Double-layer spraying plate structure

Abstract

The invention discloses a double-layer spraying plate structure which comprises an upper spraying plate, a lower spraying plate and a sealing structure, and the upper spraying plate is detachably connected with the lower spraying plate; and a sealing structure is connected between the upper spraying plate and the lower spraying plate. By means of the structure, the problems of planeness deformation of the spraying plate, inaccuracy of small hole roundness and hole diameter and the like caused by a traditional welding technology can be solved, and meanwhile the long machining period and high machining cost caused by welding are avoided.

Description

Technical Field

[0001] The invention relates to the technical field of thin film deposition, and in particular to a double-layer spray plate structure. Background Art

[0002] In the prior art, the atomic layer deposition equipment in the semiconductor process usually adopts a double-layer spray plate design to ensure that two different reaction gases enter the spray device according to a predetermined ratio, and then mix and spray onto the wafer surface after the gas is discharged. This design method improves the distribution efficiency of the reaction gas to a certain extent, but there are also some technical problems. The upper and lower layers of the double-layer spray plate are usually sealed by EB welding or brazing. Although the sealing effect after welding is good, it is easy to cause the plane and aperture of the spray plate to deform during the high-temperature welding process. This deformation will affect the structural accuracy of the spray plate, thereby negatively affecting the stability of the process and the uniformity of gas distribution, and further affecting the quality and stability of the atomic layer deposition process. The welding process usually takes a long time, which not only increases the production cycle, but also is subject to structural limitations. When the distance between the two welding columns is close, the stability of the welding is more difficult to ensure, which may cause excessive stress generated during the welding process, further aggravating the deformation of the plate. In addition, defects that may occur during the welding process, such as pores, cracks, etc., will also affect the sealing and reliability of the device. The double-layer spray plate manufactured by welding often leaves particles or other contaminants between the two layers during the welding process and use. These particles may be difficult to completely remove through conventional cleaning methods, causing the interlayer position to become a potential source of contamination. During the atomic layer deposition process, the presence of particles may cause unnecessary deposition, affect the quality of the film, and even interfere with subsequent processes. Due to deformation and interlayer contamination problems during welding, the double-layer spray plate needs to be frequently disassembled and cleaned. Each disassembly and cleaning will increase the difficulty of equipment maintenance and may cause damage or wear to the equipment. Therefore, the maintenance of the spray plate is cumbersome and time-consuming, which brings inconvenience to production and operation, and thus affects the overall production efficiency and long-term stability of the equipment.

[0003] Therefore, it is necessary to design a new structure to avoid the problems of flatness deformation of the shower plate, roundness of the small holes and inaccurate aperture caused by the traditional welding process, while avoiding the long processing cycle and high processing cost caused by welding. Summary of the invention

[0004] The purpose of the present invention is to overcome the defects of the prior art and provide a double-layer spray plate structure.

[0005] To solve the above technical problems, the objective of the present invention is achieved through the following technical solutions: providing a double-layer spray plate structure, comprising: a spray upper plate, a spray lower plate and a sealing structure, wherein the spray upper plate is detachably connected to the spray lower plate; the sealing structure is connected between the spray upper plate and the spray lower plate.

[0006] Its further technical solution is: the sealing structure includes grooves and protrusions, the spray upper plate is provided with a plurality of the grooves, the grooves are provided with a first gas channel, the spray lower plate is provided with a plurality of the protrusions, the protrusions are provided with a second gas channel, and the protrusions are embedded in the grooves.

[0007] A further technical solution is as follows: the outer wall of the protrusion is inclined from top to bottom and is inclined toward the lower spray plate.

[0008] A further technical solution is as follows: the inclination angle of the outer wall of the protrusion is 5 degrees to 10 degrees.

[0009] Its further technical solution is: the sealing structure also includes a sealing ring, the end surface of the spray upper plate close to the spray lower plate is recessed in the direction away from the spray lower plate to form an installation groove, and the sealing ring is placed in the installation groove.

[0010] A further technical solution is: the installation groove is located on the outer periphery of the groove.

[0011] A further technical solution is as follows: the sealing structure further comprises a contact block, which is arranged on the end surface of the spray lower plate close to the spray upper plate; and the convex block is located above the contact block.

[0012] A further technical solution is as follows: an end surface of the spray upper plate close to the spray lower plate abuts against an upper end surface of the contact block.

[0013] Its further technical solution is: it also includes a detachable structure, and the spray upper plate and the spray lower plate are connected through the detachable structure.

[0014] A further technical solution is as follows: the detachable structure includes a fastener, a first mounting hole arranged on the spray upper plate, and a second mounting hole arranged on the spray lower plate, and the fastener is assembled in the first mounting hole and the second mounting hole.

