Two-dimensional vector body holographic grating, manufacturing equipment and manufacturing method thereof and ray machine

Abstract

The invention relates to the technical field of near-to-eye display, in particular to a two-dimensional vector body holographic grating, a manufacturing device and method thereof and an optical machine, and the manufacturing device of the two-dimensional vector body holographic grating comprises a sample table used for fixing a holographic dry plate; the light emitting assembly is used for emitting exposure light; the beam splitting exposure assembly is located on a light path of the exposure light and used for splitting the exposure light into a first light beam, a second light beam, a third light beam and a fourth light beam, the first light beam is vertically emitted into the first surface of the holographic plate, and the second light beam, the third light beam and the fourth light beam are respectively emitted into the second surface of the holographic plate at preset incident angles; the orthographic projection of the second light beam on the holographic plate and the orthographic projection of the third light beam on the holographic plate are located on the same straight line and have opposite propagation directions, and the propagation direction of the orthographic projection of the fourth light beam on the holographic plate is perpendicular to the propagation direction of the orthographic projection of the second light beam on the holographic plate.

Description

Technical Field

[0001] The present application relates to the field of near-eye display technology, and in particular to a two-dimensional vector volume holographic grating and a manufacturing device, a manufacturing method, and an optical machine thereof. Background Art

[0002] With the rapid development of AR near-eye display technology, how to reduce the size and weight of display devices, provide sufficient information and field of view, and achieve lightweight equipment and high spatial resolution and high angular resolution near-eye three-dimensional presentation effects has become the key issue that near-eye display devices must first solve. Diffractive devices with more powerful light field control capabilities and thinner structures are an effective way to solve these problems and improve display performance.

[0003] Volume holographic waveguides use volume holographic gratings as light coupling / decoupling devices. Compared with traditional array waveguides that use geometric optical elements as light coupling / decoupling devices, holographic waveguides can effectively reduce the thickness and weight of display systems. Two-dimensional pupil expansion technology uses the reflective array surface of the optical expansion waveguide to expand the light entering the optical expansion waveguide in a two-dimensional direction and emit light outside the optical expansion waveguide to form an image.

[0004] However, the two-dimensional pupil-expanding holographic waveguide in the related art is usually a three-grating (coupling-in grating, turning grating, and coupling-out grating) structure, which requires three exposures and has a complex process. In addition, the complex three-grating structure makes the optical machine larger and more bulky, which is not conducive to the widespread application of two-dimensional pupil-expanding holographic waveguide. Summary of the invention

[0005] In order to simplify the preparation process of a two-dimensional pupil-expanding volume holographic optical waveguide and realize the thinness and lightness of the two-dimensional pupil-expanding volume holographic optical waveguide, the present application provides a two-dimensional vector volume holographic grating and a manufacturing device, a manufacturing method, and an optical machine thereof.

[0006] The present application provides a two-dimensional vector volume holographic grating and its manufacturing equipment, manufacturing method, and optical machine using the following technical solutions: A manufacturing device for a two-dimensional vector volume holographic grating, comprising: Sample stage, used to fix the holographic dry plate; A light emitting component, used for emitting exposure light; A beam splitting exposure component is located on the optical path of the exposure light, and is used to split the exposure light into a first light beam, a second light beam, a third light beam and a fourth light beam, and to make the first light beam vertically incident on the first surface of the holographic dry plate, and to make the second light beam, the third light beam and the fourth light beam respectively incident on the second surface of the holographic dry plate at predetermined incident angles, and the orthographic projection of the second light beam on the holographic dry plate and the orthographic projection of the third light beam on the holographic dry plate are located on the same straight line and have opposite propagation directions, and the orthographic projection of the fourth light beam on the holographic dry plate is vertical to the orthographic projection of the second light beam on the holographic dry plate.

[0007] By adopting the above technical scheme, the sample stage fixes the holographic dry plate, the light emitting component emits the exposure light, and the beam splitting exposure component processes the exposure light so that the exposure light is divided into a first light beam, a second light beam, a third light beam and a fourth light beam, so that the first light beam is vertically incident on the first surface of the holographic dry plate, and the second light beam, the third light beam and the fourth light beam are respectively incident on the second surface of the holographic dry plate at predetermined incident angles, and the orthographic projection of the second light beam on the holographic dry plate and the orthographic projection of the third light beam on the holographic dry plate are located on the same straight line and have opposite propagation directions, and the propagation direction of the orthographic projection of the fourth light beam on the holographic dry plate is perpendicular to the propagation direction of the orthographic projection of the second light beam on the holographic dry plate; in this way, the first light beam and the second light beam are exposed to interfere with each other to form a first grating propagating along the second direction, the first light beam and the third light beam are exposed to interfere with each other to form a second grating propagating along the third direction, the first light beam and the fourth light beam are exposed to interfere with each other to form a third grating propagating along the fourth direction, the propagation direction of the first grating is opposite to the propagation direction of the second grating, and the propagation direction of the third grating is perpendicular to the propagation direction of the first grating, and finally a two-dimensional vector volume holographic grating is prepared.

