Welding equipment for high-purity titanium sputtering target material

Abstract

The invention discloses welding equipment for a high-purity titanium sputtering target material, which belongs to the field of metal processing and comprises a box body, a telescopic rod is arranged on the inner top wall of the box body, a guide rail is arranged at the output end of the telescopic rod, the guide rail can be driven to move to a specified height through the telescopic rod, and a welding head is arranged at the output end of the guide rail. The output end of the guide rail can drive the welding head to move to a to-be-welded part for welding; the fixing mechanism comprises a supporting plate, a guide groove and a clamping plate, the supporting plate is used for containing a workpiece, the guide groove is formed in the supporting plate, and the clamping plate is installed in the guide groove in a sliding mode and used for fixing the position of the workpiece; according to the scheme, heat conduction oil and a stirring assembly are arranged; heat of a welding part can be transferred in time, the welding part is prevented from being rapidly cooled, meanwhile, a to-be-welded part is preheated, the temperature change amplitude of the to-be-welded part in the welding process is reduced, the instantaneous temperature difference is reduced, and therefore the effect of releasing thermal stress in time is achieved.

Description

Technical Field

[0001] The invention relates to the field of metal processing, and more specifically to welding equipment for high-purity titanium sputtering target materials. Background Art

[0002] The main purpose of sputtering target welding is to firmly connect the target material and the back plate so that the target material can work stably during the sputtering process; common welding methods include high-temperature brazing, hot isostatic pressing, etc. High-temperature brazing is to connect the target material and the back plate using specific solder in a vacuum environment; hot isostatic pressing is to connect the target material and the back plate through atomic diffusion under high temperature and high pressure.

[0003] Thermal stress is a phenomenon in which the internal stress of solid materials changes due to temperature changes. During the welding process, the temperature of the welding area rises rapidly, forming a temperature difference with other unheated areas, thus generating thermal stress. When the thermal stress reaches a certain level, it will impact the already formed welding slag and cause it to splash.

[0004] In addition, the high temperature during the welding process will cause the material to expand due to heat. Different materials have different thermal expansion coefficients, which will generate thermal stress at the welding joint. When the thermal stress reaches a certain level, it will cause deformation and displacement of the target material or the backing plate. For example, when the target material is metal and the backing plate is ceramic material, due to the large difference in the thermal expansion coefficients of metal and ceramic, large stress is easily generated during the heating and cooling process, resulting in displacement. At this time, the cooled slag will be broken and splashed; and if the temperature changes too quickly or too much during the welding process, the thermal stress cannot be released in time and will accumulate in the welding area, increasing the possibility of slag splashing. For example, in the case of rapid cooling, the shrinkage speed of the surface and inside of the weld is inconsistent, and the thermal stress generated will cause cracks or loosening at the joint between the slag and the weld, causing the slag to splash; when the splashed slag falls on the area to be welded, the welding effect will be poor.

[0005] To this end, a welding device for high-purity titanium sputtering target is proposed. Summary of the invention

[0006] In view of the problems existing in the prior art, the object of the present invention is to provide a welding device for a high-purity titanium sputtering target material, which can reduce the probability of welding slag splashing to the part to be welded.

[0007] To solve the above problems, the present invention adopts the following technical solutions.

[0008] A welding device for high-purity titanium sputtering target material comprises a box body, a telescopic rod is arranged on the top wall of the box body, a guide rail is arranged on the output end of the telescopic rod, the guide rail can be driven to move to a specified height by the telescopic rod, a welding head is arranged on the output end of the guide rail, and the welding head can be driven to move to a position to be welded by the output end of the guide rail for welding;

[0009] Also includes:

[0010] The fixing mechanism includes a support plate, a guide groove, and a clamping plate. The support plate is used to place the workpiece. The support plate is provided with a guide groove. The clamping plate is slidably installed in the guide groove. The clamping plate is used to fix the position of the workpiece.

