Reaction tube installation auxiliary device for semiconductor wafer manufacturing and auxiliary method thereof

Abstract

The invention discloses a reaction tube installation auxiliary device for semiconductor wafer manufacturing and an auxiliary method thereof, relates to the technical field of semiconductor manufacturing, and aims to solve the problems that when an existing reaction tube is installed, the size is large, the installation difficulty is high, time and labor are consumed in user operation, and installation is inconvenient. Comprising a moving trolley platform, a plurality of universal wheels are arranged below the moving trolley platform, the moving trolley platform comprises a high platform and a low platform, assembling clamping pieces are arranged on the inner walls of the two sides of the low platform, a containing groove is formed in the outer wall of the high platform, and a reaction tube assembly is placed in the containing groove; the front end and the rear end of the reaction tube assembly are each provided with a clamping adjusting piece used for limiting and clamping, a displacement assembly is arranged below the clamping adjusting pieces, a driving assembly is arranged at one end of the displacement assembly, and a diffusion equipment assembling piece used for being assembled with the reaction tube assembly in a combined mode is arranged above the low table. And a lifting assembly is arranged at one end of the diffusion equipment assembly part.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor manufacturing, and in particular to a reaction tube installation auxiliary device and an auxiliary method for semiconductor wafer manufacturing. Background Art

[0002] Semiconductor diffusion equipment is an important process equipment for integrated circuit manufacturing. It is an automatic control equipment that requires long-term continuous operation, excellent temperature control accuracy, good reliability and stability. It is suitable for various oxidation, annealing and thin film growth processes in the integrated circuit manufacturing process. The quartz reaction tube is an important internal component in semiconductor diffusion equipment. When installing it, it is inconvenient because of its large size, high installation difficulty, and time-consuming and labor-intensive operation by users. Therefore, a reaction tube installation auxiliary device and auxiliary method for semiconductor wafer manufacturing are provided. Summary of the invention

[0003] The purpose of the present invention is to provide a reaction tube installation auxiliary device and auxiliary method for semiconductor wafer manufacturing, so as to solve the problem that the existing reaction tubes proposed in the above background technology are large in size, difficult to install, time-consuming and labor-intensive to operate, and inconvenient to install due to their large size.

[0004] To achieve the above-mentioned purpose, the present invention provides the following technical solutions: a reaction tube installation auxiliary device for semiconductor wafer manufacturing, comprising a movable platform, a plurality of universal wheels are arranged below the movable platform, the movable platform comprises a high platform and a low platform, assembly clamps are arranged on the inner walls on both sides of the low platform, a placement groove is opened on the outer wall of the high platform, a reaction tube assembly is placed in the placement groove, clamping adjustment parts for limiting clamping are arranged at the front and rear ends of the reaction tube assembly, a displacement assembly is arranged below the clamping adjustment part, a driving assembly is arranged at one end of the displacement assembly, a diffusion equipment assembly for assembly in combination with the reaction tube assembly is arranged above the low platform, a lifting assembly is arranged at one end of the diffusion equipment assembly, and limiting assemblies for limiting the displacement of the movable platform are arranged on both sides of the lifting assembly.

[0005] Preferably, the reaction tube assembly includes a reaction tube body, an assembly combination end is provided at the lower end of the reaction tube body, an annular clamping strip is provided on the lower surface of the assembly combination end, a plurality of lifting grooves are provided on the outer wall of the annular clamping strip, two assembly blocks are symmetrically provided on the outer wall of the annular clamping strip, and a first through hole is provided on the outer wall of the assembly block.

[0006] Preferably, a plurality of assembly grooves are provided inside the placement groove, a first electric telescopic rod is provided inside the assembly groove, and a telescopic end of the first electric telescopic rod extends into the jacking groove.

[0007] Preferably, the diffusion equipment assembly includes an assembly tube body, and docking assembly ends are provided at both upper and lower ends of the assembly tube body. An annular groove matching the annular clamping strip is provided on the outer wall of the docking assembly end, and two assembly openings are symmetrically provided inside the annular groove. A second through hole is provided on the outer wall of the assembly opening, and an arc-shaped electromagnet is provided on the outer wall of the assembly tube body, and a second electric telescopic rod is provided on the outer wall of the arc-shaped electromagnet.

