Data management device, data management system, data management method, and program

Abstract

A data management device (10) is provided with: a control data transmission unit (12) that transmits control data for controlling a plurality of processing devices (20) to each of the processing devices (20) by time division multiplexing communication; a data collection unit (13) that collects operation data of each processing device (20) and state data of an object to be processed by each processing device (20); a period division unit (14) that divides each period of time division multiplexing communication into a first period in which the control data is transmitted and a second period in which the operation data and the state data are collected, and that divides each period of time division multiplexing communication into a first period in which the control data is transmitted and a second period in which the operation data and the state data are collected; and a data management unit (15) for managing each processing device (20) by associating each cycle with a group of operation data and state data collected in each cycle.

Description

Technical Field

[0001] The present invention relates to a data management device, a data management system, a data management method and a program. Background Art

[0002] In recent years, the importance of using data collected from multiple processing devices has gradually increased from the perspective of quality management at the production site. Therefore, it is sought to manage the data collected from multiple processing devices. In particular, it is sought to manage the data collected from multiple processing devices in a form that is convenient for users.

[0003] As a technology related to the above situation, Patent Document 1 discloses a technology in which a master device communicates with a slave device in units of fixed periods, and a data collection and management device collects and manages data exchanged during the communication. The data collection and management device described in Patent Document 1 manages the collected data using site numbers assigned to the master device and the slave device and cycle numbers indicating the cycles in which communication was performed.

[0004] The data collection management device described in Patent Document 1 manages the collected data as described above to determine whether data collection has failed, but the data managed in this way can also provide certain convenience to the user. For example, the user can confirm what kind of data was obtained by which device in which cycle.

[0005] Patent Document 1: International Publication No. 2021 / 130912 Summary of the invention

[0006] However, the data management implemented by the data collection management device described in Patent Document 1 is only used to determine whether data collection has failed, so the data managed in the above manner has the problem of lacking readability for users. Figure 8 When data is displayed to the user in such a table, it is difficult for the user to confirm the data in units of site numbers.

[0007] The present invention has been made in view of the above-mentioned circumstances, and an object of the present invention is to provide a data management device and the like which can manage data collected from a plurality of processing devices with good readability.

[0008] In order to achieve the above-mentioned object, the data management device according to the present invention has:

[0009] a control data transmission unit that transmits control data for controlling a plurality of processing devices to each of the plurality of processing devices through time division multiplexing communication;

[0010] a data collection unit that collects operation data of each processing device and status data of an object processed by each processing device;

[0011] a time period dividing unit that divides each cycle of the time division multiplexing communication into a first time period and a second time period, wherein the control data transmission unit transmits the control data in the first time period, and the data collection unit collects the operation data and the status data in the second time period; and

[0012] The data management unit manages each of the cycles in association with a set of the operation data and the status data collected in each of the cycles for each of the processing devices.

[0013] Effects of the Invention

[0014] According to the present invention, data collected from a plurality of processing devices can be managed with good readability. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a diagram showing the overall configuration of a data management system according to an embodiment of the present invention.

[0016] Figure 2 The diagram shows an example of a semiconductor manufacturing process to which a data management system according to an embodiment of the present invention is applied.

[0017] Figure 3 It is a diagram for explaining time division multiplexing communication in a data management system according to an embodiment of the present invention.

[0018] Figure 4 This is a diagram showing an example of a management screen displayed on a terminal according to an embodiment of the present invention.

[0019] Figure 5 It is a diagram showing the structure of a processing device according to an embodiment of the present invention.

[0020] Figure 6 This is a diagram showing an example of a frame transmitted by the processing device according to the embodiment of the present invention.

[0021] Figure 7 This is a diagram showing an example of a frame transmitted by the processing device according to the embodiment of the present invention.

[0022] Figure 8 It is a diagram showing the functional structure of a data management device according to an embodiment of the present invention.

[0023] Fig. 9This is a diagram showing an example of a communication band of time division multiplexing communication implemented by the data management device according to the embodiment of the present invention.

[0024] Fig.10 This is a diagram showing an example of a database managed by the data management device according to the embodiment of the present invention.

[0025] Fig.11 This is a diagram showing an example of system configuration information managed by the data management device according to the embodiment of the present invention.

[0026] Fig.12 It is a diagram showing an example of the hardware configuration of the data management device according to the embodiment of the present invention.

