Vacuum gauge tube

Abstract

The invention provides a vacuum gauge tube which comprises a shell, an inner ring electrode and an outer ring electrode, the inner ring electrode is arranged in the shell, one end of the inner ring electrode is closed, the other end of the inner ring electrode is open to form a to-be-detected chamber communicated with a to-be-detected environment, a vacuum chamber is arranged on the outer side of the to-be-detected chamber in the circumferential direction, and the outer ring electrode is arranged in the vacuum chamber. And the outer ring electrode is arranged in the vacuum chamber and is coaxial with the inner ring electrode. According to the vacuum gauge tube, the inner ring electrode and the outer ring electrode are both of an annular structure, the large capacitor directly facing area can be achieved within the limited size, and therefore the precision and sensitivity of the vacuum gauge tube are improved; meanwhile, the inner ring electrode and the outer ring electrode are coaxially arranged, a more uniform and stable electric field can be formed, the vacuum degree of the environment to be measured can be accurately measured, and the measurement precision is improved.

Description

Technical Field

[0001] The present application belongs to the field of vacuum measurement technology, and specifically relates to a vacuum gauge. Background Art

[0002] See also Figure 1 As shown, the diaphragm and ceramic electrode of the traditional vacuum gauge are both planar structures. In order to improve accuracy and sensitivity, the facing area of ​​the diaphragm and the ceramic electrode needs to be made as large as possible, which results in the overall size of the vacuum gauge being too large and unable to meet the requirements of use in confined spaces. Summary of the invention

[0003] Therefore, the technical problem to be solved by the present application is to provide a vacuum gauge that can achieve a large capacitor facing area within a limited size, thereby improving the accuracy and sensitivity of the vacuum gauge.

[0004] In order to solve the above problems, the present application provides a vacuum gauge, including an outer shell, an inner ring electrode and an outer ring electrode, wherein the inner ring electrode is arranged in the outer shell, one end of the inner ring electrode is closed, and the other end is open to form a chamber to be tested that is connected to the environment to be tested, and a vacuum chamber is circumferentially arranged on the outer side of the chamber to be tested, and the outer ring electrode is arranged in the vacuum chamber and coaxially with the inner ring electrode.

[0005] Optionally, the inner ring electrode includes an annular diaphragm and a tightening piece, wherein the tightening piece is a hollow structure, and one end of the tightening piece is closed and the other end is open to form the chamber to be tested, and the diaphragm is arranged on the outer circumferential surface of the tightening piece, and the outer circumferential surface of the tightening piece is provided with a plurality of air permeable slits, and the plurality of air permeable slits are evenly arranged along the circumferential direction of the tightening piece.

[0006] Optionally, the vacuum gauge further comprises an air baffle, wherein the air baffle is arranged at the open end of the expansion member, and the area of ​​the air baffle is smaller than the opening area of ​​the expansion member.

[0007] Optionally, the surface of the outer ring electrode close to the inner ring electrode is provided with an upper metal coating, a middle metal coating and a lower metal coating in sequence from top to bottom in the axial direction, and the surface of the outer ring electrode away from the inner ring electrode is provided with a first metal coating strip and a second metal coating strip, the first metal coating strip is connected to the middle metal coating, and the second metal coating strip is respectively connected to the upper metal coating and the lower metal coating.

[0008] Optionally, the vacuum gauge further includes a planar mainboard, which is disposed in the housing and is electrically connected to the first metal-coated strip and the second metal-coated strip, respectively.

[0009] Optionally, the vacuum gauge further includes a tube pin, wherein two tube pins are provided, one of the tube pins is used to conduct the first metal-coated strip and the planar mainboard, and the other of the tube pins is used to conduct the second metal-coated strip and the planar mainboard.

[0010] Optionally, both the first metal-coated strip and the second metal-coated strip extend to the top surface of the outer ring electrode.

[0011] Optionally, the vacuum gauge further comprises a conductive elastic element, wherein the conductive elastic element is connected to the tube pin, and the conductive elastic element is arranged at an end of the tube pin away from the planar main board.