[0011] The preheating mechanism comprises a cavity, a heat transfer oil, a stirring assembly, a heat preservation plate, and a first driving assembly; the cavity is opened on the support plate, the heat transfer oil is loaded in the cavity, the heat transfer oil is used to conduct heat, the stirring assembly is arranged in the cavity, the stirring assembly is used to improve the heat transfer efficiency, the heat preservation plate is used to limit the heat diffusion range, and the first driving assembly is used to drive the heat preservation plate to move;

[0012] The protection mechanism includes a protective cover, a mounting rod, a filter, a limit plate, and a second drive assembly; the protective cover is installed on the output end of the guide rail, the protective cover is used to protect the welding head, the filter is evenly installed on the mounting rod, the filter is used to collect splashed welding slag, the second drive assembly is used to drive the mounting rod to rotate, the limit plate is L-shaped, and the limit plate is clamped on the outer wall of the filter;

[0013] Among them, first, the workpiece to be welded is placed on the surface of the support plate, and then the clamping plate is pushed to move the clamping plate toward the end of the slide groove close to the workpiece, so that the workpiece can be fixed in the specified position by the clamping plate, and then the telescopic rod and the guide rail are started to drive the welding head to weld the workpiece. During the welding process, the heat of the welding part is transferred to the heat transfer oil in the cavity. Under the action of the first driving component, the insulation plate moves with the welding head, and with the cooperation of the stirring component, the heat transfer oil with a higher temperature in the cavity will be evenly distributed in the cavity, and under the limiting action of the insulation plate, the hot oil is located in the space on the side of the insulation plate close to the welded part, so as to prevent heat loss, and then the heat transfer oil transfers the heat to the part to be welded to prevent the workpiece from being damaged during welding. The parts produce greater thermal stress due to the large temperature difference, which reduces the probability of welding slag splashing; at the same time, the welded parts are insulated to reduce the cooling rate of the welded parts, further reducing the probability of welding slag flying. At the same time, under the action of the second drive component, the mounting rod rotates, so that the filter can be driven to rotate through the mounting rod. After the welding slag in the splashing state contacts the filter, the filter pushes the welding slag to rotate, and under the action of centrifugal force, the welding slag will move to the edge of the filter, and under the action of the limit plate, the welding slag can be prevented from falling, which plays a role in reducing the welding slag splashing to the bottom of the part to be welded. At the same time, under the action of the protective cover, the protection effect is further improved, which plays a role in preventing the welding slag outside the protective cover from splashing to the part to be welded under the welding head.

[0014] Furthermore, a conduit is fixedly mounted on the support plate, and both ends of the conduit are located on the side walls on opposite sides of the cavity, so that the lubricating oil in the cavity can flow during the movement of the insulation board, thereby enabling the insulation board to move normally.

[0015] Furthermore, the stirring assembly includes a rotating rod rotatably mounted on the side wall of the heat preservation plate, and an impeller is fixedly mounted on the rotating rod; the rotating rod drives the impeller to rotate to achieve the function of stirring the heat transfer oil;

[0016] A cavity is provided on the insulation board, and a rotating rod extends into the cavity. A wire hole is provided on the side wall of the cavity. A connecting rope that passes through the wire hole and is connected to the side wall of the cavity is fixedly installed on the rotating rod, and the connecting rope is wound around the rotating rod; therefore, the connecting rope can be pulled during the movement of the insulation board, and the pulled connecting rope drives the installation rod to rotate. A spring is jointly installed between the rotating rod and the side wall of the cavity, and the spring is used to drive the rotating rod to reverse, so that the connecting rope is wound around the rotating rod again, thereby preparing for work again.

