MEMS probe cleaning process

Abstract

The invention discloses an MEMS probe cleaning process in the field of semiconductor probes. The MEMS probe cleaning process comprises the steps of thermal demolding, corrosion removal and glue removal, electrolytic polishing, electrolytic degreasing, ultrasonic cleaning and the like. The method can effectively solve the problem of physical and chemical property changes of the product caused by abnormal surface roughness of the product in the traditional cleaning technology. Under the condition that the original characteristics of any product are not damaged, the cleaning problem of the probe product is solved, and the yield and the performance stability of the product are greatly improved.

Description

Technical Field

[0001] The invention belongs to the field of semiconductor probes, and in particular relates to a MEMS probe cleaning process. Background Art

[0002] MEMS probes are mainly used for testing high-end processor chips, GPU chips and RF chips. In recent years, with the rapid development of new application terminal chips such as the Internet of Things, artificial intelligence, and new energy vehicles, the demand for MEMS probes has also grown rapidly.

[0003] However, as electronic devices become smaller, more powerful, and more precise, more probes are required, with finer spacing and smaller sizes. Therefore, the inside of the MEMS probe will become more precise. Even if it is contaminated by dirt, dust, bumps, etc., it will damage the internal circuit function, forming a short circuit or open circuit, and causing damage to the chip. This puts higher demands on the precision manufacturing process and capabilities of probe manufacturers, and wet cleaning is particularly important.

[0004] Wet cleaning is an important part of the precision manufacturing of MEMS probes. Since MEMS probe materials are usually made of alloys of at least two or more materials, and the corrosion resistance of different alloy materials varies, the problem with traditional wet cleaning is that it will cause changes in the surface roughness of the product and the difficulty of removing bad edges, which will cause changes in the physical and chemical properties of the product. Summary of the invention

[0005] The purpose of the present invention is to provide a MEMS probe cleaning process, which can solve the cleanliness problem of the probe without destroying any original characteristics of the probe product, and greatly improve the yield and performance stability of the probe.

[0006] The object of the present invention is achieved in this way: a MEMS probe cleaning process comprises the following steps: (1) First, heat the acetone solution with a mass concentration ratio of 3%-5% to 80℃-90℃, then immerse the probe product after it is removed from the machine in the acetone solution and heat it at a constant temperature for 3min-7min to separate the probe from the fixture and take out the probe; (2) Place the probe that has been separated from the fixture into a container, then add mixed solution 1 into the container, heat it to 40°C-60°C, soak the probe and perform ultrasonic treatment for 30min-50min; (3) After degumming, the probe is overflowed with pure water for 5-10 minutes to clean the chemical residue on the surface, and then the probe is placed in the mixed solution 2. The temperature of the mixed solution 2 is heated to 50℃-70℃. The probe is immersed in the mixed solution 2 and ultrasonically cleaned for 20-30 minutes to clean the dirt and particles on the probe surface; (4) Place the probe after cleaning in a potassium hydroxide solution, use the probe as an anode, and apply a cathode voltage for electrolytic degreasing. The degreasing time is 10-15 minutes to remove coke and oil stains on the edge of the probe. (5) Place the probe after electrolytic degreasing in a sodium hydroxide solution, use the probe as a cathode, apply an anode voltage for electrolytic polishing, and polish for 20-30 minutes to remove the metal slag on the edge of the probe and the metal protrusions on the surface; (6) Repeat step (3); (7) Then, overflow the probe with pure water for 5-10 minutes to clean the chemical residue on the surface, and then place it in an oven at 70℃-90℃ to dry for 10-15 minutes; (8) After the probe is dried, remove the probe from the oven and the cleaning operation is completed.

[0007] The invention adopts wet electrolytic cleaning technology, adopts acetone with a mass concentration ratio of 3%-5%, and is mainly used for demolding probe products; adopts isopropanol with a mass concentration ratio of 50%-70%, diethylene glycol with a mass concentration ratio of 5%-10%, and carboxylic acid with a mass concentration ratio of 4%-6%, and the three are mixed, and the main purpose is to remove residual glue on the surface of the product; adopts sodium hydroxide solvent with a mass concentration ratio of 20%-40%, and amide with a mass concentration ratio of 15%-30%, and the two are mixed, and the main purpose is to remove dirt, dust and the like on the surface of the product; adopts potassium hydroxide with a mass concentration ratio of 45%, and the product is used as an anode at the same time, and a cathode voltage of 3V-6V is applied to perform electrolytic degreasing, and the main purpose is to remove coke and oil stains on the edge of the product; adopts sodium hydroxide with a mass concentration ratio of 60%-80%, and the product is used as a cathode at the same time, and a voltage of 2V-4V is applied to act as an anode, and the main purpose is to remove metal slag at the edge of the product and metal protrusions on the surface.