[0012] Optionally, the vacuum gauge further includes a sealing structure, which is used to seal the vacuum chamber, and the planar mainboard is arranged outside the vacuum chamber.

[0013] Optionally, an exhaust hole is provided on the sealing structure, and the vacuum chamber is connected to an external vacuum pumping device through the exhaust hole to maintain the vacuum degree of the vacuum chamber.

[0014] Beneficial Effects

[0015] In the vacuum gauge provided in the embodiment of the present invention, both the inner ring electrode and the outer ring electrode are annular structures, which can achieve a large capacitance facing area within a limited size, thereby improving the accuracy and sensitivity of the vacuum gauge; at the same time, the inner ring electrode and the outer ring electrode are coaxially arranged to form a more uniform and stable electric field, which helps to accurately measure the vacuum degree of the environment to be measured and improve the measurement accuracy. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a schematic diagram of the structure of a traditional vacuum regulator;

[0017] Figure 2 A cross-sectional view of a vacuum gauge according to an optional embodiment of the present application;

[0018] Figure 3 A cross-sectional view of a chamber to be tested according to an optional embodiment of the present application;

[0019] Figure 4 This is a schematic diagram of the three-dimensional structure of an outer ring electrode of an optional embodiment of the present application;

[0020] Figure 5 A cross-sectional view of an outer ring electrode of an optional embodiment of the present application;

[0021] Figure 6 This is a schematic structural diagram of an optional embodiment of the present application when the inner ring electrode is deformed.

[0022] The reference numerals are:

[0023] 1. Shell; 2. Inner ring electrode; 21. Annular diaphragm; 22. Expansion piece; 221. Air-permeable seam; 3. Outer ring electrode; 4. Air baffle; 5. Upper metal coating; 6. Middle metal coating; 7. Lower metal coating; 8. First metal coating strip; 9. Second metal coating strip; 10. Flat main board; 11. Pin; 12. Conductive elastic element; 13. Sealing structure; 14. Air extraction hole. DETAILED DESCRIPTION

[0024] In the description of the present application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0025] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0026] In this application, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be an indirect connection through an intermediate medium, or it can be the internal communication of two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0027] The preferred embodiments of the present invention are described below in conjunction with the accompanying drawings. It should be understood that the preferred embodiments described herein are only used to illustrate and explain the present invention, and are not used to limit the present invention.

[0028] See also Figures 2 to 6As shown, according to an embodiment of the present application, a vacuum gauge is provided, comprising an outer shell 1, an inner ring electrode 2 and an outer ring electrode 3, wherein the inner ring electrode 2 is arranged in the outer shell 1, one end of the inner ring electrode 2 is closed, and the other end is open to form a chamber to be tested which is connected to the environment to be tested, a vacuum chamber is circumferentially arranged on the outer side of the chamber to be tested, and the outer ring electrode 3 is arranged in the vacuum chamber and coaxially arranged with the inner ring electrode 2.

[0029] It can be understood that in the present application, the outer ring electrode 3 and the inner ring electrode 2 are both annular structures, which can achieve a large capacitor facing area within a limited size, thereby improving the accuracy and sensitivity of the vacuum gauge; at the same time, the inner ring electrode 2 and the outer ring electrode 3 are coaxially arranged to form a more uniform and stable electric field, which helps to accurately measure the vacuum degree of the environment to be measured and improve the measurement accuracy.

[0030] The vacuum gauge comprises a housing 1 and a tube base, wherein the housing 1 is relatively fixed to the tube base, and an interface tube is arranged on the tube base, and the interface tube is used to connect to the environment to be tested. It should be noted that the environment to be tested can be an external device or a pipeline.

[0031] Specifically, the housing 1 can be made of stainless steel to protect the internal components; at the same time, the housing 1 can be relatively fixed to the tube holder by welding, with good sealing to prevent external gas from entering and affecting the measurement accuracy.

[0032] The vacuum gauge further includes an inner ring electrode 2 , which may be a diaphragm, and is disposed in the outer shell 1 .

