Cleaning agent and cleaning method for matrix integrated target material

Abstract

The invention provides a cleaning agent and a cleaning method of a matrix integrated target material. The cleaning agent comprises polyoxyethylene ether, vegetable oil acyl lactate, glutamate, a complexing agent, an anti-rust additive, a corrosion inhibitor and water. Wherein the mass ratio of the polyoxyethylene ether to the plant oil acyl sodium lactate is (1.5-2): 1; the mass ratio of the glutamate to the vegetable oil acyl sodium lactate is (0.2-0.6): 1, and the cleaning method comprises the following steps: mixing the cleaning agent and cleaning cloth according to the ratio of 5-8mL / piece of cleaning cloth, and cleaning the surface of the matrix integrated target material to obtain the cleaned target material. According to the invention, the cleaning turnover rate of the matrix integrated target material can be improved, and the reject ratio of abnormal products is reduced.

Description

Technical Field

[0001] The present invention relates to the technical field of target materials, and in particular to a cleaning agent and a cleaning method for a matrix integrated target material. Background Art

[0002] During the sputtering process, if there are foreign objects such as oil, dust, granular impurities, etc. attached to the surface of the target material, arc discharge will occur, causing part of the target material to become molten and produce splashes that fly in all directions. The splashes adhere to the substrate or to the already formed coating, which will reduce the quality of the formed coating, thereby causing a decrease in the product qualification rate and an increase in production costs.

[0003] Therefore, the cleanliness of the target material during the sputtering coating process is very important for the quality of the coating formed by sputtering, the qualified rate of the product and the production cost. In order to ensure that the target material has sufficient cleanliness during the production process, the target material needs to be fully cleaned.

[0004] CN107413715A discloses a method for cleaning a target material, which uses a high-pressure cleaning process to spray a cleaning liquid on the target material. The high-pressure cleaning uses a high-pressure gas as a carrier, and the pressure of the high-pressure gas is 6-8MPa. During the cleaning process of this method, the cleaning liquid needs to be sprayed under the action of the high-pressure gas. The consumption of the gas and the cleaning liquid is too large, and a large amount of organic wastewater is easily generated, which is not conducive to the subsequent recovery and treatment of the cleaning liquid.

[0005] CN112452946A discloses a method for cleaning a target material, comprising the following steps: 1) a placement step, wherein the target material to be cleaned is placed flat on the placement surface of a cleaning table of a cleaning device, the dry ice cleaning device is provided with a dry ice spray gun group, the dry ice spray gun group is provided with at least one dry ice spray gun, the muzzle of the dry ice spray gun faces the placement surface, the dry ice spray gun group and the cleaning table move relative to each other, the target surface or the opposite surface of the target surface is the main cleaning surface, and the main cleaning surface faces the muzzle of the dry ice spray gun; 2) an adjustment and setting step, wherein the cleaning device is provided with a control unit, the control unit sets the spray parameters of the dry ice spray gun, and the relative movement stroke of the dry ice spray gun group or the cleaning table is set by the control unit. When the direction of relative movement between the dry ice spray gun group and the cleaning table is the length direction of the target material, the relative movement stroke of the dry ice spray gun group or the cleaning table is greater than or equal to the length of the target material, and according to the width of the target material The number of dry ice spray guns is set, and the spray range of the dry ice spray gun group covers the width of the target material; when the direction of relative movement between the dry ice spray gun group and the cleaning table is the width direction of the target material, the relative movement stroke of the dry ice spray gun group or the cleaning table is greater than or equal to the width of the target material, and the number of dry ice spray guns is set according to the length of the target material, and the spray range of the dry ice spray gun group covers the length of the target material; 3) dry ice cleaning step, start the cleaning equipment, the dry ice spray gun group and the cleaning table move relative to each other, so that the dry ice spray gun moves from one side of the target material to the other side of the target material, and the dry ice spray gun moves while the main cleaning surface of the target material is sprayed with dry ice, and the dry ice sprayed by the dry ice spray gun hits the surface of the target material, so that the dirt on the surface of the target material falls off, 4) flip cleaning step, flip the opposite side of the cleaned main cleaning surface and face it towards the muzzle of the dry ice spray gun, repeat 3) dry ice cleaning step, so that the entire target cleaning process is controlled to complete the cleaning within 45 minutes. However, this method takes a long time, has a large demand for dry ice, and is costly.