[0008] Compared with the prior art, the beneficial effects of the present invention are: the present invention effectively solves the undesirable defects of traditional wet cleaning products such as large surface roughness, many bumps, uneven edges, etc., avoids changes in the physical and chemical properties of the products, and at the same time, the product yield is increased from less than 60% to nearly 100%.

[0009] As a further improvement of the present invention, the probe product includes a jig, the jig is fixed with a probe by a pyrolytic adhesive film, the probe includes a plurality of unit needle bodies distributed in a rectangular array, the middle of each unit needle body is connected by a plurality of connectors, the unit needle body is perpendicular to the jig, and the material of the probe is a copper alloy. The unit needle bodies are connected and fixed by the connector, the integral probe is bonded and fixed on the jig, and the probe can be separated and demolded from the jig by a heated acetone solution.

[0010] As a further improvement of the present invention, the mixed solution 1 in step (2) contains isopropanol with a mass concentration ratio of 50%-70%, diethylene glycol with a mass concentration ratio of 5%-10%, carboxylic acid with a mass concentration ratio of 4%-6%, and the remainder is water. The mixed solution 1 can remove the residual glue on the surface of the probe product.

[0011] As a further improvement of the present invention, the mixed solution 2 in step (3) contains sodium hydroxide with a mass concentration ratio of 20%-40%, amide with a mass concentration ratio of 15%-30%, and the remainder is water. The mixed solution 2 can remove dirt and dust on the surface of the probe product.

[0012] As a further improvement of the present invention, in step (4), the mass concentration of potassium hydroxide in the potassium hydroxide solution is 45%, and the cathode voltage is 3 V to 6 V. The probe is electrolytically degreased to remove coke and oil stains on the edge of the probe product.

[0013] As a further improvement of the present invention, in step (5), the mass concentration of sodium hydroxide in the sodium hydroxide solution is 60%-80%, and the anode voltage is 2V-4V. The probe is electropolished to remove metal slag at the edge of the product and metal protrusions on the surface.

[0014] As a further improvement of the present invention, in the steps (4) and (5), an electrolysis tool is used when electrolyzing the probe, the electrolysis tool comprises a rectangular trough body, the trough body is made of acrylic, two parallel horizontal hanging rods are fixed on the trough body, the hanging rods are arranged near the upper edge of the trough body, the hanging rods pass through the trough body and the left and right ends of the hanging rods are sleeved with locking nuts, each hanging rod is fixed with two left and right corresponding vertical columns, the lower ends of the columns are fixed to the bottom wall of the trough body, the columns and the hanging rods are both conductive metals, and the unit needle bodies of the probe distributed in a rectangular array are correspondingly placed on the four Between the columns, the lower end of each unit needle body is supported on the bottom wall of the tank body, and a rotatable clamp is provided at the lower end of each column. The clamps of the four columns respectively clamp the lower ends of the unit needle bodies located at the four corners. The height of the connecting piece is higher than the height of the clamp. The interior of the tank body is filled with potassium hydroxide solution or sodium hydroxide solution as electrolyte. The height of the electrolyte is 2-2.5 times the height of the probe. The probe is submerged in the electrolyte. An electrolytic power supply is provided on the outside of the tank body. A wire is connected to any column and the wire is connected to the electrolytic power supply. The wire at the other end of the electrolytic power supply extends into the electrolyte. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a top view of the tank body of the present invention.

[0016] Figure 2 for Figure 1 Enlarged view of point A in the middle.

[0017] Figure 3A cross-sectional view of the tank body.

[0018] Figure 4 It is a three-dimensional structural diagram of the tank body.

[0019] Figure 5 The top view of the probe and fixture.

[0020] Figure 6 This is the front view of the probe and fixture.