[0033] Specifically, the inner ring electrode 2 is an annular structure, and the end of the inner ring electrode 2 close to the interface tube is open, and the end of the inner ring electrode 2 away from the interface tube is closed, so as to form a chamber to be tested on the radial inner side of the inner ring electrode 2. When the pressure inside the chamber to be tested changes, the inner ring electrode 2 is deformed.

[0034] The vacuum gauge further includes an outer ring electrode 3 , which may be a ceramic electrode, and is disposed in the housing 1 .

[0035] Specifically, the outer ring electrode 3 is also an annular structure, and the outer ring electrode 3 is arranged radially outside the inner ring electrode 2 and coaxially arranged with the inner ring electrode 2 .

[0036] Among them, the radial outer side of the inner ring electrode 2 is a vacuum chamber. That is to say, the outer ring electrode 3 is a fixed electrode, and the inner ring electrode 2 is a movable electrode. When the pressure inside the chamber to be tested changes, the inner ring electrode 2 will be deformed due to the effect of the pressure difference, that is, it will be displaced. Since the size of the capacitance is related to the distance between the electrodes and the facing area, when the inner ring electrode 2 is displaced, the distance between the inner ring electrode 2 and the outer ring electrode 3 will change, thereby causing the capacitance value to change. In this embodiment, the vacuum degree of the environment to be tested that is connected to the chamber to be tested is determined by measuring the change in capacitance value.

[0037] Specifically, the inner ring electrode 2 and the outer ring electrode 3 are annular structures. Compared with the inner ring electrode 2 and the outer ring electrode 3 being planar structures, the facing area of ​​the inner ring electrode 2 and the outer ring electrode 3 can be increased by 5 to 10 times under the same outer volume of the vacuum gauge, thereby greatly improving the accuracy and sensitivity of the vacuum gauge.

[0038] In some possible implementations disclosed in this application, see Figure 3 As shown, the inner ring electrode 2 includes an annular diaphragm 21 and a tightening piece 22. The tightening piece 22 is a hollow structure, and one end of the tightening piece 22 is closed and the other end is open to form a chamber to be tested. The diaphragm is arranged on the outer circumferential surface of the tightening piece 22. The outer circumferential surface of the tightening piece 22 is provided with a plurality of air permeable slits 221, and the plurality of air permeable slits 221 are evenly arranged along the circumferential direction of the tightening piece 22.

[0039] In this embodiment, the inner ring electrode 2 includes an annular diaphragm 21 , and the deformation of the inner ring electrode 2 specifically refers to the deformation of the annular diaphragm 21 .

[0040] In this embodiment, the inner ring electrode 2 further includes a tightening member 22, which is arranged on the radial inner side of the annular diaphragm 21, and the outer diameter of the tightening member 22 is larger than the inner diameter of the annular diaphragm 21 when it is not deformed. It can be understood that by arranging the tightening member 22 on the radial inner side of the diaphragm, the diaphragm can be tightened, and the deformation of the diaphragm due to the pressure difference can be reduced, so that the vacuum gauge can maintain accurate measurement in a wider pressure range, thereby improving the range of the vacuum gauge and expanding the application range of the vacuum gauge.

[0041] The expansion member 22 is substantially cylindrical.

[0042] Specifically, the expansion member 22 is a hollow structure. One end of the expansion member 22 close to the interface tube is open and communicates with the environment to be tested through the interface tube. The other end of the expansion member 22 away from the interface tube is closed to form a chamber to be tested.

[0043] Among them, the outer circumferential surface of the expansion piece 22 is provided with a plurality of air-permeable slits 221, which are evenly arranged along the circumferential direction of the expansion piece 22 and extend along the axial direction of the expansion piece 22, so that the pressure in the chamber to be measured can act on the annular diaphragm 21 through the plurality of air-permeable slits 221, causing it to deform. It can be understood that the plurality of air-permeable slits 221 evenly arranged on the outer circumferential surface of the expansion piece 22 can ensure that the internal pressure of the chamber to be measured acts evenly on the annular diaphragm 21, thereby achieving more accurate and consistent vacuum degree measurement.

