Etching rate testing device for etching liquid

Abstract

The invention belongs to the technical field of etching testing devices, and particularly discloses an etching solution etching rate testing device which comprises a testing frame, two partition plates are arranged in the testing frame, an etching groove is formed between the two partition plates, an etching solution is added into the etching groove, a sliding frame is arranged on the top of the testing frame, and the sliding frame is arranged on the top of the testing frame. And the bottom of the sliding frame is matched with a clamping part to clamp a to-be-etched detection piece. The pressing frame moves up and down on the inner side of the through groove in a pressing mode through elastic cooperation of the first spring, the pressing frame moving downwards drives the detection piece into etching liquid for etching treatment, and when the detection piece moves upwards, the bottom end of the rotating plate is attached to the side face of the detection piece through elastic force of the second spring; the bottom ends of the two rotating plates are matched to scrape the etching liquid on the surface of the detection piece, excessive etching liquid is prevented from remaining on the surface of the detection piece, workers are prevented from making contact with the etching liquid on the surface of the detection piece, and the safety of the detection piece in the etching process is guaranteed.

Description

Technical Field

[0001] The invention belongs to the technical field of etching test devices, and in particular relates to an etching rate test device for an etching solution. Background Art

[0002] Etching is a process of creating patterns or structures on the surface of materials such as metal, glass or plastic by using an etching solution to selectively remove part of the material surface, leaving behind a designed pattern or structure.

[0003] Most of the etching liquid etching rate testing devices currently available on the market require manual transfer of the plate for etching efficiency testing, which affects the efficiency of the etching test. In addition, since the etching liquid has a certain corrosiveness, it may cause harm to the staff, thereby reducing the safety of the etching test.

[0004] Therefore, it is necessary to invent an etching rate testing device for etching solution to solve the above problems. Summary of the invention

[0005] In view of the above problems, the present invention provides an etching rate testing device for an etching solution to solve the problems raised in the above background technology.

[0006] To achieve the above-mentioned purpose, the present invention provides the following technical solutions: an etching rate test device for an etching liquid, comprising a test frame, two partitions are arranged inside the test frame, an etching groove is formed between the two partitions, and etching liquid is added inside the etching groove, a slide is arranged on the top of the test frame, a clamping component is used at the bottom of the slide to clamp the detection piece to be etched, a movable component for controlling the upward and downward movement of the clamping component is arranged at the center of the slide, and the movable component comprises a press frame, a through groove corresponding to the press frame is arranged at the center of the slide, and two grooves on the top surface of the press frame are provided. The ends are fixed with side edges, and the top surface of the slide is fixed with a convex rod that passes through the side edges, a first spring is sleeved on the surface of the convex rod, the top of the first spring is connected to the bottom surface of the side edge, and the bottom end of the first spring is connected to the top surface of the pressure frame, and convex blocks are fixed to the bottom surfaces of both ends of the slide, and inner rods are embedded on both sides of the top surface of the test frame. The moving slide slides on the surface of the inner rod using the convex blocks, and the downward pressure frame uses the clamping component to move the detection part down to the inside of the etching groove, and the etching liquid etches the detection part. Side grooves are provided on both end surfaces of the test frame, and inner plates are fixed inside the side grooves.

[0007] Furthermore, the clamping component includes two opposite side frames, the inner ends of the side frames are connected to the bottom surface of the pressure frame by means of connecting plates, the movable component includes two ring frames, the two ring frames correspond to the two side frames one by one, and the top ends of the ring frames are connected to the bottom surface of the slide frame, the inner side walls of the ring frames are provided with inner strips, and the outer circumferential surfaces of the side frames are provided with an annular groove corresponding to the inner strips, and the side frames move up and down on the inner strip surfaces of the ring frames by means of the annular grooves.