[0006] CN110670083A discloses a method for cleaning a target material, which comprises the following steps: (1) coating a cleaning agent on the surface of the target material and then scrubbing it; (2) ultrasonically cleaning the scrubbed target material; (3) using an inert gas to blow dry the moisture on the surface of the target material after ultrasonic cleaning, and then performing a vacuum drying process to obtain a cleaned target material. The method for cleaning the target material does not require the use of a high-pressure water gun to clean the target material, the cleaning method is simple, and the consumption of the cleaning agent is low, which is conducive to reducing the cleaning cost. However, the cleaning method cannot effectively control the residue of the cleaning agent on the surface of the target material, and further improvements are needed to the cleaning method.

[0007] Therefore, it is necessary to provide a cleaning method that can improve cleaning efficiency, avoid residues on the surface of the target material, and improve product yield. Summary of the invention

[0008] In order to solve the above technical problems, the present invention provides a cleaning agent and a cleaning method for a matrix integrated target material, which can solve the problems of residual cleaning agent on the surface of the existing target material, large amount of cleaning agent used, and low product yield after cleaning.

[0009] To achieve this object, the present invention adopts the following technical solutions:

[0010] In a first aspect, the present invention provides a cleaning agent, comprising polyoxyethylene ether, vegetable oil acyl lactylate, glutamate, a chelating agent, an anti-rust additive, a corrosion inhibitor and water; wherein the mass ratio of the polyoxyethylene ether to the vegetable oil acyl lactylate is 1.5 to 2:1; and the mass ratio of the glutamate to the vegetable oil acyl lactylate is 0.2 to 0.6:1.

[0011] It is worth noting that the cleaning agent of the present invention is a compound of polyoxyethylene ether, vegetable oil acyl lactylate and glutamate, wherein a large number of ether bonds of polyoxyethylene ether can provide hydrophilic groups, so that the cleaning agent has excellent solubility in water, and the long-chain fatty acid groups in the vegetable oil acyl lactylate are lipophilic and can interact with dirt such as grease, helping to emulsify the dirt on the surface of the target material and disperse it in water, and the lactic acid part is hydrophilic and can interact with water to reduce the surface tension of water, so that the cleaning agent has better solubility in water and promotes the removal of dirt. In addition; at the same time, the amino group in glutamate and the ether group in polyoxyethylene ether can form hydrogen bonds with water, increasing the solubility of the cleaning agent in water, and the carboxyl group can cooperate with the lactic acid in the vegetable oil acyl lactylate to improve the removal effect of grease on the target surface, and the long-chain groups of polyoxyethylene ether and vegetable oil acyl lactylate can also wrap and carry dust and impurity ions on the target surface, and can achieve efficient cleaning on the basis of less cleaning agent usage, and these cleaning agents have a general effect on the metal surface, and there is almost no residue on the target surface.

[0012] Wherein, the mass ratio of polyoxyethylene ether to the sodium vegetable oleyl lactylate is 1.5 to 2:1, for example, it can be 1.5:1, 1.56:1, 1.62:1, 1.67:1, 1.73:1, 1.78:1, 1.84:1, 1.89:1, 1.95:1 or 2:1, etc.

[0013] The mass ratio of the glutamate to the sodium vegetable oleyl lactylate is 0.2 to 0.6:1, for example, it can be 0.2:1, 0.25:1, 0.29:1, 0.34:1, 0.38:1, 0.43:1, 0.47:1, 0.52:1, 0.56:1 or 0.6:1, etc.

[0014] The present invention needs to control the mass ratio of polyoxyethylene ether, sodium vegetable oil acyl lactylate and glutamate within the above range to achieve a better cleaning effect, otherwise there will be problems of poor cleaning effect or residual cleaning agent.

