Motion adjustment mechanism and wafer detection system

Abstract

The motion adjustment mechanism and wafer detection system provided by the present application, the motion adjustment mechanism includes a rotating assembly, one end of the rotating screw is connected to the rotating driving member, and the other end of the rotating screw is a free end; the rotating connection assembly includes a screw connector, a connecting sleeve and at least one connecting bearing, the screw connector is sleeved on the outside of the rotating screw, the screw connector is threadedly connected to the rotating screw, the extension direction of the connecting sleeve intersects with the extension direction of the rotating screw, the rotating screw passes through the connecting sleeve along a first direction, and a connecting bearing is provided at least at one end of the connecting sleeve along a second direction; the rotating nut seat is rotatably connected to the connecting bearing at least at one end along the second direction; the rotating seat and the rotating screw are spaced apart along a third direction, and the rotating seat is connected to the other end of the rotating nut seat; the present application can reduce motion errors and improve motion accuracy.

Description

Technical Field

[0001] The present application relates to the field of wafer detection technology, and in particular to a motion adjustment mechanism and a wafer detection system. Background Art

[0002] In a wafer inspection system, the wafer is usually placed on a sample stage and the angle of the sample stage is adjusted through a motion adjustment mechanism to adjust the wafer to a test position corresponding to the tip of the probe, so that the probe can detect the wafer. The motion adjustment of the angle of the sample stage and other motion adjustments requires high precision, otherwise it is easy for the tip of the probe to damage the wafer. The existing motion adjustment mechanism needs to have two degrees of freedom (radial and circumferential of the sample stage), and the position offset in the radial direction of the sample stage requires two (radial and circumferential) connection mechanisms, which will produce more errors, resulting in poor accuracy of motion adjustment of the sample stage, and easily causing the tip of the probe to damage the wafer. In this way, how to design a motion adjustment mechanism, reduce motion errors, and improve motion accuracy has become a technical problem that needs to be solved. Summary of the invention

[0003] The present application provides a motion adjustment mechanism and a wafer detection system that reduce motion errors and improve motion accuracy.

[0004] In a first aspect, the present application provides a motion adjustment mechanism, including a rotating assembly, wherein the rotating assembly includes:

[0005] Rotating drive member;

[0006] A rotating screw, one end of which is connected to the rotating drive member, the other end of which is a free end, and the rotating screw extends along a first direction;

[0007] A rotary connection assembly, the rotary connection assembly comprising a screw connection piece, a connection sleeve and at least one connection bearing, the screw connection piece is sleeved on the outside of the rotary screw, the screw connection piece is threadedly connected to the rotary screw, the extension direction of the connection sleeve intersects with the extension direction of the rotary screw, the rotary screw passes through the connection sleeve along the first direction, at least one end of the connection sleeve along the second direction is provided with the connection bearing, and the second direction is perpendicular to the first direction;

[0008] A rotating nut seat, the rotating nut seat is arranged along the third direction, and at least one end of the rotating nut seat along the second direction is connected to the connecting bearing;

[0009] A rotating seat, the rotating seat and the rotating screw are spaced apart along the third direction, and the rotating seat is connected to the other end of the rotating nut seat;

[0010] The rotary drive member drives the rotary screw to rotate, and the rotary connection assembly moves along the axial direction of the rotary screw under the drive of the rotary screw to drive the rotary nut seat and the rotary seat to rotate.

[0011] The motion adjustment mechanism provided in the present application includes a rotating assembly, and the rotating assembly includes a rotating drive member, a rotating screw, a rotating connection assembly, a rotating nut seat and a rotating seat. One end of the rotating screw is connected to the rotating driving member, and the other end of the rotating screw is a free end, and the rotating screw extends along a first direction; the rotating connection assembly comprises a screw connecting member, a connecting sleeve and at least one connecting bearing, the screw connecting member is sleeved on the outer side of the rotating screw, the screw connecting member is threadedly connected to the rotating screw, the extending direction of the connecting sleeve intersects with the extending direction of the rotating screw, the rotating screw passes through the connecting sleeve along the first direction, and at least one end of the connecting sleeve along the second direction is provided with the connecting bearing, and the second direction is perpendicular to the first direction; the rotating nut seat is arranged along a third direction, and at least one end of the rotating nut seat along the second direction is connected to the connecting bearing; the rotating seat and the rotating screw are spaced apart along the third direction, and the rotating seat is connected to the other end of the rotating nut seat; the rotating driving member drives the rotating screw to rotate, and the rotating connection assembly moves along the axial direction of the rotating screw driven by the rotating screw to drive the rotating nut seat and the rotating seat to rotate. Since the other end of the rotating screw is a free end, the free end of the rotatable screw can swing in the third direction. Only a rotating connection component with one degree of freedom of movement and a rotating nut seat are needed to realize the connection between the rotating screw and the rotating seat. Compared with the connection structure with two moving free ends, the number of connection structures is reduced, thereby reducing the errors between the various structural parts in the connection structure, reducing the motion error, and improving the motion accuracy.

[0012] In an optional embodiment, the rotary connection assembly further includes a nut assembly, the nut assembly including a first nut, a second nut, and an elastic member connected between the first nut and the second nut, the elastic member is in a compressed state and abuts between the first nut and the second nut along the axial direction of the rotary screw;

[0013] One end of the second nut away from the first nut is threadedly connected to one end of the screw connector, and the other end of the screw connector penetrates into the connecting sleeve and is connected to the connecting sleeve.

[0014] In an optional embodiment, when the rotating seat rotates to a first angle, the free end of the rotating screw is located at a first position; when the rotating seat rotates to a second angle, the free end of the rotating screw is located at a second position, and the first position and the second position are spaced apart in the third direction.

[0015] In an optional embodiment, the number of the connecting bearings is two, and the two connecting bearings are respectively arranged at the two ends of the connecting sleeve along the second direction, and the rotating nut seat includes a first connecting arm and a second connecting arm at one end close to the rotating connection assembly, and the first connecting arm and the second connecting arm are spaced apart along the second direction, and the first connecting arm is rotatably connected to the connecting sleeve via one connecting bearing, and the second connecting arm is rotatably connected to the connecting sleeve via another connecting bearing.

[0016] In an optional embodiment, the motion adjustment mechanism also includes a rotation sensing element, a first sensor and a second sensor, the rotation sensing element is connected to the rotating base, and the rotation sensing element rotates from a first rotation position to a second rotation position along with the rotating base; the first sensor and the second sensor are arranged along an arc parallel to the rotation arc of the rotating base, the first sensor feeds back a detection signal when the rotation sensing element is located at the first rotation position; the second sensor feeds back a detection signal when the rotation sensing element is located at the second rotation position.

[0017] In an optional embodiment, the motion adjustment mechanism further includes a first bearing plate and a lifting assembly; the rotating assembly and the lifting assembly are arranged on the first bearing plate.

[0018] The lifting assembly includes a lifting platform, a lifting guide rail, and a lifting drive assembly. The lifting platform is located on a side of the rotating seat away from the first bearing plate, and the lifting platform rotates with the rotating seat.

[0019] The lifting guide rail is arranged along the third direction, the lifting guide rail passes through the rotating seat and the lifting platform, and the lifting platform is slidably connected to the lifting guide rail;

[0020] The lifting drive assembly includes a lifting drive structure and a lifting transmission structure. The lifting drive structure is arranged adjacent to the lifting platform. One end of the lifting transmission structure is connected to the lifting drive structure, and the other end of the lifting transmission structure is connected to the lifting platform. The lifting drive structure is used to drive the lifting platform to rise and fall via the lifting transmission structure.

