Box type plasma cleaning system with automatic door opening function

Abstract

The invention discloses an automatic door opening box type plasma cleaning system which is successfully connected with a device production automation integrated production line on the premise of ensuring high efficiency and excellent cleaning effect, so that equipment can normally and stably operate, the product production quality is improved, and the automatic production purpose of an intelligent full-automatic unmanned workshop is achieved. The plasma cleaning machine comprises a machine body, an automatic door opening mechanism is arranged at a feeding and discharging opening in the front end of the machine body, a box type cleaning mechanism and a radio frequency system are arranged on the upper layer in the machine body, a vacuum system is arranged on the lower layer in the machine body, and the machine body is further provided with a control system; and the automatic feeding mechanism is used for conveying the feeding platform loaded with the products.

Description

Technical Field

[0001] The invention relates to the technical field of plasma cleaning equipment, in particular to an automatic door-opening box-type plasma cleaning system. Background Art

[0002] As a precision dry cleaning equipment, the box-type plasma cleaning machine is used for precision cleaning of lead frames, integrated circuit chips, medical products, etc., so as to remove oxides and organic matter on the surface of the device, improve the surface properties, and improve the reliability of welding, packaging, and bonding.

[0003] However, the existing plasma cleaning system cannot be automatically connected to the equipment for producing devices. The operator is still required to open and close the equipment door when materials are received before plasma cleaning can be performed. As a result, the workshop cannot currently meet the fully automated production requirements of an unmanned workshop. Summary of the invention

[0004] In response to the above problems, the present invention provides an automatic door-opening box-type plasma cleaning system, which successfully connects to the device production automation integrated production line while ensuring high efficiency and excellent cleaning effects, so that the equipment can operate normally and stably, improve product production quality and achieve the automatic production purpose of an intelligent, fully automated unmanned workshop.

[0005] An automatic door opening box type plasma cleaning system, characterized in that it comprises:

[0006] A plasma cleaning machine comprises a machine body, a front end material inlet and outlet of the machine body is provided with an automatic door opening mechanism, an upper layer inside the machine body is provided with a box-type cleaning mechanism and a radio frequency system, a lower layer inside the machine body is provided with a vacuum system, and the machine body is also provided with a control system;

[0007] and an automatic feeding mechanism for conveying a feeding platform loaded with products;

[0008] An automatic feeding mechanism is provided at the front of the front inlet and outlet of the plasma cleaning machine. The automatic feeding mechanism feeds the feeding platform into the reaction chamber of the box-type cleaning mechanism along the direction of the incoming material. The automatic door opening mechanism automatically opens or closes the chamber door of the reaction chamber. The box-type cleaning mechanism realizes plasma cleaning of the product. The vacuum system is connected to the box-type cleaning mechanism through a pipeline. The vacuum system provides a vacuum environment for the discharge of the box-type cleaning mechanism and discharges the waste gas in the box-type cleaning mechanism. The radio frequency system provides a radio frequency electric field for the box-type cleaning mechanism. The control system controls the automatic feeding mechanism, the automatic door opening mechanism, the radio frequency system, and the vacuum system to cooperate with the box-type cleaning mechanism to complete the plasma discharge cleaning work.

[0009] It is further characterized by:

[0010] The automatic feeding mechanism includes a mounting base, on which a lifting cylinder and four groups of linear bearings are mounted, the linear bearings are inserted with corresponding guide shafts, the top of the guide shafts are connected to the bottom plate of the feeding platform, at least one group of slide rails and a slide cylinder are arranged on the upper surface of the bottom plate of the feeding platform, a fixed plate is embedded in the sliding arrangement of the slide rails, the output end of the slide cylinder is fixedly connected to the fixed plate, the feeding cylinder is fixedly set on one end of the upper surface of the fixed plate, the feeding cylinder is fixedly connected to a limit plate and a positioning cylinder bracket, the positioning cylinder is fixed on the positioning cylinder bracket, the output end of the positioning cylinder is equipped with a limit plate and a positioning needle, and feeding roller mounting plates and arranged feeding rollers are respectively installed on both sides of the width of the fixed plate;