[0021] Figure 7 This is a 20x magnification microscope image before the probe is cleaned.

[0022] Figure 8 This is a 20x magnified microscope image of the probe after traditional cleaning.

[0023] Fig. 9 This is a 20-fold magnified microscope image of the probe after the cleaning process of the present invention is used in Example 1.

[0024] Fig.10 This is a 20-fold magnified microscope image of the probe after the cleaning process of the present invention is used in Example 2.

[0025] Fig.11 This is a 20-fold magnified microscope image of the probe after the cleaning process of the present invention is used in Example 3.

[0026] Among them, 1 is a fixture, 2 is a pyrolytic adhesive film, 3 is a probe, 301 is a unit needle body, 302 is a connecting piece, 4 is a slot body, 5 is a hanging rod, 6 is a locking nut, 7 is a column, 8 is a clamp, and 9 is an electrolytic power supply. DETAILED DESCRIPTION Example 1

[0027] like Figure 1-6 The MEMS probe cleaning process of this embodiment includes the following steps: (1) First, heat the acetone solution with a mass concentration ratio of 4% to 80°C, and then immerse the probe 3 product after being removed from the machine in the acetone solution and heat it at a constant temperature for 5 minutes, so that the probe 3 is separated from the fixture 1, and the probe 3 is taken out; the probe 3 product includes a fixture 1, and the fixture 1 is bonded and fixed with the probe 3 by a pyrolytic adhesive film 2. The probe 3 includes a plurality of unit needle bodies 301 distributed in a rectangular array, and the middle part of each unit needle body 301 is connected by a plurality of connecting pieces 302. The unit needle body 301 is perpendicular to the fixture 1, and the material of the probe 3 is copper alloy. Each unit needle body 301 is connected and fixed by the connecting piece 302, and the integral probe 3 is bonded and fixed on the fixture 1. The probe 3 can be separated from the fixture 1 and demolded by the heated acetone solution; (2) Place the probe 3 separated from the fixture 1 into a container, then add mixed solution 1 into the container, heat it to 50°C, soak the probe 3 and treat it with ultrasound for 30 minutes; the mixed solution 1 contains 70% isopropanol, 8% diethylene glycol, 5% carboxylic acid, and the remainder is water. The mixed solution 1 can remove the residual glue on the surface of the probe 3 product; (3) After degumming, the probe 3 is overflowed with pure water for 5 minutes to clean the chemical residue on the surface, and then the probe 3 is placed in the mixed solution 2. The temperature of the mixed solution 2 is heated to 60°C. The probe 3 is immersed in the mixed solution 2 and ultrasonically cleaned for 25 minutes to clean the dirt and particles on the surface of the probe 3. The mixed solution 2 contains 30% sodium hydroxide by mass concentration, 15% amide by mass concentration, and the rest is water. The mixed solution 2 can remove dirt, dust, etc. on the surface of the probe 3 product; (4) Place the probe 3 after cleaning its surface into a potassium hydroxide solution, and use the probe 3 as an anode and apply a cathode voltage for electrolytic degreasing. The degreasing time is 12 minutes to remove coke and oil stains on the edge of the probe 3. The mass concentration of potassium hydroxide in the potassium hydroxide solution is 45%, and the cathode voltage is 5V. (5) After electrolytic degreasing, the probe 3 is placed in a sodium hydroxide solution, and the probe 3 is used as a cathode. The anode voltage is applied for electrolytic polishing. The polishing time is 25 minutes to remove the metal slag at the edge of the probe 3 and the metal protrusions on the surface. The mass concentration of sodium hydroxide in the sodium hydroxide solution is 70%, and the anode voltage is 2V. (6) Repeat step (3); (7) Then, the probe 3 was overflowed with pure water for 7 minutes to clean the chemical residue on the surface, and then placed in an oven at 80°C for 13 minutes; (8) After the probe 3 is dried, the probe 3 is taken out of the oven and the cleaning operation is completed.