[0027] Fig.13 It is a diagram showing an example of the hardware configuration of the output unit and the input unit according to the embodiment of the present invention.

[0028] Fig.14 This is a flowchart showing an example of the operation of data management implemented by the data management device according to the embodiment of the present invention.

[0029] Fig.15 This is a flowchart showing an example of the operation of updating a database implemented by the data management device according to the embodiment of the present invention.

[0030] Fig.16 This is a flowchart showing an example of the operation of updating a database implemented by the data management device according to the embodiment of the present invention. DETAILED DESCRIPTION

[0031] Hereinafter, a data management system according to an embodiment of the present invention will be described with reference to the accompanying drawings. In each of the drawings, the same or equivalent parts are denoted by the same reference numerals.

[0032] (Implementation Method)

[0033] One side reference Figure 1, while explaining the data management system 1 involved in the implementation method. The data management system 1 is a data management system set up at the production site of the factory, and the data management device 10 collects and manages the operation data and status data output by each processing device 20. The terminal 40 installed with the program of the engineering design tool is connected to the data management device 10. The user manages the data management device 10 by operating the terminal 40, for example, controlling the processing device 20, controlling the sensors installed in the processing device 20, and adjusting the parameters of the data collected from the processing device 20. The operation data and status data will be described later. The factory is, for example, a semiconductor manufacturing factory, and each processing device 20 is, for example, a semiconductor processing device set for each manufacturing process of the semiconductor. The data management system 1 is an example of the data management system involved in the present invention.

[0034] The data management system 1 is used, for example, in Figure 2 The semiconductor manufacturing process shown in FIG. Figure 2 In the semiconductor manufacturing process shown, the processing device 20 is a device for cleaning semiconductors. The processing device 20 is set in units of processing tanks, and the processing device 20 drives the ball screw 30 to move the wafer to be processed to a specified processing layer. In addition, the movement to the specified processing layer refers to the movement to the processing layer in the processing device 20 itself and the movement to the processing layer in other processing devices 20. The data management device 10 collects the operation data and status data of the processing device 20 in each processing tank.

[0035] Refer again Figure 1 . The data management device 10 is connected to each processing device 20 so as to be communicable. The data management device 10 sends control data for controlling each processing device 20 to each processing device 20. The data management device 10 collects operation data related to the operation of each processing device 20 and status data related to the status of an object processed by each processing device 20 from each processing device 20. Operation data is, for example, data related to a sensor value detected by a sensor provided in the processing device 20 when the processing device 20 operates based on the control data. An object processed by the processing device 20 is, for example, a chemical substance used in semiconductor manufacturing. Status data is, for example, data related to the chemical status of an object processed by the processing device 20. Data related to the chemical status is, for example, the temperature, viscosity, pH (hydrogen ion concentration index), etc. of the object. The data management device 10 manages the collected operation data and status data. How to perform management will be described later. The functional structure of the data management device 10 will be described later. The data management device 10 is an example of a data management device according to the present invention.

[0036] The data management device 10 includes, for example, a CPU (Central Processing Unit) unit of a programmable logic controller (PLC) and a main control unit that performs master-slave communication with the processing device 20. The data management device 10 communicates with each processing device 20 through time division multiplexing communication implemented by TSN (Time-Sensitive Networking). Figure 3 As shown, the data management device 10 communicates with each processing device 20 in units of a predetermined period by time division multiplexing communication. Figure 3 As shown in FIG. 1 , the data management device 10 further divides one cycle into a first time period and a second time period. Figure 3 As shown, the data management device 10 sends control data to each processing device 20 in the first time period, and collects operation data and status data from each processing device 20 in the second time period. It is preferred that the data management device 10 sends control data in the first time period by real-time communication, and collects operation data and status data in the second time period by non-real-time communication. The reason is that the control of the processing device 20 is required to be performed within a certain time, while the collection of operation data and status data does not necessarily have to be performed at a certain time.

[0037] In addition, Figure 3 In the example, one operation data and one status data are collected in one second time period, but the number of operation data and the number of status data collected may be multiple. For example, one operation data and two status data may be collected in one second time period.