[0044] Specifically, the annular diaphragm 21 is coated on the outer peripheral surface of the expansion member 22. In this embodiment, the two end edges of the annular diaphragm 21 in the axial direction are sealed and welded to the two end edges of the expansion member 22 in the axial direction respectively.

[0045] In some possible implementations disclosed in this application, see Figure 2 and Figure 3 As shown, the vacuum gauge further includes an air baffle 4 , which is disposed at the open end of the expansion member 22 , and the area of ​​the air baffle 4 is smaller than the opening area of ​​the expansion member 22 .

[0046] It can be understood that by providing an air baffle 4 at the open end of the expansion piece 22 and making the area of ​​the air baffle 4 smaller than the opening area of ​​the expansion piece 22, it can play a certain filtering and blocking role on the gas entering the chamber to be measured, reduce the interference of large particle impurities that flow in and adhere to the inner wall of the annular diaphragm 21 on the measurement, and make the measurement result more accurate.

[0047] The air baffle 4 is a planar structure, and is disposed at the open end of the expansion member 22 .

[0048] Specifically, the air baffle 4 is substantially circular, and is disposed perpendicular to the axis of the expansion member 22 .

[0049] The area of ​​the air baffle 4 is smaller than the opening area of ​​the expansion member 22 , so that the gas can enter the chamber to be tested through the gap between the air baffle 4 and the inner wall of the expansion member 22 .

[0050] Specifically, at least three connecting pieces are provided on the outer edge of the air baffle plate 4 , and the at least three connecting pieces are evenly arranged along the circumferential direction of the air baffle plate 4 . The air baffle plate 4 is welded to the open end of the expansion member 22 through the at least three connecting pieces.

[0051] In some possible implementations disclosed in this application, see Figure 4 and Figure 5As shown, the surface of the outer ring electrode 3 close to the inner ring electrode 2 is provided with an upper metal coating 5, a middle metal coating 6 and a lower metal coating 7 in sequence from top to bottom in the axial direction, and the surface of the outer ring electrode 3 away from the inner ring electrode 2 is provided with a first metal coating strip 8 and a second metal coating strip 9, the first metal coating strip 8 is connected to the middle metal coating 6, and the second metal coating strip 9 is connected to the upper metal coating 5 and the lower metal coating 7 respectively.

[0052] Among them, the upper metal coating 5, the middle metal coating 6 and the lower metal coating 7 are sequentially arranged on the inner wall of the outer ring electrode 3 in the axial direction from top to bottom, which can form a differential capacitor to reduce errors caused by temperature changes, vibrations, etc. It can be understood that in this application, the metal coatings arranged in different positions and regions can more accurately sense the changes in the electric field, thereby improving the sensitivity of the vacuum gauge to the vacuum degree measurement; at the same time, it can more accurately obtain and transmit electrical signals, reduce measurement errors, and make the measurement results more accurate and reliable.

[0053] For details, see Figure 6 As shown, when the annular diaphragm 21 is deformed by the change in air pressure, the middle part of the annular diaphragm 21 deforms more, while the upper and lower parts deform less, thereby forming a differential capacitor, which can effectively eliminate errors.

[0054] Among them, the upper metal coating 5, the middle metal coating 6 and the lower metal coating 7 can all be metal coatings, the upper metal coating 5 is coated on the upper part of the inner wall of the outer ring electrode 3, the middle metal coating 6 is coated on the middle part of the inner wall of the outer ring electrode 3, and the lower metal coating 7 is coated on the lower part of the inner wall of the outer ring electrode 3.

[0055] The outer wall of the outer ring electrode 3 is provided with a first metal coating strip 8 communicating with the middle metal coating 6 and a second metal coating strip 9 communicating with the upper metal coating 5 and the lower metal coating 7 .

[0056] The first metal-coated strip 8 and the second metal-coated strip 9 may be metal-coated strips, and the first metal-coated strip 8 and the second metal-coated strip 9 may be coated on the outer peripheral surface of the outer ring electrode 3 relatively along the radial direction of the outer ring electrode 3 .