[0011] The feeding platform loaded with products is placed on the feeding roller. The lifting cylinder provides power for the up and down movement of the bottom plate of the feeding platform, and the sliding cylinder provides power for the forward and backward movement of the fixed plate. The limit plate and the positioning pin are pressed down by the positioning cylinder to lock the corresponding positioning position on the feeding platform. Then the feeding cylinder drives the feeding platform along the feeding roller to be sent into or out of the reaction chamber of the box-type cleaning mechanism;

[0012] The machine body comprises a frame, door panel components around the frame, and a machine body top cap. The middle frame of the frame divides the inner layer of the machine body into an upper layer and a lower layer. The frame is provided with door panel components around the frame. The top of the frame is provided with a machine body top cap. The front end of the frame is provided with an automatic door opening mechanism.

[0013] The automatic door opening mechanism includes fixed plates on both sides, a cavity door, a door opening and closing motor, and a driving module, wherein a slide rail is respectively arranged on the fixed plates on one side, and a linear driving module is arranged on the fixed door plate on the other side, one side of the cavity door is directly or indirectly embedded in the slide rail, the other side of the cavity door is connected to the output end of the driving module, and the door opening and closing motor is connected to the input end of the driving module, and the door opening and closing motor drives the cavity door to rise and fall, thereby opening or closing the cavity inlet of the box-type cleaning mechanism;

[0014] The cavity door is integrated with a sensing sheet, wherein an upper sensor and a lower sensor are respectively arranged on a fixed plate on one side, and the sensing sheet corresponds to the position lifting and lowering action between the upper sensor and the lower sensor. When the upper sensor senses the sensing sheet, the cavity door closes the cavity inlet of the box-type cleaning mechanism, and when the lower sensor senses the sensing sheet, the cavity door opens the cavity inlet of the box-type cleaning mechanism;

[0015] The box-type cleaning mechanism includes a reaction chamber, an electrode assembly, and an electrode connecting sheet. The reaction chamber is provided with an electrode assembly and an electrode connecting sheet. The front end of the reaction chamber is provided with a chamber inlet. The reaction chamber is provided with a supporting platform, the supporting platform is integrated with a positive electrode plate and a negative electrode plate, and a feeding platform is also provided in the supporting platform. The electrode assembly is connected to the positive electrode plate, and the negative electrode plate and the positive electrode plate form a positive and negative electrode assembly to provide an electric field for plasma cleaning. The product to be cleaned is placed on the feeding platform for plasma cleaning.

[0016] The support platform is a double-layer support platform, which includes a rack bottom plate, an intermediate layer plate, a positive plate in the middle position, and negative plates on both sides. The double-layer support platform includes four cleaning product areas, and rack tracks and track rollers are provided on both sides of the width direction of each cleaning product area. The feeding platform is provided with a notch groove corresponding to the positive plate position of each layer, so that a single feeding platform is provided corresponding to two cleaning product areas on the same layer after feeding is completed, and each feeding platform is fed in or out along the rack track and track roller at the corresponding height position;

[0017] The lifting cylinder is used to adjust the height position of the feeding platform, so as to adapt to the bottom plate and the middle layer plate of the material rack at the corresponding height position, so that the plasma cleaning operation of the products of the two feeding platforms can be carried out at a time;

[0018] The radio frequency system includes a radio frequency power supply and a radio frequency matcher. The radio frequency power supply and the radio frequency matcher are connected through a signal line to form a radio frequency system, and then connected to an electrode assembly of a box-type cleaning mechanism through an electrode connecting sheet to provide a resonant electric field for the system. The electric field ionizes oxygen, argon, oxygen and other gases in the positive and negative electrode assemblies composed of negative plates and positive plates, so that oxygen, argon, oxygen and other gases generate ions with high reactivity, which react chemically and physically with organic pollutants on the cleaning product to form volatile compounds, and then the volatile compounds are removed by a process gas flow and discharged to the outside of the box-type cleaning mechanism through a vacuum system;

[0019] The vacuum system includes a lower-level pump, an upper-level pump, an adapter, a vacuum pipe, a vacuum valve, a cavity joint, an oil filter, an oil filter joint, and an exhaust joint; the vacuum system is connected to the reaction cavity through the cavity joint to draw the waste gas in the reaction cavity into the vacuum system, and the oil filter is connected to the lower-level pump through the oil filter joint to discharge the waste gas in the reaction cavity through the exhaust joint.

