Control method and control device for micro-nano structure additive manufacturing

Abstract

The invention discloses a micro-nano structure additive manufacturing control method and device, and the method comprises the steps: controlling the change of an electric field according to a pulse signal with a preset frequency and a preset pulse length, and controlling the directional migration of charged printing particles in a fluid based on the changed electric field, and enabling the charged printing particles to form a preset micro-nano structure on a printing substrate. The electric field change is controlled according to the pulse signal with the preset frequency and the preset pulse length, so that the printing particles carried in the fluid can move by a certain distance in the fluid output direction and then directionally migrate to the printing substrate to form the preset micro-nano structure, the preset micro-nano structure is uniform in size, and the printing quality is improved. And the problem that the printing particles form structures with different sizes on the printing substrate is avoided, so that large-area, high-throughput, high-precision and uniform micro-nano structure additive manufacturing is realized.

Description

Technical Field

[0001] The present invention relates to the fields of microelectronics, micro-nano optics and micro-nano / atomic manufacturing, and in particular to a control method and a control device for micro-nano structure additive manufacturing. Background Art

[0002] Micro-nano additive manufacturing (also known as micro-nano scale 3D printing) is a new type of micro-nano processing technology that manufactures micro-nano structures based on the additive principle.

[0003] At present, there is a printing technology that uses electric field to manipulate the directional migration of charged printing particles to stack into three-dimensional nanostructures, which has achieved the rapid preparation of high-precision metal nanostructures. Its printing accuracy can be improved by 5 to 10 times based on photolithography technology. And related studies have shown that this method has great application prospects in the fields of microelectronics and micro-nano optics due to its high precision and a wide variety of processable materials.

[0004] However, this method still has some disadvantages. Figure 1 , Figure 2 as well as Figure 3 .in, Figure 1 , Figure 2 as well as Figure 3 They are the first moment, the second moment and the third moment of micro-nanostructure additive manufacturing. And, Figure 1 The first moment in Figure 2 The second moment in Figure 2 The second moment in Figure 3 The third moment in the plot. Since the charged printing particles have different sizes and corresponding concentration distributions, when printing nanostructures, once the printing particles of different sizes enter the electric field, the printing particles with small sizes migrate to the printing substrate faster and have a short migration distance along the direction of fluid flow, and the corresponding micro-nano structure is small; the printing particles with large particles move to the printing substrate slowly and have a long migration distance along the direction of fluid flow, and the corresponding micro-nano structure is large. In addition, the different concentration distributions of different particle sizes lead to uneven printing over a large area. Summary of the invention

[0005] The technical problem to be solved by the present invention is to overcome the defect in the prior art that charged printing particles of different particle sizes move to the printing substrate at different speeds, resulting in inconsistent sizes of printed structures, and to provide a control method and control device for micro-nano structure additive manufacturing.

[0006] The present invention solves the above technical problems through the following technical solutions:

[0007] As a first aspect of the present invention, the present invention provides a control method for micro-nano structure additive manufacturing, comprising:

[0008] Controlling the change of the electric field according to a pulse signal of a preset frequency and a preset pulse length;

[0009] Based on the changing electric field, the charged printing particles in the fluid are manipulated to migrate in a directional manner, so that the charged printing particles form a preset micro-nano structure on the printing substrate.

[0010] Optionally, before the step of controlling the electric field according to the pulse signal of the preset frequency and the preset pulse length, the method further comprises:

[0011] Acquire the velocity field of the fluid and the length of the printing area of ​​the printing substrate along the direction of the velocity field;

[0012] The lower frequency limit of the preset frequency is determined according to the velocity field and the length of the printing area.

[0013] Optionally, an upper limit of the duration of the preset pulse length is determined based on the preset frequency.

[0014] Optionally, the velocity field of the fluid and / or the preset frequency are adjustable;

[0015] The preset frequency is determined according to the velocity field of the fluid, or the velocity field of the fluid is determined according to the preset frequency;

[0016] Wherein, the velocity field of the fluid is positively correlated with the preset frequency.