[0015] The beneficial effects of the present invention compared with the prior art are as follows: the present invention avoids problems such as flatness deformation of the spray plate, inaccurate roundness and aperture of the small holes caused by traditional welding processes by arranging a multi-layer sealing structure between the spray upper plate and the spray lower plate, while avoiding the long processing cycle and high processing costs caused by welding; and the connection method between the spray upper plate and the spray lower plate is set to be a detachable connection method, so that the cleaning effect of the middle interlayer area of ​​the spray plate is optimized, thereby extending the service life of the spray plate.

[0016] The present invention is further described below in conjunction with the accompanying drawings and specific embodiments. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other accompanying drawings can be obtained based on these accompanying drawings without paying any creative work.

[0018] Figure 1 A schematic diagram of a three-dimensional structure of a double-layer spray plate structure provided by an embodiment of the present invention;

[0019] Figure 2 A schematic cross-sectional view of a double-layer spray plate structure provided by an embodiment of the present invention;

[0020] Figure 3 A schematic diagram of the three-dimensional structure of a spray upper plate provided in an embodiment of the present invention;

[0021] Figure 4 for Figure 3 A schematic diagram of the enlarged local structure at A;

[0022] Figure 5 A schematic diagram of the structure of a spray lower plate provided in an embodiment of the present invention;

[0023] Description of the symbols in the figure:

[0024] 10. Spray upper plate; 11. Groove; 12. First gas channel; 13. Mounting groove; 20. Spray lower plate; 21. Bump; 22. Second gas channel; 30. Sealing ring; 40. Contact block; 50. Fastener. DETAILED DESCRIPTION

[0025] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0026] It should be understood that when used in this specification and the appended claims, the terms "include" and "comprises" indicate the presence of described features, integers, steps, operations, elements and / or components, but do not exclude the presence or addition of one or more other features, integers, steps, operations, elements, components and / or combinations thereof.

[0027] It should also be understood that the terms used in this specification of the present invention are only for the purpose of describing specific embodiments and are not intended to limit the present invention. As used in the specification of the present invention and the appended claims, unless the context clearly indicates otherwise, the singular forms "a", "an" and "the" are intended to include plural forms.

[0028] It should be further understood that the term "and / or" used in the present description and the appended claims refers to any and all possible combinations of one or more of the associated listed items, and includes these combinations.

[0029] In existing semiconductor processes, the double-layer spray plate design improves the efficiency of reaction gas distribution, but the welding process easily causes deformation of the spray plate plane and aperture, affecting process stability and gas distribution uniformity. The stress and defects that may be generated during the welding process will further reduce the sealing and reliability of the device. Particles or contaminants that may be left behind during the welding process are difficult to remove, becoming a potential source of pollution and affecting the quality of the film. The double-layer spray plate requires frequent disassembly and cleaning, which increases the difficulty of equipment maintenance and may cause equipment damage or wear. Overall, the spray plate manufactured by welding brings an additional maintenance burden during use, affecting production efficiency and equipment stability.

[0030] To this end, an embodiment of the present invention provides a double-layer spray plate structure, which avoids problems such as spray plate flatness deformation, small hole roundness and inaccurate aperture caused by traditional welding processes, while avoiding the long processing cycle and high processing costs caused by welding.

[0031] Specifically, the spray upper plate 10 and the spray lower plate 20 of the double-layer spray plate structure cooperate with each other through the groove 11 and the protrusion 21, avoiding the flatness deformation and inaccurate aperture that may occur during the welding process. The side wall of the protrusion 21 of the spray lower plate 20 is designed with an inclined surface, so that the spray upper plate 10 can achieve self-joint sealing through gravity, avoiding geometric deformation caused by welding. The spray upper plate 10 and the spray lower plate 20 cooperate through the sealing ring 30 to ensure the second seal and reduce the leakage problem caused by poor welding. The spray upper plate 10 and the spray lower plate 20 are connected by a detachable structure such as bolts, and no welding is required, avoiding long-term processing and high costs during the welding process. The detachable design makes the interlayer area in the middle of the structure easy to clean, eliminates the dead corners that are difficult to clean during welding, and extends the service life of the spray plate. The bolt connection design reduces the thermal deformation caused by temperature changes during welding. Through precise matching and detachable structure, the dependence on high-precision welding is reduced, saving processing costs. It avoids the long cycle and complicated process brought by welding process, thus improving the overall production efficiency

[0032] In order to better understand the above technical solution, the above technical solution will be described in detail below in conjunction with the accompanying drawings and specific implementation methods.

[0033] See also Figure 1 to Figure 2 The above-mentioned double-layer spray plate structure includes: a spray upper plate 10, a spray lower plate 20 and a sealing structure. The spray upper plate 10 and the spray lower plate 20 are detachably connected; a sealing structure is connected between the spray upper plate 10 and the spray lower plate 20.

