Neutron energy spectrum on-line measurement moderator and neutron energy spectrum on-line measurement system

Abstract

The invention relates to a moderator for neutron energy spectrum online measurement and a measurement system, and the moderator comprises a housing and a cylindrical moderator. The columnar moderation body is arranged in the shell and comprises a plurality of column sections; except the end face of the column section close to the neutron inlet on the shell, the end face of each of the other column sections is provided with an accommodating recess for accommodating a detector, and the thicknesses of the column sections are the same or different. The accommodating concave parts are sequentially arranged along the direction from approaching to leaving from the neutron inlet; and the inlet is arranged opposite to the position of the accommodating concave part. According to the invention, the columnar moderation body comprises a plurality of column sections, and a plurality of detectors are arranged at the same time, so that neutron energy spectrums of different energies can be detected, the duration of measurement is reduced based on one-time measurement of the neutron energy spectrums of different energies, and the measurement process is simpler; the response function coverage range of the neutron detector is larger, and the measurement result is more accurate; a plurality of column sections with the same or different thicknesses form the columnar slowing-down body, so that the columnar slowing-down body can meet different use requirements and is convenient to disassemble.

Description

Technical Field

[0001] The present invention relates to the technical field of neutron energy spectrum measurement, and in particular to a moderator and a measurement system for online measurement of neutron energy spectrum. Background Art

[0002] Boron Neutron Capture Therapy (BNCT) is an emerging and rapidly developing tumor treatment method. It has attracted widespread attention due to its targeted treatment characteristics. BNCT is suitable for various malignant primary brain tumors, melanoma, head and neck tumors and other cancers. Especially for patients with brain tumors, BNCT therapy has epoch-making significance. At present, BNCT has great development prospects worldwide, and BNCT based on high-flux wide-spectrum neutron sources has become a research hotspot in the field. The measurement of neutron energy spectrum is directly related to the analysis of BNCT technical parameters (such as irradiation treatment time, prescription dose, neutron irradiation dose, etc.), and is closely related to the formulation of treatment plans. Therefore, accurate measurement of neutron energy spectrum is crucial for evaluating the quality of BNCT neutron sources and accurately formulating medical plans.

[0003] At present, the methods widely used to measure the neutron energy spectrum of BNCT radiation field are mainly multi-foil activation method and multi-sphere spectrometer method. However, the measurement equipment using these two methods has complicated operation procedures during the measurement process, and irradiation, measurement and analysis all require a long time, and the measurement accuracy is generally low; among them, the multi-sphere spectrometer needs to replace the moderator ball in sequence during the measurement process, that is, it is necessary to measure and record the measurement results many times before it can be measured, so it is impossible to achieve online measurement; the activation foil method must use a high-purity germanium detector to measure the yield after neutron irradiation before the energy spectrum can be calculated, so it is impossible to complete online measurement. Therefore, there is an urgent need for a BNCT radiation field neutron energy spectrum measurement device that is simple to operate, has high measurement accuracy, short measurement time, and can obtain a complete energy spectrum with only a single measurement. The above problems need to be solved urgently. Summary of the invention

[0004] The invention discloses a moderator and a measuring system for online measurement of neutron energy spectrum, aiming to solve the technical problems existing in the prior art.

[0005] The present invention adopts the following technical solutions:

[0006] In one aspect, the present invention provides a moderator for online measurement of neutron energy spectrum, the moderator comprising a shell and a columnar moderator; the columnar moderator is arranged in the shell and comprises a plurality of column segments; except for the end face of the column segment adjacent to the neutron inlet on the shell, the end face of each of the other column segments has a accommodating recess for accommodating a detector, and the thickness of each of the column segments is the same or different; the accommodating recesses are arranged in sequence from close to to away from the neutron inlet; the inlet is arranged at a position directly opposite to the accommodating recess.

[0007] In the moderator for online measurement of neutron energy spectrum of the present invention, the columnar moderator is a cylindrical structure with a length of 30-40 cm and a diameter of 10-20 cm.

[0008] In the moderator for online measurement of neutron energy spectrum of the present invention, the length of the columnar moderator is 35 cm and the diameter is 20 cm.

