Capacitive mechanical sensor based on flexible electrode, electronic skin and robot

Abstract

The invention relates to a capacitive mechanical sensor based on a flexible electrode, an electronic skin and a robot. The sensor comprises a base body, a positioning piece, a CDC and a processing module. A lower electrode is arranged on the surface of the substrate, a flexible upper electrode is arranged above the lower electrode, and the projection of each upper electrode relative to the lower electrode at least covers partial area of the corresponding lower electrode; the positioning piece is fixed on the base body and is provided with an elastic first part higher than the lower electrode; one end of the upper electrode is fixed relative to the lower electrode or the first part, the other end of the upper electrode is directly or indirectly physically connected with the first part, the first part is lifted relative to the lower electrode to form a bent electrode, and the upper electrode and the lower electrode are isolated through an insulating layer; the first part deforms under the action of external force to drive the upper electrode to change the indirect contact area of the bent part on the lower electrode; the CDC is coupled with the corresponding electrodes to obtain capacitance between the upper and lower electrodes; the processing module is coupled with the CDC and is used for outputting an electric signal representing the acting force according to the capacitor.

Description

Technical Field

[0001] The present invention relates to robot tactile perception, and in particular to a capacitive mechanical sensor, electronic skin and robot based on flexible electrodes. Background Art

[0002] Intelligent robot devices rely on the tactile sensors of the electronic skin on the outer surface to achieve tactile perception functions, and form intelligent responses through the collection and processing of tactile information.

[0003] In terms of tactile sensors, capacitive tactile sensors are currently widely favored by the market due to their many advantages such as high detection accuracy, easy layout, and low cost. At the same time, the existing mature technology capacitance-to-digital conversion circuit (CDC), such as DAI7142 and ADI7147, uses a Δ-∑ modulation method to charge and discharge the measured capacitance multiple times and compare it with the reference capacitance (see: US Patent Number: 5,134,401) to directly convert the measured capacitance value into a digital value, which can increase the measurement sensitivity of the capacitance to 1ff level, and it is also easy to meet the measurement system's requirements for capacitance measurement sensitivity. At the same time, it also has the characteristics of immunity to stray capacitance. In particular, the design of these chips has multiple channels, making the circuit design simple and convenient.

[0004] CN108446042B proposes a capacitive touch sensor and an intelligent robot. The interior of the multifunctional layer is provided with upper and lower layers of electrodes. The upper layer is a cross-shaped common electrode, and the lower layer is four independent electrodes corresponding to the upper cross-shaped common electrode. The upper and lower electrodes constitute four parallel plate capacitors for measuring the size and direction of three-dimensional force. The scheme mainly relies on pressing to produce a change in the distance between the upper and lower electrodes to change the capacitance. The capacitance change is relatively small, resulting in the pressure resolution of the sensor not being particularly excellent.

[0005] In order to improve the pressure resolution of the detection, CN111896165A proposes a capacitive three-dimensional force vector sensor structure. Through the upper electrode of the multifunctional layer, the four-petal lower electrode arranged below, and the insulating layer in the middle, the capacitance is changed mainly by the change of the contact area to realize the detection of the size and direction of the three-dimensional force, and the force resolution of 0.01 grams is achieved, which exceeds the force resolution of 0.019 grams of human fingers. Although the three-dimensional force vector sensing structure of CN111896165A has good mechanical resolution, it also has weaknesses: the upper electrode is inverted to form a lower convex hemisphere inside the multifunctional layer to contact the insulating layer on the lower electrode. The upper electrode must meet both flexible deformation and rebound. The material must be made of conductive rubber. After pressing, the center of the lower convex spherical surface of the conductive rubber is difficult to accurately return to the center of the four-petal lower electrode, and the reference position is prone to deviation. At the same time, long-term use of the lower conductive rubber contact surface wear and material aging can easily aggravate this problem. Summary of the invention

[0006] The present invention aims to enable the capacitive mechanical sensor to overcome the center position deviation caused by pressing rebound while achieving higher mechanical resolution.