[0008] Furthermore, a frame is provided on the inner side of the side frame, and a moving rod is connected to the outer side of the frame, and the moving rod passes through the center of the side frame accordingly, and a circular plate is fixed to the outer end of the side frame, and the outer end of the moving rod passes through the center of the circular plate accordingly, and two oppositely arranged ring pieces are fixed to the outer side of the circular plate, and the two ring pieces are surrounded on both sides of the moving rod, and a rotating sleeve is sleeved on the outer side of the two ring pieces, and the rotating sleeve is spirally sleeved on the surface of the moving rod, and the rotating sleeve rotates to control the movement of the frame using the moving rod, and the two opposite frame frames cooperate to clamp the detection piece.

[0009] Furthermore, a slide plate is fixed on the surface of the movable rod, a side groove corresponding to the slide plate is arranged on the inner side of the outer circumferential surface of the side frame, a cross bar passing through the slide plate is fixed at the center of the side groove, and the movable slide plate slides on the surface of the cross bar.

[0010] Furthermore, a bending plate is fixed to the inner side of the top surface of the partition, the two bending plates are arranged opposite to each other, two rotating plates are arranged between the two bending plates, the top end of the rotating plate is hinged to the bottom end of the bending plate, and a slot is formed between the bottom ends of the two rotating plates. The bottom end of the detection piece corresponds to the slot, and the downward-moving detection piece is inserted into the etching liquid in the etching tank via the slot.

[0011] Furthermore, limiting frames are provided on both sides of the bending plate, and vertical rods penetrating the ends of the limiting frames are fixed to the bottom surfaces of both ends of the bending plate. The two limiting frames are respectively located at the two ends of the rotating plate, and two sliders are provided at the center of the limiting frame. The two sliders inside the limiting frame are respectively connected to the two sliders inside the other limiting frame by sliding rods. The two rotating plates correspond to the two sliding rods one by one, and the bottom ends of the rotating plates are sleeved on the surfaces of the sliding rods.

[0012] Furthermore, when the bottom ends of the two rotating plates are separated from each other, the bottom end of the rotating rotating plate uses the sliding rod to move the limiting frame downward on the surface of the vertical rod; when the bottom ends of the two rotating plates are close to each other, the bottom end of the rotating rotating plate uses the sliding rod to move the limiting frame upward on the surface of the vertical rod.

[0013] Furthermore, a limiting rod penetrating the two sliders is fixed inside the limiting frame, and second springs are sleeved on both ends of the limiting rod. The side of the slider is connected to the inner end of the limiting frame by the second spring, and the elastic force of the second spring makes the two sliders fit each other.

[0014] Technical effects and advantages of the present invention: 1. The present invention uses a pressing method and the elastic force of a first spring to make the pressure frame move up and down inside the through groove. The downward-moving pressure frame drives the detection part into the etching liquid for etching. When the detection part moves up, the elastic force of the second spring makes the bottom end of the rotating plate fit against the side of the detection part. The bottom ends of the two rotating plates cooperate to scrape the etching liquid on the surface of the detection part, avoiding excessive etching liquid from remaining on the surface of the detection part, preventing the staff from contacting the etching liquid on the surface of the detection part, and ensuring the safety of the detection part during the etching process.

[0015] 2. The present invention adjusts the relative distance between the two frames in real time through the spiral cooperation of the rotating sleeve and the moving rod, which facilitates the cooperation of the two frames to clamp detection pieces of different lengths and improves the adaptability of the clamping components to detection pieces of different lengths. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 1 is an overall schematic diagram of an etching rate testing device for an etching solution according to an embodiment of the present invention; Figure 2 is a cross-sectional three-dimensional schematic diagram of a test frame according to an embodiment of the present invention; Figure 3 Schematic diagram of a vertical insertion press frame at the center of a slide frame according to an embodiment of the present invention; Figure 4 It is a schematic diagram of the cooperation between the side frame and the ring frame of the clamping component of an embodiment of the present invention; Figure 5 is a schematic diagram of a circular plate in which a moving rod penetrates through an outer end of a side frame according to an embodiment of the present invention; Figure 6 It is a schematic diagram of a rotating plate connected by two opposite bending plates in an embodiment of the present invention; Figure 7 It is a schematic diagram of the bottom end of the rotating plate of the embodiment of the present invention being sleeved on the surface of the sliding rod; Figure 8 The embodiment of the present invention Figure 7 A magnified view of the structure of part A; In the figure: 1, test frame; 2, partition; 3, slide; 4, detection member; 5, pressure frame; 6, convex rod; 7, first spring; 8, convex block; 9, inner rod; 10, inner plate; 11, side frame; 12, ring frame; 13, inner strip; 14, ring groove; 15, frame; 16, moving rod; 17, ring piece; 18, rotating sleeve; 19, slide plate; 20, cross bar; 21, bending plate; 22, rotating plate; 23, limiting frame; 24, vertical rod; 25, slider; 26, slide bar; 27, limiting rod; 28, second spring. DETAILED DESCRIPTION

