gas distribution device, characterized in that: include: At least one gas distribution unit, the gas distribution unit comprising a gas distribution body (10) and at least two groups of gas delivery pipes (20), the gas distribution body (10) having an inner cavity (11), the inner cavity (11) comprising a gas mixing cavity (111) and at least two gas distribution cavities (112) that are not connected to each other, each group of the gas delivery pipes (20) comprising a plurality of the gas delivery pipes (20), a group of the gas delivery pipes (20) correspondingly connected to one gas distribution cavity (112), the gas inlet ends of the gas delivery pipes (20) of the same group are connected to the same gas distribution cavity (112), different groups of the gas delivery pipes (20) are correspondingly connected to different gas distribution cavities (112), the gas outlet ends of all the gas delivery pipes (20) are evenly distributed, and the gas outlet ends of all the gas delivery pipes (20) are connected to the gas mixing cavity (111).

2. The gas distribution device according to claim 1, characterized in that: The gas delivery tubes (20) are in two groups, and six gas delivery tubes (20) of the second group are arranged on the periphery of each gas delivery tube (20) of the first group, and three gas delivery tubes (20) of the first group and three gas delivery tubes (20) of the second group are alternately arranged on the periphery of each gas delivery tube (20) of the second group.

3. The gas distribution device according to claim 1, characterized in that: The gas delivery pipes (20) are in three groups, and the outer circumference of each gas delivery pipe (20) in each group of the gas delivery pipes (20) is alternately provided with six gas delivery pipes (20) in the other two groups, wherein the number of the gas delivery pipes (20) in the other two groups is three each.

4. The gas distribution device according to any one of claims 1 to 3, characterized in that: The gas distribution body (10) further comprises an exhaust port (1111) and at least two air inlets (1121); the exhaust port (1111) is connected to the gas mixing chamber (111); and the at least two air inlets (1121) are connected to at least two gas distribution chambers (112) in a one-to-one correspondence.

5. The gas distribution device according to claim 4, characterized in that: There are three gas distribution units, of which two of the gas distribution units have two groups of gas delivery pipes (20), and the remaining gas distribution unit has three groups of gas delivery pipes (20).

6. The gas distribution device according to claim 2, characterized in that: The two gas distribution chambers (112) are sequentially arranged on one side of the gas mixing chamber (111) along the gas delivery direction, and the gas distribution device further comprises a first spacing structure (30) and a second spacing structure (40), wherein the first spacing structure (30) and the second spacing structure (40) are both installed in the inner chamber (11), the first spacing structure (30) is arranged between the gas mixing chamber (111) and the gas distribution chamber (112) adjacent to the gas mixing chamber (111), and the second spacing structure (40) is arranged between the first spacing structure (30) and the second spacing structure (40) The gas distribution chamber (112) is disposed between two adjacent gas distribution chambers (112), wherein one group of the gas delivery tubes (20) passes through the first spacing structure (30) to connect the gas mixing chamber (111) and the gas distribution chamber (112) adjacent to the gas mixing chamber (111), and another group of the gas delivery tubes (20) passes through the first spacing structure (30) and the second spacing structure (40) to connect the gas mixing chamber (111) and the gas distribution chamber (112) spaced apart from the gas mixing chamber (111).

7. The gas distribution device according to any one of claims 1 to 3, characterized in that: The gas delivery tube (20) is a capillary tube.

8. The gas distribution device according to claim 7, characterized in that: The inner diameter of the capillary tube ranges from 0.05 mm to 1.0 mm.

9. The gas distribution device according to any one of claims 1 to 3, characterized in that: The gas distribution device further comprises a first gas pipeline (50), the gas outlet end of the first gas pipeline (50) being configured to communicate with the gas distribution chamber (112), and a humidifying device (60) or a drying device (70) being provided on the first gas pipeline (50).

10. A gas distribution method, characterized in that: Utilizing the gas distribution device according to any one of claims 1 to 9, the gas distribution method comprises: Select the type of the gas distribution device according to the amount of gas to be mixed; Then, the gases to be mixed are respectively input into the corresponding gas distribution chambers (112).

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