Method for preventing oxidation of target material after sand blasting and cleaning

Abstract

The invention provides a method for preventing oxidation of a target material after sand blasting cleaning, which comprises the following steps: (1) cleaning the target material after sand blasting, arranging a sealing layer on the surface of the target material after sand blasting, and obtaining a sealed target material by arranging an air exhaust hole and an air vent which can be opened and closed on the sealing layer; (2) opening an exhaust hole and a vent hole, introducing hot gas into the vent hole, exhausting the hot gas from the exhaust hole, and performing first drying on the sealed target material; and (3) closing the vent hole, continuously vacuumizing from the exhaust hole, heating, and carrying out secondary drying to obtain the anti-oxidation target material. A conventional blowing mode for drying is abandoned, but a closed space is firstly established on the surface of the target material after sand blasting, and then blowing is carried out, so that the moisture removal effect is better, and the anti-oxidation target material is obtained. And in addition, the anti-oxidation coating can be suitable for the surface with smaller surface roughness after sand blasting, and the anti-oxidation performance is better.

Description

Technical Field

[0001] The invention relates to the technical field of target materials, and in particular to a method for preventing a target material from being oxidized after sandblasting cleaning. Background Art

[0002] As an important coating material, target material has a wide range of applications in integrated circuits, solar energy, optical devices and other fields. It mainly includes sputtering coating, vacuum evaporation, plasma coating, etc., among which the most commonly used method is sputtering coating.

[0003] The target assembly is usually composed of a target material and a back plate through welding. In order to improve the welding strength, the target material and the back plate surfaces to be welded need to be processed in advance. One of the commonly used methods is sandblasting to improve the surface roughness. However, due to the characteristics of the sandblasted surface, there will often be cleaning liquid residue on the sandblasted surface after cleaning, and it is easy to oxidize during the drying process, which affects the apparent performance and subsequent use of the target material, resulting in an increase in the defective rate of the target product.

[0004] CN114714257A discloses a sandblasting method for a target material, specifically disclosing that the sandblasting method comprises the following steps: (1) performing a first sandblasting treatment on the non-sputtering surface of the target material to obtain a first sandblasting surface; (2) covering the surface of the first sandblasting surface with a protective layer, performing a second sandblasting treatment to obtain a second sandblasting surface; (3) increasing the temperature to remove the protective layer on the surface of the second sandblasting surface, maintaining the temperature to perform compressed gas purging, and obtaining a target material with a dry sandblasting surface; the material of the protective layer in step (2) comprises indium and / or tin. However, this method does not address the problem of how to prevent surface oxidation after sandblasting.

[0005] CN112959224A discloses a method for preventing oxidation of a target after sandblasting, which specifically includes the following steps: (1) sandblasting the non-sputtering surface of the target to obtain a sandblasting target; (2) cleaning the sandblasting target obtained in step (1), and then blowing and drying it with compressed gas to obtain a target with a dry sandblasting surface. However, this method is difficult to fully remove the moisture hidden between the pores of a surface with a small roughness.

[0006] Therefore, it is necessary to develop a new method to prevent oxidation of the surface of the target material after sandblasting. Summary of the invention

[0007] In order to solve the above technical problems, the present invention provides a method for preventing oxidation of a target material after sandblasting cleaning, which can fully remove the trace moisture remaining on the surface of the target material, especially for copper targets, and can effectively prevent oxidation of the target material after sandblasting, and has broad application prospects.

[0008] To achieve this object, the present invention adopts the following technical solutions:

[0009] The present invention provides a method for preventing oxidation of a target material after sandblasting cleaning, the method comprising the following steps:

[0010] (1) After the sandblasted target is cleaned, a sealing layer is first provided on the surface of the sandblasted target, wherein the sealing layer has a switchable exhaust hole and a vent hole, thereby obtaining a sealed target;

[0011] (2) opening the exhaust hole and the vent hole, introducing hot gas into the vent hole, and exhausting the hot gas from the exhaust hole to perform a first drying on the sealed target material;

[0012] (3) The vent hole is closed, and vacuum is continuously drawn from the evacuation hole and heating is performed to perform a second drying to obtain an oxidation-resistant target material.

