Bearing device, process chamber and semiconductor process equipment

Abstract

The invention provides a bearing device, a process chamber and semiconductor process equipment, the bearing device comprises a bearing assembly, a connecting shaft, a light source and at least one photodynamic graphene, the connecting shaft extends in the vertical direction, and the top end of the connecting shaft is fixedly connected with the bearing assembly; the light source is used for emitting light; the at least one photodynamic graphene is fixedly arranged on the outer surface of the connecting shaft, the at least one photodynamic graphene is irradiated by light rays and can obtain driving force under the irradiation of the light rays, the driving force can drive the connecting shaft to rotate by a target angle, and the target angle is in positive correlation with the driving force; and when the connecting shaft rotates at a target angle, the photodynamic graphene is irradiated by light rays at the position where the connecting shaft is located. By adopting the bearing device, the photodynamic graphene is irradiated by the light to obtain the driving force, the connecting shaft drives the bearing assembly to rotate under the action of the driving force, the photodynamic graphene is not magnetically interfered by magnetic parts inside and outside the process cavity, and the bearing assembly can keep stable rotation.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor technology, and in particular to a carrier device, a process chamber and semiconductor process equipment. Background Art

[0002] A process chamber of a semiconductor process equipment is usually provided with a carrier assembly for carrying a wafer. The carrier assembly is rotatable so that a film layer formed on the surface of the wafer is more uniform.

[0003] Figure 1 A schematic diagram of the structure of a process chamber is provided as an example of the related art. Figure 1 In the example shown, the bearing assembly 110A is rotated in the following manner: the sleeve 160A extends from the opening of the cavity 101A to the outside of the cavity 101A, the connecting shaft 120A is inserted into the sleeve 160A, the top end of the connecting shaft 120A extends to be fixedly connected to the bearing assembly 110A located above the sleeve 160A, and the bottom end of the connecting shaft 120A extends to the outside of the cavity 101A. The process chamber 100A also includes a magnetic coupling 300A disposed outside the cavity 101A, the inner magnetic rotor 320A of the magnetic coupling 300A is located in the space enclosed by the sleeve 160A and the connecting shaft 120A and is sleeved on the connecting shaft 120A, the outer magnetic rotor 310A of the magnetic coupling 300A is sleeved on the sleeve 160A and is arranged corresponding to the inner magnetic rotor 320A, and the outer magnetic rotor 310A is also connected to the motor transmission. The working process of the process chamber 100A is as follows: the motor drives the outer magnetic rotor 310A to rotate, a magnetic force is generated between the outer magnetic rotor 310A and the inner magnetic rotor 320A, the inner magnetic rotor 320A rotates under the action of the magnetic force, and then drives the connecting shaft 120A and the bearing assembly 110A to rotate.

[0004] However, in the example of the related art, the supporting component cannot maintain stable rotation during the operation of the semiconductor process equipment. Summary of the invention

[0005] The present invention aims to solve at least one of the technical problems existing in the prior art, and proposes a carrier device, a process chamber and a semiconductor process equipment.

[0006] In order to achieve the purpose of the present invention, a carrying device is provided, including: a carrying component, a connecting shaft, a light source and at least one photodynamic graphene, the connecting shaft extends in a vertical direction, and the top end of the connecting shaft is fixedly connected to the carrying component; the light source is used to emit light; at least one photodynamic graphene is fixedly arranged on the outer surface of the connecting shaft, at least one photodynamic graphene is illuminated by light, and can obtain a driving force under the illumination of light, the driving force can drive the connecting shaft to rotate a target angle, the target angle is positively correlated with the driving force, and there is a photodynamic graphene illuminated by light at the position where the connecting shaft rotates to the target angle.

[0007] In the supporting device as described above, the light emitted by the light source is projected onto the photodynamic graphene along the tangent direction of the connecting axis, and the driving force is the tangential force.

[0008] The supporting device as described above, wherein there is one photodynamic graphene and multiple light sources; along the tangent direction of the outer circumference of the connecting shaft, the multiple light sources are arranged on both sides of the photodynamic graphene, and the light emitted by the light sources located on both sides of the photodynamic graphene are projected onto the photodynamic graphene in opposite directions, so that the connecting shaft can switch between forward rotation and reverse rotation.

[0009] The carrying device as described above, wherein one or more light sources are provided, and multiple photodynamic graphenes are provided, and the multiple photodynamic graphenes are arranged at intervals along the circumference of the connecting shaft; and the light source and the photodynamic graphene are configured so that the connecting shaft can switch between forward rotation and reverse rotation.

[0010] In the supporting device as described above, the emission path of the light emitted by at least one light source can be switched so as to be projected onto either of the two photodynamic graphenes; and when the light is projected onto one of the two photodynamic graphenes, the driving force obtained by one of the photodynamic graphenes can drive the connecting axis to rotate in a clockwise direction; when the light is projected onto the other of the two photodynamic graphenes, the driving force obtained by the other photodynamic graphene can drive the connecting axis to rotate in a counterclockwise direction.

[0011] The carrying device as described above, wherein the light emitted by at least one light source switches the emission path through the reflective assembly, the reflective assembly includes a first reflector, a second reflector and a third reflector located between the light source and the connecting shaft, and the light emitted by at least one light source can be projected onto the third reflector; the third reflector is located between the first reflector and the second reflector, and the third reflector can rotate around the vertical axis between a first position and a second position;

[0012] When the third reflector is in the first position, it can reflect the light to the first reflector, and the first reflector can reflect the light to one of the two photodynamic graphenes; when the third reflector is in the second position, it can reflect the light to the second reflector, and the second reflector can reflect the light to the other of the two photodynamic graphenes.

[0013] The bearing device as described above, wherein the bearing device further comprises a position detector, which is used to detect the rotation speed and angular displacement of the connecting shaft; according to the rotation speed and angular displacement, the connecting shaft is controlled to be stationary at a specified position.

[0014] The bearing device as described above, wherein the bearing device also includes a sleeve, the sleeve is sleeved on the outer circumference of the connecting shaft, a vacuum bearing is nested between the connecting shaft and the sleeve, the connecting shaft is connected to the sleeve through the vacuum bearing and can rotate relative to the sleeve; the inner surface of the sleeve and the outer surface of the connecting shaft jointly define an annular space, at least one transmission window is fixedly provided on the sleeve, the transmission window corresponds to the photodynamic graphene, and the light emitted by the light source is emitted into the annular space through the transmission window and projected onto the corresponding photodynamic graphene.

[0015] The supporting device as described above, wherein the supporting device also includes a sealing cover arranged in the annular space, the sealing cover is fixedly connected to the outer surface of the connecting shaft and jointly defines a closed cavity for accommodating the photodynamic graphene; each sealing cover corresponds to a cover that holds a photodynamic graphene; and each sealing cover is provided with a projection window, the projection window is directly opposite to the corresponding transmission window, and the light passing through the transmission window can be projected onto the corresponding photodynamic graphene through the projection window.

[0016] The load-bearing device as described above, wherein the load-bearing device further comprises an insulating member and two conductive structures located in the annular space, the two conductive structures are spaced apart in the vertical direction, and the insulating member is located between the two conductive structures to insulate and isolate the two conductive structures; the sleeve is made of a metal material, and has a first barrel section and a second barrel section respectively surrounding the two conductive structures, and the first barrel section and the second barrel section are in conductive contact with the corresponding surrounding conductive structures;

[0017] A first electrode and a second electrode with opposite polarities are provided on the bearing assembly; the first electrode is connected to a conductive structure corresponding to the first barrel section via a first connecting line, and the first barrel section is used to connect to the positive pole of the power supply via a first power line; the second electrode is connected to a conductive structure corresponding to the second barrel section via a second connecting line, and the second barrel section is used to connect to the negative pole of the power supply via a second power line.