[0020] The control system is controlled by PLC to ensure stable, accurate and reliable operation of various components. The control system also includes an exposed control panel. The control system provides electrical control and data support for the automatic door-opening box-type plasma cleaning system.

[0021] After adopting the above technical scheme, the automatic feeding mechanism is located in front of the machine body and is a feeding platform for the plasma cleaning machine. The corresponding products are placed on the feeding platform. The automatic door opening mechanism is installed on the machine body to realize the precise opening and closing of the cavity door of the box-type cleaning mechanism. The box-type cleaning mechanism realizes the plasma cleaning of the product. The vacuum system is connected to the box-type cleaning mechanism through pipelines to provide a vacuum environment for the discharge of the box-type cleaning mechanism and discharge the exhaust gas in the box-type cleaning mechanism. The radio frequency system provides a radio frequency electric field for the box-type cleaning mechanism. The control system controls the various components and mechanisms to cooperate to complete the plasma discharge cleaning work. It successfully connects to the automated integrated production line while ensuring high efficiency and excellent cleaning effects through precise and stable opening and closing of doors and automatic picking and placing of products, so that the equipment can operate normally and stably, improve product production quality and realize the automatic production purpose of intelligent fully automated unmanned workshops. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 It is a schematic diagram of the three-dimensional structure of the present invention;

[0023] Figure 2 It is a three-dimensional schematic diagram of the body of the present invention;

[0024] Figure 3 It is a three-dimensional schematic diagram of the automatic feeding mechanism of the present invention;

[0025] Figure 4 It is a three-dimensional schematic diagram of the automatic door opening mechanism of the present invention;

[0026] Figure 5 It is a three-dimensional schematic diagram of the box-type cleaning mechanism of the present invention;

[0027] Figure 6 is a three-dimensional schematic diagram of a radio frequency system of the present invention;

[0028] Figure 7 is a three-dimensional schematic diagram of a vacuum system of the present invention;

[0029] The names corresponding to the serial numbers in the figure are as follows:

[0030] Feeding mechanism 1, automatic door opening mechanism 2, box-type cleaning mechanism 3, radio frequency system 4, vacuum system 5, control system 6, feeding roller mounting plate 7, feeding platform 8, notch groove 801, positioning cylinder 9, feeding roller 10, positioning cylinder bracket 11, fixing plate 12, feeding cylinder 13, feeding platform bottom plate 14, slide rail 15, guide shaft 16, linear bearing 17, mounting plate 18, lifting cylinder 19, profile 20, reinforcing rib 21, feeding foot 22, limit plate 23, slide cylinder 24, limit plate 25, positioning pin 26, right fixing plate 27, left fixing plate 28, module 29, slide rail 30, door opening and closing motor 31, guide shaft 32, cavity door 33, observation window 34, upper sensor 35, connecting block 36, lifting motor 37, fixing block 38, coupling 39, induction sheet 40, lower sensor 41, reaction chamber 42 , electrode assembly 43, negative plate 44, rack support 45, rack track 46, positive plate 47, track roller 48, electrode connecting piece 49, rack bottom plate 50, intermediate layer plate 51, negative plate bracket 52, positive plate bracket 53, plate connecting strip 54, RF matching device 55, RF power supply 56, vacuum valve 57, upper pump 58, lower pump 59, exhaust joint 60, pump group foot 61, vacuum pipe 62, cavity Body joint 63, adapter 64, oil filter 65, oil filter joint 66, body top cap 67, left and right upper door panels 68, left and right lower door panels 69, front left door panel 70, front cap 71, front lower door panel 72, frame 73, front right door panel 74, frame foot 75, hinge 76, tower lamp 77, ion fan 78, body 80, front end inlet and outlet 81, product 90, plasma cleaning machine 100. DETAILED DESCRIPTION