[0013] Compared with the prior art, the core concepts of the present invention are as follows:

[0014] A. First, by setting a sealing layer on the surface of the target after sandblasting, the heat dissipation area of ​​the surface fluid is reduced, ensuring that the incoming hot gas can transfer heat to the target surface more fully, and can ensure that the flow direction of the hot gas is from one side of the target to the other side, significantly improving the removal rate of moisture on the target surface;

[0015] B. On the basis of hot gas flow purging, the vent holes are closed, the exhaust holes are evacuated, and heat treatment is performed at the same time, so that the liquid phase between the surface pores of the target material with smaller roughness can overcome the capillary force under continuous vacuum conditions and vaporize under high temperature conditions to achieve the purpose of deep moisture removal, which can greatly reduce the subsequent oxidation of pure copper targets and has broad application prospects.

[0016] Preferably, the surface roughness of the target material after sandblasting in step (1) is 2 to 5 μm, for example, it can be 2 μm, 2.4 μm, 2.7 μm, 3 μm, 3.4 μm, 3.7 μm, 4 μm, 4.4 μm, 4.7 μm or 5 μm.

[0017] The method provided by the present invention is preferably applicable to a target material with a surface roughness of 2 to 5 μm. Target materials with this roughness have a higher tolerance for moisture and are more difficult to remove. The method provided by the present invention can better remove the moisture and improve the antioxidant capacity of the target material.

[0018] Preferably, the surface sand material of the target material after sandblasting in step (1) comprises white jade corundum.

[0019] Preferably, the particle size of the white jade corundum is in the range of 70 to 80 meshes, for example, it can be 70 mesh, 72 mesh, 73 mesh, 74 mesh, 75 mesh, 76 mesh, 77 mesh, 78 mesh, 79 mesh or 80 mesh.

[0020] Preferably, the cleaning agent used in step (1) includes isopropanol, water and ethanol.

[0021] Preferably, the content of isopropanol in the cleaning agent is 10-15wt%, for example, it can be 10wt%, 10.6wt%, 11.2wt%, 11.7wt%, 12.3wt%, 12.8wt%, 13.4wt%, 13.9wt%, 14.5wt% or 15wt%, etc.

[0022] Preferably, the content of ethanol in the cleaning agent is 5-15wt%, for example, it can be 5wt%, 7wt%, 8wt%, 9wt%, 10wt%, 11wt%, 12wt%, 13wt%, 14wt% or 15wt%, etc.

[0023] Preferably, the exhaust hole and the vent hole in step (1) are arranged on both sides of the target material after sandblasting.

[0024] The present invention preferably arranges the air extraction holes and the air vent holes on both sides of the target material after sandblasting, so as to more effectively ensure sufficient flow of the airflow on the surface of the target material in step (2).

[0025] Preferably, there are at least two vent holes, which are arranged at both ends of one side.

[0026] The present invention further preferably arranges the vent holes at different positions, so that different airflows can be formed on the surface of the target material, thereby avoiding drying dead corners and improving the anti-oxidation effect.

[0027] Preferably, the sealing layer is arranged in close contact with the surface of the target material after sandblasting.

[0028] The close contact mentioned in the present invention refers to that the lower surface of the sealing layer is in contact with the sandblasting surface of the target material after sandblasting.

[0029] Preferably, in order to prevent the sealing layer from damaging the surface of the target material after sandblasting, the sealing layer is a soft layer, which can also achieve a better sealing effect.

[0030] Preferably, in step (1), the sealing layer forms a closed space with the sandblasting area of ​​the target material after sandblasting, except for the air extraction hole and the air vent hole.

[0031] Preferably, the hot gas in step (2) comprises any one of nitrogen, argon or helium, or a combination of at least two of them, wherein typical but non-limiting combinations are a combination of nitrogen and argon, a combination of helium and argon, and a combination of nitrogen and helium.