[0008] Preferably, the assembly card includes two upper and lower clamps, the outer walls of the clamps are provided with clamping openings, an assembly rod is arranged between the clamps, a second screw slider is arranged at one end of the clamp, the two second screw sliders are respectively installed on the outer walls of the forward screw and the reverse screw, and the forward screw and the reverse screw are connected by a coupling.

[0009] Preferably, the clamping adjustment member includes two front and rear support frames, and a plurality of vertically spaced electric telescopic arms are arranged on the side walls of the support frames. The electric telescopic arms include an inner telescopic member, and an arc-shaped clamping block is arranged at one end of the inner telescopic member, and a rubber pad is bonded to the inner wall of the arc-shaped clamping block.

[0010] Preferably, the displacement assembly includes a first ball screw and a second ball screw which are symmetrically arranged front to back, and a first screw slider is provided on the outer wall of the first ball screw and the second ball screw. The driving assembly includes a first motor, and a first pulley is provided at the output end of the first motor, and one side of the first pulley is connected to a second pulley via a belt.

[0011] Preferably, the lifting assembly includes a third ball screw, a fourth ball screw is provided on one side of the third ball screw, a third screw slider is provided on the outer walls of the third ball screw and the fourth ball screw, and the second electric telescopic rod is mounted on the outer wall of the third screw slider, a third pulley is provided at the upper end of the third ball screw, a second motor is provided at the upper end of the third pulley, a fourth pulley is provided at the upper end of the fourth ball screw, and the third pulley is connected to the fourth pulley through a belt.

[0012] Preferably, an electromagnet positioning platform is provided on the upper surface of the low platform, and limiting grooves are provided on the outer walls on both sides of the movable platform. The limiting assembly includes a mounting plate, and an electric cylinder is provided on the outer wall of the mounting plate. The telescopic end of the electric cylinder is provided with a limiting clamp that engages with the limiting groove to limit the position.

[0013] Preferably, an auxiliary method for installing an auxiliary device for a reaction tube for semiconductor wafer manufacturing comprises the following steps: Step 1: Place the reaction tube body and embed it into the placement slot, move the mobile platform into the lifting assembly through the universal wheel, extend the electric cylinder forward, insert the limit card into the limit slot, and limit and fix the mobile platform; Step 2: The second motor drives the third pulley and the third ball screw to rotate, and drives the fourth pulley and the fourth ball screw to rotate through the belt connection. The third screw slider is lowered by rotation, so that the diffusion equipment assembly is lowered to the height of the low platform, and the second electric telescopic rod is turned on. The second electric telescopic rod puts the arc electromagnet against the assembly tube body. The arc electromagnet is energized to generate magnetism and is adsorbed and fixed to the assembly tube body. The second electric telescopic rod extends forward again, so that the second electric telescopic rod drives the assembly tube body to move forward to the electromagnet positioning platform of the low platform, and is magnetically fixed by the electromagnet positioning platform; Step 3: Turn on the first motor to drive the first pulley to rotate, and drive the second pulley to rotate through the belt connection, so that the first ball screw and the first screw slider at the second ball screw are displaced to the reaction tube body; Step 4: The electric telescopic arm extends forward, driving the arc-shaped clamping block to move against the reaction tube body, and the first electric telescopic rod is turned on. The first electric telescopic rod extends upward, so that its telescopic end is inserted into the lifting slot, driving the reaction tube body to move upward, and moving its assembly end out of the slot; Step 5: The reaction tube body is moved onto the assembly tube body, the annular clamping strip is aligned with the clamping slot, the electric telescopic arm is retracted backward, the annular clamping strip is inserted into the clamping slot, and at the same time, the assembly block is inserted into the assembly opening, so that the assembly assembly end is combined with the docking assembly end; Step 6: The electromagnet positioning table is powered off and demagnetized, and the second electric telescopic rod is extended forward to insert the assembly rod into the first through hole and the second through hole, and the assembly block is restricted and clamped at the assembly opening. After insertion, the clamp releases the end of the assembly rod, and the second electric telescopic rod drives the clamped reaction tube to retract backward into the lifting assembly; Step 7: The third ball screw and the fourth ball screw drive the assembled reaction tube body to rise, exposing the docking assembly end at the lower end, retracting the electric cylinder, releasing the car body, and moving the car body out of the lifting assembly, leaving the lower space inside for the user to install the bottom reaction tube later.

