Molecular pump, reaction cavity and thin film deposition equipment

Abstract

The invention discloses a molecular pump, a reaction cavity and thin film deposition equipment. The molecular pump comprises a pump shell, stator blades and rotor blades. A cavity is formed in the pump shell; the stator blades are arranged on the inner wall of the cavity; the rotor blades are arranged in the cavity and are staggered with the stator blades; wherein the stator blade and / or the rotor blade are / is provided with a heat-insulating corrosion-resistant protective layer. According to the invention, the heat-insulating and corrosion-resistant protective layer is arranged on the surface of the stator blade and / or the rotor blade, so that the stator blade and / or the rotor blade have high-temperature-resistant and corrosion-resistant effects.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor devices, and in particular to a molecular pump, a reaction chamber and a thin film deposition device. Background Art

[0002] When performing thin film deposition processes, thin film deposition equipment such as HDPCVD needs to introduce a large amount of reaction gas into the reaction chamber, and use a molecular pump to pump the reaction chamber to a high vacuum environment. Then, the reaction gas dissociates and undergoes a chemical reaction under the action of the radio frequency field to complete the thin film deposition process. Among them, high-flow reaction gas and high vacuum in the reaction chamber will directly affect the film deposition rate and sputtering rate, and play an important role in improving wafer production capacity.

[0003] Due to the limitation of the molecular pump's pumping capacity, under some conditions of large-flow process gas, the molecular pump load increases, the temperature rise increases, and even reaches its upper temperature limit. Due to the internal protection mechanism of the molecular pump, the molecular pump needs to slow down, resulting in the forced shutdown of the process. This shortcoming in pumping capacity limits the further improvement of wafer production capacity. In addition, the higher temperature inside the pump will also cause the rotor blades or stator blades to produce large high-temperature deformation, resulting in a smaller gap between the rotor blades and the stator blades, or even scratches, seriously affecting the safety of the molecular pump.

[0004] In addition, when the thin film deposition equipment is performing cleaning operations, a large amount of fluoride ions will enter the molecular pump. The high temperature and high concentration of fluoride ions will gradually corrode the rotor blades, stator blades and other pump components in the molecular pump, shortening the service life of the pump. Not only does it require frequent replacement of pump components, which will increase maintenance costs, but it will also produce fluoride due to corrosion, contaminating the chamber and wafers, causing immeasurable losses. Summary of the invention

[0005] The purpose of the present invention is to provide a molecular pump, a reaction chamber and a thin film deposition device, aiming to solve the problem that the existing molecular pump is affected by high temperature and high corrosion, resulting in reduced pumping performance and service life.

[0006] In order to solve the above technical problems, the object of the present invention is achieved through the following technical solutions: a molecular pump is provided, comprising:

[0007] A pump housing having a cavity therein;

[0008] stator blades, arranged on the inner wall of the cavity;

[0009] Rotor blades are disposed in the cavity and are staggered with the stator blades;

[0010] Wherein, the stator blades and / or rotor blades are provided with a heat-insulating and corrosion-resistant protective layer.

[0011] Furthermore, the molecular pump further comprises:

[0012] A rotor driving member, used for driving the rotor blades to rotate;

[0013] Wherein, a heat conduction member made of phase change material is arranged inside the rotor driving member.

[0014] Furthermore, the heat-insulating and corrosion-resistant protective layer comprises:

[0015] A thermal barrier coating applied to the surface of the stator blades and / or rotor blades;

[0016] The corrosion-resistant coating is coated on the surface of the thermal barrier coating.

[0017] Furthermore, the thermal barrier coating comprises:

[0018] A metal bonding layer, coated on the surface of the stator blades and / or rotor blades;

[0019] The ceramic top layer is coated on the surface of the metal bonding layer.

[0020] Furthermore, the corrosion-resistant coating includes one of an yttrium oxide coating and a polytetrafluoroethylene coating.

[0021] Furthermore, a cooling channel is provided on the inner wall of the pump housing, and the cooling channel corresponds to the outer periphery of the rotor driving member, the stator blades and the rotor blades.

[0022] Furthermore, the cooling channel adopts one of a wave cooling channel and a pulse cooling channel.

[0023] Furthermore, the sub-blades and / or rotor blades are made of aluminum alloy.