[0021] In an optional embodiment, the lifting transmission structure includes a first lifting gear, a second lifting gear, a transmission belt, a lifting screw and a lifting nut. The first lifting gear is coaxially connected to the lifting drive structure, the first lifting gear and the second lifting gear are transmitted through the transmission belt, one end of the lifting screw is coaxially connected to the second lifting gear, the lifting nut is threadedly connected to the lifting screw, and the lifting nut is also fixedly connected to the lifting platform.

[0022] In an optional embodiment, the lifting component also includes a lifting detection component, which includes a lifting sensing component, a third sensor, a fourth sensor and a fifth sensor. The lifting sensing component is connected to the lifting platform, and the lifting sensing component rises and falls with the lifting platform; the third sensor and the fourth sensor are adjacently arranged along the circumference of the lifting platform, the third sensor and the fourth sensor are staggered in the second direction, the fifth sensor and the fourth sensor are arranged along the second direction, and the third sensor, the fourth sensor and the fifth sensor are used to detect the lifting position of the lifting platform.

[0023] In an optional embodiment, the motion adjustment mechanism further includes a first motion shaft assembly, the first motion shaft assembly includes a first motion shaft driving member, a first motion shaft screw, and a first motion shaft nut seat, the output shaft of the first motion shaft driving member is connected to the first motion shaft screw, the first motion shaft nut seat is sleeved and threadedly connected to the first motion shaft screw, the first motion shaft screw extends along the first direction, and the first motion shaft nut seat is connected to a first bearing plate for supporting the rotating assembly to drive the rotating assembly to move along the first direction;

[0024] And / or, the motion adjustment mechanism also includes a second motion shaft assembly, the second motion shaft assembly includes a second motion shaft driving member, a second motion shaft screw, and a second motion shaft nut seat, the output shaft of the second motion shaft driving member is connected to the second motion shaft screw, the second motion shaft nut seat is sleeved and threadedly connected to the second motion shaft screw, the second motion shaft screw extends along the second direction, and the second motion shaft nut seat is connected to the first supporting plate for supporting the rotating assembly to drive the rotating assembly to move along the second direction.

[0025] In a second aspect, the present application provides a wafer inspection system, which includes the aforementioned motion adjustment mechanism and probe assembly, wherein the lifting platform of the motion adjustment mechanism is used to carry the wafer to be inspected; and the probe assembly is used to inspect the wafer to be inspected.

[0026] The wafer inspection system provided by the present application has a free end as the other end of the rotating screw in the motion adjustment mechanism, and the free end of the rotatable screw can be deflected in the third direction. Only a rotating connection component with one degree of freedom of motion and a rotating nut seat are required to realize the connection between the rotating screw and the rotating seat. Compared with the connection structure with two free ends of motion, the number of connection structures is reduced, thereby reducing the errors between the various structural parts in the connection structure, reducing motion errors, and improving motion accuracy. The motion adjustment accuracy of the sample table (rotating seat) is high, which reduces the damage to the wafer caused by the tip of the probe, and also improves the accuracy and efficiency of wafer inspection. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the embodiments are briefly introduced below.

[0028] Figure 1 is a three-dimensional diagram of a first motion adjustment mechanism provided in an embodiment of the present application;

[0029] Figure 2 yes Figure 1 An exploded schematic diagram of a motion adjustment mechanism is provided;

[0030] Figure 3 is a three-dimensional schematic diagram of a rotating assembly provided in an embodiment of the present application;

[0031] Figure 4 It is a partial three-dimensional schematic diagram of a rotating assembly provided in an embodiment of the present application;

[0032] Figure 5 is a schematic top view of a rotating table in a first position in a rotating assembly provided in an embodiment of the present application;

[0033] Figure 6 is a schematic top view of a rotating table in a second position in a rotating assembly provided in an embodiment of the present application;

[0034] Figure 7 is a three-dimensional diagram of a second motion adjustment mechanism provided in an embodiment of the present application;

[0035] Figure 8 yes Figure 7 Schematic diagram of the second motion adjustment mechanism provided Figure 1 ;

[0036] Fig. 9 yes Figure 7 Schematic diagram of the second motion adjustment mechanism provided Figure 2 ;

[0037] Fig.10 yes Figure 7 The third embodiment of the lifting component in the second motion adjustment mechanism provided Figure 1 ;

[0038] Fig.11 yes Figure 7 The third embodiment of the lifting component in the second motion adjustment mechanism provided Figure 2 ;

[0039] Fig.12 is a three-dimensional diagram of a third motion adjustment mechanism provided in an embodiment of the present application;

[0040] Fig.13 yes Fig.12 An exploded schematic diagram of a third motion adjustment mechanism is provided;

[0041] Fig.14 is an exploded three-dimensional schematic diagram of a fourth motion adjustment mechanism provided in an embodiment of the present application;

[0042] Fig.15 is a three-dimensional diagram of a fifth motion adjustment mechanism provided in an embodiment of the present application;

[0043] Fig.16 is a three-dimensional exploded schematic diagram of a guide rail assembly provided in an embodiment of the present application;

[0044] Fig.17 is a three-dimensional schematic diagram of a wafer inspection system provided in an embodiment of the present application;

[0045] Fig.18 It is a partial side view of the wafer inspection system provided in an embodiment of the present application.

[0046] Description of Figure Numbers:

[0047] Motion adjustment mechanism 100; rotating assembly 10; first bearing plate 11; first cover plate 12; rotating driving member 13; rotating screw 14; rotating connecting assembly 15; rotating nut seat 16; rotating seat 17; screw connecting member 151; connecting sleeve 152; connecting bearing 153; nut assembly 154; first nut 1541; second nut 1542; elastic member 1543; first end tube 1521; intermediate tube 1522; second end tube 1523; first connecting arm 161; second connecting arm 162; rotating sensing member 18; first sensor 191; second sensor 192; lifting assembly 20; lifting platform 21; lifting guide rail 22; lifting driving assembly 23; lifting driving structure 231; lifting transmission structure 232; slider 25; first lifting gear 2321; second lifting gear 2323; transmission belt 2322; lifting screw Rod 2324; lifting nut 2325; third lifting gear 2326; lifting detection assembly 24; lifting induction member 241; third sensor 242; fourth sensor 243; fifth sensor 244; first induction strip 2411; second induction strip 2412; first motion axis assembly 30; first motion axis driving member 31; first motion axis lead screw 32; first motion axis nut seat 33; first movable plate 34; first bottom plate 35; corrugated coupling 36; second motion axis assembly 40; second motion axis driving member 41; second motion axis lead screw 42; second motion axis nut seat 43; horizontal adjustment structure 37; second bottom plate 44; guide rail assembly 210; first guide rail member 211; second guide rail member 212; rolling member 213; rolling plate 2131; ball 2132; first guide rail groove 2111; second guide rail groove 2121; probe assembly 310. DETAILED DESCRIPTION

[0048] The technical solution of the present application will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the embodiments described in the present application are only a part of the embodiments, not all of the embodiments. Based on the embodiments provided in the present application, all other embodiments obtained by ordinary technicians in this field without creative work belong to the protection scope of the present application.

[0049] Reference to "embodiments" in this application means that a particular feature, structure, or characteristic described in conjunction with the embodiments may be included in at least one embodiment of the present application. The appearance of the phrase in various locations in the specification does not necessarily refer to the same embodiment, nor is it mutually exclusive, independent, or alternative to other embodiments. It can be explicitly and implicitly understood by those skilled in the art that the embodiments described in this application can be combined with other embodiments.

