Transverse piezoelectric deformable mirror and preparation method thereof

Abstract

The invention relates to the technical field of adaptive optics, and particularly provides a transverse piezoelectric deformable mirror and a preparation method thereof.The transverse piezoelectric deformable mirror structurally comprises a lens, an electrode and a driving piece for driving the lens to deform, and the driving piece can comprise an overall driving piezoelectric ceramic piece for overall driving; in order to simplify the preparation of a driving electrode array in the preparation process of the transverse piezoelectric deformable mirror and the complex preparation process of leading out a driving electrode conductive circuit, the invention designs a flexible circuit board for integrated driving wiring, and the flexible circuit board can also comprise a discrete driving piezoelectric ceramic piece for fine driving deformation. The patterned driving electrode array and the corresponding conductive circuit can be prefabricated, and the flexible circuit board and the deformation driving piece can be directly bonded through the conductive adhesive, so that two technical difficulties, namely preparation and electric connection leading-out of the driving electrode array, in the manufacturing of the transverse piezoelectric deformable mirror are directly solved; the manufacturing process of the transverse piezoelectric deformable mirror is simplified, and the compactness of the structure is improved.

Description

Technical Field

[0001] The invention relates to the technical field of adaptive optics, and specifically provides a transverse piezoelectric deformable mirror and a preparation method thereof. Background Art

[0002] Adaptive optics technology is a key technology that has developed rapidly in recent decades. It is used to compensate for wavefront distortion in the optical transmission process caused by factors such as atmospheric turbulence or aerodynamic optics, and can effectively improve the imaging quality of optical imaging systems.

[0003] The wavefront correction device in the adaptive optical system is usually implemented by a deformable mirror, and the shape of its reflective surface can be adjusted according to the input control command, so as to correct the distorted wavefront in the system. For the drive components of the deformable mirror, researchers have proposed many solutions such as voice coil motor drive, MEMS drive, stacked piezoelectric ceramic drive, and piezoelectric ceramic sheet drive. Among them, the voice coil motor driven deformable mirror has large power consumption and stroke, and is usually used in ground-based large-aperture telescopes; the MEMS driven deformable mirror is small in size, but the aperture and deformation are very limited; in contrast, the deformable mirror driven by piezoelectric ceramics is more suitable for conventional adaptive optical systems, especially the lateral piezoelectric deformable mirror that uses the lateral inverse piezoelectric effect of piezoelectric ceramic sheets, which has the significant advantages of simple structure, small size, and low cost, and has broad application prospects in miniaturized adaptive optical systems.

[0004] According to the number of driven piezoelectric ceramic sheets, the transverse piezoelectric deformable mirror can be mainly divided into single piezoelectric sheet deformable mirror, dual piezoelectric sheet deformable mirror and multi-piezoelectric sheet deformable mirror, among which the single piezoelectric sheet deformable mirror is the simplest transverse piezoelectric deformable mirror, and the number of driven piezoelectric ceramic sheets is only one. In different transverse piezoelectric deformable mirrors, there is a core discrete driving piezoelectric ceramic sheet, which is used to control the shape of the reflective surface of the lens at a certain spatial frequency.

[0005] In the process of manufacturing the lateral piezoelectric deformable mirror, there are two key steps to be achieved: one is to set the drive electrode array on the surface of the entire discrete drive piezoelectric ceramic sheet, and the other is to electrically connect each drive electrode to the drive circuit independently. In the existing technical solution, the two steps are carried out separately, that is, firstly, the drive electrode array is prepared on the surface of the discrete drive piezoelectric ceramic sheet by using an additive or subtractive solution, and then the drive electrode is electrically connected to the drive circuit board by using flying wires or flexible circuit boards. This complicates the manufacturing process of the lateral piezoelectric deformable mirror and increases the difficulty of manufacturing. Summary of the invention

[0006] In order to solve the above problems, the present invention provides a lateral piezoelectric deformable mirror and a preparation method thereof. By designing a flexible circuit board with integrated drive wiring, two technical difficulties in the production process of the lateral piezoelectric deformable mirror, namely, setting a drive electrode array on the surface of the entire discrete drive piezoelectric ceramic sheet and independently connecting a circuit to each drive electrode in the drive electrode array, are solved, thereby simplifying the production process of the lateral piezoelectric deformable mirror and improving the compactness of the structure.