[0014] Compared with the prior art, the present invention has the following beneficial effects: 1. The present invention loads the reaction tube to be installed by a moving platform, drives the reaction tube to move into the diffusion device, and then pushes the reaction tube upward out of the groove by a first electric telescopic rod, clamps and limits the reaction tube at the clamping adjustment part, and then drives the displacement component by the driving component to drive the reaction tube to move to the diffusion device assembly part, and combines the reaction tube with the diffusion device assembly part by downward insertion and engagement. Through the arrangement of the above-mentioned multiple components, the user can be assisted in the displacement, combination and other operations during the installation of the reaction tube, reduce the difficulty of operation, improve the installation efficiency, and solve the problem that the existing quartz reaction tube is installed in a large size, has a high installation difficulty, and is time-consuming and labor-intensive for users to operate, and is inconvenient to install.

[0015] 2. Through the setting of the arc-shaped electromagnet, it is convenient for the user to clamp and separate the assembly tube body by switching the power-on and power-off states. By setting the second electric telescopic rod, the user adjusts the position of the arc-shaped assembly tube body, and retracts the assembly tube body to the inside after the assembly tube body and the reaction tube are assembled. The assembly clamp rod can be inserted through the first through hole and the second through hole, thereby further improving the firmness of the reaction tube in the assembled state, making it difficult for the assembly combination end to be separated from the docking assembly end. The assembly clamp rod can be pulled out through the clamp later to realize the separation operation of the reaction tube and the docking assembly end.

[0016] 3. The electric cylinder drives the limit clamp to move telescopically. When extended, it is inserted into the limit groove to limit and fix the vehicle body, making it difficult for the vehicle body to move during installation, thereby improving safety. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a schematic diagram of the overall structure of the present invention; Figure 2 It is a schematic diagram of the structure of the mobile platform of the present invention; Figure 3 It is a schematic diagram of the structure of the diffusion equipment assembly of the present invention; Figure 4 It is a schematic diagram of the structure of the reaction tube assembly and the clamping adjustment member of the present invention; Figure 5 It is a schematic diagram of the structure of the driving assembly of the present invention; Figure 6 It is a schematic diagram of the assembly card structure of the present invention; Figure 7 It is a schematic diagram of the structure of the lifting assembly of the present invention; Figure 8 It is a schematic diagram of the structure of the limit assembly of the present invention; In the figure: 1. mobile platform; 101. high platform; 102. low platform; 103. universal wheel; 104. placement slot; 105. assembly slot; 106. first electric telescopic rod; 107. electromagnet positioning platform; 108. limit slot; 2. reaction tube assembly; 201. reaction tube body; 202. assembly combination end; 203. annular clamping strip; 204. lifting notch; 205. assembly block; 206. first through hole; 3. clamping adjustment member; 301. support frame; 302. electric telescopic arm; 303. inner telescopic member; 304. arc clamping block; 4. displacement assembly; 401. first ball screw; 402. first screw slider; 403. second ball screw; 5. driving assembly; 501. first motor; 502. first pulley; 503, second pulley; 6, diffusion equipment assembly; 601, assembly tube; 602, docking assembly end; 603, slot; 604, assembly port; 605, second through hole; 606, arc-shaped electromagnet; 607, second electric telescopic rod; 7, assembly card; 701, clamp; 702, clamp; 703, second lead screw slider; 704, forward lead screw; 705, reverse lead screw; 706, coupling; 707, assembly card rod; 8, lifting assembly; 801, third ball screw; 802, fourth ball screw; 803, third lead screw slider; 804, second motor; 805, third pulley; 806, fourth pulley; 9, limit assembly; 901, mounting plate; 902, electric cylinder; 903, limit card. DETAILED DESCRIPTION

[0018] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments.