[0050] The terms "first", "second", etc. in the specification and claims of this application and the above-mentioned drawings are used to distinguish different objects, rather than to describe a specific order. In addition, the terms "including" and "having" and any variations thereof are intended to cover non-exclusive inclusions. For example: a component or device including one or more parts is not limited to the one or more parts listed, but optionally includes one or more parts that are not listed but inherent to the exemplified product, or one or more parts that it should have based on the described function.

[0051] The present application provides a motion adjustment mechanism that reduces motion errors and improves motion accuracy. The motion adjustment mechanism can be applied to structures including but not limited to wafer detection systems, circuit board detection systems and other devices that require high motion accuracy. The following embodiments are described by taking the motion adjustment mechanism set in a wafer detection system as an example.

[0052] See also Figure 1 and Figure 2 , the present application provides a motion adjustment mechanism 100.

[0053] The motion adjustment mechanism 100 includes a rotating assembly 10. Optionally, the motion adjustment mechanism 100 includes a first carrier plate 11 and a first cover plate 12. The rotating assembly 10 is disposed on the first carrier plate 11, and the first cover plate 12 is fixedly covered with the first carrier plate 11. The first cover plate 12 is provided with a plurality of window areas. A portion of the rotating assembly 10 can extend through the window area of ​​the first cover plate 12.

[0054] See also Figure 3 The rotating assembly 10 includes a rotating driving member 13 , a rotating screw 14 , a rotating connecting assembly 15 , a rotating nut seat 16 and a rotating seat 17 .

[0055] Optionally, the rotary drive member 13 includes but is not limited to an electric motor, a motor, etc. In this embodiment, the rotary drive member 13 is a stepping motor. Optionally, the rotary drive member 13 is disposed on the first carrying plate 11.

[0056] One end of the rotating screw 14 is connected to the rotating driving member 13, and the other end of the rotating screw 14 is a free end 141. The rotating screw 14 extends along a first direction.

[0057] One end of the rotating screw 14 is coaxially connected to the output shaft of the rotating drive member 13. The rotating drive member 13 is used to drive the rotating screw 14 to rotate.

[0058] The other end of the rotating screw 14 is a free end 141 , so the other end of the rotating screw 14 can have a certain degree of freedom of swing in the third direction X. The free end 141 of the rotating screw 14 is spaced apart from other structures.

[0059] The rotary connection assembly 15 is connected between the rotary screw 14 and the rotary seat 17 .

[0060] See also Figure 3 The rotary connection assembly 15 includes a screw connection 151, a connection sleeve 152 and at least one connection bearing 153. The screw connection 151, the connection sleeve 152 and the connection bearing 153 are connected in sequence.

[0061] The screw connector 151 is coaxially arranged with the rotating screw 14. The screw connector 151 is sleeved on the outside of the rotating screw 14. The screw connector 151 is threadedly connected with the rotating screw 14. The extending direction of the connecting sleeve 152 intersects with the extending direction of the rotating screw 14.

[0062] The rotating screw 14 penetrates the connecting sleeve 152 along the first direction Y. The rotating screw 14 penetrates the connecting sleeve 152 along the radial direction of the connecting sleeve 152 .

[0063] The connecting sleeve 152 extends along the second direction Z. The second direction Z is perpendicular to the first direction Y. The connecting bearing 153 is disposed at at least one end of the connecting sleeve 152 along the second direction Z. The connecting bearing 153 is disposed at one end of the connecting sleeve 152 or at both ends.

[0064] The rotating nut seat 16 is arranged along the third direction X. At least one end of the rotating nut seat 16 along the second direction Z is rotatably connected to the connecting bearing 153. When the number of the connecting bearing 153 is one, the rotating nut seat 16 is connected to the connecting sleeve 152 of the rotating connection assembly 15 through the connecting bearing 153.

[0065] In this embodiment, the number of connecting bearings 153 is two, and the rotating nut seat 16 connects the two connecting bearings 153 by rotating at both ends along the second direction Z, so that the rotating nut seat 16 and the connecting sleeve 152 of the rotating connection assembly 15 rotate in a plane, thereby improving the rotation stability and reducing the problem of unstable rotation or jamming.

[0066] Optionally, the first direction Y and the third direction X are two perpendicular directions parallel to the bearing surface of the first bearing plate 11 , and the second direction Z is a direction perpendicular to the bearing surface of the first bearing plate 11 .

[0067] The rotating seat 17 and the rotating screw 14 are spaced apart from each other along the third direction X. The rotating seat 17 is connected to the other end of the rotating nut seat 16 .

[0068] The rotating seat 17 is disposed on the first supporting plate 11 , and the other end of the rotating nut seat 16 is connected to a side surface of the rotating seat 17 .

[0069] The rotary drive member 13 drives the rotary screw 14 to rotate (forward and reverse), and the rotary connection assembly 15 moves along the axial direction (back and forth) of the rotary screw 14 under the rotation of the rotary screw 14 to drive the rotary nut seat 16 and the rotary seat 17 to rotate (clockwise or counterclockwise).

[0070] In a general connection structure between a screw and a turntable, since the screw moves linearly along the first direction Y, the connection structure moves along the first direction Y driven by the screw. Since the turntable rotates, the connection structure rotates with the turntable, and the distance between the connection position between the connection structure and the turntable and the screw changes. Therefore, the connection structure needs to have a degree of freedom along the third direction X to absorb this distance change and avoid interfering with the movement of the turntable. For example, the connection structure needs to be provided with bar holes in the third direction X, and these structural designs may increase motion errors. For example, the size error of the parts in the third direction X of the connection structure, the assembly error of the parts, the size error of the parts in the first direction Y of the connection structure, and the assembly error of the parts are superimposed, resulting in poor angle control accuracy of the turntable, which in turn leads to detection errors or wafer damage in wafer testing.

[0071] In the motion adjustment mechanism 100 provided by the present application, since the other end of the rotating screw 14 is a free end 141, the free end 141 of the rotating screw 14 can be deflected in the third direction X. When the rotating nut seat 16 rotates along with the rotating seat 17, the distance between the end of the rotating nut seat 16 connected to the rotating seat 17 and the rotating screw 14 along the third direction X gradually changes. For example, the distance between the end of the rotating nut seat 16 connected to the rotating seat 17 and the rotating screw 14 along the third direction X gradually increases. At this time, the rotating screw 14 is subjected to the pulling force of the rotating nut seat 16, and the free end 141 of the rotating screw 14 gradually deviates toward the side where the rotating seat 17 is located under the pulling force, thereby compensating for the gradual change in the distance between the end of the rotating nut seat 16 connected to the rotating seat 17 and the rotating screw 14 along the third direction X, so that the distance between the end of the rotating nut seat 16 connected to the rotating seat 17 and the end of the rotating screw 14 connected to the rotating seat 17 remains unchanged.

[0072] For another example, the distance between one end of the rotating nut seat 16 connected to the rotating seat 17 and the rotating screw 14 along the third direction X gradually decreases. At this time, the rotating screw 14 is subjected to the thrust of the rotating nut seat 16, and the free end 141 of the rotating screw 14 gradually shifts toward the side away from the rotating seat 17 under the thrust, thereby compensating for the problem of the gradually decreasing distance between one end of the rotating nut seat 16 connected to the rotating seat 17 and the rotating screw 14 along the third direction X, so that the distance between one end of the rotating nut seat 16 connected to the rotating seat 17 and one end connected to the rotating screw 14 remains unchanged.

[0073] In the present application, the movement trajectory of the position where the rotating nut seat 16 is connected to the rotating screw 14 is roughly arc-shaped, and the arc-shaped circle is close to or is the rotation center of the rotating seat 17.