[0028] In the steps (4) and (5), an electrolysis tool is used when the probe 3 is electrolyzed. The electrolysis tool includes a rectangular trough 4, the trough 4 is made of acrylic, and two parallel horizontal hanging rods 5 are fixed on the trough 4. The hanging rods 5 are arranged near the upper edge of the trough 4, the hanging rods 5 pass through the trough 4, and the left and right ends of the hanging rods 5 are sleeved with locking nuts 6. Two left and right corresponding vertical columns 7 are fixed on each hanging rod 5, and the lower ends of the columns 7 are fixed on the bottom wall of the trough 4. The columns 7 and the hanging rods 5 are both conductive metals. The unit needle bodies 301 of the probe 3 distributed in a rectangular array are correspondingly placed between the four columns 7. The lower end of each unit needle body 301 is supported on the bottom wall of the tank body 4, and a rotatable clip 8 is provided at the lower end of each column 7. The clips 8 of the four columns 7 respectively clamp the lower ends of the unit needle bodies 301 located at the four corners. The height of the connecting piece 302 is higher than the height of the clip 8. The interior of the tank body 4 is filled with potassium hydroxide solution or sodium hydroxide solution as an electrolyte. The height of the electrolyte is 2.5 times the height of the probe 3. The probe 3 is submerged in the electrolyte. An electrolytic power supply 9 is provided on the outside of the tank body 4. A wire is connected to any column 7 and the wire is connected to the electrolytic power supply 9. The wire at the other end of the electrolytic power supply 9 extends into the electrolyte.

[0029] like Fig. 9 , is a microscope magnified image of the probe 3 after the cleaning process of this embodiment; and Figure 7 Microscope magnification of probe 3 before cleaning. Figure 8 By comparing the microscope magnified image of the probe 3 after the traditional cleaning method, it is found that the cleaning process of this embodiment is cleaner and has almost no defects. Example 2

[0030] like Figure 1-6 The MEMS probe cleaning process of this embodiment includes the following steps: (1) First, heat the acetone solution with a mass concentration ratio of 3% to 90°C, and then immerse the probe 3 product after being removed from the machine in the acetone solution and heat it at a constant temperature for 3 minutes, so that the probe 3 is separated from the fixture 1, and the probe 3 is taken out; the probe 3 product includes a fixture 1, and the fixture 1 is bonded and fixed with the probe 3 by a pyrolytic adhesive film 2. The probe 3 includes a plurality of unit needle bodies 301 distributed in a rectangular array, and the middle part of each unit needle body 301 is connected by a plurality of connecting pieces 302. The unit needle body 301 is perpendicular to the fixture 1, and the material of the probe 3 is copper alloy. Each unit needle body 301 is connected and fixed by the connecting piece 302, and the integral probe 3 is bonded and fixed on the fixture 1. The probe 3 can be separated from the fixture 1 and demolded by the heated acetone solution; (2) Place the probe 3 separated from the fixture 1 into a container, then add mixed solution 1 into the container, heat it to 40°C, soak the probe 3 and perform ultrasonic treatment for 50 minutes; the mixed solution 1 contains 60% isopropanol, 5% diethylene glycol, 6% carboxylic acid, and the remainder is water. The mixed solution 1 can remove the residual glue on the surface of the probe 3 product; (3) After degumming, the probe 3 is overflowed with pure water for 10 minutes to clean the chemical residue on the surface, and then the probe 3 is placed in the mixed solution 2. The temperature of the mixed solution 2 is heated to 50°C. The probe 3 is immersed in the mixed solution 2 and ultrasonically cleaned for 30 minutes to clean the dirt and particles on the surface of the probe 3. The mixed solution 2 contains sodium hydroxide with a mass concentration ratio of 40%, amide with a mass concentration ratio of 22%, and the remainder is water. The mixed solution 2 can remove dirt, dust, etc. on the surface of the probe 3 product; (4) Place the probe 3 after cleaning its surface into a potassium hydroxide solution, and use the probe 3 as an anode and apply a cathode voltage for electrolytic degreasing. The degreasing time is 15 minutes to remove coke and oil stains on the edge of the probe 3. The mass concentration of potassium hydroxide in the potassium hydroxide solution is 45%, and the cathode voltage is 6V. (5) After electrolytic degreasing, the probe 3 is placed in a sodium hydroxide solution, and the probe 3 is used as a cathode. The anode voltage is applied for electrolytic polishing. The polishing time is 20 minutes to remove the metal slag at the edge of the probe 3 and the metal protrusions on the surface. The mass concentration of sodium hydroxide in the sodium hydroxide solution is 60%, and the anode voltage is 3V. (6) Repeat step (3); (7) Then, the probe 3 was overflowed with pure water for 5 minutes to clean the chemical residue on the surface, and then placed in an oven at 70°C for 15 minutes; (8) After the probe 3 is dried, the probe 3 is taken out of the oven and the cleaning operation is completed.

