Refrigerant type testing head

Abstract

The invention provides a refrigerant type testing head. The refrigerant type testing head comprises a testing head body, a flow channel structure, a refrigerant pipe heat preservation shell and a testing jig structure. The top of the testing jig structure is provided with the testing head main body, the testing head main body is internally provided with the flow channel structure, one end of the flow channel structure is located outside the testing head main body and is sleeved with the refrigerant pipe heat preservation shell, and the testing assemblies are installed above the testing head main body and below the testing jig structure. The device has the advantages that high-power pressing is achieved through refrigerant type cooling, the drying air curtain can achieve the anti-condensation effect on the refrigerant type testing head, and the structural arrangement of the testing head does not have strict requirements for the equipment environment humidity; and when the refrigerant leaks, a pressure monitoring alarm is given, a worker can be reminded to check in time, the leakage does not cause damage to the test system, and the practicability of the system is further improved.

Description

Technical Field

[0001] The invention belongs to the field of chip testing, and in particular relates to a refrigerant type test head. Background Art

[0002] With the continuous advancement and development of system-on-chip technology, the heat generation power has shown a clear upward trend. This change places higher demands on test equipment. Within the constraints of size, the market urgently needs test heads that can achieve high power suppression through automatic temperature control (ATC) systems.

[0003] Currently, traditional liquid-cooled test heads exhibit several limitations in practical applications. For example, they suffer from weak compression capabilities, potential leakage risks, limited heat transfer efficiency, and the potential for chemical reactions between the liquid medium and the flow channel, leading to additional losses and blockages. These drawbacks limit the test head's ability to efficiently dissipate heat and hinder the stable testing and evaluation of system-on-chips.

[0004] To meet these challenges, developing new, efficient, and secure test head solutions is crucial. This not only impacts the accuracy of chip testing, but also directly affects the sustainable development and product quality of the entire electronics manufacturing industry. Summary of the Invention

[0005] In view of this, the present invention aims to provide a refrigerant test head to solve at least one of the problems existing in the above-mentioned prior art.

[0006] To achieve the above object, the technical solution of the present invention is achieved as follows:

[0007] A refrigerant test head comprises a test head body, a flow channel structure, a refrigerant tube insulation shell, and a test fixture structure; the test head body is mounted on top of the test fixture structure, the flow channel structure is mounted inside the test head body, one end of the flow channel structure is located outside the test head body and is sleeved with the refrigerant tube insulation shell, and test components are mounted above the test head body and below the test fixture structure.

[0008] Furthermore, the test head body includes a guide column, a flow channel insulation shell, an airbag core, a ball bushing, a top screw, a bushing pressure plate, a dry gas joint, an airbag joint, a test head substrate and a hook. A guide column is installed at each of the four corners of the bottom of the flow channel insulation shell, and the test head substrate is installed on the top of the flow channel insulation shell. The flow channel insulation shell and the test head substrate are connected by four ball bushings, two ball bushings form a group, and the two groups of ball bushings are arranged in parallel. A bushing pressure plate is installed between each group of ball bushings, and an airbag core is installed at the center of the top of the flow channel insulation shell. A dry gas joint is installed on the left and right sides of the test head substrate, and an airbag joint is installed on one side of the dry gas joint. A hook is installed on the front and back sides of the test head substrate, and a top screw is installed at each of the four corners of the test head substrate. The flow channel structure and the flow channel insulation shell, the airbag core, the ball bushing and the bushing pressure plate form an integrated structure.

[0009] Furthermore, the flow channel structure includes a flow channel body, a refrigerant pipe body and a refrigerant pipe joint. The flow channel body, the refrigerant pipe body and the refrigerant pipe joint are connected into an integrated flow channel structure by welding, and the refrigerant pipe joint is connected to the refrigerant refrigerator through an external pipeline.

[0010] Furthermore, the test head body also includes an airbag body, the flow channel insulation shell is made of high and low temperature resistant engineering plastic, and the bottom of the test head substrate is hollowed out to form the airbag body. When the airbag air joint is inflated, the flow channel structure can slide up and down along the guide column.