[0074] Compared with the connection structure of two moving free ends, the motion adjustment mechanism 100 provided in the present application only requires a rotating connection component 15 with one degree of motion freedom (the free end 141 in the first direction Y) to rotate with the rotating nut seat 16 to achieve the connection between the rotating screw 14 and the rotating seat 17, thereby reducing the number of rotating connection components 15, and further reducing the assembly errors between the various structural parts in the rotating connection component 15, reducing motion errors, and improving motion accuracy.

[0075] Optionally, the motor seat of the rotary drive member 13 is fixed to the side after the first carrier plate 11 and the first cover plate 12 are covered. The motor seat of the rotary drive member 13 can be bent in an L shape to lock the first carrier plate 11 and the first cover plate 12 in the third direction X and the first direction Y.

[0076] After the first cover plate 12 is closed, the rotating screw 14 , the rotating connection assembly 15 , and the rotating nut seat 16 can be arranged in the covering space between the first supporting plate 11 and the first cover plate 12 , and the table surface of the rotating seat 17 extends out from the window of the first cover plate 12 .

[0077] Optional, see Figure 3 The rotating connection assembly 15 also includes a nut assembly 154.

[0078] See also Figure 3 and Figure 4 The nut assembly 154 includes a first nut 1541, a second nut 1542, and an elastic member 1543 connected between the first nut 1541 and the second nut 1542. The elastic member 1543 is in a compressed state and abuts between the first nut 1541 and the second nut 1542 along the axial direction of the rotating screw 14.

[0079] The elastic member 1543 abuts between the first nut 1541 and the second nut 1542 along the first direction Y, so that the first nut 1541 and the second nut 1542 have abutment force in the first direction Y, reducing the assembly gap between the first nut 1541 and the second nut 1542, making the first nut 1541 and the rotating screw 14 fit tightly, making the second nut 1542 and the rotating screw 14 fit tightly, reducing the transmission delay and lag caused by the gap between the rotating screw 14 and the nut assembly 154, and further improving the motion control accuracy.

[0080] One end of the second nut 1542 away from the first nut 1541 is threadedly connected to one end of the screw connector 151 .

[0081] The other end of the screw connector 151 passes through the connecting sleeve 152 and is connected to the connecting sleeve 152 .

[0082] The screw connector 151 includes a plurality of parts with different radial dimensions. The radial dimension of the other end of the screw connector 151 is small, and can be inserted into the connecting sleeve 152 and fixedly connected with the connecting sleeve 152 .

[0083] Optional, see Figure 3 and Figure 4 The connecting sleeve 152 includes a first end sleeve 1521, an intermediate sleeve 1522 and a second end sleeve 1523 arranged in sequence along the second direction Z. The radial dimension of the intermediate sleeve 1522 is larger than the radial dimension of the first end sleeve 1521 and also larger than the radial dimension of the second end sleeve 1523. The intermediate sleeve 1522 has a radial through hole. The other end of the screw connector 151 is sleeved on the rotating screw 14 and is also inserted into the radial through hole of the intermediate sleeve 1522.

[0084] Optionally, the number of the connecting bearings 153 is two. The two connecting bearings 153 are respectively arranged at two ends of the connecting sleeve 152 along the second direction Z. Further, the two connecting bearings 153 are respectively sleeved on the outer circumference of the first end tube 1521 and the second end tube 1523 .

[0085] See also Figure 3 and Figure 4The end of the rotating nut seat 16 close to the rotating connection assembly 15 includes a first connecting arm 161 and a second connecting arm 162. The first connecting arm 161 and the second connecting arm 162 are spaced apart along the second direction Z. The first connecting arm 161 is rotatably connected to the connecting sleeve 152 via a connecting bearing 153. Specifically, a connecting bearing 153 is disposed in a through hole of the first connecting arm 161. The first end tube 1521 is fixed by screws, and a connecting bearing 153 is fixed.

[0086] The second connecting arm 162 is rotatably connected to the connecting sleeve 152 via another connecting bearing 153. Specifically, another connecting bearing 153 is disposed in a through hole of the second connecting arm 162. The second end tube 1523 is fixed by screws, and the other connecting bearing 153 is fixed.

[0087] Optionally, when the rotating seat 17 rotates to a first angle, the free end 141 of the rotating screw 14 is located at a first position.

[0088] When the rotating seat 17 rotates to a second angle, the free end 141 of the rotating screw 14 is located at a second position. The first position and the second position are spaced apart in the third direction X.

[0089] In other words, when the rotating seat 17 rotates to different angles, the free end 141 of the rotating screw 14 will be offset along the third direction X to absorb the distance difference along the third direction X caused by the rotation of the rotating seat 17, and there is no need to additionally set up a distance absorption structure along the third direction X in the rotating connection assembly 15 to reduce problems such as structural preparation tolerance and assembly tolerance caused by the increase in the number of structures.

[0090] Optional, see Figure 5 The motion adjustment mechanism 100 further includes a rotation sensing element 18 , a first sensor 191 and a second sensor 192 .

[0091] The rotating sensing member 18 is connected to the rotating seat 17. Optionally, the rotating sensing member 18 may be a sensing sheet. The present application does not specifically limit the position of the rotating sensing member 18. The rotating sensing member 18 rotates with the rotating seat 17. The rotating sensing member 18 rotates from a first rotation position to a second rotation position with the rotating seat 17.

[0092] The first sensor 191 and the second sensor 192 are arranged outside the rotating seat 17 and do not rotate with the rotating seat 17. The first sensor 191 and the second sensor 192 are arranged at intervals along an arc parallel to the rotation arc of the rotating seat 17. Optionally, the first sensor 191 and the second sensor 192 are arranged on the first cover plate 12. One end of the rotation sensing member 18 extends out of the area where the rotating seat 17 is located.

[0093] The first sensor 191 feeds back a detection signal when the rotation sensing member 18 is located at the first rotation position. The second sensor 192 feeds back a detection signal when the rotation sensing member 18 is located at the second rotation position.

[0094] Optionally, the first sensor 191 and the second sensor 192 are both micro photoelectric sensors. For example, the first sensor 191 includes a transmitter and a receiver arranged in sequence along the second direction Z. A detection area is between the transmitter and the receiver. When the detection area is not blocked, the signal emitted by the transmitter is received by the receiver. When the detection area is blocked, the receiver cannot receive the signal emitted by the transmitter.

[0095] Optional, see Figure 5 When the rotating seat 17 rotates to the first position, the rotating sensing element 18 is located at the first rotation position. When the first sensor 191 detects that the signal is blocked, it means that a part of the rotating sensing element 18 is located in the detection area of ​​the first sensor 191, and it is judged that the rotating sensing element 18 is located at the first rotation position and the rotating seat 17 rotates to the first position.

[0096] See also Figure 6 When the rotating seat 17 rotates to the second position, the rotating sensing element 18 is located at the second rotation position. When the second sensor 192 detects that the signal is blocked, it means that a part of the rotating sensing element 18 is located in the detection area of ​​the second sensor 192, and it is judged that the rotating sensing element 18 is located at the second rotation position, and the rotating seat 17 rotates to the second position.

[0097] In this embodiment, by providing the first sensor 191 , the second sensor 192 , and the rotation sensing element 18 , the rotation angle of the rotating base 17 can be detected to determine whether the rotating base 17 has rotated to the maximum rotation angle position.

[0098] Optionally, the positions of the first sensor 191 and the second sensor 192 are both adjustable, for example, they are fixed in different mounting holes to adjust the rotation angle of the rotating seat 17 .

[0099] Optionally, the first position is the starting position of the rotating seat 17, at which time the connecting sleeve 152 is located at the third position. The second position is the end position of the rotating seat 17, at which time the connecting sleeve 152 is located at the fourth position.

