Efficient and uniform gas injection type deposition furnace
By designing the sliding structure of the inner and outer furnace bodies and partitions in the deposition furnace, the problem of uneven gas distribution in the traditional deposition furnace is solved, and the efficient uniformity and mass consistency of the coating are achieved.
Patent Information
- Application Number
- CN202411610807.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2024-11-12
- Publication Date
- 2025-02-14
AI Technical Summary
Traditional chemical gas injection deposition furnaces have shortcomings in gas injection uniformity, resulting in significant differences in the thickness, composition and structure of the deposited film in different regions, affecting the overall performance and quality of the film.
A high-efficiency uniform gas injection deposition furnace is designed. Through the sliding design of the inner and outer furnace bodies and partitions, the inner furnace chamber is divided into multiple areas to achieve uniform distribution and flow of gas.
The different coating process needs are met through two working states (exhaust after the intake seal is completed and the continuous intake and exhaust gas is continuously met), and the quality and consistency of the coating are improved, ensuring the uniformity and freshness of the gas.
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Figure CN119433510A_ABST
Abstract
Description
Technical Field
[0001] This invention relates to the field of deposition furnace technology, and more specifically, to a high-efficiency, uniform gas injection deposition furnace. Background Technology
[0002] In the fields of materials science and advanced manufacturing, chemical vapor deposition (CVD) technology has attracted much attention due to its ability to prepare high-quality, high-performance thin film materials on various substrates. The chemical gas injection deposition furnace (CVA) plays a crucial role as a key piece of equipment for realizing this technology. However, traditional CVA furnaces face several technical challenges during operation. Because CVA furnaces are often designed for continuous gas inlet and outlet, ensuring uniform gas injection is difficult. Imperfections in the gas injection system design often lead to significant deviations in gas distribution within the furnace, resulting in marked differences in the thickness, composition, and structure of the deposited film in different regions. This not only affects the overall performance and quality of the film but may also lead to performance instability and reduced reliability during use. Summary of the Invention
[0003] This invention proposes a high-efficiency, uniform gas injection deposition furnace, which solves the problem in related technologies where the gas distribution in the furnace often has large deviations, resulting in significant differences in the thickness, composition, and structure of the deposited film in different regions.
[0004] The technical solution of the present invention is as follows: A high-efficiency, uniform gas injection deposition furnace for coating workpiece surfaces includes: The inner furnace body has an inner furnace cavity and a first communication port; An outer furnace body is disposed outside the inner furnace body, and an outer furnace cavity is formed between the outer furnace body and the inner furnace body. The first connecting port connects the inner furnace cavity and the outer furnace cavity. The outer furnace body also has an air inlet that leads to the outer furnace cavity. The first inner partition is slidably mounted on the inner wall of the inner furnace cavity. The first inner partition has a first plate portion and a second plate portion arranged vertically. The second plate portion is used to support the workpiece. The inner wall of the inner furnace body has a first opening and a second opening. After the first plate portion and the second plate portion slide, they block or unblock the first opening and the second opening. After blocking, the inner furnace cavity is divided into a first inner furnace cavity, a second inner furnace cavity and a third inner furnace cavity. The second inner furnace cavity has a first air outlet. The first air outlet connects the second inner furnace cavity and the outside.
[0005] As a further technical solution, it also includes: A first outer partition plate is slidably and vertically disposed within the outer furnace cavity, dividing the outer furnace cavity into a first outer furnace cavity and a second outer furnace cavity. The first outer partition plate has a first stop portion. After the first outer partition plate slides downward, the air inlet leads to the second outer furnace cavity, and the first stop portion blocks part of the first connecting port, so that the second outer furnace cavity and the second inner furnace cavity are connected through the first connecting port.
[0006] As a further technical solution The first inner furnace cavity has a second air outlet. After the first outer partition slides upward, the air inlet leads to the first outer furnace cavity, and the first baffle blocks part of the first connecting port, so that the first outer furnace cavity and the third inner furnace cavity are connected through the first connecting port. The gas in the third inner furnace cavity drives the first inner partition to slide upward, so that the first outer furnace cavity, the first inner furnace cavity, the second inner furnace cavity and the third inner furnace cavity are connected through the first connecting port, the first through port and the second through port, and are connected to the outside through the second air outlet.