[0015] Preferably, the vegetable oleyl lactylate is sodium vegetable oleyl lactylate.

[0016] Preferably, the glutamate is sodium glutamate.

[0017] Preferably, the mass fraction of vegetable oil acyl lactylate in the cleaning agent is 0.1-0.4wt%, for example, it can be 0.1wt%, 0.14wt%, 0.17wt%, 0.2wt%, 0.24wt%, 0.27wt%, 0.3wt%, 0.34wt%, 0.37wt% or 0.4wt%, etc.

[0018] Preferably, the mass fraction of polyoxyethylene ether in the cleaning agent is 0.15-0.6wt%, for example, it can be 0.1.5wt%, 0.2wt%, 0.25wt%, 0.3wt%, 0.35wt%, 0.4wt%, 0.45wt%, 0.5wt%, 0.55wt% or 0.6wt%, etc.

[0019] Preferably, the molecular weight of the polyoxyethylene ether is 200-1000, for example, 200, 250, 300, 350, 400, 500, 600, 700, 800, 900 or 1000.

[0020] Preferably, the mass fraction of glutamate in the cleaning agent is 0.02-0.25wt%, for example, it can be 0.02wt%, 0.05wt%, 0.08wt%, 0.1wt%, 0.13wt%, 0.15wt%, 0.18wt%, 0.2wt%, 0.23wt% or 0.25wt%, etc.

[0021] Preferably, the mass fraction of the complexing agent in the cleaning agent is 2-6wt%, for example, it can be 2wt%, 2.5wt%, 2.9wt%, 3.4wt%, 3.8wt%, 4.3wt%, 4.7wt%, 5.2wt%, 5.6wt% or 6wt%.

[0022] Preferably, the mass fraction of the anti-rust additive in the cleaning agent is 1 to 5wt%, for example, it can be 1wt%, 1.5wt%, 1.9wt%, 2.4wt%, 2.8wt%, 3.3wt%, 3.7wt%, 4.2wt%, 4.6wt% or 5wt%.

[0023] Preferably, the mass fraction of the corrosion inhibitor in the cleaning agent is 0.5-0.8wt%, for example, it can be 0.5wt%, 0.54wt%, 0.57wt%, 0.6wt%, 0.64wt%, 0.67wt%, 0.7wt%, 0.74wt%, 0.77wt% or 0.8wt%.

[0024] Preferably, the complexing agent comprises ethylenediaminetetraacetic acid and citric acid.

[0025] Preferably, the mass ratio of ethylenediaminetetraacetic acid to citric acid is 1.2 to 1.5:1, for example, it can be 1.2:1, 1.24:1, 1.27:1, 1.3:1, 1.34:1, 1.37:1, 1.4:1, 1.44:1, 1.47:1 or 1.5:1, etc.

[0026] The present invention further preferably uses the complexing agent in the above mass ratio to achieve a better complexing effect on impurities on the surface of the target material. Generally speaking, the impurity ions on the surface of the target material include substances such as iron oxide.

[0027] Preferably, the anti-rust additive includes benzotriazole and / or allylamine.

[0028] Preferably, the corrosion inhibitor comprises a polyacrylate, preferably sodium polyacrylate.

[0029] The present invention further prefers that the above two substances are selected as the anti-rust additive and the corrosion inhibitor, and the two substances cooperate with polyoxyethylene ether, vegetable oil acyl lactylate and glutamate to significantly improve the cleaning effect.

[0030] In a second aspect, the present invention provides a method for cleaning a matrix integrated target material, wherein the cleaning method is performed using the cleaning agent described in the first aspect.

[0031] Preferably, the cleaning method comprises: mixing the cleaning agent and the clean cloth in a ratio of 5 to 8 mL / clean cloth, cleaning the surface of the matrix integrated target material, and obtaining a cleaned target material.

[0032] The present invention adopts the cleaning agent of the first aspect, which can reduce the usage of the cleaning agent. An efficient cleaning effect can be achieved by only using a ratio of cleaning agent to clean cloth of 5 to 8 mL / sheet, and liquid residue is effectively controlled. The precise ratio of clean cloth and IPA liquid is fully utilized, thereby improving the cleaning turnover rate of matrix-integrated target materials and reducing the defective rate of abnormal products.