[0018] The supporting device as described above, wherein the conductive structure includes a magnetic fluid and a magnet, the magnet is fixedly arranged between the barrel section corresponding to the conductive structure and the connecting shaft, the magnetic fluid is constrained between the barrel section corresponding to the conductive structure and the connecting shaft under the action of the magnetic force of the magnet, and the magnetic fluid is in conductive contact with the inner surface of the barrel section corresponding to the conductive structure.

[0019] The load-bearing device as described above, wherein the conductive structure comprises a metal ring, a conductive ring and a spring surrounding the outer circumference of the connecting shaft, and the metal ring and the conductive ring are both in a cone shape;

[0020] The upper end of the metal ring is a large-diameter end, and the lower end is a small-diameter end. The large-diameter end of the metal ring abuts against the inner surface of the barrel section corresponding to the conductive structure.

[0021] The upper end of the conductive ring is a small-diameter end, and the lower end is a large-diameter end. The small-diameter end of the conductive ring abuts against the outer surface of the connecting shaft.

[0022] The top end of the spring is fixed in a part of the annular space, and the bottom end is against the large diameter end of the conductive ring, so that the large diameter end of the conductive ring is against the small diameter end of the metal ring, and the spring is in a compressed state.

[0023] The supporting device as described above, wherein the insulating part includes at least one group of isolation components, the isolation components include a first insulation ring and a second insulation ring surrounding the first insulation ring, the first insulation ring is sleeved on the outer periphery of the connecting shaft, the second insulation ring is sleeved on the outer periphery of the sleeve, and at least one group of isolation components is located between the two conductive structures.

[0024] The load-bearing device as described above, wherein the connecting shaft is made of metal material, a through passage is provided in the middle of the connecting shaft, the connecting shaft has a first shaft section and a second shaft section, one of the two conductive structures is located between the first shaft section and the first barrel section, and the other is located between the second shaft section and the second barrel section; the first shaft section and the second shaft section are in conductive contact with the corresponding conductive structures;

[0025] The inner surface of the first barrel section is connected to the first electrode through a first connecting line, and the inner surface of the second barrel section is connected to the second electrode through a second connecting line. The first connecting line and the second connecting line extend in the through channel.

[0026] As another technical solution, the present invention also provides a process chamber, comprising: a cavity and any one of the carrying devices provided by the present invention, wherein an opening is provided at the bottom of the cavity; the carrying assembly of the carrying device is located in the cavity, and the bottom end of the connecting shaft of the carrying device extends through the opening to outside the cavity.

[0027] As another technical solution, the present invention further provides a semiconductor process equipment, including: any process chamber provided by the present invention.

[0028] The present invention has the following beneficial effects:

[0029] The carrier device, process chamber and semiconductor process equipment provided by the present invention are provided with a photodynamic graphene fixedly connected to the connecting shaft, and a light source is provided to irradiate the photodynamic graphene, so that the photodynamic graphene is irradiated by light to obtain a driving force, and the driving force can drive the connecting shaft to rotate around its central axis to a target angle. Compared with a magnetic coupling, the photodynamic graphene will not be magnetically interfered by magnetic parts inside and outside the process chamber, and the light emitted by the light source can be stably projected on the photodynamic graphene, so that the driving force obtained by the photodynamic graphene can stably drive the connecting shaft to rotate, so that the carrier assembly can maintain stable rotation. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] Figure 1A schematic diagram of the structure of a process chamber provided as an example of the related art;

[0031] Figure 2 A partial structural schematic diagram of a process chamber provided in an embodiment of the present application;

[0032] Figure 3 Schematic diagram of the relationship between a connecting shaft, a photodynamic graphene and a light source in a carrying device provided in an embodiment of the present application Figure 1 ;

[0033] Figure 4 Schematic diagram of the relationship between a connecting shaft, a photodynamic graphene and a light source in a carrying device provided in an embodiment of the present application Figure 2 ;

[0034] Figure 5 A schematic diagram of the relationship between a connecting shaft, three photodynamic graphenes and two light sources in a carrying device provided in an embodiment of the present application;

[0035] Figure 6 A schematic diagram of a process in which a connecting shaft in a load-bearing device provided in an embodiment of the present application switches from forward rotation to reverse rotation;

[0036] Figure 7 A schematic diagram of another process of switching the connecting shaft from forward rotation to reverse rotation in the load-bearing device provided in an embodiment of the present application;

[0037] Figure 8 A schematic diagram of the structure of another process chamber provided in an embodiment of the present application;

[0038] Fig. 9 for Figure 8 A schematic top view of some structures in the process chamber shown;

[0039] Fig.10 A schematic diagram of the structure of another semiconductor process equipment provided in an embodiment of the present application.

[0040] Description of reference numerals:

[0041] 100-process chamber; 101-chamber;

[0042] 110- load bearing assembly;

[0043] 120-connecting shaft; 121-sealing cover; 122-projection window; 123-vacuum bearing;

[0044] 130-light source; 131-base;

[0045] 140-Photodynamic graphene;

[0046] 150 - first reflector; 151 - second reflector; 152 - third reflector;

[0047] 160-sleeve; 161-annular space; 162-transmission window; 163-position detector; 164-connecting flange; 165-bellows; 166-sealing ring;

[0048] 170 - first electrode; 171 - second electrode; 172 - first power line; 173 - second power line; 174 - first connection line; 175 - second connection line;

[0049] 180 - insulating member; 181 - first insulating ring; 182 - second insulating ring;

[0050] 190-conductive structure; 191-magnetic fluid; 192-magnet; 193-metal ring; 194-conductive ring; 195-spring;

[0051] 200 - Power supply. DETAILED DESCRIPTION

[0052] In order to enable those skilled in the art to better understand the technical solution of the present invention, the carrier device, process chamber and semiconductor process equipment provided by the present invention are described in detail below in conjunction with the accompanying drawings.

[0053] Please refer to Figure 1 The process chamber 100A provided in the example of the related art transmits power to the connecting shaft 120A and the bearing assembly 110A through the magnetic coupling 300A. However, with this example, the bearing assembly cannot maintain stable rotation.

[0054] The inventor of the present application has found through careful research that the main reasons for the inability of the bearing assembly to rotate stably are: first, magnetic force is generated between the magnetic parts in the atmospheric environment and the outer magnetic rotor and the inner magnetic rotor of the magnetic coupling, which in turn causes magnetic interference to the outer magnetic rotor and the inner magnetic rotor, resulting in unstable operation of the magnetic coupling; second, when the semiconductor process equipment adopts magnetron sputtering for coating, magnetic parts such as magnetrons are usually arranged in the process chamber, and the magnetic parts in the process chamber will generate magnetic force between the outer magnetic rotor and the inner magnetic rotor, which in turn causes magnetic interference to the outer magnetic rotor and the inner magnetic rotor, resulting in unstable operation of the magnetic coupling. In general, the outer magnetic rotor and the inner magnetic rotor will be subject to magnetic interference from the magnetic parts inside and outside the process chamber, resulting in the inability to stably transmit power to the bearing assembly.

[0055] In addition, the semiconductor process equipment that uses related technologies also has the following problems: the outer magnetic rotor and the inner magnetic rotor use magnetic force to transmit power, and there is a hysteresis effect in the transmission between the two, resulting in a certain position deviation between the outer magnetic rotor and the inner magnetic rotor, which in turn causes a deviation between the load-bearing component and the specified position when it stops.

[0056] In this way, after the wafer completes the process, in order to lift the wafer to the target position so that it can be taken away by the robot for the next process, it is necessary to control the rise of the pins of the semiconductor process equipment. However, since the supporting component in the example of the related art deviates from the specified position, the through hole on the supporting component will deviate from the pin. Therefore, the pin cannot be aligned with the through hole, which will cause the pin to hit the supporting component during the rising process and be damaged, and will cause the wafer to be unable to be raised or lowered and the wafer removal operation cannot be performed.