[0007] As a further technical solution, the side of the second plate has a first air vent, which is a plurality of circumferentially arranged air vents.
[0008] As a further technical solution, the first port has a second air guide port around it. The second air guide port is arranged in a plurality of circumferential directions. After the first inner partition slides up, the airflow entering the air inlet flows through the first connecting port, the second port, the first air guide port, the first port and the second air guide port in sequence.
[0009] As a further technical solution, the first air guide port and the second air guide port are circumferentially offset from each other.
[0010] As a further technical solution, it also includes: The second outer partition plate is synchronously raised and lowered and slidably disposed in the second outer furnace cavity with the first outer partition plate, dividing the second outer furnace cavity into a second upper outer furnace cavity and a second lower outer furnace cavity. The second inner partition is slidably and vertically disposed within the first inner furnace cavity, dividing the first inner furnace cavity into an upper first inner furnace cavity and a lower first inner furnace cavity.
[0011] As a further technical solution, the inner furnace body also has a second communication port, and the second inner partition is slidably mounted on the second outer partition. After the second inner partition slides down, the second air outlet communicates with the upper first inner furnace cavity. After the second inner partition slides up, the second air outlet communicates with the lower first inner furnace cavity.
[0012] As a further technical solution, it also includes: A first elastic element, one end of which is disposed on the second outer partition plate and the other end of which is disposed on the second inner partition plate, provides a force for the second inner partition plate to slide down relative to the second outer partition plate.
[0013] As a further technical solution, both the outer furnace body and the inner furnace body have material inlets.
[0014] The working principle and beneficial effects of this invention are as follows: In this invention, the first inner partition is movable and can slide up and down. When the first and second plates slide, they can block or unblock the first and second openings, thereby dividing the inner furnace cavity into different areas. When coating materials, there are two different working states: exhaust after sealing the gas inlet, and continuous gas inlet and exhaust. The latter often involves the simultaneous introduction of multiple different gases, all of which require prior vacuuming. In the exhaust after sealing the gas inlet working state: first, the material is placed into the inner furnace cavity, the furnace body is closed, and a vacuum is applied inside the furnace. Then, gas is introduced into the furnace through the gas inlet, and the gas inlet is sealed after the gas inlet is completed. At this time, the first and second plates of the first inner partition slide to block the first and second openings, creating a relatively sealed space within the inner furnace cavity. After coating is completed, the first gas outlet is opened for exhaust. In the continuous gas inlet and exhaust working state: similarly, the material is first placed in and a vacuum is applied. During the coating process, multiple different gases are continuously introduced into the outer furnace cavity through the gas inlet, and then enter the inner furnace cavity through the first connecting port. The sliding of the first and second plates of the first inner partition component cancels the blockage of the first and second ports, allowing gas to flow freely in all areas while continuously exhausting gas through the first outlet. These two different operating states meet the requirements of various coating processes. The exhaust method after gas inlet sealing is suitable for coating processes with high requirements for gas reaction conditions, ensuring the stability of the gas environment during coating. The continuous gas inlet and exhaust method is suitable for coating processes requiring the combined action of multiple gases, enabling timely removal of reacted gases and maintaining the freshness and uniformity of the gas inside the furnace. Regardless of the operating state, the vacuuming operation before coating effectively removes impurity gases, improving coating quality. Compared with traditional deposition furnaces, this deposition furnace offers more flexible and diverse operating states, adapting to more complex coating processes and improving product quality and consistency. Attached Figure Description
[0015] The preferred embodiments will now be described in a clear and easy-to-understand manner, in conjunction with the accompanying drawings, to further explain the above-mentioned characteristics, technical features, advantages, and implementation methods of the present invention.
[0016] Figure 1 This is a schematic diagram of the structure of the present invention; Figure 2This is a schematic diagram of the internal structure of the present invention; Figure 3 This is another schematic diagram of the internal structure from another perspective in this invention; Figure 4 for Figure 2 A schematic diagram of a partial structure of part A in the middle.