[0024] An embodiment of the present invention further provides a reaction chamber, comprising the molecular pump as described above, wherein the molecular pump is used to perform gas extraction processing inside the reaction chamber.

[0025] An embodiment of the present invention further provides a thin film deposition device, comprising the reaction chamber as described above.

[0026] The beneficial effects of the embodiments of the present invention are:

[0027] A heat-insulating and corrosion-resistant protective layer is arranged on the surface of the stator blades and / or the rotor blades, so that the stator blades and / or the rotor blades have the functions of high temperature resistance and corrosion resistance.

[0028] A heat conducting member made of phase change material is arranged in the rotor driving member, which can absorb the heat generated by the rotor blades when they are working, so as to achieve a cooling effect.

[0029] A cooling channel is arranged in the shell, and the cooling channel corresponds to the outer periphery of the rotor driving member, the stator blades and the rotor blades, so as to improve the overall heat dissipation effect of the molecular pump. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0031] Figure 1 A schematic cross-sectional structure diagram of a molecular pump provided in an embodiment of the present invention.

[0032] Figure 2 The embodiment of the present invention provides Figure 1 Schematic diagram of the local structure in.

[0033] Description of the symbols in the figure:

[0034] 1. Pump casing; 11. Cooling channel; 2. Stator blades; 3. Rotor blades; 4. Heat insulation and corrosion resistant protective layer; 5. Base; 6. Motor; 7. Rotating shaft; 71. Heat conduction parts. DETAILED DESCRIPTION

[0035] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0036] It should be understood that when used in this specification and the appended claims, the terms "include" and "comprises" indicate the presence of described features, integers, steps, operations, elements and / or components, but do not exclude the presence or addition of one or more other features, integers, steps, operations, elements, components and / or combinations thereof.

[0037] It should also be understood that the terms used in this specification of the present invention are only for the purpose of describing specific embodiments and are not intended to limit the present invention. As used in the specification of the present invention and the appended claims, the singular forms "a", "an" and "the" are intended to include plural forms unless the context clearly indicates otherwise.

[0038] It should be further understood that the term "and / or" used in the present description and the appended claims refers to any and all possible combinations of one or more of the associated listed items, and includes these combinations.

[0039] See also Figure 1 and Figure 2 , Figure 1 A schematic cross-sectional structure diagram of a molecular pump provided in an embodiment of the present invention. Figure 2 The embodiment of the present invention provides Figure 1 Schematic diagram of the local structure in.

[0040] An embodiment of the present invention provides a molecular pump, comprising:

[0041] A pump housing 1 having a cavity inside;

[0042] Stator blades 2, arranged on the inner wall of the cavity;

[0043] The rotor blades 3 are arranged in the cavity and staggered with the stator blades 2;

[0044] Wherein, a heat-insulating and corrosion-resistant protective layer 4 is provided on the stator blades 2 and / or the rotor blades 3 .

[0045] In this embodiment, the structure of the pump casing 1 is cylindrical, and the cavity inside the pump casing 1 is also cylindrical; the stator blades 2 are annular, and a plurality of stator blades 2 are provided and are coaxially spaced in sequence along the axial direction on the inner wall of the cavity; a plurality of rotor blades 3 are provided and are staggered with the stator blades 2.

[0046] In this embodiment, by providing a heat-insulating and corrosion-resistant protective layer 4 on the stator blades 2 and / or the rotor blades 3, the temperature of the components in the molecular pump can be effectively reduced, and the upper temperature limit under the condition of large flow process gas can be increased, thereby ensuring the pumping capacity of the molecular pump. At the same time, the ability of the molecular pump to resist fluorine ion corrosion is also improved, effectively extending the service life of the components in the molecular pump.

[0047] Preferably, both the stator blades 2 and the rotor blades 3 are provided with a heat-insulating and corrosion-resistant protective layer 4, so as to more comprehensively improve the high temperature resistance and corrosion resistance.

[0048] In one embodiment, the molecular pump further comprises:

[0049] A rotor driving member, used for driving the rotor blades 3 to rotate;

[0050] A heat conducting member 71 made of phase change material is disposed in the rotor driving member.