[0017] Furthermore, a bellows is rotatably mounted on the side wall of the cavity, and an inlet valve and a drain valve are respectively arranged at both ends of the top wall of the bellows. The drain valve is located below the welding head, and the rotating rod extends into the bellows, and the rotating rod is rotatably connected to the end face of the bellows, and the impeller is located in the bellows. Therefore, during the rotation of the impeller, the heat transfer oil in the bellows can be discharged through the drain valve. At this time, the heat transfer oil discharged by the drain valve impacts the high-temperature heat transfer oil below the welding head, thereby dispersing the heat transfer oil with a higher temperature and making the heat transfer oil evenly distributed in the cavity; both ends of the conduit are located below the bellows, and the diameter of the conduit close to the end of the bellows is larger than the diameter of the end away from the bellows, thereby reducing the flow rate of the heat transfer oil discharged from the conduit. Since the density of the high-temperature heat transfer oil is relatively small, and the high-temperature heat transfer oil can be stratified with the low-temperature heat transfer oil during the oil discharge process of the conduit, the high-temperature heat transfer oil is located at the top, thereby improving the insulation effect of the just-completed welding part.

[0018] Furthermore, the first driving component includes an active magnet fixedly embedded on the side wall of the protective cover, and a driven magnet that attracts the active magnet is fixedly installed on the insulation board. Therefore, in the process of the active magnet being driven to move by the output end of the guide rail, the driven magnet drives the insulation board to move in the cavity under the action of the attraction. The insulation board and the welding head are located on both sides of the part to be welded, which ensures that the high-temperature heat transfer oil can diffuse to the part to be welded and preheat the part to be welded.

[0019] Furthermore, the second driving assembly includes a partition fixedly installed in the protective cover, and a driving gear and a driven gear are rotatably installed on the top wall of the partition. The driving gear is meshed with the driven gear, so the driven gear can be driven to rotate through the driving gear. The driven gear is fixedly connected to the mounting rod, so the driven gear will drive the mounting rod to rotate. A rack is fixedly installed on the bottom wall of the guide rail, and the rack is meshed with the driving gear. Therefore, when the welding head moves with the output end of the guide rail, the driving gear can be driven to rotate through the rack, and the ratio of the number of teeth of the driving gear to the driven gear is 50-60; therefore, even if the driving gear rotates slowly, the driven gear can also rotate quickly, thereby causing the mounting rod to rotate quickly.

[0020] Furthermore, a through hole is provided on the mounting rod, and a feed port cooperating with the limit plate is provided on the side wall of the through hole, and the bottom wall of the feed port and the top wall of the horizontal section of the limit plate are in the same plane; a fan blade is fixedly installed at the position above the feed port in the through hole, and the mounting rod drives the fan blade to rotate, and the fan blade blows air upward. The space below the fan blade in the through hole is in a negative pressure state, and the feed port is also in a negative pressure state. Therefore, it can exert attraction on the welding slag on the surface of the limit plate to prevent the welding slag from being out of contact with the filter when it is accumulated and the thickness is greater than the thickness of the limit plate.

[0021] Furthermore, a guide cavity is provided on the protective cover, and the top and bottom ends of the guide cavity are respectively located on the inner wall and the outer wall of the protective cover, thereby ensuring that the space below the fan blade in the through hole can be in a negative pressure state; the top of the guide cavity is located in the space above the partition, so the gas discharged from the through hole will be discharged through the guide cavity, and the bottom end of the guide cavity and the side wall of the protective cover have an angle of 30°-45°; at this time, the gas discharged from the guide cavity impacts the part to be welded on the surface of the workpiece, thereby cleaning the part to be welded, and preheating the part to be welded by the hot air flow.

[0022] Furthermore, a distance detection module, a judgment module and an alarm module are installed on the bottom wall of the partition;

[0023] The distance detection module is composed of an ultrasonic distance measuring sensor, which is used to detect the distance between the partition and the part to be welded on the workpiece, and send the data to the judgment module;

[0024] The judgment module is used to judge the received data, judge whether the part to be welded on the surface of the workpiece contains welding slag, and send the judgment result to the alarm module;

[0025] The alarm module is used to sound an alarm.