[0031] In the steps (4) and (5), an electrolysis tool is used when the probe 3 is electrolyzed. The electrolysis tool includes a rectangular trough 4, the trough 4 is made of acrylic, and two parallel horizontal hanging rods 5 are fixed on the trough 4. The hanging rods 5 are arranged near the upper edge of the trough 4, the hanging rods 5 pass through the trough 4, and the left and right ends of the hanging rods 5 are sleeved with locking nuts 6. Each hanging rod 5 is fixed with two left and right corresponding vertical columns 7, and the lower ends of the columns 7 are fixed to the bottom wall of the trough 4. The columns 7 and the hanging rods 5 are both conductive metals. The unit needle bodies 301 of the probe 3 distributed in a rectangular array are correspondingly placed between the four columns 7. The lower end of each unit needle body 301 is supported on the bottom wall of the tank body 4, and a rotatable clip 8 is provided at the lower end of each column 7. The clips 8 of the four columns 7 respectively clamp the lower ends of the unit needle bodies 301 located at the four corners. The height of the connecting piece 302 is higher than the height of the clip 8. The interior of the tank body 4 is filled with potassium hydroxide solution or sodium hydroxide solution as an electrolyte. The height of the electrolyte is twice the height of the probe 3. The probe 3 is submerged in the electrolyte. An electrolytic power supply 9 is provided on the outside of the tank body 4. A wire is connected to any column 7 and the wire is connected to the electrolytic power supply 9. The wire at the other end of the electrolytic power supply 9 extends into the electrolyte.

[0032] like Fig.10 , is a microscope magnified image of the probe 3 after the cleaning process of this embodiment; and Figure 7 Microscope magnification of probe 3 before cleaning. Figure 8 By comparing the microscope magnified image of the probe 3 after the traditional cleaning method, it is found that the cleaning process of this embodiment is cleaner and has almost no defects. Example 3

[0033] like Figure 1-6 The MEMS probe cleaning process of this embodiment includes the following steps: (1) First, heat the acetone solution with a mass concentration ratio of 5% to 85°C, and then immerse the probe 3 product after being removed from the machine in the acetone solution and heat it at a constant temperature for 7 minutes, so that the probe 3 is separated from the fixture 1, and the probe 3 is taken out; the probe 3 product includes a fixture 1, and the fixture 1 is bonded and fixed with the probe 3 by a pyrolytic adhesive film 2. The probe 3 includes a plurality of unit needle bodies 301 distributed in a rectangular array, and the middle part of each unit needle body 301 is connected by a plurality of connecting pieces 302. The unit needle body 301 is perpendicular to the fixture 1, and the material of the probe 3 is copper alloy. Each unit needle body 301 is connected and fixed by the connecting piece 302, and the integral probe 3 is bonded and fixed on the fixture 1. The probe 3 can be separated from the fixture 1 and demolded by the heated acetone solution; (2) Place the probe 3 separated from the fixture 1 into a container, then add mixed solution 1 into the container, heat it to 60°C, soak the probe 3 and perform ultrasonic treatment for 40 minutes; the mixed solution 1 contains 50% isopropanol, 10% diethylene glycol, 4% carboxylic acid, and the remainder is water. The mixed solution 1 can remove the residual glue on the surface of the probe 3 product; (3) After degumming, the probe 3 is overflowed with pure water for 7 minutes to clean the chemical residue on the surface, and then the probe 3 is placed in the mixed solution 2. The temperature of the mixed solution 2 is heated to 70°C. The probe 3 is immersed in the mixed solution 2 and ultrasonically cleaned for 20 minutes to clean the dirt and particles on the surface of the probe 3. The mixed solution 2 contains sodium hydroxide with a mass concentration ratio of 20%, amide with a mass concentration ratio of 30%, and the remainder is water. The mixed solution 2 can remove dirt, dust, etc. on the surface of the probe 3 product; (4) Place the probe 3 after cleaning its surface into a potassium hydroxide solution, and use the probe 3 as an anode and apply a cathode voltage for electrolytic degreasing. The degreasing time is 10 minutes to remove coke and oil stains on the edge of the probe 3. The mass concentration of potassium hydroxide in the potassium hydroxide solution is 45%, and the cathode voltage is 3V. (5) After electrolytic degreasing, the probe 3 is placed in a sodium hydroxide solution, and the probe 3 is used as a cathode. The anode voltage is applied for electrolytic polishing. The polishing time is 30 minutes to remove the metal slag at the edge of the probe 3 and the metal protrusions on the surface. The mass concentration of sodium hydroxide in the sodium hydroxide solution is 80%, and the anode voltage is 4V. (6) Repeat step (3); (7) Then, let the probe 3 overflow with pure water for 10 minutes to clean the chemical residue on the surface, and then place it in an oven at 90°C to dry for 10 minutes; (8) After the probe 3 is dried, the probe 3 is taken out of the oven and the cleaning operation is completed.