[0031] An automatic door-opening box-type plasma cleaning system, see Figure 1-Figure 7 , which comprises a plasma cleaning machine 100 and an automatic feeding mechanism 1;

[0032] The plasma cleaning machine 100 includes a machine body 80, an automatic door opening mechanism 2, a box-type cleaning mechanism 3, a radio frequency system 4, a vacuum system 5, and a control system 6. The front end of the machine body 80 is provided with an automatic door opening mechanism 2 at a material inlet and outlet 81, the upper layer of the machine body 80 is provided with a box-type cleaning mechanism 3 and a radio frequency system 4, the lower layer of the machine body 80 is provided with a vacuum system 5, and the machine body 80 is also provided with a control system 6;

[0033] The automatic feeding mechanism 1 is used to convey the feeding platform 8 loaded with products;

[0034] An automatic feeding mechanism 1 is provided in front of the front end inlet and outlet 81 of the plasma cleaning machine 100. The automatic feeding mechanism 1 feeds the feeding platform 8 into the reaction chamber 42 of the box-type cleaning mechanism 3 along the incoming material direction. The automatic door opening mechanism 2 automatically opens or closes the chamber door 33 of the reaction chamber 42. The box-type cleaning mechanism 3 realizes product plasma cleaning. The vacuum system 5 is connected to the box-type cleaning mechanism 3 through a pipeline. The vacuum system 5 provides a vacuum environment for the discharge of the box-type cleaning mechanism 3 and discharges the waste gas in the box-type cleaning mechanism 3. The radio frequency system 4 provides a radio frequency electric field for the box-type cleaning mechanism 3. The control system 6 controls the automatic feeding mechanism 1, the automatic door opening mechanism 2, the radio frequency system 4, and the vacuum system 5 to cooperate with the box-type cleaning mechanism 3 to complete the plasma discharge cleaning work.

[0035] During specific implementation, the automatic feeding mechanism includes a mounting base, which is composed of a feeding foot 22, a reinforcing rib 21, a profile 20 and a mounting plate 18. A lifting cylinder 19 and four groups of linear bearings 17 are installed on the mounting base. A guide shaft 16 is inserted in the linear bearing 17. The top of the guide shaft 16 is connected to the bottom of the feeding platform bottom plate. Two groups of slide rails 15 and a slide cylinder 24 are installed on the upper surface of the feeding platform bottom plate. The fixed plate 12 is embedded in the slide rail 15. The output end of the slide cylinder 24 is connected to the fixed plate 12. The feeding cylinder 13 is fixed on the upper surface of the fixed plate 12. A limiting plate 23 and a positioning cylinder bracket 11 are fixed on the feeding cylinder 13. The positioning cylinder 9 is fixed on the positioning cylinder bracket 11. A limit plate 25 and a positioning needle 26 are installed on the cylinder 9. The positioning cylinder 9 is located at one end away from the plasma cleaning machine 100, so that after the product is discharged, the positioning cylinder 9 is disengaged from the positioning and completes the retreat action. A feeding roller mounting plate 7 is installed on both sides of the width of the fixed plate 12. A feeding roller 10 is installed on the feeding roller mounting plate 7. The feeding platform 8 is placed on the feeding roller 10. The lifting cylinder 19 provides power for the up and down movement of the feeding platform bottom plate 14, and the slide cylinder 24 provides power for the forward and backward movement of the fixed plate 12. After the feeding platform 8 is locked by the limit plate 25 and the positioning needle 26, the feeding cylinder 13 provides forward and backward power for the feeding platform 8, and the cleaning product 90 on the feeding platform 8 can be sent into the box-type cleaning mechanism 3;

[0036] The machine body includes a frame foot 75, left and right upper door panels 68, left and right lower door panels 69, and a machine body top cap 67. The machine body top cap 67 is equipped with a tower light 77, an ion fan 78, and a front cap 71. The front lower door panel 72, the front left door panel 70, and the front right door panel 74 are installed on the frame 73. The front left door panel 70 and the front right door panel 74 are connected to the frame 73 through hinges 76 and can be opened and closed. The frame 73 provides support for the entire device.