[0057] In order to solve the above problems, the embodiments of the present application provide a carrier device, a process chamber and a semiconductor process equipment, which utilize the characteristic of photodynamic graphene to obtain driving force under light irradiation to realize the rotation of the connecting shaft and the carrier component.

[0058] Figure 2 This is a partial structural diagram of a process chamber provided in an embodiment of the present application. Please refer to Figure 2 As shown, the process chamber 100 includes a cavity 101 and a carrying device, and an opening is provided at the bottom of the cavity 101 .

[0059] Please continue to refer to Figure 2 As shown, the embodiment of the present application also provides a carrying device, which includes a carrying assembly 110, a connecting shaft 120, at least one light source 130 and at least one photodynamic graphene 140. When the carrying device is applied to the process chamber 100 (such as Figure 2 ), the carrying assembly 110 is arranged in the cavity 101, the carrying assembly 110 is used to carry the wafer, the top end of the connecting shaft 120 is fixedly connected to the carrying assembly 110, the bottom end of the connecting shaft 120 extends through the opening to the outside of the cavity 101, the light source 130 and the photodynamic graphene 140 are both arranged outside the cavity 101, and the connecting shaft 120 is driven to rotate around its central axis to drive the carrying assembly 110 to rotate. It should be understood that in other embodiments of the present application, the light source 130 and the photodynamic graphene 140 can also be arranged in the cavity 101.

[0060] The light source 130 is used to emit light, and the photodynamic graphene 140 is fixedly disposed on the outer surface of the connecting shaft 120. At least one photodynamic graphene 140 is irradiated by light and can obtain driving force under the irradiation of the light.

[0061] The direction of the driving force is consistent with the direction of the light projected on the photodynamic graphene 140. The driving force can drive the connecting shaft 120 to rotate around the central axis to a target angle. The target angle is positively correlated with the driving force, that is, the greater the driving force, the greater the target angle of rotation of the connecting shaft 120. In addition, the acceleration of the rotation of the connecting shaft 120 is also positively correlated with the driving force, that is, the greater the driving force, the greater the acceleration of the rotation of the connecting shaft 120.

[0062] According to the characteristics of the photodynamic graphene 140, it can be understood that the magnitude of the driving force is related to the intensity of the light and the wavelength of the light. Among them, the magnitude of the driving force is positively correlated with the intensity of the light. Specifically, the higher the intensity of the light, the greater the driving force obtained by the photodynamic graphene 140. The magnitude of the driving force is negatively correlated with the wavelength of the light. Since the wavelength and frequency of the light are inversely proportional, the magnitude of the driving force is positively correlated with the frequency of the light. In other words, the shorter the wavelength of the light, the greater the frequency of the light, and the greater the driving force obtained by the photodynamic graphene 140.

[0063] It is worth noting that when the connecting shaft 120 rotates around the central axis by a target angle, the photodynamic graphene 140 is irradiated by light. In this way, after the driving force drives the connecting shaft 120 to rotate by a target angle, the photodynamic graphene 140 can still be irradiated by light, so that the driving force for driving the connecting shaft 120 to rotate can continue to be obtained, thereby enabling the connecting shaft 120 and the bearing assembly 110 to continue to rotate.

[0064] Based on this, the target angle should be reasonably designed to ensure that the photodynamic graphene 140 can still be illuminated by light when the connecting shaft 120 rotates to the target angle.

[0065] Under the premise that the intensity and wavelength of light do not change and the driving force obtained by the photodynamic graphene 140 under the irradiation of light remains unchanged, that is, when the light source 130 emits light of a specific wavelength and a specific intensity, it can be understood that the design of the target angle should take into account the number and position of the light sources 130 and the photodynamic graphene 140.

[0066] Figure 3 Schematic diagram of the relationship between the connecting shaft 120, a photodynamic graphene 140 and a light source 130 in a carrying device provided in an embodiment of the present application Figure 1 For example, the light source 130 is provided with one Figure 3 As shown, when the photodynamic graphene 140 is provided with one, the driving force F generated by the light projected on the photodynamic graphene 140 should be able to rotate the connecting shaft 120 to a target angle of 360°. In this way, after the connecting shaft 120 rotates to a target angle (i.e., 360°), the light can still be projected onto the photodynamic graphene 140, so that the photodynamic graphene 140 obtains the driving force F again.

[0067] Figure 4 Schematic diagram of the relationship between the connecting shaft 120, a photodynamic graphene 140 and a light source 130 in a carrying device provided in an embodiment of the present application Figure 2 For example, the light source 130 is provided with one Figure 4As shown, when there are two photodynamic graphenes 140, and the two photodynamic graphenes 140 are arranged 180° apart along the circumference of the connecting shaft 120, the driving force F generated by the light projected on the photodynamic graphene 140 should be able to make the connecting shaft 120 rotate to a target angle of 180° or 360°. In the embodiment where the target angle is 180°, after the connecting shaft 120 rotates to the target angle, the light is projected on one of the two photodynamic graphenes 140 (for example, Figure 4 The left side of the middle) is converted to the other one of the two photodynamic graphenes 140 (for example, Figure 4 center right).

[0068] Figure 5 Schematic diagram of the relationship between the connecting shaft 120, three photodynamic graphenes 140 and two light sources 130 in a carrying device provided in an embodiment of the present application. Take two light sources 130 as an example. Figure 5 As shown, when there are three photodynamic graphenes 140, two of which are arranged at 180° intervals along the circumference of the connecting shaft 120, and the remaining photodynamic graphene 140 is located between the other two photodynamic graphenes 140 and is spaced 90° apart, the driving force generated when the two light sources 130 irradiate the photodynamic graphene 140 is set to make the rotation direction of the connecting shaft 120 consistent, and the driving force F generated by the light projected on the photodynamic graphene 140 should be able to make the target angle of rotation of the connecting shaft 120 reach 90°, 180°, 270° or 360°.

[0069] Those skilled in the art can obviously infer the technical solutions for other situations in which the number and position of the light source 130 and the photodynamic graphene 140 are used, and examples are not listed one by one here.

[0070] According to the above description, the target angle and acceleration are related to the driving force, and the driving force is related to the intensity and wavelength of the light. Therefore, the light source 130 needs to be reasonably designed to ensure that the intensity or wavelength of the light emitted by the light source 130 can enable the connecting shaft 120 to reach the corresponding target angle.

[0071] In order to determine the mapping relationship between the intensity and wavelength of light and the driving force, so as to accurately control the target angle and acceleration according to the mapping relationship, a large number of test experiments can be carried out before the photodynamic graphene 140 is installed on the connecting shaft 120. Specifically, the photodynamic graphene 140 is installed on a rotating shaft, and a light source 130 and a rangefinder (for example, a camera rangefinder or an infrared rangefinder) are set. The light emitted by the light source 130 is projected onto the photodynamic graphene 140 located on the rotating shaft, so that it obtains a driving force to drive the rotating shaft to rotate, and the rangefinder is used to detect the rotational acceleration and rotation angle of the rotating shaft. In this way, the intensity or wavelength of the light emitted by the light source 130 is changed, and the corresponding rotational acceleration and rotation angle are obtained through the rangefinder, so that the mapping relationship between the intensity and wavelength of light and the driving force can be determined.