[0034] In this embodiment, a multi-layer sealing structure is arranged between the spray upper plate 10 and the spray lower plate 20, which can effectively avoid problems such as deformation of the flatness of the spray plate, inaccurate roundness of small holes and apertures caused by traditional welding processes, while avoiding the long processing cycle and high processing costs caused by welding.

[0035] In one embodiment, see Figures 2 to 5 The above-mentioned sealing structure includes grooves 11 and protrusions 21. The upper spray plate 10 is provided with a plurality of grooves 11, and the first gas channels 12 are arranged in the grooves 11. The lower spray plate 20 is provided with a plurality of protrusions 21, and the second gas channels 22 are arranged in the protrusions 21. The protrusions 21 are embedded in the grooves 11.

[0036] In this embodiment, the grooves 11 are located inside the spray upper plate 10 and are designed to be several in number, each of which is provided with a first gas channel 12. These grooves 11 not only serve as a part of the gas flow path, but are also used to accommodate the bumps 21 from the spray lower plate 20 to form a tight fitting relationship.

[0037] The bumps 21 are arranged on the spray lower plate 20, and there are also several bumps 21, each of which contains a second gas channel 22. The bumps 21 must not only accurately match the grooves 11 in the spray upper plate 10, but also the second gas channels 22 inside the bumps 21 must be connected with the first gas channels 12 in the grooves 11 to ensure that the gas can pass through the entire spray plate smoothly.

[0038] In one embodiment, see Figure 5 The outer wall of the protrusion 21 is inclined from top to bottom and is inclined toward the lower spray plate 20 .

[0039] In one embodiment, see Figure 5 The inclination angle of the outer wall of the above-mentioned protrusion 21 is 5 degrees to 10 degrees.

[0040] In this embodiment, the outer wall of the protrusion 21 has a specific angle of inclination from top to bottom, and the inclination angle is 5° to 10°, so that the protrusion 21 can be more tightly embedded in the groove 11. When the spray upper plate 10 and the spray lower plate 20 are assembled, this inclined surface helps to guide the protrusion 21 to be correctly positioned, and increases the contact area and improves the sealing performance. Of course, the shape of the groove 11 matches that of the protrusion 21, so the inner side wall of the groove 11 is also inclined.

[0041] In one embodiment, see Figures 2 to 3 The above-mentioned sealing structure also includes a sealing ring 30. The end surface of the spray upper plate 10 close to the spray lower plate 20 is recessed in a direction away from the spray lower plate 20 to form a mounting groove 13, and the sealing ring 30 is placed in the mounting groove 13.

[0042] In one embodiment, see Figure 3 and Figure 4 The above-mentioned mounting groove 13 is located on the outer periphery of the groove 11.

[0043] In this embodiment, in order to further enhance the sealing effect, a mounting groove 13 is provided on one side of the spray upper plate 10 close to the spray lower plate 20, and the mounting groove 13 is located at the periphery of the groove 11. A sealing ring 30 is placed in the mounting groove 13. When the spray upper plate 10 and the spray lower plate 20 are combined, the sealing ring 30 is compressed and deformed, filling the small gap between the two, thereby achieving excellent air tightness.

[0044] In one embodiment, see Figure 5 The above-mentioned sealing structure also includes a contact block 40 , which is arranged on the end surface of the spray lower plate 20 close to the spray upper plate 10 ; the protrusion 21 is located above the contact block 40 .

[0045] In one embodiment, see Figure 2 The end surface of the spray upper plate 10 close to the spray lower plate 20 abuts against the upper end surface of the contact block 40 .

[0046] In this embodiment, a contact block 40 is provided on one end surface of the spray lower plate 20 close to the spray upper plate 10, and the protrusion 21 is located above the contact block 40. The upper end surface of the contact block 40 directly contacts the spray upper plate 10, providing a stable support platform and also helping to achieve a better sealing effect.

[0047] In this embodiment, the contact surface between the spray upper plate 10 and the spray lower plate 20 is processed by machining or grinding to ensure that the roughness reaches Ra 0.4mm, thereby improving the contact effect of the sealing surface and ensuring the sealing reliability. The contact surface here is also a sealing surface, specifically including the surface formed by the upper end surface of the contact block 40 directly contacting the spray upper plate 10, and the surface formed by the contact between the protrusion 21 and the groove 11. In addition, the diameter of the groove 11 of the spray upper plate 10 can be designed differently according to different process requirements, and generally a diameter of φ0.8mm to φ1.5mm is adopted.

[0048] The precise matching of the groove 11 and the protrusion 21 and the application of multi-layer sealing means significantly improve the overall sealing and reliability of the double-layer spray plate. Compared with the traditional welding method, this method not only reduces the manufacturing difficulty, but also facilitates later maintenance and component replacement, and meets the needs of modern industrial production for efficient and flexible assembly.