[0019] See also Figure 1-5 , an embodiment of the present invention: a reaction tube installation auxiliary device for semiconductor wafer manufacturing, comprising a mobile platform 1, a plurality of universal wheels 103 are arranged below the mobile platform 1, the mobile platform 1 comprises a high platform 101 and a low platform 102, assembly clamps 7 are arranged on the inner walls on both sides of the low platform 102, a placement groove 104 is opened on the outer wall of the high platform 101, a reaction tube assembly 2 is placed in the placement groove 104, a clamping adjustment member 3 for limiting clamping is arranged at both ends of the reaction tube assembly 2, a displacement assembly 4 is arranged below the clamping adjustment member 3, a driving assembly 5 is arranged at one end of the displacement assembly 4, a diffusion device assembly 6 for assembly with the reaction tube assembly 2 is arranged above the low platform 102, a lifting assembly 8 is arranged at one end of the diffusion device assembly 6, and both sides of the lifting assembly 8 are provided with limit assemblies 9 for limiting the displacement of the mobile platform 1; The reaction tube to be installed is loaded on the mobile platform 1, and the reaction tube is driven to move into the diffusion device, and then the reaction tube is pushed upward out of the groove by the first electric telescopic rod 106, and the reaction tube is clamped and limited by the clamping adjustment member 3, and then the displacement component 4 is driven by the driving component 5 to drive the reaction tube to move to the diffusion device assembly part 6, and the reaction tube is combined with the diffusion device assembly part 6 by downward plugging and engaging, and after the combination, the side plug-in is used to achieve reinforcement combination, and finally, the assembled reaction tube is retracted and displaced into the lifting component 8, and the lifting component 8 drives it to rise, leaving the lower space; the above structure can not only realize the auxiliary installation of the reaction tube, but also reserve space for the subsequent installation of the reaction tube, which can facilitate the user to perform subsequent assembly operations.

[0020] See also Figure 3 , Figure 4 The reaction tube assembly 2 includes a reaction tube body 201, an assembly combination end 202 is provided at the lower end of the reaction tube body 201, an annular clamping strip 203 is provided on the lower surface of the assembly combination end 202, a plurality of lifting notches 204 are provided on the outer wall of the annular clamping strip 203, two assembly blocks 205 are symmetrically provided on the outer wall of the annular clamping strip 203, and a first through hole 206 is provided on the outer wall of the assembly block 205, and the diffusion device assembly part 6 includes an assembly tube body 601, upper and lower ends of the assembly tube body 601 are provided with docking assembly ends 602, an annular clamping groove 603 matching the annular clamping strip 203 is provided on the outer wall of the docking assembly end 602, two assembly ports 604 are symmetrically provided inside the annular clamping groove 603, and a second through hole 605 is provided on the outer wall of the assembly port 604, an arc-shaped electromagnet 606 is provided on the outer wall of the assembly tube body 601, and a second electric telescopic rod 607 is provided on the outer wall of the arc-shaped electromagnet 606; The annular clamping strip 203 at the assembly combination end 202 is engaged with the annular clamping groove 603 of the butt assembly end 602 to limit the position, and at the same time, the assembly block 205 is inserted into the assembly opening 604 to combine the assembly combination end 202 with the butt assembly end 602; The setting of the arc-shaped electromagnet 606 can facilitate the user to clamp and separate the assembly tube body 601 by switching the power-on and power-off states. The setting of the second electric telescopic rod 607 allows the user to adjust the position of the arc-shaped assembly tube body 601 and retract it into the interior after the assembly tube body 601 is assembled with the reaction tube.

[0021] See also Figure 2 , Figure 4 A plurality of assembly grooves 105 are provided inside the placement groove 104, a first electric telescopic rod 106 is provided inside the assembly groove 105, and the telescopic end of the first electric telescopic rod 106 extends into the jacking groove 204; The first electric telescopic rod 106 is used to perform the operation of ejecting the reaction tube. When the reaction tube is placed in the groove, the first electric telescopic rod 106 is in a retracted state, so that its end is located in the assembly groove 105, which does not affect the normal placement of the reaction tube. In the jacking state, the telescopic end of the first electric telescopic rod 106 is inserted into the jacking slot 204, thereby driving the reaction tube to move upward, and achieving the effect of moving the reaction tube out of the groove. After the upper clamping member clamps the reaction tube, the first electric telescopic rod 106 can retract and disengage from the jacking slot 204, thereby not affecting the subsequent reaction tube displacement operation.