[0034] In the steps (4) and (5), an electrolysis tool is used when the probe 3 is electrolyzed. The electrolysis tool includes a rectangular trough 4, the trough 4 is made of acrylic, and two parallel horizontal hanging rods 5 are fixed on the trough 4. The hanging rods 5 are arranged near the upper edge of the trough 4, the hanging rods 5 pass through the trough 4, and the left and right ends of the hanging rods 5 are sleeved with locking nuts 6. Two left and right corresponding vertical columns 7 are fixed on each hanging rod 5, and the lower ends of the columns 7 are fixed on the bottom wall of the trough 4. The columns 7 and the hanging rods 5 are both conductive metals. The unit needle bodies 301 of the probe 3 distributed in a rectangular array are correspondingly placed between the four columns 7. The lower end of each unit needle body 301 is supported on the bottom wall of the tank body 4, and a rotatable clip 8 is provided at the lower end of each column 7. The clips 8 of the four columns 7 respectively clamp the lower ends of the unit needle bodies 301 located at the four corners. The height of the connecting piece 302 is higher than the height of the clip 8. The interior of the tank body 4 is filled with potassium hydroxide solution or sodium hydroxide solution as an electrolyte. The height of the electrolyte is 2.3 times the height of the probe 3. The probe 3 is submerged in the electrolyte. An electrolytic power supply 9 is provided on the outside of the tank body 4. A wire is connected to any column 7 and the wire is connected to the electrolytic power supply 9. The wire at the other end of the electrolytic power supply 9 extends into the electrolyte.

[0035] like Fig.11 , is a microscope magnified image of the probe 3 after the cleaning process of this embodiment; and Figure 7 Microscope magnification of probe 3 before cleaning. Figure 8 By comparing the microscope magnified image of the probe 3 after the traditional cleaning method, it is found that the cleaning process of this embodiment is cleaner and has almost no defects.

[0036] In summary, the present invention adopts wet electrolytic cleaning technology to solve the cleaning problem that has been bothering MEMS probe 3. After a lot of detection, testing, and demonstration, it breaks through the traditional simple chemical immersion process and invents a new wet electrolytic cleaning technology that covers multiple technologies, which mainly includes thermal demolding, corrosion removal, electrolytic polishing, electrolytic degreasing, ultrasonic cleaning, etc. This technology can effectively solve the changes in the physical and chemical properties of products caused by abnormal surface roughness of products encountered by traditional cleaning technology. Without destroying any original characteristics of the product, the cleanliness problem of probe 3 products is solved, and the yield and performance stability of the product are greatly improved.

[0037] The present invention effectively solves the undesirable defects of traditional wet cleaning products such as large surface roughness, many bumps, and uneven edges, avoids changes in the physical and chemical properties of the products, and at the same time increases the product yield from less than 60% to nearly 100%.

[0038] The present invention is not limited to the above-mentioned embodiments. On the basis of the technical solution disclosed in the present invention, technicians in this field can make some substitutions and deformations to some technical features therein according to the disclosed technical content without creative labor, and these substitutions and deformations are all within the protection scope of the present invention.