[0049] In one embodiment, see Figure 2 The above-mentioned double-layer spray plate structure also includes a detachable structure, and the spray upper plate 10 and the spray lower plate 20 are connected through the detachable structure.

[0050] In one embodiment, see Figure 2 The above-mentioned detachable structure includes a fastener 50, a first mounting hole provided on the spray upper plate 10, and a second mounting hole provided on the spray lower plate 20, and the fastener 50 is assembled in the first mounting hole and the second mounting hole.

[0051] In this embodiment, the fastener 50 includes but is not limited to a bolt.

[0052] In this embodiment, the spray upper plate 10 is connected to the spray lower plate 20 through a detachable structure, specifically, a connection system formed by a fastener 50 such as but not limited to a bolt, a first mounting hole located on the spray upper plate 10, and a second mounting hole located on the spray lower plate 20. This design is not only convenient for assembly and disassembly, but also allows adjustment or replacement of components as needed, greatly facilitating maintenance and upgrading of the equipment. The detachable design optimizes the cleaning effect of the middle interlayer area of ​​the spray plate, thereby extending the service life of the spray plate.

[0053] In the double-layer spray plate structure of this embodiment, first, the spray upper plate 10 and the spray lower plate 20 are connected by a sealing structure to avoid thermal deformation during welding. Secondly, the sealing structure of the groove 11 and the protrusion 21 is adopted to ensure the precise matching of the structure and reduce errors. Third, the inclined design of the outer wall of the protrusion 21 makes the plate joint more precise and reduces the unevenness in processing. Fourth, the detachable structure design facilitates the disassembly and assembly of the spray plate and simplifies the process. Finally, the overall design avoids the long processing cycle and high cost during welding, thereby improving production efficiency and reducing manufacturing costs.

[0054] The above-mentioned double-layer spray plate structure avoids problems such as flatness deformation of the spray plate, inaccurate roundness and aperture of the small holes caused by traditional welding processes by setting a multi-layer sealing structure between the spray upper plate 10 and the spray lower plate 20, while avoiding the long processing cycle and high processing costs caused by welding; and the connection method between the spray upper plate 10 and the spray lower plate 20 is set to be a detachable connection method, so that the cleaning effect of the middle interlayer area of ​​the spray plate is optimized, thereby extending the service life of the spray plate.

[0055] The above is only a specific embodiment of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can easily think of various equivalent modifications or replacements within the technical scope disclosed by the present invention, and these modifications or replacements should be included in the protection scope of the present invention. Therefore, the protection scope of the present invention shall be based on the protection scope of the claims.

Claims

1. A double-layer spray plate structure, characterized in that: include: A spray upper plate, a spray lower plate and a sealing structure, wherein the spray upper plate is detachably connected to the spray lower plate; The sealing structure is connected between the spray upper plate and the spray lower plate.

2. A double-layer spray plate structure according to claim 1, characterized in that: The sealing structure includes grooves and bumps. The upper spray plate is provided with a plurality of the grooves, in which a first gas channel is provided. The lower spray plate is provided with a plurality of the bumps, in which a second gas channel is provided. The bumps are embedded in the grooves.

3. A double-layer spray plate structure according to claim 2, characterized in that: The outer wall of the protrusion is inclined from top to bottom and is inclined toward the spray lower plate.

4. A double-layer spray plate structure according to claim 3, characterized in that: The inclination angle of the outer wall of the protrusion is 5 degrees to 10 degrees.

5. A double-layer spray plate structure according to claim 2, characterized in that: The sealing structure further comprises a sealing ring. The end surface of the spray upper plate close to the spray lower plate is recessed in a direction away from the spray lower plate to form a mounting groove. The sealing ring is placed in the mounting groove.

6. A double-layer spray plate structure according to claim 5, characterized in that: The mounting groove is located at the outer periphery of the groove.

7. A double-layer spray plate structure according to any one of claims 2 to 6, characterized in that: The sealing structure further comprises a contact block, which is arranged on the end surface of the spray lower plate close to the spray upper plate; the convex block is located above the contact block.

8. A double-layer spray plate structure according to claim 7, characterized in that: The end surface of the spray upper plate close to the spray lower plate abuts against the upper end surface of the contact block.

9. The double-layer spray plate structure according to claim 1, characterized in that: It also includes a detachable structure, and the spray upper plate and the spray lower plate are connected through the detachable structure.

10. A double-layer spray plate structure according to claim 9, characterized in that: The detachable structure includes a fastener, a first mounting hole arranged on the spray upper plate, and a second mounting hole arranged on the spray lower plate, and the fastener is assembled in the first mounting hole and the second mounting hole.

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