[0007] To achieve the above object, the technical solution created by the present invention is implemented as follows: In a first aspect, the present invention provides a transverse piezoelectric deformable mirror, comprising: a lens, an electrode and a deformation driving member of the lens; A flexible circuit board, comprising: a substrate, a patterned drive electrode array disposed on one side of the substrate, and a conductive circuit disposed on the other side of the substrate, wherein a conductive via hole is formed on the substrate corresponding to each conductive sub-region of the patterned drive electrode array, and one end of each conductive circuit is conductively connected to the conductive sub-region through the conductive via hole; The patterned driving electrode array is connected to the deformation driving member through conductive glue.

[0008] Preferably, the deformation driving element is a discrete driving piezoelectric ceramic piece.

[0009] Preferably, the lens comprises a reflective surface and a non-reflective surface, the electrode is connected to the non-reflective surface of the lens, and the discrete driving piezoelectric ceramic piece is connected to the electrode.

[0010] Preferably, an integral driving piezoelectric ceramic sheet is further provided between the discrete driving piezoelectric ceramic sheet and the electrode.

[0011] Preferably, the substrate is an insulating material.

[0012] Preferably, a conductive glue having the same pattern distribution as that of the patterned driving electrode array is provided on the surface of the discrete driving piezoelectric ceramic sheet by screen printing technology, and the patterned driving electrode array is connected to the deformation driving member by the conductive glue.

[0013] Preferably, the position of the conductive via corresponds to the center of each conductive sub-region.

[0014] In a second aspect, the present invention provides a method for preparing a lateral piezoelectric deformable mirror, which is used to prepare a lateral piezoelectric deformable mirror, comprising: Apply conductive glue to the non-reflective surface of the lens; Provide a discrete driving piezoelectric ceramic sheet, confirm the polarization direction of the discrete driving piezoelectric ceramic sheet, and concentrically bond the discrete driving piezoelectric ceramic sheet to the lens through a conductive adhesive; A flexible circuit board is provided, and a conductive glue having the same pattern distribution as the patterned driving electrode array of the flexible circuit board is printed on a side of the discrete driving piezoelectric ceramic sheet away from the lens through screen printing technology, and the patterned driving electrode array is bonded to the discrete driving piezoelectric ceramic sheet through the conductive glue having the same pattern distribution as the patterned driving electrode array of the flexible circuit board.

[0015] Preferably, before the lens is bonded with the discrete driving piezoelectric ceramic sheets, the method further includes: bonding at least one integral driving piezoelectric ceramic sheet to the non-reflective surface of the lens, confirming the polarization direction of the integral driving piezoelectric ceramic sheet, and arranging and bonding all the integral driving piezoelectric ceramic sheets.

[0016] Compared with the prior art, the invention can achieve the following beneficial effects: The present invention optimizes the design of the driving electrode array and the conductive circuit of the lateral piezoelectric deformable mirror, designs a flexible circuit board with integrated driving wiring, and realizes the preparation and electrical connection of the driving electrode array of the lateral piezoelectric deformable mirror. An electronic interface can be reserved in the form of an electrical connector at the end of the flexible circuit board to form an electronic package. The discrete driving piezoelectric ceramic and the flexible circuit board are bonded by patterned conductive adhesive, which omits the step of preparing the driving electrode array on the surface of the discrete driving piezoelectric ceramic sheet, simplifies the production process of the lateral piezoelectric deformable mirror, improves the production efficiency, and improves the compactness of the structure of the lateral piezoelectric deformable mirror.

[0017] The flexible circuit board with integrated drive wiring of the present invention can be pre-prepared. In the assembly and preparation process of the lateral piezoelectric deformable mirror, the pre-fabricated flexible circuit board and the discrete drive piezoelectric ceramic sheet can be directly used for assembly, which greatly reduces the preparation time of the lateral piezoelectric deformable mirror and provides a lateral piezoelectric deformable mirror with a new structure. In addition, the drive electrode array and the conductive circuit can be directly integrated through the conductive vias, avoiding the complex process in the prior art of first preparing the drive electrode array on the discrete drive piezoelectric ceramic sheet by additive or subtractive methods, and then connecting the conductive circuit of the drive electrode array by flying wires or flexible circuit boards, thereby realizing a new deformable mirror preparation process. In addition, the flexible circuit board with integrated drive wiring of the present invention improves the compactness of the structure, has advantages in the miniaturization of the deformable mirror, and the reliability of the electrical connection between the conductive circuit and the patterned drive electrode array through the conductive vias is also higher. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] The drawings constituting part of the present invention are used to provide a further understanding of the present invention. The exemplary embodiments and descriptions of the present invention are used to explain the present invention and do not constitute an improper limitation on the present invention. In the drawings: Figure 1is a plan view schematically showing an assembled state of a lateral piezoelectric deformable mirror taking a single piezoelectric deformable mirror as an example according to an embodiment of the present invention; Figure 2 is an exploded view of a three-dimensional structure of a lateral piezoelectric deformable mirror taking a single piezoelectric deformable mirror as an example according to an embodiment of the present invention; Figure 3 Schematic diagram of the structure of a flexible circuit board provided according to an embodiment of the present invention.