[0100] Optional, see Figure 5 and Figure 6 When the rotating seat 17 is located at the middle position between the first position and the second position, the rotating sensing member 18 is located at the middle position between the first rotation position and the second rotation position. At this time, the connecting sleeve 152 is located at the middle position between the third position and the fourth position, and the extending direction of the connecting sleeve 152 is perpendicular to the extending direction of the rotating screw 14. In this embodiment, when the rotating seat 17 moves to the first position or the second position, the rotating screw 14 will deflect to different sides respectively, but the amplitude of the inner side deflection is small, which reduces the deflection amount of the rotating screw 14.

[0101] Optionally, when the rotating seat 17 is located at the first position, the rotating sensing component 18 is located at the first rotation position. At this time, the connecting sleeve 152 is located at the third position, and the extension direction of the connecting sleeve 152 is perpendicular to the extension direction of the rotating screw 14. When the rotating seat 17 is located at the second position, the rotating sensing component 18 is located at the second rotation position. At this time, the connecting sleeve 152 is located at the fourth position, and the fourth position is close to the free end 141 of the rotating screw 14. In this embodiment, when the rotating seat 17 moves to the first position or the second position, the rotating screw 14 all swings to the same side. Since the swing position is close to the free end 141 of the rotating screw 14, it is relatively easy for the rotating screw 14 to swing.

[0102] See also Figures 7 to 10 The motion adjustment mechanism 100 further includes a lifting assembly 20. The lifting assembly 20 is disposed on the first supporting plate 11.

[0103] See also Figures 7 to 10 The lifting assembly 20 includes a lifting platform 21, a lifting guide rail 22, and a lifting drive assembly 23. The lifting platform 21 is located on a side of the rotating seat 17 away from the first bearing plate 11. The lifting platform 21 rotates with the rotating seat 17.

[0104] The lifting guide rail 22 is arranged along the third direction X. The lifting guide rail 22 penetrates the rotating seat 17 and the lifting platform 21 . The lifting platform 21 is slidably connected to the lifting guide rail 22 under the drive of the lifting drive assembly 23 .

[0105] See also Fig. 9 The lifting drive assembly 23 includes a lifting drive structure 231 and a lifting transmission structure 232 .

[0106] The lifting drive structure 231 is disposed adjacent to the lifting platform 21. Optionally, the lifting drive structure 231 includes but is not limited to a motor, etc. The lifting drive structure 231 is disposed on the first carrying plate 11. The lifting drive structure 231 is disposed adjacent to the lifting platform 21 along the first direction Y.

[0107] One end of the lifting transmission structure 232 is connected to the lifting drive structure 231. The other end of the lifting transmission structure 232 is connected to the lifting platform 21. The lifting drive structure 231 is used to drive the lifting platform 21 to move up and down through the lifting transmission structure 232.

[0108] In this embodiment, a lifting assembly 20 is provided, which includes a lifting platform 21, a lifting guide rail 22, and a lifting drive assembly 23. The lifting platform 21 is located on the side of the rotating seat 17 away from the first bearing plate 11. The lifting platform 21 rotates with the rotating seat 17 and the lifting platform 21 moves up and down along the lifting guide rail 22 under the drive of the lifting drive assembly 23, so that the lifting platform 21 can rotate around the R axis (see FIG. Fig. 9 ) and along the Z axis (see Figure 1 ) to move up and down.

[0109] The middle of the lifting platform 21 and the middle of the rotating seat 17 form a receiving cavity. The lifting guide rail 22 is disposed in the receiving cavity of the middle of the lifting platform 21 and the middle of the rotating seat 17. The lifting guide rail 22 is fixed to the lifting platform 21 and the rotating seat 17.

[0110] See also Fig. 9 The lifting assembly 20 includes a lifting platform 21 and a slider 25. The slider 25 is connected to the lifting platform 21. The slider 25 can slide along the lifting guide rail 22 along the second direction Z to provide guidance for the lifting platform 21 to move up and down along the second direction Z.

[0111] Optional, see Fig. 9 The lifting transmission structure 232 includes a first lifting gear 2321, a second lifting gear 2323, a transmission belt 2322, a lifting screw 2324 and a lifting nut 2325.

[0112] The output shaft of the lifting drive structure 231 faces the bottom side, and the first lifting gear 2321 is coaxially connected to the lifting drive structure 231. The transmission belt 2322 is used to transmit the power between the first lifting gear 2321 and the second lifting gear 2323. The second lifting gear 2323 is located at the bottom of the rotating seat 17. The lifting screw 2324 is arranged to penetrate the rotating seat 17. The lifting screw 2324 extends along the second direction Z. One end of the lifting screw 2324 is coaxially connected to the second lifting gear 2323. The lifting screw 2324 is also fixed to the rotating seat 17 through a bearing, so that the lifting screw 2324 can reuse the space on the rotating seat 17, and the rotating seat 17 will not interfere with the rotation of the lifting screw 2324. A part of the lifting screw 2324 away from the second lifting gear 2323 is arranged to penetrate the lifting platform 21 and maintain a gap with the lifting platform 21.

[0113] The lifting nut 2325 is threadedly connected to the lifting screw 2324. The lifting nut 2325 is disposed in the lifting platform 21. The lifting nut 2325 is also fixedly connected to the lifting platform 21.

[0114] Optionally, the lifting drive assembly 23 drives the first lifting gear 2321, the second lifting gear 2323, and the transmission belt 2322 to rotate synchronously, the second lifting gear 2323 drives the lifting screw 2324 to rotate, and the lifting nut 2325 moves up and down along the lifting screw 2324, while driving the lifting platform 21 and the slider 25 to move up and down along the lifting guide rail 22.

[0115] For further information, see Fig. 9 The lifting transmission structure 232 includes a third lifting gear 2326. The third lifting gear 2326, the first lifting gear 2321, and the second lifting gear 2323 are all arranged on a horizontal plane and are driven by the same transmission belt 2322. The third lifting gear 2326 is coaxially connected to the encoder shaft. The encoder shaft and the lifting drive assembly 23 are arranged on the same mounting seat, and the encoder shaft is assembled with the inner hole of the mounting seat through a bearing.

[0116] Optional, see Fig.10 and Fig.11 The lifting component 20 also includes a lifting detection component 24.

[0117] See also Fig.10 and Fig.11 The lifting detection component 24 includes a lifting sensing member 241 , a third sensor 242 , a fourth sensor 243 and a fifth sensor 244 .

[0118] The lifting sensor 241 is connected to the lifting platform 21. The lifting sensor 241 is disposed on the peripheral side of the lifting platform 21. The lifting sensor 241 is extended along the second direction Z. The lifting sensor 241 rises and falls with the lifting platform 21. The bottom of the lifting sensor 241 extends out of the lifting platform 21. The rotating seat 17 is provided with an air-avoiding groove to accommodate the lifting sensor 241.

[0119] A sensor mounting seat is provided on the mounting seat of the lifting drive assembly 23 .

[0120] The third sensor 242 and the fourth sensor 243 are disposed adjacent to each other in the circumferential direction of the lifting platform 21. The third sensor 242 and the fourth sensor 243 are disposed staggered in the second direction Z.

[0121] See also Fig.10 and Fig.11The lifting sensing member 241 includes a first sensing bar 2411 and a second sensing bar 2412. The first sensing bar 2411 and the second sensing bar 2412 are flush with each other at one end away from the rotating seat 17. The first sensing bar 2411 is longer at one end facing the rotating seat 17, and the second sensing bar 2412 is shorter at one end facing the rotating seat 17.

[0122] The third sensor 242 and the fourth sensor 243 respectively detect the first sensing strip 2411 and the second sensing strip 2412 of the lifting detection assembly 24 extending along the second direction Z.