[0008] Optionally, the beam splitting exposure component includes a beam splitting component and a reflecting component; the beam splitting component is used to split the exposure light into the first light beam, the second light beam, the third light beam and the fourth light beam, and the beam splitting component includes at least one and at most three beam splitters; the reflecting component includes a first reflecting component, a second reflecting component, a third reflecting component and a fourth reflecting component, the first reflecting component is used to reflect the first light beam so that the first light beam is incident vertically onto the first surface of the holographic dry plate, the second reflecting component is used to reflect the second light beam so that the second light beam is incident onto the second surface of the holographic dry plate at a second predetermined incident angle, the third reflecting component is used to reflect the third light beam so that the third light beam is incident onto the second surface of the holographic dry plate at a third predetermined incident angle, and the fourth reflecting component is used to reflect the fourth light beam so that the fourth light beam is incident onto the second surface of the holographic dry plate at a fourth predetermined incident angle.

[0009] By adopting the above technical scheme, the first light beam is vertically incident on the first surface of the holographic dry plate using the first reflection component, the second light beam is incident on the second surface of the holographic dry plate at a second predetermined incident angle using the second reflection component, the third light beam is incident on the second surface of the holographic dry plate at a third predetermined incident angle using the third reflection component, and the fourth light beam is incident on the second surface of the holographic dry plate at a fourth predetermined incident angle using the fourth reflection component.

[0010] Optionally, the beam splitter assembly includes a first beam splitter, a second beam splitter and a third beam splitter; the first beam splitter is arranged in the light emitting direction of the exposure light, and is used to split the exposure light into the first light beam and a first total light beam; the second beam splitter is arranged on the optical path of the first total light beam, and is used to split the first total light beam into the second light beam and the second total light beam; the third beam splitter is arranged on the optical path of the second total light beam, and is used to split the second total light beam into the third light beam and the fourth light beam.

[0011] By adopting the above technical solution, the exposure light is divided into a first light beam, a second light beam, a third light beam and a fourth light beam by using a first beam splitter, a second beam splitter and a third beam splitter.

[0012] Optionally, the first beam splitter, the second beam splitter and the third beam splitter are sequentially located in the light emitting direction of the exposure light; The first reflective assembly comprises a first reflector, which is arranged on the optical path of the first light beam and is used to reflect the first light beam and make the first light beam vertically incident on the first surface of the holographic dry plate; The second reflective assembly comprises a second reflective mirror, which is disposed on the optical path of the second light beam and is used to reflect the second light beam and make the second light beam incident on the second surface of the holographic dry plate at the second preset incident angle; The third reflective assembly comprises a third reflective mirror, which is arranged on the optical path of the third light beam and is used to reflect the third light beam and make the third light beam enter the second surface of the holographic dry plate at the third preset incident angle; The fourth reflective assembly comprises a fourth reflector, a fifth reflector and a sixth reflector, and the fourth reflector, the fifth reflector and the sixth reflector are used to sequentially reflect the fourth light beam and make the fourth light beam enter the second surface of the holographic dry plate at the fourth preset incident angle.

[0013] By adopting the above technical scheme, the first light beam is vertically incident on the first surface of the holographic dry plate by using the first reflector, the second light beam is incident on the second surface of the holographic dry plate at a second predetermined incident angle by using the second reflector, the third light beam is incident on the second surface of the holographic dry plate at a third predetermined incident angle by using the third reflector, and the fourth light beam is incident on the second surface of the holographic dry plate at a fourth predetermined incident angle by using the fourth reflector, the fifth reflector and the sixth reflector.

[0014] Optionally, the second preset incident angle is equal to the third preset incident angle.

[0015] By adopting the above technical solution, the grating formed after the interference exposure of the first light beam and the second light beam is completely symmetrical with the grating formed after the interference exposure of the first light beam and the second light beam.

[0016] Optionally, the light emitting component includes a first light emitting component, a second light emitting component and a third light emitting component, and the first light emitting component, the second light emitting component and the third light emitting component are parallel to each other and have the same light emitting direction; The first light emitting component comprises a first light source, a first collimator and a reflector, wherein the first collimator and the reflector are sequentially located on a light emitting path of the first light source, and the reflector is used to make the first light emitted by the first light source propagate along a first direction; The second light emitting assembly comprises a second light source, a second collimator and a second dichroic mirror, the second collimator and the second dichroic mirror are sequentially located on the light emitting path of the second light source, the second dichroic mirror is located in the first direction of the reflector, and the second dichroic mirror is used to transmit the first light and make the second light emitted by the second light source propagate along the first direction; The third light emitting component comprises a third light source, a third collimator and a third dichroic mirror, wherein the third collimator and the third dichroic mirror are sequentially located on the light emitting path of the third light source, the third dichroic mirror is located in the first direction of the second dichroic mirror, and the third dichroic mirror is used to transmit the first light and the second light, and make the third light emitted by the third light source propagate along the first direction; the first light, the second light and the third light are combined into an exposure light beam at the third dichroic mirror and propagate in the first direction; The first light source, the second light source, and the third light source are respectively selected from one of a red light source, a green light source, and a blue light source and are different from each other.

[0017] By adopting the above technical solution, the color output of the light emitting component is achieved.

[0018] Optionally, the production equipment further includes a special-shaped prism and a light-guiding prism, wherein the light-guiding prism is configured to be attached to the first surface of the holographic dry plate, and the special-shaped prism is configured to be attached to the second surface of the holographic dry plate.

[0019] By adopting the above technical solution, while ensuring the incident angles of the first light beam, the second light beam, the third light beam and the fourth light beam, stray light is eliminated, thereby improving the quality and production yield of the two-dimensional vector volume holographic grating.