[0017] In the diagram: Inner furnace body - 1, Inner furnace cavity - 101, First connecting port - 102, First through port - 103, Second through port - 104, First inner furnace cavity - 105, Second inner furnace cavity - 106, Third inner furnace cavity - 107, First gas outlet - 108, Second gas outlet - 109, Second gas guide port - 110, Upper first inner furnace cavity - 111, Lower first inner furnace cavity - 112, Second connecting port - 113, Material inlet - 114 , outer furnace body-2, outer furnace cavity-201, air inlet-202, first outer furnace cavity-203, second outer furnace cavity-204, second upper outer furnace cavity-205, second lower outer furnace cavity-206, first inner partition-3, first plate-301, second plate-302, first air guide-303, first outer partition-4, first baffle-401, second outer partition-5, second inner partition-6, first elastic element-7. Detailed Implementation
[0018] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the specific implementation methods of the present invention will be described below with reference to the accompanying drawings. Obviously, the drawings described below are merely some embodiments of the present invention. For those skilled in the art, other drawings and other implementation methods can be obtained based on these drawings without any creative effort.
[0019] To keep the drawings concise, each drawing only schematically shows the parts relevant to the invention; these do not represent the actual structure of the product. Furthermore, for ease of understanding, in some drawings, only one of components with the same structure or function is schematically shown, or only one is labeled. In this document, "one" not only means "only one," but can also mean "more than one," and "several" includes "two" and "more than two."
[0020] In this document, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to fixed connections, detachable connections, or integral connections; they can refer to mechanical connections or electrical connections; they can refer to direct connections or indirect connections through an intermediate medium; and they can refer to the internal communication between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.
[0021] Furthermore, in the description of this application, the terms "first," "second," etc., are used only to distinguish descriptions and should not be construed as indicating or implying relative importance.
[0022] Reference Figures 1-4 The first embodiment of the present invention proposes a high-efficiency uniform gas injection deposition furnace for coating a workpiece surface. It includes an inner furnace body 1 with an inner furnace cavity 101 and a first connecting port 102. An outer furnace body 2 is disposed outside the inner furnace body 1, forming an outer furnace cavity 201 between the outer furnace body 2 and the inner furnace body 1. The first connecting port 102 connects the inner furnace cavity 101 and the outer furnace cavity 201. The outer furnace body 2 also has an air inlet 202 leading to the outer furnace cavity 201. A first inner partition 3 is slidably and vertically disposed on the inner wall of the inner furnace cavity 101. The first inner partition 3 has a first plate portion 301 and a second plate portion 302 arranged vertically. The second plate portion 302 is used to support the workpiece. The inner wall of the inner furnace body 1 has a first opening 103 and a second opening 104. After the first plate portion 301 and the second plate portion 302 slide, they block or unblock the first opening 103 and the second opening 104. After blocking, the inner furnace cavity 101 is divided into a first inner furnace cavity 105, a second inner furnace cavity 106 and a third inner furnace cavity 107. The second inner furnace cavity 106 has a first air outlet 108, which connects the second inner furnace cavity 106 to the outside.
[0023] In this embodiment, the first inner partition 3 can slide up and down. When the first plate portion 301 and the second plate portion 302 slide, they can block or unblock the first opening 103 and the second opening 104, thereby dividing the inner furnace cavity 101 into different areas. When coating materials, there are two different working states: exhaust after gas inlet sealing and continuous gas inlet exhaust. The latter often involves simultaneously introducing multiple different gases, all of which require prior vacuuming. In the exhaust after gas inlet sealing working state: first, the material is placed into the inner furnace cavity 101, the furnace body is closed, and a vacuum is applied inside the furnace. Then, gas is introduced into the furnace through the gas inlet 202, and the gas inlet 202 is sealed after gas inlet is completed. At this time, the first plate portion 301 and the second plate portion 302 of the first inner partition 3 slide to block the first opening 103 and the second opening 104, making the inner furnace cavity 101 a relatively sealed space. After coating is completed, the first gas outlet 108 is opened for exhaust. In the continuous gas inlet exhaust working state: similarly, the material is first placed in and a vacuum is applied. During the coating process, various gases are continuously introduced into the outer furnace chamber 201 through the inlet 202, and then enter the inner furnace chamber 101 through the first connecting port 102. The first plate portion 301 and the second plate portion 302 of the first inner partition 3 slide to release the blockage of the first port 103 and the second port 104, allowing the gas to flow in various areas, while continuously exhausting gas through the first outlet 108. These two different operating states meet the requirements of different coating processes. The exhaust method after sealing the inlet is suitable for coating processes with high requirements for gas reaction conditions, ensuring the stability of the gas environment during coating. The continuous inlet and exhaust method is suitable for coating processes requiring the combined action of multiple gases, enabling timely discharge of reacted gases and maintaining the freshness and uniformity of the gas inside the furnace. Regardless of the operating state, the vacuuming operation before coating effectively removes impurity gases, improving coating quality. Compared with traditional deposition furnaces, this deposition furnace offers more flexible and diverse operating states, adapting to more complex coating processes and improving product quality and consistency.
