Square ionization device for cluster generation

Abstract

The invention relates to a square ionization device for cluster generation, which comprises a metal frame, tungsten meshes are arranged on two sides and two ends of the metal frame, tungsten filament plates are arranged on two sides of the adjacent tungsten meshes, a tungsten filament body is arranged between the two tungsten filament plates, a plurality of gaskets are arranged on the metal frame, and the gaskets are arranged on the metal frame. And an electrode plate is mounted on the gasket. The two electrode plates are installed on the metal frame, current can be generated by connecting one electrode plate with positive electricity and connecting the other electrode plate with negative electricity, the tungsten filament body emits light and emits heat through the current to generate electrons, all parts in the ionization device are formed through numerical control machining, and the size precision can be effectively guaranteed; the metal frame in the middle of the assembly structure is formed by integrally machining a whole piece of metal, the metal frame serves as an assembly reference, installation position errors of all parts can be guaranteed, it is guaranteed that centering errors of all polar plates meet the requirement, meanwhile, the tungsten filament body piece made of consumable materials can be better replaced, and gas can have better passing ability.

Description

Technical Field

[0001] The invention relates to the technical field of ionization devices, and in particular to a square ionization device for cluster generation. Background Art

[0002] In recent years, with the rapid development of atomic manufacturing, the demand for new materials and new devices such as clusters, single-atom and single-molecule devices has been increasing. The preparation of clusters through beam sources has become the main means to meet the demand for atomic manufacturing materials. For example, we can sputter out cluster atomic gas by magnetron sputtering, condense the atomic gas into clusters through gas phase condensation, and then focus the clusters into a beam through ultrasonic expansion and ion optical systems. Clusters suitable for processing are deposited during flight. Existing technologies and equipment usually make it difficult to better replace the consumable material tungsten filament body during use, and affect the permeability of the gas. Summary of the invention

[0003] The object of the present invention is to provide a square ionization device for cluster generation.

[0004] In order to solve the above technical problems, the present invention provides a square ionization device for cluster generation, comprising: a metal frame, tungsten meshes are installed on both sides and both ends of the metal frame, tungsten wire plates are installed on both sides of adjacent tungsten meshes, a tungsten wire body is installed between two tungsten wire plates, a plurality of washers are installed on the metal frame, an electrode plate is installed on the washers, the electrode plate is located between the tungsten mesh and the tungsten wire body, and an external frame is fixed to the outside of the metal frame.

[0005] Furthermore, a first through hole is opened on the tungsten mesh, the length of the tungsten mesh is 260 mm, the width is 52 mm, and the diameter of the first through hole is 2 mm.

[0006] Furthermore, a gasket is installed between the tungsten wire plate and the metal frame, the tungsten wire plate and the metal frame are not in contact, and the gasket is made of an insulating material of ceramic material.

[0007] Furthermore, the tungsten wire plate is provided with 7 and 8 second through holes with a diameter of 0.5 mm on the upper and lower parts respectively, and the second through holes are used to install the tungsten wire body. Two tungsten wire plates are installed opposite to each other, and the two plates are connected by a 0.5 mm tungsten wire body. The distance between the two tungsten wire plates is 70 mm.

[0008] Furthermore, the tungsten wire plate is in the shape of a hollow rectangular parallelepiped, and a plurality of third through holes are opened at both ends of the tungsten wire plate, and the third through holes are used to install the tungsten wire plate on the gasket.

[0009] Furthermore, eight rectangular slots are opened in the middle of the electrode plate, the slots are 8 mm wide and 42 mm long, and fourth through holes are opened on both sides of the electrode plate, and the diameter of the fourth through holes is 3.2 mm.

[0010] Furthermore, the external frame includes an upper plate body and a lower plate body, the upper plate body and the lower plate body are arranged parallel to the electrode plate, a support column is fixed between the upper plate body and the lower plate body, and connecting rods are fixed at both ends of the metal frame, and the connecting rods are fixed on the lower plate body.