[0057] Specifically, a first through hole is provided at a position of the outer ring electrode 3 corresponding to the middle metal coating 6, and the first metal coating strip 8 passes through the outer ring electrode 3 via the first through hole to achieve conduction with the middle metal coating 6; a second through hole is provided at a position of the outer ring electrode 3 corresponding to the upper metal coating 5, and the second metal coating strip 9 passes through the outer ring electrode 3 through the second through hole to achieve conduction with the upper metal coating 5; a third through hole is provided at a position of the outer ring electrode 3 corresponding to the lower metal coating 7, and the second metal coating strip 9 also passes through the outer ring electrode 3 through the third through hole to achieve conduction with the lower metal coating 7.

[0058] In some possible implementations disclosed in this application, see Figure 2 As shown, the vacuum gauge further includes a planar mainboard 10 , which is disposed in the housing 1 , and is electrically connected to the first metal-coated strip 8 and the second metal-coated strip 9 , respectively.

[0059] It can be understood that in the present application, the planar mainboard 10 can provide a stable electrical connection basis for the first metal-coated strip 8 and the second metal-coated strip 9, ensure the effective transmission of electrical signals, reduce signal loss and interference, and thus improve the accuracy and reliability of measurement; at the same time, the planar mainboard 10 can realize the centralization of electrical connections, which helps to simplify the circuit layout inside the vacuum gauge, reduce the complexity of the circuit, and reduce the possibility of failure.

[0060] The planar mainboard 10 may be a circuit board, and the planar mainboard 10 may be electrically connected to the first metal-coated strip 8 and the second metal-coated strip 9 via a flexible wire.

[0061] In some possible implementations disclosed in this application, see Figure 2 As shown, the vacuum gauge further includes a tube pin 11 . Two tube pins 11 are provided. One tube pin 11 is used to conduct the first metal film strip 8 with the planar main board 10 , and the other tube pin 11 is used to conduct the second metal film strip 9 with the planar main board 10 .

[0062] Among them, in this embodiment, the planar mainboard 10 is electrically connected to the first metal-coated strip 8 and the second metal-coated strip 9 through the tube pin 11. It can be understood that the tube pin 11 provides certain support and fixation for the planar mainboard 10, enhancing the stability and durability of the internal structure of the entire vacuum gauge; at the same time, the tube pin 11 can reduce the impact of external electromagnetic interference on the transmission of electrical signals, and ensure the reliability of the measurement results. In addition, the precise conduction effect of the tube pin 11 can also effectively reduce the loss during signal transmission, further improving the accuracy and precision of the vacuum gauge measurement data. In practical applications, this means that even in complex and changeable working environments, the vacuum gauge can stably provide reliable vacuum measurement results.

[0063] In some possible implementations disclosed in this application, see Figure 4 As shown, the first metal-coated strip 8 and the second metal-coated strip 9 both extend to the top surface of the outer ring electrode 3 .

[0064] It can be understood that in the present application, the extension to the top surface allows the metal coated strip to have a larger contact area on the top surface, and the tube needle 11 can more easily find a suitable connection position, thereby increasing the stability and reliability of the connection; at the same time, the larger contact area facilitates the precise connection of the tube needle 11, reduces the signal transmission problem caused by connection deviation, and ensures the accurate transmission of electrical signals; at the same time, the extension of the top surface makes it unnecessary for the tube needle 11 to find a specific connection point in the complex electrode structure when connecting, reducing the difficulty and complexity of the connection and improving the efficiency of production and assembly; at the same time, the extended part can provide better support and fixation for the tube needle 11, making the connection more firm, not easy to loosen or disconnect, and ensuring stability in long-term use.

[0065] In some possible implementations disclosed in this application, see Figure 2 As shown, the vacuum gauge further includes a conductive elastic element 12 , which is connected to the tube pin 11 . The conductive elastic element 12 is disposed at one end of the tube pin 11 away from the planar main board 10 .