[0024] Furthermore, it also includes a first outer partition 4 that is slidably and vertically disposed within the outer furnace cavity 201, dividing the outer furnace cavity 201 into a first outer furnace cavity 203 and a second outer furnace cavity 204. The first outer partition 4 has a first baffle 401. After the first outer partition 4 slides down, the air inlet 202 leads to the second outer furnace cavity 204, and the first baffle 401 blocks part of the first connecting port 102, so that the second outer furnace cavity 204 and the second inner furnace cavity 106 are connected through the first connecting port 102.
[0025] In this embodiment, a first outer partition 4 is added to the basic structure. The first outer partition 4 is slidably mounted within the outer furnace cavity 201, dividing the outer furnace cavity 201 into a first outer furnace cavity 203 and a second outer furnace cavity 204. The first outer partition 4 has a first stop 401. The first outer partition 4 can slide vertically. When the first outer partition 4 slides downward, the air inlet 202 leads to the second outer furnace cavity 204, and the first stop 401 blocks part of the first connecting port 102. In this case, the second outer furnace cavity 204 and the second inner furnace cavity 106 can still maintain communication through the first connecting port 102. In the working state of the air intake and sealing reaction, the first outer partition 4 slides downward. At this time, the air inlet 202 leads to the second outer furnace cavity 204, and the gas first enters the second outer furnace cavity 204 for preliminary buffering and distribution. Simultaneously, the first baffle 401 partially blocks the first connecting port 102, controlling the flow rate and velocity of gas from the second outer furnace chamber 204 to the second inner furnace chamber 106, allowing the gas to enter the second inner furnace chamber 106 in a more suitable state for the sealing reaction. The action of the first outer baffle 4 can specifically optimize the working state of the sealing reaction after gas intake. Effective control of the gas intake speed and flow rate ensures the stability and uniformity of the gas environment inside the furnace during the sealing reaction, thereby improving the reaction effect and the quality of the coating.
[0026] Furthermore, the first inner furnace cavity 105 has a second air outlet 109. After the first outer partition 4 rises and slides, the air inlet 202 leads to the first outer furnace cavity 203, and the first baffle 401 blocks part of the first connecting port 102, so that the first outer furnace cavity 203 and the third inner furnace cavity 107 are connected through the first connecting port 102. The gas in the third inner furnace cavity 107 drives the first inner partition 3 to slide upward, so that the first outer furnace cavity 203, the first inner furnace cavity 105, the second inner furnace cavity 106 and the third inner furnace cavity 107 are connected through the first connecting port 102, the first through port 103 and the second through port 104, and are connected to the outside through the second air outlet 109.
[0027] In this embodiment, when the first outer partition 4 rises and slides, the air inlet 202 leads to the first outer furnace chamber 203, while the first baffle 401 blocks part of the first connecting port 102, allowing the first outer furnace chamber 203 and the third inner furnace chamber 107 to connect through the first connecting port 102. At this time, the gas pressure in the third inner furnace chamber 107 causes the first inner partition 3 to slide upward, thereby connecting the first outer furnace chamber 203, the first inner furnace chamber 105, the second inner furnace chamber 106, and the third inner furnace chamber 107 to each other through the first connecting port 102, the first opening 103, and the second opening 104, and connecting them to the outside through the second air outlet 109. This design allows for flexible changes in the connection relationship between the chambers within the furnace according to process requirements, achieving different gas flow paths and pressure distributions. Under specific operating conditions, the connection between the chambers and the flow of gas enable more effective exhaust of waste gas, maintaining the freshness and uniformity of the gas inside the furnace, and improving the quality and efficiency of the coating.