[0026] Furthermore, the distance detection module is used to detect the distance between the partition and the part to be welded on the surface of the workpiece:

[0027] h=H-h0

[0028] Wherein, H is the distance between the partition and the workpiece, which is a preset value;

[0029] h0 is the distance between the partition and the part to be welded detected by the distance detection module, which is detected in real time by the distance detection module;

[0030] h is the thickness of impurities on the surface of the part to be welded;

[0031] The judgment module judges the received data:

[0032] When h≠0, the judgment module sends the judgment result to the alarm module, and the alarm module issues an alarm to remind the staff that the surface of the welding part contains impurities and needs to be cleaned;

[0033] When h=0, the judgment module sends the judgment result to the alarm module. At this time, the alarm module does not work. Therefore, under the action of the distance detection module, the judgment module and the alarm module, the welding effect of the welding head on the workpiece can be ensured.

[0034] Compared with the prior art, the present invention has the following beneficial effects:

[0035] (1) This solution can transfer the heat of the welding part in time by setting up heat transfer oil and stirring components to prevent the welding part from cooling down rapidly. At the same time, it can preheat the welding part, reduce the temperature change amplitude of the welding part during the welding process, and reduce the instantaneous temperature difference, thereby playing a role in releasing thermal stress in time.

[0036] (2) This solution is provided with a protective cover, a mounting rod, a filter screen, and a second drive assembly; the protective cover can separate the part to be welded from the welded part, thereby preventing the welding slag from the cooled part from splashing onto the part to be welded; at the same time, the rotating filter screen can be used to capture the welding slag splashing in the protective cover, thereby preventing the welding slag from splashing onto the surface of the part to be welded. BRIEF DESCRIPTION OF THE DRAWINGS

[0037] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0038] Figure 2 It is a schematic cross-sectional structural diagram of the box body of the present invention;

[0039] Figure 3 It is a schematic cross-sectional structural diagram of the support plate of the present invention;

[0040] Figure 4 It is a schematic cross-sectional structural diagram of the protective cover of the present invention;

[0041] Figure 5 For the present invention Figure 4 A schematic diagram of the enlarged structure at A in the middle;

[0042] Figure 6It is a schematic diagram of the combined structure of the driving gear, the driven gear and the rack of the present invention;

[0043] Figure 7 The figure is a working flow chart of the distance detection module, the judgment module and the alarm module of the present invention.

[0044] Description of the numbers in the figure:

[0045] 1. Box body; 2. Telescopic rod; 3. Guide rail; 4. Welding head; 5. Support plate; 6. Guide groove; 7. Card plate; 8. Cavity; 9. Insulation plate; 10. Protective cover; 11. Mounting rod; 12. Filter; 13. Limit plate; 14. Conduit; 15. Rotating rod; 16. Impeller; 17. Cavity; 18. Connecting rope; 19. Spring; 20. Bellows; 21. Inlet valve; 22. Drain valve; 23. Active magnet; 24. Driven magnet; 25. Partition; 26. Active gear; 27. Driven gear; 28. Rack; 29. ​​Through hole; 30. Fan blade; 31. Diversion cavity; 32. Distance detection module; 33. Judgment module; 34. Alarm module. DETAILED DESCRIPTION

[0046] The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention; it is obvious that the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments, and all other embodiments obtained by ordinary technicians in this field based on the embodiments of the present invention without making creative work are within the scope of protection of the present invention.

[0047] Embodiment 1:

[0048] See also Figures 1 to 7 A welding device for a high-purity titanium sputtering target comprises a box body 1, a telescopic rod 2 is arranged on the top wall of the box body 1, a guide rail 3 is arranged on the output end of the telescopic rod 2, the guide rail 3 can be driven to move to a specified height by the telescopic rod 2, a welding head 4 is arranged on the output end of the guide rail 3, and the welding head 4 can be driven to move to a position to be welded by the output end of the guide rail 3 for welding;

[0049] Also includes:

[0050] The fixing mechanism includes a support plate 5, a guide groove 6, and a clamping plate 7. The support plate 5 is used to place the workpiece. The support plate 5 is provided with a guide groove 6. The clamping plate 7 is slidably installed in the guide groove 6. The clamping plate 7 is used to fix the position of the workpiece;