[0007] To this end, a capacitive mechanical sensor based on a flexible electrode is provided, comprising a substrate, a positioning member, a capacitance-to-digital conversion circuit, and a processing module; one or more lower electrodes are arranged on the surface of the substrate, an upper electrode is arranged above the lower electrode, the upper electrode is a flexible electrode, and the projection of each upper electrode relative to the lower electrode at least covers a partial area of ​​the corresponding lower electrode; the positioning member is fixed to the substrate and has an elastic first part that is higher than the lower electrode; one end of the upper electrode is fixed relative to the lower electrode or the first part, and the other end is directly or indirectly physically connected to the first part, and the first part is raised relative to the lower electrode to form a curved electrode, the upper electrode and the lower electrode are isolated by an insulating layer, and the first part is deformed by an external force to drive the upper electrode to change the indirect contact area of ​​the curved part on the lower electrode; the capacitance-to-digital conversion circuit is coupled to the corresponding electrode to obtain the capacitance between the upper and lower electrodes; the processing module is coupled to the capacitance-to-digital conversion circuit, and is used to output an electrical signal representing the force based on the capacitance.

[0008] As a possible implementation manner, a first electrode is provided on the upper electrode, and a second electrode is provided on the lower electrode, and a projection of the first electrode relative to the lower electrode at least covers a partial area of ​​the second electrode.

[0009] As another possible implementation, a first electrode is provided as the upper electrode, and a second electrode and a third electrode are provided as the lower electrode. The projection of the first electrode relative to the lower electrode at least synchronously covers a portion of the area of ​​the second electrode and the third electrode, and the shape of the first electrode is configured so that when subjected to circumferential twisting by an external force, a difference in the projection area and / or distance relative to the second electrode and the third electrode can be formed.

[0010] As another possible implementation, a first electrode is provided as the upper electrode, and at least three electrodes are provided as the lower electrode, and the lower electrodes are circumferentially distributed around the geometric center of the first electrode, and the projection of the first electrode relative to the lower electrode at least synchronously covers a partial area of ​​each lower electrode; or, a first electrode is provided as the lower electrode, and at least three electrodes are provided as the upper electrode, and the upper electrodes are circumferentially distributed around the geometric center of the first electrode, and the projection of the first electrode relative to the upper electrode at least synchronously covers a partial area of ​​each upper electrode.

[0011] As another possible implementation, at least three electrodes are arranged circumferentially on the upper electrode, at least one lower electrode is arranged correspondingly below each upper electrode, and the projection of each upper electrode relative to the lower electrode at least covers a portion of the area of ​​the corresponding electrode below. Further, at least two lower electrodes are arranged correspondingly below each upper electrode, and the projection of the upper electrode relative to the lower electrode at least synchronously covers a portion of the area of ​​each corresponding electrode below, and the shape of the upper electrode is configured so that when twisted circumferentially by an external force, a difference in the projection area and / or distance relative to each corresponding electrode below can be formed.

[0012] As an improvement, each upper electrode and / or lower electrode is / are distributed axially symmetrically around the geometric center of the first part.

[0013] As an improvement, a shielding electrode is provided on the substrate, the shielding electrode is arranged around the lower electrode, and forms a shield by grounding or forms an equipotential shield by coupling a capacitor digital conversion circuit. Further, the upper electrode is coupled with the shielding electrode; and / or, one end of the upper electrode is physically connected to the shielding electrode to form a fixation relative to the lower electrode. Further, the substrate is a circuit board, the lower electrode and the shielding electrode are printed on the surface of the circuit board; the upper electrode is formed by FPC and uses gravity to naturally form a curved electrode.

[0014] As an improvement, the upper electrode is bent outward or inward relative to the first portion.

[0015] As an improvement, the first part is made of pure elastic material.

[0016] As an improvement, the thickness of the insulating layer is configured to be between 10 nanometers and 1 millimeter.

[0017] As an improvement, a rigid pressure-bearing component for bearing force is fixed to the first part, and the upper electrode is connected to the first part via the rigid pressure-bearing component.

[0018] Also provided is an electronic skin comprising the capacitive mechanical sensor.

[0019] A robot is also provided, comprising the electronic skin.