[0009] In the moderator for online measurement of neutron energy spectrum of the present invention, the distance between each of the accommodating recesses and the end face of the columnar moderator along the direction from close to the inlet to away from the inlet is 0.2 cm to 24 cm; or 0.2 cm to 20 cm.

[0010] In the moderator for online measurement of neutron energy spectrum of the present invention, the inner wall of the shell is provided with a limiting groove; each column segment is provided with a limiting convex portion; the limiting groove can accommodate the limiting convex portion to limit the circumferential rotation of the column segment.

[0011] In the moderator for online measurement of neutron energy spectrum of the present invention, the columnar moderator is a cylinder; the limiting groove extends along the axial direction of the columnar moderator.

[0012] In the moderator for online measurement of neutron energy spectrum of the present invention, a lead wire groove is provided on the surface of the column section on the same side as the accommodating recess and on the side of the column section; the lead wire grooves on the sides of the plurality of column sections are interconnected; and a lead wire outlet is provided on the surface of the shell opposite to the inlet.

[0013] In the moderator for online measurement of neutron energy spectrum of the present invention, the columnar moderator is a cylinder, and each of the accommodating recesses and the inlet are located on the axis.

[0014] In the moderator for online measurement of neutron energy spectrum of the present invention, the shell includes a shell body, a cover body, a handle and a leg; the shell body is a cylindrical structure with an opening on one side; the cover body is arranged on the open side of the shell body and forms a space with the shell body to accommodate the columnar moderator; the handle is arranged on the side of the shell body; the leg is arranged on the side of the shell body for supporting the shell body.

[0015] In the moderator for online measurement of neutron energy spectrum of the present invention, the moderator is made of polyethylene.

[0016] In the moderator for online measurement of neutron energy spectrum of the present invention, relative rotation between the column sections is limited by the limiting holes and the limiting columns.

[0017] In a second aspect, the present invention also provides a BNCT neutron energy spectrum online measurement system based on semiconductor detectors, which includes any of the above-mentioned moderators and multiple semiconductor detectors; each of the semiconductor detectors is arranged one by one in the accommodating recess, and the data line passes through the lead groove and is led out from the lead outlet.

[0018] In the BNCT neutron spectrum online measurement system based on semiconductor detectors of the present invention, the semiconductor detector is a coated SiC semiconductor detector or a He-3 tube detector.

[0019] The technical solution adopted by the present invention can achieve the following beneficial effects:

[0020] The present invention mainly provides a moderator for online measurement of neutron energy spectrum, based on a columnar structure as the moderator, and the columnar moderator includes a plurality of column sections, and a receiving recess for receiving a detector is arranged on the column section, that is, a plurality of detectors can be arranged at the same time, and the receiving recesses are arranged in sequence from close to far from a neutron inlet, so when the detectors are installed, each detector has a different installation depth, and can detect neutron energy spectra of different energies, based on measuring neutron energy spectra of different energies at one time, the measurement time is reduced, and the measurement process is simpler; and based on being able to obtain neutron energy spectra of different energies at one time, the response function coverage range of the neutron detector is larger, and the measurement result is more accurate; and, by forming a columnar moderator with a plurality of column sections of the same or different thicknesses, the position of each receiving recess in the columnar moderator can be adjusted, so that different use requirements can be met, and disassembly is convenient. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following briefly introduces the drawings required for describing the embodiments, which constitute a part of the present invention. The exemplary embodiments of the present invention and their descriptions explain the present invention and do not constitute improper limitations on the present invention. In the drawings:

[0022] Figure 1 It is a structural schematic diagram of a moderator for online measurement of neutron energy spectrum according to the present invention;

[0023] Figure 2 It is a schematic cross-sectional structure diagram of a moderator for online measurement of neutron energy spectrum according to the present invention;

[0024] Figure 3This is a schematic diagram of the explosion structure of a moderator for online measurement of neutron energy spectrum according to the present invention;

[0025] Figure 4-1 4 are diagrams of detector energy coverage when the columnar moderator has different lengths according to the present invention;

[0026] Figure 5-1 6 are diagrams of detector energy coverage when the columnar moderator has different diameters according to the present invention;

[0027] Figure 6-1 to 2 This is a diagram of the detector energy coverage range when the accommodating recess of the present invention is located at different positions of the columnar moderator.