[0019] Reference numerals include: The lens 100 , the electrode 200 , the discrete driving piezoelectric ceramic sheet 300 , the conductive adhesive 400 , the flexible printed circuit board 500 , the substrate 501 , the patterned driving electrode array 502 , the conductive via 503 , and the conductive line 504 . DETAILED DESCRIPTION

[0020] In order to make the purpose, technical scheme and advantages of the invention clearer, the invention is further described in detail below in conjunction with the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are only used to explain the invention and do not constitute a limitation to the invention. Similar components in different embodiments use associated similar component numbers. In the following embodiments, many detailed descriptions are to enable the invention to be better understood. However, those skilled in the art can easily recognize that some of the features can be omitted in different situations, or can be replaced by other components, materials, and methods. In some cases, some operations related to the invention are not shown or described in the specification, in order to avoid the core part of the invention being overwhelmed by too much description, and for those skilled in the art, it is not necessary to describe these related operations in detail, and they can fully understand the related operations according to the description in the specification and the general technical knowledge in the art.

[0021] It should be noted that, in the absence of conflict, the embodiments of the present invention and the features in the embodiments can be combined with each other to form various implementation methods. At the same time, the steps or actions in the method description can also be interchanged or adjusted in a manner that is obvious to those skilled in the art. Therefore, the various sequences in the specification and the drawings are only for the purpose of clearly describing a certain embodiment and are not meant to be a necessary sequence, unless otherwise specified that a certain sequence must be followed.

[0022] In the description of the invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the drawings, and are only for the convenience of describing the invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the invention. In addition, the terms "first", "second", etc. are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined as "first", "second", etc. may explicitly or implicitly include one or more of the features. In the description of the invention, unless otherwise specified, the meaning of "multiple" is two or more.

[0023] In the description of the invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the invention can be understood according to specific circumstances.

[0024] The present invention will be described in detail below with reference to the accompanying drawings and in combination with embodiments.

[0025] See also Figure 1 , 2 3. In one embodiment of the present invention, a transverse piezoelectric deformable mirror is provided, and a single piezoelectric deformable mirror without an integrally driven piezoelectric ceramic sheet is used as an example for structural introduction, specifically comprising: a lens 100, an electrode 200, a discretely driven piezoelectric ceramic sheet 300, a conductive adhesive 400 and a flexible circuit board 500, wherein the lens 100 is the main part of the deformable mirror, usually made of glass or other transparent materials, and is a circular sheet structure with a reflective surface and a non-reflective surface, the reflective surface is used to reflect the light beam, and the non-reflective surface is used to connect with the rear-end deformation drive. A layer of conductive adhesive is evenly applied on the non-reflective surface of the lens 100, and the layer of conductive adhesive is the electrode 200 of the deformable mirror, and the electrode 200 is a ground electrode. The size of the electrode 200 needs to be able to completely cover the deformation drive component that needs to be bonded at the rear end to drive the lens deformation.

[0026] In the embodiment of the present invention, a single piezoelectric deformable mirror without an integral driving piezoelectric ceramic sheet and having only one discrete driving piezoelectric ceramic sheet 300 as a deformation driving member is provided. As an optional embodiment, according to actual design requirements, a discrete driving piezoelectric ceramic sheet 300 with multiple layers arranged and bonded in sequence can be designed. It can be a single sheet or a stack of multiple sheets. The stacking form can obtain a larger displacement stroke by increasing the stack height. In addition, at least one layer of integral driving piezoelectric ceramic sheet can be designed between the electrode 200 and the discrete driving piezoelectric ceramic sheet 300. Multiple layers of integral driving piezoelectric ceramic sheets are designed and arranged and bonded in sequence by conductive adhesive. The integral driving piezoelectric ceramic sheet is mainly used to generate a large-scale overall deformation. The integral driving piezoelectric ceramic sheet is attached to the non-reflective surface of the lens by conductive adhesive, and electrodes 200 are evenly distributed on both sides of the integral driving piezoelectric ceramic sheet. This design allows the integral driving piezoelectric ceramic sheet to contact the non-reflective surface of the lens, thereby achieving overall deformation control.