[0051] The preheating mechanism includes a cavity 8, heat transfer oil, a stirring assembly, a heat preservation plate 9, and a first driving assembly; the cavity 8 is opened on the support plate 5, the heat transfer oil is loaded in the cavity 8, the heat transfer oil is used to conduct heat, the stirring assembly is arranged in the cavity 8, the stirring assembly is used to improve the heat transfer efficiency, the heat preservation plate 9 is used to limit the heat diffusion range, and the first driving assembly is used to drive the heat preservation plate 9 to move;

[0052] The protection mechanism includes a protection cover 10, a mounting rod 11, a filter 12, a limit plate 13, and a second driving assembly; the protection cover 10 is installed on the output end of the guide rail 3, the protection cover 10 is used to protect the welding head 4, the filter 12 is evenly installed on the mounting rod 11, the filter 12 is used to collect splashed welding slag, the second driving assembly is used to drive the mounting rod 11 to rotate, the limit plate 13 is L-shaped, and the limit plate 13 is clamped on the outer wall of the filter 12;

[0053] Among them, first, the workpiece to be welded is placed on the surface of the support plate 5, and then the clamping plate 7 is pushed to make the clamping plate 7 move toward the end of the slide groove close to the workpiece, so that the workpiece can be fixed in the specified position by the clamping plate 7, and then the telescopic rod 2 and the guide rail 3 are started to drive the welding head 4 to weld the workpiece. During the welding process, the heat of the welding part is transferred to the heat-conducting oil in the cavity 8. Under the action of the first driving component, the heat-insulating plate 9 moves with the welding head 4. Under the cooperation with the stirring component, the heat-conducting oil with a higher temperature in the cavity 8 will be evenly distributed in the cavity 8, and under the limiting action of the heat-insulating plate 9, the hot oil is located in the space on the side of the heat-insulating plate 9 close to the welded part, so as to prevent heat loss, and then the heat-conducting oil transfers the heat to the part to be welded to prevent the workpiece from being heated during welding. The difference is too large to produce greater thermal stress, thereby reducing the probability of welding slag splashing; at the same time, the welded part is insulated to reduce the cooling rate of the welded part, further reducing the probability of welding slag flying, and at the same time, under the action of the second driving component, the mounting rod 11 rotates, so that the filter screen 12 can be driven to rotate through the mounting rod 11. After the welding slag in the splashing state contacts with the filter screen 12, the filter screen 12 pushes the welding slag to rotate, and under the action of centrifugal force, the welding slag will move to the edge of the filter screen 12, and under the action of the limiting plate 13, the welding slag can be prevented from falling, which plays a role in reducing the welding slag splashing to the bottom of the part to be welded, and at the same time, under the action of the protective cover 10, the protective effect is further improved, which plays a role in preventing the welding slag outside the protective cover 10 from splashing to the part to be welded under the welding head 4.

[0054] like Figure 3 As shown, a conduit 14 is fixedly mounted on the support plate 5, and both ends of the conduit 14 are located on the side walls on the opposite sides of the cavity 8, so that the lubricating oil in the cavity 8 can flow during the movement of the insulation plate 9, thereby enabling the insulation plate 9 to move normally.

[0055] like Figure 3As shown, the stirring assembly includes a rotating rod 15 rotatably mounted on the side wall of the heat preservation plate 9, and an impeller 16 is fixedly mounted on the rotating rod 15; the impeller 16 is driven to rotate by the rotating rod 15 to achieve the function of stirring the heat transfer oil;

[0056] A cavity 17 is provided on the insulation board 9, and the rotating rod 15 extends into the cavity 17. A wire hole is provided on the side wall of the cavity 17. A connecting rope 18 that passes through the wire hole and is connected to the side wall of the cavity 8 is fixedly installed on the rotating rod 15, and the connecting rope 18 is wound on the rotating rod 15; therefore, the connecting rope 18 can be pulled during the movement of the insulation board 9. At this time, the pulled connecting rope 18 drives the installation rod 11 to rotate, and a spring 19 is installed between the rotating rod 15 and the side wall of the cavity 17. The spring 19 is used to drive the rotating rod 15 to reverse, so that the connecting rope 18 is wound around the rotating rod 15 again, which plays a role in preparing for work again.