[0028] Description of reference numerals:

[0029] 1. Moderator; 11. Shell; 111. Neutron inlet; 112. Limiting groove; 113. Lead outlet; 114. Shell body; 115. Cover; 116. Handle; 117. Leg; 12. Column moderator; 121. Column section; 1211. Accommodating recess; 1212. Limiting hole; 122. Limiting convex part; 123. Lead groove; 123. Limiting column; 2. Semiconductor detector. DETAILED DESCRIPTION

[0030] In order to make the purpose, technical solution and advantages of the present invention clearer, the technical solution of the present invention will be clearly and completely described below in conjunction with the specific embodiments of the present invention and the corresponding drawings. In the description of the present invention, it should be noted that the term "or" is usually used in the sense of including "and / or", unless the content clearly indicates otherwise.

[0031] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or a magnetic connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal connection of two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances. In addition, in the description of this application, the terms "first", "second", etc. are only used to distinguish the description, and cannot be understood as indicating or implying relative importance. In the description of the present invention, the meaning of "multiple" is at least two, such as two, three or more, etc., unless otherwise clearly and specifically limited.

[0032] Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0033] In order to solve the problems existing in the prior art, the embodiments of the present application provide a moderator and a measurement system for online measurement of neutron energy spectrum.

[0034] Example 1

[0035] This embodiment provides a moderator for online measurement of neutron energy spectrum, such as Figure 1 , 2 As shown in Figure 3, a moderator for online measurement of neutron energy spectrum, the moderator 1 includes a shell 11 and a columnar moderator 12; the columnar moderator 12 is arranged in the shell 11, and includes a plurality of column segments 121, that is, the columnar moderator 12 is divided along a cross section perpendicular to the axis; except for the end face of the column segment 121 adjacent to the neutron inlet 111 on the shell 11, the end faces of the other column segments 121 are provided with a receiving recess 1211 for receiving the detector, that is, the end face close to the neutron inlet 111 is not provided with the receiving recess 1211; and the thickness of each column segment 121 is the same or different; the receiving recesses 1211 are arranged in sequence from close to to far from the neutron inlet 111; the inlet 111 is arranged at a position directly opposite to the receiving recess 1211.

[0036] A moderator for online measurement of neutron energy spectrum of the present invention is based on a columnar structure as a moderator, and the columnar moderator 12 includes a plurality of column sections 121, and a receiving recess 1211 for receiving a detector is arranged on the column section 121, that is, a plurality of detectors can be arranged at the same time, and the receiving recess 1211 is arranged in sequence from close to far from the neutron inlet 111, so that when the detectors are installed, each detector has a different installation depth, and can detect neutron energy spectra of different energies. Based on measuring neutron energy spectra of different energies at one time, the measurement time is reduced, and the measurement process is simpler; and based on being able to obtain neutron energy spectra of different energies at one time, the response function coverage range of the neutron detector is larger, and the measurement result is more accurate; and, by forming the columnar moderator 12 with a plurality of column sections 121 of the same or different thicknesses, the position of each receiving recess 1211 in the columnar moderator 12 can be adjusted, so that different use requirements (such as different neutron radiation fields) can be applied, and disassembly is convenient.

[0037] In some preferred embodiments, the columnar moderator 12 is a cylindrical structure with a length of 30-40 cm and a diameter of 10-20 cm. Within this range, the structure of the moderator 1 is more compact, and the total range covered by the response function of the detector is maximized. Taking 10 detectors as an example (the specific number of detectors is determined according to demand), the installation depths of the detectors are distributed at 0.2 cm, 0.5 cm, 1 cm, 2 cm, 4 cm, 8 cm, 12 cm, 16 cm, 20 cm and 24 cm. For a beam spot radius of 5 cm, when the diameter of the columnar moderator 12 is 10 cm, the lengths are set to 30 cm, 35 cm, 40 cm and 45 cm respectively (for example, Figure 4-1 to Figure 4-4 ), the horizontal lines in the figure correspond to 0.2cm-24cm detectors from top to bottom), respectively. When the length of the moderator 12 is 30cm, 35cm, 40cm and 45cm, the response function of the detector covers the total range). The total range covered by the response function of the 10 detectors is not much different. Considering the overall size of the equipment, a length of 30-40cm is selected as the preferred length. At this time, the equipment is more compact and easy to operate. When 10 detectors are also set, the installation depth of each detector is distributed in 0.2cm, 0.5cm, 1cm, 2cm, When the beam spot radius is 5 cm, the length of the columnar moderator 12 is 45 cm, and the diameter is 10 cm, 12 cm, 15 cm, 18 cm, 20 cm and 25 cm respectively, as the diameter of the columnar moderator 12 increases, the maximum response value of the deeper detector (i.e., the maximum value of the vertical axis of the response matrix) is significantly improved starting from the third thermal neutron detector; and the energy coverage range between the energy region of 1×10-3MeV and 10MeV is greatly improved (such as Figure 5-1 to Figure 5-6 , the horizontal lines in the figure correspond to 0.2cm-24cm detectors from top to bottom). When the diameter of the columnar moderator 12 increases from 20cm to 25cm, this trend is already negligible; therefore, when the length of the columnar moderator 12 is 30-40cm and the diameter is 10-20cm, it can have a larger energy coverage range and a maximum response value, and the structure of the moderator 1 is more compact; based on the thermal neutrons used in the implementation of ~2×10 10 eV, therefore, the corresponding optimal size can be adjusted in the neutron radiation field with different energy spectrum characteristics.