[0022] See also Figure 6 The assembly fixture 7 includes two upper and lower clamps 701, a clamping opening 702 is provided on the outer wall of the clamp 701, an assembly clamping rod 707 is provided between the clamping openings 702, a second screw slider 703 is provided at one end of the clamp 701, and the two second screw sliders 703 are respectively installed on the outer walls of the forward screw 704 and the reverse screw 705, and the forward screw 704 and the reverse screw 705 are connected by a coupling 706; The motor (not shown in the figure) drives the reverse lead screw 705 to rotate, and drives the forward lead screw 704 to rotate through the coupling 706, so that the two clamps 701 can be pulled closer or farther away from each other. When pulling closer, the assembly clamping rod 707 can be limited and clamped, and when pulling away, the assembly clamping rod 707 can be loosened. The assembly clamping rod 707 can be inserted through the first through hole 206 and the second through hole 605, thereby further improving the firmness of the reaction tube in the assembled state, so that the assembly combination end 202 is not easily separated from the docking assembly end 602. The assembly clamping rod 707 can be pulled out through the clamp 701 later to realize the separation operation of the reaction tube and the docking assembly end 602.

[0023] See also Figure 4 The clamping adjustment member 3 includes two front and rear support frames 301, and a plurality of vertically spaced electric telescopic arms 302 are arranged on the side walls of the support frames 301. The electric telescopic arms 302 include an inner telescopic member 303, and an arc-shaped clamping block 304 is arranged at one end of the inner telescopic member 303. A rubber pad is bonded to the inner wall of the arc-shaped clamping block 304; The electric telescopic arm 302 realizes telescopic displacement by any driving mode of electric telescopic, hydraulic telescopic or pneumatic telescopic. The distance between the arc clamping block 304 and the reaction tube is adjusted by telescopic displacement, and the clamping operation of the tube body is realized by the front and rear clamping points, thereby driving the reaction tube to perform clamping displacement. The provision of the rubber pad can increase the friction coefficient between the arc clamping block 304 and the reaction tube, thereby improving its anti-slip property, and can also avoid the surface wear problem caused by the arc clamping block 304 directly contacting the reaction tube.

[0024] See also Figure 2 , Figure 5The displacement assembly 4 includes a first ball screw 401 and a second ball screw 403 which are symmetrically arranged front and back, and a first screw slider 402 is arranged on the outer wall of the first ball screw 401 and the second ball screw 403. The driving assembly 5 includes a first motor 501, and a first pulley 502 is arranged at the output end of the first motor 501. A second pulley 503 is arranged on one side of the first pulley 502, and the first pulley 502 and the second pulley 503 are connected by a belt; The first motor 501 is used to drive the first pulley 502 and the first ball screw 401 to rotate. On this basis, the second pulley 503 and the second ball screw 403 are driven to rotate through the connection of the belt, thereby driving the two first screw sliders 402 to achieve displacement operation, thereby changing the position of the clamping adjustment member 3 and the reaction tube.

[0025] See also Figure 7 The lifting assembly 8 includes a third ball screw 801, a fourth ball screw 802 is arranged on one side of the third ball screw 801, a third screw slider 803 is arranged on the outer walls of the third ball screw 801 and the fourth ball screw 802, and the second electric telescopic rod 607 is mounted on the outer wall of the third screw slider 803, a third pulley 805 is arranged on the upper end of the third ball screw 801, a second motor 804 is arranged on the upper end of the third pulley 805, a fourth pulley 806 is arranged on the upper end of the fourth ball screw 802, and the third pulley 805 is connected to the fourth pulley 806 through a belt; The second motor 804 drives the third pulley 805 and the third ball screw 801 to rotate, and through the belt connection, drives the fourth pulley 806 and the fourth ball screw 802 to rotate. The third screw slider 803 is raised and lowered by rotation to achieve height adjustment of the diffusion equipment assembly 6. At the same time, the height of the assembled reaction tube can be adjusted.