[0123] The fifth sensor 244 and the fourth sensor 243 are disposed along the second direction Z. The fourth sensor 243 and the fifth sensor 244 are used to detect an end of the second sensing strip 2412 facing the rotating base 17 .

[0124] The third sensor 242 , the fourth sensor 243 , and the fifth sensor 244 are used to detect the lifting position of the lifting platform 21 .

[0125] Optionally, the third sensor 242, the fourth sensor 243 and the fifth sensor 244 are all micro photoelectric sensors. For example, the third sensor 242 includes a transmitter and a receiver arranged in sequence along the third direction X. The detection area is between the transmitter and the receiver. When the detection area is not blocked, the signal emitted by the transmitter is received by the receiver. When the detection area is blocked, the receiver cannot receive the signal emitted by the transmitter.

[0126] Optional, see Fig.12 and Fig.13 The motion adjustment mechanism 100 further includes a first motion axis assembly 30. Optionally, the first motion axis may be a Y axis.

[0127] See also Fig.12 and Fig.13 The first motion shaft assembly 30 includes a first motion shaft driving member 31 , a first motion shaft screw rod 32 , and a first motion shaft nut seat 33 .

[0128] The first motion axis driving member 31 includes but is not limited to an electric motor, a motor, and the like.

[0129] Optional, see Fig.12 and Fig.13 The motion adjustment mechanism 100 further includes a first movable plate 34 and a first bottom plate 35. The lifting assembly 20, the rotating assembly 10, and the first supporting plate 11 are all disposed on the first movable plate 34. The first movable plate 34 and the first supporting plate 11 are provided with a plurality of horizontal adjustment structures, which are used to adjust the horizontality of the first supporting plate 11.

[0130] The first motion shaft driving member 31 , the mounting seat of the first motion shaft driving member 31 , and the mounting seat of the first motion shaft screw rod 32 are all disposed on the first bottom plate 35 .

[0131] The output shaft of the first motion shaft driving member 31 is connected to the first motion shaft screw rod 32 .

[0132] The first movement shaft nut seat 33 is sleeved and threadedly connected to the first movement shaft screw rod 32. The first movement shaft screw rod 32 extends along the first direction Y.

[0133] The first motion shaft nut seat 33 is connected to the first bearing plate 11 for bearing the rotating assembly 10, so as to drive the first movable plate 34, the rotating assembly 10, and the lifting assembly 20 to move along the first direction Y. Specifically, the first motion shaft driving member 31, the mounting seat of the first motion shaft driving member 31, the first motion shaft screw 32, and the mounting seat of the first motion shaft screw 32 are all arranged on one side of the first movable plate 34. The first motion shaft nut seat 33 is connected to the first movable plate 34 along the third direction X, so as to drive the first movable plate 34 and the first bearing plate 11, the rotating assembly 10, and the lifting assembly 20 on the first movable plate 34 to move forward or backward along the first direction Y relative to the first bottom plate 35.

[0134] For further information, see Fig.12 and Fig.13 The first motion shaft driving member 31 and the first motion shaft screw 32 can be connected via a corrugated coupling 36 to increase the transmission accuracy, thereby improving the control accuracy of the lifting platform 21 moving along the first direction Y.

[0135] In this embodiment, a three-dimensional mobile platform can realize Y-axis movement, Z-axis movement and R-axis rotation.

[0136] In another alternative embodiment, see Fig.14 The motion adjustment mechanism 100 further includes a second motion axis assembly 40. Optionally, the second motion axis may be an X axis.

[0137] See also Fig.14 The second motion shaft assembly 40 includes a second motion shaft driving member 41, a second motion shaft screw rod 42, and a second motion shaft nut seat 43.

[0138] The second motion axis driving member 41 includes but is not limited to an electric motor, a motor, and the like.

[0139] Optional, see Fig.12 and Fig.13The motion adjustment mechanism 100 further includes a first movable plate 34 and a first bottom plate 35. The lifting assembly 20, the rotating assembly 10, and the first supporting plate 11 are all disposed on the first movable plate 34. A plurality of horizontal adjustment structures 37 are disposed on the first movable plate 34 and the first supporting plate 11, and the horizontal adjustment structures 37 are used to adjust the horizontality of the first supporting plate 11.

[0140] The second motion shaft driving member 41 , the mounting seat of the second motion shaft driving member 41 , and the mounting seat of the second motion shaft screw rod 42 are all disposed on the first bottom plate 35 .

[0141] The output shaft of the second motion shaft driving member 41 is connected to the second motion shaft screw 42. The second motion shaft nut seat 43 is sleeved and threadedly connected to the second motion shaft screw 42. The second motion shaft screw 42 extends along the second direction Z.

[0142] The second motion shaft nut seat 43 is connected to the first bearing plate 11 for bearing the rotating assembly 10, so as to drive the first movable plate 34, the rotating assembly 10 and the lifting assembly 20 to move along the second direction Z. Specifically, the second motion shaft driving member 41, the mounting seat of the second motion shaft driving member 41, the second motion shaft screw 42 and the mounting seat of the second motion shaft screw 42 are all arranged on one side of the first movable plate 34. The second motion shaft nut seat 43 is connected to the first movable plate 34 along the first direction Y, so as to drive the first movable plate 34 and the first bearing plate 11, the rotating assembly 10 and the lifting assembly 20 on the first movable plate 34 to move forward or backward along the second direction Z relative to the first bottom plate 35.

[0143] Furthermore, the second motion shaft driving member 41 and the second motion shaft screw 42 may be connected via a corrugated coupling 36 to increase the transmission accuracy, thereby improving the control accuracy of the lifting platform 21 moving along the second direction Z.

[0144] In this embodiment, a three-dimensional mobile platform can realize X-axis movement, Z-axis movement and R-axis rotation.

[0145] In yet another optional embodiment, see Fig.15 The motion adjustment mechanism 100 further includes a first motion axis assembly 30 and a second motion axis assembly 40. Optionally, the first motion axis may be a Y axis, and the second motion axis may be an X axis.

[0146] The first motion shaft assembly 30 includes a first motion shaft driving member 31 , a first motion shaft screw rod 32 , and a first motion shaft nut seat 33 .

[0147] The first motion axis driving member 31 includes but is not limited to an electric motor, a motor, and the like.

[0148] Optional, see Fig.15The motion adjustment mechanism 100 further includes a first movable plate 34 and a first bottom plate 35. The lifting assembly 20, the rotating assembly 10, and the first supporting plate 11 are all disposed on the first movable plate 34. A plurality of horizontal adjustment structures 37 (see FIG. 1 ) are disposed on the first movable plate 34 and the first supporting plate 11. Fig.13 ), the horizontal adjustment structure 37 is used to adjust the horizontality of the first supporting plate 11.

[0149] The first motion shaft driving member 31 , the mounting seat of the first motion shaft driving member 31 , and the mounting seat of the first motion shaft screw rod 32 are all disposed on the first bottom plate 35 .

[0150] The output shaft of the first motion shaft driving member 31 is connected to the first motion shaft screw rod 32 .

[0151] The first movement shaft nut seat 33 is sleeved and threadedly connected to the first movement shaft screw rod 32. The first movement shaft screw rod 32 extends along the first direction Y.

[0152] The first motion shaft nut seat 33 is connected to the first bearing plate 11 for bearing the rotating assembly 10, so as to drive the rotating assembly 10 to move along the first direction Y. Specifically, the first motion shaft driving member 31, the mounting seat of the first motion shaft driving member 31, the first motion shaft screw 32, and the mounting seat of the first motion shaft screw 32 are all arranged on one side of the first movable plate 34. The first motion shaft nut seat 33 is connected to the first movable plate 34 along the third direction X, so as to drive the first movable plate 34 and the first bearing plate 11, the rotating assembly 10, and the lifting assembly 20 on the first movable plate 34 to move forward or backward along the first direction Y relative to the first bottom plate 35.