[0038] Refer again Figure 1 The data management device 10 is also connected to the terminal 40 for communication. The terminal 40 is a terminal for managing the data management device 10. The terminal 40 is, for example, a factory PC (Personal Computer) on which an engineering design tool program is installed. The user can, for example, Figure 4 The screen shown in FIG. 1 is used to set the configuration of the data management system 1. For example, the user can Figure 4 The screen shown in the figure is used to select the device of the data management system 1, set the network configuration, etc. In addition, for example, the user can Figure 4 In the screen shown, names such as "Processing Slots 1 to 3" that can be recognized by the user are set for the devices of the data management system 1. As described later, the data management device 10 manages the database using these names.

[0039] One side reference Figure 5 , while explaining the structure of the processing device 20. The processing device 20 includes an output unit 21, a server 22, a sensor 23, and an input unit 24.

[0040] The output unit 21 receives control data from the data management device 10, and controls the server 22 based on the control data. The output unit 21 includes, for example, a servo amplifier. The server 22 operates based on the control from the output unit 21. The server 22 is, for example, a servo motor. In addition, through the server 22, for example, a chemical substance as an object is injected, stirred, cleaned, etc. As described above, when the data management device 10 includes a master control unit, the output unit 21 is a slave unit corresponding to the master control unit. The output unit 21 is an example of a control data receiving unit according to the present invention.

[0041] The sensor 23 senses the operating server 22 and outputs the sensor value to the input unit 24. In addition, the sensor 23 senses the object processed by the server 22 and outputs the sensor value to the input unit 24. The sensor value related to the server 22 is the operation data, and the sensor value related to the object is the state data.

[0042] The input unit 24 transmits the sensor value related to the server 22 among the sensor values ​​output by the sensor 23 as operation data to the data management device 10, and transmits the sensor value related to the object among the sensor values ​​output by the sensor 23 as status data to the data management device 10. As described above, when the data management device 10 includes a master control unit, the input unit 24 is a slave unit corresponding to the master control unit. The input unit 24 is an example of an operation data transmitting unit according to the present invention.

[0043] The input unit 24 may be Figure 6 As shown in the figure, the operation data and status data are sent in one frame, or as shown in the figure Figure 7 As shown in Figure 1, the operation data and status data are sent in different frames. Figure 6 In the case shown, the input unit 24 can also be said to send the operation data after adding the state data to the operation data. Figure 7 In the case shown, there is a concern that all frames may not be sent in one cycle, but as described above, the transmission of the operating data and status data is performed by non-real-time communication in the second time period, so the frames that cannot be sent can be sent in the next cycle.

[0044] Refer again Figure 5The data management device 10 has a control unit 100 and an analysis unit 103. In addition, the control unit 100 has a main control unit 101 and a CPU unit 102. The main control unit 101 controls the communication with the output unit 21 and the input unit 24 of the processing device 20. The CPU unit 102 controls the server 22 and the sensor 23 of the processing device 20 via the communication realized by the main control unit 101, the output unit 21 and the input unit 24. The main control unit 101 collects the operation data and the status data and stores them in the memory (not shown) of the CPU unit 102. The analysis unit 103 analyzes the operation data and the status data stored in the memory of the CPU unit 102. In addition, the analysis unit 103 can also store the operation data and the status data obtained from the CPU unit 102 and analyze the stored data.

[0045] One side reference Figure 8 , while explaining the functional structure of the data management device 10. The data management device 10 includes a communication unit 11, a control data transmission unit 12, a data collection unit 13, a time segmentation unit 14, a data management unit 15, a structure management unit 16, a name management unit 17, and a storage unit 18.

[0046] The communication unit 11 communicates with the processing device 20 and the terminal 40. The communication unit 11 is implemented by the main control unit 101. In this case, the functional units other than the communication unit 11, namely, the control data transmission unit 12, the data collection unit 13, the time period division unit 14, the data management unit 15, the structure management unit 16, the name management unit 17 and the storage unit 18 are implemented by the CPU unit 102.

[0047] The configuration management unit 16 acquires system configuration information related to the configuration of the data management system 1 set by the user via the terminal 40 and stores the information in the storage unit 18. A specific example of the system configuration information will be described later.

[0048] The name management unit 17 manages the name of each device in the data management system 1 based on the system configuration information stored in the storage unit 18. The name is used when constructing a database described later.