Claims

1. A MEMS probe cleaning process, characterized in that: The steps include: (1) First, heat the acetone solution with a mass concentration ratio of 3%-5% to 80℃-90℃, then immerse the probe product after it is removed from the machine in the acetone solution and heat it at a constant temperature for 3min-7min to separate the probe from the fixture and take out the probe; (2) Place the probe that has been separated from the fixture into a container, then add mixed solution 1 into the container, heat it to 40°C-60°C, soak the probe and perform ultrasonic treatment for 30min-50min; (3) After degumming, the probe is overflowed with pure water for 5-10 minutes to clean the chemical residue on the surface, and then the probe is placed in the mixed solution 2. The temperature of the mixed solution 2 is heated to 50℃-70℃. The probe is immersed in the mixed solution 2 and ultrasonically cleaned for 20-30 minutes to clean the dirt and particles on the probe surface; (4) Place the probe after cleaning in a potassium hydroxide solution, use the probe as an anode, and apply a cathode voltage for electrolytic degreasing. The degreasing time is 10-15 minutes to remove coke and oil stains on the edge of the probe. (5) Place the probe after electrolytic degreasing in a sodium hydroxide solution, use the probe as a cathode, apply an anode voltage for electrolytic polishing, and polish for 20-30 minutes to remove the metal slag on the edge of the probe and the metal protrusions on the surface; (6) Repeat step (3); (7) Then, overflow the probe with pure water for 5-10 minutes to clean the chemical residue on the surface, and then place it in an oven at 70℃-90℃ to dry for 10-15 minutes; (8) After the probe is dried, remove the probe from the oven and the cleaning operation is completed.

2. A MEMS probe cleaning process according to claim 1, characterized in that: The probe product includes a jig, and the jig is fixed with a probe by means of a pyrolytic adhesive film. The probe includes a plurality of unit needle bodies distributed in a rectangular array, the middle part of each unit needle body is connected by a plurality of connecting parts, the unit needle body is perpendicular to the jig, and the material of the probe is copper alloy.

3. A MEMS probe cleaning process according to claim 1 or 2, characterized in that: The mixed solution 1 in step (2) contains isopropanol with a mass concentration ratio of 50%-70%, diethylene glycol with a mass concentration ratio of 5%-10%, carboxylic acid with a mass concentration ratio of 4%-6%, and the balance is water.

4. A MEMS probe cleaning process according to claim 1 or 2, characterized in that: The mixed solution 2 in step (3) contains sodium hydroxide at a mass concentration ratio of 20%-40%, amide at a mass concentration ratio of 15%-30%, and the remainder is water.

5. A MEMS probe cleaning process according to claim 1 or 2, characterized in that: In the step (4), the mass concentration of potassium hydroxide in the potassium hydroxide solution is 45%, and the cathode voltage is 3V-6V.

6. A MEMS probe cleaning process according to claim 1 or 2, characterized in that: In the step (5), the mass concentration of sodium hydroxide in the sodium hydroxide solution is 60%-80%, and the anode voltage is 2V-4V.

7. A MEMS probe cleaning process according to claim 2, characterized in that: In the steps (4) and (5), an electrolysis tool is used when electrolyzing the probe. The electrolysis tool includes a rectangular trough body, the trough body is made of acrylic, two parallel horizontal hanging rods are fixed on the trough body, the hanging rods are arranged near the upper edge of the trough body, the hanging rods pass through the trough body, and the left and right ends of the hanging rods are sleeved with locking nuts. Two corresponding vertical columns are fixed on each hanging rod, and the lower ends of the columns are fixed on the bottom wall of the trough body. The columns and the hanging rods are both conductive metals. The unit needle bodies of the probe distributed in a rectangular array are correspondingly placed between the four columns. The lower end of each unit needle body is supported on the bottom wall of the tank body, and a rotatable clamp is provided at the lower end of each column. The clamps of the four columns respectively clamp the lower ends of the unit needle bodies located at the four corners. The height of the connecting piece is higher than the height of the clamp. The interior of the tank body is filled with potassium hydroxide solution or sodium hydroxide solution as electrolyte. The height of the electrolyte is 2-2.5 times the height of the probe. The probe is submerged in the electrolyte. An electrolytic power supply is provided on the outside of the tank body. A wire is connected to any column and the wire is connected to the electrolytic power supply. The wire at the other end of the electrolytic power supply extends into the electrolyte.

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