[0020] A method for manufacturing a two-dimensional vector volume holographic grating, wherein the manufacturing device described in any embodiment of the present application is used to implement each step of the manufacturing method, and the manufacturing method comprises: Fixing the holographic plate to be exposed; Emits exposure light through a light emitting component of the manufacturing device; The exposure light is divided into a first light beam, a second light beam, a third light beam and a fourth light beam by a beam splitting exposure component of the manufacturing equipment, and the first light beam is vertically incident on the first surface of the holographic dry plate, and the second light beam, the third light beam and the fourth light beam are respectively incident on the second surface of the holographic dry plate at predetermined incident angles; the orthographic projection of the second light beam on the holographic dry plate and the orthographic projection of the third light beam on the holographic dry plate are located on the same straight line and propagate in opposite directions, and the orthographic projection of the fourth light beam on the holographic dry plate is vertical to the propagation direction of the orthographic projection of the second light beam on the holographic dry plate; The first light beam and the second light beam are exposed to interfere with each other to form a first grating propagating along a second direction, the first light beam and the third light beam are exposed to interfere with each other to form a second grating propagating along a third direction, and the first light beam and the fourth light beam are exposed to interfere with each other to form a third grating propagating along a fourth direction, thereby finally preparing a two-dimensional vector volume holographic grating; wherein, the second direction is opposite to the third direction, and the fourth direction is perpendicular to the second direction.

[0021] By adopting the above technical scheme, the exposure light is emitted by the light emitting component, and the exposure light is processed by the beam splitting exposure component, so that the exposure light is divided into a first light beam, a second light beam, a third light beam and a fourth light beam, so that the first light beam is vertically incident on the first surface of the holographic dry plate, and the second light beam, the third light beam and the fourth light beam are respectively incident on the second surface of the holographic dry plate at predetermined incident angles, and the orthographic projection of the second light beam on the holographic dry plate and the orthographic projection of the third light beam on the holographic dry plate are located on the same straight line and have opposite propagation directions, and the propagation direction of the orthographic projection of the fourth light beam on the holographic dry plate is perpendicular to the propagation direction of the orthographic projection of the second light beam on the holographic dry plate; in this way, the first light beam and the second light beam are exposed to interfere with each other to form a first grating propagating along the second direction, the first light beam and the third light beam are exposed to interfere with each other to form a second grating propagating along the third direction, the first light beam and the fourth light beam are exposed to interfere with each other to form a third grating propagating along the fourth direction, the propagation direction of the first grating is opposite to the propagation direction of the second grating, and the propagation direction of the third grating is perpendicular to the propagation direction of the first grating, and finally a two-dimensional vector volume holographic grating is prepared.

[0022] A two-dimensional vector volume holographic grating is prepared by using the manufacturing device described in any embodiment of the present application and adopting the manufacturing method described in any embodiment of the present application.

[0023] An optical machine comprises the two-dimensional vector volume holographic grating described in the present application.

[0024] In summary, the present application includes at least one of the following beneficial technical effects: 1. Using a light emitting component to emit exposure light, using a beam splitting exposure component to process the exposure light, so that the exposure light is divided into a first light beam, a second light beam, a third light beam and a fourth light beam, so that the first light beam is vertically incident on the first surface of the holographic dry plate, and the second light beam, the third light beam and the fourth light beam are respectively incident on the second surface of the holographic dry plate at predetermined incident angles, and the orthographic projection of the second light beam on the holographic dry plate and the orthographic projection of the third light beam on the holographic dry plate are located on the same straight line and have opposite propagation directions, and the orthographic projection of the fourth light beam on the holographic dry plate is perpendicular to the propagation direction of the orthographic projection of the second light beam on the holographic dry plate; in this way, the first light beam and the second light beam are exposed to interfere with each other to form a first grating propagating along the second direction, the first light beam and the third light beam are exposed to interfere with each other to form a second grating propagating along the third direction, the first light beam and the fourth light beam are exposed to interfere with each other to form a third grating propagating along the fourth direction, the propagation direction of the first grating is opposite to the propagation direction of the second grating, and the propagation direction of the third grating is perpendicular to the propagation direction of the first grating, and finally a two-dimensional vector volume holographic grating is prepared; 2. The grating after the interference exposure of the first light beam and the second light beam is completely symmetrical with the grating after the interference exposure of the first light beam and the second light beam; 3. It eliminates stray light and improves the quality and production yield of two-dimensional vector volume holographic grating. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 This is a first structural schematic diagram of the equipment for manufacturing a two-dimensional vector volume holographic grating in Example 1 of the present application.

[0026] Figure 2 It is a schematic diagram of the optical path of the two-dimensional vector volume holographic grating in Example 1 of the present application.

[0027] Figure 3 This is a second structural schematic diagram of the equipment for manufacturing the two-dimensional vector volume holographic grating in Example 2 of the present application.

[0028] Figure 4 It is a schematic diagram of the optical path of the two-dimensional vector volume holographic grating in Example 2 of the present application.

[0029] Figure 5 It is a flow chart of the method for manufacturing a two-dimensional vector volume holographic grating in Example 3 of the present application.