[0011] The beneficial effect of the present invention is that a square ionization device for cluster generation of the present invention can generate current by installing two electrode plates on a metal frame, one of which is connected to positive electricity and the other is connected to negative electricity, so that the tungsten filament body can generate electrons by emitting light and generating heat through the current. All the components inside the ionization device are CNC-processed to effectively ensure dimensional accuracy. The metal frame in the middle of the assembly structure is processed from a whole piece of metal as a whole. As an assembly reference, it can ensure the installation position error of each component, ensure that the centering error of each electrode plate meets the requirements, and at the same time make it possible to better replace the consumable material tungsten filament body, so that the gas has better permeability. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] The present invention is further described below in conjunction with the accompanying drawings and embodiments.

[0013] Figure 1 is an exploded view of a preferred embodiment of the present invention;

[0014] Figure 2 is a perspective view of a preferred embodiment of the present invention;

[0015] Figure 3 is a stereogram of a preferred embodiment of an electrode plate of the present invention;

[0016] Figure 4 is a perspective view of a preferred embodiment of a metal frame of the present invention;

[0017] Figure 5 It is a stereoscopic diagram of a preferred embodiment of the present invention after the metal frame and the tungsten wire plate are combined.

[0018] In the figure:

[0019] 1. Metal frame; 11. Tungsten mesh; 12. Washer; 13. Electrode plate; 14. First through hole; 15. Notch; 16. Fourth through hole;

[0020] 2. tungsten wire plate; 21. tungsten wire body; 22. second through hole; 23. third through hole;

[0021] 3. External frame; 31. Upper plate; 32. Lower plate; 33. Support column; 34. Connecting rod. DETAILED DESCRIPTION

[0022] The present invention will now be described in further detail with reference to the accompanying drawings. These drawings are simplified schematic diagrams, which only illustrate the basic structure of the present invention in a schematic manner, and therefore only show the components related to the present invention.

[0023] like Figure 1-5 As shown, a square ionization device for cluster generation of the present invention comprises: a metal frame 1, tungsten meshes 11 are installed on both sides and both ends of the metal frame 1, tungsten wire plates 2 are installed on both sides of adjacent tungsten meshes 11, a tungsten wire body 21 is installed between two tungsten wire plates 2, and the tungsten wire body 21 can be installed and replaced at any time, a plurality of washers 12 are installed on the metal frame 1, an electrode plate 13 is installed on the washers 12, and the electrode plate 13 is located between the tungsten meshes 11 and the tungsten wire body 21, and an external frame 3 is fixed to the outside of the metal frame 1.

[0024] By installing two electrode plates 13 on the metal frame 1, one connected to positive electricity and the other connected to negative electricity, an electric current can be generated to make the tungsten filament body 21 emit light and heat through the current to generate electrons. The metal material of the ionization device is 316L, and the surface is electrolytically polished. All parts inside the ionization zone around the ionization device are CNC machined to effectively ensure dimensional accuracy. The metal frame 1 in the middle of the assembly structure is machined from a whole piece of metal. As an assembly reference, it can ensure the installation position error of each component, ensure that the centering error of each electrode plate meets the requirements, and at the same time make it possible to better replace the consumable material tungsten filament body 21, so that the gas has better permeability.

[0025] The tungsten mesh 11 is provided with a first through hole 14 . The tungsten mesh 11 has a length of 260 mm and a width of 52 mm. The diameter of the first through hole 14 is 2 mm.

[0026] A gasket 12 is installed between the tungsten wire plate 2 and the metal frame 1 , the tungsten wire plate 2 and the metal frame 1 are not in contact, and the gasket 12 is made of an insulating ceramic material.

[0027] The tungsten wire plate 2 and the metal frame 1 are also isolated by a gasket 12 so that they do not contact each other and are insulated by ceramic material.

[0028] The tungsten wire plate 2 is respectively provided with 7 and 8 second through holes 22 with a diameter of 0.5 mm on the upper and lower parts. The second through holes 22 are used to install the tungsten wire body 21. The two tungsten wire plates 2 are installed opposite to each other and connected by the 0.5 mm tungsten wire body 21. The distance between the two tungsten wire plates 2 is 70 mm. The tungsten wire plate 2 is a hollow rectangular parallelepiped. Multiple third through holes 23 are provided at both ends of the tungsten wire plate 2. The third through holes 23 are used to install the tungsten wire plate 2 on the gasket 12.