[0072] The carrier device of this embodiment and the process chamber 100 equipped with the carrier device are provided with a photodynamic graphene 140 fixedly connected to the connecting shaft 120, and a light source 130 is provided to irradiate the photodynamic graphene 140, so that the photodynamic graphene 140 is irradiated by light to obtain a driving force, and the driving force can drive the connecting shaft 120 to rotate around its central axis to a target angle. Compared with a magnetic coupling, the photodynamic graphene 140 will not be magnetically interfered by magnetic parts inside and outside the process chamber 100, and the light emitted by the light source 130 can be stably projected on the photodynamic graphene 140, so that the driving force obtained by the photodynamic graphene 140 can stably drive the connecting shaft 120 to rotate, so that the carrier assembly 110 can maintain stable rotation, thereby improving the process stability of the wafer.

[0073] It can be understood that the carrier device can work in a strong electromagnetic environment and has a relatively low requirement on the magnetic properties of the working environment. Therefore, the process chamber 100 equipped with the carrier device can be suitable for implementing a process requiring strong electromagnetics.

[0074] In some embodiments, the light source 130 is a frequency-variable light source. In other words, the wavelength of the light emitted by the light source 130 is adjustable. In combination with the aforementioned description that the driving force is inversely proportional to the wavelength of the light, in this way, during the semiconductor manufacturing process, the wavelength of the light emitted by the light source 130 can be adjusted according to demand and actual working conditions to adjust the magnitude of the driving force, and then the target angle and acceleration of the rotation of the connecting shaft 120 can be adjusted, thereby controlling the speed of rotation of the bearing assembly 110. For example, in the later stage of the semiconductor manufacturing process, the wavelength of the light emitted by the light source 130 can be adjusted to be longer, so that the rotation of the bearing assembly 110 slows down.

[0075] Similarly, the light source 130 can also be a light source with variable light intensity. In other words, the intensity of the light emitted by the light source 130 can be adjusted. In this way, during the semiconductor manufacturing process, the intensity of the light emitted by the light source 130 can be adjusted according to demand and actual working conditions, thereby controlling the speed of rotation of the carrier assembly 110.

[0076] The photodynamic graphene 140 generates a driving force along the direction of light irradiation, so the direction of the driving force is related to the projection direction of the light. Figure 3 In the example shown, there is an angle θ between the projection direction of the light and the radial axis OO of the connecting shaft 120. At this time, the driving force F obtained by the photodynamic graphene 140 can be decomposed into Fx and Fy, Fx is perpendicular to Fy, Fy is parallel to the tangent direction of the outer circumference of the connecting shaft 120, and Fy is used to drive the connecting shaft 120 to rotate around the central axis.

[0077] In some preferred embodiments, Figure 4 As shown, the light source 130 is arranged so that the light it emits is projected onto the photodynamic graphene 140 along the tangent direction of the connecting shaft 120, and the driving force F is a tangential force, that is, the driving force F is parallel to the tangent direction of the outer circumference of the connecting shaft 120. In this way, the driving force F can act on the connecting shaft 120 to rotate, avoiding part of the driving force from being wasted.

[0078] It is understandable that in an embodiment in which both the photodynamic graphene 140 and the light source 130 are provided, the connecting shaft 120 can only rotate forward or reverse.

[0079] As disclosed in the carrying device, at least one of the photodynamic graphene 140 and the light source 130 can be set to multiple. In this case, the connecting shaft 120 can switch between forward rotation and reverse rotation through reasonable photodynamic graphene 140 and light source 130. The specific implementation method of the connecting shaft 120 being able to rotate both forward and reverse is introduced below in conjunction with the accompanying drawings.

[0080] Figure 6 A schematic diagram of a process in which a connecting shaft in a load-bearing device provided in an embodiment of the present application switches from forward rotation to reverse rotation. Figure 6 As shown, there is one photodynamic graphene 140, and two light sources 130 are provided and the two light sources 130 are independent. Along the tangent direction of the outer circumference of the connecting shaft 120, the two light sources 130 are respectively arranged on both sides of the photodynamic graphene 140, and the projection directions of the light emitted by the two light sources 130 are opposite. The principle of realizing the forward and reverse switching of the connecting shaft 120 in this embodiment is: control one of the two light sources 130 (for example, located at Figure 6 The light emitted by the light source 130 is projected onto the photodynamic graphene 140, and the photodynamic graphene 140 obtains a driving force, which drives the connecting shaft 120 to rotate forward; one of the two light sources 130 is controlled to be inoperative and the other (for example, located at Figure 6 The light source 130 emits light that is projected onto the photodynamic graphene 140, and the photodynamic graphene 140 obtains a driving force, which drives the connecting shaft 120 to reverse. Of course, in other embodiments, Figure 6 If the light source 130 in the figure is replaced with three or more, a plurality of light sources 130 may be provided on one side of the photodynamic graphene 140 .

[0081] In some embodiments, two photodynamic graphenes 140 are provided, and the two photodynamic graphenes 140 are arranged at a circumferential interval of 180° along the connecting shaft 120, and one light source 130 is provided. In this embodiment, the emission path of the light emitted by the light source 130 can be switched to project onto any one of the two photodynamic graphenes 140. When the light is projected onto one of the two photodynamic graphenes 140, the driving force obtained by the photodynamic graphene 140 can drive the connecting shaft 120 to rotate in a clockwise direction. When the light is projected onto the other of the two photodynamic graphenes 140, the driving force obtained by the photodynamic graphene 140 can drive the connecting shaft 120 to rotate in a counterclockwise direction. In this way, only one light source 130 needs to be provided to realize that the connecting shaft 120 can rotate both forward and reverse, saving the number of light sources 130.

[0082] For example, Figure 7 As shown, the carrying device also includes a driver and a base 131. The light source 130 is mounted on the base 131. The driver can drive the light source 130 to reciprocate along the radial direction of the connecting shaft 120 relative to the base 131. The principle of realizing the forward and reverse switching of the connecting shaft 120 in this embodiment is: controlling the driver to drive the light source 130 to move to one of the two photodynamic graphenes 140 (for example, located at Figure 7 The light-activated graphene 140 obtains a driving force, and the driving force drives the connecting shaft 120 to rotate forward; then, the control driver drives the light source 130 to move to the other one of the two light-activated graphene 140 (for example, located at Figure 7 The light emission path is changed accordingly, and the photodynamic graphene 140 obtains a driving force, which drives the connecting shaft 120 to reverse. Figure 7 A schematic diagram of another process of switching the connecting shaft from forward rotation to reverse rotation in the load-bearing device provided in an embodiment of the present application.

[0083] For example, Figure 8 and Fig. 9 As shown, the light emitted by the light source 130 can switch the emission path through the reflective component. Figure 8 This is a schematic diagram of the structure of another process chamber 100 provided in an embodiment of the present application. Fig. 9 for Figure 8 FIG. 1 is a schematic top view of a portion of the structure in the process chamber 100 .

[0084] Specifically, the reflective assembly includes a first reflector 150, a second reflector 151, and a third reflector 152 located between the light source 130 and the connecting shaft 120. The light emitted by the light source 130 can be projected onto the third reflector 152. The third reflector 152 is located between the first reflector 150 and the second reflector 151. The third reflector 152 can rotate around a vertical axis between a first position and a second position. When the third reflector 152 is in the first position, it can reflect the light to the first reflector 150. The first reflector 150 can reflect the light to one of the two photodynamic graphenes 140 (for example, located at Fig. 9 The driving force obtained by the photodynamic graphene 140 can drive the connecting shaft 120 to rotate in the clockwise direction. When the third reflector 152 is in the second position, it can reflect the light to the second reflector 151, and the second reflector 151 can reflect the light to the other of the two photodynamic graphenes 140 (for example, at Fig. 9 The driving force obtained by the photodynamic graphene 140 can drive the connecting shaft 120 to rotate in the counterclockwise direction. The principle of switching the connecting shaft 120 between forward and reverse rotation in this embodiment is to change the emission path of the light through the reflector group composed of the first reflector 150, the second reflector 151 and the third reflector 152. In this way, the light source 130 does not need to move, so as to ensure that the light source 130 has a high working stability.