[0017] In order to make the purpose, technical solution and advantages of the embodiments of the present invention more clear, the technical solution of the present invention will be clearly and completely described below in conjunction with the embodiments.

[0018] The present invention provides an etching rate testing device for an etching solution, such as Figures 1 to 3As shown, it includes a test frame 1, two partitions 2 are arranged inside the test frame 1, an etching groove is formed between the two partitions 2, and etching liquid is added inside the etching groove. A slide 3 is arranged on the top of the test frame 1, and a clamping component is used to clamp the detection piece 4 to be etched at the bottom of the slide 3. A movable component for controlling the upward and downward movement of the clamping component is arranged at the center of the slide 3. The movable component includes a pressing frame 5. A through groove corresponding to the pressing frame 5 is arranged at the center of the slide 3. Side edges are fixed at both ends of the top surface of the pressing frame 5, and a through side is fixed on the top surface of the slide 3. The convex rod 6 on the side has a first spring 7 sleeved on its surface, the top of the first spring 7 is connected to the bottom of the side, the bottom of the first spring 7 is connected to the top of the pressure frame 5, the bottom surfaces of both ends of the slide 3 are fixed with convex blocks 8, both sides of the top surface of the test frame 1 are embedded with inner rods 9, the moving slide 3 slides on the surface of the inner rod 9 by means of the convex blocks 8, the downward pressure frame 5 uses the clamping component to move the detection part 4 down to the inside of the etching groove, the etching liquid etches the detection part 4, and the two end surfaces of the test frame 1 are provided with side grooves, and the inner plates 10 are fixed inside the side grooves. The slide 3 is pushed to move left, and the moving slide 3 uses the protrusion 8 to move on the surface of the inner rod 9 until the slide 3 moves to the top of the inner plate 10, and the detection piece 4 that needs to be etched is placed into the bottom of the slide 3 through the side groove, and the detection piece 4 is clamped by the clamping component, and the slide 3 is moved in the opposite direction. The slide 3 uses the clamping component to drive the detection piece 4 to move to the top of the etching groove, and press the pressing frame 5. The pressing frame 5 uses the first spring 7 on the surface of the side squeezing the protrusion 6. The two protrusions 6 and the through groove make the pressing frame 5 move down smoothly. The downward pressing frame 5 uses the clamping component to move the detection piece 4 down until the detection piece 4 enters the etching liquid. After etching for a period of time, the pressure applied to the pressing frame 5 is released, and the elastic force of the first spring 7 causes the pressing frame 5 to move up through the side. The upward pressing frame 5 uses the clamping component to move the detection piece 4 up synchronously until the detection piece 4 moves out of the etching groove, and the etching process of the detection piece 4 is completed.

[0019] Among them, the mass of the detection part 4 before etching is m1, the mass after etching is m2, the time before etching is t1, and the time after etching is t2, wherein the etching rate formula is: m1-m2 / t2-t1. After calculation by the etching rate formula, the etching rate of the detection part 4 is obtained, and the etching rate test of the detection part 4 is completed.