[0028] Furthermore, the side of the second plate portion 302 has a first air guide port 303, which is a plurality of circumferentially arranged.
[0029] In this embodiment, during the operation of the deposition furnace, gas can flow and diffuse through these circumferentially arranged first gas guide ports 303. By providing circumferentially arranged first gas guide ports 303 on the side of the second plate portion 302, the gas can be more evenly distributed around the workpiece, reducing dead zones in gas flow, thereby improving the uniformity and quality of the coating. Compared with a structure without these gas guide ports, the gas coverage effect on the workpiece can be significantly improved.
[0030] Furthermore, the first port 103 has a second air guide port 110 around it. The second air guide port 110 is arranged in several circumferential directions. After the first inner partition 3 rises and slides, the airflow entering through the air inlet 202 flows through the first connecting port 102, the second port 104, the first air guide port 303, the first port 103 and the second air guide port 110 in sequence.
[0031] In this embodiment, when the first inner partition 3 rises and slides, the airflow entering through the inlet 202 flows sequentially through the first connecting port 102, the second through port 104, the first air guide port 303, the first through port 103, and the second air guide port 110. By setting the second air guide ports 110 arranged circumferentially around the first through port 103, and in conjunction with the rising and sliding of the first inner partition 3, the gas flow path is further optimized. This allows the gas to flow and diffuse more evenly within the furnace, ensuring that all parts of the workpiece are subjected to uniform gas action, thereby significantly improving the uniformity and quality of the coating. Compared with a structure without this optimized airflow path, it effectively avoids the problem of uneven coating caused by poor gas flow, improving the working efficiency of the deposition furnace and the yield of products.
[0032] Furthermore, the first air inlet 303 and the second air inlet 110 are circumferentially offset from each other.
[0033] In this embodiment, during the operation of the deposition furnace, gas flows through various gas inlets. Due to the circumferential misalignment of the first gas inlet 303 and the second gas inlet 110, the gas flow path becomes more complex and diverse. This circumferential misalignment design allows the gas to diffuse and mix more fully within the furnace space, avoiding the uniformity and limitations of gas flow. This further improves the uniformity of gas distribution, ensuring that the workpiece receives uniform gas action in all directions, significantly improving the uniformity and quality of the coating. Compared to a structure with circumferentially aligned gas inlets, this misalignment can more effectively reduce gas flow inhomogeneity and dead zones, enhance the deposition furnace's ability to process workpieces of different shapes and sizes, and improve the equipment's versatility and the stability of the coating effect.
[0034] Furthermore, it also includes a second outer partition 5 that is synchronously raised and lowered and slidably disposed within the second outer furnace cavity 204, dividing the second outer furnace cavity 204 into a second upper outer furnace cavity 205 and a second lower outer furnace cavity 206; and a second inner partition 6 that is raised and lowered and slidably disposed within the first inner furnace cavity 105, dividing the first inner furnace cavity 105 into an upper first inner furnace cavity 111 and a lower first inner furnace cavity 112.
[0035] In this embodiment, during the vacuuming operation in the continuous gas intake phase, the second outer partition 5 and the first outer partition 4 slide and rise synchronously to adjust the spatial division inside the second outer furnace cavity 204. Simultaneously, the second inner partition 6 slides and rises independently, changing the partitioning state of the first inner furnace cavity 105. For example, during vacuuming, by controlling the sliding positions of the second outer partition 5 and the second inner partition 6, the second upper outer furnace cavity 205, the second lower outer furnace cavity 206, the upper first inner furnace cavity 111, or the lower first inner furnace cavity 112 can be selectively vacuumed individually or in combination. This design allows for more precise control of the vacuum level in each area of the furnace during the continuous gas intake phase. Independent vacuuming of different partitions effectively avoids mutual interference during the vacuuming process, improving the efficiency and quality of vacuuming. This creates a purer and more stable environment for subsequent gas injection and coating processes, contributing to improved uniformity and quality of the coating.