[0020] Compared with the prior art, the advantages of the present invention are: the upper electrode is lifted by the first part and naturally bends under gravity, so that the structure is simple and flexibility is ensured, and flexibility is separated from elasticity. The first part serves as a rebound, positioning, and guide to solve the position deviation of the centers of the upper and lower electrodes and ensure the unity of the reference; the flexibly bent upper electrode is isolated from the lower electrode by an insulating layer, forming a change in the contact area of ​​the bent part to produce a huge capacitance change, thereby achieving a higher mechanical resolution. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 The schematic diagram of the mechanical sensor structure that only measures normal force is given;

[0022] Figure 2 The schematic diagram of the mechanical sensor structure for measuring normal force and torque is given;

[0023] Figure 3 The schematic diagram of the first mechanical sensor structure for measuring XYZ three-dimensional force is given;

[0024] Figure 4 Another mechanical sensor structure for measuring three-dimensional force is given;

[0025] Figure 5 The schematic diagram of the third mechanical sensor structure for measuring three-dimensional force is given;

[0026] Figure 6 The schematic diagram of the mechanical sensor structure for measuring three-dimensional force and torque is given; and

[0027] Figure 7 A schematic diagram of a structure in which the upper electrode is bent outward relative to the first portion is given. DETAILED DESCRIPTION

[0028] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the accompanying drawings in the embodiments of the present invention.

[0029] As an example, the capacitive mechanical sensor includes a substrate, a positioning member, a capacitance digital conversion circuit, and a processing module. For example, a circuit board is used as a substrate for bearing, one or more lower electrodes are arranged on the surface of the circuit board, and the lower electrode is fixed to the substrate, which can be realized by printing a metal electrode on the surface of the circuit board. There is an upper electrode above the lower electrode, and the upper electrode is a flexible electrode, such as a flexible FPC, which is used to achieve flexible deformation. The projection of each upper electrode relative to the lower electrode at least covers part of the area of ​​the corresponding lower electrode, forming an upper and lower distribution and projection intersection. The positioning member is fixed to the circuit board as a positioning member, and has an elastic first part that is higher than the lower electrode. The first part provides elastic force to return the upper electrode and plays a role in positioning and guiding. One end of the upper electrode is fixed relative to the lower electrode or the first part, and the other end is directly or indirectly physically connected to the first part. The first part is raised relative to the lower electrode to form a curved electrode. The upper electrode and the lower electrode are isolated by an insulating layer. The first part is deformed by an external force to drive the upper electrode to change the indirect contact area of ​​the curved part on the lower electrode, that is, the area of ​​the upper electrode pressed on the lower electrode through the insulating layer. The capacitance-to-digital conversion circuit is coupled to the corresponding electrodes to obtain the capacitance between the upper and lower electrodes; the processing module is coupled to the capacitance-to-digital conversion circuit to output an electrical signal representing the force according to the capacitance.

[0030] When the first part is under pressure, the upper electrode bends downward or is pulled sideways along the direction of the force of the first part, and the indirect contact area between the bent part of the upper electrode and the lower electrode changes significantly, and the capacitance value changes. Since there is only a thin insulating layer between the upper and lower electrodes, the distance between the upper and lower electrodes in the contact area is very close. Such a close distance plus the dielectric constant of the insulating layer that is several times greater than that of air makes the capacitance change based on the significant change in the indirect contact area very large. Therefore, a higher mechanical resolution comparable to that of a human hand can be achieved. After pressing and releasing, the first part elastically rebounds, and at the same time, its positioning and guiding function is used to align the centers of the upper and lower electrodes, and the sensor returns to its original state, maintaining a unified reference.

[0031] As an exemplary implementation, as an improvement, the first part is made of pure elastic material, such as a spring, to solve the problem that rubber doped with conductive graphite carbon black or metal particles changes the rubber properties, causes the elastic force to deteriorate, and the rebound speed is insufficient.

[0032] As another improvement, the thickness of the insulating layer is configured to be between 10 nanometers and 1 mm. The insulating layer is formed by insulating ink. If the thickness of the insulating ink is 10 microns, the dielectric constant of the insulating ink is 3. According to the capacitance formula C = εr*ε0*A / d, ε0 = 8.854187817x 10-12F / m, ε0 is the vacuum dielectric constant, εr is the relative dielectric constant, and 1mm 2 The contact area capacitance is 886*3=2.66pF. The actual capacitance is the series connection of air capacitance and insulating ink. When it is 10 microns away, the capacitance becomes the series connection of 0.886pF and 2.66pF, which will drop to 0.66pF, which is equivalent to 2pF. According to the high-precision capacitance measurement of the above sensor structure, the change can reach 4 million. If MEMS technology is used, the insulating coating can be 1um, 0.1mm 2 Just change.