[0020] exist Figures 1 to 4In the figure, the clamping component includes two opposite side frames 11, the inner ends of the side frames 11 are connected to the bottom surface of the pressing frame 5 by means of a connecting plate, the movable component includes two ring frames 12, the two ring frames 12 correspond to the two side frames 11 one by one, and the top ends of the ring frames 12 are connected to the bottom surface of the slide 3, the inner side walls of the ring frames 12 are provided with inner strips 13, the outer circumferential surfaces of the side frames 11 are provided with an annular groove 14 corresponding to the inner strips 13, and the side frames 11 move up and down on the surfaces of the inner strips 13 of the ring frames 12 by means of the annular groove 14. The elastic force of the pressure frame 5 cooperates with the first spring 7, so that the pressure frame 5 can move up and down inside the through groove. The pressure frame 5 uses the connecting rod to drive the side frame 11 to move up and down synchronously. The moving side frame 11 moves inside the ring frame 12 using the ring groove 14. The inner strip 13 cooperates with the ring groove 14 to limit the side frame 11, and the pressure frame 5 limits the inner end of the side frame 11 to avoid the side frame 11 from shifting during the up and down movement, thereby ensuring the integration of the pressure frame 5 and the side frame 11.

[0021] exist Figure 4 and Figure 5 In the embodiment, a frame 15 is provided on the inner side of the side frame 11, and a moving rod 16 is connected to the outer side of the frame 15. The moving rod 16 passes through the center of the side frame 11. A circular plate is fixed to the outer end of the side frame 11. The outer end of the moving rod 16 passes through the center of the circular plate. Two oppositely arranged ring pieces 17 are fixed to the outer side of the circular plate. The two ring pieces 17 surround the two sides of the moving rod 16. A rotating sleeve 18 is sleeved on the outer side of the two ring pieces 17. The rotating sleeve 18 is spirally sleeved on the surface of the moving rod 16. The rotating sleeve 18 rotates to control the movement of the frame 15 by using the moving rod 16. The two opposite frames 15 cooperate to clamp the detection member 4. A slide plate 19 is fixed to the surface of the moving rod 16. A side groove corresponding to the slide plate 19 is provided on the inner side of the outer side of the circumference of the side frame 11. A cross bar 20 passing through the slide plate 19 is fixed at the center of the side groove. The moving slide plate 19 slides on the surface of the cross bar 20. After the detection member 4 is placed between the two frames 15, the rotating sleeve 18 is twisted. Since the circular plate uses the ring sheet 17 to limit the rotating sleeve 18, the rotating sleeve 18 is prevented from being separated from the circular plate during the rotation process. The rotating rotating sleeve 18 and the spiral fit of the moving rod 16 make the moving rod 16 move back and forth inside the side frame 11. The moving rod 16 slides back and forth on the surface of the cross bar 20 inside the side groove using the slide plate 19. The cross bar 20 limits the moving rod 16 using the slide plate 19 to prevent the moving rod 16 from rotating inside the side frame 11, and the moving moving rod 16 is prevented from rotating inside the side frame 11 under the spiral fit of the rotating sleeve 18.

[0022] The moving rod 16 moves inside the side frame 11, and the moving moving rod 16 drives the frame 15 to move synchronously. The moving frame 15 gradually approaches the detection piece 4 until the side of the detection piece 4 enters the inner groove of the frame 15. The two frames 15 cooperate to clamp the detection piece 4, so that the detection piece 4 is stably located at the bottom of the pressing frame 5. The spiral cooperation of the rotating sleeve 18 and the moving rod 16 can be used to adjust the relative distance between the two frames 15 in real time, so that the two frames 15 can cooperate to clamp the detection pieces 4 of different lengths, thereby improving the adaptability of the clamping component to the detection pieces 4 of different lengths.