[0037] The automatic door opening mechanism 2 includes a right fixing plate 27 and a left fixing plate 28. The right fixing plate 27 and the left fixing plate 28 are each equipped with three sets of guide shafts 32. The right fixing plate 27 is equipped with a module 29, a door opening and closing motor 31, an upper sensor 35, a lower sensor 41, and a lifting motor 37. The module 29 is equipped with a fixing block 38 and a sensor sheet 40. The fixing block 38 is connected to the right side of the cavity door 33. The module 29 is connected to the lifting motor 37 through a coupling 39. The left fixing plate 28 is equipped with a slide rail 3 0. Door opening and closing motor 31, connecting block 36, connecting block 36 is connected to the left side of cavity door 33, and an observation window 34 is installed on cavity door 33, wherein lifting motor 37 provides power for lifting and lowering cavity door 33 through module 29, and cooperates with upper sensor 35 and lower sensor 41 through induction sheet 40 to make cavity door 33 stop accurately at the upper / lower position, and door opening and closing motor 31 drives right fixing plate 27 and left fixing plate 28 to make cavity door 33 fully contact and separate with box-type cleaning mechanism 3 to realize accurate opening and closing of cavity door 33.

[0038] The box-type cleaning mechanism 3 includes a reaction chamber 42, an electrode assembly 43, and an electrode connecting piece 49. The reaction chamber 42 is equipped with a material rack support 45, a material rack bottom plate 50, two negative plates 44, a negative plate bracket 52, a positive plate 47, a positive plate bracket 53, a plate connecting strip 54, an intermediate layer plate 51, a material rack track 46, and a track roller 48. The material rack track 46 and the track roller 48 constitute a material rack track to support a feeding platform 8. The electrode assembly 43 is connected to the positive plate 47, and the negative plate 44 and the positive plate 47 constitute a positive and negative electrode assembly to provide an electric field for plasma cleaning. The cleaning product 90 is placed on the feeding platform 8 for plasma cleaning.

[0039] The RF system 4 includes an RF power supply 56 and an RF matcher 55. The RF power supply 56 and the RF matcher 55 are connected via a signal line to form the RF system 4, which is then connected to the electrode assembly 43 in the box-type cleaning mechanism 3 via the electrode connecting plate 49 to provide a resonant electric field with a frequency of 13.56 MHz. The electric field ionizes gases such as oxygen, argon, and oxygen in the positive and negative electrode assemblies composed of the negative plate 44 and the positive plate 47, so that gases such as oxygen, argon, and oxygen generate ions with high reactivity, which react chemically and physically with organic pollutants on the cleaning product 90 to form volatile compounds, which are then removed by the process gas flow and discharged to the outside of the box-type cleaning mechanism 3 through the vacuum system 5.

[0040] The vacuum system 5 includes a pump group base 61, a lower pump 59, an upper pump 58, an adapter 64, a vacuum pipe 62, a vacuum valve 57, a cavity joint 63, an oil filter 65, an oil filter joint 66, and an exhaust joint 60; the vacuum system 5 is connected to the reaction cavity 42 through the cavity joint 63 to draw the exhaust gas in the reaction cavity 42 into the vacuum system 5, and the oil filter 65 is connected to the lower pump 59 through the oil filter joint 66 to discharge the exhaust gas in the reaction cavity 42 through the exhaust joint 60.

[0041] The control system 6 is controlled by PLC to ensure stable, accurate and reliable operation of each component. The control system 6 also includes an exposed control panel 601. The control system 6 provides electrical control and data support for the automatic door opening box type plasma cleaning system.

[0042] In specific implementation, the feeding platform 8 is provided with a notch groove 801 corresponding to the positive plate position of each layer, so that after a single feeding platform 8 is completed, two cleaning product areas corresponding to the same layer are set, and each feeding platform 8 is fed in or out along the rack track 46 and track roller 47 at the corresponding height position;

[0043] The lifting cylinder 19 is used to adjust the height position of the feeding platform 8 so as to adapt to the material rack bottom plate 50 and the middle layer plate 51 at corresponding height positions, so that the plasma cleaning operation of the products of the two feeding platforms can be carried out at a time.