[0051] In this embodiment, the rotor driving component includes a base 5, a motor 6 and a rotating shaft 7. The base 5 is fixed inside the shell, and the motor 6 is installed on the base 5. One end of the rotating shaft 7 is connected to the output of the motor 6, and the other end of the rotating shaft 7 is used to install the rotor blades 3. The rotating shaft 7 is driven by the motor 6 to rotate and drive the rotor blades 3 to rotate.

[0052] In this embodiment, a hollow area can be reserved inside the rotating shaft 7, and a heat conduction member 71 made of phase change material is placed in the hollow area; the phase change material undergoes phase change when the external temperature changes, and can absorb or release a large amount of latent heat in this process.

[0053] Specifically, when the molecular pump is working, the rotor driving member drives the rotor blades 3 to rotate. After the rotor blades 3 generate heat, the heat-conducting member 71 inside the rotating shaft 7 undergoes a phase change and absorbs and stores the heat of the rotor blades 3, thereby reducing the heat of the rotor blades 3. After the molecular pump stops working, the rotor blades 3 stop rotating, and gradually cool down until the temperature is lower than the temperature of the heat-conducting member 71, the heat-conducting member 71 inside the rotating shaft 7 undergoes a phase change and releases heat to the outside. It can be understood that the heat generated by the rotor blades 3 during operation is absorbed and stored by the heat-conducting member 71 made of phase change material, and the heat is released after the rotor blades 3 finish working, thereby improving the heat resistance effect during operation.

[0054] More specifically, the phase change material can be an organic phase change material such as paraffin, fatty acids and their derivatives, polyols, etc., or an inorganic phase change material such as hydrated salts, metals, alloys, hydroxides, etc.; preferably, the phase change material of the embodiment of the present invention is paraffin, which has a high phase change latent heat and good chemical stability.

[0055] More specifically, in the implementation of the heat conduction member 71 made of phase change material, the phase change material can be encapsulated in a microcapsule to form the heat conduction member 71, or the phase change material can be filled in a porous material (such as porous ceramics), both of which can improve the thermal stability of the material.

[0056] In one embodiment, the stator blades 2 and / or the rotor blades 3 are made of aluminum alloy.

[0057] Preferably, the stator blades 2 and the rotor blades 3 are both made of aluminum alloy, which has the characteristics of high strength and fatigue resistance, can cope with long-term pumping work requirements, and reduce the deformation of the stator blades 2 and the rotor blades 3 under high temperature conditions.

[0058] In one embodiment, the heat-insulating and corrosion-resistant protective layer 4 comprises:

[0059] A thermal barrier coating, applied to the surface of the stator blades 2 and / or the rotor blades 3;

[0060] Corrosion-resistant coating, applied on the surface of thermal barrier coating.

[0061] In this embodiment, the thermal barrier coating is coated on the surface of the stator blades 2 and the rotor blades 3, which can play a heat insulating role, so that the stator blades 2 and the rotor blades 3 are protected from direct erosion by the high-temperature airflow, thereby reducing the temperature of the stator blades 2 and the rotor blades 3, allowing the stator blades 2 and the rotor blades 3 to operate at high temperatures, thereby extending their service life.

[0062] In this embodiment, the corrosion-resistant coating is coated on the thermal barrier coating to form a protective film, which can protect the stator blades 2 and the rotor blades 3 from direct corrosion by fluorine ions, thereby improving the corrosion resistance of the stator blades 2 and the rotor blades 3.

[0063] In this embodiment, based on the provision of the thermal barrier coating and the corrosion-resistant coating, the thermal insulation and corrosion resistance of the stator blades 2 and the rotor blades 3 are significantly improved, thereby reducing the maintenance and repair frequency of the molecular pump and reducing the overall maintenance cost.

[0064] In one embodiment, the thermal barrier coating includes a metal bonding layer and a ceramic top layer; the metal bonding layer is coated on the surface of the stator blade 2 and / or the rotor blade 3, and the ceramic top layer is coated on the surface of the metal bonding layer.

[0065] In this embodiment, the metal bonding layer may be a MCrAlY alloy coating, which has high temperature oxidation resistance and corrosion resistance.

[0066] In this embodiment, the ceramic top layer can be made of zirconia-stabilized alumina. Zirconium-stabilized alumina is a composite material, which is a material in which zirconium oxide is added to alumina to improve its performance. This composite material combines the advantages of alumina and zirconia, and has a certain improvement in heat resistance.