[0023] exist Figure 2 and Figure 6 In the figure, a bending plate 21 is fixed to the inner side of the top surface of the partition 2, and the two bending plates 21 are arranged opposite to each other. Two rotating plates 22 are arranged between the two bending plates 21. The top of the rotating plate 22 is hinged to the bottom of the bending plate 21, and a slot is formed between the bottom ends of the two rotating plates 22. The bottom end of the detection member 4 corresponds to the slot, and the downwardly moved detection member 4 is inserted into the etching liquid in the etching tank through the slot. When the slide 3 moves to the right, the moving slide 3 uses the two frames 15 of the clamping parts to move the detection piece 4 to the top of the etching groove. At this time, the bottom end of the detection piece 4 is at the top of the slot, pressing the press frame 5. The press frame 5 uses the side frame 11 and the moving rod 16 to drive the detection piece 4 to move vertically downward. When the bottom end of the downwardly moved detection piece 4 contacts the inner ends of the two rotating plates 22, the pressure of the detection piece 4 on the bottom end of the rotating plate 22 causes the rotating plate 22 to rotate. The top end of the rotating plate 22 rotates at the bottom end of the bending plate 21. The bottom ends of the two opposite rotating plates 22 gradually move away from each other during the process of rotating toward each other, and the slot width between the two rotating plates 22 gradually increases. The downwardly moved detection piece 4 is inserted into the etching liquid through the slot until the bottom surface of the frame 15 fits with the top surface of the rotating plate 22. At this time, the press frame 5 stops moving downward, and the etching liquid etches the detection piece 4 at the bottom of the rotating plate 22. After etching is completed, release the pressure applied to the top of the press frame 5, the elastic force of the first spring 7 causes the press frame 5 to move upward, and the press frame 5 uses the clamping component to move the detection member 4 upward until the detection member 4 is moved out of the etching tank, completing the etching process of the detection member 4. At this time, the slide 3 uses the clamping component to drive the detection member 4 to continue to move right, and the detection member 4 moves to the right side of the etching tank. A fan is installed inside the test frame 1, and the detection member 4 is air-dried by the fan. When the detection member 4 moves to the top of the inner plate 10 on the right side, the bottom surface of the detection member 4 is in contact with the top surface of the inner plate 10, and the rotating sleeve 18 is screwed in the opposite direction. The spiral cooperation of the rotating sleeve 18 and the moving rod 16 makes the frame 15 away from the detection member 4, and the detection member 4 is gradually placed on the top of the inner plate 10. The etched detection member 4 is weighed to obtain the weight m2 of the detection member 4.

[0024] exist Figure 2 , Figures 6 to 8In the embodiment, both sides of the bending plate 21 are provided with limiting frames 23, and the bottom surfaces of both ends of the bending plate 21 are fixed with vertical rods 24 penetrating the ends of the limiting frames 23. The two limiting frames 23 are respectively located at the two ends of the rotating plate 22, and two sliders 25 are respectively arranged at the center of the limiting frame 23. The two sliders 25 inside the limiting frame 23 are respectively connected to the two sliders 25 inside the other limiting frame 23 by means of sliders 26. The two rotating plates 22 correspond to the two sliders 26 one by one, and the bottom ends of the rotating plates 22 are sleeved on the surfaces of the sliders 26. When the bottom ends of the two rotating plates 22 are separated from each other, the bottom end of the rotating rotating plate 22 uses the slider 26 to make the limiting frames 23 move down on the surface of the vertical rod 24; when the bottom ends of the two rotating plates 22 are close to each other, the bottom end of the rotating rotating plate 22 uses the slider 26 to make the limiting frames 23 move up on the surface of the vertical rod 24. A limiting rod 27 penetrating the two sliders 25 is fixed inside the limiting frame 23, and second springs 28 are sleeved on both ends of the limiting rod 27. The side of the slider 25 is connected to the inner end of the limiting frame 23 by the second spring 28. The elastic force of the second spring 28 makes the two sliders 25 fit each other. When the bottom end of the downwardly moved detection member 4 contacts the top surface of the inner end of the rotating plate 22, the pressure of the detection member 4 on the rotating plate 22 causes the bottom end of the rotating plate 22 to move downward. Since the top end of the rotating plate 22 is hinged to the bottom end of the bending plate 21, the rotating plate 22 rotates under the pressure of the detection member 4, and the distance between the bottom ends of the two rotating plates 22 rotating in opposite directions gradually increases, that is, the width of the slot gradually increases. During the rotation of the rotating plate 22, the sliding bar 26 is used to drive the slider 25 to slide on the surface of the limiting rod 27 of the limiting frame 23, and the moving slider 25 cooperates to squeeze the second spring 28 at the end of the limiting rod 27. At this time, the rotating plate 22 uses the slider 25 to make the limiting frame 23 move downward on the surface of the vertical rod 24 until the bottom end of the rotating plate 22 is in contact with the side of the detection member 4, the detection member 4 continues to move downward on the inside of the slot, and the detection member 4 uses the side to slide on the bottom end surface of the rotating plate 22 until the frame 15 is in contact with the top surface of the rotating plate 22. At this time, the bottom end of the detection member 4 extends into the etching liquid, and the etching liquid etches the detection member 4.