[0011] Furthermore, the test head body also includes a test head insulation shell and a dry gas path cover. A dry gas path cover is also installed at the bottom of the test head substrate. There is an air path flow channel under the dry gas path cover. A plurality of dry gas outlet holes are also opened on the test head substrate. A test head insulation shell is provided outside the flow channel insulation shell.

[0012] Furthermore, the test head body also includes a fixture connecting plate, a heat conducting plate and a heating plate. The test fixture structure includes a secondary test fixture, a temperature sensor and a primary test fixture. The fixture connecting plate is installed on the flow channel structure. The fixture connecting plate has multiple groups of fixed holes adapted to different test fixtures. The secondary test fixture is installed on the fixture connecting plate by bolts. A heat conducting plate and a heating plate are installed between the secondary test fixture and the fixture connecting plate. The temperature sensor is arranged in the center of the secondary test fixture, and the primary test fixture is installed on the guide column.

[0013] Furthermore, the refrigerant pipe insulation shell includes an insulation shell lower cover, an insulation shell upper cover, a connecting plate, a dry gas manifold block and a gas joint body. The insulation shell lower cover and the insulation shell upper cover form an insulation shell structure through the connecting plate. A dry gas manifold block is installed on the top of the insulation shell structure, and a gas joint body is provided on one side of the dry gas manifold block.

[0014] Furthermore, the test assembly includes a test socket, a spring pin and a first-level cylinder. The spring pin is arranged in the test socket. The test process is that the test head presses the chip into the test socket, the chip contacts the spring pin, the test head body is installed on the first-level cylinder through a hook, the first-level cylinder is installed together with the first-level test fixture through a guide column, and the first-level test fixture contacts the outer ring of the chip.

[0015] Compared with the prior art, the refrigerant test head described in the present invention has the following advantages:

[0016] The refrigerant test head described in the present invention adopts refrigerant cooling to achieve high-power suppression, and the dry air curtain can prevent condensation on the refrigerant test head. The structural setting of this test head also has no strict requirements on the equipment environment humidity; and when the refrigerant leaks, there will be a pressure monitoring alarm, which can remind the staff to check in time, and the leakage will not cause damage to the test system, further improving the practicality of this application. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The accompanying drawings, which constitute part of the present invention, are provided to provide a further understanding of the present invention. The exemplary embodiments of the present invention and their descriptions are provided to explain the present invention and do not constitute an undue limitation of the present invention. In the accompanying drawings:

[0018] Figure 1 This is a schematic diagram of the final assembly according to an embodiment of the present invention;

[0019] Figure 2 Schematic diagram of the floating mechanism of the refrigerant flow channel according to an embodiment of the present invention;

[0020] Figure 3 Schematic diagram of the anti-condensation mechanism of the refrigerant flow channel according to an embodiment of the present invention;

[0021] Figure 4 This is a schematic diagram of a temperature control mechanism according to an embodiment of the present invention;

[0022] Figure 5 This is a schematic diagram of the application of the refrigerant test head according to an embodiment of the present invention.

[0023] Description of reference numerals:

[0024] 10. Test head body; 20. Flow channel structure; 30. Refrigerant pipe insulation shell; 40. Test fixture structure;

[0025] 1001, guide column; 1002, flow channel insulation shell; 1003, airbag core; 1004, ball bushing; 1005, top screw; 1006, bushing pressure plate; 1007, dry gas connector; 1008, airbag connector; 1009, test head base plate; 1010, hook; 1011, test head insulation shell; 1012, airbag body; 1013, dry gas channel cover; 1014, dry gas outlet; 1015, fixture connection plate; 1016, thermal conductive plate; 1017, heating plate;

[0026] 2001, flow channel body; 2002, refrigerant pipe body; 2003, refrigerant pipe joint;

[0027] 3001, insulation shell lower cover; 3002, insulation shell upper cover; 3003, connection plate; 3004, dry gas manifold block; 3005, gas connector body;

[0028] 4001, secondary test fixture; 4002, temperature sensor; 4003, primary test fixture;

[0029] 5001, test socket; 5002, spring pin; 5003, chip; 5004, first-stage cylinder. DETAILED DESCRIPTION

[0030] It should be noted that, in the absence of conflict, the embodiments of the present invention and the features therein may be combined with each other.