[0033] As another improvement, a rigid pressure-bearing component for bearing force, such as a pressure plate, is fixed to the first part, and the upper electrode is connected to the first part via the rigid pressure-bearing component. The provision of the pressure plate helps to stabilize the force and enable the PFC to be flat.

[0034] To help understand the various possibilities of implementing the above-mentioned solutions, multiple implementation schemes are given below. It should be understood that these schemes are merely illustrations of exemplary structural implementation methods.

[0035] Figure 1A schematic diagram of the structure of a mechanical sensor that only measures normal force is given. A first electrode 102 is provided on the upper electrode, a lower electrode is printed on the top surface of a substrate 101, a second electrode 103 is provided on the lower electrode, and the projection of the first electrode 102 relative to the lower electrode at least covers a partial area of ​​the second electrode 103. The two ends of the first electrode 102 are connected to a pressure plate 105 to be raised, and the middle part sags to form a bend and presses on the second electrode 103 to form an indirect contact, and the pressure plate 105 is fixed to the top of the spring 104 to bear the force. When the pressure plate 105 is subjected to vertical pressure, the first electrode 102 bends downward with the pressure plate, and the indirect contact area with the second electrode 103 becomes larger, and the capacitance value becomes larger. Furthermore, the pressing can be set to achieve a change from line contact to surface contact, forming a large multiple of the area change of the indirect contact area before and after the pressing process, further expanding the amplitude of the capacitance value change.

[0036] Figure 2 A schematic diagram of the structure of a mechanical sensor for measuring normal force and torsion is given. A first electrode 201 is provided on the upper electrode, and a second electrode 202 and a third electrode 203 are provided on the lower electrode. The projection of the first electrode 201 relative to the lower electrode at least covers part of the area of ​​the second electrode 202 and the third electrode 203 simultaneously, and the shape of the first electrode 201 is configured to form a difference in the projection area and / or distance relative to the second electrode 202 and the third electrode 203 when subjected to circumferential twisting by an external force. The two ends of the first electrode 201 are connected to a pressure plate 105, which is raised by a spring 204, and the middle part of the first electrode 201 sags to form a bend and is simultaneously pressed on the second electrode 202 and the third electrode 203 to form indirect contact. When the pressure plate 205 is subjected to vertical pressure, the first electrode 201 bends downward with the pressure plate, the indirect contact area with the electrodes 202 and 203 increases, and the capacitance value increases; when the pressure plate 205 is subjected to circumferential force, the first electrode 201 produces circumferential torsion with the pressure plate, and the capacitance C1 formed by the first electrode 201 and the second electrode 202, and the capacitance C2 formed by the first electrode 201 and the third electrode 203 have a difference in two capacitance values, and the torque can be obtained based on the difference.

[0037] Figure 3 The schematic diagram of the mechanical sensor structure for measuring XYZ three-dimensional force is given. The upper electrode is provided with a first electrode 301, which can be such as Figure 3As shown, multiple strip electrodes are connected together to form a lower convex arc surface, or a single electrode is used to form a similar structure. At least three electrodes 302, 303, and 304 are provided on the lower electrode. The three electrodes 302, 303, and 304 are circumferentially distributed around the geometric center of the first electrode 301. The projection of the first electrode 301 relative to the lower electrode at least synchronously covers a portion of the area of ​​each lower electrode. The two ends of the first electrode 301 are connected to a pressure plate 306. The pressure plate 306 is lifted by a spring 305. The middle part of the first electrode 301 sags to form a bend and is synchronously pressed on each lower electrode to form an indirect contact. When the pressure plate 306 is subjected to vertical pressure, the first electrode 301 bends downward with the pressure plate, and the contact area with each lower electrode becomes larger, and the capacitance value becomes larger; when the pressure plate 306 receives horizontal pressure, the first electrode 301 is pulled sideways with the pressure plate, and the indirect contact area between the first electrode 301 and the three lower electrodes changes differently, thereby judging the direction and magnitude of the horizontal pressure. Or, as Figure 4 Another mechanical sensor structure for measuring XYZ three-dimensional force is given. Figure 3 It has the advantage of stronger sensitivity. Specifically, the first electrode 401 is set as the lower electrode, and a circular electrode is used to achieve easy manufacturing. The upper electrode is set with at least three electrodes 402, 403, and 404. The upper electrodes 402, 403, and 404 are circumferentially distributed around the geometric center of the first electrode 401. The projection of the first electrode 401 relative to the upper electrode at least synchronously covers a partial area of ​​each upper electrode, thereby realizing the above-mentioned detection of vertical pressure and / or horizontal pressure.