[0032] Preferably, the temperature of the hot gas in step (2) is 80-95°C, for example, it can be 80°C, 82°C, 84°C, 85°C, 87°C, 89°C, 90°C, 92°C, 94°C or 95°C.

[0033] Preferably, the introduction pressure of the hot gas is 0.1-0.3 MPa, for example, it can be 0.1 MPa, 0.13 MPa, 0.15 MPa, 0.17 MPa, 0.19 MPa, 0.22 MPa, 0.24 MPa, 0.26 MPa, 0.28 MPa or 0.3 MPa.

[0034] The present invention further preferably controls the hot gas introduction pressure within the above range, which has a better drying effect.

[0035] Preferably, the first drying time in step (2) is 2 to 5 min, for example, 2 min, 2.4 min, 2.7 min, 3 min, 3.4 min, 3.7 min, 4 min, 4.4 min, 4.7 min or 5 min.

[0036] Preferably, the duration of the vacuuming in step (3) is 10 to 15 min, for example, 10 min, 10.6 min, 11.2 min, 11.7 min, 12.3 min, 12.8 min, 13.4 min, 13.9 min, 14.5 min or 15 min, etc.

[0037] Preferably, the heating temperature is 100-120°C, for example, it can be 100°C, 103°C, 105°C, 107°C, 109°C, 112°C, 114°C, 116°C, 118°C or 120°C.

[0038] The duration of the vacuuming (under the condition of a vacuum degree of 1.5 to 3 kPa) and the heating temperature of the present invention are very critical, and can achieve the effect of gasifying the liquid phase in the capillary, and has the advantage of deep water removal.

[0039] Preferably, the vacuum gauge of the vacuum extraction displays 1.5-3 kPa, for example, it may be 1.5 kPa, 1.6 kPa, 1.7 kPa, 1.8 kPa, 1.9 kPa, 2.0 kPa, 2.2 kPa, 2.3 kPa, 2.4 kPa, 2.5 kPa or 3 kPa, etc.

[0040] Preferably, the target material is a matrix integrated target material.

[0041] Since the surface area of ​​the matrix-integrated target is relatively large, it is difficult to remove residual moisture on the surface. By adopting the method provided by the present invention, the moisture in the pores of the large surface can be fully removed, which is very important for preventing the target from being oxidized later.

[0042] As a preferred technical solution of the present invention, the method comprises the following steps:

[0043] (1) After the sandblasted target material with a surface roughness of 2 to 5 μm is cleaned, the content of isopropyl alcohol in the cleaning agent is 10 to 15 wt %, the content of ethanol is 5 to 15 wt %, and the balance is water. A sealing layer is firstly arranged on the surface of the sandblasted target material, the sealing layer has a switchable exhaust hole and an air vent, the exhaust hole and the air vent are arranged on both sides of the sandblasted target material, the sealing layer is arranged closely to the surface of the sandblasted target material, and the sealing layer forms a closed space with the sandblasting area of ​​the sandblasted target material except the exhaust hole and the air vent, thereby obtaining a sealed target material;

[0044] (2) opening the exhaust hole and the vent hole, introducing hot gas with a temperature of 80 to 95° C. and a pressure of 0.1 to 0.3 MPa into the vent hole, and exhausting the hot gas from the exhaust hole, and performing a first drying of the sealed target material for 2 to 5 minutes;

[0045] (3) The vent hole is closed, and vacuum is continuously drawn from the vacuum hole until the vacuum gauge shows 1.5 to 3 kPa, and the mixture is heated to 100 to 120° C. and maintained for 10 to 15 minutes for a second drying to obtain an anti-oxidation target material.

[0046] The present invention has no special limitation on the target material used in the above process, and any target material known to those skilled in the art may be used, such as aluminum, copper, titanium, molybdenum or alloys thereof.