[0036] Furthermore, the inner furnace body 1 also has a second communication port 113, and the second inner partition 6 is slidably mounted on the second outer partition 5. After the second inner partition 6 slides down, the second air outlet 109 communicates with the upper first inner furnace cavity 111. After the second inner partition 6 slides up, the second air outlet 109 communicates with the lower first inner furnace cavity 112.
[0037] In this embodiment, during the continuous gas intake process, the second inner partition 6 slides up and down as needed during vacuuming. If the second inner partition 6 slides down, the second outlet 109 connects to the upper first inner furnace cavity 111, thereby vacuuming the upper first inner furnace cavity 111; if the second inner partition 6 slides up, the second outlet 109 connects to the lower first inner furnace cavity 112, thereby vacuuming the lower first inner furnace cavity 112. By sliding the second inner partition 6 on the second outer partition 5, selective communication between the second outlet 109 and different areas of the first inner furnace cavity 105 is achieved, enabling precise vacuuming control for the upper first inner furnace cavity 111 and the lower first inner furnace cavity 112. This design greatly improves the flexibility and targeting of vacuuming, ensuring that each area achieves an ideal vacuum state. Compared with traditional vacuuming methods, it effectively reduces vacuuming time and energy consumption while improving the vacuuming effect, laying the foundation for uniform gas distribution and high-quality coating during continuous gas intake.
[0038] Furthermore, it also includes a first elastic member 7 with one end disposed on the second outer partition 5 and the other end disposed on the second inner partition 6, providing a force for the second inner partition 6 to slide down relative to the second outer partition 5.
[0039] In this embodiment, during the operation of the deposition furnace, when the second inner partition 6 tends to slide upwards, the first elastic element 7 is compressed, storing elastic potential energy. When the external force applied to the second inner partition 6 disappears or decreases, the first elastic element 7 releases its elastic potential energy, providing a force that causes the second inner partition 6 to slide downwards relative to the second outer partition 5. The first elastic element 7 ensures that the second inner partition 6 can slide down stably even without external force or when the external force is unstable, thereby ensuring accurate communication between the second gas outlet 109 and the corresponding inner furnace cavity 101, improving the reliability and stability of the equipment operation. Simultaneously, the buffering effect of the elastic element reduces the impact and vibration during the sliding of the second inner partition 6, extending the service life of the equipment. Compared to deposition furnaces without this elastic auxiliary device, it can better cope with various changes and disturbances during operation, ensuring the accuracy and continuity of operations such as vacuuming and gas injection, and improving the quality of the coating and production efficiency.
[0040] Furthermore, both the outer furnace body 2 and the inner furnace body 1 have a material inlet 114.
[0041] In this embodiment, during the coating operation, operators or automated equipment can place the workpiece to be coated into the furnace through the material inlets 114 of the outer furnace body 2 and the inner furnace body 1, thus completing the material loading. Both the outer furnace body 2 and the inner furnace body 1 are equipped with material inlets 114, increasing the convenience and flexibility of material loading. Materials can be loaded from the inlets according to actual production needs and operating procedures, improving production efficiency.
[0042] It should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention and are not intended to limit it. Although the present invention has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions can be made to the technical solutions of the present invention without departing from the spirit and scope of the technical solutions of the present invention, and all such modifications or substitutions should be covered within the scope of the claims of the present invention.
Claims
1. An efficient and uniform gas injection deposition furnace for coating the surface of a workpiece, characterized in that: include: An inner furnace body (1), the inner furnace body (1) having an inner furnace cavity (101), and the inner furnace body (1) also having a first communication port (102); an outer furnace body (2), the outer furnace body (2) being arranged outside the inner furnace body (1), and an outer furnace cavity (201) being formed between the outer furnace body (2) and the inner furnace body (1), the first connecting port (102) connecting the inner furnace cavity (101) and the outer furnace cavity (201), the outer furnace body (2) further comprising an air inlet (202), the air inlet (202) leading to the outer furnace cavity (201); A first inner baffle member (3), the first inner baffle member (3) is arranged on the inner wall of the inner furnace cavity (101) in a lifting and sliding manner, the first inner baffle member (3) having a first plate portion (301) and a second plate portion (302) arranged vertically, the second plate portion (302) being used to support the workpiece, the inner wall of the inner furnace body (1) having a first opening (103) and a second opening (104), and the first plate portion (301) and the second plate portion (302) blocking or unblocking the first opening (103) and the second opening (104) after sliding, and after blocking, the inner furnace cavity (101) is divided into a first inner furnace cavity (105), a second inner furnace cavity (106) and a third inner furnace cavity (107), the second inner furnace cavity (106) having a first air outlet (108), the first air outlet (108) connecting the second inner furnace cavity (106) with the outside.