[0029] The metal frame 1 is made into a stainless steel bracket with a length of 280 mm, a width of 52 mm and a height of 34 mm. The middle is hollowed out, and a 0.5 mm hole is opened on the middle crossbeam for fixing the tungsten wire body 21. The threaded holes of φ2.5 at both ends are used to fix the tungsten mesh 11.

[0030] Eight rectangular slots 15 are provided in the middle of the electrode plate 13 . The slots 15 are 8 mm wide and 42 mm long. Fourth through holes 16 are provided on both sides of the electrode plate 13 . The diameter of the fourth through holes 16 is 3.2 mm.

[0031] The external frame 3 includes an upper plate 31 and a lower plate 32 , which are arranged parallel to the electrode plate 13 , a support column 33 is fixed between the upper plate 31 and the lower plate 32 , and connecting rods 34 are fixed at both ends of the metal frame 1 , and the connecting rods 34 are fixed on the lower plate 32 .

[0032] The metal frame 1 is fixed on the lower base plate by the support column 33 , and then the tungsten wire plate 2 and the metal frame 1 are wrapped inside by the lower plate body 32 and the upper plate body 31 .

[0033] Based on the above ideal embodiments of the present invention, the relevant staff can make various changes and modifications without departing from the technical concept of the present invention through the above description. The technical scope of the present invention is not limited to the contents of the specification, and its technical scope must be determined according to the scope of the claims.

Claims

1. A square ionization device for cluster generation, characterized in that: include: A metal frame (1), wherein tungsten meshes (11) are installed on both sides and both ends of the metal frame (1), tungsten wire plates (2) are installed on both sides of adjacent tungsten meshes (11), a tungsten wire body (21) is installed between two tungsten wire plates (2), a plurality of washers (12) are installed on the metal frame (1), an electrode plate (13) is installed on the washers (12), and the electrode plate (13) is located between the tungsten meshes (11) and the tungsten wire body (21), and an external frame (3) is fixed to the outside of the metal frame (1).

2. A square ionization device for cluster generation according to claim 1, characterized in that: The tungsten mesh (11) is provided with a first through hole (14); the tungsten mesh (11) is 260 mm long and 52 mm wide; the first through hole (14) has a diameter of 2 mm.

3. A square ionization device for cluster generation as claimed in claim 2, characterized in that: A gasket (12) is installed between the tungsten wire plate (2) and the metal frame (1); the tungsten wire plate (2) and the metal frame (1) are not in contact, and the gasket (12) is made of an insulating material, a ceramic material.

4. A square ionization device for cluster generation as claimed in claim 3, characterized in that: The tungsten wire plate (2) is provided with 7 and 8 second through holes (22) with a diameter of 0.5 mm at the top and bottom, respectively. The second through holes (22) are used to install the tungsten wire body (21). Two tungsten wire plates (2) are installed opposite to each other and connected by a 0.5 mm tungsten wire body (21). The spacing between the two tungsten wire plates (2) is 70 mm.

5. A square ionization device for cluster generation as claimed in claim 4, characterized in that: The tungsten wire plate (2) is in the shape of a hollow rectangular parallelepiped. A plurality of third through holes (23) are provided at both ends of the tungsten wire plate (2). The third through holes (23) are used to mount the tungsten wire plate (2) on the gasket (12).

6. A square ionization device for cluster generation as claimed in claim 5, characterized in that: Eight rectangular slots (15) are provided in the middle of the electrode plate (13), the slots (15) are 8 mm wide and 42 mm long, and fourth through holes (16) are provided on both sides of the electrode plate (13), the diameter of the fourth through holes (16) is 3.2 mm.

7. A square ionization device for cluster generation according to claim 6, characterized in that: The external frame (3) comprises an upper plate body (31) and a lower plate body (32), wherein the upper plate body (31) and the lower plate body (32) are arranged parallel to the electrode plate (13), a support column (33) is fixed between the upper plate body (31) and the lower plate body (32), and connecting rods (34) are fixed at both ends of the metal frame (1), and the connecting rods (34) are fixed on the lower plate body (32).

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