[0038] Preferably, the length of the columnar moderator 12 is 35 cm and the diameter is 20 cm; in this case, the response function covers the largest total range, and the shielding of backscattered neutrons and the compactness are better.

[0039] In some preferred embodiments, along the direction from close to the inlet 111 to far from the inlet 111, the distances of each accommodating recess 1211 (or the end face of each column section 121 close to the neutron inlet 111) from the end face of the columnar moderator 12 close to the neutron inlet 111 are distributed in the range of 0.2 cm to 24 cm (for example, the depths are 0.2 cm, 0.5 cm, 1 cm, 2 cm, 4 cm, 8 cm, 12 cm, 16 cm, 20 cm and 24 cm, Example 1); or In the range of 0.2cm to 20cm (e.g., the depths are 0.2cm, 0.5cm, 1cm, 2cm, 3cm, 5cm, 8cm, 12cm, 16cm and 20cm, Example 2); preferably, the distances between each accommodating recess 1211 and the end surface of the columnar moderator 12 are 0.2cm, 0.5cm, 1cm, 2cm, 4cm, 8cm, 12cm, 16cm, 20cm and 24cm, respectively; in this case, the total range of the detector energy spectrum coverage is larger (e.g., Figure 6-1 and 6-2 , is the energy coverage diagram of the detectors in Example 1 and Example 2 when the beam spot radius is 5 cm, the moderator length is 45 cm, and the diameter is 20 cm; 5-2 is the energy coverage diagram of Example 2); it can be seen from the figure that under the setting conditions of Example 2, the coverage is larger, especially at 1×10 -3 MeV~1×10 -1 MeV energy region (epitothermal neutron to fast neutron energy region).

[0040] In some preferred embodiments, Figure 3 As shown, a limiting groove 112 is provided on the inner wall of the shell 11; each column section 121 is provided with a limiting protrusion 122; the limiting groove 112 can accommodate the limiting protrusion 122 to limit the circumferential rotation of the column section 121; based on this, during installation, the relative position of each column section 121 is fixed, thereby making the measurement consistency better and facilitating the installation and wiring of the detector.

[0041] In some preferred embodiments, the columnar moderator 12 is a cylinder; the limiting groove 112 extends axially along the columnar moderator 12; in this case, the moderator 1 is more compact.

[0042] In some preferred embodiments, Figure 3As shown, a lead groove 123 is provided on the surface of the column section 121 on the same side as the accommodating recess 1211 and on the side of the column section 121; the lead grooves 123 on the sides of multiple column sections 121 are connected to each other; a lead outlet 113 is provided on the surface of the shell 11 opposite to the inlet 111; based on the arrangement of the lead groove 123, it is possible to avoid the influence of the wire on the relative installation position of the column section 121, so that the adjacent column sections 121 are closely fitted, thereby ensuring the installation depth of the accommodating recess 1211, and the lead groove 123 extends to the side of the column section 121. On the one hand, the column moderator 12 is made neat and compact in structure, and on the other hand, the lead-out wire can play a limiting role to limit the rotation between the column sections 121.