[0066] It can be understood that in the present application, the tube needle 11 is connected to the metal film strip through the conductive elastic element 12, which can compensate for the tolerances generated during the manufacturing and installation of the vacuum gauge, as well as the deformation of components that may occur during use, to ensure that the tube needle 11 and other components always maintain good electrical contact, thereby improving the stability and reliability of the measurement; at the same time, when the vacuum gauge is subjected to vibration or impact, the conductive elastic element 12 can play a role in buffering and shock absorption, reduce mechanical damage to the tube needle 11 and the connection part, and extend the service life; at the same time, it can automatically adjust the position and contact pressure of the tube needle 11 according to different working conditions and environments, adapt to the slight changes inside the vacuum gauge, and maintain the stability of the electrical connection; at the same time, the good conductivity of the conductive elastic element 12 helps to reduce the contact resistance, improve the efficiency of electrical signal transmission, and reduce energy loss, thereby improving the measurement accuracy of the vacuum gauge; at the same time, through elastic contact, the influence of external electromagnetic interference on the electrical connection can be reduced, and the working stability of the vacuum gauge in a complex electromagnetic environment can be enhanced.

[0067] The conductive elastic element 12 may be a conductive spring.

[0068] Specifically, the conductive elastic element 12 is disposed on the side of the pin 11 away from the planar mainboard 10, and is used to connect the pin 11 with the metal film strip. In this embodiment, two conductive elastic elements 12 are provided, and the two conductive elastic elements 12 are provided in a one-to-one correspondence with the two pins 11.

[0069] In some possible implementations disclosed in this application, see Figure 2 As shown, the vacuum gauge further includes a sealing structure 13, which is used to seal the vacuum chamber, and the planar main board 10 is arranged outside the vacuum chamber.

[0070] In the present application, by setting up a sealing structure 13, external gas can be effectively prevented from entering the vacuum chamber, the vacuum environment in the chamber can be maintained, and the measurement accuracy and stability of the vacuum gauge can be ensured; at the same time, electromagnetic interference can be blocked from entering the vacuum chamber to a certain extent, thereby reducing interference with the electronic signal on the flat mainboard 10 and ensuring its normal operation.

[0071] In one embodiment, the sealing structure 13 is a partition, which is used to divide the internal space of the housing 1 into two parts. The flat mainboard 10 is arranged on one side of the partition, and the vacuum chamber is arranged on the other side of the partition; as another embodiment, the sealing structure 13 is a shell with the same shape as the housing 1, and the shell is coaxially arranged in the housing 1, and a vacuum chamber is formed inside the shell.

[0072] In the above embodiment, the sealing structure 13 is provided with an air extraction hole 14, see Figure 2 As shown, the vacuum chamber is connected to an external vacuum pumping device through a vacuum hole 14 to maintain the vacuum degree of the vacuum chamber.

[0073] It can be understood that in the present application, by providing the exhaust hole 14, the vacuum chamber can be connected to the external vacuum equipment, and the vacuum degree of the vacuum chamber can be accurately adjusted and maintained according to actual needs to meet different working conditions and measurement requirements; at the same time, the stable vacuum state inside the vacuum chamber can be maintained, reducing the influence of external gas and pressure fluctuations, and providing a reliable environment for accurate measurement of the vacuum gauge.

[0074] When the vacuum gauge measures the vacuum degree, the air extraction hole 14 can be sealed by a sealing plug, a sealant or a cover plate.

[0075] In the vacuum gauge provided in the embodiment of the present application, the inner ring electrode 2 and the outer ring electrode 3 are both annular structures, which can achieve a large capacitor facing area within a limited size, thereby improving the accuracy and sensitivity of the vacuum gauge; at the same time, the inner ring electrode 2 and the outer ring electrode 3 are coaxially arranged to form a more uniform and stable electric field, which helps to accurately measure the vacuum degree of the environment to be measured and improve the measurement accuracy.

[0076] It is easy for those skilled in the art to understand that, under the premise of no conflict, the above-mentioned advantageous methods can be freely combined and superimposed.