[0017] Optionally, the preset pulse length includes a first preset pulse length and / or a second preset pulse length;

[0018] The step of controlling the electric field change according to the pulse signal of the preset frequency and the preset pulse length specifically includes:

[0019] Controlling the switching of the electric field between generation and disappearance according to a first preset pulse length;

[0020] and / or, controlling the electric field to switch between the first intensity and the second intensity according to a second preset pulse length;

[0021] Wherein, the first intensity is greater than the second intensity, and the first intensity is used to make the charged printing particles in the fluid migrate to the printing substrate in a directional manner. Optionally, before the step of controlling the electric field according to the pulse signal of the preset frequency and the preset pulse length, the step includes:

[0022] Obtaining the electric field strength of the electric field, the displacement required for the printing particles to migrate the printing substrate, and the electrical mobility of the printing particles;

[0023] The lower limit of the preset pulse length is determined according to the electric field strength, the displacement and the electrical mobility.

[0024] Optionally, the fluid includes a gaseous fluid and / or a liquid fluid.

[0025] The gaseous fluid includes at least one of nitrogen, helium, hydrogen, oxygen, air, chlorine, fluorine, neon, argon, krypton, xenon, radon and sulfur hexafluoride;

[0026] and / or, the flow rate of the fluid is 0.1-100 liters / minute by volume;

[0027] and / or, the printing particles include at least one of a conductor, a semiconductor and an insulating material;

[0028] and / or, the particle size of the printing particles is an atomic particle size of the printing particles that is less than or equal to 100 nanometers;

[0029] And / or, the preset pulse frequency of the pulse signal is 0.1-3000 Hz;

[0030] And / or, the preset pulse length is 0.001-1000 milliseconds;

[0031] And / or, the intensity of the pulse signal is 0-30000 volts.

[0032] As a second aspect of the present invention, the present invention provides a control device for micro-nano structure additive manufacturing, comprising: a printing substrate and a plate arranged in parallel in an insulating closed cavity, and an electric field control module for executing the control method of the first aspect of the present invention;

[0033] An insulating channel is provided on one side of the printing substrate and the electrode plate, wherein the channel contains a fluid, and the fluid contains charged printing particles;

[0034] The electric field control module is used to control the generation or disappearance of the electric field in the area between the printing substrate and the electrode plate, and manipulate the directional migration of charged printing particles in the fluid based on the electric field, so that the charged printing particles form a preset micro-nano structure on the printing substrate.

[0035] Optionally, the control device further includes at least one of a flow field control module, a particle source module, a pressure module and a temperature module;

[0036] The flow field control module is used to select the type of fluid, control the velocity field of the fluid, and allow the printing particles to move a certain distance along the surface of the printing substrate until the entire surface of the printing substrate is covered;

[0037] The particle source module is used to add printing particles into the fluid;

[0038] The pressure module is used to detect and / or adjust the pressure in the closed cavity;

[0039] The temperature module is used to detect and / or adjust the temperature in the sealed cavity.

[0040] Optionally, the distance between the printing substrate and the metal plate is adjustable.

[0041] Optionally, at least one of the size, pressure and temperature of the closed cavity is adjustable.

[0042] On the basis of being in accordance with the common sense in the art, the above-mentioned preferred conditions can be arbitrarily combined to obtain the preferred embodiments of the present invention.

[0043] The positive and progressive effects of the present invention are:

[0044] The electric field changes are controlled by a pulse signal with a preset frequency and a preset pulse length, so that the printing particles carried in the fluid can move a certain distance along the direction of the fluid output, and then migrate to the printing substrate in a directional manner to form a preset micro-nano structure, so that the preset micro-nano structure has a uniform size, avoiding the problem of inconsistent structure size formed by the printing particles on the printing substrate. Thus, large-area, high-throughput, high-precision, and uniform additive manufacturing of micro-nano structures is achieved. BRIEF DESCRIPTION OF THE DRAWINGS

[0045] Figure 1 Schematic diagram of the first moment of additive manufacturing of micro-nano structures in background technology.

[0046] Figure 2 Schematic diagram of the second moment of additive manufacturing of micro-nano structures in the background technology.

[0047] Figure 3 It is a schematic diagram of the third moment of the additive manufacturing of micro-nano structures in the background technology.