[0033] Specifically, the ratio of cleaning agent to clean cloth is 5 to 8 mL / sheet, for example, it can be 5 mL / sheet, 5.3 mL / sheet, 5.4 mL / sheet, 5.6 mL / sheet, 5.8 mL / sheet, 6.0 mL / sheet, 6.2 mL / sheet, 6.5 mL / sheet, 6.8 mL / sheet, 7.0 mL / sheet, 7.2 mL / sheet, 7.5 mL / sheet or 8 mL / sheet, etc.

[0034] Preferably, the material of the matrix integrated target includes any one of aluminum, aluminum alloy, copper, copper alloy, titanium, titanium alloy, molybdenum or molybdenum alloy.

[0035] It is worth noting that the surface of the matrix integrated target of the present invention has impurities such as grease, dust, and iron oxide.

[0036] Compared with the prior art, the present invention has at least the following beneficial effects:

[0037] (1) The cleaning agent provided by the present invention can significantly improve the cleaning effect and reduce the amount of cleaning agent used by using a compound of polyoxyethylene ether, vegetable oil acyl lactylate and glutamate, thereby reducing the residual phenomenon of the cleaning agent after cleaning. The residual rate of organic matter on the surface of the target material after cleaning is within 20 ppm, which has almost no negative impact on the surface of the target material, and the cleaning pass rate reaches 100%;

[0038] (2) The cleaning method of the matrix integrated target material provided by the present invention can significantly improve the yield rate of the matrix integrated target material cleaning, and has broad application prospects. DETAILED DESCRIPTION

[0039] For the convenience of understanding the present invention, the present invention lists the following embodiments. It should be understood by those skilled in the art that the embodiments are only to help understand the present invention and should not be regarded as specific limitations of the present invention.

[0040] Example 1

[0041] This embodiment provides a cleaning agent, which includes the following components:

[0042]

[0043] Example 2

[0044] This embodiment provides a cleaning agent, which includes the following components:

[0045] Example 3

[0046] This embodiment provides a cleaning agent, which includes the following components:

[0047] Example 4

[0048] This embodiment provides a cleaning agent, which includes the following components:

[0049]

[0050]

[0051] Example 5

[0052] This embodiment provides a cleaning agent, which is the same as that of Embodiment 1 except that ethylenediaminetetraacetic acid is replaced by aminotriacetic acid, and will not be described in detail here.

[0053] Example 6

[0054] This embodiment provides a cleaning agent, which is the same as that of Embodiment 1 except that the mass fraction of ethylenediaminetetraacetic acid is adjusted to 3.5% and the mass ratio of ethylenediaminetetraacetic acid to citric acid is 1.59:1, and will not be described again.

[0055] Example 7

[0056] This embodiment provides a cleaning agent, which is the same as that of Embodiment 1 except that the mass fraction of ethylenediaminetetraacetic acid is adjusted to 2.0% and the mass ratio of ethylenediaminetetraacetic acid to citric acid is 0.91:1, and will not be described in detail here.

[0057] Comparative Example 1

[0058] This comparative example provides a cleaning agent, which is the same as Example 1 except that the mass fraction of polyoxyethylene ether is adjusted to 0.2% and the mass ratio of polyoxyethylene ether to sodium vegetable oil acyl lactylate is 1:1, and the rest is not repeated here.

[0059] Comparative Example 2

[0060] This comparative example provides a cleaning agent, which is the same as Example 1 except that the mass fraction of polyoxyethylene ether is adjusted to 0.6% and the mass ratio of polyoxyethylene ether to sodium vegetable oil acyl lactylate is 3:1, and the rest is not repeated here.

[0061] Comparative Example 3

[0062] This comparative example provides a cleaning agent, which is the same as Example 1 except that the mass fraction of sodium glutamate is adjusted to 0.02% and the mass ratio of sodium glutamate to sodium vegetable oleyl lactylate is 0.1:1, and the rest is not repeated here.