[0026] See also Figure 2 , Figure 8 The upper surface of the low platform 102 is provided with an electromagnet positioning platform 107, and the outer walls on both sides of the mobile platform 1 are provided with limit grooves 108. The limit assembly 9 includes a mounting plate 901, and an electric cylinder 902 is provided on the outer wall of the mounting plate 901. The telescopic end of the electric cylinder 902 is provided with a limit clamp 903 that engages with the limit groove 108 for limit. The electromagnet positioning platform 107 can more firmly adsorb and fix the diffusion equipment assembly 6 above in a magnetic manner. At the same time, its electromagnetic characteristics also make it convenient for users to cut off the power and demagnetize, which is convenient for moving operations. The electric cylinder 902 drives the limit card 903 to move telescopically. When extended, it is inserted into the limit groove 108 to limit and fix the vehicle body, so that the vehicle body is not easy to move during the installation process, thereby improving safety.

[0027] See also Figure 1-8 , an auxiliary method for installing an auxiliary device for a reaction tube for semiconductor wafer manufacturing, comprising the following steps: Step 1: Place the reaction tube body 201 and insert it into the placement slot 104, move the mobile platform 1 into the lifting assembly 8 through the universal wheel 103, extend the electric cylinder 902 forward, insert the limit clamp 903 into the limit slot 108, and limit and fix the mobile platform 1; Step 2: The second motor 804 drives the third pulley 805 and the third ball screw 801 to rotate, and drives the fourth pulley 806 and the fourth ball screw 802 to rotate through the belt connection, and the third screw slider 803 is lowered by rotation, so that the diffusion equipment assembly 6 is lowered to the height of the low platform 102, and the second electric telescopic rod 607 is turned on. The second electric telescopic rod 607 puts the arc electromagnet 606 against the assembly tube body 601, and the arc electromagnet 606 is energized to generate magnetism, and is adsorbed and fixed to the assembly tube body 601. The second electric telescopic rod 607 extends forward again, so that the second electric telescopic rod 607 drives the assembly tube body 601 to move forward to the electromagnet positioning platform 107 of the low platform 102, and is magnetically fixed by the electromagnet positioning platform 107; Step 3: Turn on the first motor 501 to drive the first pulley 502 to rotate, and drive the second pulley 503 to rotate through the belt connection, so that the first ball screw 401 and the first screw slider 402 at the second ball screw 403 are moved to the reaction tube body 201; Step 4: The electric telescopic arm 302 extends forward, driving the arc-shaped clamping block 304 to move and abut against the reaction tube body 201, and the first electric telescopic rod 106 is turned on. The first electric telescopic rod 106 extends upward, and its telescopic end is inserted into the lifting slot 204, driving the reaction tube body 201 to move upward, and its assembly end is moved out of the slot; Step 5: The reaction tube body 201 is moved onto the assembly tube body 601, the annular clamping strip 203 is aligned with the clamping groove 603, and the electric telescopic arm 302 is retracted backwards to insert the annular clamping strip 203 into the clamping groove 603. At the same time, the assembly block 205 is inserted into the assembly opening 604 to combine the assembly assembly end 202 with the docking assembly end 602; Step 6: The electromagnet positioning platform 107 is powered off and demagnetized, and the second electric telescopic rod 607 is extended forward, so that the assembly rod 707 is inserted into the first through hole 206 and the second through hole 605, and the assembly block 205 is restricted to be engaged at the assembly opening 604. After the insertion, the clamp 701 releases the end of the assembly rod 707, and the second electric telescopic rod 607 drives the engaged reaction tube to retract backward into the lifting assembly 8; Step 7: The third ball screw 801 and the fourth ball screw 802 drive the assembled reaction tube body 201 to rise, exposing the docking assembly end 602 at the lower end, and the electric cylinder 902 retracts to release the vehicle body, and the vehicle body moves out of the lifting assembly 8, leaving the lower space inside for the user to install the bottom reaction tube later.

[0028] It will be apparent to those skilled in the art that the invention is not limited to the details of the exemplary embodiments described above and that the invention can be implemented in other specific forms without departing from the spirit or essential features of the invention. Therefore, the embodiments should be considered exemplary and non-limiting in all respects, and the scope of the invention is defined by the appended claims rather than the foregoing description, and it is intended that all variations falling within the meaning and scope of the equivalent elements of the claims be included in the invention. Any reference numeral in a claim should not be considered as limiting the claim to which it relates.