[0048] Figure 4 Schematic diagram of the process of the additive manufacturing method of micro-nano structures in Example 1 of the present invention.

[0049] Figure 5 This is a first schematic diagram of the manufacturing method for additive manufacturing of micro-nano structures in Example 1 of the present invention.

[0050] Figure 6 This is a second schematic diagram of the manufacturing method for additive manufacturing of micro-nano structures in Example 1 of the present invention.

[0051] Figure 7 This is a first result diagram of the first micro-nano structure manufactured by the manufacturing method for additive manufacturing of micro-nano structures in Example 1 of the present invention.

[0052] Figure 8 This is a second result diagram of the first micro-nano structure manufactured by the manufacturing method for additive manufacturing of micro-nano structures in Example 1 of the present invention.

[0053] Fig. 9 This is a first result diagram of the second micro-nano junction manufactured by the manufacturing method for additive manufacturing of micro-nano structures in Example 1 of the present invention.

[0054] Fig.10 This is a second result diagram of a second micro-nano structure manufactured by the manufacturing method for additive manufacturing of micro-nano structures in Example 1 of the present invention.

[0055] Fig.11 This is a first result diagram of the third micro-nano structure manufactured by the manufacturing method for additive manufacturing of micro-nano structures in Example 1 of the present invention.

[0056] Fig.12 This is a second result diagram of the third micro-nano structure manufactured by the manufacturing method for additive manufacturing of micro-nano structures in Example 1 of the present invention.

[0057] Fig.13 This is a first result diagram of a fourth micro-nano structure manufactured by the manufacturing method for additive manufacturing of micro-nano structures in Example 1 of the present invention.

[0058] Fig.14 This is a second result diagram of the fourth micro-nano structure manufactured by the manufacturing method for additive manufacturing of micro-nano structures in Example 1 of the present invention.

[0059] Fig.15 It is a side sectional view of a manufacturing device for additive manufacturing of micro-nano structures according to Example 2 of the present invention. DETAILED DESCRIPTION

[0060] The present invention is further described below by way of examples, but the present invention is not limited to the scope of the examples.

[0061] Example 1

[0062] See also Figure 4 This embodiment provides a control method for micro-nano structure additive manufacturing, including:

[0063] S1, controlling the electric field change according to a pulse signal of a preset frequency and a preset pulse length;

[0064] S2. Based on the changing electric field, the charged printing particles in the fluid are controlled to migrate in a directional manner, so that the charged printing particles form a preset micro-nano structure on the printing substrate.

[0065] See also Figure 5 as well as Figure 6 , Figure 5 Schematic diagram of additive manufacturing of micro-nano structures when the electric field disappears. Figure 6 Schematic diagram of additive manufacturing of micro-nano structures at the moment of electric field generation. Figure 5 as well as Figure 6 The solid circle represents the printed particles, and the dotted circle represents the position where the printed particles will move. In this embodiment, the generation and disappearance of the electric field are controlled according to the preset frequency. Figure 5 When the electric field disappears, the charged printing particles move to the top of the printing substrate as the fluid moves and are evenly distributed above the printing substrate. Figure 6 When the electric field is generated, the uniformly distributed printing particles generate a preset micro-nano structure on the printing substrate through the action of the electric field. Particles with inconsistent particle sizes are avoided. Once entering the electric field, the printing particles with large particle sizes migrate to the printing substrate faster, and the corresponding micro-nano structure is large; the printing particles with small particle sizes move slowly to the printing substrate, and the corresponding micro-nano structure is small (for details, please refer to Figure 1-3 ) problem.

[0066] In an optional embodiment, before the step of controlling the electric field according to a pulse signal with a preset frequency and a preset pulse length, the method includes:

[0067] Obtaining the velocity field of the fluid and the length of the printing area of ​​the printing substrate along the direction of the velocity field;

[0068] The lower frequency limit of the preset frequency is determined according to the velocity field and the length of the printing area.

[0069] In this embodiment, when the velocity field and the length of the printing area of ​​the printing substrate along the velocity field direction are determined, if the preset frequency is too low, the efficiency of printing the micro-nano structure per unit time is too low.