[0063] Comparative Example 4

[0064] This comparative example provides a cleaning agent, which is the same as Example 1 except that the mass fraction of sodium glutamate is adjusted to 0.2% so that the mass ratio of sodium glutamate to sodium vegetable oleyl lactylate is 1:1, and the rest is not repeated here.

[0065] Comparative Example 5

[0066] This comparative example provides a cleaning agent, which is the same as Example 1 except that the polyoxyethylene ether is replaced by polyoxypropylene ether 1000, and is not described again.

[0067] Comparative Example 6

[0068] This comparative example provides a cleaning agent, which is the same as Example 1 except that sodium vegetable oil acyl lactylate is replaced by sodium stearate, and will not be described in detail here.

[0069] Comparative Example 7

[0070] This comparative example provides a cleaning agent, which is the same as Example 1 except that sodium glutamate is not added, and will not be described in detail here.

[0071] In order to facilitate comparative experiments, the specific cleaning process of the following application examples and application example comparison examples is as follows:

[0072] After mixing the cleaning agent with a clean cloth in proportion, use the first clean cloth to clean the target for the first time for 3 minutes.

[0073] Application Example 1

[0074] This application example provides a method for cleaning a matrix-integrated target material, which includes: mixing a cleaning agent and a clean cloth in a ratio of 6 mL / clean cloth, cleaning the surface of the matrix-integrated target material (pure aluminum target material) for 3 minutes, and drying it in a nitrogen atmosphere at a temperature of 80°C for 28 minutes to obtain a cleaned target material.

[0075] Application Example 2

[0076] This application example provides a method for cleaning a matrix-integrated target material, which includes: mixing a cleaning agent and a clean cloth in a ratio of 8 mL / clean cloth, cleaning the surface of the matrix-integrated target material (pure copper target material) for 4 minutes, and drying it in a nitrogen atmosphere at a temperature of 65°C for 25 minutes to obtain a cleaned target material.

[0077] Application Example 3

[0078] This application example provides a method for cleaning a matrix-integrated target material, which includes: mixing a cleaning agent and a clean cloth in a ratio of 7 mL / clean cloth, cleaning the surface of the matrix-integrated target material (pure titanium target material) for 2 minutes, and drying it in a nitrogen atmosphere at a temperature of 70°C for 35 minutes to obtain a cleaned target material.

[0079] Application Example 4

[0080] This application example provides a method for cleaning a matrix-integrated target material, which comprises: mixing a cleaning agent and a clean cloth in a ratio of 5 mL / clean cloth, cleaning the surface of a matrix-integrated target material (molybdenum-titanium target material, 30 wt % molybdenum, 70 wt % titanium) for 5 minutes, and drying the target material in a nitrogen atmosphere at a temperature of 85°C for 30 minutes to obtain a cleaned target material.

[0081] Application Examples 5 to 7 and Comparative Application Examples 1 to 7

[0082] Application Examples 5 to 7 and Application Comparative Examples 1 to 7 provide a method for cleaning a matrix-integrated target material. The cleaning method for the matrix-integrated target material is the same as Application Example 1 except that the cleaning agents in Examples 5 to 7 and Comparative Examples 1 to 7 are used respectively, and will not be repeated here.

[0083] Test method: The cleaning agent on the surface of the target material after drying is tested. The test method is to rinse the target material with 100mL of water and detect the amount of organic residue therein; and the surface finish Ra≤0.10μm is used as the qualified standard. 50 target materials are processed according to the method of each embodiment, and the cleaning qualified rate is calculated.

[0084] The test results of the above application examples and application comparison examples are shown in Table 1.