[0077] The above are only preferred embodiments of the present application and are not intended to limit the present application. Any modifications, equivalent replacements and improvements made within the spirit and principles of the present application shall be included in the protection scope of the present application. The above are only preferred implementations of the present application. It should be pointed out that for ordinary technicians in this technical field, several improvements and variations can be made without departing from the technical principles of the present application, and these improvements and variations should also be regarded as the protection scope of the present application.

Claims

1. A vacuum gauge, characterized in that: The invention comprises an outer shell (1), an inner ring electrode (2) and an outer ring electrode (3), wherein the inner ring electrode (2) is arranged in the outer shell (1), one end of the inner ring electrode (2) is closed and the other end is open, so as to form a chamber to be tested which is connected to the environment to be tested, a vacuum chamber is arranged in the circumference of the outer side of the chamber to be tested, and the outer ring electrode (3) is arranged in the vacuum chamber and is coaxially arranged with the inner ring electrode (2).

2. The vacuum gauge according to claim 1, characterized in that: The inner ring electrode (2) comprises an annular diaphragm (21) and a tightening piece (22); the tightening piece (22) is a hollow structure, and one end of the tightening piece (22) is closed and the other end is open, so as to form the chamber to be measured; the diaphragm (21) is arranged on the outer peripheral surface of the tightening piece (22); the outer peripheral surface of the tightening piece (22) is provided with a plurality of air permeable slits (221); and the plurality of air permeable slits (221) are evenly arranged along the circumferential direction of the tightening piece (22).

3. The vacuum gauge according to claim 2, characterized in that: The vacuum gauge further comprises an air baffle (4), wherein the air baffle (4) is arranged at the open end of the expansion member (22), and the area of ​​the air baffle (4) is smaller than the opening area of ​​the expansion member (22).

4. The vacuum gauge according to claim 1, characterized in that: The surface of the outer ring electrode (3) on the side close to the inner ring electrode (2) is provided with an upper metal coating (5), a middle metal coating (6) and a lower metal coating (7) in sequence from top to bottom in the axial direction, and the surface of the outer ring electrode (3) on the side away from the inner ring electrode (2) is provided with a first metal coating strip (8) and a second metal coating strip (9), the first metal coating strip (8) is connected to the middle metal coating (6), and the second metal coating strip (9) is respectively connected to the upper metal coating (5) and the lower metal coating (7).

5. The vacuum gauge according to claim 4, characterized in that: The vacuum gauge further comprises a planar mainboard (10), wherein the planar mainboard (10) is arranged in the housing (1), and the planar mainboard (10) is electrically connected to the first metal-coated strip (8) and the second metal-coated strip (9) respectively.

6. The vacuum gauge according to claim 5, characterized in that: The vacuum gauge further comprises a tube pin (11), wherein two tube pins (11) are provided, one of the tube pins (11) is used for conducting the first metal-coated strip (8) and the planar main board (10), and the other of the tube pins (11) is used for conducting the second metal-coated strip (9) and the planar main board (10).

7. The vacuum gauge according to claim 6, characterized in that: The first metal-coated strip (8) and the second metal-coated strip (9) both extend to the top surface of the outer ring electrode (3).

8. The vacuum gauge according to claim 7, characterized in that: The vacuum gauge further comprises a conductive elastic element (12), wherein the conductive elastic element (12) is connected to the tube pin (11), and the conductive elastic element (12) is arranged at an end of the tube pin (11) away from the planar main board (10).

9. The vacuum gauge according to claim 5, characterized in that: The vacuum gauge further comprises a sealing structure (13), wherein the sealing structure (13) is used to seal the vacuum chamber, and the planar main board (10) is arranged outside the vacuum chamber.

10. The vacuum gauge according to claim 9, characterized in that The sealing structure (13) is provided with an air pumping hole (14), and the vacuum chamber is connected to an external vacuum pumping device through the air pumping hole (14) to maintain the vacuum degree of the vacuum chamber.

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