[0043] In some preferred embodiments, the columnar moderator 12 is a cylinder, and each accommodating recess 1211 and the inlet 111 are located on the axis; based on this, the detector responds more evenly to neutrons from the side of the cylindrical moderator, optimizing the angular response of the detector to neutrons from the side, which is more convenient in the subsequent processing of the influence of scattered neutrons.

[0044] In some preferred embodiments, Figure 3 As shown, the shell 11 includes a shell body 114, a cover body 115, a handle 116 and a support leg 117; the shell body 114 is a cylindrical structure with an opening on one side; the cover body 115 is covered on the open side of the shell body 114, and forms a space with the shell body 114 to accommodate the columnar moderator 12; the handle 116 is arranged on the side of the shell body 114; the support leg 117 is arranged on the side of the shell body 114 for supporting the shell body 114.

[0045] In some preferred embodiments, the moderator 1 is made of polyethylene; for example, the moderator 1 has a density of 0.95 g / cm 3 Made of polyethylene.

[0046] In some preferred embodiments, Figure 1 and 2 As shown, the relative rotation between each column section 121 is limited by the limiting holes 1212 and the limiting posts 22; specifically, the limiting holes 1212 are provided on the column section 121, and the limiting posts 22 pass through each limiting hole 1212 in sequence to achieve limiting, wherein the limiting posts 22 are preferably polygonal, i.e., non-circular; or, the limiting posts 22 are circular, and a plurality of them are provided, and limiting is achieved based on the joint action of the plurality of limiting posts 22, thereby ensuring that the relative positions of each column section 121 are fixed.

[0047] Example 2

[0048] This embodiment provides a BNCT neutron spectrum online measurement system based on a semiconductor detector, such as Figure 1As shown, it includes the moderator 1 and multiple semiconductor detectors 2 in the above-mentioned embodiment 1; each semiconductor detector 2 is arranged in a corresponding manner in the accommodating recess 1211, and the data line is led out from the lead outlet 113 after passing through the lead groove 123; the design scheme of multiple semiconductor detectors 2 and a single moderator 1 can realize the simultaneous measurement of the count rate of the semiconductor detectors 2 at different depths of the moderator 1 of the target neutron energy spectrum, thereby obtaining a response spectrum. In addition, during the measurement process, the change of the radiation field can be monitored at any time, and the target neutron energy spectrum can be obtained by online spectrum decomposition based on the measured response spectrum and the corresponding matrix simulated and calculated in advance, thereby calculating the neutron dose rate online.

[0049] The BNCT neutron energy spectrum online measurement system based on semiconductor detectors of the present invention is based on a moderator 1 having a plurality of accommodating recesses 1211 for accommodating detectors, and semiconductor detectors 2 are respectively arranged in each accommodating recess 1211, each semiconductor detector 2 has a different installation depth, and can detect neutron energy spectra of different energies at one time, without disassembling the moderator 1, thereby reducing the measurement time, making the measurement process simpler, realizing online measurement, and being safer; and making the response function of the neutron detector cover a wider range and the measurement result more accurate. By selecting column sections 121 of different materials and sizes to adjust the moderation effect and corresponding energy spectrum of the neutron spectrometer, it is suitable for different neutron radiation fields. In addition, the detector type can also be replaced according to the neutron flux. For example, when the neutron source intensity is low, the semiconductor detector can be replaced with a He-3 tube to improve the overall detection efficiency.

[0050] In some preferred embodiments, the semiconductor detector 2 is a coated SiC semiconductor detector (such as an aluminum oxide coating coated on the surface of the detector depletion region, with a thickness of 500um) or a He-3 tube detector; since the semiconductor detector 2 is small in size, it has poor response to photons and does not require additional n-γ discrimination means, which can simplify the circuit design, and when the neutron source intensity is low, the semiconductor detector can be replaced with a He-3 tube to improve the overall detection efficiency; other forms of detectors can also be selected, depending on the specific working conditions.