[0047] Compared with the prior art, the present invention has at least the following beneficial effects:

[0048] (1) The method for anti-oxidation of the target material after sandblasting cleaning provided by the present invention abandons the conventional purging method for drying, but first establishes a closed space on the surface of the target material after sandblasting, and then purges, which has a better effect of removing moisture, and can be applied to surfaces with smaller surface roughness after sandblasting, and has better anti-oxidation performance;

[0049] (2) The method for anti-oxidation of the target material after sandblasting cleaning provided by the present invention performs a second drying and vacuuming treatment after the first drying, which can fully extract the liquid phase in the capillary, further improving the anti-oxidation effect. After being treated by the method of the present invention, the target material will not be oxidized to the point of being unqualified after being placed for more than 50 days, and the number of days for discoloration to occur reaches more than 42 days. It has excellent anti-rust ability and broad application prospects. DETAILED DESCRIPTION

[0050] For the convenience of understanding the present invention, the present invention lists the following embodiments. It should be understood by those skilled in the art that the embodiments are only to help understand the present invention and should not be regarded as specific limitations of the present invention.

[0051] It should be understood that, in the description of the present invention, the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate orientations or positional relationships, which are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and the like are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, features defined as "first", "second", and the like may explicitly or implicitly include one or more of the features. In the description of the present invention, unless otherwise specified, "multiple" means two or more.

[0052] It should be noted that in the description of the present invention, unless otherwise clearly specified and limited, the terms "disposed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood by specific circumstances.

[0053] Those skilled in the art should understand that the present invention necessarily includes necessary pipelines, conventional valves and general pump equipment for realizing a complete process, but the above content does not belong to the main inventive point of the present invention. Those skilled in the art can add layouts on their own based on the process flow and equipment structure selection, and the present invention does not make special requirements and specific limitations on this.

[0054] For the sake of comparison, pure copper targets are used in the following embodiments and comparative examples, but the present invention can also be applied to other metal or metal alloy targets, and has a better anti-rust effect on pure copper targets.

[0055] Example 1

[0056] This embodiment provides a method for preventing oxidation of a target material after sandblasting cleaning, the method comprising the following steps:

[0057] (1) After the sandblasted target material with a surface roughness of 2.5 μm is cleaned, the content of isopropyl alcohol in the cleaning agent is 15 wt %, the content of ethanol is 10 wt %, and the balance is water. A sealing layer (having a soft layer, the soft layer is arranged close to the sandblasted target material, wherein the material of the soft layer is Wacker R750 silicone rubber) is firstly arranged on the surface of the sandblasted target material, the sealing layer has a switchable exhaust hole and a vent hole, the exhaust hole and the vent hole are arranged on both sides of the sandblasted target material, and there are two vent holes, which are arranged at both ends of one side of the sandblasted target material, the sealing layer is arranged closely to the surface of the sandblasted target material, and the sealing layer forms a closed space with the sandblasting area of ​​the sandblasted target material except the exhaust hole and the vent hole, thereby obtaining a sealed target material;

[0058] (2) opening the exhaust hole and the vent hole, introducing nitrogen gas at a temperature of 85° C. and a pressure of 0.25 MPa into the vent hole, and exhausting the nitrogen gas from the exhaust hole, and performing a first drying of the sealed target material for 3.5 min;

[0059] (3) The vent hole is closed, and vacuum is continuously drawn from the vacuum hole until the vacuum gauge shows 2.5 kPa, and the mixture is heated to 110° C. and maintained for 12 minutes for a second drying to obtain an anti-oxidation target material.

[0060] Example 2

[0061] This embodiment provides a method for preventing oxidation of a target material after sandblasting cleaning, the method comprising the following steps:

[0062] (1) After the sandblasted target material with a surface roughness of 2 μm is cleaned, the content of isopropyl alcohol in the cleaning agent is 10 wt %, the content of ethanol is 15 wt %, and the balance is water. A sealing layer (having a soft layer, the soft layer is arranged close to the sandblasted target material, wherein the material of the soft layer is Wacker R750 silicone rubber) is firstly arranged on the surface of the sandblasted target material, the sealing layer has a switchable exhaust hole and a vent hole, the exhaust hole and the vent hole are arranged on both sides of the sandblasted target material, and there are two vent holes, which are arranged at both ends of one side of the sandblasted target material, the sealing layer is arranged closely to the surface of the sandblasted target material, and the sealing layer forms a closed space with the sandblasting area of ​​the sandblasted target material except the exhaust hole and the vent hole, thereby obtaining a sealed target material;