[0049] The control data transmission unit 12 generates control data for controlling each processing device 20, and transmits the control data to each processing device 20 via the communication unit 11. As described above, since the control data is transmitted in the first time period, the control data transmission unit 12 transmits the control data in the first time period. The control data transmission unit 12 is an example of a control data transmission unit according to the present invention.

[0050] The data collection unit 13 collects the operation data and the status data from each processing device 20 via the communication unit 11. As described above, since the operation data and the status data are collected in the second time period, the data collection unit 13 collects the operation data and the status data in the second time period. In addition, the data collection unit 13 determines the processing device 20 that is the collection source for each collected data. The data collection unit 13 determines the processing device 20 that is the collection source based on the content of the frame header included in the frame obtained during communication. The data collection unit 13 is an example of a data collection unit according to the present invention.

[0051] As described above, the time segmentation unit 14 divides one cycle in the time division multiplexing communication into a first time segment and a second time segment. The control data transmission unit 12 transmits control data in the first time segment divided by the time segmentation unit 14. The data collection unit 13 collects operation data and status data in the second time segment divided by the time segmentation unit 14. The time segmentation unit 14 is an example of the time segmentation unit according to the present invention.

[0052] By time division multiplexing communication, e.g. Fig. 9 As shown, the minimum guaranteed communication band can be used as a control communication band for sending and receiving real-time data, i.e., control data, in the first time period, and the communication band in the second time period can be used as an information communication band for sending and receiving non-real-time data, i.e., operation data and status data.

[0053] Refer again Figure 8 The data management unit 15 manages the operation data and status data collected by the data collection unit 13 by associating each cycle with the group of operation data and status data collected in each cycle for each name of the processing device 20. More specifically, for example, Fig.10 As shown, the data management unit 15 manages the groups of operation data and status data collected from a certain processing device 20 in a certain cycle by setting the name of each processing device 20 as a column and each cycle as a row in a database. In other words, the data management unit 15 manages the groups of operation data and status data by having a database with a first axis corresponding to the processing device 20 and a second axis corresponding to the cycle. The database includes cells that store the groups of operation data and status data collected in each cycle. The first axis corresponding to the processing device 20 corresponds to the column in the database. Here, Fig.10 The names of the processing devices 20 such as "processing tank 1" and "processing tank 2" shown are managed by the name management unit 17. The data management unit 15 stores the above database in the storage unit 18. The data management unit 15 is an example of data management means according to the present invention.

[0054] In addition, Fig.10In the example, one operation data and one status data are written in each cell. However, as described above, since multiple operation data or multiple status data can be collected in one second time period, more than or equal to two operation data or status data can also be written into a cell.

[0055] Since the database can be updated each time the operation data and the status data are collected, the data management unit 15 can manage the latest data without requiring special settings, operations, etc. As described above, the storage unit 18 stores the database managed by the data management unit 15. The flow of updating the operation data and the status data in the database for each name of the processing device 20 each time the data management unit 15 collects the operation data and the status data will be described later.

[0056] One side reference Fig.11 , while explaining a specific example of the above-mentioned system configuration information. The system configuration information includes information related to each device of the data management system 1, that is, information related to the data management device 10 and the processing device 20. The system configuration information includes information related to the name, device ID (Identifier) ​​and network address of each device. In addition, the system configuration information includes information related to the network structure of the data management system 1. In addition, the order of each processing device 20 is as follows Fig.11 The numbers 1 to 5 shown are defined in the order of proximity to the data management device 10 serving as the host on the network. This order is also assumed to be the order in which the operation data and status data are received earlier by the data management device 10. The data management unit 15 determines the arrangement of each column of the database according to this order.

[0057] One side reference Fig.12 , an example of the hardware structure of the data management device 10 is described. Fig.12 The data management device 10 shown is realized by, for example, the CPU unit 102, the main control unit 101, and the analysis unit 103 as described above. Alternatively, the data management device 10 may be realized by a general computer such as a personal computer or a microcontroller.

[0058] The data management device 10 has a processor 1001 , a memory 1002 , an interface 1003 , and a secondary storage device 1004 which are connected to one another via a bus 1000 .