[0070] In this optional embodiment, the direction of the velocity field may be perpendicular to the direction of the electric field lines.

[0071] In this embodiment, the lower limit of the frequency of the preset frequency f is related to the velocity field V gas The lower limit of the frequency of the preset frequency f is inversely proportional to the length L of the printing area of ​​the printing substrate along the direction of the velocity field.

[0072] In an optional embodiment, the preset pulse length is determined according to the preset frequency. The maximum duration of .

[0073] In this embodiment, the preset pulse length If the preset pulse length is too long, although all charged particles can be migrated to the printing substrate, the printing efficiency will be too low if the preset pulse length is too long.

[0074] In this embodiment, the preset pulse length The maximum duration can be The efficiency of micro-nano structure printing can be guaranteed.

[0075] In an optional embodiment, the velocity field of the fluid and / or the preset frequency are adjustable;

[0076] The preset frequency is determined according to the velocity field of the fluid, or the velocity field of the fluid is determined according to the preset frequency;

[0077] Wherein, the velocity field of the fluid is positively correlated with the preset frequency.

[0078] In an optional embodiment, the preset pulse length includes a first preset pulse length and a second preset pulse length;

[0079] The step of controlling the electric field change according to the pulse signal of the preset frequency and the preset pulse length specifically includes:

[0080] Controlling the switching of the electric field between generation and disappearance according to a first preset pulse length;

[0081] and / or, controlling the electric field to switch between the first intensity and the second intensity according to a second preset pulse length;

[0082] The first intensity is greater than the second intensity, and the first intensity is used to make the charged printing particles in the fluid migrate to the printing substrate in a directional manner.

[0083] In this embodiment, through the first intensity and the second intensity, the second intensity can move a certain distance along the distribution direction of the printing substrate relative to the first intensity, and can also make the size of the micro-nano structure uniform, thereby realizing large-area, high-throughput, high-precision and uniform additive manufacturing of micro-nano structures.

[0084] In an optional embodiment, before the step of controlling the electric field according to a pulse signal with a preset frequency and a preset pulse length, the method includes:

[0085] Obtaining the electric field strength of the electric field, the displacement required for the printed particles to migrate the printed substrate, and the electrical mobility of the printed particles;

[0086] The lower limit of the preset pulse length is determined according to the electric field strength, displacement and electrical mobility.

[0087] In this embodiment, the preset pulse length The lower limit of the time length is proportional to the electric field strength E, the displacement h required for the printed particles to migrate to the substrate, and the electrical mobility Z p And the electric field strength E is inversely proportional to the electric field. Preset pulse length If it is too short, it cannot be guaranteed that all the printing particles migrate to the printing substrate, or even that there are no printing particles that migrate to the printing substrate in a directional manner.

[0088] Electromobility Z pCharacterizes the ability of charged printed particles to move under the action of an electric field. p The particle size D of the printed particles p The displacement h required for the printed particles to migrate to the substrate is generally the distance H between the printed substrate and the metal plate.

[0089] In this embodiment, the electric field intensity, displacement and electrical mobility determine the lower limit of the preset pulse length, ensuring that the printed particles can migrate directionally onto the printing substrate to form a preset micro-nano structure.

[0090] In an alternative embodiment, the fluid may be a gas, such as an inert gas.

[0091] In an optional embodiment, the fluid includes a gaseous fluid and / or a liquid fluid.

[0092] The gaseous fluid includes at least one of nitrogen, helium, hydrogen, oxygen, air, chlorine, fluorine, neon, argon, krypton, xenon, radon and sulfur hexafluoride;

[0093] and / or, the volume flow rate of the fluid is 0.1-100 liters / minute;

[0094] and / or, the printing particles include at least one of a conductor, a semiconductor and an insulating material;

[0095] and / or, the particle size of the printing particles is an atomic particle size of the printing particles that is less than or equal to 100 nanometers;

[0096] And / or, the preset pulse frequency of the pulse signal is 0.1-3000 Hz;

[0097] And / or, the preset pulse length is 0.001-1000 milliseconds;

[0098] And / or, the intensity of the pulse signal is 0-30000 volts.

