Epitaxial growth chamber structure of molecular beam epitaxy equipment

Abstract

The invention relates to the technical field of molecular beam epitaxy equipment, and discloses an epitaxial growth chamber structure of molecular beam epitaxy equipment, the epitaxial growth chamber structure comprises an equipment main body, a reaction box and a sealing flange, the reaction box is arranged on one side of the equipment main body, the reaction box is matched with the equipment main body for use, and the sealing flange is mounted at the top of the reaction box; the surface of the sealing flange is sleeved with a sealing ring, a sealing reinforcing mechanism is arranged in the sealing ring, and the sealing reinforcing mechanism comprises a notch, a gear ring, a shaft body, a first gear, a second gear, a gear rod, a connecting plate, a moving block, a pressing block and a worm. Through mutual cooperation of the sealing and reinforcing mechanisms, good sealing connectivity between the reaction box and the equipment main body can be improved, leakage caused by environmental change is reduced, so that the overall stability and reliability of the equipment main body are improved, and under the action of the sealing and reinforcing mechanisms, a worker can conveniently maintain the reverse box and the equipment main body.

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