[0059] The processor 1001 is, for example, a CPU included in the CPU unit 102. The processor 1001 reads the action program stored in the secondary storage device 1004 into the memory 1002 and executes it, thereby realizing various functions of the data management device 10. The memory 1002 is, for example, a main storage device composed of a RAM (Random Access Memory) included in the CPU unit 102. The memory 1002 stores the action program read by the processor 1001 from the secondary storage device 1004. In addition, the memory 1002 functions as a working memory when the processor 1001 executes the action program. The interface 1003 is, for example, an I / O (Input / Output) interface such as a serial port, a USB (Universal Serial Bus) port, a network interface, etc. included in the main control unit 101. The function of the communication unit 11 is realized through the interface 1003. The secondary storage device 1004 is, for example, a flash memory, an HDD (Hard Disk Drive), or an SSD (Solid State Drive) included in the CPU unit 102. The secondary storage device 1004 stores the operation program executed by the processor 1001. The function of the storage unit 18 is realized by the secondary storage device 1004.

[0060] Next, refer to Fig.13 , while explaining an example of the hardware structure of the output unit 21 and the input unit 24 (hereinafter referred to as the output unit 21, etc.). The output unit 21, etc. has a transceiver interface 200, a timer 201, a transceiver management unit 202 and an input-output interface 203. The transceiver interface 200 communicates with the data management device 10 and other processing devices 20 via a network. The timer 201 performs the timing required for the time-division multiplexing communication realized by the above-mentioned TSN. The transceiver management unit 202 performs time-division multiplexing communication synchronously with other devices based on the timing performed by the timer 201. The input-output interface 203 communicates with the device 210. In more detail, when the output unit 21, etc. is the output unit 21, the device 210 is the server 22, and the input-output interface 203 sends the control data received by the transceiver management unit 202 to the device 210. When the output unit 21 or the like is the input unit 24 , the device 210 is the sensor 23 , and the input / output interface 203 outputs the data sent by the sensor 23 to the transmission / reception management unit 202 .

[0061] One side reference Fig.14 , while explaining an example of the data management operation performed by the data management device 10.

[0062] The data management device 10 waits until the start of the next cycle in the time division multiplexing communication (step S101). If the next cycle starts, the time period division unit 14 of the data management device 10 divides the current cycle into a first time period and a second time period (step S102). The control data sending unit 12 of the data management device 10 sends the control data to each processing device 20 in the first time period (step S103). Through the sending of the control data, each processing device 20 operates based on the control data. The data collection unit 13 of the data management device 10 waits until the start of the second time period (step S104). If the second time period starts, the data collection unit 13 collects the operation data and status data from each processing device 20 in the second time period (step S105). The data management unit 15 of the data management device 10 collects the operation data and status data from each processing device 20 in the second time period (step S105). Fig.10 The database with cycles as rows and processing devices 20 as columns as shown manages the sets of operation data and status data collected in step S105 (step S106). Then, the data management device 10 repeats the operation from step S101.

[0063] Here, the process of updating the operation data and status data in the database for each name of the processing device 20 each time the data management unit 15 collects the operation data and status data is described. Figure 6 The method shown and Figure 7 The embodiments shown in the drawings are described below, and therefore the description will be given corresponding to each embodiment.

[0064] exist Figure 6 In the method of collecting the operation data and the status data shown, the operation data and the status data are managed by the same frame header, and the data management unit 15 collects the operation data and the status data together from all the processing devices 20 managed in the same network in the same cycle. Fig.15 The data collection method in this case will be described. In addition, here, the above-mentioned same network refers to a network within a range set so that data can be transmitted and received in the same cycle.

[0065] exist Fig.15In the process, if the data management unit 15 obtains the operation data and the status data (step S201), the predetermined destination for writing the operation data and the status data to the database is set according to the system structure information and the number of times the data is written to the database (step S202). That is, the data management unit 15 estimates which processing device 20's data (referred to as operation data and status data. The same applies below) will arrive in what order through the system structure information, and prepares to write the data obtained in the expected order into the column of the database. In principle, the data management unit 15 obtains data in sequence from the processing device 20 that is physically close to the data management device 10. Thus, the data management unit 15 understands which column of the database the data has been written to according to the number of times the data has been written to the database. In other words, the data management unit 15 understands which name of the processing device 20 among the processing devices 20 registered in the database the data has been written to.

[0066] Next, the data management unit 15 checks the device ID included in the header of the acquired data and determines whether the checked device ID matches the column of the database where the acquired data is scheduled to be written, that is, the device ID of the name corresponding to the column (step S203).