[0038] Figure 5 The third mechanical sensor structure for measuring XYZ three-dimensional force is shown. The sensor includes a circuit board 501, a lower electrode 502, a flexible PCB upper electrode 503, a spring 504, and an upper laminate 505. A capacitance detection chip and four fan-shaped electrodes are arranged on the circuit board. The chip integrates a capacitance digital conversion circuit and a processing module. The upper electrode 503 is provided with four strip PFC electrodes distributed circumferentially. A fan-shaped lower electrode 502 is correspondingly arranged below each upper electrode. The projection of each upper electrode 503 relative to the lower electrode at least covers a partial area of ​​the corresponding electrode below. Each upper electrode 503 and / or lower electrode 502 is axially symmetrically distributed around the geometric center of the spring 504, forming a uniform distribution to improve the accuracy of the sensor. One end of the FPC is connected to the circuit board, and the other end is connected to the pressing plate 505. The pressing plate 505 and the circuit board 501 are supported by a spring 504, and the spring 504 plays a role in positioning and guiding. When the pressure plate 505 is subjected to vertical pressure, the FPC bends downward with the pressure plate, the contact area with the fan-shaped electrode increases, and the capacitance value increases; when the pressure plate receives horizontal pressure, the FPC is pulled sideways with the pressure plate, and the contact areas of the four FPCs and the fan-shaped electrodes change differently, thereby judging the direction and magnitude of the horizontal pressure.

[0039] Furthermore, two lower electrodes 5021 and 5022 are correspondingly arranged below each upper electrode 503, and the projection of the upper electrode relative to the lower electrode at least synchronously covers part of the area of ​​the corresponding electrodes below, and the shape of the upper electrode is configured to form a difference in the projection area and / or distance relative to the corresponding electrodes below when twisted circumferentially by an external force. Figure 5 On this basis, the electrode 503 on the FPC spans across two fan-shaped electrodes in the width direction. At this time, the torque is further measured on the basis of measuring the three-dimensional force.

[0040] Further, see Figure 6 , a shielding electrode 506 is arranged on the substrate 501, and the shielding electrode 506 is arranged around the lower electrode, and forms a shield by grounding or forms an equipotential shield by coupling a capacitor digital conversion circuit, so as to improve the anti-interference ability of mechanical measurement. Preferably, one end of the FPC is coupled with the shielding electrode 506 to jointly form a shield for the lower electrode. At this time, the FPC improves the stability of the sensor as a part of the shielding electrode; and / or, one end of the FPC is directly physically connected to the shielding electrode to form a fixation relative to the lower electrode, so as to achieve a simplified and stable structure. On this basis, the lower electrode and the shielding electrode are printed on the surface of the circuit board. At this time, the lower electrode and the shielding electrode are arranged in the same plane, and one end of the FPC is fixed relative to the lower electrode. Compared with fixing to the fixed pressure plate at both ends, the reliability of the sensor recovery can be further improved.

[0041] As an example, the upper electrode is allowed to be set as follows Figure 5 or Figure 6 As shown, the first portion is bent inwardly relative to the center thereof, and may also be configured as follows Figure 7 The first part is bent outwards relative to the center, and the shielding electrode 506 is located on the pressure plate 505 to couple the upper electrodes. The outward bending solution expands when pressed, and forms a larger bending deformation than the inward bending solution, so the outward bending solution has the advantage of a wider range.

[0042] Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the present invention, rather than to limit the scope of protection of the present invention. Although the present invention has been described in detail with reference to the preferred embodiments, those skilled in the art should understand that the technical solution of the present invention can be modified or replaced by equivalents without departing from the essence and scope of the technical solution of the present invention.