[0067] In one embodiment, the corrosion-resistant coating includes one of an yttria coating and a polytetrafluoroethylene coating.

[0068] In this embodiment, both the yttrium oxide coating and the polytetrafluoroethylene coating have strong resistance to fluoride ion corrosion. The corrosion-resistant coating is arranged on the outermost layer of the stator blades 2 and the rotor blades 3 to directly isolate the fluoride ions from contacting the stator blades 2 and the rotor blades 3 in the molecular pump.

[0069] In one embodiment, a cooling channel 11 is provided on the inner wall of the pump housing 1 , and the cooling channel 11 corresponds to the outer periphery of the rotor driving member, the stator blades 2 and the rotor blades 3 .

[0070] In this embodiment, the pump housing 1 can be formed by die-casting, and a cooling copper tube is buried in the inner wall of the pump housing 1 or a cooling water channel is welded to form a cooling channel 11. The cooling channel 11 corresponds to the outer periphery of the rotor drive, the stator blades 2 and the rotor blades 3, that is, the cooling channel 11 covers the entire pump housing 1 from the bottom to the top, thereby greatly improving the heat dissipation capacity of the entire molecular pump, especially reducing the deformation of the stator blades 2 and the rotor blades 3.

[0071] Specifically, the cooling channel 11 adopts one of a wave-type cooling channel 11 and a pulse-type cooling channel 11; wherein the wave-type cooling channel 11 can increase the contact area between the cooling water and the pump housing 1 through the wave shape, thereby improving the heat dissipation efficiency.

[0072] Specifically, the pulse cooling channel 11 changes the water cooling heat dissipation method with a fixed flow rate and adopts a discontinuous cooling water supply with a certain frequency, which can quickly take away more heat in a short time, thereby improving the heat dissipation efficiency.

[0073] An embodiment of the present invention further provides a reaction chamber, comprising the above molecular pump, wherein the molecular pump is used to perform gas extraction processing inside the reaction chamber.

[0074] An embodiment of the present invention further provides a thin film deposition device, comprising the reaction chamber as described above.

[0075] The above is only a specific embodiment of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can easily think of various equivalent modifications or replacements within the technical scope disclosed by the present invention, and these modifications or replacements should be included in the protection scope of the present invention. Therefore, the protection scope of the present invention shall be based on the protection scope of the claims.

Claims

1. A molecular pump, characterized in that: include: A pump housing having a cavity therein; stator blades, arranged on the inner wall of the cavity; Rotor blades are disposed in the cavity and are staggered with the stator blades; Wherein, the stator blades and / or rotor blades are provided with a heat-insulating and corrosion-resistant protective layer.

2. The molecular pump according to claim 1, characterized in that: Also includes: A rotor driving member, used for driving the rotor blades to rotate; Wherein, a heat conduction member made of phase change material is arranged inside the rotor driving member.

3. The molecular pump according to claim 1, characterized in that: The heat-insulating and corrosion-resistant protective layer comprises: A thermal barrier coating applied to the surface of the stator blades and / or rotor blades; The corrosion-resistant coating is coated on the surface of the thermal barrier coating.

4. The molecular pump according to claim 3, characterized in that: The thermal barrier coating comprises: A metal bonding layer, coated on the surface of the stator blades and / or rotor blades; The ceramic top layer is coated on the surface of the metal bonding layer.

5. The molecular pump according to claim 3, characterized in that: The corrosion-resistant coating includes one of an yttrium oxide coating and a polytetrafluoroethylene coating.

6. The molecular pump according to claim 1, characterized in that: The inner wall of the pump housing is provided with a cooling channel, and the cooling channel corresponds to the outer periphery of the rotor driving member, the stator blades and the rotor blades.

7. The molecular pump according to claim 6, characterized in that: The cooling channel adopts one of a wave cooling channel and a pulse cooling channel.

8. The molecular pump according to claim 1, characterized in that: The stator blades and / or rotor blades are made of aluminum alloy.

9. A reaction chamber, characterized in that: It comprises the molecular pump according to any one of claims 1 to 8, wherein the molecular pump is used to evacuate the interior of the reaction chamber.

10. A thin film deposition device, characterized in that: Comprising the reaction chamber as claimed in claim 9.

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