[0067] When the device ID corresponding to the acquired data is consistent with the device ID scheduled to be written (step S203: Yes), the data management unit 15 writes the operating data in the acquired data in the front section of the column scheduled to be written (step S204), then writes the status data in the acquired data in the back section of the column scheduled to be written (step S205), and confirms the number of writes to the database again (step S202).

[0068] Here, regarding the cells of the column, the number of cells corresponding to the acquired data category is prepared in advance. In the present embodiment, since two types of data, namely, operation data and status data, are written, two cells, namely, the front-end operation data cell and the rear-end status data cell, are prepared for the amount of one cycle. Thus, the data management unit 15 divides the acquired data into the front-end cell and the rear-end cell and writes them, so that the operation data can be written into the operation data cell and the status data can be written into the status data cell in a classified manner. In addition, in the case where it is decided in advance that multiple data are written into one cell, the number of cells corresponding to the pre-set information is prepared.

[0069] On the other hand, when the device ID corresponding to the acquired data is inconsistent with the device ID to be written (step S203: No), the data management unit 15 searches for a column marked with the same device ID as the device ID corresponding to the acquired data, and after the search, writes the operating data in the acquired data to the front part of the retrieved column (step S206), then writes the status data in the acquired data to the back part of the retrieved column (step S207), and confirms the number of writes to the database again (step S202).

[0070] Through the above-mentioned operation, the data management unit 15 in the data management device 10 can create a database that appropriately manages the operation data and the status data by creating the system configuration information through the terminal 40 on which the program of the engineering design tool is installed. That is, the data management unit 15 can create a column of the database indicating the name of the device that is the collection source of the operation data and the status data by creating the system configuration information, and can easily create a desired database by sequentially writing the acquired data into the column.

[0071] In addition, Figure 7 In the method of collecting the operation data and the status data shown, the operation data and the status data are managed by different frame headers, and the data management unit 15 collects the operation data and the status data together from all the processing devices 20 managed in the same network in the same cycle. Fig.16 The data collection method in this case will be described. In addition, here, the above-mentioned same network refers to a network within a range set so that data can be transmitted and received in the same cycle.

[0072] exist Fig.16 In the process, if the data management unit 15 obtains the operation data and the status data (step S301), the predetermined destination for writing the operation data and the status data to the database is set according to the system configuration information and the number of writes to the database (step S302). That is, the data management unit 15 estimates which processing device 20's data will arrive in what order through the system configuration information, and prepares to write the data obtained in the expected order into the column of the database. In principle, the data management unit 15 obtains data sequentially from the processing device 20 that is physically close to the data management unit 10. Thus, the data management unit 15 understands which column of the database the data has been written to according to the number of times the data has been written to the database. In other words, the data management unit 15 understands which name of the processing device 20 among the processing devices 20 registered in the database the data has been written to.

[0073] Next, it is determined whether the acquired data is operation data or status data (step S303). When the data management unit 15 determines that the acquired data is operation data (step S303: operation data), it checks the device ID included in the frame header of the acquired data and determines whether the confirmed device ID is consistent with the column of the database where the acquired data is scheduled to be written, that is, the device ID of the name corresponding to the column (step S304).

[0074] When the device ID corresponding to the acquired data is consistent with the device ID to be written (step S304: Yes), the data management unit 15 writes the operating data in the acquired data at the front of the column to be written (step S305). Next, the data management unit 15 confirms whether the status data is written in the same column (step S306). If the status data is not written, the data management unit 15 again determines whether the acquired data is the operating data or the status data (step S303). If the status data is written, the data management unit 15 again confirms the number of writes to the database (step S302).

[0075] Here, with the above Figure 6 In the same manner as shown, regarding the cells of the column, a number of cells corresponding to the acquired data category is prepared in advance. Since two types of data, namely, operation data and status data, are written, two cells, namely, a front-end operation data cell and a rear-end status data cell, are prepared for the amount of one cycle. Thus, the data management unit 15 divides the acquired data into the front-end cells and the rear-end cells for writing, and can classify the operation data into the operation data cells and the status data into the status data cells. In addition, in the case where it is determined in advance that multiple data are written to one cell, a number of cells corresponding to the pre-set information is prepared. In addition, cells for operation data and status data are prepared in groups, so that according to the write status of another type of data in the cells of the cell group, it is possible to confirm whether another type of data is written, and the writing of data will not be omitted, and data mismatch can be suppressed.