[0031] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, features defined as "first", "second", etc. may explicitly or implicitly include one or more of the features. In the description of the present invention, unless otherwise specified, "multiple" means two or more.

[0032] In the description of the present invention, it should be noted that, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "connected" should be understood in a broad sense. For example, they may refer to fixed connections, detachable connections, or integral connections; mechanical connections or electrical connections; direct connections or indirect connections through an intermediate medium; and internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in the present invention based on specific circumstances.

[0033] The present invention will be described in detail below with reference to the accompanying drawings and in conjunction with embodiments.

[0034] like Figures 1 to 5 As shown, a refrigerant test head includes a test head body 10, a flow channel structure 20, a refrigerant tube insulation shell 30 and a test fixture structure 40; the test head body 10 is installed on the top of the test fixture structure 40, and the flow channel structure 20 is installed inside the test head body 10. One end of the flow channel structure 20 is located outside the test head body 10 and is sleeved with the refrigerant tube insulation shell 30. Test components are installed above the test head body 10 and below the test fixture structure 40.

[0035] The technical effect of the present invention is that high-power suppression is achieved by adopting refrigerant cooling, and the dry air curtain can prevent condensation on the refrigerant test head. The structural setting of this test head also has no strict requirements on the equipment environment humidity; and when the refrigerant leaks, there will be a pressure monitoring alarm, which can remind the staff to check in time, and the leakage will not cause damage to the test system, further improving the practicality of this application.

[0036] In a preferred embodiment of the present invention, the test head body 10 includes a guide column 1001, a flow channel insulation shell 1002, an airbag core 1003, a ball bushing 1004, a top screw 1005, a bushing pressure plate 1006, a dry gas joint 1007, an airbag joint 1008, a test head base plate 1009 and a hook 1010. A guide column 1001 is installed at each of the four corners of the bottom of the flow channel insulation shell 1002, and a test head base plate 1009 is installed on the top of the flow channel insulation shell 1002. The flow channel insulation shell 1002 and the test head base plate 1009 are connected by four ball bushings 1004. Two ball bushings 1004 form a group, and two The groups of ball bushings 1004 are arranged in parallel, and a bushing pressure plate 1006 is installed between each group of ball bushings 1004. The airbag core 1003 is installed at the top center of the flow channel insulation shell 1002. A dry gas joint 1007 is installed on the left and right sides of the test head base plate 1009, and an airbag air joint 1008 is installed on one side of the dry gas joint 1007. A hook 1010 is installed on the front and back sides of the test head base plate 1009, and a top screw 1005 is installed at the four corners of the test head base plate 1009. The flow channel structure 20, the flow channel insulation shell 1002, the airbag core 1003, the ball bushing 1004, and the bushing pressure plate 1006 form an integrated structure. The test head body 10 also includes an airbag body 1012. The flow channel insulation shell 1002 is made of high- and low-temperature-resistant engineering plastic. The bottom of the test head base plate 1009 is hollowed out to form the airbag body 1012. When the airbag air connector 1008 is inflated, the flow channel structure 20 can slide up and down along the guide post. The test head body 10 also includes a test head insulation shell 1011 and a dry gas path cover plate. The dry gas path cover plate is also installed at the bottom of the test head base plate 1009. The dry gas path cover plate has an air flow channel below it. The test head base plate 1009 also has multiple dry gas outlet holes 1014. The test head insulation shell 1011 is installed outside the flow channel insulation shell 1002. In this embodiment, the test head body 10 can carry test components and also provide insulation for the flow channel structure 20.