[0153] The second motion shaft assembly 40 includes a second motion shaft driving member 41 , a second motion shaft screw rod 42 , and a second motion shaft nut seat 43 .

[0154] The second motion axis driving member 41 includes but is not limited to an electric motor, a motor, and the like.

[0155] Optional, see Fig.15 The motion adjustment mechanism 100 further includes a second bottom plate 44. The first bottom plate 35 is a movable plate of the second motion shaft assembly 40. The second bottom plate 44, the first bottom plate 35, and the first movable plate 34 are arranged in sequence along the third direction X.

[0156] The lifting assembly 20, the rotating assembly 10, and the first supporting plate 11 are all arranged on the first movable plate 34. The first motion shaft driving member 31, the mounting seat of the first motion shaft driving member 31, and the mounting seat of the first motion shaft screw 32 are all arranged on the first bottom plate 35. The first motion shaft driving member 31 drives the first movable plate 34 and the first supporting plate 11, the rotating assembly 10, and the lifting assembly 20 on the first movable plate 34 to move forward or backward along the first direction Y relative to the first bottom plate 35 through the first motion shaft screw 32 and the first motion shaft nut seat 33.

[0157] The second motion shaft driving member 41 , the mounting seat of the second motion shaft driving member 41 , and the mounting seat of the second motion shaft screw rod 42 are all disposed on the second bottom plate 44 .

[0158] The output shaft of the second motion shaft driving member 41 is connected to the second motion shaft screw 42. The second motion shaft nut seat 43 is sleeved and threadedly connected to the second motion shaft screw 42. The second motion shaft screw 42 extends along the second direction Z.

[0159] The second motion shaft nut seat 43 is connected to the first bottom plate 35 to drive the rotating assembly 10, the lifting assembly 20, the first floor, and the first motion shaft assembly 30 to move along the second direction Z. Specifically, the second motion shaft driving member 41, the mounting seat of the second motion shaft driving member 41, the second motion shaft screw 42, and the mounting seat of the second motion shaft screw 42 are all arranged on one side of the first bottom plate 35. The second motion shaft nut seat 43 is connected to the first bottom plate 35 to drive the first bottom plate 35 and the first motion shaft assembly 30, the first movable plate 34 and the first bearing plate 11 on the first movable plate 34, the rotating assembly 10, and the lifting assembly 20 to move forward or backward along the second direction Z relative to the second bottom plate 44.

[0160] In this embodiment, a four-dimensional mobile platform can realize Y-axis movement, X-axis movement, Z-axis movement and R-axis rotation.

[0161] See also Fig.16 In some embodiments, the motion adjustment mechanism 100 further includes at least one set of guide rail assemblies 210 .

[0162] Optionally, a set of guide rail assemblies 210 may be disposed between the first bottom plate 35 and the second bottom plate 44 .

[0163] Optionally, another set of guide rail components 210 may be disposed between the first movable plate 34 and the first bottom plate 35. In this embodiment, the guide rail components 210 are located between the first bottom plate 35 and the first movable plate 34.

[0164] The guide rail assembly 210 includes a first guide rail member 211 and a second guide rail member 212 extending along a first direction Y. The first guide rail member 211 is disposed on the first bottom plate 35 , and the second guide rail member 212 is disposed on the first movable plate 34 . The first guide rail member 211 and the second guide rail member 212 can be slidably connected along the first direction Y.

[0165] It can be understood that the first guide rail member 211 is disposed on a side of the first bottom plate 35 facing the first movable plate 34 , and the second guide rail member 212 is disposed on a side of the first movable plate 34 facing the first bottom plate 35 .

[0166] In this example, see Fig.16 The guide rail assembly 210 is located between the first bottom plate 35 and the first movable plate 34. When the first bottom plate 35 moves relative to the first movable plate 34 along the first direction Y, the first guide rail member 211 and the second guide rail member 212 slide relative to each other. The first guide rail member 211 and the second guide rail member 212 cooperate with each other to provide a guide for the movement of the first bottom plate 35 and the first movable plate 34 along the first direction Y, and can reduce the resistance of the first bottom plate 35 and the first movable plate 34 sliding relative to each other along the first direction Y, thereby improving the smoothness of the motion adjustment mechanism 100 in the process of adjusting the angle of the lifting platform 21, and improving the accuracy of the motion adjustment mechanism 100 in adjusting the angle of the lifting platform 21.

[0167] Optionally, there are two groups of guide rail assemblies 210, and the two groups of guide rail assemblies 210 are spaced apart between the first base plate 35 and the first movable plate 34. The two groups of guide rail assemblies 210 cooperate with each other to achieve relative sliding of the first base plate 35 and the first movable plate 34 along the first direction Y.

[0168] In some embodiments, see Fig.16 The guide rail assembly 210 also includes a rolling member 213, and the rolling member 213 includes a rolling plate 2131 and a plurality of balls 2132, and the plurality of balls 2132 can be rollably disposed on the rolling plate 2131; the first guide rail member 211 has a first guide rail groove 2111, and the second guide rail member 212 has a second guide rail groove 2121, and the rolling plate 2131 is clamped between the first guide rail member 211 and the second guide rail member 212, and the plurality of balls 2132 are partially disposed in the first guide rail groove 2111 and partially disposed in the second guide rail groove 2121, and can rollably connect the first guide rail member 211 and the second guide rail member 212.

[0169] It can be understood that the rolling plate 2131 extends along the first direction Y.

[0170] It can be understood that the first guide rail groove 2111 extends along the first direction Y, and the second guide rail groove 2121 extends along the second direction Z.

[0171] In this embodiment, the rolling member 213 includes a rolling plate 2131 and a plurality of balls 2132. The rolling plate 2131 is clamped between the first guide rail member 211 and the second guide rail member 212. The plurality of balls 2132 can rotate relative to the rolling plate 2131 and some of the balls 2132 are arranged in the first guide rail groove 2111 of the first guide rail member 211, and some of the balls 2132 are arranged in the second guide rail groove 2121 of the second guide rail member 212. When the first guide rail member 211 and the second guide rail member 212 slide relative to each other along the first direction Y, the ball 2132 rotates relative to the rolling plate 2131, and rolls in the first guide groove 2111 relative to the first guide rail member 211, and rolls in the second guide groove 2121 relative to the second guide rail member 212, which can further reduce the friction force of the first guide rail member 211 and the second guide rail member 212 sliding relative to each other along the first direction Y, so as to further improve the sliding accuracy of the first guide rail member 211 and the second guide rail member 212 along the first direction Y, thereby facilitating improving the accuracy of adjusting the relative angle of the lifting platform 21.

[0172] See also Fig.17 and Fig.18 The present application also provides a wafer detection system 300, which includes: a motion adjustment mechanism 100 and a probe assembly 310 provided in the present application, wherein the lifting platform 21 of the motion adjustment mechanism 100 is used to carry the wafer to be detected; and the probe assembly 310 is used to detect the wafer to be detected.

[0173] In this embodiment, the probe assembly 310 is disposed on one side of the lifting platform 21, and the tip of the probe assembly 310 is disposed toward the lifting platform 21. The wafer to be inspected is carried on the lifting platform 21, and before the probe assembly 310 inspects the wafer to be inspected, the motion adjustment mechanism 100 adjusts the rotation angle of the lifting platform 21, so that the wafer to be inspected carried on the lifting platform 21 moves to the test position, so that the probe assembly 310 can inspect the wafer to be inspected.

[0174] Optionally, the wafer to be inspected may also be a circuit board or the like.