[0025] After etching is completed, the elastic force of the first spring 7 utilizes the clamping part at the bottom of the pressure frame 5 to move the detection piece 4 upward, and the upward detection piece 4 uses the side to slide on the bottom surface of the rotating plate 22, and the elastic force of the second spring 28 makes the bottom end of the rotating plate 22 fit against the side of the detection piece 4, and the bottom ends of the two rotating plates 22 cooperate to scrape the etching liquid on the surface of the detection piece 4 to prevent excessive etching liquid from remaining on the surface of the detection piece 4 until the detection piece 4 is separated from the rotating plate 22. The elastic force of the second spring 28 pushes the slider 25 to move, and the two sliders 25 inside the limiting frame 23 approach each other. The moving slider 25 drives the bottom end of the rotating plate 22 to move using the sliding rod 26, and the bottom ends of the two opposite rotating plates 22 approach each other. The rotating plate 22 rotating in the opposite direction uses the slider 25 to move the limiting frame 23 on the surface of the vertical rod 24 until the two sliders 25 inside the limiting frame 23 fit each other.

[0026] Working principle of the present invention: Reference Figures 1 to 8 As shown, the slide 3 is pushed to move left, and the moving slide 3 uses the protrusion 8 to move on the surface of the inner rod 9 until the slide 3 moves to the top of the inner plate 10, and the detection part 4 that needs to be etched is placed at the bottom of the slide 3 through the side groove, and the rotating sleeve 18 is screwed. Since the circular plate uses the ring sheet 17 to limit the rotating sleeve 18, the rotating sleeve 18 is prevented from separating from the circular plate during rotation. The rotating rotating sleeve 18 and the spiral cooperation of the moving rod 16 enable the moving rod 16 to move back and forth inside the side frame 11.

[0027] The moving rod 16 drives the frame 15 to move synchronously, and the moving frame 15 gradually approaches the detection piece 4 until the side of the detection piece 4 enters the inner groove of the frame 15, and the two frames 15 cooperate to clamp the detection piece 4, so that the detection piece 4 is stably located at the bottom of the pressing frame 5, and the relative distance between the two frames 15 is adjusted in real time by the spiral cooperation of the rotating sleeve 18 and the moving rod 16, so that the two frames 15 cooperate to clamp the detection pieces 4 of different lengths, thereby improving the adaptability of the clamping component to the detection pieces 4 of different lengths.