Claims

1. A capacitive mechanical sensor based on a flexible electrode, characterized in that: It includes a substrate, a positioning member, a capacitance-to-digital conversion circuit, and a processing module; One or more lower electrodes are arranged on the surface of the substrate, and an upper electrode is arranged above the lower electrode. The upper electrode is a flexible electrode, and the projection of each upper electrode relative to the lower electrode at least covers a part of the area of ​​the corresponding lower electrode; The positioning member is fixed to the substrate and has an elastic first portion that is higher than the lower electrode; One end of the upper electrode is fixed relative to the lower electrode or the first part, and the other end is directly or indirectly physically connected to the first part. The first part is raised relative to the lower electrode to form a curved electrode. The upper electrode and the lower electrode are isolated by an insulating layer. The first part is deformed by an external force to drive the upper electrode to change the indirect contact area of ​​the curved part on the lower electrode. The capacitance-to-digital conversion circuit is coupled to the corresponding electrodes to obtain the capacitance between the upper and lower electrodes; The processing module is coupled to a capacitance-to-digital conversion circuit and is used to output an electrical signal representing the force according to the capacitance.

2. The capacitive mechanical sensor according to claim 1, characterized in that: The upper electrode is provided with a first electrode, the lower electrode is provided with a second electrode, and the projection of the first electrode relative to the lower electrode at least covers a partial area of ​​the second electrode.

3. The capacitive mechanical sensor according to claim 1, characterized in that: A first electrode is arranged on the upper electrode, and a second electrode and a third electrode are arranged on the lower electrode. The projection of the first electrode relative to the lower electrode at least synchronously covers a portion of the area of ​​the second electrode and the third electrode, and the shape of the first electrode is configured so that it can form a difference in the projection area and / or distance relative to the second electrode and the third electrode when subjected to circumferential twisting by an external force.

4. The capacitive mechanical sensor according to claim 1, characterized in that: The upper electrode is provided with a first electrode, and the lower electrode is provided with at least three electrodes, and the lower electrodes are circumferentially distributed around the geometric center of the first electrode, and the projection of the first electrode relative to the lower electrode at least synchronously covers a partial area of ​​each lower electrode; Alternatively, the lower electrode is provided with a first electrode, and the upper electrode is provided with at least three electrodes, the upper electrodes are circumferentially distributed around the geometric center of the first electrode, and the projection of the first electrode relative to the upper electrode at least synchronously covers a partial area of ​​each upper electrode.

5. The capacitive mechanical sensor according to claim 1, characterized in that: The upper electrode is provided with at least three electrodes distributed circumferentially, at least one lower electrode is correspondingly provided below each upper electrode, and the projection of each upper electrode relative to the lower electrode at least covers a partial area of ​​the corresponding electrode below.

6. The capacitive mechanical sensor according to claim 5, characterized in that: At least two lower electrodes are arranged below each upper electrode, and the projection of the upper electrode relative to the lower electrode at least synchronously covers a portion of the area of ​​the corresponding electrodes below. The shape of the upper electrode is configured so that it can form a difference in the projection area and / or distance relative to the corresponding electrodes below when subjected to circumferential twisting by external force.

7. The capacitive mechanical sensor according to claim 4, 5 or 6, characterized in that: The upper electrodes and / or lower electrodes are / is / are ...

8. The capacitive mechanical sensor according to any one of claims 1 to 6, characterized in that: A shielding electrode is arranged on the substrate, which surrounds the lower electrode and forms a shield through grounding or forms an equipotential shield through a coupling capacitor digital conversion circuit.

9. The capacitive mechanical sensor according to claim 8, characterized in that: The upper electrode is coupled to the shielding electrode; And / or, one end of the upper electrode is physically connected to the shielding electrode to be fixed relative to the lower electrode.

10. The capacitive mechanical sensor according to claim 9, characterized in that: The substrate is a circuit board, and the lower electrode and the shielding electrode are printed on the surface of the circuit board; The upper electrode is formed by FPC and uses gravity to naturally form a curved electrode.

11. The capacitive mechanical sensor according to claim 1, characterized in that: The upper electrode is bent outward or inward relative to the center of the first portion.

12. The capacitive mechanical sensor according to claim 1, characterized in that: The first part is made of pure elastic material.

13. The capacitive mechanical sensor according to claim 1, characterized in that: The thickness of the insulating layer is configured to be between 10 nanometers and 1 millimeter.

14. The capacitive mechanical sensor according to claim 1, characterized in that: A rigid pressure-bearing component for bearing force is fixed to the first part, and the upper electrode is connected to the first part via the rigid pressure-bearing component.

15. An electronic skin, characterized in that: Comprising a capacitive mechanical sensor as claimed in any one of claims 1 to 14.

16. A robot, characterized in that: Comprising the electronic skin as described in claim 15.

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