[0027] In the embodiment of the present invention, only a single circular discrete driving piezoelectric ceramic sheet 300 is used. According to the transverse inverse piezoelectric effect, the lens 100 can be driven to generate curvature deformation after voltage is applied to the discrete driving piezoelectric ceramic sheet 300.

[0028] The conductive adhesive 400 is used to bond the discrete driving piezoelectric ceramic sheet 300 and the flexible circuit board 500 . The conductive adhesive 400 is a sheet structure, and its shape and distribution are the same as the pattern distribution of the patterned driving electrode array 502 in the flexible circuit board 500 .

[0029] The flexible circuit board 500 adopts an integrated drive wiring design and is a flexible sheet structure, which is composed of a substrate 501 and a drive circuit structure arranged on the bottom and top layers of the substrate 501. Specifically, the substrate 501 is an insulating material, and the bottom layer of the substrate 501 is a patterned drive electrode array 502, which is divided into a plurality of conductive sub-regions, each of which is an independent drive electrode. A conductive via 503 connecting the bottom layer and the top layer is opened at a corresponding position of the substrate 501 placed at the center of each conductive sub-region, and each conductive line 504 is electrically connected to the patterned drive electrode array 502 through the conductive via 503. It can be understood that each conductive line 504 is electrically connected to the patterned drive electrode array 502. One end of the conductive circuit 504 of the electronic area is connected to the conductive sub-area through each conductive via 503. The starting point of each conductive circuit 504 is located at the center of the corresponding bottom conductive sub-area through the conductive via 503, and the end point is outwardly away from the patterned driving electrode array 502. According to the actual design, the conductive circuit 504 of each conductive sub-area can be designed for routing. The routing arrangement design is convenient for welding electronic interface components such as electrical connectors. Therefore, the flexible circuit board 500 is usually in the shape of a disc corresponding to the shape of the lens 100, and a densely arranged output port of the conductive circuit 504 is designed at the edge of the disc-shaped structure, that is, one end extends outward.

[0030] The lateral piezoelectric deformable mirror of the embodiment of the present invention adopts a flexible circuit board 500 with integrated drive wiring, and directly realizes two key technologies for manufacturing the lateral piezoelectric deformable mirror on one component: the preparation of the patterned drive electrode array 502 and the lead-out of the conductive line 504 on the patterned drive electrode array 502. The flexible circuit board 500 can be prepared as a preform, and in the process of preparing the lateral piezoelectric deformable mirror, a conductive glue 400 having a pattern distribution consistent with the patterned drive electrode array 502 is directly arranged on the surface of the discrete drive piezoelectric ceramic sheet 300 by screen printing or other methods, that is, the flexible circuit board 500 can be directly reliably connected to the discrete drive piezoelectric ceramic sheet 300, which greatly simplifies the drive electrode preparation and electrical connection work of the lateral piezoelectric deformable mirror, improves the manufacturing efficiency of the lateral piezoelectric deformable mirror, and improves the compactness of the structure of the lateral piezoelectric deformable mirror. In the prior art, it is necessary to first prepare a patterned driving electrode array 502 on the surface of the discrete driving piezoelectric ceramic sheet 300 through an additive or subtractive process, and then connect the conductive lines 504 required for each conductive sub-region in the patterned driving electrode array 502. The process is extremely complicated and time-consuming. In addition, the preparation process of the patterned driving electrode array 502 in the existing solution is directly prepared on the surface of the discrete driving piezoelectric ceramic sheet 300, which may damage the discrete driving piezoelectric ceramic sheet 300. In addition, each conductive sub-region needs to be connected to a flying wire or a flexible circuit board, and the electrical connection process is too complicated, and the point connection reliability is also poor.