[0085] In some embodiments, multiple photodynamic graphenes 140 and light sources 130 are provided, and multiple photodynamic graphenes 140 are arranged at intervals along the circumference of the connecting shaft 120. Among them, multiple photodynamic graphenes 140 can be evenly distributed around the central axis of the connecting shaft 120, and every two photodynamic graphenes 140 can be spaced 90° and 180° apart, and this embodiment does not impose specific restrictions on this. It should be pointed out that in this embodiment, the method of switching the working states of multiple light sources 130 described above, the method of switching the emission path of the light of the light source 130, and any combination of the above methods can be used to achieve the forward and reverse switching of the connecting shaft 120, and no examples are given here one by one.

[0086] Through the above configuration, the process chamber 100 of this embodiment can be used to implement a semiconductor manufacturing process that requires the supporting component 110 to rotate forward and reverse.

[0087] Exemplarily, when the process chamber 100 is coated by magnetron sputtering, the process chamber 100 also includes a target and a magnetron. The target is arranged at the top of the cavity 101, and the magnetron is arranged above the target and scans the surface of the target under the drive of the motor. The rotation direction of the bearing assembly 110 and the magnetron must be different. Among them, when aluminum (Al) is plated on the surface of the wafer, the metal atoms sputtered on the surface of the target include aluminum, and the magnetron needs to rotate forward under the drive of the motor. At this time, the bearing assembly 110 is controlled to reverse. When copper (Cu) is plated on the surface of the wafer, the metal atoms sputtered on the surface of the target include copper, and the magnetron needs to reverse under the drive of the motor. At this time, the bearing assembly 110 is controlled to rotate forward.

[0088] Based on the embodiment in which the connecting shaft 120 can switch between forward rotation and reverse rotation, the bearing device can further include a position detector 163, which is used to detect the rotation speed and angular displacement of the connecting shaft 120. According to the rotation speed and angular displacement, the connecting shaft 120 can be controlled to be stationary at a specified position.

[0089] When the connecting shaft 120 rotates forward, by changing the working state of the light source 130 or the emission path of the light, the photodynamic graphene 140 can obtain the driving force to drive the connecting shaft 120 to reverse, and the rotation speed of the connecting shaft 120 in the clockwise direction decreases. At this time, the overall acceleration of the connecting shaft 120 is the difference between the forward acceleration and the reverse acceleration. As can be seen from the foregoing, the acceleration is positively correlated with the driving force, and the driving force is related to the intensity and wavelength of the light. Therefore, according to the mapping relationship between the light intensity and the wavelength of the light and the driving force, the acceleration of the connecting shaft 120 can be accurately controlled.

[0090] On this basis, during the operation of the bearing device, the position detector 163 detects the rotation speed and angular displacement of the connecting shaft 120 in real time. When the connecting shaft 120 needs to be controlled to stop rotating, the current rotation speed of the connecting shaft 120 can be determined according to the detection result of the position detector 163, and the current position of the connecting shaft 120 can be calculated from the angular displacement measured by the position detector 163. In this way, the current rotation speed and the current position are known, and the acceleration corresponding to the rotation speed of 0 when the connecting shaft 120 rotates from the current position to the specified position can be calculated, and then the light source 130 can be controlled accordingly.

[0091] The mapping relationship between the light intensity and wavelength of the light and the driving force of the bearing device of this embodiment is known. By reasonably controlling the projection direction of the light and the characteristics of wavelength and intensity, the acceleration of the connecting shaft 120 can be accurately controlled and the rotation speed of the connecting shaft 120 can be reduced. Then, according to the rotation speed and angular displacement detected by the position detector 163, the connecting shaft 120 and the bearing assembly 110 can be stopped at the specified position without deviating from the specified position. In this way, after the wafer is processed, the bearing assembly 110 can accurately stop at the specified position, and the ejector pin can be aligned with the through hole, so that the ejector pin can pass through the through hole and rise to push the wafer to the target position, so as to realize the wafer removal operation.

[0092] It is worth noting that those skilled in the art usually easily think of stopping the connecting shaft 120 by controlling the light source 130 to stop emitting light. However, after the light-driven graphene 140 no longer obtains the driving force, the connecting shaft 120 may still continue to rotate due to inertia, resulting in the risk that the connecting shaft 120 cannot stop at the specified position. In this embodiment, by controlling the light to make the connecting shaft 120 obtain acceleration in the opposite direction, the bearing assembly 110 can accurately stop at the specified position.

[0093] Please continue to refer to Figure 8 and Fig. 9 In some examples of the present application, the bearing device further includes a sleeve 160, which is sleeved on the outer circumference of the connecting shaft 120, and a vacuum bearing 123 is nested between the connecting shaft 120 and the sleeve 160. The connecting shaft 120 is connected to the sleeve 160 through the vacuum bearing 123 and can rotate relative to the sleeve 160. In addition, the inner surface of the sleeve 160 and the outer surface of the connecting shaft 120 jointly define an annular space 161.

[0094] When the carrying device is applied to the process chamber 100 (eg Figure 8 ), the top of the sleeve 160 is located in the process chamber 100, the bottom of the sleeve 160 extends through the opening to the outside of the process chamber 100, the bearing assembly 110 is located above the sleeve 160, and the annular space 161 is isolated from the atmospheric environment. Here, it can be understood that the bottom of the sleeve 160 extends out of the process chamber 100, and the interior of the sleeve 160 is sealed and isolated from the atmospheric environment, so that the annular space 161 surrounded by the sleeve 160 and the connecting shaft 120 is sealed to prevent the gas in the atmospheric environment from escaping into the process chamber 100 through the annular space 161 and affecting the sealing of the process chamber 100.

[0095] and Figure 2Compared with the example shown, in this embodiment, a sleeve 160 is provided, and the connecting shaft 120 is passed through the interior of the sleeve 160 and can rotate relative to the sleeve 160, and the sleeve 160 is fixed. In this way, while ensuring that the connecting shaft 120 can rotate, it is also beneficial to avoid wear of the opening hole wall caused by the rotation of the connecting shaft 120, so as to ensure as much as possible that the process chamber 100 has good sealing performance.

[0096] In order to improve the sealing performance of the process chamber 100, the process chamber 100 may further include a bellows 165. A connection flange 164 is provided at the top of the sleeve 160. The connection flange 164 is located below the bearing assembly 110. The bellows 165 is sleeved on the outer periphery of the sleeve 160. The top of the bellows 165 is fixedly connected to the bottom surface of the connection flange 164. The bottom end of the bellows 165 is sealedly connected to the bottom wall of the process chamber 100. In addition, the bellows 165 surrounds the outer periphery of the opening, that is, the orthographic projection of the opening on the bottom wall of the process chamber 100 is located within the orthographic projection of the bellows 165 on the bottom wall of the process chamber 100. By providing the bellows 165, the sealed space enclosed by the bellows 165, the sleeve 160, the connecting flange 164 and the bottom wall of the process chamber 100 is isolated from other areas of the process chamber 100. In this way, even if the gas in the atmospheric environment enters the sealed space through the sleeve 160 and the opening, it cannot escape to other areas.

[0097] Among them, the bottom wall of the cavity 101 is recessed on one side facing the inside of the cavity 101 to form a receiving groove, and the receiving groove surrounds the outside of the opening. A sealing ring 166 can be provided between the bottom end of the bellows 165 and the bottom surface of the groove. The sealing ring 166 can be fixed in the receiving groove by adhesive to achieve a sealed connection between the bottom end of the bellows 165 and the bottom wall of the process chamber 100.