[0037] In a preferred embodiment of the present invention, the flow channel structure 20 includes a flow channel body 2001, a refrigerant tube body 2002, and a refrigerant tube connector 2003. The flow channel body 2001, the refrigerant tube body 2002, and the refrigerant tube connector 2003 are connected to form an integrated flow channel structure 20 by welding. The refrigerant tube connector 2003 is connected to the refrigerant-type refrigerator via an external pipe, and the system pressure is monitored. In actual use, the cooling capacity of the refrigerant-type refrigerator can be used to cool the refrigerant test head through the flow channel structure 20, and the setting of the flow channel body 2001 can also reduce the overall weight of the test head, which is highly practical.

[0038] In a preferred embodiment of the present invention, the refrigerant tube insulation shell 30 includes a lower insulation shell cover 3001, an upper insulation shell cover 3002, a connecting plate 3003, a dry gas manifold block 3004, and a gas connector body 3005. The lower insulation shell cover 3001 and the upper insulation shell cover 3002 form an insulation shell structure through the connecting plate 3003. The dry gas manifold block 3004 is mounted on the top of the insulation shell structure, and the gas connector body 3005 is provided on one side of the dry gas manifold block 3004. In this embodiment, the configuration of the refrigerant tube insulation shell 30 can insulate the refrigerant tube body 2002 of the flow channel structure 20, further improving the cooling effect of the refrigerant-type refrigerator.

[0039] In a preferred embodiment of the present invention, the test head body 10 further includes a fixture connecting plate 1015, a heat conducting plate 1016 and a heating plate 1017. The test fixture structure 40 includes a secondary test fixture 4001, a temperature sensor 4002 and a primary test fixture 4003. The fixture connecting plate 1015 is installed on the flow channel structure 20. The fixture connecting plate 1015 has multiple groups of fixing holes adapted to different test fixtures. The secondary test fixture 4001 is installed on the fixture connecting plate 1015 by bolts. A heat conducting plate 1016 and a heating plate 1017 are installed between the secondary test fixture 4001 and the fixture connecting plate 1015. The temperature sensor 4002 is arranged in the center of the secondary test fixture 4001, and the primary test fixture 4003 is installed on the guide column. The test assembly includes a test socket 5001, a spring pin 5002, and a first-stage cylinder 5004. The spring pin 5002 is positioned within the test socket 5001. During the test process, the test head presses the chip 5003 into the test socket 5001, causing the chip 5003 to contact the spring pin 5002. The test head body 10 is mounted on the first-stage cylinder 5004 via a hook 1010. The first-stage cylinder 5004 is mounted to the first-stage test fixture 4003 via a guide post. The first-stage test fixture 4003 contacts the outer ring of the chip 5003. In this embodiment, when the second-stage test fixture 4001 of the test fixture structure 40 contacts the die of the chip 5003, the pressure applied to the die of the chip 5003 is adjusted by controlling the pressure of the airbag body 1012, preventing damage to the die due to excessive pressure. This ensures that the second-stage test fixture 4001 is in close contact with the die of the chip 5003, thereby balancing the heat condensed in the die during operation of the chip 5003.

[0040] Example 1

[0041] like Figure 1As shown, the test head consists of a test head body 10, a flow channel structure 20, a refrigerant tube insulation shell 30, and a test fixture structure 40, wherein the refrigerant tube insulation shell 30 includes an insulation shell lower cover 3001, an insulation shell upper cover 3002, a connecting plate 3003, a dry gas manifold block 3004 and a gas joint body 3005. The insulation shell lower cover 3001 and the insulation shell upper cover 3002 form an insulation shell structure through the connecting plate 3003, and a dry gas manifold block 3004 is installed on the top of the insulation shell structure, and a gas joint body 3005 is provided on one side of the dry gas manifold block 3004.