[0099] In one embodiment, the printing substrate is 1cm×1cm, the distance H between the printing substrate and the electrode plate is 1cm, the fluid is gas, and the flow field speed is 1m / s, and the height of the preset micro-nano structure corresponding to different preset pulse lengths is detected. The height variation coefficient is determined according to the height of the micro-nano structure to characterize the uniformity of the micro-nano structure. For details, please refer to the following table:

[0100]

[0101] See also Figure 7-8, as shown in the figure, the pulse frequency is 1 to 30 Hz, the preset pulse length is 0.1 to 15 ms, and the pulse signal strength is 0 to 1000 V. The first micro-nano structure is manufactured by printing with charged gold nanoparticles for 3-5 minutes. Figure 7 The "500μm" in the lower right corner and Figure 8 The “5 μm” in the lower right corner is the scale bar.

[0102] See also Figure 9-10 The figure shows that the pulse frequency is 1 to 30 Hz, the pulse length is 0.1 to 15 ms, and the pulse signal strength is 0 to 1000 V. The second micro-nano structure is manufactured by printing with charged gold nanoparticles for 6 to 10 minutes. Fig. 9 The "10μm" in the lower right corner and Fig.10 The “2 μm” in the lower right corner is the scale bar.

[0103] See also Figure 11-12 , as shown in the figure, the pulse frequency is 1 to 30 Hz, the preset pulse length is 0.1 to 15 ms, and the pulse signal strength is 0 to 1000 V. The third micro-nano structure is manufactured by printing with charged gold nanoparticles for 4-6 minutes. Fig.11 The "10μm" in the lower right corner and Fig.12 The “2 μm” in the lower right corner is the scale bar.

[0104] See also Figure 13-14 , the fourth micro-nano structure is shown in the figure, which is made by printing charged gold nanoparticles. Fig.13 The "10μm" in the lower right corner and Fig.14 The “2 μm” in the lower right corner is the scale bar.

[0105] This embodiment provides a control method for additive manufacturing of micro-nano structures. The electric field change is controlled according to a pulse signal of a preset frequency and a preset pulse length, so that the printing particles carried in the fluid can move a distance along the direction of fluid output and then migrate to the printing substrate in a directional manner to form a preset micro-nano structure, so that the preset micro-nano structure is uniform in size. This avoids the problem that printing particles of different particle sizes encounter the electric field and form structures of inconsistent sizes on the printing substrate. This achieves additive manufacturing of large-area, high-throughput, high-precision, and uniform micro-nano structures.

[0106] Example 2

[0107] See also Fig.15 , this embodiment provides a control device for additive manufacturing of micro-nano structures, including a metal plate 1 arranged in a closed cavity, a printing substrate 2, and an electric field control module 3 for executing the control method in embodiment 1 of the present application;

[0108] An insulating channel is provided on one side of the metal plate 1 and the printing substrate 2, and the channel contains a fluid, and the fluid contains charged printing particles;

[0109] The electric field control module 3 is used to control the generation or disappearance of the electric field in the area between the printing substrate 2 and the metal electrode 1, and manipulate the directional migration of charged printing particles in the fluid based on the electric field, so that the charged printing particles form a preset micro-nano structure on the printing substrate 2.

[0110] In an optional embodiment, the control device further includes at least one of a flow field control module, a particle source module, a pressure module, and a temperature module;

[0111] The flow field control module is used to select the type of fluid, control the velocity field of the fluid, and allow the printing particles to move a certain distance along the surface of the printing substrate until the entire surface of the printing substrate is covered;

[0112] The particle source module is used to add printing particles into the fluid;

[0113] The pressure module is used to detect and / or adjust the pressure in the closed cavity;

[0114] The temperature module is used to detect and / or adjust the temperature in the sealed cavity.

[0115] In an optional embodiment, the distance between the printing substrate 2 and the metal plate 1 is adjustable.

[0116] Although the specific embodiments of the present invention are described above, it should be understood by those skilled in the art that this is only for illustration and the protection scope of the present invention is defined by the appended claims. Those skilled in the art may make various changes or modifications to these embodiments without departing from the principles and essence of the present invention, but these changes and modifications all fall within the protection scope of the present invention.