[0057] like Figure 3 As shown, a bellows 20 is rotatably mounted on the side wall of the cavity 8, and an inlet valve 21 and a drain valve 22 are respectively provided at both ends of the top wall of the bellows 20, and the drain valve 22 is located below the welding head 4, and the rotating rod 15 extends into the bellows 20, and the rotating rod 15 is rotatably connected to the end surface of the bellows 20, and the impeller 16 is located in the bellows 20, so during the rotation of the impeller 16, the heat transfer oil in the bellows 20 can be discharged through the drain valve 22, and at this time, the heat transfer oil discharged from the drain valve 22 impacts the high-temperature heat transfer oil below the welding head 4, Thereby, the heat transfer oil with a higher temperature can be dispersed and evenly distributed in the cavity 8; both ends of the conduit 14 are located below the bellows 20, and the diameter of the conduit 14 at one end close to the bellows 20 is larger than the diameter of the end away from the bellows 20, thereby reducing the flow rate of the heat transfer oil discharged from the conduit 14. Since the density of the high-temperature heat transfer oil is relatively small, and the high-temperature heat transfer oil can be separated from the low-temperature heat transfer oil during the oil discharge process of the conduit 14, the high-temperature heat transfer oil is located at the top, thereby improving the insulation effect of the just-completed welding part.

[0058] like Figure 2 , Figure 4 As shown, the first driving component includes an active magnet 23 fixedly embedded on the side wall of the protective cover 10, and a driven magnet 24 that attracts the active magnet 23 is fixedly installed on the insulation plate 9. Therefore, in the process of the active magnet 23 being driven to move by the output end of the guide rail 3, the driven magnet 24 drives the insulation plate 9 to move in the cavity 8 under the action of the attraction. The insulation plate 9 and the welding head 4 are located on both sides of the part to be welded, which ensures that the high-temperature heat-conducting oil can diffuse to the part to be welded and preheat the part to be welded.

[0059] like Figure 4As shown, the second driving assembly includes a partition 25 fixedly installed in the protective cover 10, and a driving gear 26 and a driven gear 27 are rotatably installed on the top wall of the partition 25. The driving gear 26 is meshed with the driven gear 27, so the driven gear 27 can be driven to rotate by the driving gear 26. The driven gear 27 is fixedly connected to the mounting rod 11, so the driven gear 27 will drive the mounting rod 11 to rotate. A rack 28 is fixedly installed on the bottom wall of the guide rail 3, and the rack 28 is meshed with the driving gear 26. Therefore, when the welding head 4 moves with the output end of the guide rail 3, the driving gear 26 can be driven to rotate by the rack 28, and the ratio of the number of teeth of the driving gear 26 to the driven gear 27 is 50-60; therefore, even if the driving gear 26 rotates slowly, the driven gear 27 can also rotate quickly, which plays a role in making the mounting rod 11 rotate quickly.

[0060] like Figure 4 , Figure 5 As shown, a through hole 29 is provided on the mounting rod 11, and a feed port cooperating with the limit plate 13 is provided on the side wall of the through hole 29, and the bottom wall of the feed port and the top wall of the horizontal section of the limit plate 13 are in the same plane; a fan blade 30 is fixedly installed at the position above the feed port in the through hole 29, and the mounting rod 11 drives the fan blade 30 to rotate, and the fan blade 30 blows air upward, and the space below the fan blade 30 in the through hole 29 is in a negative pressure state, and the feed port is also in a negative pressure state, so that it can exert attraction on the welding slag on the surface of the limit plate 13 to prevent the welding slag from being out of contact with the filter screen 12 when it is accumulated and the thickness is greater than the thickness of the limit plate 13.