[0051] The method of using the measurement system of the present invention is as follows:

[0052] After the ten semiconductor detectors 2 are numbered, they are installed in the receiving recess 1211, and then the column section 121 is installed in the shell body 114, and the cover 115 is sealed, and the response matrix of the spectrometer is calculated using Monte Carlo simulation software. The neutron inlet 111 of the assembled moderator 1 is placed at the BNCT beam outlet for irradiation, and after each semiconductor detector 2 measures the neutron signal, it is read and stored in the host computer through the signal processing module and the communication module; the response spectrum obtained by the experiment and the response matrix obtained by calculation are used for spectrum decomposition calculation; the calculated inversion energy spectrum can be used to calculate the neutron dose rate, and the neutron injection-dose conversion coefficient at different energies is convolved with the neutron energy spectrum to obtain the calculation result of the neutron dose rate; specifically, the response matrix calculation, response spectrum and spectrum decomposition calculation can be performed with reference to the relevant existing technology.

[0053] The embodiments of the present invention are described above in conjunction with the accompanying drawings, but the present invention is not limited to the above-mentioned specific implementation modes, which are merely illustrative rather than restrictive. Under the guidance of the present invention, ordinary technicians in this field can also make many forms without departing from the scope of protection of the present invention and the claims, all of which are within the protection of the present invention.

Claims

1. A moderator for online measurement of neutron energy spectrum, characterized in that: The moderator includes a shell and a columnar moderator; The columnar moderator is disposed in the shell and includes a plurality of column segments; Except for the column segment end face adjacent to the neutron inlet on the shell, the end faces of the remaining column segments are provided with a receiving recess for receiving the detector, and the thickness of each column segment is the same or different; The accommodating recesses are arranged in sequence from close to to far from the neutron inlet; The inlet is arranged opposite to the accommodating recess.

2. The moderator for online measurement of neutron energy spectrum according to claim 1, characterized in that: The columnar moderator is a cylindrical structure with a length of 30-40 cm and a diameter of 10-20 cm.

3. The moderator for online measurement of neutron energy spectrum according to claim 2, characterized in that: The columnar moderator has a length of 35 cm and a diameter of 20 cm.

4. The moderator for online measurement of neutron energy spectrum according to claim 1, characterized in that: Along the direction from close to the inlet to away from the inlet, the distance between each of the accommodating recesses and the end surface of the columnar moderator is 0.2 cm to 24 cm; or, 0.2 cm to 20 cm.

5. The moderator for online measurement of neutron energy spectrum according to claim 1, characterized in that: The inner wall of the shell is provided with a limiting groove; each column section is provided with a limiting convex portion; the limiting groove can accommodate the limiting convex portion to limit the circumferential rotation of the column section.

6. The moderator for online measurement of neutron energy spectrum according to claim 1, characterized in that: The columnar moderator is a cylinder; the limiting groove extends axially along the columnar moderator.

7. The moderator for online measurement of neutron energy spectrum according to claim 1, characterized in that: The surface of the column section on the same side as the accommodating recess and the side of the column section are provided with lead wire grooves; the lead wire grooves on the side of the column section are interconnected; and the surface of the shell opposite to the inlet is provided with a lead wire outlet.

8. The moderator for online measurement of neutron energy spectrum according to claim 1, characterized in that: The columnar moderator is a cylinder, and each of the accommodating recesses and the inlet are located on an axis.

9. The moderator for online measurement of neutron energy spectrum according to claim 1, characterized in that: The housing comprises a housing body, a cover body, a handle and legs; The shell body is a cylindrical structure with an opening on one side; The cover body is disposed on the opening side of the shell body and forms a space for accommodating the columnar moderator together with the shell body; The handle is arranged on the side of the shell body; The supporting legs are arranged on the side surfaces of the shell body and are used to support the shell body.

10. The moderator for online measurement of neutron energy spectrum according to claim 1, characterized in that: The moderator is made of polyethylene.

11. The moderator for online measurement of neutron energy spectrum according to claim 1, characterized in that: The relative rotation between the column sections is limited by the limiting holes and the limiting columns.

12. A BNCT neutron spectrum online measurement system based on semiconductor detectors, characterized in that: A method of manufacturing a semiconductor device comprising a moderator as claimed in any one of claims 1 to 9 and a plurality of semiconductor detectors; The semiconductor detectors are arranged in the accommodating recesses in a one-to-one correspondence, and the data lines are led out from the lead outlets after passing through the lead grooves.

13. The BNCT neutron spectrum online measurement system based on semiconductor detector according to claim 12, characterized in that: The semiconductor detector is a coated SiC semiconductor detector or a He-3 tube detector.

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