[0044] Its working principle is as follows: the automatic feeding mechanism is located in the front of the machine body and is the feeding platform for the plasma cleaning machine. The corresponding products are placed on the feeding platform. The automatic door opening mechanism is installed on the machine body to realize the precise opening and closing of the cavity door of the box-type cleaning mechanism. The box-type cleaning mechanism realizes the plasma cleaning of the product. The vacuum system is connected to the box-type cleaning mechanism through pipelines to provide a vacuum environment for the discharge of the box-type cleaning mechanism and discharge the exhaust gas in the box-type cleaning mechanism. The radio frequency system provides a radio frequency electric field for the box-type cleaning mechanism, and the control system controls the various components and mechanisms to cooperate to complete the plasma discharge cleaning work; it successfully connects to the automated integrated production line while ensuring high efficiency and excellent cleaning effects through precise and stable opening and closing of doors and automatic placement of products, so that the equipment can operate normally and stably, improve product production quality and realize the automatic production purpose of intelligent, fully automated unmanned workshops.

[0045] It will be apparent to those skilled in the art that the invention is not limited to the details of the exemplary embodiments described above and that the invention can be implemented in other specific forms without departing from the spirit or essential features of the invention. Therefore, the embodiments should be considered exemplary and non-limiting in all respects, and the scope of the invention is defined by the appended claims rather than the foregoing description, and it is intended that all variations falling within the meaning and scope of the equivalent elements of the claims be included in the invention. Any reference numeral in a claim should not be considered as limiting the claim to which it relates.

[0046] In addition, it should be understood that although the present specification is described according to implementation modes, not every implementation mode contains only one independent technical solution. This description of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment may also be appropriately combined to form other implementation modes that can be understood by those skilled in the art.

Claims

1. An automatic door opening box type plasma cleaning system, characterized in that: It includes: A plasma cleaning machine comprises a machine body, a front end material inlet and outlet of the machine body is provided with an automatic door opening mechanism, an upper layer inside the machine body is provided with a box-type cleaning mechanism and a radio frequency system, a lower layer inside the machine body is provided with a vacuum system, and the machine body is also provided with a control system; and an automatic feeding mechanism for conveying a feeding platform loaded with products; An automatic feeding mechanism is provided at the front of the front inlet and outlet of the plasma cleaning machine. The automatic feeding mechanism feeds the feeding platform into the reaction chamber of the box-type cleaning mechanism along the direction of the incoming material. The automatic door opening mechanism automatically opens or closes the chamber door of the reaction chamber. The box-type cleaning mechanism realizes plasma cleaning of the product. The vacuum system is connected to the box-type cleaning mechanism through a pipeline. The vacuum system provides a vacuum environment for the discharge of the box-type cleaning mechanism and discharges the waste gas in the box-type cleaning mechanism. The radio frequency system provides a radio frequency electric field for the box-type cleaning mechanism. The control system controls the automatic feeding mechanism, the automatic door opening mechanism, the radio frequency system, and the vacuum system to cooperate with the box-type cleaning mechanism to complete the plasma discharge cleaning work.

2. The automatic door opening box type plasma cleaning system according to claim 1, characterized in that: The automatic feeding mechanism includes a mounting base, on which a lifting cylinder and four groups of linear bearings are mounted, the linear bearings are inserted with corresponding guide shafts, the top of the guide shaft is connected to the bottom plate of the feeding platform, at least one group of slide rails and slide cylinders are arranged on the upper surface of the bottom plate of the feeding platform, a fixed plate is embedded in the slide rail sliding arrangement, the output end of the slide cylinder is fixedly connected to the fixed plate, the feeding cylinder is fixedly set on one end of the upper surface of the fixed plate, the feeding cylinder is fixedly connected to a limit plate and a positioning cylinder bracket, the positioning cylinder is fixed on the positioning cylinder bracket, the output end of the positioning cylinder is equipped with a limit plate and a positioning pin, and feeding roller mounting plates and arranged feeding rollers are respectively installed on both sides of the width of the fixed plate.