[0061] like Figure 4 As shown, a guide cavity 31 is opened on the protective cover 10, and the top and bottom ends of the guide cavity 31 are respectively located on the inner wall and the outer wall of the protective cover 10, so as to ensure that the space below the fan blade 30 in the through hole 29 can be in a negative pressure state; the top of the guide cavity 31 is located in the space above the partition 25, so the gas exhausted from the through hole 29 will be discharged through the guide cavity 31, and the bottom end of the guide cavity 31 and the side wall of the protective cover 10 have an angle of 30°-45°; at this time, the gas exhausted from the guide cavity 31 impacts the part to be welded on the surface of the workpiece, so as to clean the part to be welded, and at the same time preheat the part to be welded by the hot air flow.

[0062] like Figure 4 , Figure 7 As shown, a distance detection module 32, a judgment module 33 and an alarm module 34 are installed on the bottom wall of the partition 25;

[0063] The distance detection module 32 is composed of an ultrasonic distance measuring sensor, which is used to detect the distance between the partition plate 25 and the part to be welded on the workpiece, and send the data to the judgment module 33;

[0064] The judgment module 33 is used to judge the received data, judge whether the part to be welded on the surface of the workpiece contains welding slag, and send the judgment result to the alarm module 34;

[0065] The alarm module 34 is used to issue an alarm.

[0066] The distance detection module 32 is used to detect the distance between the partition plate 25 and the part to be welded on the surface of the workpiece:

[0067] h=H-h0

[0068] Wherein, H is the distance between the partition plate 25 and the workpiece, which is a preset value;

[0069] h0 is the distance between the partition plate 25 and the part to be welded detected by the distance detection module 32, and is detected in real time by the distance detection module 32;

[0070] h is the thickness of impurities on the surface of the part to be welded;

[0071] The judgment module 33 judges the received data:

[0072] When h≠0, the judgment module 33 sends the judgment result to the alarm module 34, and the alarm module 34 issues an alarm to remind the staff that the surface of the welding part contains impurities and needs to be cleaned;

[0073] When h=0, the judgment module 33 sends the judgment result to the alarm module 34. At this time, the alarm module 34 does not work. Therefore, under the action of the distance detection module 32, the judgment module 33 and the alarm module 34, the welding effect of the welding head 4 on the workpiece can be ensured.

[0074] The above is only a preferred specific implementation of the present invention; however, the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes according to the technical solution and its improved conception within the technical scope disclosed by the present invention, which should be covered by the protection scope of the present invention.

Claims

1. A welding device for high-purity titanium sputtering target, comprising a box (1), a telescopic rod (2) is provided on the top wall of the box (1), a guide rail (3) is provided on the output end of the telescopic rod (2), and a welding head (4) is provided on the output end of the guide rail (3); Features: Also includes: The fixing mechanism comprises a support plate (5) and a clamping plate (7), wherein the support plate (5) is used to place a workpiece, and the clamping plate (7) is used to fix the position of the workpiece; The preheating mechanism comprises a cavity (8), heat-conducting oil, a stirring assembly, a heat-insulating plate (9), and a first driving assembly; the cavity (8) is opened on the support plate (5), the heat-conducting oil is installed in the cavity (8), the heat-conducting oil is used to conduct heat, the stirring assembly is used to improve the heat transfer efficiency, the heat-insulating plate (9) is used to limit the heat diffusion range, and the first driving assembly is used to drive the heat-insulating plate (9) to move; The protection mechanism comprises a protection cover (10), a mounting rod (11), a filter screen (12), a limit plate (13), and a second drive assembly; the protection cover (10) is used to protect the welding head (4), the filter screen (12) is used to collect splashed welding slag, the second drive assembly is used to drive the mounting rod (11) to rotate, and the limit plate (13) is clamped on the outer wall of the filter screen (12).

2. The welding equipment for high-purity titanium sputtering target according to claim 1, characterized in that: A conduit (14) is fixedly mounted on the support plate (5), and two ends of the conduit (14) are located on side walls on opposite sides of the cavity (8).