[0098] As disclosed herein, two vacuum bearings 123 may be provided, wherein one vacuum bearing 123 is located in the cavity 101 and is mounted on the top end of the connecting shaft 120, and the other vacuum bearing 123 is located outside the cavity 101 and is mounted on the bottom end of the connecting shaft 120. Arranging the two vacuum bearings 123 in this manner is more conducive to avoiding the top and bottom ends of the connecting shaft 120 from tilting, and is conducive to further ensuring the verticality of the connecting shaft 120. Of course, the number of vacuum bearings 123 is not limited to the above number, and can be designed according to demand and actual working conditions.

[0099] The vacuum bearing 123 may be, for example, a deep groove ball bearing or an angular contact ball bearing. The lubricating oil of the vacuum bearing will not volatilize, which helps to prevent the lubricating oil from volatilizing and affecting the process in the process chamber 100.

[0100] In addition, in order to ensure that the photodynamic graphene 140 can be illuminated by light to realize the rotation of the carrier assembly 110, a transmission window 162 is fixedly provided on the sleeve 160. Among them, there is at least one transmission window 162, the number of which can be consistent with the number of light sources 130, and the position of the transmission window 162 should correspond to the light source 130 and the photodynamic graphene 140, so that the light emitted by the light source 130 can be projected onto the corresponding photodynamic graphene 140 after being projected into the annular space 161 through the transmission window 162.

[0101] The transmission window 162 may be fixedly connected to the sleeve 160 by welding, or may be fixedly connected to the sleeve 160 by bonding. The material of the transmission window 162 is not limited to glass, but may also be transparent resin or transparent plastic.

[0102] In some embodiments, Fig. 9 As shown, the bearing device may further include a sealing cover 121 located in the annular space 161, at least one sealing cover 121 is provided, the number of sealing covers 121 is consistent with the number of photodynamic graphenes 140, each sealing cover 121 covers the outer surface of the connecting shaft 120 and is fixedly connected to the connecting shaft 120, each sealing cover 121 and the outer surface of the connecting shaft 120 together define a closed cavity, and the closed cavity is used to accommodate one photodynamic graphene 140. In other words, each sealing cover 121 covers one photodynamic graphene 140.

[0103] With this design, the sealing cover 121 and the outer surface of the connecting shaft 120 jointly surround the photodynamic graphene 140, so that the photodynamic graphene 140 is isolated from the inside of the cavity 101. In this way, on the one hand, it is helpful to prevent the photodynamic graphene 140 from contaminating the cavity 101 and causing the cleanliness of the cavity 101 to decrease; on the other hand, it is helpful to prevent the vacuum degree of the cavity 101 from affecting the performance of the photodynamic graphene 140, thereby protecting the photodynamic graphene 140.

[0104] The sealed cavity may be filled with a protective gas (such as an inert gas such as argon) so that the sealed cavity is in an environment filled with the protective gas, so as to extend the service life of the photodynamic graphene 140. In other embodiments of the present application, the sealed cavity may also be in a vacuum state. It should be noted that at this time, the vacuum degree of the sealed cavity should be set to a small value to avoid affecting the performance of the photodynamic graphene 140.

[0105] On the basis of this embodiment, in order to enable the light to be smoothly projected onto the photodynamic graphene 140 , a projection window 122 is provided on each sealing cover 121 , and the projection window 122 is directly opposite to the corresponding transmission window 162 . The light passing through the transmission window 162 can be projected onto the corresponding photodynamic graphene 140 via the projection window 122 .

[0106] The projection window 122 is similar to the transmission window 162. Specifically, the projection window 122 can be fixedly connected to the sealing cover 121 by welding or bonding. The material of the projection window 122 is not limited to glass, but can also be transparent resin or transparent plastic.

[0107] In addition, when the carrier device disclosed herein includes a position detector 163 , the position detector 163 may be specifically located in the annular space 161 and disposed on the inner surface of the sleeve 160 .

[0108] In some embodiments, the carrier assembly 110 is provided with a first electrode 170 and a second electrode 171 with opposite polarities, and the first electrode 170 and the second electrode 171 are used to connect to the power supply 200. When the carrier device is applied to the process chamber 100, the power supply 200 is located outside the cavity 101. In this way, the power supply 200 outputs a DC voltage to the first electrode 170 and the second electrode 171, and induced charges are formed on the wafer. The induced charges generate an attractive force with the charges on the first electrode 170 and the second electrode 171, so that the wafer is adsorbed and fixed on the carrier assembly 110. That is, in this embodiment, the carrier assembly 110 uses electrostatic force to fix the wafer.

[0109] The specific implementation method of loading the voltage of the power supply 200 on the first electrode 170 and the second electrode 171 will be described in detail below with reference to the accompanying drawings.

[0110] The bearing device also includes two conductive structures 190 located in the annular space 161, and the two conductive structures 190 are spaced apart in the vertical direction. The sleeve 160 is made of metal material, so the sleeve 160 is conductive, and the sleeve 160 has a first barrel section and a second barrel section respectively surrounding the two conductive structures 190, and the first barrel section and the second barrel section are in conductive contact with the corresponding conductive structures 190. The first electrode 170 is connected to the conductive structure 190 corresponding to the first barrel section through the first connecting line 174, and the first barrel section is used to connect to the positive electrode of the power supply 200 through the first power line 172, so that the first electrode 170 is loaded with a positive voltage. The second electrode 171 is connected to the conductive structure 190 corresponding to the second barrel section through the second connecting line 175, and the second barrel section is used to connect to the negative electrode of the power supply 200 through the second power line 173, so that the second electrode 171 is loaded with a negative voltage.

[0111] The connection between the first power line 172 and the first barrel section, and the connection between the second power line 173 and the second barrel section are not limited to welding, and can also be connected by screws, as long as the two connected parts can conduct electricity.

[0112] In one achievable manner, the first connecting line 174 and the second connecting line 175 may be routed inside the annular space 161 .

[0113] In another possible implementation, the connecting shaft 120 is made of metal material, and the connecting shaft 120 is conductive, the connecting shaft 120 is an annular structure, and the middle part of the connecting shaft 120 has a through channel, the through channel passes through the connecting shaft 120 along the extension direction of the central axis of the connecting shaft 120, and the first connecting line 174 and the second connecting line 175 are routed inside the through channel. In this way, it is helpful to avoid the first connecting line 174 and the second connecting line 175 occupying the annular space 161, and it is helpful to avoid the first connecting line 174 and the second connecting line 175 from interfering with the components in the annular space 161.

[0114] Specifically, the connecting shaft 120 has a first shaft section and a second shaft section, one of the two conductive structures 190 is located between the first shaft section and the first barrel section, and the other is located between the second shaft section and the second barrel section. The outer surface of the first shaft section and the outer surface of the second shaft section are in conductive contact with the corresponding conductive structures. One end of the first connecting wire 174 is connected to the first electrode 170, and the other end is connected to the inner surface of the first shaft section, and one end of the second connecting wire 175 is connected to the second electrode 171, and the other end is connected to the inner surface of the second shaft section. Among them, the connection method of the first connecting wire 174 and the first shaft section, and the connection method of the second connecting wire 175 and the second shaft section are not limited to welding, and can also be connected by screw connection, as long as it is ensured that the two connected can conduct electricity.

[0115] In this embodiment, the positive pole of the power supply 200, the first power line 172, the first barrel section, the conductive structure 190, the first axis section, the first connecting line 174 and the first electrode 170 are connected in sequence to form a loop for providing a positive voltage to the first electrode 170; the negative pole of the power supply 200, the second power line 173, the second barrel section, the conductive structure 190, the second axis section, the second connecting line 175 and the second electrode 171 are connected in sequence to form a loop for providing a negative voltage to the second electrode 171.