[0042] like Figure 2 As shown, the flow channel body 2001, the refrigerant pipe body 2002, and the refrigerant pipe joint 2003 are connected to form an integrated flow channel structure 20 by welding. The area of ​​the flow channel body 2001 where there is no refrigerant flow channel is hollowed out to reduce the overall weight of the test head. The refrigerant pipe joint 2003 is finally connected to a refrigerant-type refrigerator (not shown in this figure) through other pipes. The refrigerator is used to cool the refrigerant test head and monitor the system pressure. The flow channel structure 20 is integrated with the flow channel insulation shell 1002, the airbag core 1003, the ball bushing 1004, and the bushing pressure plate 1006. The flow channel insulation shell 1002 is an engineering plastic that is resistant to high and low temperatures. It can insulate the flow channel structure 20 and prevent the ball bushing 1004 and the airbag core 1003 from being too low in temperature, resulting in functional failure. It also prevents the low temperature from radiating outward to a certain extent, and prevents the temperature of other peripheral devices from being too low, resulting in condensation. Guide post 1001 passes through ball bushing 1004 and connects to test head base plate 1009. A flat portion on guide post 1001, coupled with a set screw 1005 on test head base plate 1009, prevents the guide post from slipping during installation and ensures consistent orientation after installation. The back of test head base plate 1009 is hollowed out to form the airbag body 1012. When the airbag air connector 1008 is inflated, the flow channel structure 20 can slide up and down along the guide post 1001.

[0043] like Figure 3 As shown, a drying gas cover plate 1013 is provided on the reverse side of the test head substrate 1009, and a gas flow channel is provided underneath the cover plate. When drying gas is introduced through the drying gas connector 1007, it is ultimately discharged from the drying gas outlet holes 1014. There are two drying gas connectors 1007 in total, and a total of eight drying gas outlet holes 1014 can be used to discharge drying gas. When the test head insulation housing 1011 is connected to the test head substrate 1009, the exhaust from the eight drying gas outlet holes 1014 forms a circular downward air curtain, which can prevent condensation on the test head.

[0044] like Figure 4As shown, the fixture connecting plate 1015 is installed on the flow channel structure 20. There are multiple sets of fixed holes on the fixture connecting plate to adapt to different test fixtures. The secondary test fixture 4001 is installed on the fixture connecting plate 1015 by bolts, with a heating plate 1017 and a heat conducting plate 1016 sandwiched in the middle. The heating plate 1017 can be heated to balance the coldness of the refrigerant. The temperature sensor 4002 is arranged in the center of the secondary test fixture. The heat conducting plate 1016 is a flexible heat-conducting material that can fill the gap between the workpieces and increase the temperature transmission efficiency. The primary test fixture 4003 is installed on the guide column 1001.

[0045] like Figure 5 As shown, chip 5003 is a bare die chip (bare die), and spring pins 5002 are arranged in the test socket 5001. The test process is that the test head presses the chip 5003 into the test socket 5001, and the chip 5003 contacts the spring pins 5002, and then completes a series of electrical tests. The chip 5003 generates heat during operation. At this time, the test head is needed to balance the heat and control the chip 5003 at a set temperature; the test head is installed in the first-level cylinder 5004 through the hook 1010, and the first-level cylinder 5004 is installed together with the first-level test fixture 4003 through the guide column 1001. The first-level test fixture 4003 contacts the outer ring of the chip 5003. The air pressure of the cylinder 5004 can be controlled by adjusting the air pressure of the cylinder 5004 to act on the outer ring of the chip 5003, providing the main pressure for chip testing. Figure 2 Figure 4 In the description, the secondary test fixture 4001 is installed on the flow channel structure 20, and the flow channel structure 20 can slide up and down along the guide column. The secondary test fixture 4001 contacts the die of the chip 5003, and then adjusts the pressure acting on the die on the chip 5003 by controlling the pressure of the airbag body 1012 to prevent excessive pressure from damaging the die. At the same time, it can ensure that the secondary test fixture 4001 is tightly fitted with the die on the chip 5003, which is conducive to temperature conductivity.

[0046] Furthermore, in the flow channel 20 system, temperature control is achieved by combining the cooling effect of the refrigerator's refrigerant with the heating effect of the heater plate 1017, which work together to achieve a predetermined stable dynamic balance. During the testing phase, when the chip 5003 generates heat, the heater plate 1017 adjusts the heat output to maintain a dynamic balance within a preset temperature range. This refrigerant-based cooling method delivers a large cooling capacity and achieves a high dynamic balance value in the initial stage, making it suitable for controlling the temperature of high-power chips.