Claims

1. A control method for micro-nano structure additive manufacturing, characterized in that: The control method comprises: Controlling the change of the electric field according to a pulse signal of a preset frequency and a preset pulse length; Based on the changing electric field, the charged printing particles in the fluid are manipulated to migrate in a directional manner, so that the charged printing particles form a preset micro-nano structure on the printing substrate.

2. The control method according to claim 1, characterized in that: Before the step of controlling the electric field according to the pulse signal of the preset frequency and the preset pulse length, the method includes: Acquire the velocity field of the fluid and the length of the printing area of ​​the printing substrate along the direction of the velocity field; The lower frequency limit of the preset frequency is determined according to the velocity field and the length of the printing area.

3. The control method according to claim 2, characterized in that: An upper limit of the duration of the preset pulse length is determined according to the preset frequency.

4. The control method according to claim 1, characterized in that: The velocity field of the fluid and / or the preset frequency are adjustable; The preset frequency is determined according to the velocity field of the fluid, or the velocity field of the fluid is determined according to the preset frequency; Wherein, the velocity field of the fluid is positively correlated with the preset frequency.

5. The control method according to claim 1, characterized in that: The preset pulse length includes a first preset pulse length and / or a second preset pulse length; The step of controlling the electric field change according to the pulse signal of the preset frequency and the preset pulse length specifically includes: Controlling the switching of the electric field between generation and disappearance according to a first preset pulse length; and / or, controlling the electric field to switch between the first intensity and the second intensity according to a second preset pulse length; The first intensity is greater than the second intensity, and the first intensity is used to make the charged printing particles in the fluid migrate to the printing substrate in a directional manner.

6. The control method according to claim 1, characterized in that: Before the step of controlling the electric field according to the pulse signal of the preset frequency and the preset pulse length, the method includes: Obtaining the electric field strength of the electric field, the displacement required for the printing particles to migrate the printing substrate, and the electrical mobility of the printing particles; The lower limit of the preset pulse length is determined according to the electric field strength, the displacement and the electrical mobility.

7. The control method according to claim 1, characterized in that: The fluid comprises a gaseous fluid and / or a liquid fluid The gaseous fluid includes at least one of nitrogen, helium, hydrogen, oxygen, air, chlorine, fluorine, neon, argon, krypton, xenon, radon and sulfur hexafluoride; and / or, the volume flow rate of the fluid is 0.1-100 liters / minute; and / or, the printing particles include at least one of a conductor, a semiconductor and an insulating material; And / or, the particle size of the printing particles is less than or equal to 100 nanometers; And / or, the preset pulse frequency of the pulse signal is 0.1-3000 Hz; And / or, the preset pulse length is 0.001-1000 milliseconds; And / or, the intensity of the pulse signal is 0-30000 volts.

8. A control device for micro-nano structure additive manufacturing, characterized in that: The control device comprises a printing substrate, a plate and an electric field control module arranged in a closed cavity for executing the control method according to any one of claims 1 to 7; An insulating channel is provided on one side of the printing substrate and the electrode plate, wherein the channel contains a fluid, and the fluid contains charged printing particles; The electric field control module is used to control the generation or disappearance of the electric field in the area between the printing substrate and the electrode plate, and manipulate the directional migration of charged printing particles in the fluid based on the electric field, so that the charged printing particles form a preset micro-nano structure on the printing substrate.

9. The control device according to claim 8, characterized in that The control device further includes at least one of a flow field control module, a particle source module, a pressure module and a temperature module; The flow field control module is used to select the type of fluid, control the velocity field of the fluid, and allow the printing particles to move a certain distance along the surface of the printing substrate until the entire surface of the printing substrate is covered; The particle source module is used to add printing particles into the fluid; The pressure module is used to detect and / or adjust the pressure in the closed cavity; The temperature module is used to detect and / or adjust the temperature in the sealed cavity.

10. The control device according to claim 9, characterized in that The distance between the printing substrate and the electrode plate is adjustable; And / or, at least one of the size, pressure and temperature of the closed cavity is adjustable.

Images