3. A welding device for high-purity titanium sputtering target according to claim 2, characterized in that: The stirring assembly comprises a rotating rod (15) rotatably mounted on the side wall of the heat preservation plate (9), and an impeller (16) is fixedly mounted on the rotating rod (15); a cavity (17) is provided on the heat preservation plate (9), and the rotating rod (15) extends into the cavity (17); a wire hole is provided on the side wall of the cavity (17); a connecting rope (18) is fixedly mounted on the rotating rod (15) and passes through the wire hole and is connected to the side wall of the cavity (8); the connecting rope (18) is wound around the rotating rod (15); a spring (19) is installed between the rotating rod (15) and the side wall of the cavity (17), and the spring (19) is used to drive the rotating rod (15) to reverse.

4. The welding equipment for high-purity titanium sputtering target according to claim 3, characterized in that: A bellows (20) is rotatably mounted on the side wall of the cavity (8), and an inlet valve (21) and a drain valve (22) are respectively provided at two ends of the top wall of the bellows (20), the rotating rod (15) extends into the bellows (20), and the rotating rod (15) is rotatably connected to the end surface of the bellows (20), and the impeller (16) is located in the bellows (20), and both ends of the conduit (14) are located below the bellows (20), and the diameter of the conduit (14) at one end close to the bellows (20) is larger than the diameter of the end away from the bellows (20).

5. A welding device for high-purity titanium sputtering target according to claim 4, characterized in that: The first driving assembly comprises an active magnet (23) fixedly embedded in the side wall of the protective cover (10), a driven magnet (24) which attracts the active magnet (23) is fixedly mounted on the thermal insulation board (9), and the thermal insulation board (9) and the welding head (4) are located on both sides of the part to be welded.

6. The welding equipment for high-purity titanium sputtering target according to claim 5, characterized in that: The second driving assembly comprises a partition (25) fixedly mounted in the protective cover (10); a driving gear (26) and a driven gear (27) are rotatably mounted on the top wall of the partition (25); the driving gear (26) is meshed with the driven gear (27); the driven gear (27) is fixedly connected to the mounting rod (11); a rack (28) is fixedly mounted on the bottom wall of the guide rail (3); the rack (28) is meshed with the driving gear (26); and the ratio of the number of teeth of the driving gear (26) to the driven gear (27) is 50-60.

7. A welding device for high-purity titanium sputtering target according to claim 6, characterized in that: A through hole (29) is provided on the mounting rod (11), a feed port cooperating with the limiting plate (13) is provided on the side wall of the through hole (29), and a fan blade (30) is fixedly installed in the through hole (29) at a position above the feed port.

8. The welding equipment for high-purity titanium sputtering target according to claim 7, characterized in that: The protective cover (10) is provided with a flow guide cavity (31), the top and bottom of the flow guide cavity (31) are respectively located on the inner wall and the outer wall of the protective cover (10), the top of the flow guide cavity (31) is located in the space above the partition (25), and the bottom of the flow guide cavity (31) forms an angle of 30°-45° with the side wall of the protective cover (10).

9. A welding device for high-purity titanium sputtering target according to claim 8, characterized in that: A distance detection module (32), a judgment module (33) and an alarm module (34) are installed on the bottom wall of the partition (25); The distance detection module (32) is used to detect the distance between the partition plate (25) and the part to be welded on the workpiece, and send the data to the judgment module (33); The judgment module (33) is used to judge the received data and send the judgment result to the alarm module (34); The alarm module (34) is used to issue an alarm.

10. The welding equipment for high-purity titanium sputtering target according to claim 9, characterized in that: The distance detection module (32) is used to detect the distance between the partition plate (25) and the part to be welded on the surface of the workpiece: h=H-h0 Wherein, H is the distance between the partition (25) and the workpiece, which is a preset value; h0 is the distance between the partition (25) and the part to be welded detected by the distance detection module (32), and is detected in real time by the distance detection module (32); h is the thickness of impurities on the surface of the part to be welded.

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