3. The automatic door-opening box-type plasma cleaning system according to claim 1, characterized in that: The machine body comprises a frame, surrounding door panel assemblies, and a machine body top cap. The middle frame of the frame divides the inner layer of the machine body into an upper layer and a lower layer. The frame is surrounded by surrounding door panel assemblies. The top of the frame is provided with a machine body top cap. The front end of the frame is provided with an automatic door opening mechanism.

4. The automatic door opening box type plasma cleaning system according to claim 1, characterized in that: The automatic door opening mechanism includes fixed plates on both sides, a cavity door, a door opening and closing motor, and a driving module, wherein a slide rail is respectively arranged on the fixed plates on one side, and a linear driving module is arranged on the fixed door plate on the other side. One side of the cavity door is directly or indirectly embedded in the slide rail, and the other side of the cavity door is connected to the output end of the driving module, and the door opening and closing motor is connected to the input end of the driving module. The door opening and closing motor drives the cavity door to rise and fall, thereby opening or closing the cavity feeding port of the box-type cleaning mechanism.

5. The automatic door opening box type plasma cleaning system according to claim 4, characterized in that: The cavity door is integrated with a sensing sheet, wherein an upper sensor and a lower sensor are respectively arranged on a fixed plate on one side, and the sensing sheet corresponds to the position lifting and lowering action between the upper sensor and the lower sensor. When the upper sensor senses the sensing sheet, the cavity door closes the cavity inlet of the box-type cleaning mechanism, and when the lower sensor senses the sensing sheet, the cavity door opens the cavity inlet of the box-type cleaning mechanism.

6. The automatic door-opening box-type plasma cleaning system according to claim 2, characterized in that: The box-type cleaning mechanism includes a reaction chamber, an electrode assembly, and an electrode connecting sheet. The electrode assembly and the electrode connecting sheet are arranged on the reaction chamber. A chamber inlet is arranged at the front end of the reaction chamber. A supporting platform is installed in the reaction chamber. The supporting platform is integrated with a positive electrode plate and a negative electrode plate. A feeding platform is also arranged in the supporting platform. The electrode assembly is connected to the positive electrode plate. The negative electrode plate and the positive electrode plate form a positive and negative electrode assembly to provide an electric field for plasma cleaning. The product to be cleaned is placed on the feeding platform for plasma cleaning.

7. The automatic door opening box type plasma cleaning system according to claim 6, characterized in that: The support platform is a double-layer support platform, which includes a rack bottom plate, an intermediate layer plate, a positive plate in the middle position, and negative plates on both sides. The double-layer support platform includes four cleaning product areas. Rack tracks and track rollers are provided on both sides of the width direction of each cleaning product area. The feeding platform is provided with notch grooves corresponding to the positive plate position of each layer, so that after a single feeding platform completes feeding, it is arranged corresponding to two cleaning product areas on the same layer. Each feeding platform delivers in or out operations along the rack tracks and track rollers at the corresponding height positions.

8. The automatic door opening box type plasma cleaning system according to claim 6, characterized in that: The radio frequency system includes a radio frequency power supply and a radio frequency matcher. The radio frequency power supply and the radio frequency matcher are connected through a signal line to form a radio frequency system, and then connected to the electrode assembly of the box-type cleaning mechanism through an electrode connecting sheet to provide a resonant electric field for it. The electric field ionizes oxygen, argon, oxygen and other gases in the positive and negative electrode assemblies composed of negative plates and positive plates, so that oxygen, argon, oxygen and other gases generate ions with high reactivity, which react chemically and physically with organic pollutants on the cleaning products to form volatile compounds, and then the volatile compounds are removed through the process gas flow and discharged to the outside of the box-type cleaning mechanism through the vacuum system.

9. The automatic door opening box type plasma cleaning system according to claim 1, characterized in that: The vacuum system includes a lower-level pump, an upper-level pump, an adapter, a vacuum pipe, a vacuum valve, a cavity joint, an oil filter, an oil filter joint, and an exhaust joint; the vacuum system is connected to the reaction cavity through the cavity joint to draw the waste gas in the reaction cavity into the vacuum system, and the oil filter is connected to the lower-level pump through the oil filter joint to discharge the waste gas in the reaction cavity through the exhaust joint.

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