[0030] Description of reference numerals: 11. first light source; 111. first light ray; 12. second light source; 121. second light ray; 13. third light source; 131. third light ray; 21. first collimator; 22. second collimator; 23. third collimator; 31. reflector; 32. second dichroic mirror; 33. third dichroic mirror; 41. first beam splitter; 411. first light beam; 42. second beam splitter; 421. second light beam; 43. third beam splitter; 431. third light beam; 432. fourth light beam; 51. first reflector; 52. second reflector; 53. third reflector; 54. fourth reflector; 55. fifth reflector; 56. sixth reflector; 57. seventh reflector; 58. eighth reflector; 6. special-shaped prism; 7. light-guiding prism; 8. holographic dry plate. DETAILED DESCRIPTION

[0031] The following is combined with Figure 1-5 This application is described in further detail.

[0032] The embodiments of the present application disclose a two-dimensional vector volume holographic grating and a manufacturing method, manufacturing equipment, and optical machine thereof.

[0033] Example 1 Reference Figure 1 and Figure 2This embodiment provides a two-dimensional vector volume holographic grating manufacturing device, which includes a sample stage, a light emitting component and a beam splitting exposure component. The sample stage is used to fix the holographic dry plate 8; the light emitting component is used to emit exposure light; the beam splitting exposure component is located on the light path of the exposure light, and is used to split the exposure light, and project the split light beams onto the holographic dry plate 8 to perform exposure processing on the holographic dry plate 8.

[0034] Specifically, in this embodiment, the light emitting component includes a first light emitting component, a second light emitting component and a third light emitting component, and the first light emitting component, the second light emitting component and the third light emitting component are parallel to each other and have the same light emitting direction.

[0035] The first light emitting component includes a first light source 11, a first collimator 21 and a reflector 31. The first light source 11 is used to emit a first light ray 111. The first collimator 21 is located between the first light source 11 and the reflector 31. The first collimator 21 is used to collimate the first light ray 111 emitted by the first light source 11. The reflector is used to reflect the first light ray 111 collimated by the first collimator 21, so that the first light ray 111 propagates along a first direction.

[0036] The second light emitting component includes a second light source 12, a second collimator 22 and a second dichroic mirror 32. The second light source 12 is used to emit a second light 121. The second collimator 22 is located between the second light source 12 and the second dichroic mirror 32. The second collimator 22 is used to collimate the second light 121 emitted by the second light source 12. The second dichroic mirror 32 is located in the first direction of the reflector 31. The second dichroic mirror 32 is used to transmit the first light 111, reflect the second light 121 and make the second light 121 propagate along the first direction.

[0037] The third light emitting component includes a third light source 13, a third collimator 23 and a third dichroic mirror 33. The third light source 13 is used to emit a third light ray 131. The third collimator 23 is located between the third light source 13 and the third dichroic mirror 33. The third collimator 23 is used to collimate the third light ray 131 emitted by the third light source 13. The third dichroic mirror 33 is located in the first direction of the second dichroic mirror 32. The third dichroic mirror 33 is used to transmit the first light ray 111 and the second light ray 121, reflect the third light ray 131 and make the third light ray 131 propagate along the first direction.

[0038] The first light source 11, the second light source 12, and the third light source 13 are respectively selected from a red light source, a green light source, and a blue light source and are different from each other. The first light 111, the second light 121, and the third light 131 are combined into an exposure light beam at the third dichroic mirror 33, and the exposure light beam continues to propagate in the first direction.

[0039] In other embodiments, the light emitting component may also be arranged in other ways. As long as the light emitting component design can achieve high-quality colored light output, it is within the scope of protection of this application.

[0040] Specifically, the beam splitting exposure assembly includes a beam splitting assembly and a reflection assembly. The beam splitting assembly is used to split the exposure light into a first light beam 411, a second light beam 421, a third light beam 431 and a fourth light beam 432. The reflection assembly includes a first reflection assembly, a second reflection assembly, a third reflection assembly and a fourth reflection assembly. The first reflection assembly is used to reflect the first light beam 411 so that the first light beam 411 vertically enters the first surface of the holographic dry plate 8. The second reflection assembly is used to reflect the second light beam 421 so that the second light beam 421 enters the second surface of the holographic dry plate 8 at a second predetermined incident angle. The third reflection assembly is used to reflect the third light beam 431 so that the third light beam 431 enters the second surface of the holographic dry plate 8 at a third predetermined incident angle. The fourth reflection assembly is used to reflect the fourth light beam 432 so that the fourth light beam 432 enters the second surface of the holographic dry plate 8 at a fourth predetermined incident angle.

[0041] The beam splitter assembly includes a first beam splitter 41, a second beam splitter 42 and a third beam splitter 43. The first beam splitter 41 is used to split the exposure light emitted by the light emitting assembly into a first light beam 411 and a first total light beam; the second beam splitter 42 is arranged on the optical path of the first total light beam, and is used to split the first total light beam into a second light beam 421 and a second total light beam; the third beam splitter 43 is arranged on the optical path of the second total light beam, and is used to split the second total light beam into a third light beam 431 and a fourth light beam 432.

[0042] In this embodiment, the first beam splitter 41, the second beam splitter 42 and the third beam splitter 43 can be arranged as follows: Figure 1 and Figure 2 As shown, the second beam splitter 42 is located between the first beam splitter 41 and the third beam splitter 43, and the first beam splitter 41, the second beam splitter 42, and the third beam splitter 43 are sequentially located in the first direction. The first beam splitter 41, the second beam splitter 42, and the third beam splitter 43 may also be arranged in other ways, as long as the arrangement mode of dividing the exposure light into the first beam 411, the second beam 421, the third beam 431, and the fourth beam 432 is satisfied, all of which are within the scope of protection of this embodiment.