[0116] In addition, the supporting device further includes an insulating member 180, which is located between the two conductive structures 190 to insulate and isolate the two conductive structures 190. In this way, while the positive voltage and the negative voltage are introduced to the first electrode 170 and the second electrode 171 respectively, the two conductive structures 190 spaced apart in the vertical direction are prevented from electrically contacting each other and causing a short circuit.

[0117] Fig.10 This is a structural diagram of another semiconductor process equipment provided in the embodiment of the present application. Please refer to Figure 8 and Fig.10As disclosed herein, the insulating member 180 may include an insulating assembly, the insulating assembly including a first insulating ring 181 and a second insulating ring 182 surrounding the first insulating ring 181, the first insulating ring 181 is sleeved on the outer circumference of the connecting shaft 120, and the second insulating ring 182 is sleeved on the outer circumference of the sleeve 160. The first insulating ring 181 is located between the connecting shaft 120 and the second insulating ring 182, and the outer diameter of the first insulating ring 181 is smaller than the inner diameter of the sleeve 160, and there is a gap between the first insulating ring 181 and the inner surface of the sleeve 160. In this way, it is helpful to avoid friction between the first insulating ring 181 and the sleeve 160 when the connecting shaft 120 rotates.

[0118] exist Figure 8 and Fig.10 In the example shown, three groups of isolation components are provided, and the three groups of isolation components are arranged at intervals along the extension direction of the central axis of the connecting shaft 120. From the top to the bottom of the connecting shaft 120, a group of isolation components close to the cavity 101 and a group of isolation components located in the middle are respectively located above and below the first barrel section, and a group of isolation components away from the cavity 101 and a group of isolation components located in the middle are respectively located below and above the second barrel section. In this way, the group of isolation components located in the middle can insulate and isolate the first barrel section from the second barrel section, thereby preventing the two conductive structures 190 from being electrically connected and short-circuited. At the same time, the group of isolation components close to the cavity 101 can also insulate and isolate the first barrel section from other parts of the sleeve 160, and the group of isolation components away from the cavity 101 can also insulate and isolate the second barrel section from other parts of the sleeve 160.

[0119] Of course, the number of the isolation components may be, for example, one group, two groups, or more than four groups, as long as at least one group of isolation components is disposed between the two conductive structures 190 .

[0120] It is understandable that the specific implementation of the conductive structure 190 includes but is not limited to the following possibilities:

[0121] In the first possible scenario, if Figure 8 As shown, the conductive structure 190 includes a magnetic fluid 191 and a magnet 192, wherein the magnet 192 is fixedly disposed between the corresponding barrel section and the shaft section, and the magnetic fluid 191 is confined between the corresponding barrel section and the shaft section under the magnetic force of the magnet 192. The magnetic fluid 191 has both magnetic and conductive properties. Under the influence of the magnetic force of the magnet 192, the magnetic fluid 191 is confined in a portion of the annular space 161 and does not flow to other areas. In this embodiment, the transmission path of the positive voltage is as follows: the first barrel section connected to the positive pole of the power supply 200 can transmit the positive voltage to the magnetic fluid 191, and the magnetic fluid 191 then transmits the positive voltage to the first shaft section, and then transmits it to the first electrode 170 through the first connecting line 174.

[0122] The magnet 192 may be, for example, a ferromagnetic sheet, one end of which may be fixedly connected to the outer surface of the connecting shaft 120 by welding or the like, and the other end of which may contact the inner surface of the sleeve 160, so that the ferromagnetic sheet is fixedly installed in the annular space 161 while ensuring that the connecting shaft 120 can also rotate relative to the sleeve 160. Of course, in other embodiments, the magnet 192 may also be a permanent magnet, which is adsorbed and fixed to the inner surface of the sleeve 160.

[0123] and Figure 1 Compared with the example of the related art shown in which the power supply 200A and the electrode are connected by the metal bearing 123A, the present embodiment is configured as follows: first, when the process chamber 100 is working, compared with the friction between the inner and outer rings of the metal bearing 123A, the magnetic fluid 191 has certain flow properties, and the friction between the magnetic fluid 191 and the connecting shaft 120 is greatly reduced, which is beneficial to reduce wear. The conductive structure 190 composed of the magnetic fluid 191 and the magnet 192 can conduct electricity stably; second, compared with the metal bearing 123A, the magnetic fluid 191 has a smaller resistance and better conductivity.

[0124] In the embodiment where the conductive structure 190 includes a magnetic fluid 191 and a magnet 192, the vacuum bearing 123 mounted on the bottom end of the connecting shaft 120 can be specifically arranged below the conductive structure 190. Thus, the magnetic fluid 191 can seal the portion of the annular space 161 surrounded by the corresponding barrel section and the shaft section, so that particles generated by the wear of the vacuum bearing 123 cannot pass through the annular area where the magnetic fluid 191 is located and enter the cavity 101, thereby facilitating the prevention of particles generated by the wear of the vacuum bearing 123 from contaminating the cavity 101.

[0125] In the second possible scenario, if Fig.10 As shown, the conductive structure 190 includes a metal ring 193 , a conductive ring 194 , and a spring 195 surrounding the outer circumference of the connecting shaft 120 . The metal ring 193 and the conductive ring 194 are both conical.

[0126] The upper end of the metal ring 193 is the large diameter end, and the lower end is the small diameter end, and the large diameter end of the metal ring 193 abuts against the inner surface of the corresponding barrel section. Specifically, the large diameter end of the metal ring 193 and the inner surface of the sleeve 160 can be welded and connected, so that the metal ring 193 can be stably arranged in the corresponding annular area and the metal ring 193 and the sleeve 160 can be electrically conductive.

[0127] The upper end of the conductive ring 194 is a small-diameter end, and the lower end is a large-diameter end. The small-diameter end of the conductive ring 194 abuts against the outer surface of the corresponding shaft segment. Specifically, the small-diameter end of the conductive ring 194 and the shaft wall of the connecting shaft 120 can also be welded and connected. Of course, in other alternative examples, the small-diameter end of the conductive ring 194 can also be interference-fitted with the connecting shaft 120.

[0128] The top of the spring 195 is fixed in the partial annular space 161, and the bottom is against the large diameter end of the conductive ring 194, so that the large diameter end of the conductive ring 194 is against the small diameter end of the metal ring 193, and the spring 195 is in a compressed state. Fig.10 In the example shown, when there are three groups of isolation components, and the three groups of isolation components are respectively located above the first barrel section, between the first barrel section and the second barrel section, and below the second barrel section, in this embodiment, the top end of the spring 195 of a conductive structure 190 located at the top can be fixedly connected to the bottom surface of the first insulating ring 181 above the first barrel section, and the small diameter end of the metal ring 193 of a conductive structure 190 located at the top can be overlapped on the first insulating ring 181 located in the middle. The top end of the spring 195 of a conductive structure 190 located at the bottom can be fixedly connected to the bottom surface of the first insulating ring 181 located in the middle, and the small diameter end of the metal ring 193 of a conductive structure 190 located at the bottom can be overlapped on the first insulating ring 181 below the second barrel section. In this way, the first insulating ring 181 can also provide a stable support for the metal ring 193 and provide a stable installation for the spring 195.

[0129] In this embodiment, the transmission path of the positive voltage is as follows: the positive voltage of the power supply 200 flows to the first barrel section via the first power line 172, and then is guided to the conductive ring 194 by the metal ring 193 in contact with the first barrel section, and then flows to the first shaft section in contact with the conductive ring 194, and then is transmitted to the first electrode 170 via the first connecting line 174.

[0130] When the process chamber 100 is working, the connecting shaft 120 rotates driven by the driving force, and the conductive ring 194 rotates around the central axis relative to the metal ring 193 along with the connecting shaft 120. During the rotation, the large diameter end of the conductive ring 194 contacts and rubs with the small diameter end of the metal ring 193 to maintain electrical conductivity, so that a DC voltage can still be provided to the first electrode 170 and the second electrode 171 when the supporting component rotates.