[0028] When the slide 3 moves to the right, the moving slide 3 uses the two frames 15 of the clamping parts to move the detection piece 4 to the top of the etching groove. At this time, the bottom end of the detection piece 4 is at the top of the slot, pressing the press frame 5. The press frame 5 uses the side frame 11 and the moving rod 16 to drive the detection piece 4 to move vertically downward. When the bottom end of the downwardly moved detection piece 4 contacts the inner ends of the two rotating plates 22, the pressure of the detection piece 4 on the bottom end of the rotating plate 22 causes the rotating plate 22 to rotate. The top end of the rotating plate 22 rotates at the bottom end of the bending plate 21. The bottom ends of the two opposite rotating plates 22 gradually move away from each other during the process of rotating toward each other, and the slot width between the two rotating plates 22 gradually increases. The downwardly moved detection piece 4 is inserted into the etching liquid through the slot until the bottom surface of the frame 15 fits with the top surface of the rotating plate 22. At this time, the press frame 5 stops moving downward, and the etching liquid etches the detection piece 4 at the bottom of the rotating plate 22. After the etching is completed, the pressure applied to the top of the pressure frame 5 is released, and the elastic force of the first spring 7 utilizes the clamping component at the bottom of the pressure frame 5 to move the detection member 4 upward, and the upward detection member 4 uses the side to slide on the bottom surface of the rotating plate 22, and the elastic force of the second spring 28 makes the bottom end of the rotating plate 22 fit on the side of the detection member 4, and the bottom ends of the two rotating plates 22 cooperate to scrape the etching liquid on the surface of the detection member 4 to prevent excessive etching liquid from remaining on the surface of the detection member 4 until the detection member 4 is separated from the rotating plate 22, and the elastic force of the second spring 28 pushes the slider 25 to move, and the two sliders 25 inside the limiting frame 23 approach each other, and the moving slider 25 drives the bottom end of the rotating plate 22 to move by the sliding rod 26, and the bottom ends of the two opposite rotating plates 22 approach each other, and the rotating plate 22 rotating in the opposite direction uses the slider 25 to make the limiting frame 23 move up on the surface of the vertical rod 24 until the two sliders 25 inside the limiting frame 23 fit each other until the detection member 4 is moved out of the etching groove, and the etching process of the detection member 4 is completed.

[0029] At this time, the slide 3 uses the clamping component to drive the detection piece 4 to continue to move right, and the detection piece 4 moves to the right side of the etching groove. A fan is installed inside the test frame 1, and the detection piece 4 is air-dried by the fan. When the detection piece 4 moves to the top of the inner plate 10 on the right, the bottom surface of the detection piece 4 is in contact with the top surface of the inner plate 10. The rotating sleeve 18 is twisted in the opposite direction. The spiral cooperation of the rotating sleeve 18 and the moving rod 16 makes the frame 15 move away from the detection piece 4. The detection piece 4 is gradually placed on the top of the inner plate 10, and the etched detection piece 4 is weighed to obtain the weight m2 of the detection piece 4.

[0030] Among them, the mass of the detection part 4 before etching is m1, the mass after etching is m2, the time before etching is t1, and the time after etching is t2, wherein the etching rate formula is: m1-m2 / t2-t1. After calculation by the etching rate formula, the etching rate of the detection part 4 is obtained, and the etching rate test of the detection part 4 is completed.

[0031] The above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit them.

Claims

1. An etching rate testing device for an etching solution, comprising a testing frame (1), characterized in that: Two partitions (2) are arranged inside the test frame (1), an etching groove is formed between the two partitions (2), and etching liquid is added inside the etching groove. A slide (3) is arranged on the top of the test frame (1), and a clamping component is used at the bottom of the slide (3) to clamp the test piece (4) to be etched. A movable component for controlling the upward and downward movement of the clamping component is arranged at the center of the slide (3), and the movable component includes a pressing frame (5). A through groove corresponding to the pressing frame (5) is arranged at the center of the slide (3), and side edges are fixed at both ends of the top surface of the pressing frame (5), and a convex rod (6) penetrating the side edges is fixed on the top surface of the slide (3), and the convex rod The first spring (7) is sleeved on the surface of the slide (3), the top end of the first spring (7) is connected to the bottom surface of the side edge, and the bottom end of the first spring (7) is connected to the top surface of the pressure frame (5). The bottom surfaces of both ends of the slide (3) are fixed with protrusions (8). Both sides of the top surface of the test frame (1) are embedded with inner rods (9). The moving slide (3) slides on the surface of the inner rod (9) by means of the protrusions (8). The downward pressure frame (5) uses the clamping component to make the detection part (4) move down to the inside of the etching groove, and the etching liquid etches the detection part (4). The two end surfaces of the test frame (1) are provided with side grooves, and the inner plates (10) are fixed inside the side grooves.