[0031] Based on the structural design of the above-mentioned transverse piezoelectric deformable mirror, the embodiment of the present invention further provides a method for preparing the transverse piezoelectric deformable mirror, which specifically includes the following steps: S1: First, provide a lens 100, and place it on a clean workbench with its non-reflective surface facing upward using a holding tool.

[0032] S2: Apply a layer of conductive glue evenly on the non-reflective surface of the lens 100, and make the area where the conductive glue is applied completely cover the area size of the subsequent bonding discrete drive piezoelectric ceramic piece 300. The conductive glue not only plays a bonding role, but also provides electrical connection, and after curing, the layer of conductive glue is the electrode 200, ensuring that the discrete drive piezoelectric ceramic piece 300 is grounded.

[0033] Since the present embodiment is aimed at preparing a single piezoelectric deformable mirror without an integrally driven piezoelectric ceramic sheet, the bonding process of the integrally driven piezoelectric ceramic sheet is not involved. If the deformable mirror actually prepared has at least one integrally driven piezoelectric ceramic sheet, the integrally driven piezoelectric ceramic sheet should be provided first, and the polarization direction of the integrally driven piezoelectric ceramic sheet should be confirmed, and it should be concentrically bonded to the lens 100 through a conductive adhesive, and then the conductive adhesive should be evenly applied again on the side of the integrally driven piezoelectric ceramic sheet away from the lens 100, and the bonding of other integrally driven piezoelectric ceramic sheets should be repeated again; if there is only one integrally driven piezoelectric ceramic sheet, a discretely driven piezoelectric ceramic sheet 300 should be provided, the polarization direction of the discretely driven piezoelectric ceramic sheet 300 should be confirmed, and the discretely driven piezoelectric ceramic sheet 300 should be bonded, and the discretely driven piezoelectric ceramic sheet 300 also needs to be concentrically bonded to the lens 100.

[0034] S3: Curing the conductive adhesive to ensure a reliable connection between the lens 100 and the discrete driving piezoelectric ceramic piece 300.

[0035] S4: Print the conductive glue 400 on the side of the discrete driving piezoelectric ceramic sheet 300 away from the lens using a screen printing or other technology, and the shape and distribution of the conductive glue 400 completely conform to the pattern distribution of the designed patterned driving electrode array 502 .

[0036] S5: The patterned driving electrode array 502 in the flexible circuit board 500 with integrated driving wiring is bonded to the discrete driving piezoelectric ceramic sheet 300 through the patterned conductive adhesive 400, and the patterned driving electrode array 502 on the bottom layer of the flexible circuit board 500 completely overlaps with the pattern of the conductive adhesive 400 on the surface of the discrete driving piezoelectric ceramic sheet 300.

[0037] S6: Curing the conductive adhesive 400 to complete the reliable connection between the discrete driving piezoelectric ceramic piece 300 and the flexible circuit board 500. At this point, the production of the main structure of the lateral piezoelectric deformable mirror is completed.

[0038] S7: At this time, the main structure of the lateral piezoelectric deformable mirror can also be mechanically and circuit packaged to complete the production of the lateral piezoelectric deformable mirror.

[0039] In the above preparation process, the design of the flexible circuit board 500 with integrated drive wiring allows the preparation of the patterned drive electrode array 502 and the lead-out of the conductive line 504 to be realized simultaneously, omitting the step of preparing the patterned drive electrode array 502 on the surface of the discrete drive piezoelectric ceramic sheet in the traditional process. In addition, the conductive line 504 is directly prefabricated on the flexible circuit board 500, avoiding the complexity of the routing of the conductive line 504, making the entire structure more compact. At the same time, electronic interfaces such as electrical connectors that are easy to plug and unplug, have good stability and high reliability can be designed on the flexible circuit board 500. These designs take into account that the requirements of the electrical connector are closely related to the design, ensuring the internal reliability and use reliability of the connection, and integrating the patterned drive electrode array 502 and the conductive line 504 on the flexible circuit board 500, and electrically connecting them through the conductive vias 503, thereby improving the stability of the electrical connection, which is beneficial to the response speed and control accuracy of the deformable mirror, and greatly improving the preparation efficiency and structural compactness of the lateral piezoelectric deformable mirror.

[0040] In short, the above description is only a preferred embodiment of this specification and is not intended to limit the protection scope of this specification. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of this specification shall be included in the protection scope of this specification.