[0043] Correspondingly, such as Figure 1 and Figure 2As shown, the first reflective assembly includes a first reflective mirror, which is arranged on the optical path of the first light beam 411, and is used to reflect the first light beam 411 and make the first light beam 411 vertically enter the first surface of the holographic dry plate 8; the second reflective assembly includes a second reflective mirror, which is arranged on the optical path of the second light beam 421, and is used to reflect the second light beam 421 and make the second light beam 421 enter the second surface of the holographic dry plate 8 at a second preset incident angle; the third reflective assembly includes a third reflective mirror, which is arranged on the optical path of the third light beam 431, and is used to reflect the third light beam 431 and make the third light beam 431 enter the second surface of the holographic dry plate 8 at a third preset incident angle; the fourth reflective assembly includes a fourth reflective mirror, a fifth reflective mirror and a sixth reflective mirror, which are used to reflect the fourth light beam 432 in sequence, and make the fourth light beam 432 enter the second surface of the holographic dry plate 8 at the fourth preset incident angle.

[0044] It should be noted that the holographic dry plate 8 includes a waveguide substrate and a photosensitive material layer. The first surface of the holographic dry plate 8 is the surface where the waveguide substrate is located, and the second surface of the holographic dry plate 8 is the surface where the photosensitive material layer is located.

[0045] Figure 1 and Figure 2Only the application scenario when the beam splitting assembly includes three beam splitters is shown. In the embodiment of the present invention, the beam splitting assembly may also include only one beam splitter or two beam splitters. When the beam splitting assembly includes only one beam splitter, the beam splitter can simultaneously split the exposure light into a first beam 411, a second beam 421, a third beam 431 and a fourth beam 432. Accordingly, the first reflective assembly, the second reflective assembly, the third reflective assembly and the fourth reflective assembly can be respectively arranged according to the propagation directions of the corresponding first beam 411, the second beam 421, the third beam 431 and the fourth beam 432. As long as the arrangement mode that the first beam 411 is vertically incident on the first surface of the holographic dry plate 8, the second beam 421 is incident on the second surface of the holographic dry plate 8 at the second preset angle, the third beam 431 is incident on the second surface of the holographic dry plate 8 at the third preset angle, and the fourth beam 432 is incident on the second surface of the holographic dry plate 8 at the fourth preset angle is satisfied, all of which are within the scope of protection of the embodiments of the present application. When the beam splitting assembly includes only two beam splitters, one beam splitter may split the exposure light into the first beam 411 and the first total beam, and the other beam splitter may further split the first total beam into the second beam 421, the third beam 431 and the fourth beam 432; or one beam splitter may split the exposure light into the first beam 411, the second beam 421 and the second total beam, and the other beam splitter may further split the second total beam into the third beam 431 and the fourth beam 432. Similarly, the first reflective assembly, the second reflective assembly, the third reflective assembly and the fourth reflective assembly may be arranged according to the propagation directions of the corresponding first beam 411, the second beam 421, the third beam 431 and the fourth beam 432, respectively.

[0046] The second preset angle is equal to the third preset angle, and the orthographic projection of the second light beam 421 on the holographic dry plate 8 and the orthographic projection of the third light beam 431 on the holographic dry plate 8 are located on the same straight line, and the propagation directions are opposite. The second preset angle, the third preset angle, and the fourth preset angle all need to meet the following conditions: Wherein, θ is the size of any one of the second preset angle, the third preset angle, and the fourth preset angle; n is the refractive index of the waveguide substrate of the holographic dry plate 8, Prepare the half field of view of the optical machine for the holographic plate 8 to be used.

[0047] Furthermore, the manufacturing device of the two-dimensional vector volume holographic grating provided in this embodiment further comprises a special-shaped prism 6. The special-shaped prism 6 comprises a first surface, a second surface, a third surface and a fourth surface, wherein the first surface is configured to be in contact with the second surface of the holographic dry plate 8; the second surface is configured to receive the second light beam 421 and be perpendicular to the second light beam 421, so that the second light beam 421 can be incident on the second surface of the holographic dry plate 8 at a second predetermined incident angle; the third surface is configured to receive the third light beam 431 and be perpendicular to the third light beam 431, so that the third light beam 431 can be incident on the second surface of the holographic dry plate 8 at a third predetermined incident angle; the fourth surface is configured to receive the fourth light beam 432 and be perpendicular to the fourth light beam 432, so that the fourth light beam 432 can be incident on the second surface of the holographic dry plate 8 at a fourth predetermined incident angle.

[0048] Furthermore, the manufacturing device of the two-dimensional vector volume holographic grating provided in this embodiment also includes a light guide prism 7. The light guide prism 7 includes a light incident surface, a light exit surface and a bonding surface, wherein the bonding surface is configured to be bonded to the first surface of the holographic dry plate 8; the light incident surface is configured to incident the first light beam 411 and is perpendicular to the first light beam 411, so that the first light beam 411 can be vertically incident on the first surface of the holographic dry plate 8; the light exit surface is configured to emit stray light, so that the excess stray light can be guided out to eliminate ghosting and improve the quality and manufacturing yield of the two-dimensional vector volume holographic grating. In this embodiment, the light guide prism 7 can be a parallelogram light guide prism 7 with an acute angle of 45°.