2. The etching rate testing device of the etching solution according to claim 1, characterized in that: The clamping component comprises two opposite side frames (11), the inner ends of the side frames (11) are connected to the bottom surface of the pressing frame (5) by means of a connecting plate, the movable component comprises two ring frames (12), the two ring frames (12) correspond to the two side frames (11) one by one, and the top ends of the ring frames (12) are connected to the bottom surface of the sliding frame (3), the inner side walls of the ring frames (12) are provided with inner strips (13), the outer circumferential side surfaces of the side frames (11) are provided with an annular groove (14) corresponding to the inner strips (13), and the side frames (11) move up and down on the surface of the inner strips (13) of the ring frames (12) by means of the annular groove (14).

3. The etching rate testing device of the etching solution according to claim 2, characterized in that: A frame (15) is arranged on the inner side of the side frame (11), and a moving rod (16) is connected to the outer side of the frame (15). The moving rod (16) passes through the center of the side frame (11). A circular plate is fixed to the outer end of the side frame (11). The outer end of the moving rod (16) passes through the center of the circular plate. Two oppositely arranged ring pieces (17) are fixed to the outer side of the circular plate. The two ring pieces (17) surround the two sides of the moving rod (16). A rotating sleeve (18) is sleeved on the outer side of the two ring pieces (17). The rotating sleeve (18) is spirally sleeved on the surface of the moving rod (16). The rotating sleeve (18) rotates to control the movement of the frame (15) by using the moving rod (16). The two opposite frame frames (15) cooperate to clamp the detection member (4).

4. The etching rate testing device of the etching solution according to claim 3, characterized in that: A slide plate (19) is fixed on the surface of the movable rod (16); a side groove corresponding to the slide plate (19) is provided on the inner side of the circumferential outer side surface of the side frame (11); a cross bar (20) penetrating the slide plate (19) is fixed at the center of the side groove; the movable slide plate (19) slides on the surface of the cross bar (20).

5. The etching rate testing device of the etching solution according to claim 1, characterized in that: A bending plate (21) is fixed to the inner side of the top surface of the partition (2), the two bending plates (21) are arranged opposite to each other, two rotating plates (22) are arranged between the two bending plates (21), the top of the rotating plate (22) is hinged to the bottom of the bending plate (21), a slot is formed between the bottom ends of the two rotating plates (22), the bottom end of the detection member (4) corresponds to the slot, and the downwardly moved detection member (4) is inserted into the etching liquid in the etching tank by using the slot.

6. The etching rate testing device of the etching solution according to claim 5, characterized in that: A limiting frame (23) is provided on both sides of the bending plate (21), and vertical rods (24) penetrating the ends of the limiting frames (23) are fixed to the bottom surfaces of both ends of the bending plate (21). The two limiting frames (23) are respectively located at the two ends of the rotating plate (22). Two sliding blocks (25) are provided at the center of the limiting frame (23). The two sliding blocks (25) inside the limiting frame (23) are respectively connected to the two sliding blocks (25) inside the other limiting frame (23) by means of sliding rods (26). The two rotating plates (22) correspond to the two sliding rods (26) one by one, and the bottom end of the rotating plate (22) is sleeved on the surface of the sliding rod (26).

7. The etching rate testing device of the etching solution according to claim 6, characterized in that: When the bottom ends of the two rotating plates (22) are separated from each other, the bottom end of the rotating rotating plate (22) uses the sliding rod (26) to make the limiting frame (23) move downward on the surface of the vertical rod (24); when the bottom ends of the two rotating plates (22) are close to each other, the bottom end of the rotating rotating plate (22) uses the sliding rod (26) to make the limiting frame (23) move upward on the surface of the vertical rod (24).

8. The etching rate testing device of the etching solution according to claim 6, characterized in that: A limiting rod (27) penetrating the two sliders (25) is fixed inside the limiting frame (23), and second springs (28) are sleeved at both ends of the limiting rod (27). The side of the slider (25) is connected to the inner end of the limiting frame (23) by the second spring (28), and the elastic force of the second spring (28) causes the two sliders (25) to fit each other.

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