Claims

1. A reaction tube installation auxiliary device for semiconductor wafer manufacturing, comprising a movable platform (1), wherein a plurality of universal wheels (103) are arranged below the movable platform (1), characterized in that: The movable platform (1) comprises a high platform (101) and a low platform (102), the inner walls of both sides of the low platform (102) are provided with assembly clamps (7), the outer wall of the high platform (101) is provided with a placement groove (104), a reaction tube assembly (2) is placed in the placement groove (104), the front and rear ends of the reaction tube assembly (2) are provided with clamping adjustment members (3) for limiting clamping, a displacement assembly (4) is provided below the clamping adjustment member (3), one end of the displacement assembly (4) is provided with a driving assembly (5), a diffusion device assembly (6) for combined assembly with the reaction tube assembly (2) is provided above the low platform (102), one end of the diffusion device assembly (6) is provided with a lifting assembly (8), and both sides of the lifting assembly (8) are provided with limit assemblies (9) for limiting the displacement of the movable platform (1).

2. The reaction tube installation auxiliary device for semiconductor wafer manufacturing according to claim 1, characterized in that: The reaction tube assembly (2) comprises a reaction tube body (201); an assembly assembly end (202) is arranged at the lower end of the reaction tube body (201); an annular clamping strip (203) is arranged on the lower surface of the assembly assembly end (202); a plurality of lifting notches (204) are provided on the outer wall of the annular clamping strip (203); two assembly blocks (205) are symmetrically arranged on the outer wall of the annular clamping strip (203); and a first through hole (206) is provided on the outer wall of the assembly block (205).

3. The reaction tube installation auxiliary device for semiconductor wafer manufacturing according to claim 2, characterized in that: A plurality of assembly grooves (105) are provided inside the placement groove (104), a first electric telescopic rod (106) is provided inside the assembly groove (105), and the telescopic end of the first electric telescopic rod (106) extends into the jacking groove (204).

4. The reaction tube installation auxiliary device for semiconductor wafer manufacturing according to claim 3, characterized in that: The diffusion device assembly (6) comprises an assembly tube body (601), wherein the upper and lower ends of the assembly tube body (601) are both provided with docking assembly ends (602), an annular clamping groove (603) matching the annular clamping strip (203) is provided on the outer wall of the docking assembly end (602), two assembly openings (604) are symmetrically provided inside the annular clamping groove (603), a second through hole (605) is provided on the outer wall of the assembly opening (604), an arc-shaped electromagnet (606) is provided on the outer wall of the assembly tube body (601), and a second electric telescopic rod (607) is provided on the outer wall of the arc-shaped electromagnet (606).

5. The reaction tube installation auxiliary device for semiconductor wafer manufacturing according to claim 4, characterized in that: The assembly clamp (7) comprises two upper and lower clamps (701), the outer wall of the clamp (701) is provided with a clamping opening (702), an assembly clamp rod (707) is arranged between the clamping opening (702), one end of the clamp (701) is provided with a second lead screw slider (703), the two second lead screw sliders (703) are respectively mounted on the outer walls of the forward lead screw (704) and the reverse lead screw (705), and the forward lead screw (704) and the reverse lead screw (705) are connected via a coupling (706).

6. The reaction tube installation auxiliary device for semiconductor wafer manufacturing according to claim 5, characterized in that: The clamping adjustment member (3) comprises two front and rear support frames (301), a plurality of vertically spaced electric telescopic arms (302) are arranged on the side walls of the support frames (301), the electric telescopic arms (302) comprise an inner telescopic member (303), an arc-shaped clamping block (304) is arranged at one end of the inner telescopic member (303), and a rubber pad is bonded to the inner wall of the arc-shaped clamping block (304).

7. The reaction tube installation auxiliary device for semiconductor wafer manufacturing according to claim 6, characterized in that: The displacement assembly (4) comprises a first ball screw (401) and a second ball screw (403) which are symmetrically arranged front and back, and a first screw slider (402) is arranged on the outer wall of the first ball screw (401) and the second ball screw (403). The driving assembly (5) comprises a first motor (501), and a first belt pulley (502) is arranged at the output end of the first motor (501), and one side of the first belt pulley (502) is connected to the second belt pulley (503) via a belt.