[0041] The systems, devices, modules or units described in one or more of the above embodiments may be implemented by a computer chip or entity, or by a product having a certain function. A typical implementation device is a computer. Specifically, the computer may be, for example, a personal computer, a laptop computer, a cellular phone, a camera phone, a smart phone, a personal digital assistant, a media player, a navigation device, an email device, a game console, a tablet computer, a wearable device, or a combination of any of these devices.

[0042] It should also be noted that the terms "include", "comprises" or any other variations thereof are intended to cover non-exclusive inclusion, so that a process, method, commodity or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, commodity or device. In the absence of more restrictions, the elements defined by the sentence "comprises a ..." do not exclude the existence of other identical elements in the process, method, commodity or device including the elements.

[0043] Each embodiment in this specification is described in a progressive manner, and the same or similar parts between the embodiments can be referred to each other, and each embodiment focuses on the differences from other embodiments. In particular, for the system embodiment, since it is basically similar to the method embodiment, the description is relatively simple, and the relevant parts can be referred to the partial description of the method embodiment.

[0044] The above is a description of a specific embodiment of the specification. Other embodiments are within the scope of the appended claims. In some cases, the actions or steps recorded in the claims can be performed in an order different from that in the embodiments and still achieve the desired results. In addition, the processes depicted in the drawings do not necessarily require the specific order or continuous order shown to achieve the desired results. In some embodiments, multitasking and parallel processing are also possible or may be advantageous.

Claims

1. A transverse piezoelectric deformable mirror, comprising: The lens, the electrode and the deformation driving member of the lens are characterized by further comprising: A flexible circuit board, comprising: a substrate, a patterned drive electrode array disposed on one side of the substrate, and a conductive circuit disposed on the other side of the substrate, wherein a conductive via hole is formed on the substrate corresponding to each conductive sub-region of the patterned drive electrode array, and one end of each conductive circuit is conductively connected to the conductive sub-region through the conductive via hole; The patterned driving electrode array is connected to the deformation driving member through conductive glue.

2. The transverse piezoelectric deformable mirror according to claim 1, characterized in that: The deformation driving component is a discrete driving piezoelectric ceramic piece.

3. The transverse piezoelectric deformable mirror according to claim 2, characterized in that: The lens comprises a reflective surface and a non-reflective surface, the electrode is connected to the non-reflective surface of the lens, and the discrete driving piezoelectric ceramic piece is connected to the electrode.

4. The transverse piezoelectric deformable mirror according to claim 3, characterized in that: An integral driving piezoelectric ceramic sheet is also provided between the discrete driving piezoelectric ceramic sheet and the electrode.

5. The lateral piezoelectric deformable mirror according to claim 1, characterized in that: The substrate is an insulating material.

6. The transverse piezoelectric deformable mirror according to claim 2, characterized in that: Conductive glue having the same pattern distribution as the patterned driving electrode array is provided on the surface of the discrete driving piezoelectric ceramic sheet by screen printing technology, and the patterned driving electrode array is connected to the deformation driving member by the conductive glue.

7. The transverse piezoelectric deformable mirror according to claim 1, characterized in that: The location of the conductive via corresponds to the center of each conductive sub-region.

8. A method for preparing a transverse piezoelectric deformable mirror, characterized in that: For preparing the transverse piezoelectric deformable mirror according to any one of claims 2 to 7, comprising: Apply conductive glue to the non-reflective surface of the lens; Provide a discrete driving piezoelectric ceramic sheet, confirm the polarization direction of the discrete driving piezoelectric ceramic sheet, and concentrically bond the discrete driving piezoelectric ceramic sheet to the lens through a conductive adhesive; A flexible circuit board is provided, and a conductive glue having the same pattern distribution as the patterned driving electrode array of the flexible circuit board is printed on a side of the discrete driving piezoelectric ceramic sheet away from the lens through screen printing technology, and the patterned driving electrode array is bonded to the discrete driving piezoelectric ceramic sheet through the conductive glue having the same pattern distribution as the patterned driving electrode array of the flexible circuit board.

9. The method for preparing a transverse piezoelectric deformable mirror according to claim 8, characterized in that: Before the lens is bonded with the discrete driving piezoelectric ceramic sheets, the method also includes: bonding at least one integral driving piezoelectric ceramic sheet to the non-reflective surface of the lens, confirming the polarization direction of the integral driving piezoelectric ceramic sheet, and bonding all the integral driving piezoelectric ceramic sheets in order.

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