[0076] On the other hand, when the device ID corresponding to the acquired data is inconsistent with the device ID to be written (step S304: No), the data management unit 15 searches for a column marked with the same device ID as the device ID corresponding to the acquired data, and after the search, writes the operating data in the acquired data at the beginning of the searched column (step S307). Next, the data management unit 15 confirms whether the status data is written in the same column (step S306), and if the status data is not written, it again determines whether the acquired data is the operating data or the status data (step S303), and if the status data is written, it again confirms the number of writes to the database (step S302).

[0077] In addition, on the other hand, when the data management unit 15 determines that the acquired data is status data (step S303: status data), it confirms the device ID contained in the frame header of the acquired data, and determines whether the confirmed device ID is consistent with the device ID of the name corresponding to the column of the database where the acquired data is scheduled to be written (step S308).

[0078] When the device ID corresponding to the acquired data matches the device ID to be written (step S308: Yes), the data management unit 15 writes the status data in the acquired data at the end of the column to be written (step S309). Next, the data management unit 15 confirms whether the operation data is written in the same column (step S310). If the operation data is not written, the data management unit 15 again determines whether the acquired data is the operation data or the status data (step S303). If the status data is written, the data management unit 15 again confirms the number of writes to the database (step S302).

[0079] On the other hand, when the device ID corresponding to the acquired data is inconsistent with the device ID to be written (step S308: No), the data management unit 15 searches for a column marked with the same device ID as the device ID corresponding to the acquired data, and after the search, writes the status data in the acquired data in the latter part of the searched column (step S311). Next, the data management unit 15 confirms whether the operation data is written in the same column (step S310), and if the operation data is not written, it again determines whether the acquired data is the operation data or the status data (step S303), and if the operation data is written, it again confirms the number of writes to the database (step S302).

[0080] Through the above-mentioned operation, the data management unit 15 in the data management device 10 can create a database that appropriately manages the operation data and the status data by creating the system configuration information through the terminal 40 on which the program of the engineering design tool is installed. That is, the data management unit 15 can create a column of the database (the name of the device that is the data source of the operation data and the status data) by creating the system configuration information, and can easily create a desired database by sequentially writing the acquired data into the column.

[0081] The data management system 1 according to the embodiment has been described above. Fig.10 As shown, groups of operating data and status data can be managed with good readability. For example, when a user wants to confirm the operating data and status data of each processing device 20 for a specific cycle, the user can simply confirm the data in the row corresponding to the cycle. Similarly, for example, when a user wants to confirm the operating data and status data of each cycle of a specific processing device 20, the user can simply confirm the data in the column corresponding to the processing device 20. In addition, since the above-mentioned data management is performed each time the operating data and status data are collected, the latest data can be managed without special settings, operations, etc. Therefore, the user does not need special settings, operations, etc., and can manage the latest data with good readability.

[0082] (Variation Example)

[0083] In the embodiment, the data management device 10 collects the operation data from the processing device 20. Alternatively, the data management device 10 may generate the operation data based on the control data sent to the processing device 20. For example, if the operation of the server 22 of the processing device 20 can be fully predicted based on the control data, it can be expected that sufficiently accurate operation data can be obtained even if the operation data is generated based on the control data. In this case, it can be considered that the data collection unit 13 "collects" the operation data based on the control data instead of through communication.

[0084] exist Fig.12 In the hardware structure shown, the data management device 10 has a secondary storage device 1004. However, the present invention is not limited to this, and the secondary storage device 1004 may be provided outside the data management device 10, and connected to the data management device 10 and the secondary storage device 1004 via the interface 1003. In this method, a removable medium such as a USB flash drive or a memory card may also be used as the secondary storage device 1004.

[0085] Alternatively, you can also replace Fig.12The hardware structure shown in FIG. 1 is a data management device 10 composed of a dedicated circuit using an ASIC (Application Specific Integrated Circuit), an FPGA (Field Programmable Gate Array), etc. Fig.12 In the hardware configuration shown, part of the functions of the data management device 10 may be realized by a dedicated circuit connected to the interface 1003, for example.