[0175] In the terminology of the present application, the wafer to be inspected is moved to a test position, that is, the area of ​​the wafer to be inspected that needs to be inspected is set corresponding to the tip of the probe assembly 310, so that the tip of the probe assembly 310 is in physical contact with the wafer to be inspected and electrically connected to test the performance of the wafer to be inspected.

[0176] The wafer detection system provided by the present application has a free end 141 at the other end of the rotating screw 14 in the motion adjustment mechanism 100. The free end 141 of the rotatable screw 14 can be deflected in the third direction X. Only a rotating connection component 15 with one degree of freedom of motion and a rotating nut seat 16 are required to realize the connection between the rotating screw 14 and the rotating seat 17. Compared with the connection structure with two free ends of motion, the number of connection structures is reduced, thereby reducing the errors between the various structural parts in the connection structure, reducing motion errors, and improving motion accuracy. The motion adjustment accuracy of the sample stage (rotating seat 17) is high, which reduces the damage to the wafer caused by the tip of the probe, and also improves the accuracy and efficiency of wafer detection.

[0177] Although the embodiments of the present application have been shown and described above, it can be understood that the above embodiments are exemplary and cannot be understood as limitations on the present application. Ordinary technicians in the field can change, modify, replace and modify the above embodiments within the scope of the present application, and these improvements and modifications are also regarded as the scope of protection of the present application.

Claims

1. A motion adjustment mechanism, characterized in that: The motion adjustment mechanism is applied to a wafer detection system, and the motion adjustment mechanism includes a rotating assembly, and the rotating assembly includes: Rotating drive member; A rotating screw, one end of which is connected to the rotating drive member, the other end of which is a free end, and the rotating screw extends along a first direction; A rotary connection assembly, the rotary connection assembly comprising a screw connection piece, a connection sleeve and at least one connection bearing, the screw connection piece is sleeved on the outside of the rotary screw, the screw connection piece is threadedly connected to the rotary screw, the extension direction of the connection sleeve intersects with the extension direction of the rotary screw, the rotary screw passes through the connection sleeve along the first direction, at least one end of the connection sleeve along the second direction is provided with the connection bearing, and the second direction is perpendicular to the first direction; a rotating nut seat, the rotating nut seat being arranged along the third direction, and at least one end of the rotating nut seat along the second direction being connected to the connecting bearing; and A rotating seat, the rotating seat and the rotating screw are spaced apart along the third direction, and the rotating seat is connected to the other end of the rotating nut seat; The rotary drive member drives the rotary screw to rotate, and the rotary connection assembly moves along the axial direction of the rotary screw under the drive of the rotary screw to drive the rotary nut seat and the rotary seat to rotate; The motion adjustment mechanism further includes a first bearing plate and a lifting assembly; the rotating assembly and the lifting assembly are arranged on the first bearing plate; The lifting assembly includes a lifting platform, a lifting guide rail, and a lifting drive assembly. The lifting platform is located on a side of the rotating seat away from the first bearing plate, and the lifting platform rotates with the rotating seat. The lifting guide rail is arranged along the third direction, the lifting guide rail passes through the rotating seat and the lifting platform, and the lifting platform is slidably connected to the lifting guide rail; The lifting drive assembly includes a lifting drive structure and a lifting transmission structure. The lifting drive structure is arranged adjacent to the lifting platform. One end of the lifting transmission structure is connected to the lifting drive structure, and the other end of the lifting transmission structure is connected to the lifting platform. The lifting drive structure is used to drive the lifting platform to lift via the lifting transmission structure. The lifting transmission structure includes a first lifting gear, a second lifting gear, a transmission belt, a lifting screw and a lifting nut. The first lifting gear is coaxially connected to the lifting drive structure. The first lifting gear and the second lifting gear are driven by the transmission belt. One end of the lifting screw is coaxially connected to the second lifting gear. The lifting nut is threadedly connected to the lifting screw, and the lifting nut is also fixedly connected to the lifting platform. The motion adjustment mechanism also includes a rotation sensing member, a first sensor and a second sensor. The rotation sensing member is connected to the rotating base, and the rotation sensing member rotates from a first rotation position to a second rotation position along with the rotating base. The first sensor and the second sensor are arranged at intervals along an arc parallel to the rotation arc of the rotating base. The first sensor feeds back a detection signal when the rotation sensing member is located at the first rotation position; the second sensor feeds back a detection signal when the rotation sensing member is located at the second rotation position.

2. The motion adjustment mechanism according to claim 1, characterized in that: The rotary connection assembly further includes a nut assembly, the nut assembly including a first nut, a second nut, and an elastic member connected between the first nut and the second nut, the elastic member being in a compressed state and abutting between the first nut and the second nut along the axial direction of the rotary screw; One end of the second nut away from the first nut is threadedly connected to one end of the screw connector, and the other end of the screw connector penetrates into the connecting sleeve and is connected to the connecting sleeve.

3. The motion adjustment mechanism according to claim 1, characterized in that: When the rotating seat rotates to a first angle, the free end of the rotating screw is located at a first position; when the rotating seat rotates to a second angle, the free end of the rotating screw is located at a second position, and the first position and the second position are spaced apart in the third direction.

4. The motion adjustment mechanism according to claim 1, characterized in that: The number of the connecting bearings is two, and the two connecting bearings are respectively arranged at the two ends of the connecting sleeve along the second direction. The end of the rotating nut seat close to the rotating connection assembly includes a first connecting arm and a second connecting arm. The first connecting arm and the second connecting arm are spaced apart along the second direction. The first connecting arm is rotatably connected to the connecting sleeve via one connecting bearing, and the second connecting arm is rotatably connected to the connecting sleeve via another connecting bearing.

5. The motion adjustment mechanism according to claim 1, characterized in that: The lifting component also includes a lifting detection component, which includes a lifting induction component, a third sensor, a fourth sensor and a fifth sensor. The lifting induction component is connected to the lifting platform, and the lifting induction component rises and falls with the lifting platform; the third sensor and the fourth sensor are adjacently arranged along the circumference of the lifting platform, the third sensor and the fourth sensor are staggered in the second direction, the fifth sensor and the fourth sensor are arranged along the second direction, and the third sensor, the fourth sensor and the fifth sensor are used to detect the lifting position of the lifting platform.

6. The motion adjustment mechanism according to any one of claims 1 to 5, characterized in that: The motion adjustment mechanism also includes a first motion shaft assembly, which includes a first motion shaft driving member, a first motion shaft screw, and a first motion shaft nut seat, wherein the output shaft of the first motion shaft driving member is connected to the first motion shaft screw, the first motion shaft nut seat is sleeved with and threadedly connected to the first motion shaft screw, the first motion shaft screw extends along the first direction, and the first motion shaft nut seat is connected to a first bearing plate for bearing the rotating assembly, so as to drive the rotating assembly to move along the first direction; And / or, the motion adjustment mechanism also includes a second motion shaft assembly, the second motion shaft assembly includes a second motion shaft driving member, a second motion shaft screw, and a second motion shaft nut seat, the output shaft of the second motion shaft driving member is connected to the second motion shaft screw, the second motion shaft nut seat is sleeved and threadedly connected to the second motion shaft screw, the second motion shaft screw extends along the second direction, and the second motion shaft nut seat is connected to the first supporting plate for supporting the rotating assembly to drive the rotating assembly to move along the second direction.

7. A wafer inspection system, characterized in that: The wafer inspection system comprises: The motion adjustment mechanism according to any one of claims 1 to 6, wherein the lifting platform of the motion adjustment mechanism is used to carry the wafer to be inspected; and A probe assembly is used to detect the wafer to be detected.

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