[0131] When the conductive structure 190 of this embodiment is used for conduction, since the spring 195 is in a compressed state, the spring 195 squeezes the large diameter end of the conductive ring 194. Under the elastic force of the spring 195, the large diameter end of the conductive ring 194 can be tightly abutted against the large diameter end of the metal ring 193, which is beneficial to improve the reliability of the electrical connection between the conductive ring 194 and the metal ring 193.

[0132] An embodiment of the present application further provides a semiconductor process equipment, which includes the process chamber 100 described in any of the above embodiments, which will not be described in detail here.

[0133] It is to be understood that the above embodiments are merely exemplary embodiments used to illustrate the principles of the present invention, but the present invention is not limited thereto. For those of ordinary skill in the art, various modifications and improvements can be made without departing from the spirit and essence of the present invention, and these modifications and improvements are also considered to be within the scope of protection of the present invention.

Claims

1. A carrying device, characterized in that: include: Load bearing components; A connecting shaft extending in a vertical direction, a top end of which is fixedly connected to the bearing assembly; A light source, for emitting light; At least one photodynamic graphene is fixedly arranged on the outer surface of the connecting shaft, at least one of the photodynamic graphene is illuminated by the light and can obtain a driving force under the illumination of the light, the driving force can drive the connecting shaft to rotate a target angle, the target angle is positively correlated with the driving force, and the photodynamic graphene is illuminated by the light at a position where the connecting shaft rotates to the target angle.

2. The carrying device according to claim 1, characterized in that: The light emitted by the light source is projected onto the photodynamic graphene along the tangent direction of the connection axis, and the driving force is a tangential force.

3. The carrying device according to claim 1, characterized in that: The photodynamic graphene is provided with one, and the light sources are provided with multiple ones; along the tangent direction of the outer circumference of the connecting shaft, the multiple light sources are arranged on both sides of the photodynamic graphene, and the light emitted by the light sources located on both sides of the photodynamic graphene are projected onto the photodynamic graphene in opposite directions, so that the connecting shaft can switch between forward rotation and reverse rotation.

4. The carrying device according to claim 1, characterized in that: There are one or more light sources, and there are multiple photodynamic graphenes, and the multiple photodynamic graphenes are arranged at intervals along the circumference of the connecting axis; Furthermore, the light source and the photodynamic graphene are configured so that the connecting shaft can be switched between forward rotation and reverse rotation.

5. The carrying device according to claim 4, characterized in that: The emission path of the light emitted by at least one of the light sources can be switched so as to be projected onto any one of the two photodynamic graphenes; When the light is projected onto one of the two photodynamic graphenes, the driving force obtained by one of the photodynamic graphenes can drive the connecting axis to rotate in a clockwise direction; when the light is projected onto the other of the two photodynamic graphenes, the driving force obtained by the other photodynamic graphene can drive the connecting axis to rotate in a counterclockwise direction.

6. The carrying device according to claim 5, characterized in that: The light emitted by at least one of the light sources switches the emission path through the reflective component, the reflective component includes a first reflector, a second reflector and a third reflector located between the light source and the connecting shaft, and the light emitted by at least one of the light sources can be projected onto the third reflector; the third reflector is located between the first reflector and the second reflector, and the third reflector can rotate around a vertical axis between a first position and a second position; When the third reflector is in the first position, it can reflect the light to the first reflector, and the first reflector can reflect the light to one of the two photodynamic graphenes; The third reflector can reflect the light to the second reflector when in the second position, and the second reflector can reflect the light to the other one of the two photodynamic graphenes.

7. The carrying device according to any one of claims 3 to 6, characterized in that: Also includes a position detector, the position detector is used to detect the rotation speed and angular displacement of the connecting shaft; The connecting shaft is controlled to remain stationary at a designated position according to the rotation speed and the angular displacement.

8. The carrying device according to any one of claims 1 to 6, characterized in that: It also includes a sleeve, which is sleeved on the outer circumference of the connecting shaft, a vacuum bearing is nested between the connecting shaft and the sleeve, and the connecting shaft is connected to the sleeve through the vacuum bearing and can rotate relative to the sleeve; The inner surface of the sleeve and the outer surface of the connecting shaft jointly define an annular space. At least one transmission window is fixedly provided on the sleeve, and the transmission window corresponds to the photodynamic graphene. The light emitted by the light source is emitted into the annular space through the transmission window and projected onto the corresponding photodynamic graphene.

9. The carrying device according to claim 8, characterized in that: It also includes a sealing cover arranged in the annular space, the sealing cover is fixedly connected to the outer surface of the connecting shaft and together defines a closed cavity for accommodating the photodynamic graphene; each of the sealing covers corresponds to a cover that holds one photodynamic graphene; Each of the sealing covers is provided with a projection window, which is directly opposite to the corresponding transmission window, and the light passing through the transmission window can be projected onto the corresponding photodynamic graphene via the projection window.

10. The carrying device according to claim 8, characterized in that: It also includes an insulating member and two conductive structures located in the annular space, the two conductive structures are spaced apart in the vertical direction, and the insulating member is located between the two conductive structures to insulate and isolate the two conductive structures; The sleeve is made of metal material, and has a first barrel section and a second barrel section respectively surrounding two conductive structures, and the first barrel section and the second barrel section are in conductive contact with the corresponding surrounding conductive structures; The bearing assembly is provided with a first electrode and a second electrode with opposite polarities; the first electrode is connected to the conductive structure corresponding to the first barrel segment via a first connecting line, and the first barrel segment is used to connect to the positive pole of the power supply via a first power line; the second electrode is connected to the conductive structure corresponding to the second barrel segment via a second connecting line, and the second barrel segment is used to connect to the negative pole of the power supply via a second power line.

11. The carrying device according to claim 10, characterized in that: The conductive structure includes a magnetic fluid and a magnet. The magnet is fixedly arranged between the barrel section corresponding to the conductive structure and the connecting shaft. The magnetic fluid is constrained between the barrel section corresponding to the conductive structure and the connecting shaft under the action of the magnetic force of the magnet. The magnetic fluid is in conductive contact with the inner surface of the barrel section corresponding to the conductive structure.

12. The carrying device according to claim 10, characterized in that: The conductive structure includes a metal ring, a conductive ring and a spring surrounding the outer circumference of the connecting shaft, and the metal ring and the conductive ring are both in a cone shape; The upper end of the metal ring is a large-diameter end, and the lower end is a small-diameter end, and the large-diameter end of the metal ring abuts against the inner surface of the barrel section corresponding to the conductive structure; The upper end of the conductive ring is a small-diameter end, and the lower end is a large-diameter end, and the small-diameter end of the conductive ring abuts against the outer surface of the connecting shaft; The top end of the spring is fixed in part of the annular space, and the bottom end is abutted against the large diameter end of the conductive ring, so that the large diameter end of the conductive ring abuts against the small diameter end of the metal ring, and the spring is in a compressed state.

13. The carrying device according to any one of claims 10 to 12, characterized in that: The insulating part includes at least one group of isolation components, and the isolation components include a first insulation ring and a second insulation ring surrounding the first insulation ring. The first insulation ring is sleeved on the outer periphery of the connecting shaft, and the second insulation ring is sleeved on the outer periphery of the sleeve. At least one group of isolation components is located between the two conductive structures.

14. A process chamber, characterized in that: include: A cavity having an opening at the bottom; as well as The load-bearing device according to any one of claims 1 to 13, wherein the load-bearing assembly of the load-bearing device is located in the cavity, and the bottom end of the connecting shaft of the load-bearing device extends through the opening to the outside of the cavity.

15. A semiconductor process equipment, characterized in that: include: The process chamber of claim 14.

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