[0063] (2) opening the exhaust hole and the vent hole, introducing nitrogen gas at a temperature of 95° C. and a pressure of 0.3 MPa into the vent hole, and exhausting the nitrogen gas from the exhaust hole, and performing a first drying of the sealed target material for 2 minutes;

[0064] (3) The vent hole is closed, and vacuum is continuously drawn from the evacuation hole until the vacuum gauge shows 3 kPa, and the mixture is heated to 120° C. and maintained for 10 min for a second drying to obtain an anti-oxidation target material.

[0065] Example 3

[0066] This embodiment provides a method for preventing oxidation of a target material after sandblasting cleaning, the method comprising the following steps:

[0067] (1) After the sandblasted target material with a surface roughness of 5 μm is cleaned, the content of isopropyl alcohol in the cleaning agent is 15 wt %, the content of ethanol is 5 wt %, and the balance is water. A sealing layer (having a soft layer, the soft layer is arranged close to the sandblasted target material, wherein the material of the soft layer is Wacker R750 silicone rubber) is firstly arranged on the surface of the sandblasted target material, the sealing layer has a switchable exhaust hole and a vent hole, the exhaust hole and the vent hole are arranged on both sides of the sandblasted target material, and there are two vent holes, which are arranged at both ends of one side of the sandblasted target material, the sealing layer is arranged closely to the surface of the sandblasted target material, and the sealing layer forms a closed space with the sandblasting area of ​​the sandblasted target material except the exhaust hole and the vent hole, thereby obtaining a sealed target material;

[0068] (2) opening the exhaust hole and the vent hole, introducing nitrogen gas at a temperature of 80° C. and a pressure of 0.1 MPa into the vent hole, and exhausting the nitrogen gas from the exhaust hole, and performing a first drying of the sealed target material for 5 minutes;

[0069] (3) The vent hole is closed, and vacuum is continuously drawn from the evacuation hole until the vacuum gauge shows 1.5 kPa, and the mixture is heated to 100° C. and maintained for 15 minutes for a second drying to obtain an anti-oxidation target material.

[0070] Example 4

[0071] This embodiment provides a method for preventing oxidation of a target material after sandblasting cleaning. The method is the same as that of Embodiment 1 except that the second drying is maintained for 5 minutes in step (3), and will not be described in detail here.

[0072] Example 5

[0073] This embodiment provides a method for preventing oxidation of a target material after sandblasting cleaning. The method is the same as that of Embodiment 1 except that the second drying is maintained for 20 minutes in step (3), and will not be described in detail here.

[0074] Example 6

[0075] This embodiment provides a method for preventing oxidation of a target material after sandblasting cleaning. The method is the same as that of Embodiment 1 except that the heating temperature in step (3) is 90° C., and will not be described in detail here.

[0076] Example 7

[0077] This embodiment provides a method for preventing oxidation of a target material after sandblasting cleaning. The method is the same as that of Embodiment 1 except that the heating temperature in step (3) is 130° C., and will not be described in detail here.

[0078] Example 8

[0079] This embodiment provides a method for preventing oxidation of a target material after sandblasting cleaning. The method is the same as that of Embodiment 1 except that there is a 1 mm gap between the sealing layer and the surface of the target material after sandblasting in step (1), and will not be described in detail here.

[0080] Example 9

[0081] This embodiment provides a method for preventing oxidation of a target material after sandblasting cleaning. The method is the same as that of Embodiment 1 except that hot gas with a pressure of 0.05 MPa is introduced in step (2), and will not be described in detail here.

[0082] Example 10

[0083] This embodiment provides a method for preventing oxidation of a target material after sandblasting cleaning. The method is the same as that of Embodiment 1 except that hot gas with a pressure of 0.4 MPa is introduced in step (2), and thus will not be described in detail here.