8. The reaction tube installation auxiliary device for semiconductor wafer manufacturing according to claim 7, characterized in that: The lifting assembly (8) comprises a third ball screw (801), a fourth ball screw (802) is arranged on one side of the third ball screw (801), a third screw slider (803) is arranged on the outer walls of the third ball screw (801) and the fourth ball screw (802), and a second electric telescopic rod (607) is mounted on the outer wall of the third screw slider (803), a third belt pulley (805) is arranged at the upper end of the third ball screw (801), a second motor (804) is arranged at the upper end of the third belt pulley (805), a fourth belt pulley (806) is arranged at the upper end of the fourth ball screw (802), and the third belt pulley (805) is connected to the fourth belt pulley (806) via a belt.

9. The reaction tube installation auxiliary device for semiconductor wafer manufacturing according to claim 8, characterized in that: An electromagnet positioning platform (107) is provided on the upper surface of the low platform (102), and limiting grooves (108) are provided on the outer walls of both sides of the movable platform (1). The limiting assembly (9) comprises a mounting plate (901), an electric cylinder (902) is provided on the outer wall of the mounting plate (901), and a limiting clamp (903) is provided at the telescopic end of the electric cylinder (902) for engaging with the limiting groove (108) for limiting.

10. An auxiliary method for installing an auxiliary device for a reaction tube for semiconductor wafer manufacturing, which is implemented based on the auxiliary device for installing an auxiliary device for a reaction tube for semiconductor wafer manufacturing according to claim 9, characterized in that: The following steps are involved: Step 1: Place the reaction tube body (201) into the placement groove (104), move the movable platform (1) into the lifting assembly (8) via the universal wheel (103), extend the electric cylinder (902) forward, insert the limit clamp (903) into the limit groove (108), and fix the movable platform (1) in a limited position; Step 2: The second motor (804) drives the third pulley (805) and the third ball screw (801) to rotate, and drives the fourth pulley (806) and the fourth ball screw (802) to rotate through a belt connection. The third screw slider (803) is lowered by rotation, so that the diffusion device assembly (6) is lowered to the height of the low platform (102), and the second electric telescopic rod (607) is turned on. The second electric telescopic rod (607) puts the arc-shaped electromagnet (606) against the assembly tube body (601). The arc-shaped electromagnet (606) is energized to generate magnetism and is adsorbed and fixed to the assembly tube body (601). The second electric telescopic rod (607) extends forward again, so that the second electric telescopic rod (607) drives the assembly tube body (601) to move forward to the electromagnet positioning platform (107) of the low platform (102), and is magnetically fixed by the electromagnet positioning platform (107); Step 3: Turn on the first motor (501) to drive the first pulley (502) to rotate, and drive the second pulley (503) to rotate through a belt connection, so that the first ball screw (401) and the first ball screw slider (402) at the second ball screw (403) are displaced to the reaction tube body (201); Step 4: the electric telescopic arm (302) extends forward, driving the arc-shaped clamping block (304) to move and abut against the reaction tube body (201), the first electric telescopic rod (106) is turned on, the first electric telescopic rod (106) extends upward, and the telescopic end of the first electric telescopic rod (106) is inserted into the lifting slot (204), driving the reaction tube body (201) to move upward, and moving its assembly end out of the slot; Step 5: The reaction tube body (201) is moved onto the assembly tube body (601), the annular clamping strip (203) is aligned with the clamping groove (603), the electric telescopic arm (302) is retracted backwards, the annular clamping strip (203) is inserted into the clamping groove (603), and at the same time, the assembly block (205) is inserted into the assembly opening (604), so that the assembly assembly end (202) is assembled with the docking assembly end (602); Step 6: The electromagnet positioning platform (107) is powered off and demagnetized, and the second electric telescopic rod (607) is extended forward, so that the assembly rod (707) is inserted into the first through hole (206) and the second through hole (605), and the assembly block (205) is restricted and engaged at the assembly opening (604). After the insertion, the clamp (701) releases the end of the assembly rod (707), and the second electric telescopic rod (607) drives the engaged reaction tube to retract backward into the lifting assembly (8); Step 7: The third ball screw (801) and the fourth ball screw (802) drive the assembled reaction tube body (201) to rise, exposing the docking assembly end (602) at the lower end, and the electric cylinder (902) retracts to release the vehicle body, and the vehicle body moves out of the lifting assembly (8), leaving an internal lower space for the user to subsequently install the bottom reaction tube.

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