[0085] Table 1

[0086] Organic matter residue ppm Cleaning pass rate Application Example 1 15 100％ Application Example 2 20 100％ Application Example 3 12 100％ Application Example 4 13 100％ Application Example 5 16 62％ Application Example 6 18 70％ Application Example 7 20 78％ Application Comparative Example 1 280 80％ Application Comparative Example 2 320 70％ Application Comparative Example 3 150 50％ Application Comparative Example 4 35 56％ Application Comparative Example 5 580 86％ Application Comparative Example 6 600 42％ Application Comparative Example 7 170 46％

[0087] From Table 1 we can see that:

[0088] (1) It can be seen from the application examples 1 to 4 that the cleaning agent provided by the present invention has the advantages of short cleaning time, low cleaning agent residue rate, and high cleaning pass rate. The residual rate of organic matter on the surface of the target material after cleaning is within 20 ppm, which has almost no negative impact on the surface of the target material, and the cleaning pass rate reaches 100%;

[0089] (2) It can be seen from the combined application examples 1 and 5-7 that the selection of complexing agents and the use of two specific complexing agents for compounding have a significant effect on improving the cleaning pass rate;

[0090] (3) It can be seen from the comprehensive application example 1 and the application comparison examples 1 to 7 that the compound addition of polyoxyethylene ether, sodium vegetable oil acyl lactylate and sodium glutamate and the limited proportion have a significant impact on the cleaning agent residue and the cleaning effect. The present invention has a better cleaning effect by selecting the three as a compound and limiting the proportion relationship of the three within a reasonable range.

[0091] The present invention illustrates the detailed features of the present invention through the above embodiments, but the present invention is not limited to the above detailed features, that is, it does not mean that the present invention must rely on the above detailed features to be implemented. Those skilled in the art should understand that any improvement to the present invention, equivalent replacement of the technical features selected by the present invention, addition of auxiliary technical features, selection of specific methods, etc., all fall within the protection scope and disclosure scope of the present invention.

Claims

1. A cleaning agent, characterized in that: The cleaning agent comprises polyoxyethylene ether, vegetable oil acyl lactylate, glutamate, a complexing agent, an anti-rust additive, a corrosion inhibitor and water; Wherein, the mass ratio of the polyoxyethylene ether to the sodium vegetable oil acyl lactylate is 1.5 to 2:1; The mass ratio of the glutamate to the sodium vegetable oleyl lactylate is 0.2-0.6:

1.

2. The cleaning agent according to claim 1, characterized in that The vegetable oleyl lactylate is sodium vegetable oleyl lactylate; Preferably, the glutamate is sodium glutamate.

3. The cleaning agent according to claim 1 or 2, characterized in that The mass fraction of vegetable oil acyl lactylate in the cleaning agent is 0.1 to 0.4 wt %; Preferably, the mass fraction of polyoxyethylene ether in the cleaning agent is 0.15-0.6wt%; Preferably, the mass fraction of glutamate in the cleaning agent is 0.02-0.25 wt %.

4. The cleaning agent according to any one of claims 1 to 3, characterized in that The mass fraction of the complexing agent in the cleaning agent is 2 to 6 wt %; Preferably, the mass fraction of the anti-rust additive in the cleaning agent is 1 to 5 wt%; Preferably, the mass fraction of the corrosion inhibitor in the cleaning agent is.

5. The cleaning agent according to any one of claims 1 to 4, characterized in that The complexing agent includes ethylenediaminetetraacetic acid and citric acid; Preferably, the mass ratio of EDTA to citric acid is 1.2-1.5:

1.

6. The cleaning agent according to any one of claims 1 to 5, characterized in that The anti-rust additive includes benzotriazole and / or allylamine.

7. The cleaning agent according to any one of claims 1 to 6, characterized in that The corrosion inhibitor comprises polyacrylate, preferably sodium polyacrylate.

8. A method for cleaning a matrix integrated target, characterized in that: The cleaning method is carried out using the cleaning agent described in any one of claims 1 to 7.

9. The cleaning method according to claim 8, characterized in that: The cleaning method comprises: mixing a cleaning agent and a clean cloth in a ratio of 5 to 8 mL per clean cloth, cleaning the surface of the matrix integrated target material, and obtaining a cleaned target material.

10. The cleaning method according to claim 8 or 9, characterized in that: The material of the matrix integrated target includes any one of aluminum, aluminum alloy, copper, copper alloy, titanium, titanium alloy, molybdenum or molybdenum alloy.

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