[0049] The implementation principle of the manufacturing device of the two-dimensional vector volume holographic grating provided in Example 1 of the present application is: The holographic dry plate 8 is fixed by the sample stage, the exposure light is emitted by the light emitting component, and the exposure light is processed by the beam splitting exposure component, so that the exposure light is divided into a first light beam 411, a second light beam 421, a third light beam 431 and a fourth light beam 432, so that the first light beam 411 is vertically incident on the first surface of the holographic dry plate 8, and the second light beam 421, the third light beam 431 and the fourth light beam 432 are respectively incident on the second surface of the holographic dry plate 8 at a predetermined incident angle, and the orthographic projection of the second light beam 421 on the holographic dry plate 8 and the orthographic projection of the third light beam 431 on the holographic dry plate 8 are located on the same straight line and have opposite propagation directions, and the orthographic projection of the fourth light beam 432 on the holographic dry plate 8 is located on the same straight line and has opposite propagation directions, and the first light beam 411 is vertically incident on the first surface of the holographic dry plate 8, and the second light beam 421, the third light beam 431 and the fourth light beam 432 are incident on the second surface of the holographic dry plate 8 at a predetermined incident angle, respectively. The propagation direction of the orthographic projection of the light beam 432 on the holographic dry plate 8 is perpendicular to the propagation direction of the orthographic projection of the second light beam 421 on the holographic dry plate 8; in this way, the first light beam 411 and the second light beam 421 are exposed to interfere with each other to form a first grating propagating along the second direction, the first light beam 411 and the third light beam 431 are exposed to interfere with each other to form a second grating propagating along the third direction, the first light beam 411 and the fourth light beam 432 are exposed to interfere with each other to form a third grating propagating along the fourth direction, the propagation direction of the first grating is opposite to the propagation direction of the second grating, and the propagation direction of the third grating is perpendicular to the propagation direction of the first grating, and finally a two-dimensional vector volume holographic grating is prepared.

[0050] Example 2 Please refer to Figure 3 and Figure 4 The same and similar examples between this embodiment and embodiment 1 are not repeated here, and the difference lies in that the first reflective assembly includes a first reflector, a seventh reflector and an eighth reflector, and the first reflector, the seventh reflector and the eighth reflector are used to reflect the first light beam 411 in sequence, and finally make the first light beam 411 vertically enter the first surface of the holographic dry plate 8.

[0051] In Example 1, the optical path of the first light beam 411 reaching the holographic dry plate 8 is shorter than the optical path of the second light beam 421 to the holographic dry plate 8, shorter than the optical path of the third light beam 431 to the holographic dry plate 8, and shorter than the optical path of the fourth light beam 432 to the holographic dry plate 8; In Example 2, by adding a seventh reflector and an eighth reflector, the optical path of the first light beam 411 is increased, and the optical path difference between the first light beam 411 and the second light beam 421, the third light beam 431, and the fourth light beam 432 is reduced, thereby improving the quality and production yield of the two-dimensional vector volume holographic grating.

[0052] Example 3 Please refer to Figure 5 This embodiment provides a method for manufacturing a two-dimensional vector volume holographic grating. The manufacturing method uses the manufacturing device in embodiment 1 or embodiment 2 to implement the various steps of the manufacturing method. The implementation method includes: Step B1, fixing the holographic dry plate 8 to be exposed.

[0053] Specifically, the light guide prism 7 is pasted on the first surface of the holographic dry plate 8, and the special-shaped prism 6 is pasted on the second surface of the holographic dry plate 8; the holographic dry plate 8 includes a waveguide substrate and a photosensitive material layer, the first surface of the holographic dry plate 8 is the surface where the waveguide substrate is located, and the second surface of the holographic dry plate 8 is the surface where the photosensitive material layer is located. The light guide prism 7, the holographic dry plate 8 and the special-shaped prism are fixed on the sample stage of the manufacturing equipment of the two-dimensional vector volume holographic grating.

[0054] Step B2: emitting exposure light through the light emitting component of the manufacturing equipment.

[0055] Specifically, the first light source 11 of the light emitting assembly emits a first light 111, which is collimated by the first collimator 21 and then emitted to the reflector 31, and the reflector 31 reflects the first light 111 so that the first light 111 propagates in the first direction; the second light source 12 of the light emitting assembly emits a second light 121, which is collimated by the second collimator 22 and then emitted to the second dichroic mirror 32, and the second dichroic mirror 32 projects the first light 111, reflects the second light 121 and propagates in the second direction. The light 121 propagates in the first direction; the third light source 13 of the light emitting component emits a third light 131, which is collimated by the third collimator 23 and then emitted to the third dichroic mirror 33, the third dichroic mirror 33 projects the first light 111 and the second light 121, reflects the third light 131 and causes the third light 131 to propagate in the first direction; the first light 111, the second light 121 and the third light 131 are combined into an exposure light beam at the third dichroic mirror 33 and propagate in the first direction.

[0056] Step B3, the exposure light is divided into a first light beam 411, a second light beam 421, a third light beam 431 and a fourth light beam 432 by a beam splitting exposure component of the manufacturing equipment, and the first light beam 411 is vertically incident on the first surface of the holographic dry plate 8, and the second light beam 421, the third light beam 431 and the fourth light beam 432 are respectively incident on the second surface of the holographic dry plate 8 at predetermined incident angles; the orthographic projection of the second light beam 421 on the holographic dry plate 8 and the orthographic projection of the third light beam 431 on the holographic dry plate 8 are located on the same straight line and propagate in opposite directions, and the propagation direction of the orthographic projection of the fourth light beam 432 on the holographic dry plate 8 is vertical to the propagation direction of the orthographic projection of the second light beam 421 on the holographic dry plate 8.