[0086] The program used by the data management device 10 can be distributed by being stored in a computer-readable recording medium such as a CD-ROM (Compact Disc Read Only Memory), a DVD (Digital Versatile Disc), a USB flash drive, a memory card, or a HDD. Furthermore, by installing the program in a specific or general-purpose computer, the computer can function as the data management device 10.

[0087] Alternatively, the program may be stored in advance in a storage device of another server on the Internet, and downloaded from the server.

[0088] The present invention can be set to various embodiments and variations without departing from the broad spirit and scope of the present invention. In addition, the above-mentioned embodiments are used to illustrate the present invention and are not intended to limit the scope of the present invention. That is, the scope of the present invention is not represented by the embodiments, but by the claims. Moreover, various variations applied within the scope of the claims and within the scope of the disclosure equivalent thereto are deemed to fall within the scope of the present invention.

[0089] Description of the label

[0090] 1 data management system, 10 data management device, 11 communication unit, 12 control data sending unit, 13 data collection unit, 14 time period division unit, 15 data management unit, 16 structure management unit, 17 name management unit, 18 storage unit, 20 processing device, 21 output unit, 22 server, 23 sensor, 24 input unit, 30 ball screw, 40 terminal, 100 control unit, 101 main control unit, 102 CPU unit, 103 analysis unit, 200 transceiver interface, 201 timer, 202 transceiver management unit, 203 input and output interface, 210 device, 1000 bus, 1001 processor, 1002 memory, 1003 interface, 1004 secondary storage device.

Claims

1. A data management device, comprising: a control data transmission unit that transmits control data for controlling a plurality of processing devices to each of the plurality of processing devices through time division multiplexing communication; a data collection unit that collects operation data of each processing device and status data of an object processed by each processing device; a time period division unit that divides each cycle of the time division multiplexing communication into a first time period and a second time period, wherein the control data transmission unit transmits the control data in the first time period, and the data collection unit collects the operation data and the status data in the second time period; as well as The data management unit manages each of the cycles in association with a set of the operation data and the status data collected in each of the cycles for each of the processing devices.

2. The data management device according to claim 1, wherein: The first time period is a time period for real-time communication. The second time period is a time period used for non-real-time communication.

3. The data management device according to claim 1 or 2, wherein: The data management unit manages the set of the operation data and the status data using a database having a first axis corresponding to each of the machining devices and a second axis corresponding to each of the cycles.

4. The data management device according to claim 3, wherein: The database includes cells for storing the operation data and the status data collected in each cycle.

5. The data management device according to claim 4, wherein: The data management unit sets the name of the column corresponding to the first axis of the database based on system configuration information of the system including the plurality of machining devices, and stores the operation data and the status data in the cell corresponding to the name of the column.

6. A data management system, comprising: The data management device according to any one of claims 1 to 5; and The plurality of processing devices, Each of the processing devices comprises: a control data receiving unit that receives the control data from the data management device; and an operation data sending unit, which sends the operation data to the data management device, The operation data transmitting unit transmits the state data by adding the state data to the operation data.

7. A data management system comprising: The data management device according to any one of claims 1 to 5; and The plurality of processing devices, Each of the processing devices has: a control data receiving unit that receives the control data from the data management device; and an operation data sending unit, which sends the operation data to the data management device, The operation data transmitting unit transmits the operation data and the status data through separate frames.

8. A data management method, wherein: sending control data for controlling a plurality of processing devices to each of the plurality of processing devices through time division multiplexing communication, collecting the operation data of each processing device and the status data of the object processed by each processing device, Each cycle of the time division multiplexing communication is divided into a first time period and a second time period, the control data is transmitted in the first time period, and the operation data and the status data are collected in the second time period, For each of the processing devices, each of the cycles is managed in association with a set of the operation data and the status data collected in the cycle.

9. A program that causes a computer to function as: a control data transmission unit that transmits control data for controlling a plurality of processing devices to each of the plurality of processing devices through time division multiplexing communication; a data collection unit that collects operation data of each processing device and status data of an object processed by each processing device; a time period division unit that divides each cycle of the time division multiplexing communication into a first time period and a second time period, wherein the control data transmission unit transmits the control data in the first time period, and the data collection unit collects the operation data and the status data in the second time period; as well as The data management unit manages each of the cycles in association with a set of the operation data and the status data collected in each of the cycles for each of the processing devices.

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