2. The high-efficiency uniform gas injection deposition furnace according to claim 1, characterized in that: Also includes: A first outer baffle (4), the first outer baffle (4) being arranged in the outer furnace cavity (201) to be lifted and slidable, and dividing the outer furnace cavity (201) into a first outer furnace cavity (203) and a second outer furnace cavity (204); the first outer baffle (4) having a first blocking portion (401); after the first outer baffle (4) is lowered and slid, the air inlet (202) leads to the second outer furnace cavity (204), and the first blocking portion (401) blocks a portion of the first connecting port (102), so that the second outer furnace cavity (204) and the second inner furnace cavity (106) are connected through the first connecting port (102).
3. The high-efficiency uniform gas injection deposition furnace according to claim 2, characterized in that: The first inner furnace cavity (105) has a second air outlet (109); after the first outer baffle (4) rises and slides, the air inlet (202) leads to the first outer furnace cavity (203), and the first blocking portion (401) blocks part of the first connecting port (102), so that the first outer furnace cavity (203) and the third inner furnace cavity (107) are connected through the first connecting port (102); the gas in the third inner furnace cavity (107) drives the first inner baffle member (3) to slide upward, so that the first outer furnace cavity (203), the first inner furnace cavity (105), the second inner furnace cavity (106) and the third inner furnace cavity (107) are connected through the first connecting port (102), the first opening (103) and the second opening (104), and are connected with the outside through the second air outlet (109).
4. The high-efficiency uniform gas injection deposition furnace according to claim 1, characterized in that: The side edge of the second plate portion (302) is provided with a first air guide port (303), and the first air guide ports (303) are arranged in a circumferential direction in a plurality.
5. The high-efficiency uniform gas injection deposition furnace according to claim 4, characterized in that: The first opening (103) is surrounded by second air guide ports (110), and a plurality of the second air guide ports (110) are arranged circumferentially. After the first inner baffle member (3) rises and slides, the airflow entering the air inlet (202) flows sequentially through the first connecting port (102), the second opening (104), the first air guide port (303), the first opening (103), and the second air guide port (110).
6. The high-efficiency uniform gas injection deposition furnace according to claim 5, characterized in that: The first air guide port (303) and the second air guide port (110) are arranged offset from each other in the circumferential direction.
7. The high-efficiency uniform gas injection deposition furnace according to claim 3, characterized in that: Also includes: a second outer baffle (5), the second outer baffle (5) being synchronously lifted and slidably arranged with the first outer baffle (4) in the second outer furnace cavity (204), so as to divide the second outer furnace cavity (204) into a second upper outer furnace cavity (205) and a second lower outer furnace cavity (206); A second inner partition (6), the second inner partition (6) being arranged in a lifting and sliding manner in the first inner furnace cavity (105), the second inner partition (6) dividing the first inner furnace cavity (105) into an upper first inner furnace cavity (111) and a lower first inner furnace cavity (112).
8. The high-efficiency uniform gas injection deposition furnace according to claim 7, characterized in that: The inner furnace body (1) further comprises a second connecting opening (113); the second inner partition plate (6) is arranged on the second outer partition plate (5) in a manner of lifting and sliding; after the second inner partition plate (6) slides downward, the second air outlet (109) is connected to the upper first inner furnace cavity (111); after the second inner partition plate (6) slides upward, the second air outlet (109) is connected to the lower first inner furnace cavity (112).
9. The high-efficiency uniform gas injection deposition furnace according to claim 7, characterized in that: Also includes: A first elastic member (7), one end of the first elastic member (7) being arranged on the second outer partition (5) and the other end being arranged on the second inner partition (6), providing a force for the second inner partition (6) to slide downward relative to the second outer partition (5).
10. The high-efficiency uniform gas injection deposition furnace according to claim 1, characterized in that: The outer furnace body (2) and the inner furnace body (1) both have a material inlet (114).