[0057] Specifically, the first beam splitter 41 of the beam splitting exposure assembly splits the exposure light into a first beam 411 and a first total beam, the first reflector reflects the first beam 411 and makes the first beam 411 vertically enter the light incident surface of the light guide prism 7, and then vertically enter the first surface of the holographic dry plate 8; the second beam splitter 42 splits the first total beam into a second beam 421 and a second total beam, the second reflector reflects the second beam 421 and makes the second beam 421 vertically enter the first surface of the special-shaped prism 6, and then enter the holographic dry plate 8 at a first preset incident angle. The second surface of the plate 8; the third beam splitter 43 splits the second total light beam into a third light beam 431 and a fourth light beam 432; the third reflector reflects the third light beam 431 and makes the third light beam 431 vertically enter the second surface of the special-shaped prism 6, and then enter the second surface of the holographic dry plate 8 at a third preset incident angle; the fourth reflector, the fifth reflector and the sixth reflector sequentially reflect the fourth light beam 432 and make the fourth light beam 432 vertically enter the third surface of the special-shaped prism 6, and then enter the second surface of the holographic dry plate 8 at a fourth preset incident angle. Among them, the orthographic projection of the second light beam 421 on the holographic dry plate 8 and the orthographic projection of the third light beam 431 on the holographic dry plate 8 are located on the same straight line and propagate in opposite directions, and the propagation direction of the orthographic projection of the fourth light beam 432 on the holographic dry plate 8 is vertical to the propagation direction of the orthographic projection of the second light beam 421 on the holographic dry plate 8; in addition, the magnitude of the second preset incident angle is equal to the magnitude of the third preset incident angle, and the magnitudes of the second preset angle, the third preset angle and the fourth preset angle all meet the following conditions: Wherein, θ is the size of any one of the second preset angle, the third preset angle, and the fourth preset angle; n is the refractive index of the waveguide substrate of the holographic dry plate 8, Prepare the half field of view of the optical machine for the holographic plate 8 to be used.

[0058] Step B4, the first light beam 411 and the second light beam 421 are exposed to interfere with each other to form a first grating propagating along the second direction, the first light beam 411 and the third light beam 431 are exposed to interfere with each other to form a second grating propagating along the third direction, the first light beam 411 and the fourth light beam 432 are exposed to interfere with each other to form a third grating propagating along the fourth direction, and finally a two-dimensional vector volume holographic grating is prepared; wherein the second direction is opposite to the third direction, and the fourth direction is perpendicular to the second direction.

[0059] Example 4 This embodiment provides a two-dimensional vector volume holographic grating, which is prepared by using the preparation device in Embodiment 1 or Embodiment 2 and the preparation method in Embodiment 3.

[0060] Example 5 This embodiment provides an optical machine, which includes the two-dimensional vector volume holographic grating in Example 3.

[0061] The above are all preferred embodiments of the present application, and the protection scope of the present application is not limited thereto. Therefore, any equivalent changes made according to the structure, shape, and principle of the present application should be included in the protection scope of the present application.

Claims

1. A two-dimensional vector volume holographic grating manufacturing device, characterized in that: include: A sample stage for fixing the holographic dry plate (8); A light emitting component, used for emitting exposure light; The beam splitting exposure component is located on the optical path of the exposure light and is used to split the exposure light into a first light beam (411), a second light beam (421), a third light beam (431) and a fourth light beam (432), and to make the first light beam (411) vertically incident on the first surface of the holographic dry plate (8), and to make the second light beam (421), the third light beam (431) and the fourth light beam (432) respectively incident on the second surface of the holographic dry plate (8) at predetermined incident angles, and the orthographic projection of the second light beam (421) on the holographic dry plate (8) and the orthographic projection of the third light beam (431) on the holographic dry plate (8) are located on the same straight line and propagate in opposite directions, and the propagation direction of the orthographic projection of the fourth light beam (432) on the holographic dry plate (8) is vertical to the propagation direction of the orthographic projection of the second light beam (421) on the holographic dry plate (8).

2. The production device according to claim 1, characterized in that The beam splitting exposure component comprises a beam splitting component and a reflection component; the beam splitting component is used to split the exposure light into the first beam (411), the second beam (421), the third beam (431) and the fourth beam (432); the beam splitting component comprises at least one and at most three beam splitters; the reflection component comprises a first reflection component, a second reflection component, a third reflection component and a fourth reflection component; the first reflection component is used to reflect the first beam (411) so that the first beam (411) vertically enters the first surface of the holographic dry plate (8); the second reflection component is used to reflect the second beam (421) so that the second beam (421) enters the second surface of the holographic dry plate (8) at a second predetermined incident angle; the third reflection component is used to reflect the third beam (431) so that the third beam (431) enters the second surface of the holographic dry plate (8) at a third predetermined incident angle; the fourth reflection component is used to reflect the fourth beam (432) so that the fourth beam (432) enters the second surface of the holographic dry plate (8) at a fourth predetermined incident angle.