[0047] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A refrigerant test head, characterized in that: It includes a test head body, a flow channel structure, a refrigerant pipe insulation shell and a test fixture structure; the test head body is installed on the top of the test fixture structure, the flow channel structure is installed inside the test head body, one end of the flow channel structure is located outside the test head body and is sleeved with a refrigerant pipe insulation shell, and test components are installed above the test head body and below the test fixture structure.

2. A refrigerant type test head according to claim 1, characterized in that: The test head body includes a guide column, a flow channel insulation shell, an airbag core, a ball bushing, a top screw, a bushing pressure plate, a dry gas joint, an airbag joint, a test head substrate and a hook. A guide column is respectively installed at the four corners of the bottom of the flow channel insulation shell, and the test head substrate is installed on the top of the flow channel insulation shell. The flow channel insulation shell and the test head substrate are connected by four ball bushings. Two ball bushings form a group. The two groups of ball bushings are arranged in parallel. A bushing pressure plate is respectively installed between each group of ball bushings. The airbag core is installed at the center of the top of the flow channel insulation shell, and a dry gas joint is respectively installed on the left and right sides of the test head substrate. The airbag joint is installed on one side of the dry gas joint. A hook is respectively installed on the front and back sides of the test head substrate. A top screw is respectively installed at the four corners of the test head substrate. The flow channel structure and the flow channel insulation shell, the airbag core, the ball bushing and the bushing pressure plate form an integrated structure.

3. A refrigerant type test head according to claim 1, characterized in that: The flow channel structure includes a flow channel body, a refrigerant pipe body and a refrigerant pipe joint. The flow channel body, the refrigerant pipe body and the refrigerant pipe joint are connected into an integrated flow channel structure by welding, and the refrigerant pipe joint is connected to the refrigerant refrigerator through an external pipeline.

4. A refrigerant type test head according to claim 3, characterized in that: The test head body also includes an airbag body. The flow channel insulation shell is made of high and low temperature resistant engineering plastics. The bottom of the test head substrate is hollowed out to form the airbag body. When the airbag air joint is inflated, the flow channel structure can slide up and down along the guide column.

5. The refrigerant type test head according to claim 1, characterized in that: The test head body also includes a test head insulation shell and a dry gas path cover plate. A dry gas path cover plate is also installed at the bottom of the test head substrate. There is an air path flow channel under the dry gas path cover plate. The test head substrate is also provided with multiple dry gas outlet holes. A test head insulation shell is provided outside the flow channel insulation shell.

6. The refrigerant type test head according to claim 1, characterized in that: The test head body also includes a fixture connecting plate, a heat conducting plate and a heating plate. The test fixture structure includes a secondary test fixture, a temperature sensor and a primary test fixture. The fixture connecting plate is installed on the flow channel structure. There are multiple groups of fixed holes on the fixture connecting plate to adapt to different test fixtures. The secondary test fixture is installed on the fixture connecting plate by bolts. A heat conducting plate and a heating plate are installed between the secondary test fixture and the fixture connecting plate. The temperature sensor is arranged at the center of the secondary test fixture, and the primary test fixture is installed on the guide column.

7. The refrigerant type test head according to claim 1, characterized in that: The refrigerant pipe insulation shell includes an insulation shell lower cover, an insulation shell upper cover, a connecting plate, a dry gas manifold block and a gas joint body. The insulation shell lower cover and the insulation shell upper cover form an insulation shell structure through the connecting plate. A dry gas manifold block is installed on the top of the insulation shell structure, and a gas joint body is provided on one side of the dry gas manifold block.

8. The refrigerant type test head according to claim 1, characterized in that: The test assembly includes a test socket, a spring pin and a first-level cylinder. The spring pin is arranged in the test socket. The test process is that the test head presses the chip into the test socket, the chip contacts the spring pin, the test head body is installed on the first-level cylinder through a hook, the first-level cylinder is installed together with the first-level test fixture through a guide column, and the first-level test fixture contacts the outer ring of the chip.

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