[0084] Comparative Example 1

[0085] This comparative example provides a method for preventing oxidation of a target material after sandblasting cleaning. The method is the same as Example 1 except that no sealing layer is provided and the target material after sandblasting is placed in a vacuum drying oven for a second drying in step (3) (the temperature is the same as the vacuum degree displayed by the vacuum gauge). The details are not repeated here.

[0086] Comparative Example 2

[0087] This comparative example provides a method for preventing oxidation of a target material after sandblasting cleaning. The method is the same as Example 1 except that step (2) is not performed and the second drying time is extended to 15.5 minutes, and the details are not repeated here.

[0088] Comparative Example 3

[0089] This comparative example provides a method for preventing oxidation of a target material after sandblasting cleaning. The method is the same as Example 1 except that step (3) is not performed and the first drying time is extended to 15.5 minutes, and the rest is not repeated here.

[0090] Test method: Place the dried target material at a humidity of 25% RH and 25°C, observe the rust on the surface, and record the number of days when discoloration begins to occur to judge the anti-oxidation ability of the target material after sandblasting, as well as the number of days when rust spots form and the target material becomes unqualified. The statistical duration is 50 days.

[0091] The test results of the above embodiments and comparative examples are shown in Table 1.

[0092] Table 1

[0093]

[0094]

[0095] The “ / ” in Table 1 indicates that the target material has been in a qualified state during the test time.

[0096] From Table 1 we can see that:

[0097] (1) It can be seen from Examples 1 to 3 that the method for anti-oxidation of the target material after sandblasting cleaning provided by the present invention has the advantage of improving the rust resistance of the target material after sandblasting. After being treated by the method of the present invention, the target material will not be oxidized to the point of being unqualified after being placed for more than 50 days, and the number of days for discoloration to occur is more than 42 days, and the rust resistance is excellent;

[0098] (2) Combining Example 1 and Examples 4 to 5, it can be seen that in Example 1, the second drying is maintained for 12 minutes, compared with 5 minutes and 20 minutes respectively in Examples 4 to 5. In Example 1, the target material begins to change color in 45 days, and the target material is still qualified after 50 days, while the target material begins to change color in only 35 days in Example 4, and the target material rusts to an unqualified state on the 48th day. In Example 5, extending the drying time does not significantly improve the performance, and the service life of the sealing layer is damaged. This shows that the present invention can further improve the anti-rust performance of the target material after sandblasting and extend the service life of the sealing layer by preferably adopting a suitable second drying time;

[0099] (3) Combining Example 1 and Examples 6-7, it can be seen that the heating temperature in step (3) of Example 1 is 110°C. Compared with 90°C and 130°C respectively used in Examples 6-7, the target material in Example 1 starts to change color in 45 days, and the target material is still qualified after 50 days of placement, while the target material in Example 6 starts to change color in only 38 days, and the target material rusts to an unqualified state on the 49th day. In Example 7, increasing the drying temperature does not significantly improve the performance, and the service life of the sealing layer is damaged. This shows that the present invention can further improve the anti-rust performance of the target material after sandblasting and extend the service life of the sealing layer by preferably using a suitable second drying temperature;

[0100] (4) Combining Example 1 and Examples 9 to 10, it can be seen that in step (2) of Example 1, the hot gas with a pressure of 0.25 MPa is introduced. Compared with 0.05 MPa and 0.4 MPa respectively used in Examples 9 to 10, the target material in Example 1 starts to change color after 45 days, and the target material is still qualified after 50 days of placement, while the target material in Example 9 starts to change color after only 32 days, and the target material rusts to an unqualified state on the 45th day. In Example 10, increasing the gas pressure does not significantly improve the performance, and the service life of the sealing layer is damaged. This shows that the present invention can further improve the anti-rust performance of the target material after sandblasting and extend the service life of the sealing layer by preferably using a suitable gas pressure;