3. The production device according to claim 2, characterized in that: The beam splitting assembly comprises a first beam splitter (41), a second beam splitter (42) and a third beam splitter (43); the first beam splitter (41) is arranged in the light emitting direction of the exposure light, and is used to split the exposure light into the first light beam (411) and a first total light beam; the second beam splitter (42) is arranged in the light path of the first total light beam, and is used to split the first total light beam into the second light beam (421) and the second total light beam; the third beam splitter (43) is arranged in the light path of the second total light beam, and is used to split the second total light beam into the third light beam (431) and the fourth light beam (432).

4. The production device according to claim 3, characterized in that: The first beam splitter (41), the second beam splitter (42), and the third beam splitter (43) are sequentially located in the light-emitting direction of the exposure light; The first reflective component comprises a first reflective mirror, which is arranged on the optical path of the first light beam (411) and is used to reflect the first light beam (411) and make the first light beam (411) vertically incident on the first surface of the holographic dry plate (8); The second reflective component comprises a second reflective mirror, which is arranged on the optical path of the second light beam (421) and is used to reflect the second light beam (421) and make the second light beam (421) enter the second surface of the holographic dry plate (8) at the second preset incident angle; The third reflective component comprises a third reflective mirror, which is arranged on the optical path of the third light beam (431) and is used to reflect the third light beam (431) and make the third light beam (431) enter the second surface of the holographic dry plate (8) at the third preset incident angle; The fourth reflective assembly comprises a fourth reflector, a fifth reflector and a sixth reflector, wherein the fourth reflector, the fifth reflector and the sixth reflector are used to sequentially reflect the fourth light beam (432) and make the fourth light beam (432) incident on the second surface of the holographic dry plate (8) at the fourth preset incident angle.

5. The production device according to claim 1, characterized in that: The second preset incident angle is equal to the third preset incident angle.

6. The production device according to claim 1, characterized in that The light emitting component comprises a first light emitting component, a second light emitting component and a third light emitting component, wherein the first light emitting component, the second light emitting component and the third light emitting component are parallel to each other and have the same light emitting direction; The first light emitting component comprises a first light source (11), a first collimator (21) and a reflector (31), wherein the first collimator (21) and the reflector (31) are sequentially located on a light emitting path of the first light source (11), and the reflector is used to cause a first light (111) emitted by the first light source (11) to propagate along a first direction; The second light emitting component comprises a second light source (12), a second collimator (22) and a second dichroic mirror (32), the second collimator (22) and the second dichroic mirror (32) being located in sequence on a light emitting path of the second light source (12), the second dichroic mirror (32) being located in the first direction of the reflector (31), and the second dichroic mirror (32) being used to transmit the first light (111) and to allow the second light (121) emitted by the second light source (12) to propagate along the first direction; The third light output component comprises a third light source (13), a third collimator (23) and a third dichroic mirror (33); the third collimator (23) and the third dichroic mirror (33) are sequentially located on a light output path of the third light source (13); the third dichroic mirror (33) is located in the first direction of the second dichroic mirror (32); the third dichroic mirror (33) is used to transmit the first light (111) and the second light (121) and to make the third light (131) emitted by the third light source (13) propagate along the first direction; the first light (111), the second light (121) and the third light (131) are combined into an exposure light beam at the third dichroic mirror (33) and propagate in the first direction; The first light source (11), the second light source (12), and the third light source (13) are respectively selected from one of a red light source, a green light source, and a blue light source, and are different from each other.

7. The production equipment according to any one of claims 1 to 6, characterized in that: The manufacturing equipment further comprises a special-shaped prism (6) and a light-guiding prism (7); the light-guiding prism (7) is configured to be attached to a first surface of the holographic dry plate (8); and the special-shaped prism (6) is configured to be attached to a second surface of the holographic dry plate (8).

8. A method for manufacturing a two-dimensional vector volume holographic grating, characterized in that: The steps of the production method are implemented by using the production equipment according to any one of claims 1 to 7, and the production method includes: Fixing the holographic dry plate (8) to be exposed; Emits exposure light through a light emitting component of the manufacturing device; The exposure light is divided into a first light beam (411), a second light beam (421), a third light beam (431) and a fourth light beam (432) by a beam splitting exposure component of the manufacturing equipment, and the first light beam (411) is vertically incident on the first surface of the holographic dry plate (8), and the second light beam (421), the third light beam (431) and the fourth light beam (432) are respectively incident on the second surface of the holographic dry plate (8) at predetermined incident angles; the orthographic projection of the second light beam (421) on the holographic dry plate (8) and the orthographic projection of the third light beam (431) on the holographic dry plate (8) are located on the same straight line and have opposite propagation directions, and the propagation direction of the orthographic projection of the fourth light beam (432) on the holographic dry plate (8) is vertical to the propagation direction of the orthographic projection of the second light beam (421) on the holographic dry plate (8); The first light beam (411) and the second light beam (421) are exposed to interfere with each other to form a first grating propagating along a second direction, the first light beam (411) and the third light beam (431) are exposed to interfere with each other to form a second grating propagating along a third direction, and the first light beam (411) and the fourth light beam (432) are exposed to interfere with each other to form a third grating propagating along a fourth direction, thereby finally preparing a two-dimensional vector volume holographic grating; wherein the second direction is opposite to the third direction, and the fourth direction is perpendicular to the second direction.

9. A two-dimensional vector volume holographic grating, characterized in that: The two-dimensional vector volume holographic grating is prepared using the preparation device described in any one of claims 1 to 7 and the preparation method described in claim 8.

10. An optical machine, characterized in that: The optical machine includes the two-dimensional vector volume holographic grating described in claim 9.

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