[0101] (5) It can be seen from Example 1 and Example 8 that the sealing layer of Example 1 is in close contact with the surface of the target material after sandblasting. Compared with Example 8 in which there is a 1 mm gap between the sealing layer and the surface of the target material after sandblasting, the target material in Example 1 starts to change color after 45 days, and the target material is still qualified after 50 days of placement, while the target material in Example 8 starts to change color after only 28 days, and the target material rusts to an unqualified state on the 34th day. This shows that the present invention has a better drying effect by preferably setting the sealing layer in close contact with the surface of the target material after sandblasting, and can further improve the rust resistance of the target material after sandblasting;

[0102] (3) It can be seen from Example 1 and Comparative Examples 1 to 3 that the setting of the sealing layer and the first drying and second drying steps have a significant impact on the overall drying process. The present invention can significantly improve the anti-oxidation performance of the target material after sandblasting by setting a sealing layer and simultaneously setting the first drying and second drying steps.

[0103] The present invention illustrates the detailed features of the present invention through the above embodiments, but the present invention is not limited to the above detailed features, that is, it does not mean that the present invention must rely on the above detailed features to be implemented. Those skilled in the art should understand that any improvement to the present invention, equivalent replacement of the technical features selected by the present invention, addition of auxiliary technical features, selection of specific methods, etc., all fall within the protection scope and disclosure scope of the present invention.

Claims

1. A method for preventing oxidation of a target material after sandblasting cleaning, characterized in that: The method comprises the following steps: (1) After the sandblasted target is cleaned, a sealing layer is firstly provided on the surface of the sandblasted target, wherein the sealing layer has a switchable exhaust hole and a vent hole, thereby obtaining a sealed target; (2) opening the exhaust hole and the vent hole, introducing hot gas into the vent hole, and exhausting the hot gas from the exhaust hole to perform a first drying on the sealed target material; (3) The vent hole is closed, and vacuum is continuously drawn from the evacuation hole and heating is performed to perform a second drying to obtain an oxidation-resistant target material.

2. The method for anti-oxidation of target material after sandblasting according to claim 1, characterized in that: The surface roughness of the target material after sandblasting in step (1) is 2 to 5 μm.

3. The method for anti-oxidation of target material after sandblasting according to claim 1 or 2, characterized in that: The surface sand material of the target material after sandblasting in step (1) comprises white jade corundum; Preferably, the particle size of the white jade corundum is in the range of 70 to 80 meshes.

4. The method for anti-oxidation of a target material after sandblasting according to any one of claims 1 to 3, characterized in that: The cleaning agent used in step (1) includes isopropanol, water and ethanol; Preferably, the content of isopropanol in the cleaning agent is 10-15wt%; Preferably, the content of ethanol in the cleaning agent is 5-15 wt %.

5. The method for anti-oxidation of a target material after sandblasting according to any one of claims 1 to 4, characterized in that: The exhaust hole and the vent hole in step (1) are arranged on both sides of the target material after sandblasting; Preferably, the sealing layer is arranged in close contact with the surface of the target material after sandblasting.

6. The method for anti-oxidation of a target material after sandblasting according to any one of claims 1 to 5, characterized in that: In step (1), the sealing layer forms a closed space with the sandblasting area of ​​the target material after sandblasting, except for the air extraction hole and the air vent hole.

7. The method for anti-oxidation of a target material after sandblasting according to any one of claims 1 to 6, characterized in that: The hot gas in step (2) includes any one of nitrogen, argon or helium, or a combination of at least two of them.

8. The method for anti-oxidation of a target material after sandblasting according to any one of claims 1 to 7, characterized in that: The temperature of the hot gas in step (2) is 80-95° C.; Preferably, the hot gas introduction pressure is 0.1-0.3 MPa.

9. The method for anti-oxidation of a target material after sandblasting according to any one of claims 1 to 8, characterized in that: The first drying time in step (2) is 2 to 5 minutes.

10. The method for anti-oxidation of a target material after sandblasting according to any one of claims 1 to 9, characterized in that: The duration of the vacuuming in step (3) is 10 to 15 minutes; Preferably, the heating temperature is 100-120°C.

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